A MEMS acceleration sensor testing system and testing method

Abstract

The application discloses a kind of test device and test method of MEMS acceleration sensor, for solving the problem that MEMS acceleration sensor test procedure is fixed, different test procedures are difficult to coordinate common work. The application is configured by automatic control module according to the need independent calibration test procedure flow, and the corresponding equipment is automatically called according to test procedure flow configuration to carry out the automatic test of MEMS acceleration sensor, so as to greatly reduce manual intervention, improve test efficiency.

Description

Technical Field

[0001] This invention relates to the field of MEMS sensor technology, and in particular to a MEMS accelerometer testing system and testing method. Background Technology

[0002] With the rapid development of microelectronics and inertial navigation technologies, accelerometers, as core components of inertial measurement systems, are widely used in aerospace, automotive electronics, consumer electronics, industrial control, and other fields. Their measurement accuracy, stability, and reliability directly determine the overall performance of the terminal equipment. Therefore, comprehensive, accurate, and efficient testing of accelerometers is a crucial step in ensuring product quality and meeting the application needs of various fields.

[0003] Currently, accelerometer testing mainly encompasses several core processes, including calibration, high and low temperature environment testing, attitude testing, and stability testing. Different specifications and models of accelerometers, as well as testing requirements in different application scenarios, exhibit significant differences in the requirements for testing steps, equipment parameters, and process sequences. Existing accelerometer testing systems are mostly customized designs, with numerous limitations that make them difficult to adapt to diverse testing needs. Existing testing systems often employ fixed testing process designs, with pre-set testing steps and equipment operating parameters, making them unable to flexibly adjust according to changes in accelerometer specifications and testing scenarios, resulting in extremely poor adaptability. For different types of accelerometers, separate testing environments need to be built, equipment parameters debugged, and testing procedures edited, which not only increases the investment cost of testing equipment but also leads to low testing efficiency, making it difficult to meet the needs of mass production and multi-specification testing. Furthermore, traditional testing systems lack unified automated scheduling and process integration capabilities. Each testing process must be performed independently, requiring operators to manually switch testing processes and adjust equipment parameters. This not only increases the intensity of manual operations but also easily leads to problems such as process connection errors and parameter setting errors due to manual intervention, affecting the accuracy and consistency of test data.

[0004] Against this backdrop, there is an urgent need for a testing system that can customize the testing process, support multi-process collaborative work and automated execution, and address the prominent problems of fixed testing procedures and difficulties in coordinating different testing procedures in existing accelerometer testing systems, which result in excessive manual intervention and low testing efficiency. This system aims to overcome the shortcomings of existing technologies and meet the needs of various testing scenarios for MEMS accelerometers. Summary of the Invention

[0005] This invention provides a MEMS accelerometer testing system and method to solve the problem of fixed testing procedures and difficulty in coordinating different testing programs, thereby reducing manual intervention and improving testing efficiency.

[0006] This invention provides a MEMS accelerometer testing system, including: a host computer, a multi-channel power supply, a temperature chamber, a turntable, and a data acquisition board; the host computer, multi-channel power supply, temperature chamber, turntable, and data acquisition board are all connected to a unified communication network to establish a communication connection and realize data interaction and command transmission; The multi-channel power supply is connected to the acquisition board via power cables to power each MEMS accelerometer under test in the acquisition board; the turntable is embedded inside the temperature chamber, the MEMS accelerometer under test is mounted on the acquisition board, and the acquisition board is fixedly mounted on the turntable; the acquisition board collects the test data of each MEMS accelerometer and feeds it back to the host computer for testing; The host computer includes a power control module, a temperature chamber control module, a turntable control module, a data acquisition board control module, and an automation control module. The automation control module is connected to the power control module, temperature chamber control module, turntable control module, and data acquisition board control module, respectively. It calibrates the process flow configuration required for testing and issues corresponding control commands to each control module according to the process flow configuration. The power control module is connected to the multi-channel power supply and issues control commands to enable the multi-channel power supply to provide the corresponding power in each channel. The temperature chamber control module is connected to the temperature chamber and issues control commands to enable the temperature chamber to provide the corresponding temperature environment. The turntable control module is connected to the turntable and issues control commands to enable the turntable to provide the corresponding operating mode. The data acquisition board control module is connected to the data acquisition board and issues control commands to enable the data acquisition board to acquire data according to the corresponding acquisition mode.

[0007] In a preferred embodiment, the host computer also includes a display module, which centrally displays the operating information of each control module and its corresponding device.

[0008] In a preferred embodiment, the power control module monitors the actual power supply data of each channel of the multi-channel power supply in real time. When the monitored data exceeds a preset threshold or an anomaly occurs, the multi-channel power supply is instructed to shut down the corresponding abnormal channel.

[0009] In a preferred embodiment, the control commands issued by the power control module include the voltage and current limiting parameters of each channel.

[0010] In a preferred embodiment, the control commands issued by the temperature chamber control module include instructions on the temperature chamber's running time, temperature, and operating mode. The operating modes of the temperature chamber include setpoint operation, stop operation, and program operation.

[0011] In a preferred embodiment, the turntable control module issues control commands to enable the turntable to provide corresponding operating modes, including position mode, speed mode, stop operation, and program operation.

[0012] In a preferred implementation, the acquisition board control module issues control commands to instruct the acquisition board to acquire data according to the corresponding acquisition mode, which includes sampling frequency, data average, and data name.

[0013] In a preferred embodiment, the automation control module further includes a test program storage module, which stores the test programs set by the automation control module and responds to calls from the automation control module.

[0014] The testing system of this invention uses an automated control module to autonomously calibrate the test program configuration as needed, and automatically calls the corresponding equipment for automated testing according to the test program configuration. This solves the problem of fixed testing procedures for MEMS accelerometers and the difficulty in coordinating different test programs, thereby reducing manual intervention and improving testing efficiency.

[0015] This invention also provides a testing method for a MEMS accelerometer, characterized in that: Step 1: Configure the process flow required for the calibration test of the automated control module, including: start time, called equipment, and test parameters of the called equipment; Step 2: The automation control module sends the process configurations for each process to the corresponding power control module, temperature chamber control module, turntable control module, and data acquisition board control module. Step 3: Each control module performs tests according to the requirements of the process flow configuration for each step; Step 4: The data acquisition board collects test data from each MEMS accelerometer sensor and feeds it back to the host computer for test data detection.

[0016] In a preferred embodiment, step 3 further includes the power control module monitoring the actual power supply data of each channel of the multi-channel power supply in real time, and instructing the multi-channel power supply to shut down the corresponding abnormal channel when the monitored data exceeds a preset threshold or an abnormality occurs.

[0017] In a preferred embodiment, when configuring the process flow required for the calibration test of the automated control module, after determining the equipment to be called, the test parameters of the called equipment can only be determined from the test parameters dedicated to that equipment.

[0018] The testing method of this invention solves the problem of fixed testing procedures and difficulty in coordinating different testing programs by automatically calibrating the testing process flow configuration as needed and automatically calling the corresponding equipment for automated testing according to the testing process flow configuration. This reduces manual intervention and improves testing efficiency. Attached Figure Description

[0019] Figure 1This is the testing system for the MEMS accelerometer sensor according to Embodiment 1 of the present invention; Figure 2 This is a testing method for the MEMS accelerometer sensor according to Embodiment 2 of the present invention. Detailed Implementation

[0020] The following is in conjunction with the appendix Figure 1 The specific implementation of a test system for a MEMS accelerometer provided in Embodiment 1 of the present invention will be described in detail.

[0021] The present invention provides a testing system for a MEMS accelerometer, comprising: a host computer, a multi-channel power supply, a temperature chamber, a turntable, and a data acquisition board; the host computer, the multi-channel power supply, the temperature chamber, the turntable, and the data acquisition board are all connected to a unified communication network to establish a communication connection and realize data interaction and command transmission; The multi-channel power supply is connected to the acquisition board via power cables to power each MEMS accelerometer under test in the acquisition board; the turntable is embedded inside the temperature chamber, the MEMS accelerometer under test is mounted on the acquisition board, and the acquisition board is fixedly mounted on the turntable; the acquisition board collects the test data of each MEMS accelerometer and feeds it back to the host computer for testing; The host computer includes a power control module, a temperature chamber control module, a turntable control module, a data acquisition board control module, and an automation control module. The automation control module is connected to the power control module, temperature chamber control module, turntable control module, and data acquisition board control module, respectively. It calibrates the process flow configuration required for testing and issues corresponding control commands to each control module according to the process flow configuration. The power control module is connected to the multi-channel power supply and issues control commands to enable the multi-channel power supply to provide the corresponding power in each channel. The temperature chamber control module is connected to the temperature chamber and issues control commands to enable the temperature chamber to provide the corresponding temperature environment. The turntable control module is connected to the turntable and issues control commands to enable the turntable to provide the corresponding operating mode. The data acquisition board control module is connected to the data acquisition board and issues control commands to enable the data acquisition board to acquire data according to the corresponding acquisition mode.

[0022] Specifically, the overall architecture of the testing system consists of six major components: a host computer, a communication network, a multi-channel power supply, a temperature chamber, a turntable, and a data acquisition board. These components work together to automate the testing of MEMS accelerometer sensors. The specific working relationships between the devices are as follows: The host computer connects to the communication network via a LAN port. The communication network establishes stable communication connections with the LAN ports of the multi-channel power supply, the turntable, the temperature chamber, and the data acquisition board via network cables, enabling data interaction and command transmission. The multi-channel power supply connects to the data acquisition board containing the MEMS accelerometer under test via power cables, providing stable and precise power to each MEMS accelerometer on the board, ensuring its normal operation during testing. The turntable is embedded inside the temperature chamber, and the accelerometer test mount is installed on the data acquisition board. The data acquisition board is fixedly mounted on the turntable surface embedded in the temperature chamber, ensuring that the accelerometer remains in the preset temperature field environment and attitude state during testing, guaranteeing the stability and consistency of the testing conditions.

[0023] The host computer includes a power control module, a temperature chamber control module, a turntable control module, a data acquisition board control module, an automation control module, and a display module. Each control module can operate independently, meeting the needs of individual debugging and calibration scenarios; simultaneously, unified and coordinated control can be achieved through the automation control module, realizing fully automated testing. The automation control module is the core carrier of the process customization function, and the specific functions and collaborative logic of each control module are as follows: The power control module establishes a bidirectional connection with the multi-channel power supply through a communication network. It can input the voltage and current limiting parameters of each channel through the host computer interface to control the switching status of the corresponding channel of the multi-channel power supply. At the same time, the module monitors the actual current and voltage data of each channel of the multi-channel power supply in real time. When the monitored data exceeds the preset threshold or an abnormality occurs, it can immediately trigger the multi-channel power supply to shut down the corresponding abnormal channel to avoid damage to the MEMS accelerometer and test equipment caused by abnormal power supply, and ensure the safety and reliability of the test process. The temperature chamber control module establishes a bidirectional connection with the temperature chamber via a communication network. Users can input the required running time, temperature parameters, and temperature chamber operating mode through a host computer interface. The operating modes include setpoint operation, program operation, and stop operation, adapting to the temperature field requirements of different testing scenarios. This module simultaneously monitors the temperature chamber's operating status in real time, displaying the set temperature, actual temperature, and temperature change curves for intuitive understanding of temperature field changes. If program operation mode is selected, the module can also display the program's progress in real time, including the current step number, the end step number, the single-step running time, and the total running time, enabling visualized control of the testing process.

[0024] The turntable control module establishes a bidirectional connection with the turntable through a communication network, and can control the turntable to achieve multiple operating modes, including position mode, speed mode, stop operation, and program operation. In the corresponding mode, parameters such as position, speed, acceleration, and program number can be input through the host computer interface to achieve precise adjustment of the turntable attitude, meeting the testing requirements of MEMS accelerometers under different attitudes.

[0025] The acquisition board control module establishes a bidirectional connection with the acquisition board through a communication network. It can set parameters such as sampling frequency, data average and data name through the host computer interface to realize the accurate acquisition, calculation and storage of MEMS accelerometer test data, and provide a standardized data foundation for subsequent data processing and analysis.

[0026] The power control module, temperature chamber control module, turntable control module, and data acquisition board control module all establish bidirectional connections with their respective multi-channel power supplies, temperature chambers, turntables, and data acquisition boards through a communication network, enabling precise control of each device and real-time acquisition of test data, thus providing a solid foundation for the realization of automated testing.

[0027] The host computer also has a display module, which is used to centrally display the operating information of each control module and corresponding equipment, including but not limited to the voltage and current limiting parameters and operating status of each channel, the set temperature and actual temperature of the temperature chamber and the temperature curve, and the operating speed and position curve of the turntable. At the same time, the display module can display the real-time test data and data change curve of the MEMS accelerometer, which makes it easy to intuitively grasp the test progress, equipment operating status and test data changes, and promptly detect abnormal problems in the test process, providing convenient support for test operation and data analysis.

[0028] The following is in conjunction with the appendix Figure 2 The specific implementation method of the MEMS accelerometer test method provided in Embodiment 2 of the present invention will be described in detail.

[0029] Embodiment 2 of the present invention provides a method for testing a MEMS accelerometer using the testing system of Embodiment 1, comprising: Step 1: Configure the process flow required for the calibration test of the automated control module, including: start time, called equipment, and test parameters of the called equipment; Step 2: The automation control module sends the process configurations for each process to the corresponding power control module, temperature chamber control module, turntable control module, and data acquisition board control module. Step 3: Each control module performs tests according to the requirements of the process flow configuration for each step; Step 4: The data acquisition board collects test data from each MEMS accelerometer sensor and feeds it back to the host computer for test data detection.

[0030] Preferably, step 3 also includes the power control module monitoring the actual power supply data of each channel of the multi-channel power supply in real time, and instructing the multi-channel power supply to shut down the corresponding abnormal channel when the monitored data exceeds the preset threshold or an abnormality occurs.

[0031] Ideally, when configuring the process flow required for the calibration and testing of the automated control module, after determining the equipment to be called, the test parameters of the called equipment can only be determined from the test parameters dedicated to that equipment.

[0032] The automation control module, through its internal code interface, enables unified scheduling and coordinated control of the power supply control module, temperature chamber control module, turntable control module, and data acquisition board control module. Its core advantage lies in supporting fully customizable editing of the process flow configuration required for testing, as well as the ability to save, import, and reuse the edited process flow, greatly improving system adaptability and testing efficiency. The specific implementation method for customizing the process flow configuration is as follows: The test procedure flow can be edited independently through the host computer software interface. The editing process includes three core steps: First, set the execution countdown time for each step to clarify the triggering time of each test action. The countdown time can be flexibly set according to the test requirements to adapt to the execution rhythm of different steps. Second, select the target module to be controlled in this step. You can choose any of the power control module, temperature chamber control module, turntable control module, or data acquisition board control module. Single module control or multi-module collaborative control is supported. Finally, set the specific operating parameters of the target module. The parameter input interface corresponds one-to-one with the selected control module to avoid parameter setting confusion and ensure the accuracy and convenience of parameter setting.

[0033] The specific parameter setting logic is as follows: If the power control module is selected, the parameter input interface allows for setting the voltage, current limit, and channel switch status, enabling precise configuration of the operating parameters for each power channel; if the temperature chamber control module is selected, the parameter input interface allows for setting the operating mode, where the setpoint operating mode allows for inputting a specific setpoint temperature, the program operating mode allows for selecting a preset program number, and the stop operating mode triggers the temperature chamber to stop working; if the turntable control module is selected, the parameter input interface allows for setting the operating mode, where the position mode allows for inputting the operating position, speed, and acceleration, the rate mode allows for inputting the operating rate and acceleration, the program operating mode allows for selecting a preset program number, and the stop operating mode triggers the turntable to stop working; if the acquisition board control module is selected, the parameter input interface allows for setting the sampling frequency, data average, and data name, adapting to different data acquisition specifications.

[0034] According to the actual testing requirements, the control modules and corresponding parameters to be executed after each countdown are set in sequence to complete the full process setup of the entire test. After the process setup is completed, the test process can be saved as an independent process configuration. The system supports the creation of numerous different process configuration files, which can be adapted to the testing requirements of MEMS accelerometers of different specifications, models, and testing scenarios. When performing similar tests in the future, there is no need to re-edit the process configuration. The saved process configuration can be directly imported. After starting, the system can automatically trigger the collaborative work of each control module according to the preset process to achieve fully automated testing without manual intervention.

[0035] To further illustrate the implementation process and application effects of customizing process flow configurations, the following examples are provided using specific test scenarios: Example of calibration process flow configuration: Step S1: After setting a 0s delay after the process flow is completed, the temperature chamber equipment will run in program mode with program number 00. Step S2: After setting a 0s delay after the current process flow, the turntable will run in position mode with a running position of 0°. Step S3: After setting a 0s delay after the current process, power channel 1 is turned on, the voltage is set to 5V, and the current limit is set to 0.1A. Step S4: After setting a 1-second delay after the current process flow, the acquisition board control module controls the acquisition board output frequency to 1000Hz. The acquisition board control module itself acquires and processes an average of 100 sets / second of data. Set the folder and data name for saving the data, and start data acquisition. Step S5: After setting the process flow and delaying for 14 hours and 20 minutes, the acquisition module controls the acquisition board to stop acquiring data. Step S6: After setting the process flow and delaying for 1 second, power channel 1 is turned off.

[0036] All other test procedures can be configured according to the above logic. The corresponding steps, control modules, and parameters can be configured sequentially based on actual needs to achieve personalized customization of the test process. Furthermore, based on the complete testing requirements of MEMS accelerometers, all test procedures such as calibration, high and low temperature testing, attitude testing, and stability testing can be configured into a single test process. The execution order, countdown timers, and corresponding equipment parameters for each procedure can be clearly defined, enabling seamless automated execution of multiple procedures without manual switching, further improving testing efficiency.

[0037] Example of calibration process execution: Once the calibration process flow configuration is complete and execution is initiated, the host computer first sends handshake information to each execution object (temperature chamber, turntable, multi-channel power supply, data acquisition board) selected in the process flow configuration list, checks the connection status of each device with the communication network and the host computer, and after confirming that the connection is normal, begins to execute each step sequentially according to the preset process: Step SS1: After the countdown ends, the automation control module sends the configuration parameters of the temperature chamber (program mode, program number 00) to the temperature chamber control module. The temperature chamber control module transmits the parameters to the communication network through the LAN port, and then the communication network writes the parameters to the temperature chamber device. After receiving the parameters, the temperature chamber device starts the program and executes the temperature field control logic corresponding to program number 00. At the same time, it periodically returns the temperature chamber running status to the host computer temperature chamber control module. After calculation and verification, the status is transmitted to the display module for display. Step SS2: After the countdown ends, the automation control module sends the turntable configuration parameters (position mode, running position 0°) to the turntable control module. The turntable control module writes the parameters into the turntable device through the communication network. The turntable device adjusts to the 0° position and remains stable. At the same time, it periodically returns the turntable running status to the turntable control module of the host computer. After calculation and verification, the data is sent to the display module for display. Step SS3: After the countdown ends, the automation control module sends the power supply configuration parameters (channel 1, voltage 5V, current limit 0.1A, on) to the power control module. The power control module writes the parameters to the multi-channel power supply device through the communication network. The multi-channel power supply device starts channel 1 and outputs a stable voltage of 5V and 0.1A to power the MEMS accelerometer. At the same time, it periodically returns the power supply operating status to the power control module of the host computer. After calculation and verification, the data is sent to the display module for display. Step SS4: After the countdown ends, the automation control module sends the collected configuration parameters (sampling frequency 1000Hz, data averaging 100 sets / s, save path and data name) to the acquisition board control module, and then transmits them to the acquisition board through the communication network. The acquisition board starts working, summarizing the data from each MEMS accelerometer and transmitting it to the acquisition board control module at a frequency of 1000Hz through the communication network. At the same time, the acquisition board control module starts to process the received data, averaging 100 sets of data from each MEMS accelerometer and saving the data according to preset requirements. Simultaneously, the data and curves of each accelerometer are transmitted to the display module. Step SS5: After the countdown ends, the automation control module sends a stop acquisition command to the acquisition board control module, controlling the acquisition board to stop data acquisition, thus completing the data acquisition process; Step SS6: After the countdown ends, the automation control module sends a shutdown command to the power control module. The power control module then controls the multi-channel power supply to shut down channel 1, completing the entire calibration process. Upon completion, standby information is sent to the devices used in the steps, indicating that they have entered standby mode.

[0038] Through the above-mentioned process customization and automated execution logic, the embodiments of the present invention can realize the personalized configuration and full-process automated execution of various MEMS accelerometer testing procedures, effectively improve testing efficiency, and at the same time ensure the accuracy and consistency of test data. This solves the technical pain points of low testing efficiency caused by fixed processes, poor adaptability, and excessive manual intervention in traditional testing systems.

[0039] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. A MEMS accelerometer testing system, characterized in that, include: The system includes a host computer, a multi-channel power supply, a temperature chamber, a turntable, and a data acquisition board. The host computer, the multi-channel power supply, the temperature chamber, the turntable, and the data acquisition board are all connected to a unified communication network to establish a communication connection and realize data interaction and command transmission. The multi-channel power supply is connected to the acquisition board via a power supply cable to power each MEMS accelerometer under test in the acquisition board; the table surface of the turntable is embedded inside the temperature chamber, the MEMS accelerometer under test is mounted on the acquisition board, and the acquisition board is fixedly mounted on the table surface of the turntable. The acquisition board collects test data from each MEMS accelerometer and feeds it back to the host computer for testing. The host computer includes a power control module, a temperature chamber control module, a turntable control module, a data acquisition board control module, and an automation control module. The automation control module is connected to the power control module, temperature chamber control module, turntable control module, and data acquisition board control module, and issues corresponding control commands. The power control module is connected to the multi-channel power supply and issues control commands to ensure the multi-channel power supply provides the appropriate power in each channel. The temperature chamber control module is connected to the temperature chamber and issues control commands to ensure the temperature chamber provides the appropriate temperature environment. The turntable control module is connected to the turntable and issues control commands to ensure the turntable provides the appropriate operating mode. The data acquisition board control module is connected to the data acquisition board and issues control commands to ensure the data acquisition board acquires data according to the appropriate acquisition mode.

2. The testing system according to claim 1, characterized in that, The host computer also includes a display module, which centrally displays the operating information of each control module and corresponding device.

3. The testing system according to claim 1, characterized in that, The power control module monitors the actual power supply data of each channel of the multi-channel power supply in real time. When the monitored data exceeds the preset threshold or an abnormality occurs, the multi-channel power supply is instructed to shut down the corresponding abnormal channel.

4. The testing system according to claim 1, characterized in that, The control commands issued by the power control module include the voltage and current limiting parameters of each channel.

5. The testing system according to claim 1, characterized in that, The control commands issued by the temperature chamber control module include instructions on the operating time, temperature, and operating mode of the temperature chamber. The operating modes of the temperature chamber include setpoint operation, stop operation, and program operation.

6. The testing system according to claim 1, characterized in that, The turntable control module issues control commands to enable the turntable to provide corresponding operating modes, including position mode, speed mode, stop operation, and program operation.

7. The testing system according to claim 1, characterized in that, The acquisition board control module issues control commands to instruct the acquisition board to acquire data according to the corresponding acquisition mode, which includes sampling frequency, data average and data name.

8. The testing system according to claim 1, characterized in that, The automated control module also includes a test program storage module, which stores the test programs set by the automated control module and responds to calls from the automated control module.

9. A method for testing using the testing system of claim 1, characterized in that: Step 1: The automated control module calibrates the process flow configuration required for testing, including: start time, called equipment, and test parameters of the called equipment; Step 2: The automation control module sends the process configurations for each process to the corresponding power control module, temperature chamber control module, turntable control module, and data acquisition board control module. Step 3: Each control module performs tests according to the requirements of the process flow configuration for each step; Step 4: The acquisition board collects test data from each MEMS accelerometer and feeds it back to the host computer for test data detection.

10. The method according to claim 9, characterized in that, Step 3 also includes the power control module monitoring the actual power supply data of each channel of the multi-channel power supply in real time. When the monitored data exceeds the preset threshold or an abnormality occurs, the multi-channel power supply is instructed to shut down the corresponding abnormal channel.

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