Large deflection angle laser galvanometer

Abstract

The application relates to a large-deflection-angle laser galvanometer mirror, which is used for improving the working angle of the laser galvanometer mirror. The laser galvanometer mirror comprises a feedback assembly, a stator, a rotor and a base; the stator is fixedly installed on the base, the stator comprises a magnetic yoke assembly and two oppositely arranged magnets, an air gap space is formed between the two magnets, the magnetic yoke assembly and the magnets jointly form a closed magnetic circuit, and the closed magnetic circuit is configured to generate a radial magnetic field in the air gap space; the rotor comprises a coil support, a reflecting mirror piece fixed to the side surface of the coil support and a driving coil wound on the coil support, the coil support is rotatably connected to the base through a bearing, and the driving coil is accommodated in the air gap space; and the feedback assembly is connected to the coil support through a sensor seat and is used for detecting the deflection angle of the rotor in real time.

Description

Technical Field

[0001] This application relates to the field of galvanometers, specifically a laser galvanometer with a large yaw angle. Background Technology

[0002] Galvanometer motors typically come in different forms and configurations. Commercially available galvanometer motors are usually of the galvanometer type, with a permanent magnet rotor and a coil stator. The coil is energized with direct current or alternating current, causing the rotor and its load to oscillate or rotate. Currently, world-renowned galvanometer manufacturers such as Scanlab generally use the galvanometer type structure, where the rotor is inside the motor, and the coil and stator are external. When a fixed current flows through the coil, the rotor rotates in a certain direction. The larger the rotation angle, the smaller the torque. Therefore, the operating angle of a galvanometer type galvanometer is typically ±12.5°, and its operating angle is limited. Summary of the Invention

[0003] This invention provides a laser galvanometer with a large yaw angle, used to improve the working angle of the laser galvanometer.

[0004] The technical solution of this invention is as follows:

[0005] In a first aspect, this application provides a large yaw angle laser galvanometer, including: a feedback component 1, a stator, a mover, and a base 11;

[0006] The stator is fixedly mounted on the base 11. The stator includes a magnetic yoke assembly and two magnets arranged with opposite polarities. An air gap is formed between the two magnets. The magnetic yoke assembly and the magnets together form a closed magnetic circuit. The closed magnetic circuit is configured to generate a radial magnetic field in the air gap.

[0007] The moving element includes a coil support 6, a reflective lens 5 fixed to the side of the coil support 6, and a drive coil 7 wound on the coil support 6. The coil support 6 is rotatably connected to the base 11 via a bearing 12, and the drive coil 7 is housed in the air gap space.

[0008] The feedback component 1 is connected to the coil support 6 via the sensor base 4, and is used to detect the deflection angle of the mover in real time.

[0009] In some possible embodiments, the feedback component includes:

[0010] A light-blocking plate 106 is fixedly connected to the sensor base 4;

[0011] A photoelectric sensor 108 is disposed opposite to the light-blocking plate 106;

[0012] The light-blocking plate 106 is configured to rotate with the sensor base 4 to change the photosensitive area of ​​the photoelectric sensor 108, thereby outputting an electrical signal related to the deflection angle.

[0013] In some possible embodiments, the feedback component further includes: LED 101, sensor circuit board 109, and connector circuit board 102;

[0014] The LED bead 101 is arranged on the connector circuit board 102 to provide a light source for the photoelectric sensor 108;

[0015] The photoelectric sensor 108 is arranged on the sensor circuit board 109;

[0016] The light-blocking plate 106 is fixed on the sensor circuit board 109 and located on the light-sensing path of the photoelectric sensor 108;

[0017] The sensor circuit board 109 and the connector circuit board 102 are electrically connected.

[0018] In some possible embodiments, the feedback component further includes: a light shield 104;

[0019] The light shield 104 is arranged on the sensor circuit board 109 and encloses the light blocking sheet 106 and the photoelectric sensor 108 inside;

[0020] The light-emitting part of the lamp bead 101 extends into the interior of the light shield 104 through the first lamp bead through hole 1021 provided on the connector circuit board 102 and the second lamp bead through hole 1041 provided on the light shield 104, so as to provide a light source for the photoelectric sensor 108.

[0021] In some specific embodiments, the sensor circuit board 109 and the connector circuit board 102 are electrically connected via pin headers 107.

[0022] In some possible embodiments, the magnetic yoke assembly includes: a first magnetic yoke, a second magnetic yoke, and a third magnetic yoke arranged in parallel; the two magnets include a first magnet and a second magnet;

[0023] The first magnet is mounted on the end face of the first yoke facing the second yoke, and the second magnet is mounted on the end face of the third yoke facing the second yoke;

[0024] The second magnetic yoke passes through the drive coil 7;

[0025] A first air gap is formed between the first magnet and the second yoke, and a second air gap is formed between the second magnet and the second yoke. The drive coil 7 is housed in the air gap space formed by the first air gap and the second air gap.

[0026] In some specific embodiments, the rotation angles of the reflective lens 5, the coil support 6, and the drive coil 7 are between ±30°.

[0027] In some specific embodiments, there are two photoelectric sensors 108, and the two photoelectric sensors 108 form a differential sensor.

[0028] In some specific embodiments, the large yaw angle laser galvanometer is driven by a voice coil motor.

[0029] The beneficial effects of this invention are as follows:

[0030] The design, based on two magnets arranged with opposite polarities and a yoke assembly forming a closed magnetic circuit, creates a high-intensity, highly uniform radial magnetic field in the air gap between the two magnets. The closed magnetic circuit efficiently confines and guides the magnetic flux into the air gap, ensuring that the direction and magnitude of the magnetic field strength (B) remain essentially constant throughout the width of the air gap. According to the physics formula, torque T = magnetic induction intensity B × current I × effective coil length L × number of coil turns N. Since the magnetic induction intensity B is constant, the driving coil can obtain essentially consistent torque throughout the entire deflection stroke, provided the same current is applied. This means that torque T has a strictly linear relationship with current I (T∝I); even when the driving coil moves to the edge of the air gap, it still receives sufficient driving force to maintain or continue deflection, without becoming powerless due to a weakened magnetic field. This fundamentally eliminates the magnetic circuit obstacles for large-angle deflections.

[0031] Furthermore, because the reflector is fixed to the side of the coil support, this layout is very compact, greatly reducing the rotational inertia of the entire mover. According to the rotational form of Newton's second law, for a given torque, the smaller the rotational inertia, the greater the angular acceleration. This means the mover can start and stop faster, sweeping larger angles in a finite amount of time. By winding the drive coil onto the coil support, the drive coil itself acts as the mover, resulting in a more concentrated mass distribution, further contributing to the reduction of rotational inertia. To achieve stable operation, the coil support, reflector, and drive coil require precise dynamic balancing to ensure the stator's center of gravity rests on its axis of rotation. This avoids harmful vibrations caused by centrifugal force during high-speed, large-angle scanning, enabling stable large-angle motion.

[0032] The feedback component continuously and accurately reports the actual angle of the reflector to the control card. The control card compares this angle with the commanded angle and adjusts the current of the drive coil in real time to eliminate errors. It can actively correct any interference that attempts to cause the reflector to deviate from the target trajectory (such as slight non-uniformity of the magnetic field, bearing friction, air resistance, etc.), thus achieving high-precision positioning and repeatability at large angles based on the physical possibilities provided by a uniform magnetic field. Attached Figure Description

[0033] Figure 1 It is an exploded view of a laser galvanometer with a large yaw angle; Figure 2 This is a cross-sectional view of a laser galvanometer with a large yaw angle; Figure 3 This is the X-axis front view of a laser galvanometer with a large yaw angle; Figure 4 This is the Y-axis front view of a laser galvanometer with a large yaw angle; Figure 5 It is an isometric view of a laser galvanometer with a large yaw angle; Figure 6 It is an isometric view of the feedback component; Figure 7 This is an exploded view of the feedback component; Figure 8 This is a schematic diagram of the rotation angle of the drive motor for a laser galvanometer with a large yaw angle; Figure 9 This is a schematic diagram of the rotation angle of the drive motor for a laser galvanometer with a large yaw angle; Figure 10 This is a schematic diagram of the rotation angle of the drive motor for a laser galvanometer with a large yaw angle; Figure 11 This is a schematic diagram of the rotation angle of the drive motor for a laser galvanometer with a large yaw angle; Figure 12 This is a schematic diagram of the rotation angle of the drive motor for a laser galvanometer with a large yaw angle; Figure 13 This is a schematic diagram of the rotation angle of the drive motor for a laser galvanometer with a large yaw angle.

[0034] 1-Feedback component; 2-First yoke; 3-First magnet; 4-Sensor mount; 5-Reflecting lens; 6-Coil bracket; 7-Drive coil; 8-Second yoke; 9-Third yoke; 10-Second magnet; 11-Base; 12-Bearing; 13-Screw; 14-Set screw; 15-Bearing clamp; 101-LED bead; 102-Connector circuit board; 103-Screw; 104-Light shield; 105-Screw; 106-Light blocking plate; 107-Pin header; 108-Photoelectric sensor; 109-Sensor circuit board; 1031-First LED bead through-hole; 1041-Second LED bead through-hole; 1061-Arc-shaped hole; 601-Groove; 602-Mounting hole. Detailed Implementation

[0035] In many traditional galvanometers (especially moving iron type or some moving coil type with poor magnetic circuits), the magnetic field distribution is uneven. When the coil (or magnet) deflects at a large angle, it moves to a region where the magnetic field is weaker or its direction changes, causing a sharp drop in driving torque. At the same time, nonlinear effects become very severe, making it impossible for the control system to drive and position accurately.

[0036] Reference Figures 1-13 This application provides a large yaw angle laser galvanometer, including: a feedback component 1, a stator, a mover, and a base 11; The stator is fixedly mounted on the base 11. The stator includes a magnetic yoke assembly and two magnets with opposite polarities. An air gap space is formed between the two magnets. The magnetic yoke assembly and the magnets together form a closed magnetic circuit. The closed magnetic circuit is configured to generate a radial magnetic field in the air gap space. The moving part includes a coil support 6, a reflective lens 5 fixed to the side of the coil support 6, and a drive coil 7 wound on the coil support 6. The coil support 6 is rotatably connected to the base 11 via a bearing 12, and the drive coil 7 is housed in the air gap space. Feedback component 1 is connected to coil bracket 6 via sensor base 4 and is used to detect the deflection angle of the mover in real time.

[0037] Specifically, the coil bracket 6 is fixed to the base 11 by the set screw 14.

[0038] Bearing 12 is fitted onto set screw 14, and bearing buckle 15 is fixed to base 11, thereby limiting the position of bearing 12. A wave spring can be added between set screw 14 and bearing 12, and a collar can be added between bearings 12 to eliminate gaps; this will not be described in detail in this embodiment. In this embodiment, based on the design of two magnets with opposite polarities arranged and the yoke assembly forming a closed magnetic circuit, a high-intensity, highly uniform radial magnetic field is created in the air gap space between the two magnets. The closed magnetic circuit efficiently constrains and guides the magnetic flux into the air gap space, ensuring that the direction and magnitude of the magnetic field strength (B) remain essentially constant throughout the width of the air gap space. According to the physics formula, torque T = magnetic induction intensity B × current I × effective coil length L × number of coil turns N. Since the magnetic induction intensity B is constant, as long as the same current is applied to the drive coil 7 throughout the entire deflection stroke, a basically consistent torque can be obtained. This means that the torque T has a strict linear relationship with the current I (T∝I); even if the drive coil 7 moves to the edge of the air gap space, it can still obtain sufficient driving force to maintain or continue to deflect, and will not become powerless due to the weakening of the magnetic field. This fundamentally eliminates the magnetic circuit obstacles for large-angle deflection.

[0039] Furthermore, since the reflector 5 is fixed to the side of the coil support 6, this layout is very compact, greatly reducing the rotational inertia of the entire mover. According to the rotational form of Newton's second law, for a given torque, the smaller the rotational inertia, the greater the angular acceleration. This means that the mover can start and stop faster, and can sweep larger angles in a finite amount of time. By winding the drive coil 7 onto the coil support 6, the drive coil 7 serves as the mover, resulting in a more concentrated mass distribution, which further helps to reduce the rotational inertia. To achieve stable operation, the coil support 6, reflector 5, and drive coil 7 require precise dynamic balancing to ensure that the stator's center of gravity is on its axis of rotation. This avoids harmful vibrations caused by centrifugal force during high-speed, large-angle scanning, enabling stable large-angle motion.

[0040] The feedback component 1 continuously and accurately reports the actual angle of the reflector 5 to the control card. The control card compares this angle with the commanded angle and adjusts the current of the drive coil 7 in real time to eliminate errors. It can actively correct any interference that attempts to cause the reflector 5 to deviate from the target trajectory (such as slight non-uniformity of the magnetic field, bearing friction, air resistance, etc.), thus achieving high-precision positioning and repeatability at large angles based on the physical possibilities provided by a uniform magnetic field.

[0041] Reference Figure 1 , Figure 2 and Figures 5-7 Feedback component 1 includes: A light-blocking plate 106 is fixedly connected to the sensor base 4; A photoelectric sensor 108 is positioned opposite to a light-blocking plate 106; The light-blocking plate 106 is configured to rotate with the sensor base 4 to change the photosensitive area of ​​the photoelectric sensor 108, thereby outputting an electrical signal related to the deflection angle.

[0042] In this embodiment, the light-blocking plate 106 is rigidly fixed to one end of the sensor base 4 by screws 105 or similar means, while the other end of the sensor base 4 is fixed to the coil bracket 6 by adhesive or other means; combined with Figure 1 A groove 601 is formed on the upper surface of the coil support 6, which is used to place the sensor base 4. A mounting hole 602 is provided in the groove 601, and the screw 105 passes through the light-blocking plate 106 and is screwed into the mounting hole 602. As a result, any deflection movement of the reflecting lens 5 will be transmitted to the light-blocking plate 106 completely synchronously through the coil support 6 and the sensor base 4 without delay or distortion, so that it produces a completely consistent angular displacement.

[0043] Furthermore, the photoelectric sensor 108 and the light-blocking plate 106 are arranged opposite to and adjacent to each other, maintaining a tiny gap between them to ensure no physical contact and achieve non-contact measurement; the light-blocking plate 106 is precisely located in front of the photosensitive area (photosensitive surface) of the photoelectric sensor 108. When the mover is stationary, the light-blocking plate 106 remains in a fixed position, at which point it blocks a fixed value of the photosensitive area of ​​the photoelectric sensor 108, and the sensor outputs a corresponding static current signal; when the mover deflects, the light-blocking plate 106 rotates accordingly. Its movement is specifically manifested as: a specific contour on the light-blocking plate (for example, the specific contour is...) Figure 7 A precisely calculated arc-shaped aperture 1061 (or a gradually tapering edge) sweeps across the photosensitive surface of the photoelectric sensor 108. The rotation of the light-blocking plate 106 linearly changes the effective area of ​​the photosensitive region it blocks; as the photosensitive area increases, the photocurrent generated by the photoelectric sensor increases; conversely, as the photosensitive area decreases, the photocurrent decreases. Therefore, the amplitude of the electrical signal (current or voltage) output by the photoelectric sensor 108 and the instantaneous rotation angle of the light-blocking plate 106, i.e., the deflection angle of the mover, form a strict and continuous correspondence.

[0044] Reference Figure 1 , Figure 2 and Figures 5-7 The feedback component 1 also includes: LED 101, sensor circuit board 109 and connector circuit board 102; The LED 101 is arranged on the connector circuit board 102 to provide a light source for the photoelectric sensor 108; The photoelectric sensor 108 is arranged on the sensor circuit board 109; The light-blocking plate 106 is fixed on the sensor circuit board 109 and located on the light-sensing path of the photoelectric sensor 108; The sensor circuit board 109 and the connector circuit board 102 are electrically connected.

[0045] The sensor circuit board 109 serves as the sensing front end, centrally housing the core sensing element, namely the photoelectric sensor 108, and directly fixing the light-blocking plate 106, forming the core area of ​​the measurement; the connector circuit board 102 serves as the system interface and power supply back end, on which LED beads 101 are arranged and provide mounting points for external connectors.

[0046] The sensor circuit board 109 and the connector circuit board 102 are electrically connected via pin header 107 or flexible circuit board, etc.; and the sensor circuit board 109 and the connector circuit board 102 are mechanically fixed by screws 103, so that the connector circuit board 102 can stably deliver the working power and lamp bead driving power from the control card to the sensor circuit board 109; and realize the high-speed and low-noise transmission of the weak current signal generated by the photoelectric sensor 108 to the connector circuit board 102, and then send it to the control card.

[0047] The LED 101, serving as a stable light source, is directly soldered onto the connector circuit board 102. This integrated design shortens the power supply path and improves reliability.

[0048] Among them, there are two photoelectric sensors 108, which together form a differential sensor; the differential sensor has more accurate angle measurement and stronger anti-interference ability.

[0049] To achieve precise optical path guidance, in this embodiment, reference is made to... Figure 1 , Figure 2 and Figures 5-7 Feedback component 1 also includes: a light shield 104; The light shield 104 is attached to the sensor circuit board 109 by adhesive bonding and encloses the light blocking sheet 106 and the photoelectric sensor 108 inside; The light-emitting part of the LED 101 extends into the interior of the light shield 104 through the first LED through hole 1021 provided on the connector circuit board 102 and the second LED through hole 1041 provided on the light shield 104, providing a light source for the photoelectric sensor 108.

[0050] Because LED vias 1021 and 1041 are respectively formed on the connector circuit board 102 and the light shield 104, the light-emitting part of the LED 101 passes through these two vias, and its light is precisely and concentratedly guided into the sealed space formed by the light shield 104. The light guided into the sealed space illuminates the light-blocking plate 106. This sealed space effectively shields the interference of external stray light, providing a pure optical environment for measurement.

[0051] Reference Figures 1-3In this embodiment of the application, the magnetic yoke assembly includes: a first magnetic yoke 2, a second magnetic yoke 8, and a third magnetic yoke 9 arranged in parallel; the two magnets include a first magnet 3 and a second magnet 10. The first magnet 3 is mounted on the end face of the first yoke 2 facing the second yoke 8, and the second magnet 10 is mounted on the end face of the third yoke 9 facing the second yoke 8. The second magnetic yoke 8 passes through the drive coil 7; A first air gap is formed between the first magnet 3 and the second yoke 8, and a second air gap is formed between the second magnet 10 and the second yoke 8. The drive coil 7 is housed in the air gap space formed by the first air gap and the second air gap.

[0052] The first yoke 2, the second yoke 8, and the third yoke 9 are all made of high-permeability material (such as electrical pure iron) and are fixed to the base 11 by screws 13. Together, they form a low magnetic resistance channel. In this embodiment, the complete loop of the magnetic field lines is as follows: from the first magnet 3 (N pole) → across the first air gap → into the second yoke 8 → through the drive coil 7 → out from the other side of the second yoke 8 → across the second air gap → into the second magnet 10 (S pole) on the third yoke 9 → through the connection between the third yoke 9 and the first yoke 2 → back to the first magnet 3. This closed loop efficiently confines the magnetic flux generated by the magnets, much like guiding the magnetic flow to a predetermined path using a magnetic tube, greatly reducing magnetic field leakage and concentrating magnetic energy in the working area.

[0053] Since the second magnetic yoke 8 passes through the drive coil 7, it becomes a central magnetic pole of the magnetic circuit. In the first air gap, the magnetic field direction is radial from the first magnet 3 (N) towards the second magnetic yoke 8; in the second air gap, it is radial from the second magnetic yoke 8 towards the second magnet 10 (S). Because the second magnetic yoke 8 is a single integral component, a radial magnetic field with a consistent direction is formed around the second magnetic yoke 8 within the annular space where the drive coil 7 is located. Because the end faces of the yoke and the arc-shaped surfaces of the magnets are precision-machined surfaces and symmetrically arranged, the magnetic field generated in the two air gaps is highly uniform; regardless of how the drive coil 7 deflects in the air gap space, the magnetic field density and direction cut by its conductor remain essentially unchanged. In the embodiment of this application, even when the drive coil 7 deflects to its extreme position, it remains within this uniform magnetic field, thus still generating sufficient torque to overcome bearing friction and inertial forces, thereby achieving a large yaw angle.

[0054] Furthermore, since the drive coil 7 is housed in the air gap space formed by the first and second air gaps, it is completely immersed in this optimized magnetic field environment, allowing all its effective edges to participate in generating driving force, resulting in maximum efficiency. Simultaneously, the metal second magnetic yoke 8, passing through the interior of the drive coil 7, also serves as a heat dissipation path, helping to conduct away the heat generated during operation and preventing excessive temperature rise that could lead to performance degradation.

[0055] Since the feedback component 1 is connected to the coil bracket 6 at one end via the sensor base 4 and to the feedback component 1 at the other end, this layout places the feedback component 1 and the drive mechanism of the mover in a parallel position on the same side of the rotation axis, rather than extending along the axial direction, thus avoiding an increase in axial length. Internally, it employs a compact optical path design where the light-blocking plate 106 and the photoelectric sensor 108 are closely attached to each other. The sensor circuit board 109 and the connector circuit board 102 are electrically connected via pin headers 107, forming a vertically stacked structure, achieving the integration of sensing, light source, and interface functions within a minimal projected area. The LED bead 101 is mounted on the connector circuit board 102, and its light-emitting part extends into the interior of the light-blocking cover 104 after passing through the first LED bead through-hole 1021 on the connector circuit board 102 and the second LED bead through-hole 1041 on the light-blocking cover 104. The light shield 104 is fixed on the sensor circuit board 109 and encloses the light blocking plate 106 and the photoelectric sensor 108 inside, ultimately forming a highly integrated and interference-resistant closed detection unit, which significantly reduces space occupation and improves space utilization.

[0056] Reference Figures 8-13 In this embodiment, the large yaw angle laser galvanometer is driven by a voice coil motor; the rotation angles of the reflector 5, coil support 6, and drive coil 7 are between ±30°. The voice coil motor energizes the drive coil, causing the drive coil 7 to generate a magnetic field, which interacts with the magnetic field of the magnet, thereby driving the mover to rotate around the bearing 12. By applying a reverse current to the drive coil 7, the mover can rotate in the opposite direction, allowing its rotation angle to reach ±30°.

[0057] In this embodiment, since the drive coil 7, coil support 6, and reflector 5 form the mover, and the center of gravity of the mover is on the center line of the rotation axis, it will not have a destructive effect on the mover under large-scale impact vibrations. Furthermore, the direction and intensity of the magnetic field experienced by the mover remain unchanged during rotation. With a constant operating current, the torque generated by the coil 7 at different positions is consistent, which is beneficial for subsequent software control. The stator, composed of a magnet and a yoke, satisfies both large-angle oscillation and improves space utilization; the arc-shaped inner space of the stator can accommodate components such as sensors. Using a drive coil as the mover and a magnet as the stator improves magnetic field utilization and reduces overall power consumption.

[0058] It should be understood that the application of this application is not limited to the examples above. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims. Those skilled in the art can understand that implementing all or part of the processes of the above embodiments and making equivalent changes according to the claims of this application still fall within the scope of this application.

Claims

1. A laser galvanometer with a large yaw angle, characterized in that, include: Feedback component (1), stator, mover, and base (11); The stator is fixedly mounted on the base (11). The stator includes a magnetic yoke assembly and two magnets arranged with opposite polarities. An air gap is formed between the two magnets. The magnetic yoke assembly and the magnets together form a closed magnetic circuit. The closed magnetic circuit is configured to generate a radial magnetic field in the air gap. The moving part includes a coil support (6), a reflective lens (5) fixed to the side of the coil support (6), and a drive coil (7) wound on the coil support (6). The coil support (6) is rotatably connected to the base (11) via a bearing (12), and the drive coil (7) is housed in the air gap space. The feedback component (1) is connected to the coil support (6) via the sensor mount (4) and is used to detect the deflection angle of the mover in real time.

2. The large yaw angle laser galvanometer according to claim 1, characterized in that, The feedback component includes: A light-blocking plate (106) is fixedly connected to the sensor base (4); A photoelectric sensor (108) is disposed opposite to the light-blocking plate (106); The light-blocking plate (106) is configured to rotate with the sensor base (4) to change the photosensitive area of ​​the photoelectric sensor (108) and thus output an electrical signal related to the deflection angle.

3. The large yaw angle laser galvanometer according to claim 2, characterized in that, The feedback component also includes: LED beads (101), sensor circuit board (109), and connector circuit board (102). The LED beads (101) are arranged on the connector circuit board (102) to provide a light source for the photoelectric sensor (108); The photoelectric sensor (108) is arranged on the sensor circuit board (109); The light-blocking plate (106) is fixed on the sensor circuit board (109) and located on the light-sensing path of the photoelectric sensor (108); The sensor circuit board (109) and the connector circuit board (102) are electrically connected.

4. The large yaw angle laser galvanometer according to claim 3, characterized in that, The feedback component also includes: a light shield (104). The light shield (104) is arranged on the sensor circuit board (109) and encloses the light blocking sheet (106) and the photoelectric sensor (108) inside; The light-emitting part of the lamp bead (101) extends into the interior of the light shield (104) through the first lamp bead through hole (1021) provided on the connector circuit board (102) and the second lamp bead through hole (1041) provided on the light shield (104), providing a light source for the photoelectric sensor (108).

5. The large yaw angle laser galvanometer according to claim 3, characterized in that, The sensor circuit board (109) and the connector circuit board (102) are electrically connected via pin headers (107).

6. The large yaw angle laser galvanometer according to claim 1, characterized in that, The magnetic yoke assembly includes: a first magnetic yoke, a second magnetic yoke, and a third magnetic yoke arranged in parallel; the two magnets include a first magnet and a second magnet. The first magnet is mounted on the end face of the first yoke facing the second yoke, and the second magnet is mounted on the end face of the third yoke facing the second yoke; The second magnetic yoke passes through the drive coil (7); A first air gap is formed between the first magnet and the second yoke, and a second air gap is formed between the second magnet and the second yoke. The driving coil (7) is housed in the air gap space formed by the first air gap and the second air gap.

7. The large yaw angle laser galvanometer according to claim 1, characterized in that, The rotation angles of the reflective lens (5), the coil support (6), and the drive coil (7) are between ±30°.

8. The large yaw angle laser galvanometer according to claim 2, characterized in that, There are two photoelectric sensors (108), and the two photoelectric sensors (108) form a differential sensor.

9. The large yaw angle laser galvanometer according to claim 1, characterized in that, The large yaw angle laser galvanometer is driven by a voice coil motor.

Images