A safety locking device for a reticle fork handover of a semiconductor precision equipment

Abstract

The application relates to the technical field of semiconductor manufacturing equipment, in particular to a version fork handover safety locking device for a semiconductor precision device. The device uses a servo motor as a power source, moves a positioning pin connected with a safety pin mounting base through the rotary motion of a needle bearing, and then realizes the locking function of inserting the safety pin into the version fork; meanwhile, an inductive sensor is arranged to realize the state detection of the unlocking action; the transmission part of the device is space-closed, is provided with an air pipe joint, realizes the particle pumping and discharging function, and improves the service life of the device.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing equipment technology, and in particular to a safety locking device for plate fork handover in semiconductor precision equipment. Background Technology

[0002] In semiconductor precision equipment, the mask serves as the core carrier for pattern transfer. Its transmission process is usually completed by a robotic arm in conjunction with an end-plate fork, which can perform pick-up, drop-off, and handover actions between various modules.

[0003] Currently, the masking fork is generally equipped with torque sensors and inductive sensors to protect the transmission process. When a collision occurs, the torque sensor reaches the force threshold, and the collision sensor is immediately triggered, thereby stopping the transmission action and protecting the masking template.

[0004] The existing technology has the following technical problems: (1) Insufficient handover reliability: During the handover process between materials and tower modules, extreme situations such as fork collision and mask damage may occur due to the movement failure of the robot and sensor downtime, such as motor encoder failure, loss of handover station, power outage of the site, and sensor response delay. (2) Lack of closed-loop state detection: Most existing devices can only indirectly determine whether the movement is in place by encoder and sensor on / off signals. They cannot directly detect the actual physical position of the safety pin, which poses a risk of "false judgment" (i.e. the control signal has been issued, but the mechanical mechanism has not actually been in place). This can lead to the fork being handed over before it is in place, causing major process accidents such as mask collision and slippage.

[0005] (3) No emergency manual unlocking function: When a power outage or other fault occurs, if the fork is locked, the unlocking mechanism will generally be unable to operate due to power failure. The fork will be trapped in the handover position, and the robot arm will not be able to exit. Forcibly dragging it will cause structural damage to the mask or fork, and it will take a long time to resume production.

[0006] (4) Lack of particulate contamination control: The internal moving parts (such as guide rails, cam mechanisms, and bearings) of the locking mechanism generate wear particles during reciprocating motion. Existing devices lack active extraction design, and particles accumulate inside the mechanism and may spread to the mask transmission area, causing mask contamination or damage to the equipment's optical system, thus reducing the equipment's service life.

[0007] (5) Poor adaptability: Most existing locking mechanisms are rigid positioning, and the printing fork has no fine adjustment margin after locking. Due to the repeated positioning error of the robot and thermal deformation, there is a micron-level deviation between the actual position of the printing fork and the theoretical intersection position. Rigid locking is prone to deformation of the printing fork under force, which will reduce the positioning accuracy of the robot in the long run. Summary of the Invention

[0008] The purpose of this application is to provide a safety locking device for plate fork handover in semiconductor precision equipment, which aims to solve at least one technical defect in the prior art.

[0009] This application provides a safety locking device for plate fork handover in semiconductor precision equipment, including a frame assembly, a power unit, a locking unit, a detection unit, and a controller; The frame assembly includes a fixed frame and a sensor fixing plate, and a first mechanical limiting block and a second mechanical limiting block are provided within the fixed frame; The power unit includes a servo motor, the output end of which is located within the fixed frame. The output end of the servo motor is fixedly connected to one end of the bearing mounting base, and a needle roller bearing is mounted on the other end of the bearing mounting base. The bearing mounting base is capable of swinging between the first mechanical limit block and the second mechanical limit block. The locking unit is disposed within the fixed frame and includes a linear guide rail, a safety pin mounting seat, and a safety pin; the linear guide rail is fixed within the fixed frame, and the safety pin mounting seat is slidably disposed on the linear guide rail; the safety pin is fixedly disposed on the front side of the safety pin mounting seat and can extend out of the fixed frame. The detection unit includes an inductive sensor mounted on the sensor mounting plate, capable of detecting the position of the safety pin mounting base; the inductive sensor and the servo motor are respectively electrically connected to the controller; When locked, the servo motor drives the bearing mounting seat to rotate in a first direction, causing the needle roller bearing to push the safety pin mounting seat along the linear guide to a first position, and pushing the safety pin out of the fixed frame; when unlocked, the servo motor drives the bearing mounting seat to rotate in a second direction, the safety pin mounting seat moves to a second position, and the safety pin retracts into the fixed frame; the inductive sensor sends the position signal of the safety pin mounting seat to the controller, thereby controlling the start and stop of the servo motor.

[0010] In a preferred embodiment, with the axis of the safety pin as the third direction, when unlocking, the bearing mounting seat is located on one side of the axis of the safety pin, and the angle between it and the third direction is not less than 90°; when locking, the bearing mounting seat is located on the other side of the axis of the safety pin, and the angle between it and the third direction is 5°~10°.

[0011] In a preferred embodiment, the detection unit includes two inductive sensors arranged side by side, and one end of the safety pin mounting bracket extends beyond the linear guide rail to trigger the two inductive sensors.

[0012] In a preferred embodiment, a duct connector is provided on the fixed frame for connection to an external vacuum pumping system.

[0013] In a preferred embodiment, a maintenance hole is provided on the fixed frame, and a maintenance hole rubber plug is provided for sealing the maintenance hole.

[0014] In a preferred embodiment, the power unit further includes a motor mounting block, and the servo motor is mounted on the motor mounting block.

[0015] In a preferred embodiment, the power unit further includes a motor power line connector; the motor power line connector is disposed on the motor fixing block and is electrically connected to the servo motor.

[0016] In a preferred embodiment, the detection unit further includes a sensor signal connector; the sensor signal connector is disposed on the motor fixing block and is electrically connected to the two inductive sensors respectively.

[0017] In a preferred embodiment, the locking unit further includes a roller limiting block, which is fixedly connected to and moves with the safety pin mounting seat, and the roller of the needle roller bearing is restricted between the roller limiting block and the safety pin mounting seat.

[0018] In a preferred embodiment, a manual unit is also included, specifically including a handle, a connecting knob, and a brake cable; a torsion connector is provided at the end of the servo motor shaft opposite to the output end, the connecting knob is connected to the torsion connector, and the handle is connected to the connecting knob through the brake cable.

[0019] In a preferred embodiment, the diameter of the safety pin is smaller than the diameter of the locating pin hole on the fork.

[0020] This application has the following beneficial effects: The device uses a servo motor as a power source, and the rotation of the needle roller bearing drives the safety pin to move, thereby realizing the locking function of the safety pin inserting into the fork; at the same time, the device is equipped with an inductive sensor to realize the status detection of the opening and unlocking action. Furthermore, the space formed by the fixed frame and sensor mounting plate is sealed and equipped with an air pipe connector to realize the particle extraction function and improve the service life of the equipment. Furthermore, the safety pin and the positioning pin hole of the fork are fitted with a clearance fit, allowing the safety pin to move within the positioning pin hole after insertion, thus enabling the fork to be adjusted within a small range. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the overall structure of the fork junction unlocking protection device provided in the embodiments of this application; Figure 2 A first-view schematic diagram of the cross-connection unlocking protection device provided in an embodiment of this application; Figure 3 for Figure 2 A cross-sectional view of the AA plane; Figure 4 A second-view schematic diagram of the cross-connection unlocking protection device provided in an embodiment of this application; Figure 5 for Figure 4 Cross-sectional view of the middle BB surface when the safety pin is locked; Figure 6 for Figure 4 Cross-sectional view of the middle BB side when the safety pin is unlocked; Figure 7 This is a first-view schematic diagram of the fork handover unlocking protection device and the fork locking provided in the embodiment of this application; Figure 8 This is a second-view schematic diagram of the fork handover unlocking protection device and the fork locking provided in the embodiments of this application.

[0023] Numbering on the map: 1-Frame assembly; 101-Fixed frame; 102-Sensor mounting plate; 103-First mechanical limit block; 104-Second mechanical limit block; 105-Maintenance hole rubber plug; 106-Air pipe connector; 2-Power unit; 201-Torsion connector; 202-Servo motor; 203-Motor mounting block; 204-Bearing mounting base; 205-Needle roller bearing; 206-Motor shaft 3-Locking unit; 301-Safety pin; 302-Safety pin mounting base; 303-Linear guide rail; 304-Roller limit block; 4-Detection unit; 401-Inductive sensor; 402-Sensor protective cover; 403-Sensor signal connector; 5-Manual unit; 501-Handle; 502-Connection knob; 503-Block cable; 6-Fork; 601-Locking pin hole; R - Rotational arc. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The components of the embodiments of the present invention described and labeled in the accompanying drawings can generally be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0026] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0027] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0028] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0029] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0030] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0031] like Figures 1-6 As shown, this embodiment provides a board-to-board safety locking device for semiconductor precision equipment, including a frame assembly 1, a power unit 2, a locking unit 3, a detection unit 4, and a controller (not shown in the figure).

[0032] The frame assembly 1 includes a fixed frame 101 and a sensor mounting plate 102, which together form a rectangular box. The function of the frame assembly 1 is to provide support and fixation for other parts of the device.

[0033] A first mechanical limiting block 103 and a second mechanical limiting block 104 are provided within the fixed frame 101. Both the first mechanical limiting block 103 and the second mechanical limiting block 104 are cylindrical bodies with rounded front ends, and their central axes are perpendicular to each other.

[0034] The power unit 2 includes a servo motor 202. The output end of the servo motor 202, the motor shaft 206, is located inside the fixed frame 101. The motor shaft 206 is fixedly connected to one end of the bearing mounting seat 204. The other end of the bearing mounting seat 204 is equipped with a needle roller bearing 205. The bearing mounting seat 205 can swing between the first mechanical limit block 103 and the second mechanical limit block 104. The first mechanical limit block 103 and the second mechanical limit block 104 provide mechanical hard limit protection to prevent motion overshoot caused by electrical control failure.

[0035] The locking unit 3 is disposed within the fixed frame 101 and includes a linear guide rail 303, a safety pin mounting seat 302, and a safety pin 301. The linear guide rail 303 is fixed within the fixed frame 101, and the safety pin mounting seat 302 is slidably disposed on the linear guide rail 303. The safety pin 301 is fixedly disposed on the front side of the safety pin mounting seat 302 and can extend out of the fixed frame 101. The needle roller bearing 205 and the safety pin mounting seat 302 form a rolling pair, and the movement contour of the rolling pair drives the safety pin mounting seat 302 to move linearly along the linear guide rail 303.

[0036] The detection unit 4 includes two parallel inductive sensors 401 mounted on the sensor mounting plate 102. One end of the safety pin mounting base 302 extends beyond the linear guide rail 303 to trigger the two inductive sensors 401. The two inductive sensors 401 can detect the locked and unlocked positions of the safety pin mounting base 302 respectively. The inductive sensors 401 are fixed and protected by the sensor protective sleeve 402.

[0037] The inductive sensor 401 and the servo motor 202 are electrically connected to the controller; the detection unit 4 detects the extension and retraction status of the safety pin 301 and feeds back the status signal to the controller.

[0038] When locked, the motor shaft 206 drives the bearing mounting base 204 to rotate in the first direction, causing the needle roller bearing 205 to rotate clockwise along the rotation arc R. During this process, the safety pin mounting base 302 is pushed to the first position along the linear guide rail 303, and the safety pin 301 is pushed out of the fixed frame 101. When unlocked, the motor shaft 206 drives the bearing mounting base 204 to rotate in the second direction, causing the needle roller bearing 205 to rotate counterclockwise along the rotation arc R. The safety pin mounting base 302 moves to the second position, and the safety pin 301 retracts into the fixed frame 101. The inductive sensor 401 sends the position signal of the safety pin mounting base 302 to the controller, thereby realizing real-time detection of the status of the safety pin 301, and thus controlling the start and stop of the servo motor 202.

[0039] Specifically, taking the axis of safety pin 301 as the third direction, when unlocking, the bearing mounting seat 204 is located on one side of the axis of safety pin 301, with an angle of not less than 90° and generally not greater than 100° with the third direction; when locking, the bearing mounting seat 204 is located on the other side of the axis of safety pin 301, with an angle of 5°~10° with the third direction. Thus, the locking arc design of the bearing mounting seat 204 gives it a self-holding characteristic in the locked position, ensuring that the safety pin 301 remains extended even if the servo motor 202 is de-energized.

[0040] Furthermore, the locking unit 3 also includes a roller limiting block 304, which is fixedly connected to and moves with the safety pin mounting seat 302, and the roller of the needle roller bearing is restricted between the roller limiting block and the safety pin mounting seat.

[0041] Furthermore, it also includes a manual unit 5, specifically comprising a handle 501, a connecting knob 502, and a brake cable 503; a torsion connector 201 is provided at the end of the servo motor 202's shaft opposite to its output end, and the connecting knob 502 is connected to the torsion connector 201. The handle 501 is connected to the connecting knob 502 via the brake cable 503. The manual unit 5 is independent of the electrical control system. In emergency situations such as power failure or servo motor 202 malfunction, the operator pulls the handle 501, transmitting the pulling force to the bearing mounting seat 204 via the brake cable 503, forcibly pulling back the safety pin 301, releasing the locking state, and ensuring the safe withdrawal of the fork.

[0042] Furthermore, the fixed frame 101 is equipped with a particle extraction channel inside, and an air pipe connector 103 is installed on the fixed frame 101 for connection to an external vacuum pumping system. During the operation of the device, particulate contaminants generated by friction of moving parts inside the fixed frame 101 can be continuously extracted through the air pipe head 103, maintaining a clean internal environment and preventing particles from spreading to the mask transmission area.

[0043] A maintenance hole is provided on the fixed frame 101, and a maintenance hole rubber plug 105 is provided to seal the maintenance hole. By removing the maintenance hole rubber plug 105, the components inside the fixed frame 101 can be maintained through the maintenance hole.

[0044] Furthermore, the power unit 2 also includes a motor mounting block 203, on which the servo motor 202 is mounted. The power unit 2 also includes a motor power line connector 206; the motor power line connector 206 is mounted on the motor mounting block 203 and electrically connected to the servo motor 202. The detection unit 4 also includes a sensor signal connector 403; the sensor signal connector 403 is mounted on the motor mounting block 203 and electrically connected to two inductive sensors 401 respectively.

[0045] In alternative embodiments, the transmission mechanism consisting of the bearing mounting base 204 and the needle roller bearing 205 can be replaced by a crank-slider mechanism, a gear and rack mechanism, a lead screw and nut mechanism, a connecting rod and rocker mechanism, etc., and can also achieve the corresponding function.

[0046] The workflow for various operating conditions in this embodiment is as follows: (1) Locked state: like Figure 7 and Figure 8 As shown, after the printing fork 6 is transported to the handover position by the robotic arm, the controller sends a locking command to the servo motor 202. The servo motor 202 drives the bearing mounting base 204 to rotate by a certain angle (e.g., 90°), which in turn drives the needle roller bearing 205 to rotate synchronously. The lift profile of the bearing mounting base 204 pushes the safety pin mounting base 302, moving it along the linear guide rail 303 towards the printing fork. The safety pin 301 extends synchronously with the safety pin mounting base 302, and its front conical surface engages with the positioning pin hole 601 on the printing fork 6, finally inserting into the positioning pin hole 601.

[0047] The safety pin 31 and the positioning pin hole 601 are fitted with a clearance (e.g., H7 / g6), which allows the plate fork 6 to be finely adjusted in a small range (e.g., ±0.1mm) after locking, so as to absorb the repeated positioning error of the robot and avoid rigid constraints.

[0048] When the bearing mounting base 204 moves to the locked limit position, it contacts the first mechanical limit block 103, preventing further movement. Simultaneously, the inductive sensor 401 detects that the safety pin mounting base 302 is in the first position (i.e., the locked detection position) and outputs a locked-in signal. Upon receiving this signal, the controller confirms the locking is complete and allows subsequent mask handover operations to proceed.

[0049] (2) Unlocked state: After the mask is handed over, the controller sends an unlock command to the servo motor 202. The servo motor 202 rotates in the reverse direction, the bearing mounting seat 204 returns to its original position, driving the needle roller bearing 205 to return to its original position. The safety pin mounting seat 302 and the roller limit block 304 move in the reverse direction along the linear guide rail 303, and the safety pin 301 retracts and completely disengages from the positioning pin hole 601.

[0050] When the bearing mounting seat 204 moves to the unlock limit position, it contacts the second mechanical limit block 104. Simultaneously, the inductive sensor 401 detects that the safety pin mounting seat 302 is in the second position (i.e., the unlock detection position) and outputs an unlock signal. After the controller confirms that unlocking is complete, it controls the robotic arm to safely exit the handover position carrying the fork 6.

[0051] (3) Power failure protection: In the event of an emergency such as a power outage, servo driver failure, or encoder failure that causes the servo motor 202 to lose power or become uncontrollable, the bearing mounting base 204 maintains its current position due to the self-holding characteristic of its locking arc, and the safety pin 301 remains locked.

[0052] The operator holds the handle 501 of the manual unit 5 and pulls it outward. The pulling force is transmitted to the bearing mounting seat 204 through the brake cable 503, forcing it to rotate in the unlocking direction, overcoming the holding force of the cam mechanism, and pulling back the safety pin 301. After the safety pin 301 is completely disengaged from the positioning pin hole 601, the operator can manually remove the plate fork 6 from the handover position to avoid damage to the mask plate.

[0053] (4) Particle extraction: During operation, the duct connector 106 is continuously connected to an external vacuum pumping system (vacuum level -60kPa to -80kPa). The exhaust flow channel inside the fixed frame 101 connects the contact area between the linear guide rail 303, the safety pin mounting seat 302 and the needle roller bearing 205, as well as the reciprocating motion chamber of the safety pin 301. Particles generated by friction of the moving parts are promptly extracted to the external collection device under the action of negative pressure airflow, preventing particles from accumulating inside the mechanism or spreading to the mask transmission area, thus meeting the cleanroom environment requirements.

[0054] This device is suitable for various semiconductor equipment, mask-related transmission systems, storage repositories, and pre-alignment modules for cross-connection protection, and can be widely used in the field of advanced integrated circuit manufacturing.

[0055] The surfaces in the device that come into contact with the clean environment can be made of anodized aluminum alloy or stainless steel. The surfaces of moving parts can be hard anodized or coated to reduce the coefficient of friction and the amount of particles generated.

[0056] The accuracy specifications for each unit are as follows: safety pin repeatability ≤ ±0.02mm, locking / unlocking response time ≤ 200ms, manual unlocking force ≤ 50N, and particle extraction and exhaust flow velocity ≥ 0.5m / s (within the extraction and exhaust channel).

[0057] This embodiment has the following technical effects: Significantly improved locking reliability: The rigid transmission chain of servo motor-bearing mounting base-needle roller bearing ensures stable and controllable locking force. The locking arc design of the transmission structure provides self-holding in the event of power failure, preventing accidental unlocking. True closed-loop status detection: The inductive sensor directly detects the physical position of the safety pin, rather than just the encoder numerical signal, completely eliminating the risk of "false locking" and ensuring handover safety; Small range of adjustment capability: The clearance fit design between the safety pin and the positioning pin hole allows the plate fork to have adjustment margin after locking, effectively absorbing the positioning error and thermal deformation of the robot arm, and avoiding damage to the plate fork or mask plate caused by rigid constraints. Power failure safety protection: The manual unit is independent of the electronic control system and achieves mechanical forced unlocking through flexible transmission of the brake line. In the event of a power failure, it ensures the safe withdrawal of the fork, shortens the fault recovery time, and reduces the risk of mask damage. Clean environment adaptability: The integrated internal active particle extraction channel continuously removes wear particles from moving parts, preventing mask contamination and extending the service life of the equipment's optical system and mechanical components; Double protection with mechanical limit: Two mechanical limit blocks and the cam mechanism stroke design form double protection to prevent overshoot and improve the reliability of the mechanism.

[0058] The above are merely preferred embodiments of the present invention and are not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A safety locking device for plate fork handover in semiconductor precision equipment, characterized in that, Includes frame components, power unit, locking unit, detection unit, and controller; The frame assembly includes a fixed frame and a sensor fixing plate, and a first mechanical limiting block and a second mechanical limiting block are provided within the fixed frame; The power unit includes a servo motor, the output end of which is located within the fixed frame. The output end of the servo motor is fixedly connected to one end of the bearing mounting base, and a needle roller bearing is mounted on the other end of the bearing mounting base. The bearing mounting base is capable of swinging between the first mechanical limit block and the second mechanical limit block. The locking unit is disposed within the fixed frame and includes a linear guide rail, a safety pin mounting seat, and a safety pin; the linear guide rail is fixed within the fixed frame, and the safety pin mounting seat is slidably disposed on the linear guide rail; the safety pin is fixedly disposed on the front side of the safety pin mounting seat and can extend out of the fixed frame. The detection unit includes an inductive sensor mounted on the sensor mounting plate, capable of detecting the position of the safety pin mounting base; the inductive sensor and the servo motor are respectively electrically connected to the controller; When locked, the servo motor drives the bearing mounting seat to rotate in a first direction, causing the needle roller bearing to push the safety pin mounting seat along the linear guide to a first position, and pushing the safety pin out of the fixed frame; when unlocked, the servo motor drives the bearing mounting seat to rotate in a second direction, the safety pin mounting seat moves to a second position, and the safety pin retracts into the fixed frame; the inductive sensor sends the position signal of the safety pin mounting seat to the controller, thereby controlling the start and stop of the servo motor.

2. The plate-fork handover safety locking device for semiconductor precision equipment according to claim 1, characterized in that, With the axis of the safety pin as the third direction, when unlocking, the bearing mounting seat is located on one side of the axis of the safety pin, and the angle between it and the third direction is not less than 90°; when locking, the bearing mounting seat is located on the other side of the axis of the safety pin, and the angle between it and the third direction is 5°~10°.

3. The plate-fork handover safety locking device for semiconductor precision equipment according to claim 1, characterized in that, The detection unit includes two inductive sensors arranged side by side, and one end of the safety pin mounting base extends beyond the linear guide rail to trigger the two inductive sensors.

4. The plate-fork handover safety locking device for semiconductor precision equipment according to claim 1, characterized in that, The fixed frame has a particle extraction channel inside, and a gas pipe connector is provided on the fixed frame for connection with an external vacuum pumping system.

5. The plate-fork handover safety locking device for semiconductor precision equipment according to claim 1, characterized in that, The fixed frame is provided with a maintenance hole and a maintenance hole rubber plug for sealing the maintenance hole.

6. The plate-fork handover safety locking device for semiconductor precision equipment according to claim 1, characterized in that, The power unit also includes a motor mounting block, and the servo motor is mounted on the motor mounting block.

7. The plate-fork handover safety locking device for semiconductor precision equipment according to claim 6, characterized in that, The power unit also includes a motor power line connector; the motor power line connector is disposed on the motor fixing block and is electrically connected to the servo motor.

8. The plate-fork handover safety locking device for semiconductor precision equipment according to claim 6, characterized in that, The detection unit also includes a sensor signal connector; the sensor signal connector is disposed on the motor fixing block and is electrically connected to the two inductive sensors respectively.

9. The plate-fork handover safety locking device for semiconductor precision equipment according to claim 1, characterized in that, The locking unit further includes a roller limiting block, which is fixedly connected to and moves with the safety pin mounting seat, and the roller of the needle roller bearing is restricted between the roller limiting block and the safety pin mounting seat.

10. The plate-fork handover safety locking device for semiconductor precision equipment according to claim 1, characterized in that, It also includes a manual unit, specifically a handle, a connecting knob, and a brake cable; the servo motor's shaft is provided with a torsion connector at the end opposite to the output end, the connecting knob is connected to the torsion connector, and the handle is connected to the connecting knob through the brake cable.

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