Light source system and optical detection device

Abstract

The application provides a light source system and an optical detection device, the light source system comprising: a light source assembly, an adjusting assembly and a light homogenizing assembly; the light source assembly is used for generating and outputting a light beam; the adjusting assembly comprises a first lens, a second lens and an adjustable diaphragm, and is used for adjusting the divergence angle of the light beam through the adjustable diaphragm; the first lens is arranged in the light output direction of the light source assembly, the adjustable diaphragm is arranged between the first lens and the second lens, and the second lens is arranged between the adjustable diaphragm and the light homogenizing assembly; the light homogenizing assembly comprises a square rod, the end face of the square rod is aligned with the focal point of the second lens, and is used for making the light spot of the adjusted light beam uniform. Through the function segmentation design of the optical path, the contradiction between the high uniformity and the divergence angle adjusting function separation of the traditional scheme is solved; through the light source assembly, the adjusting assembly and the light homogenizing assembly, the light source system is compatible with the high uniformity and the divergence angle adjusting function in a single device, and the function integration and adaptability of the system are significantly improved.

Description

Technical Field

[0001] This application relates to the field of optical lighting technology, and in particular to a light source system and an optical detection device. Background Technology

[0002] In the field of optical lighting, light sources with high spot uniformity are often used in biomedical imaging, industrial inspection, and optical measurement calibration. However, in practical applications, light sources usually need to be matched to illumination of samples or sensors of different sizes to avoid errors caused by over-illumination or under-illumination.

[0003] Existing light homogenization and divergence angle adjustment technologies have significant limitations: traditional light homogenization technologies such as compound eyes and integrating spheres achieve light field homogenization, but they are bulky and have fixed, non-adjustable divergence angles, making them only suitable for single scenes and unable to meet dynamic adjustment needs; meanwhile, although zoom lenses and spatial light modulators can adjust the beam divergence angle, the former suffers from slow adjustment speed and vibration error, while the latter is costly, and both are difficult to maintain beam uniformity during dynamic adjustment. Summary of the Invention

[0004] This application provides a light source system and an optical detection device to achieve the effect of adjusting the divergence angle and the uniformity of the light spot.

[0005] In a first aspect, embodiments of this application provide a light source system, including: a light source component, an adjustment component, and a light-diffusing component;

[0006] The light source component is used to generate and output a light beam;

[0007] The adjustment assembly includes a first lens, a second lens, and an adjustable aperture, used to adjust the divergence angle of the beam via the adjustable aperture;

[0008] The first lens is positioned in the light-emitting direction of the light source assembly, the adjustable aperture is positioned between the first lens and the second lens, and the second lens is positioned between the adjustable aperture and the light-diffusing assembly.

[0009] The beam homogenizing assembly includes a square bar, the end face of which is aligned with the focal point of the second lens to make the beam spot uniform after adjustment.

[0010] In one embodiment, the aperture of the adjustable aperture is positively correlated with the divergence angle of the light beam;

[0011] The adjustable aperture is positioned at the pupil surface between the first lens and the second lens.

[0012] In one embodiment, the axial cross-sectional shape of the square bar is polygonal.

[0013] In one embodiment, the light source assembly includes a heat dissipation device and an LED lamp;

[0014] The heat dissipation device is attached to the LED light.

[0015] In one embodiment, the adjustment assembly further includes a lens barrel, a spacer, and a washer;

[0016] The lens barrel is used to stack and mount the first lens, the second lens, and the adjustable aperture.

[0017] The spacer is used to define the axial position of the first lens, the second lens, and the adjustable stop;

[0018] The gasket is placed between the first lens, the second lens, and the adjustable aperture.

[0019] In one embodiment, the adjustment assembly further includes a first mirror mount, a second mirror mount, and an adjustment device; the spacers include a first spacer, a second spacer, a third spacer, and a fourth spacer; the washers include a first washer and a second washer;

[0020] The adjustment device is connected to the adjustable aperture;

[0021] The first spacer, the first lens mount, the first lens, the first washer and the second spacer, the adjustable aperture, the third spacer, the second washer, the second lens, the second lens mount and the fourth spacer are stacked along the inner wall of the lens barrel.

[0022] In one embodiment, the lens barrel includes a tubular portion and a square disc-shaped portion;

[0023] The tubular section is provided with an arc-shaped through groove;

[0024] The arc-shaped through slot is used to install the adjustment device of the adjustable aperture, and the adjustment device is connected to the adjustment screw hole of the adjustable aperture.

[0025] In one embodiment, the square disc-shaped portion is fixedly connected to the light source assembly.

[0026] In one embodiment, the light-diffusing assembly includes: a sleeve, a first setter wire, and a second setter wire;

[0027] The sleeve connects to the lens barrel;

[0028] The first and second set screws are installed on both sides of the sleeve to fix the square bar.

[0029] Secondly, embodiments of this application provide an optical detection device, including a detection body and a light source system as described in any of the above;

[0030] The detection body is equipped with an optical path channel. The light beam output by the light source system passes through the optical path channel and is incident on the sample to be tested.

[0031] The detection unit is equipped with an image acquisition module to acquire detection images of the sample to be tested.

[0032] This application provides a light source system and an optical detection device. The light source system includes: a light source component, an adjustment component, and a light homogenizing component. The light source component generates and outputs a light beam. The adjustment component includes a first lens, a second lens, and an adjustable aperture, used to adjust the divergence angle of the light beam through the adjustable aperture. The first lens is disposed in the light output direction of the light source component, the adjustable aperture is disposed between the first lens and the second lens, and the second lens is disposed between the adjustable aperture and the light homogenizing component. The light homogenizing component includes a square rod, the end face of which is aligned with the focal point of the second lens, to make the light spot of the adjusted light beam uniform. By employing a segmented design of the optical path, the contradiction between high uniformity and divergence angle adjustment functions in traditional technologies is resolved. The first lens converts the diverging beam into a parallel beam, and the adjustable aperture dynamically controls the beam radius by changing the aperture diameter, thereby achieving continuous adjustment of the divergence angle. The second lens precisely focuses the adjusted beam onto the end face of the square rod, avoiding optical path obstruction or reflection loss. The beam spot is homogenized through multiple total internal reflections by the square rod, and the uniformity is not destroyed during the divergence angle adjustment process. This allows the light source system to be compatible with high uniformity and adjustable divergence angle functions in a single device, significantly improving the system's functional integration and scene adaptability, while avoiding optical performance degradation caused by functional separation. Attached Figure Description

[0033] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0034] Figure 1 A schematic diagram of a light source system provided in an embodiment of this application;

[0035] Figure 2 An internal cross-sectional view of a light source system provided in an embodiment of this application;

[0036] Figure 3 Ray tracing diagrams for controlling large, medium, and small divergence angles in a light source system provided in an embodiment of this application;

[0037] Figure 4 This is a schematic diagram of the divergence angle control curve provided in an embodiment of this application;

[0038] Figure 5 This is a schematic diagram of the light spot morphology output by a light source assembly provided in an embodiment of this application;

[0039] Figure 6 This is a schematic diagram of the light spot morphology output by a light source system provided in an embodiment of this application;

[0040] Figure 7 This is a schematic diagram of a square light spot provided in another embodiment of this application.

[0041] Figure label:

[0042] 100. Light source assembly; 200. Adjustment assembly; 300. Light homogenizing assembly; 1. Cooling fan; 2. Heat sink; 3. LED light; 4. First spacer; 5. First lens mount; 6. First washer; 7. First lens; 8. Second spacer; 9. Adjustable aperture; 10. Adjustment device; 11. Third spacer; 12. Second washer; 13. Second lens mount; 14. Second lens; 15. Fourth spacer; 16. Lens barrel; 17. First set screw; 18. Second set screw; 19. Sleeve; 20. Square bar.

[0043] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0044] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0045] Explanation of technical terms in this application:

[0046] Divergence angle: used to measure the speed at which a beam diverges outward from the beam waist. The lower the divergence angle, the more collimated the beam propagates. For example, if the beam radius changes close to 0 over a long transmission distance, it is called a collimated beam.

[0047] Gaussian beam: The cross-section is a light spot with a Gaussian distribution. Its shape is a circular light spot with a very bright center, blurred edges, and a smooth transition from brightness to darkness.

[0048] The technical solution of this application is applicable to scenarios such as biomedical imaging (e.g., cell microscopy), industrial inspection (e.g., precision workpiece dimension measurement), optical measurement calibration (e.g., sensor calibration), and general laboratory lighting. The product structure adopts a modular stacked design, including a high-power LED light source assembly, a divergence angle adjustment assembly, and a light homogenizing assembly. The overall structure is compact and easy to integrate into equipment such as microscopes, spectrometers, and industrial cameras. By adjusting the aperture diameter, users can quickly adapt to the lighting needs of samples of different sizes, while the polygonal cross-section design of the square rod (triangular, rectangular, hexagonal) can flexibly match different light spot morphology requirements, significantly improving the versatility and flexibility of the light source system.

[0049] In existing technologies, while uniform light source systems (such as integrating spheres) can achieve highly uniform light spots, their fixed divergence angle cannot adapt to the illumination requirements of different sample sizes. While divergence angle adjustment schemes based on zoom lenses or spatial light modulators can dynamically adjust the beam divergence angle, they often sacrifice spot uniformity and suffer from low adjustment accuracy, high cost, and complex assembly. For example, in industrial inspection scenarios, if it is necessary to inspect tiny workpieces, traditional uniform light sources are prone to over-illumination due to excessive divergence angles, affecting inspection accuracy. Using zoom lenses to adjust the divergence angle requires frequent lens adjustments, and spot uniformity is difficult to maintain. Furthermore, the low coupling efficiency between existing light sources and the square rod, and the problem of optical path obstruction leading to insufficient optical power utilization, further limit system performance.

[0050] Starting from the contradictions in existing technologies, the inventors first identified the core problem that high uniformity and divergence angle adjustment functions need to be implemented separately by different systems. The light source system provided in this application solves the contradiction of separating high uniformity and divergence angle adjustment functions in traditional technologies through functional segmentation design of the optical path. The first lens converts the diverging beam into a parallel beam, and the adjustable aperture dynamically controls the beam radius by changing the light transmission aperture, thereby realizing continuous adjustment of the divergence angle. The second lens accurately focuses the adjusted beam onto the end face of the square rod, avoiding optical path obstruction or reflection loss. The light spot is homogenized by multiple total internal reflections of the square rod, and the uniformity is not destroyed during the divergence angle adjustment process. This allows the light source system to be compatible with high uniformity and adjustable divergence angle functions in a single device, significantly improving the system's functional integration and scene adaptability, while avoiding optical performance degradation caused by functional separation.

[0051] The technical solution of this application and how the technical solution of this application solves the above-mentioned technical problems are described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments. The embodiments of this application will now be described with reference to the accompanying drawings.

[0052] like Figure 1 As shown, Figure 1 This is a schematic diagram of a light source system provided in an embodiment of this application. The light source system includes: a light source assembly 100, an adjustment assembly 200, and a light homogenizing assembly 300; the light source assembly 100 is used to generate and output a light beam; the adjustment assembly 200 includes a first lens 7, a second lens 14, and an adjustable aperture 9, used to adjust the divergence angle of the light beam through the adjustable aperture 9; the first lens 7 is disposed in the light output direction of the light source assembly 100, the adjustable aperture 9 is disposed between the first lens 7 and the second lens 14, and the second lens 14 is disposed between the adjustable aperture 9 and the light homogenizing assembly 300; the light homogenizing assembly 300 includes a square rod 20, the end face of which is aligned with the focal point of the second lens 14, used to make the light spot of the adjusted light beam uniform.

[0053] In one embodiment, the first lens 7 is used to convert the light beam output by the light source assembly 100 into a parallel light beam.

[0054] In one embodiment, the second lens 14 is used to focus the beam after the adjustable aperture 9 onto the end face of the square bar 20.

[0055] In one embodiment, both the first lens 7 and the second lens 14 are plano-convex lenses.

[0056] Specifically, the light source system mainly consists of three parts: a light source component 100, an adjustment component 200, and a light homogenizing component 300, using a stacked assembly structure. In existing technologies, high uniformity illumination and adjustable beam divergence angle cannot be compatible in a single system, requiring the switching of different devices to adapt to diverse scene requirements. Through the collaborative design of the first lens 7, the second lens 14, the adjustable aperture 9, and the square rod 20, the dual objectives of beam divergence angle adjustment and beam spot uniformity are achieved in a single optical path. Specifically, the large divergence angle beam emitted by the light source component 100 is converted into a parallel beam by the first lens 7. After the beam radius is controlled by the adjustable aperture 9, the second lens 14 focuses the beam onto the end face of the square rod 20. The polygonal cross-sectional structure inside the square rod 20, such as a hexagon, achieves beam spot uniformity through multiple total internal reflections, and the divergence angle adjustment process does not change the beam spot uniformity. If the end face of the square rod 20 is not aligned with the focal point of the second lens 14, the beam may not be efficiently coupled, potentially leading to optical path loss or reflection problems.

[0057] This application resolves the contradiction between high uniformity and divergence angle adjustment functions in traditional technologies through a functional segmentation design of the optical path. The first lens 7 converts the diverging beam into a parallel beam, and the adjustable aperture 9 dynamically controls the beam radius by changing the aperture, thereby achieving continuous adjustment of the divergence angle. The second lens 14 precisely focuses the adjusted beam onto the end face of the square rod 20, avoiding optical path obstruction or reflection loss. The square rod 20 homogenizes the light spot through multiple total internal reflections, and the divergence angle adjustment process does not destroy uniformity. This allows the light source system to be compatible with high uniformity and adjustable divergence angle functions in a single device, significantly improving the system's functional integration and scene adaptability, while avoiding optical performance degradation caused by functional separation.

[0058] In one embodiment, the axial cross-sectional shape of the square bar 20 is polygonal.

[0059] In one embodiment, the square rod 20 is made of solid quartz.

[0060] In one embodiment, the axial cross-sectional shape of the square bar 20 can be triangular, quadrilateral, or hexagonal.

[0061] Specifically, the cross-sectional shape (hexagonal or rectangular) of the square rod 20 shapes the input beam into a corresponding hexagonal or rectangular spot through multiple total internal reflections. The focal point of the second lens 14 is aligned with the end face of the square rod 20, ensuring efficient coupling of the beam into the interior of the square rod 20 and avoiding optical path loss due to focal point offset. Optionally, square rods 20 with different cross-sectional shapes can be adapted to the spot requirements of different application scenarios.

[0062] Based on achieving uniform light spot, this application further achieves flexible adaptation of the output light spot morphology through the diversified design of the cross-sectional shape of the square rod 20 and the focus alignment structure, thus expanding the application range of the light source system. For example, in biomedical imaging, hexagonal light spots can be adapted to match specific sensor structures, or rectangular light spots can be used in industrial inspection to cover regular workpiece areas.

[0063] In one embodiment, the light source assembly 100 includes a heat dissipation device and an LED lamp 3; the heat dissipation device is attached to the LED lamp 3.

[0064] In one embodiment, the heat dissipation device includes a heat sink 2 and a cooling fan 1.

[0065] Optionally, the heat sink 2 can be made of metal, such as copper or aluminum.

[0066] In one embodiment, the light source assembly 100 is a structure that includes LED lamps 3. For example, the light source assembly 100 is a light source module that includes one or more LED chips.

[0067] Specifically, such as Figure 2 As shown, Figure 2 This is an internal cross-sectional view of a light source system provided in an embodiment of this application. To ensure the high power output of the light source system, when the system is turned on, the heat generated by the LED lamp 3 inside the light source component 100 is conducted to the cooling fan 1 by the metal heat sink 2 attached to the LED lamp 3, and is continuously dissipated by the cooling fan 1 to maintain the operating temperature of the LED lamp 3 and ensure the stability of the light source system during high-power operation.

[0068] This application solves the problem of heat accumulation in the light source component 100 by integrating the metal heat sink 2 with the fan, significantly improving the long-term reliability of the system. At the same time, it provides a feasible path for the compact design of high-power light source systems.

[0069] In one embodiment, the aperture of the adjustable stop 9 is positively correlated with the divergence angle of the output beam; the adjustable stop 9 is located at the pupil surface between the first lens 7 and the second lens 14.

[0070] The pupil plane position refers to the position in an optical system where the angular size of the light beam is the smallest, and it is usually a key control point for beam adjustment. For example, between the first lens 7 and the second lens 14, the pupil plane is the cross section with the smallest beam diameter.

[0071] Specifically, the adjustable aperture 9 is positioned at the pupil surface between the first lens 7 and the second lens 14, controlling the beam radius by changing the aperture diameter. When the aperture diameter increases, the beam radius increases, and the divergence angle of the output beam after focusing by the second lens 14 increases; conversely, when the aperture diameter decreases, the divergence angle decreases. This application ensures a linear correspondence between the aperture adjustment process and the change in divergence angle. Furthermore, the selection of the pupil surface position optimizes the efficiency of beam adjustment. The aperture diameter of the adjustable aperture 9 can be determined according to actual conditions, and this application does not impose any limitations on it.

[0072] In one embodiment, the adjustment assembly 200 further includes a lens barrel 16, a spacer, and a washer; the lens barrel 16 is used to stack and mount the first lens 7, the second lens 14, and the adjustable aperture 9; the spacer is used to define the axial position of the first lens 7, the second lens 14, and the adjustable aperture 9; and the washer is disposed between the first lens 7, the second lens 14, and the adjustable aperture 9.

[0073] In one embodiment, the washer is an elastic washer.

[0074] In one embodiment, the adjustment assembly 200 further includes a first lens mount 5, a second lens mount 13, and an adjustment device 10; the spacers include a first spacer 4, a second spacer 8, a third spacer 11, and a fourth spacer 15; the washers include a first washer 6 and a second washer 12; the adjustment device 10 is connected to the adjustable aperture 9; the first spacer 4, the first lens mount 5, the first lens 7, the first washer 6 and the second spacer 8, the adjustable aperture 9, the third spacer 11, the second washer 12, the second lens 14, the second lens mount 13, and the fourth spacer 15 are stacked along the inner wall of the lens barrel 16.

[0075] Specifically, please refer to Figure 2The lens barrel 16 is a cylindrical structure used to house and fix optical elements. Optionally, the lens barrel 16 can be a hollow cylinder made of metal or plastic. A spacer is a ring-shaped gasket used to separate and fix the position of the optical elements. Optionally, the spacer can be made of metal or engineering plastic. As the main body of the divergence angle adjustment assembly 200, the lens barrel 16, through the spacer, defines the axial position of the first lens 7, the adjustable aperture 9, and the second lens 14, ensuring the alignment accuracy of the optical elements. The elastic gasket is placed between adjacent elements to absorb assembly errors and thermal deformation, avoiding optical path misalignment caused by mechanical stress, and significantly improving the coaxiality and long-term stability of the optical assembly. This application solves the problem of optical path misalignment caused by mechanical stress in traditional assembly through the stacked structure of the lens barrel 16 and the buffer design of the elastic gasket, simplifying the assembly process, reducing reliance on manual operation precision, and improving the system's vibration resistance and long-term reliability.

[0076] In one embodiment, the lens barrel 16 includes a tubular portion and a square disc-shaped portion; the tubular portion is provided with an arc-shaped through groove; the arc-shaped through groove is used to install the adjustment device 10 of the adjustable aperture 9, and the adjustment device 10 is connected to the adjustable aperture 9.

[0077] In one embodiment, the adjusting device 10 is an adjusting screw, which is threadedly connected to the adjusting screw hole on the adjustable aperture 9.

[0078] Specifically, the tubular section has two internal threads, which can be fitted and fixed with the sleeve 19 in the light-diffusing assembly 300. Please refer to [link / reference]. Figure 2 The arc-shaped opening on the side wall of the lens barrel 16 is used to accommodate the adjustment device 10, which is an adjustment screw in this example. Optionally, the arc-shaped slot can be a semi-circular or elliptical opening, and this application does not limit this. The arc-shaped slot in the tubular part of the lens barrel 16 provides installation space for the adjustment screw. The adjustment screw is connected to the adjustment screw hole of the adjustable aperture 9 through a threaded connection. Rotating the adjustment screw can drive the adjustable aperture to move, thereby changing the light transmission diameter and realizing the mechanical transmission of aperture adjustment, ensuring the accuracy and stability of the adjustment process. This application improves the convenience and accuracy of aperture adjustment through the mechanical linkage design of the arc-shaped slot and the adjustment screw, avoids the performance fluctuation problem caused by operation error in traditional manual adjustment, and significantly optimizes the adjustment efficiency of the system. In other embodiments, the connection method between the adjustment device 10 and the adjustable aperture 9 can also be other connection methods, and the threaded connection is only one example.

[0079] In one embodiment, the square disc-shaped portion is fixedly connected to the light source assembly 100.

[0080] Specifically, the through holes at the four corners of the square disc-shaped portion are aligned and engaged with the external holes on the high-power light source assembly 100 for secure installation. During assembly, the lens barrel 16 is first secured to the high-power light source assembly 100 using four screws. Then, the first spacer 4, first lens mount 5, first lens 7, first elastic washer, second spacer 8, adjustable aperture 9, third spacer 11, second elastic washer, second lens 14, second lens mount 13, and fourth spacer 15 are stacked sequentially along the inner wall of the lens barrel 16. After all components are in place, the adjusting screw is aligned with the adjusting screw hole on the adjustable aperture 9, which is already stacked on the corresponding position of the tubular portion of the lens barrel 16, along the arc-shaped through groove on the tubular portion of the lens barrel 16 for installation. The thickness of the first spacer 4, second spacer 8, third spacer 11, fourth spacer 15, first lens mount 5, and second lens mount 13, as well as the depth of the inner wall of the lens barrel 16, are determined by the system's geometric optical design and are not limited herein.

[0081] In one embodiment, the light-diffusing assembly 300 includes: a sleeve 19, a first set screw 17 and a second set screw 18; the sleeve 19 is connected to the lens barrel 16; the first set screw 17 and the second set screw 18 are installed on both sides of the sleeve 19 for fixing the square rod 20.

[0082] Specifically, the sleeve 19 includes a tubular portion and a disc-shaped portion. The disc-shaped portion has two through holes, corresponding to the two internally threaded holes on the cross-section of the tubular portion of the lens barrel 16, for aligning and fixing the light-diffusing component 300 and the adjusting component 200. The tubular portion has two internally threaded holes on its side, for installing the first set screw 17 and the second set screw 18 from the side, to achieve the purpose of fixing and fine-tuning the square bar 20. The interior of the sleeve 19 is designed with through holes that match the cross-sectional shape of the square bar 20. The axial cross-section of the square bar 20 can be triangular, rectangular, hexagonal, etc.

[0083] Figure 3This is a ray tracing diagram showing the control of large, medium, and small divergence angles in a light source system according to an embodiment of this application. The light source assembly 100 is configured such that the LED lamp outputs a beam with a 30° divergence half-angle. The divergent beam first passes through a first lens 7, which focuses it into a collimated parallel beam. The parallel beam then passes through an adjustable aperture 9, whose radius is controlled by adjusting the aperture's radius. The parallel beam, with its radius controlled, then passes through a second lens 14, which focuses it at the left end face of a square rod 20, efficiently coupling the beam into the square rod 20. In this example, the square rod 20 is a quartz hexagonal square rod 20. The beam focused and coupled into the square rod 20 undergoes multiple reflections within the hexagonal structure, thus achieving beam shaping and uniform illumination. Simultaneously, the divergence angle of the beam, after multiple reflections within the square rod 20, remains unchanged, ensuring the divergence angle adjustment assembly 200 effectively controls the output beam's divergence angle.

[0084] Please see Figure 3 , Figure 3 The ray tracing diagrams in the image, from top to bottom, represent: large divergence angle, medium divergence angle, and small divergence angle. The illumination spot of the final output beam from the light source system shows the beam pattern after adjustment by the adjustable aperture 9. An example will be provided below to illustrate this.

[0085] The parameters of the optical components in this example are for reference only. The first lens 7 is a plano-convex lens with a center thickness of 8.6 mm, a convex curvature of 17.54 mm, and is made of BK7 material. In this example, the aperture range of the adjustable stop 9 is 0~13 mm. The second lens 1414 is a plano-convex lens with a center thickness of 8.6 mm, a convex curvature of 16.67 mm, and is made of BK7 material. The square rod 20 is a regular hexagonal quartz square rod 20 with a diagonal length of 6.93 mm. Detailed parameters are shown in Table 1, where "inf." means the radius of curvature is infinite.

[0086] Table 1: Specific parameters of a uniform light source with adjustable divergence angle

[0087]

[0088] When the light source system is working, the adjustable aperture 9 can be adjusted by sliding the adjustment device 10 of the adjustable aperture 9 according to the size of the sample to be tested, so as to achieve the required output light divergence angle. For example... Figure 4 As shown, Figure 4This is a schematic diagram of the divergence angle control curve provided in an embodiment of this application. The horizontal axis represents the aperture of the adjustable aperture 9, and the vertical axis represents the half-angle of the output beam divergence. The curve in the diagram represents the changing trend of the aperture of the adjustable aperture 9 and the output beam divergence angle. The output beam divergence angle is directly proportional to the aperture size of the adjustable aperture 9. Please refer to... Figure 3 For applications with large divergence angles, the aperture diameter is 13mm and the half-divergence angle is 29.63°; for medium divergence angles, the aperture diameter is 10mm and the half-divergence angle is 20.30°; and for small divergence angles, the aperture diameter is 7mm and the half-divergence angle is 12.5°. The divergence angle refers to the angle between the peripheral rays and the central ray of a light beam or particle beam during propagation. The half-divergence angle is half the divergence angle, that is, the angle between the central ray and the peripheral rays.

[0089] Figure 5 This is a schematic diagram of the light spot morphology output by a light source assembly provided in an embodiment of this application. Figure 6 This is a schematic diagram showing the shape of the light spot output by a light source system provided in an embodiment of this application. Clearly, Figure 5 It is the light spot morphology directly output without adjustment and homogenization components, while Figure 6 The displayed light spot morphology is achieved through optical modulation of the entire light source system, transforming the Gaussian beam distribution output by the light source components into a uniform hexagonal distribution.

[0090] In this application, the light source component 100 of the light source system can be selected with different divergence angles, and different first lenses 7 and second lenses 14 can be designed to match different divergence angles. Similarly, the adjustable aperture size and other structural dimensions of the adjustable aperture 9 are also changed accordingly. In addition, when the square rod 20 is transformed into other types of square rod 20, the output beam will be shaped into other spot patterns.

[0091] like Figure 7 As shown, Figure 7 This is a schematic diagram of a square light spot provided in another embodiment of this application. In this example, using the design parameters of the adjustment component 200 in Table 1, when the square bar 20 is a rectangular bar, the divergence angle control of the output beam remains consistent with the embodiment where the square bar is hexagonal, provided that the light source component 100 and the adjustment component 200 remain unchanged. The relationship between the aperture of the adjustable aperture 9 and the output light divergence angle is as follows: Figure 4 As shown. The internal design of the sleeve 19 of the square bar 20 is a square through hole that matches the cross-sectional shape of the square bar 20.

[0092] This application provides an optical inspection device, including an inspection body and a light source system as described above; the inspection body is provided with an optical path channel, and the output beam of the light source system passes through the optical path channel and is incident on the sample to be tested; the inspection body is equipped with an image acquisition module, which is used to acquire the inspection image of the sample to be tested.

[0093] The division of units is merely a logical functional division; in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be indirect coupling or communication connection through some interfaces, devices, or units, and may be electrical, mechanical, or other forms.

[0094] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0095] In addition, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0096] Finally, it should be noted that other embodiments of the invention will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This invention is intended to cover any variations, uses, or adaptations of the invention that follow the general principles of the invention and include common knowledge or customary techniques in the art not disclosed herein, and is not limited to the precise structures described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of the invention is limited only by the appended claims.

Claims

1. A light source system, characterized in that, include: Light source assembly (100), adjustment assembly (200) and light homogenizing assembly (300); The light source assembly (100) is used to generate and output a light beam; The adjustment assembly (200) includes a first lens (7), a second lens (14), and an adjustable aperture (9) for adjusting the divergence angle of the beam through the adjustable aperture (9); The first lens (7) is disposed in the light-emitting direction of the light source assembly (100), the adjustable aperture (9) is disposed between the first lens (7) and the second lens (14), and the second lens (14) is disposed between the adjustable aperture (9) and the light-diffusing assembly (300). The light-uniforming component (300) includes a square bar (20), the end face of which is aligned with the focal point of the second lens (14) to make the light spot of the adjusted beam uniform.

2. The light source system according to claim 1, characterized in that, The aperture of the adjustable aperture (9) is positively correlated with the divergence angle of the beam; The adjustable aperture (9) is positioned at the pupil surface between the first lens (7) and the second lens (14).

3. The light source system according to claim 1, characterized in that, The axial cross-section of the square bar (20) is polygonal.

4. The light source system according to claim 1, characterized in that, The light source assembly (100) includes a heat dissipation device and an LED lamp (3); The heat dissipation device is fitted to the LED lamp (3).

5. The light source system according to claim 1, characterized in that, The adjustment assembly (200) also includes a lens barrel (16), a spacer, and a washer; The lens barrel (16) is used to stack and mount the first lens (7), the second lens (14) and the adjustable aperture (9). The spacer ring is used to define the axial positions of the first lens (7), the second lens (14) and the adjustable aperture (9); The washer is disposed between the first lens (7), the second lens (14) and the adjustable aperture (9).

6. The light source system according to claim 5, characterized in that, The adjustment assembly (200) further includes a first mirror mount (5), a second mirror mount (13), and an adjustment device (10); the spacers include a first spacer (4), a second spacer (8), a third spacer (11), and a fourth spacer (15); the washers include a first washer (6) and a second washer (12); The adjustment device (10) is connected to the adjustable aperture (9); The first spacer (4), the first lens mount (5), the first lens (7), the first gasket (6), the second spacer (8), the adjustable aperture (9), the third spacer (11), the second gasket (12), the second lens (14), the second lens mount (13), and the fourth spacer (15) are stacked along the inner wall of the lens barrel (16).

7. The light source system according to claim 6, characterized in that, The lens tube (16) includes a tubular portion and a square disc-shaped portion; The tubular portion is provided with an arc-shaped through groove; The arc-shaped through slot is used to install the adjustment device (10) of the adjustable aperture (9), and the adjustment device (10) is connected to the adjustable aperture (9).

8. The light source system according to claim 7, characterized in that, The square disc-shaped portion is fixedly connected to the light source assembly (100).

9. The light source system according to claim 5, characterized in that, The light-diffusing assembly (300) includes: a sleeve (19), a first set screw (17), and a second set screw (18); The sleeve (19) is connected to the lens barrel (16); The first set screw (17) and the second set screw (18) are installed on both sides of the sleeve (19) to fix the square bar (20).

10. An optical inspection device, characterized in that, Includes a detection body and a light source system as described in any one of claims 1-9; The detection body is provided with an optical path channel, and the light beam output by the light source system passes through the optical path channel and is incident on the sample to be tested; The detection unit is equipped with an image acquisition module for acquiring detection images of the sample to be tested.

Images