Beam pointing compensation adjusting mechanism based on biaxial folding beam structure and working method

Abstract

The application provides a light beam pointing compensation adjusting mechanism based on a double-axis folding beam structure and a working method, and relates to the technical fields of precise optical instruments and micro-motion devices.The mechanism comprises a fixed unit, an optical deflection unit and a flexible motion unit; the fixed unit is a hollow cylindrical structure; the optical deflection unit is located at the geometric center of the mechanism and comprises an optical fixed cylinder and a V-shaped optical prism group fixed in the cylinder; the optical fixed cylinder is provided with a light transmission hole; the flexible motion unit is arranged between the fixed unit and the optical deflection unit in the circumferential direction and comprises two groups of positive Poisson's ratio structures and negative Poisson's ratio structures arranged oppositely and a moving plate connected with each Poisson's ratio structure; each Poisson's ratio structure is a multi-stage folding beam structure, one end of which is connected with the optical fixed cylinder, and the other end is indirectly connected with the fixed unit through the corresponding moving plate. The application simultaneously realizes light path compression, optical-mechanical integrated integration and high-resolution double-axis pointing compensation in a single structure.

Description

Technical Field

[0001] This invention relates to the field of precision optical instruments and micro-motion devices, and in particular to a beam pointing compensation adjustment mechanism and its working method based on a dual-axis folded beam structure. Background Technology

[0002] In laser communication, laser interferometry, and precision optical imaging systems, the stability of the optical path pointing and the compactness of the system structure are crucial. Traditional long optical path systems often occupy a large amount of physical space, which is not conducive to the integration and miniaturization of equipment. In order to achieve a long optical path or change the beam direction within a limited space, multiple mirrors are usually required to fold the optical path.

[0003] To achieve precise adjustment and compensation of beam direction, existing technologies employ two main approaches: one is to use large-scale optical path compensation devices, where internal optical components and external support structures are often assembled separately. Another approach typically uses reflective beam deflection devices, such as fast-reflecting mirrors, which change the beam direction by driving a mirror to deflect around two orthogonal axes. However, this structure has significant drawbacks: the optical path propagates outside the mirror, making it difficult to compress the overall axial dimensions and hindering compact integration of the optical system; reflective deflection involves a two-fold amplification relationship between the mirror tilt angle and the beam deflection angle, placing extremely high demands on the angular displacement resolution of the mechanism; single reflection cannot achieve optical path folding within the device, making it difficult to balance large optical path length with small size; the mirror is susceptible to external environmental disturbances, and the driving mechanism is located behind the mirror, causing the optical-mechanical stiffness center to misalign with the optical center, potentially leading to vibration coupling. Furthermore, other deflection platforms driven by flexible mechanisms generally do not involve integrated design of optical components and the mechanism itself. Summary of the Invention

[0004] To address the aforementioned issues, this invention proposes a beam pointing compensation adjustment mechanism and its operating method based on a dual-axis folded beam structure, which simultaneously achieves optical path compression, optomechanical integration, and high-resolution dual-axis pointing compensation within a single structure.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: In a first aspect, the present invention provides a beam pointing compensation adjustment mechanism based on a dual-axis folded beam structure, comprising a fixed unit, an optical yaw unit, and a flexible motion unit; The fixing unit is a hollow cylindrical structure; The optical deflection unit is located at the geometric center of the mechanism and includes an optical fixing cylinder and a V-shaped optical prism assembly fixed inside the cylinder; the optical fixing cylinder has a light-transmitting hole. The flexible motion unit is arranged circumferentially between the fixed unit and the optical deflection unit, including two sets of oppositely arranged positive Poisson's ratio structures and negative Poisson's ratio structures, as well as moving plates corresponding to each Poisson's ratio structure; each Poisson's ratio structure is a multi-stage folded beam structure, with one end connected to the optical fixed cylinder and the other end indirectly connected to the fixed unit through the corresponding moving plate.

[0006] Secondly, the present invention provides a method for operating a beam pointing compensation adjustment mechanism based on a dual-axis folded beam structure, comprising: By controlling the preset range displacement of multiple moving plates, any set of relatively arranged positive Poisson's ratio structures and negative Poisson's ratio structures can pull or push the optical fixing cylinder, or make two sets of Poisson's ratio structures move simultaneously, so as to realize the yaw motion of the optical fixing cylinder and the internal V-shaped optical prism group, and complete the compensation of the laser optical path.

[0007] Compared with the prior art, the beneficial effects of the present invention are as follows: This invention embeds a V-shaped optical prism group inside the central optical cavity of the optical deflection unit. The light is reflected multiple times inside the device and then emitted from the main body of the mechanism. The optical center coincides with the rigidity center of the mechanism, and the deformation of the external flexible support structure achieves high-precision beam compensation. The dual-axis folding beam, based on the structural deformation principle of positive and negative Poisson's ratio, provides two orthogonal degrees of freedom of motion based on the elastic deformation of the material itself. Combined with the dual-degree-of-freedom decoupling design, it eliminates cross-coupling errors, eliminates mechanical friction and transmission gaps, and achieves high-precision angular resolution. Thus, optical path compression, optomechanical integration, and high-resolution dual-axis pointing compensation are simultaneously achieved in a single-body structure.

[0008] The optical center and stiffness center are arranged coaxially, the rotational inertia of the moving parts of the mechanism is symmetrically distributed, the resonant frequency is high and the vibration mode is clear; when combined with direct drive actuators such as piezoelectric ceramics, high-bandwidth closed-loop control can be achieved, which is suitable for high-speed application scenarios such as high-frequency vibration suppression, fast beam scanning and real-time dynamic tracking.

[0009] Advantages of additional aspects of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute a limitation thereof.

[0010] Figure 1 A schematic diagram of a beam pointing compensation adjustment mechanism based on a dual-axis folded beam structure provided in an embodiment of the present invention; Figure 2 A first perspective sectional view of the mechanism provided in an embodiment of the present invention; Figure 3 A second perspective sectional view of the mechanism provided in an embodiment of the present invention; Figure 4 A third perspective sectional view of the mechanism provided in an embodiment of the present invention; Figure 5 A fourth perspective sectional view of the mechanism provided in an embodiment of the present invention; Figure 6 This is a schematic diagram of the three-dimensional optical path folding back inside the optical cavity of the mechanism provided in an embodiment of the present invention; Figure 7 An internal bottom perspective view of the mechanism provided in an embodiment of the present invention; Among them, 1-fixed unit; 101-fixed outer frame; 2-optical oscillation unit; 201-motion end platform; 202-flexible decoupling leaf spring; 203-optical fixing cylinder; 204-first V-shaped prism; 205-second V-shaped prism; 3-flexible motion unit; 301-first W-shaped positive Poisson's ratio structure; 302-second M-shaped negative Poisson's ratio structure; 303-first M-shaped negative Poisson's ratio structure; 304-second W-shaped positive Poisson's ratio structure; 305-first moving plate; 306-second moving plate; 307-third moving plate; 308-fourth moving plate. Detailed Implementation

[0011] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0012] As described in the background section, existing optical path compensation devices are usually bulky, and the internal optical components and external support structures are often assembled separately. This makes it easy for assembly errors and micro-motion wear to cause optical axis drift during actual operation, which in turn affects the accuracy of laser pointing.

[0013] In addition, in order to achieve a longer optical path, traditional structures such as fast reflectors often cannot effectively fold the optical path in a compact space, resulting in a longer measurement optical path and a loss of optical path quality.

[0014] To address the aforementioned technical issues, this invention proposes a beam pointing compensation adjustment mechanism and its working method based on a dual-axis folded beam structure. By embedding a V-shaped optical prism group into the optical cavity at the center of a flexible motion mechanism, the light path is reflected multiple times within the device before exiting from the mechanism body, with the optical center coinciding with the mechanism's stiffness center. The dual-axis refers to two pairs of alternating positive and negative Poisson's ratio structures arranged circumferentially, with the two pairs of structures spatially perpendicular to each other. The elastic deformation of the folded beam material provides deflection degrees of freedom around two orthogonal directions. Pointing compensation utilizes the coordinated deformation of the two pairs of Poisson's ratio structures to drive the optical fixing cylinder to tilt spatially, changing the spatial normal direction of the V-shaped prism group's reflecting surface, thus precisely deflecting the propagation direction of the emitted beam. This, combined with the deformation of the flexible support structure in the external flexible motion unit, achieves high-precision beam compensation, simultaneously realizing optical path compression, optomechanical integration, and high-resolution dual-axis pointing compensation within a single structure.

[0015] Example 1 This embodiment provides a beam pointing compensation adjustment mechanism based on a dual-axis folded beam structure, including a fixed unit, an optical yaw unit, and a flexible motion unit; The fixing unit is a hollow cylindrical structure; The optical deflection unit is located at the geometric center of the mechanism and includes an optical fixing cylinder and a V-shaped optical prism assembly fixed inside the cylinder; the optical fixing cylinder has a light-transmitting hole. The flexible motion unit is arranged circumferentially between the fixed unit and the optical deflection unit, including two sets of oppositely arranged positive Poisson's ratio structures and negative Poisson's ratio structures, as well as moving plates corresponding to each Poisson's ratio structure; each Poisson's ratio structure is a multi-stage folded beam structure, with one end connected to the optical fixed cylinder and the other end indirectly connected to the fixed unit through the corresponding moving plate.

[0016] Next, combined Figure 1 This embodiment provides a detailed description of a beam pointing compensation adjustment mechanism based on a biaxial folded beam structure.

[0017] like Figure 1 , 2 As shown, the beam pointing compensation adjustment mechanism in this embodiment includes a fixed unit 1, an optical deflection unit 2, and a flexible motion unit 3.

[0018] The fixing unit 1 is a hollow columnar structure; in this embodiment, a hollow cylindrical structure is used. Specifically, it includes a cylindrical fixing frame 101, which serves as the base and external support for the entire device.

[0019] like Figure 3 , 4As shown, the optical deflection unit 2 is located at the geometric center of the device, and its interior has an optical path folding cavity. It includes a motion end platform 201, a flexible decoupling leaf spring 202, an optical fixing cylinder 203, a first V-shaped prism 204 and a second V-shaped prism 205, with the two V-shaped prisms arranged opposite to or side by side.

[0020] The optical fixing cylinder 203 is located at the center and is suspended and supported by a first W-shaped positive Poisson's ratio structure 301, a second M-shaped negative Poisson's ratio structure 302, a first M-shaped negative Poisson's ratio structure 303, and a second W-shaped positive Poisson's ratio structure 304. The suspension support refers to the optical fixing cylinder 203 being suspended and supported within the fixed outer frame 101 by the flexible motion unit 3. Specifically, one end of each of the first W-shaped positive Poisson's ratio structure 301, the second M-shaped negative Poisson's ratio structure 302, the first M-shaped negative Poisson's ratio structure 303, and the second W-shaped positive Poisson's ratio structure 304 is connected to the optical fixing cylinder 203, and the other end is indirectly connected to the fixed outer frame 101 through corresponding moving plates 305-308, thereby suspending the optical fixing cylinder 203 in the central region of the fixed outer frame 101. Simultaneously, the upper end of the optical fixing cylinder 203 is connected to the fixed outer frame 101 through a motion end platform 201 and a flexible decoupling leaf spring 202 to constrain its axial parasitic displacement.

[0021] The motion end platform 201 is located at the top of the device and is disc-shaped. It is connected to the fixed outer frame 101 via a flexible decoupling leaf spring 202. The flexible decoupling leaf spring 202 adopts a slotted leaf spring structure distributed along the circumference. It is used to limit the parasitic displacement of the optical yaw unit 2 in the vertical direction, and at the same time decouple it from the other horizontal rotation axis when it deflects around one horizontal axis, thereby improving the stability and accuracy of the platform motion.

[0022] The optical fixing cylinder 203 is connected to the motion end platform 201, and an optical cavity is formed inside it, such as... Figure 5 As shown, the first V-shaped prism 204 and the second V-shaped prism 205 are rigidly fixed to the inner sidewall of the optical fixing cylinder 203.

[0023] The optical deflection unit 2 and the fixed unit 1 have entrance and exit light holes on their side walls. The fixed unit has an entrance external through hole and an exit external through hole on its side wall, and the optical fixed cylinder side wall of the optical deflection unit 2 has corresponding light-passing holes, including an entrance internal through hole and an exit internal through hole. The corresponding internal and external through holes are coaxially connected. External laser light enters through the entrance light hole, is reflected by the first V-shaped prism 204 and the second V-shaped prism 205 in sequence, and then exits through the exit light hole, thereby forming a folded optical path inside the optical deflection unit.

[0024] like Figure 6As shown, the first V-shaped prism and the second V-shaped prism form a V-shaped optical prism group. For example, the first V-shaped prism is arranged horizontally, and the second V-shaped prism is arranged vertically. The light-emitting end of the first V-shaped prism and the light-incoming end of the second V-shaped prism are positioned facing each other and close to each other. The incident light is refracted by the first V-shaped prism and then enters the second V-shaped prism. Specifically, the laser light enters from an opening on one side of the optical fixing cylinder 203, is refracted by the reflective surface of the first V-shaped prism 204, and is transmitted to the second V-shaped prism 205. After being reflected and refracted again, it exits from an opening on the other side. This double V-shaped prism layout utilizes the refraction and reflection characteristics of the prisms to achieve the folding and extension of the optical path within the compact space of the optical fixing cylinder 203.

[0025] In this embodiment, the double prism group integrated inside the optical deflection unit 2 forms a folded optical path within the device body through multiple internal reflections. This significantly compresses the overall axial dimensions of the device while extending the equivalent optical path by multiple times. Based on the amplification effect of the folded optical path on the angular displacement of the outgoing beam, the same deflection angle can correspond to a larger spot displacement in the far field. This achieves higher far-field pointing adjustment resolution with lower angular resolution requirements, facilitating the integration of the device into portable or space-constrained precision optical systems.

[0026] The flexible motion unit 3 is arranged circumferentially inside the fixed outer frame 101. Specifically, it is symmetrically arranged between the inner wall of the fixed unit 1 and the outer wall of the optical deflection unit 2 to provide elastic support.

[0027] The flexible motion unit 3 includes a first W-shaped positive Poisson's ratio structure 301, a second M-shaped negative Poisson's ratio structure 302, a first M-shaped negative Poisson's ratio structure 303, a second W-shaped positive Poisson's ratio structure 304, a first moving plate 305, a second moving plate 306, a third moving plate 307, and a fourth moving plate 308.

[0028] Specifically, such as Figure 7 As shown, the flexible motion unit 3 includes two sets of opposing positive and negative Poisson's ratio structures arranged alternately in the circumferential direction. The first W-shaped positive Poisson's ratio structure 301 and the first M-shaped negative Poisson's ratio structure 303 are arranged opposite each other to form a first driving pair. The second M-shaped negative Poisson's ratio structure 302 and the second W-shaped positive Poisson's ratio structure 304 are arranged opposite each other to form a second driving pair. The two driving pairs are arranged alternately in the circumferential direction and are perpendicular to each other, respectively corresponding to two orthogonal horizontal deflection axes.

[0029] The positive and negative Poisson's ratio structure adopts a multi-stage folded beam structure. It utilizes the elastic deformation of the material to enable the optical deflection unit 2 to produce a small (within a preset range) deflection motion relative to the fixed unit 1, thereby compensating for the angle of the laser beam reflected by the internal prism.

[0030] The first W-shaped positive Poisson's ratio structure 301 and the second W-shaped positive Poisson's ratio structure 304 include multiple folded elastic beams with their openings expanding outward in a W-shape. When the W-shaped structure is subjected to longitudinal tension, the two side arms retract inward and the lateral dimensions shrink, which conforms to the conventional deformation law of tension and lateral contraction, thus qualifying it as a positive Poisson's ratio structure.

[0031] The first M-type negative Poisson's ratio structure 303 and the second M-type negative Poisson's ratio structure 302 also include multiple folded elastic beams. Their opening direction is M-shaped and shrinks inward. The M-shape is a concave topological configuration. When subjected to longitudinal tension, the concave support arm expands outward and the lateral dimension widens simultaneously, exhibiting the abnormal deformation characteristics of tensile lateral expansion. Therefore, it is classified as a negative Poisson's ratio structure.

[0032] The included angle between each elastic beam is 120°.

[0033] Two sets of mutually perpendicular positive and negative Poisson's ratio structures drive the optical fixing cylinder to independently oscillate around the X-axis or Y-axis through the elastic bending of the folded beam. At the same time, the slotted leaf spring restricts the vertical movement while isolating the movement of the two axes, so that the oscillation in each direction does not interfere with each other, thereby achieving precise adjustment of dual-axis pointing without coupling.

[0034] Furthermore, the first W-type positive Poisson's ratio structure 301 and the first M-type negative Poisson's ratio structure 303 are connected to the first moving plate 305 and the fourth moving plate 308, and the second M-type negative Poisson's ratio structure 302 and the second W-type positive Poisson's ratio structure 304 are connected to the second moving plate 306 and the third moving plate 307. The four moving plates are grouped in pairs, with each group simultaneously controlling two pairs of Poisson's ratio structures, and each Poisson's ratio structure is simultaneously controlled by two moving plates, forming a tic-tac-toe cooperative driving mode.

[0035] The four moving plates are evenly distributed along the circumference and connected to the bottom surface of the fixed outer frame 101 by flexible hinges, and there is a set gap between them and the fixed outer frame 101 for transmitting driving force.

[0036] Based on the aforementioned structure, the working method of this mechanism is as follows: by controlling the minute displacements of the four moving plates 305-308, the first W-type positive Poisson's ratio structure 301 and the first M-type negative Poisson's ratio structure 303 pull or push the optical fixing cylinder 203, or the second M-type negative Poisson's ratio structure 302 and the second W-type positive Poisson's ratio structure 304 push or pull the optical fixing cylinder 203, or all four move simultaneously. This achieves high-precision oscillation movement of the optical fixing cylinder 203 and its internal prism assembly, thus compensating for the laser optical path.

[0037] Specifically, when the piezoelectric ceramic actuator (placed in the cavity between the moving plate and the fixed outer frame, with ball heads at both ends fixed in the circular holes of the four moving plates 305, 306, 307, and 308, the ceramic itself is not shown in the figure) drives the first moving plate 305, the second moving plate 306, the third moving plate 307, and the fourth moving plate 308 to produce radial or tangential displacement, the first W-type positive Poisson's ratio structure 301 and the first M-type negative Poisson's ratio structure 303 undergo coordinated deformation, and the second M-type negative Poisson's ratio structure 302 and the second W-type positive Poisson's ratio structure 304 undergo coordinated deformation. This drags or lifts the optical yaw unit 2, thereby achieving the yaw motion of the unit. For example, when the moving plates approach or move away from each other, the positive and negative Poisson's ratio structures connected to the moving plates, through their unique deformation characteristics, convert the linear displacement of the moving plates into the tilting and swaying of the optical fixed cylinder 203, which respectively generate a pushing or pulling force on the moving end platform 201, thereby causing the optical fixed cylinder 203 and the first V-shaped prism 204 and the second V-shaped prism 205 inside the cylinder to deflect, thus achieving the deflection of light.

[0038] Compared with existing traditional laser optical path compensation fast reflectors, this embodiment has fundamental differences and significant advantages in optical path construction, mechanical connection, and motion support mechanism. Traditional technology usually adopts a combination of discrete mirrors and independent deflection stages. This discrete architecture not only results in a large system size and sensitivity to environmental vibration, but also makes the optical axis calibration between components cumbersome, prone to drift after long-term use, and the long optical path can easily cause optical path quality loss.

[0039] In this embodiment, the M-shaped structure with negative Poisson ratio and the W-shaped structure with positive Poisson ratio serve as driving connecting rods. Due to the inherent properties of the materials and their multi-angled structure design, they exhibit stronger wear resistance and durability compared to traditional elastic beams, maintaining stable performance over extended periods. The positive and negative Poisson ratio structures possess excellent energy absorption effects, resulting in superior vibration resistance. Furthermore, the combined arrangement of the positive and negative Poisson ratio structures effectively counteracts parasitic displacements generated during movement, ensuring the stability of the rotation center of the optical fixing cylinder 203.

[0040] In this embodiment, instead of simply replacing a single V-beam with an M-shaped or W-shaped structure, a W-shaped folded beam with positive Poisson's ratio deformation characteristics and an M-shaped folded beam with negative Poisson's ratio deformation characteristics are arranged in pairs symmetrically. Compared to a single V-shaped structure, both the M-shaped and W-shaped beams are multi-stage folded beams, providing a longer effective deformation path within the same installation space. This reduces the equivalent rotational stiffness in the target yaw direction and improves the sensitivity of converting small linear drive displacements into yaw angular displacements. The W-shaped structure undergoes lateral contraction under tension, while the M-shaped concave structure undergoes lateral expansion under tension. These two structures have complementary lateral deformation characteristics. Through symmetrical differential arrangement, lateral displacements in non-target directions can compensate for each other, reducing the translational, torsional, and axial parasitic displacements of the optical fixing cylinder. The paired M-shaped and W-shaped structures can apply thrust and tension to the optical fixing cylinder respectively, forming a differential torque around the target rotation axis, which is beneficial for stabilizing the yaw center and reducing motion coupling between the two axes. Multi-level folding and symmetrical arrangement ensure yaw compliance while maintaining high stiffness in non-working directions, thereby improving the mechanism's impact resistance and beam pointing stability.

[0041] Furthermore, the geometric center, stiffness center, and optical center of the optical path folding cavity of the optical deflection unit 2 are arranged coaxially.

[0042] Specifically, in this embodiment, the three-center coaxiality is achieved through the arrangement of optical yaw units and the circumferentially symmetrical arrangement of flexible motion units.

[0043] The geometric center refers to the central axis of the cylindrical fixed outer frame 101 and the coaxially arranged optical fixing cylinder 203. The optical fixing cylinder 203 is located at the geometric center inside the fixed outer frame 101, and the two are arranged coaxially in the initial state.

[0044] The stiffness center refers to the equivalent elastic center of the flexible motion unit 3 that does not produce additional translational or torsional coupling when subjected to external forces. The first W-type positive Poisson's ratio structure 301, the second M-type negative Poisson's ratio structure 302, the first M-type negative Poisson's ratio structure 303, and the second W-type positive Poisson's ratio structure 304 are arranged symmetrically around the optical fixing cylinder 203, and the materials, thicknesses, and main geometric parameters of the relative structures are matched. Therefore, the equivalent stiffness of each flexible branch is symmetrical about the center of the mechanism, so that the intersection of the two equivalent yaw axes is located on the central axis of the mechanism.

[0045] The optical center refers to the optical reference center corresponding to the folded optical path formed by the first V-shaped prism 204, the second V-shaped prism 205, and their incident and exit light-passing holes. The two V-shaped prisms are rigidly installed inside the optical fixing cylinder 203, and the incident inner through hole and the exit inner through hole are arranged about the central area of ​​the optical fixing cylinder 203, so that the folded optical path passes through the central area of ​​the optical fixing cylinder 203.

[0046] During assembly, the common central axis of the fixed outer frame 101 and the optical fixing cylinder 203 is used as a reference. The V-shaped prism group and the light-transmitting hole are positioned in the central area corresponding to this axis, and the equivalent stiffness center of the flexible motion unit is located on this axis, thereby achieving the coincidence of the optical reference axis, the geometric central axis of the mechanism, and the axis where the equivalent stiffness center is located.

[0047] This embodiment embeds a double V-shaped prism and utilizes the compact cavity of the optical deflection unit to achieve multiple internal folds in the optical path. It achieves the optical path effect that traditional systems require long distances to reach within a very small physical size, with the optical center, the geometric center of the mechanism, and the stiffness center all coaxial. This configuration fundamentally avoids the torque coupling and assembly drift problems of the aforementioned split-type reflective structures, significantly improving integration and stability.

[0048] In this embodiment, the fixed unit 1, the optical yaw unit 2, and the flexible motion unit 3 are integrated structures. Specifically, the fixed outer frame 101, the moving plates 305-308, the positive and negative Poisson's ratio structures 301-304, the optical fixing cylinder 203, and the top motion end platform 201 are all integrated structures, formed by 3D printing molding, resulting in a compact structure. Compared to assembled yaw tables, which are prone to wear, gaps, and friction during long-term operation, this integrated structure avoids the problems of sensitivity to assembly errors, poor fatigue characteristics, and low reliability, and also has a more compact overall size.

[0049] In this embodiment, a V-shaped optical component is embedded within the central light-transmitting cavity of a flexible support mechanism, making the optical element a load-bearing part of the mechanism body and achieving triaxial coaxiality of the optical center, the geometric center of the mechanism, and the stiffness center. Compared to the structure of a reflective fast-reflecting mirror where the driving mechanism is located on the back of the mirror and the optomechanical stiffness center is separate from the optical center, this invention allows the optical element and the motion mechanism to respond synchronously under environmental vibration and temperature changes, avoiding the optical axis drift problem caused by assembly errors or environmental disturbances in a split optical path compensation system. At the same time, the driving torque acts directly on the stiffness center, significantly reducing vibration coupling and torque disturbance.

[0050] Example 2 This embodiment discloses a working method for a beam pointing compensation adjustment mechanism based on a dual-axis folded beam structure, including the following steps: By controlling the preset range displacement of multiple moving plates, any set of relatively arranged positive Poisson's ratio structures and negative Poisson's ratio structures can pull or push the optical fixing cylinder, or make two sets of Poisson's ratio structures move simultaneously, so as to realize the yaw motion of the optical fixing cylinder and the internal V-shaped optical prism group, and complete the compensation of the laser optical path.

[0051] This specific embodiment proposes embedding the optical components within the central optical cavity of the motion mechanism to achieve an integrated configuration. It introduces a motion system using a combination of positive and negative Poisson's ratio folded beams, and utilizes differential drive to achieve push-pull actuation of the motion end platform. Compared to traditional fast-reflecting mirror structures, this reduces the number of actuators, effectively saving costs. By utilizing the complementary deformation characteristics of symmetrically arranged "W" and "M" shaped structures, parasitic displacements during motion are effectively offset. This ensures high yaw sensitivity while providing extremely high axial stiffness and impact resistance, extending the yaw platform into an integrated device with specific beam pointing compensation functions. This successfully solves the problems of large size, low precision, and short lifespan of traditional mechanisms, enabling its application in numerous fields.

[0052] Each step or module involved in the above embodiment two corresponds to that in embodiment one. For specific implementation details, please refer to the relevant description section of embodiment one.

[0053] The above description is only a preferred embodiment of the present invention. The structures not shown or marked in detail in the accompanying drawings are those that can be conventionally designed and set by those skilled in the art based on common knowledge in the field after reading this specification. Their specific dimensions, positions and connection methods can be adjusted according to actual needs, as long as the functions described in the present invention can be achieved.

[0054] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A beam pointing compensation and adjustment mechanism based on a biaxial folded beam structure, characterized in that, It includes a fixed unit, an optical oscillation unit, and a flexible motion unit; The fixing unit is a hollow cylindrical structure; The optical deflection unit is located at the geometric center of the mechanism and includes an optical fixing cylinder and a V-shaped optical prism assembly fixed inside the cylinder. The optical fixing cylinder has a light-transmitting hole. The optical fixing cylinder is coaxially sleeved inside the fixing unit. The side wall of the fixing unit has an external entrance through hole and an external exit through hole, and the side wall of the optical fixing cylinder has a corresponding light-transmitting hole, including an internal entrance through hole and an internal exit through hole, with the corresponding internal and external through holes coaxially connected. The V-shaped optical prism assembly includes a first V-shaped prism and a second V-shaped prism. The first V-shaped prism is arranged horizontally, and the second V-shaped prism is arranged vertically. The light-emitting end of the first V-shaped prism and the light-incoming end of the second V-shaped prism are arranged facing each other and close to each other. The incident light is refracted by the first V-shaped prism and then enters the second V-shaped prism. Specifically, the laser enters from the opening on one side of the optical fixing cylinder, is refracted by the reflective surface of the first V-shaped prism, is transmitted to the second V-shaped prism, is reflected and refracted again, and then exits from the opening on the other side. The folding and extension of the optical path are realized in the compact space of the optical fixing cylinder. The flexible motion unit is arranged circumferentially between the fixed unit and the optical deflection unit, including two sets of oppositely arranged positive Poisson's ratio structures and negative Poisson's ratio structures, as well as moving plates corresponding to each Poisson's ratio structure; each Poisson's ratio structure is a multi-stage folded beam structure, one end of which is connected to the optical fixed cylinder, and the other end is indirectly connected to the fixed unit through the corresponding moving plate. Specifically, the multi-stage folded beam structure is connected between the fixed unit and the optical fixed cylinder of the optical deflection unit. The multi-stage folded beam structure undergoes elastic deformation under driving action, causing the optical deflection unit to deflect within a preset range relative to the fixed unit, so as to achieve angle compensation for the light beam refracted by the prism in the optical fixed cylinder. The geometric center, stiffness center, and optical center of the optical path folding cavity of the optical deflection unit are arranged coaxially.

2. The beam pointing compensation and adjustment mechanism based on a biaxial folded beam structure as described in claim 1, characterized in that, The optical yaw unit also includes a disc-shaped motion end platform, which is connected to the fixed unit via a flexible decoupling leaf spring; the optical fixed cylinder is connected to the motion end platform; the flexible decoupling leaf spring is a slotted leaf spring structure with slots evenly distributed along the circumference; the flexible decoupling leaf spring constrains the optical yaw unit to generate vertical parasitic displacement and decouples the rotational coupling of the optical yaw unit's deflection motion around two horizontal axes.

3. The beam pointing compensation and adjustment mechanism based on a dual-axis folded beam structure as described in claim 1, characterized in that, The two sets of oppositely arranged positive and negative Poisson's ratio structures specifically include: a first W-type positive Poisson's ratio structure, a first M-type negative Poisson's ratio structure, a second W-type positive Poisson's ratio structure, and a second M-type negative Poisson's ratio structure; the first W-type positive Poisson's ratio structure and the first M-type negative Poisson's ratio structure are arranged opposite to each other; the second M-type negative Poisson's ratio structure and the second W-type positive Poisson's ratio structure are arranged opposite to each other.

4. The beam pointing compensation and adjustment mechanism based on a biaxial folded beam structure as described in claim 3, characterized in that, The first W-type positive Poisson's ratio structure and the first M-type negative Poisson's ratio structure are connected to the first moving plate and the fourth moving plate, and the second M-type negative Poisson's ratio structure and the second W-type positive Poisson's ratio structure are connected to the second moving plate and the third moving plate.

5. The beam pointing compensation and adjustment mechanism based on a dual-axis folded beam structure as described in claim 1, characterized in that, The moving plates are evenly distributed along the circumference and connected to the bottom surface of the fixed unit via flexible hinges, with a set gap between them for transmitting driving force.

6. The beam pointing compensation and adjustment mechanism based on a biaxial folded beam structure as described in claim 1, characterized in that, The fixed unit, optical oscillation unit, and flexible motion unit are integrated into a single structure.

7. A method for operating a beam pointing compensation adjustment mechanism based on a biaxial folded beam structure as described in any one of claims 1-6, characterized in that, include: By controlling the preset range displacement of multiple moving plates, any set of relatively arranged positive Poisson's ratio structures and negative Poisson's ratio structures can pull or push the optical fixing cylinder, or make two sets of Poisson's ratio structures move simultaneously, so as to realize the yaw motion of the optical fixing cylinder and the internal V-shaped optical prism group, and complete the compensation of the laser optical path.

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