A compressed gas temperature control device

Abstract

The application relates to a compressed gas temperature control device, which belongs to the gas temperature control field and comprises a circulating system loaded with a cooling medium, a gas path system, a temperature control module, a heat exchange module and a dehumidification module. The temperature control module is arranged on the circulating system and can adjust the temperature of the cooling medium. The circulating system and the gas path system perform heat exchange through the heat exchange module, and the gas path system is used for conveying compressed gas. The dehumidification module is arranged on the gas path system and comprises a first temperature control assembly, a switching assembly and a plurality of first branches and second branches loaded with dry agents. The switching assembly can switch on the first branches and the second branches respectively. The first temperature control assembly can control the temperature of the dry agents to be adapted to the temperature of the compressed gas after heat exchange, so that the disturbance of the temperature of the dry agents to the temperature of the compressed gas is reduced, and the high-precision constant temperature requirement of the compressed gas after heat exchange in the gas path system is met.

Description

Technical Field

[0001] This application relates to the field of gas temperature control, and more particularly to a compressed gas temperature control device. Background Technology

[0002] Currently, in high-end precision manufacturing scenarios such as ultra-precision machining, optical cavity protection of lithography machines, and wafer and chip manufacturing processes, compressed air or nitrogen, as the core process gas, has stringent requirements for supply temperature of ±0.1℃ or even higher. A stable and controllable gas temperature control environment is the core prerequisite for ensuring precision manufacturing accuracy, product yield, and stable equipment operation.

[0003] In existing technologies, for high-end precision manufacturing loads with stringent temperature requirements, compressed air must first undergo gas pretreatment components such as oil removal, dehumidification, and purification. After the water in the liquid circulation system is heated and buffered to achieve high-precision temperature control, it is then separated from the constant-temperature liquid by a non-contact water-air heat exchange component, thus achieving precise gas temperature control.

[0004] However, when high-end precision loads in existing technologies require low-temperature gases, compressed air needs to undergo non-contact heat exchange with a circulating water circuit at an even lower temperature. After the gas is pre-treated and dried, the dew point of the gas will inevitably decrease after the heat exchange. Therefore, an additional dehumidification component needs to be added after the water-gas heat exchange stage to ensure the humidity requirements of the output gas. However, when the desiccant in the dehumidification component is replaced, the ambient temperature and the temperature of the desiccant itself will directly disturb the temperature of the gas circuit, making it difficult to continuously meet the high-precision constant temperature requirements of the gas in high-end precision manufacturing scenarios. There is an urgent need to develop a temperature control device for compressed gas with constant temperature regulation. Summary of the Invention

[0005] To meet the requirement of high-precision constant temperature after heat exchange of compressed gas, this application provides a compressed gas temperature control device.

[0006] The compressed gas temperature control device provided in this application adopts the following technical solution: A compressed gas temperature control device includes a gas path system, a temperature control module, a heat exchange module, a dehumidification module, and a circulation system containing a cooling medium. The temperature control module is installed on the circulation system and can adjust the temperature of the cooling medium in the circulation system. The circulation system and the gas path system exchange heat through the heat exchange module. The gas path system is used to transport compressed gas. The dehumidification module is installed on the gas path system and located downstream of the heat exchange module. The dehumidification module includes a first temperature control component, a reversing component, and a first branch and a second branch loaded with desiccant. The first branch and the second branch are both connected to the gas path system. The reversing component is installed at the connection between the first branch and the second branch and the gas path system and can switch the conduction of the first branch and the second branch. The first temperature control component can adjust the temperature of the desiccant to match the temperature of the compressed gas after heat exchange.

[0007] By adopting the above technical solution, when compressed gas needs to be cooled to meet the load's demand for low-temperature gas, the temperature control module can cool the cooling medium in the circulation system to the temperature required by the load. The compressed gas in the gas path system exchanges heat with the cooling medium in the circulation system through the heat exchange module to achieve cooling of the compressed gas. After cooling, the compressed gas enters the first or second branch containing desiccant due to the lower dew point. The reversing component can realize the alternating conduction of the first and second branches to ensure that the dehumidification operation of the compressed gas is carried out continuously. The first temperature control component can control the temperature of the desiccant to match the temperature of the compressed gas after heat exchange, greatly reducing the disturbance of the desiccant's own temperature to the temperature of the compressed gas, thereby meeting the high-precision constant temperature requirement of the compressed gas after heat exchange in the gas path system.

[0008] Preferably, both the first branch and the second branch are provided with a drying shell, and each drying shell has a mesh plate at both ends to block the flow of desiccant, and the desiccant is placed inside the drying shell.

[0009] By adopting the above technical solution, the drying shell encloses the desiccant and connects it in series to the corresponding branch. The mesh plates at both ends of the drying shell can prevent the desiccant from scattering and losing, and also ensure the flow of compressed gas. This allows the compressed gas in the gas circuit system to flow through the interior of the drying shell and fully contact the desiccant inside the shell, ensuring that the compressed gas can be fully dehumidified.

[0010] Preferably, the first temperature control component includes a gas driving element and a temperature control element. The drying housing is provided with an air outlet. The gas driving element is disposed on the frame and connected to the drying housing through an airflow pipe. The temperature control element is disposed in the airflow pipe and can control the temperature of the gas in the airflow pipe to match the temperature of the compressed gas after heat exchange. The gas driving element can drive the gas in the airflow pipe to flow through the drying housing.

[0011] By adopting the above technical solution, after the reversing component switches the flow direction of the compressed gas from the first branch to the second branch, when there is a temperature difference between the dehumidified desiccant in the first branch and the temperature required by the load, the gas drive element blows air into the drying shell of the first branch, and the temperature control adjusts the temperature of the airflow to match the temperature of the compressed gas after heat exchange, gradually matching the temperature of the desiccant in the first branch with the temperature of the compressed gas after heat exchange; when the reversing component switches the flow direction of the compressed gas back from the second branch to the first branch, it reduces the disturbance of the desiccant's own temperature to the temperature of the compressed gas after heat exchange, thus meeting the high-precision constant temperature requirement of the compressed gas after heat exchange in the gas circuit system.

[0012] Preferably, the drying housing is inclined, the connection between the drying housing and the outlet of the airflow duct is located below the drying housing, and the air outlet is located above the drying housing.

[0013] By adopting the above technical solution, and utilizing the layout of the airflow duct with the output end at the bottom and the air outlet at the top, the airflow in the airflow duct can flow from bottom to top through the drying shell. During the flow, the airflow disturbs the desiccant inside the shell, causing the desiccant to fall back to the bottom of the inclined drying shell. This allows the desiccant inside the drying shell to circulate, significantly increasing the contact area between the desiccant and the airflow, avoiding the formation of dead zones due to localized desiccant accumulation, and improving the speed of desiccant temperature regulation.

[0014] Preferably, the drying housing is provided with a pressing assembly, which is connected to the drying housing and can press the desiccant into the drying housing.

[0015] By adopting the above technical solution, the desiccant inside the drying shell is pressed and fixed by the pressing component, which can effectively resist the blowing force generated when the compressed gas flows through at high speed and prevent the desiccant from being disturbed by the airflow. At the same time, the pressed desiccant is arranged tightly and evenly, which increases the effective contact area between the desiccant and the compressed gas and improves the dehumidification effect of the desiccant.

[0016] Preferably, the pressing assembly includes a linear cylinder and a pressing block. The pressing block is fixedly connected to the output end of the linear cylinder and slidably connected to the drying housing. The size of the pressing block is adapted to the cross-section of the drying housing. The linear cylinder can drive the pressing block to move toward the desiccant.

[0017] By adopting the above technical solution, the linear cylinder drives the pressing block to slide along the inner wall of the drying shell, and the pressing block can apply uniform pressure to the desiccant to achieve rapid pressing of the desiccant; the single-step driving method of the cylinder improves the convenience of pressing the desiccant by the pressing assembly.

[0018] Preferably, the temperature control module includes a second temperature control component and a third temperature control component disposed in the circulation system. The second temperature control component is located upstream of the third temperature control component, and the second temperature control component and the third temperature control component are capable of sequentially adjusting the temperature of the cooling medium in the circulation system.

[0019] By adopting the above technical solution, and utilizing the design of arranging the second and third temperature control components sequentially upstream of the circulation system, the cooling medium in the circulation system is subjected to graded temperature control. The second temperature control component realizes the primary temperature regulation, while the third temperature control component can effectively reduce the temperature fluctuation of the cooling medium, making the temperature of the cooling medium more closely match the target temperature required by the load, and ensuring the constant temperature accuracy after the compressed gas heat exchange.

[0020] Preferably, there are multiple sets of the third temperature control components, which are arranged sequentially along the flow direction of the cooling medium, and the multiple sets of the third temperature control components can gradually adjust the temperature of the cooling medium.

[0021] By adopting the above technical solution, multiple sets of third temperature control components are arranged sequentially along the medium flow direction to perform step-by-step gradient temperature adjustment of the cooling medium, so that the temperature difference between the cooling medium and the target temperature can be gradually reduced, reducing the temperature shock caused by a single large temperature difference adjustment; effectively smoothing the temperature change amplitude during the cooling medium transportation process, reducing the temperature fluctuation of the medium itself, and further improving the accuracy of the output temperature through the cooling medium.

[0022] Preferably, the third temperature control component includes a temperature control element and a buffer tank, the temperature control element and the buffer tank being arranged sequentially downstream of the second temperature control component, and the temperature control element being capable of performing secondary temperature regulation on the cooling medium in the circulation system.

[0023] By adopting the above technical solution, the temperature control element performs secondary temperature regulation on the cooling medium in the circulation system, further reducing the temperature deviation between the cooling medium and the load; and through the buffering effect of the buffer tank, the flow fluctuation and instantaneous temperature pulsation caused by the cooling medium flowing in the pipeline are suppressed, effectively reducing the temperature fluctuation of the cooling medium, improving the constant temperature accuracy after heat exchange of compressed gas, and meeting the usage requirements of high-end precision loads.

[0024] Preferably, the gas path system is provided with an oil removal component, a filter component, and a drying component. The oil removal component, the filter component, and the drying component are all located upstream of the reversing component and are capable of pre-treating the compressed gas.

[0025] By adopting the above technical solution, the oil removal component, the filter component, and the drying component are used to pre-treat the compressed air before it enters the first or second branch. The oil removal component can effectively filter out oil stains in the compressed air, and the filter component can filter out impurities and particulate matter in the compressed air.

[0026] In summary, this application includes at least one of the following beneficial technical effects: 1. When compressed gas needs to be cooled to meet the load's requirements for low-temperature gas, the temperature control module can cool the cooling medium in the circulation system to the temperature required by the load. The compressed gas in the gas path system exchanges heat with the cooling medium in the circulation system through the heat exchange module to achieve cooling of the compressed gas. After cooling, the compressed gas enters the first or second branch containing desiccant due to the lower dew point. The reversing component can realize the alternating conduction of the first and second branches to ensure that the dehumidification operation of the compressed gas is carried out continuously. The first temperature control component can control the temperature of the desiccant to match the temperature of the compressed gas after heat exchange, greatly reducing the disturbance of the desiccant's own temperature to the temperature of the compressed gas, thereby meeting the high-precision constant temperature requirement of the compressed gas after heat exchange in the gas path system. 2. After the reversing assembly switches the flow direction of the compressed gas from the first branch to the second branch, when there is a temperature difference between the dehumidified desiccant in the first branch and the temperature required by the load, the gas drive element blows air into the drying shell of the first branch. The temperature control adjusts the temperature of the airflow to match the temperature of the compressed gas after heat exchange, gradually matching the temperature of the desiccant in the first branch with the temperature of the compressed gas after heat exchange. When the reversing assembly switches the flow direction of the compressed gas back from the second branch to the first branch, it reduces the disturbance of the desiccant's own temperature to the temperature of the compressed gas after heat exchange, thus meeting the high-precision constant temperature requirement of the compressed gas after heat exchange in the gas circuit system. 3. By utilizing the layout of the air inlet at the bottom and the air outlet at the top, the airflow in the airflow duct can flow from bottom to top through the drying shell. During the flow of the airflow, the airflow will disturb the desiccant inside the shell. The desiccant will fall back to the bottom of the inclined drying shell, which allows the desiccant inside the drying shell to circulate. This greatly increases the contact area between the desiccant and the airflow, avoids the formation of dead corners due to localized accumulation of desiccant, and improves the speed of desiccant temperature regulation. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of a compressed gas temperature control device according to an embodiment of this application.

[0028] Figure 2 This is a top view used to demonstrate a compressed gas temperature control device.

[0029] Figure 3 yes Figure 1 Enlarged view of section A (with the outer shell hidden).

[0030] Figure 4 It is a cross-sectional view showing branch pipes, semiconductor chips, and casing.

[0031] Figure 5 This is a structural schematic diagram used to illustrate another perspective of a compressed gas temperature control device.

[0032] Figure 6 yes Figure 5 Enlarged view of section B in the middle.

[0033] Figure 7 It is along Figure 2 A cross-sectional view of the CC line.

[0034] Figure 8 yes Figure 7 Enlarged view of section D in the middle.

[0035] Explanation of reference numerals in the attached diagram: 2. Circulation system; 21. Water tank; 22. Pump body; 23. Circulation pipeline; 24. Branch pipeline; 25. Hot and cold valves; 26. Outer casing; 3. Gas system; 31. Compressed gas cylinder; 32. Gas delivery pipe; 33. Oil removal assembly; 34. Filter assembly; 35. Drying assembly; 4. Temperature control module; 41. Second temperature control assembly; 411. First heat exchanger; 412. Refrigeration cycle system; 42. Third temperature control assembly; 421. Temperature control element; 422. Buffer tank; 423. Thermal grease; 424. 5. Semiconductor chip; 6. Dehumidification module; 7. First temperature control component; 8. Reversing component; 9. First branch; 10. Second branch; 11. Desiccant; 12. T-connector; 13. T-valve; 14. Drying shell; 15. Mesh plate; 16. Gas drive element; 17. Fan; 18. Airflow duct; 19. Temperature control element; 20. Air outlet; 21. Exhaust duct; 22. Pressing component; 33. Linear cylinder; 44. Pressing block; 55. Elastic gasket; 66. Through hole; 7. Heat exchange module. Detailed Implementation

[0036] The following is in conjunction with the appendix Figures 1-8 This application will be described in further detail.

[0037] This application discloses a compressed gas temperature control device.

[0038] Reference Figure 1 , Figure 2A compressed gas temperature control device includes a circulation system 2 containing a cooling medium, a gas path system 3, a temperature control module 4, a heat exchange module 7, and a dehumidification module 5, all mounted on a frame. The cooling medium is selected as either water or purified water depending on the operating conditions. The temperature control module 4 is located on the circulation system 2 and can regulate the temperature of the cooling medium within the circulation system 2. The circulation system 2 and the gas path system 3 exchange heat non-contactly through the heat exchange module 7, which is located downstream of the temperature control module 4 and is a heat exchanger as used in the prior art. The gas path system 3 is used to transport compressed gas and includes a compressed gas cylinder 31 and a delivery pipe 32. The input end of the delivery pipe 32 is connected to the compressed gas cylinder 31, and the output end leads to the space where the load is located. A knob on the compressed gas cylinder 31 controls the flow rate of the released compressed gas.

[0039] The circulation system 2 includes a pump body 22, a circulation pipe 23, and a water tank 21 containing cooling medium. Both ends of the circulation pipe 23 are connected to the outlet and return port of the water tank 21. The pump body 22 is located between the outlet of the water tank 21 and the temperature control module 4.

[0040] The temperature control module 4 includes a second temperature control component 41 and a third temperature control component 42 disposed on the circulation pipe 23. The second temperature control component 41 is located upstream of the third temperature control component 42. In this embodiment, there are two sets of third temperature control components 42, which are sequentially arranged along the circulation pipe 23. The second temperature control component 41 and the two sets of third temperature control components 42 can adjust the temperature gradient of the cooling medium in the circulation pipe 23. The second temperature control component 41 performs initial coarse adjustment of the cooling medium temperature and secondary fine adjustment of the cooling medium temperature, making the temperature of the cooling medium more closely match the target temperature required by the load and ensuring the constant temperature accuracy of the compressed gas after heat exchange.

[0041] The second temperature control component 41 includes a first heat exchanger 411 and a refrigeration cycle system 412. The refrigeration cycle system 412 is a commonly used air conditioning and automotive refrigeration system in the prior art, typically including four core components: a compressor, a condenser, an expansion valve, and an evaporator, as well as pipes for transporting refrigerant and connecting the core components. The evaporator of the refrigeration cycle system 412 is connected to the circulation pipe 23 through the first heat exchanger 411. In this embodiment, the first heat exchanger 411 is a plate heat exchanger, which has the advantages of high heat exchange efficiency, low heat loss, compact and lightweight structure, and small footprint. In fields such as ultra-precision machining and lithography machines, the load chamber typically requires low temperatures.

[0042] Reference Figure 1 , Figure 3 , Figure 4Each third temperature control component 42 includes a temperature control element 421 and a buffer tank 422, arranged sequentially with the temperature control element 421 preceding the buffer tank 422. The temperature control element 421 is a TEC semiconductor chip 424. The circulation pipe 23 has two branch pipes 24 at the semiconductor chip 424. The branch pipes 24 are adapted to the TEC semiconductor chip 424 and are configured as serpentine pipes. The two ends of the two branch pipes 24 are connected to the hot and cold valves 25 on both sides of the circulation pipe 23, respectively. The cold end and hot end of the semiconductor chip 424 are connected to the two branch pipes 24 through thermal grease 423, respectively. When the cooling medium in the circulation system requires high temperatures, the hot and cold valves 25 on both sides open the pipes on the side of the two branch pipes 24 closest to the hot end of the semiconductor chip 424, allowing the hot end of the semiconductor chip 424 to transfer heat to the cooling medium in the pipes. When the cooling medium in the circulation system requires low temperatures, the hot and cold valves 25 on both sides open the pipes on the side of the two branch pipes 24 closest to the cold end of the semiconductor chip 424, allowing the cooling medium in the pipes to transfer heat to the cold end of the semiconductor chip 424. To ensure the heat exchange effect between the semiconductor chip 424 and the two branch pipes 24, a shell 26 is provided on the two branch pipes 24, and the space between the shell 26 and the two branch pipes 24 is filled with insulation material such as rubber or foam. The insulation of the shell 26 can improve the heat exchange efficiency between the semiconductor chip 424 and the two branch pipes 24.

[0043] The buffer tank 422 utilizes the compressibility difference between the pre-charged gas and the cooling medium inside the tank to achieve pressure stabilization and temperature buffering through the dynamic deformation of the elastic air bladder inside the buffer tank 422: When the cooling medium output from the semiconductor chip 424 continuously fills the elastic air bladder from the inlet, the elastic air bladder expands and compresses the outer gas, while extending the medium residence time, so that the cooling medium is fully mixed in the buffer tank 422, weakening the temperature fluctuation gradient; until the pressure of the outer gas is greater than that of the cooling medium in the elastic air bladder, the compressed gas pushes the elastic air bladder in the opposite direction, replenishing the cooling medium from the outlet into the circulation pipeline, thereby smoothing the temperature fluctuation of the cooling medium after heat exchange of the semiconductor chip 424, ensuring the temperature stability of the cooling medium, and meeting the stringent requirements of high-precision temperature control in ultra-precision machining, lithography machines and other scenarios.

[0044] Two sets of third temperature control components 42 are arranged sequentially along the flow direction of the cooling medium in the circulation pipe 23, forming a gradient temperature control architecture with the upstream second temperature control component 41, which first performs coarse adjustment and then multi-stage fine adjustment. The second temperature control component 41 first performs a large-range coarse temperature adjustment of the cooling medium, and the two sets of third temperature control components 42 sequentially perform fine temperature adjustment of the cooling medium, so that the difference between the cooling medium and the target temperature is gradually reduced, avoiding the temperature shock caused by a single large temperature difference adjustment. After each set of semiconductor chips 424 finely adjusts the temperature of the cooling medium, the temperature fluctuation is buffered and suppressed by the rear buffer tank 422. The temperature gradient is gradually weakened and the temperature change amplitude is smoothed by the mixing temperature and pressure compensation of the medium inside the buffer tank 422, thereby gradually reducing the temperature fluctuation value of the cooling medium.

[0045] Reference Figure 5 The compressed gas cylinder 31 can use low-cost compressed air or oil-free, water-free, inert high-concentration nitrogen. The delivery pipe 32 is equipped with an oil removal component 33, a filter component 34, and a drying component 35. The oil removal component 33, the filter component 34, and the drying component 35 are sequentially arranged between the compressed gas cylinder 31 and the heat exchange module 7, and can pre-treat the compressed gas released from the compressed gas cylinder 31. The oil removal component 33 can effectively filter out oil stains in the compressed air, and the filter component 34 can filter out impurities and particulate matter in the compressed air.

[0046] Reference Figure 6 , Figure 7 The dehumidification module 5 is mounted on the gas delivery pipe 32 and located downstream of the heat exchange module 7. The dehumidification module 5 includes a first temperature control component 51, a reversing component 52, and multiple first branches 53 and second branches 54 loaded with desiccant 55. In this embodiment, the desiccant 55 is reusable microporous color-changing silica gel particles. The first branches 53 and second branches 54 are both mounted on the gas delivery pipe 32 and fixedly connected to it via a three-way connector 56. The reversing component 52 is mounted on the three-way connector 56 and is a three-way valve 57. The three-way valve 57 can switch the connection between the first branch 53, the second branch 54, and the gas delivery pipe 32. The first temperature control component 51 can control the temperature of the desiccant 55 to match the temperature of the compressed gas after heat exchange, significantly reducing the disturbance of the desiccant 55's own temperature to the temperature of the compressed gas, thereby meeting the high-precision constant temperature requirement of the compressed gas after heat exchange within the gas delivery pipe 32.

[0047] Reference Figure 6 , Figure 8The first branch 53 and the second branch 54 operate alternately with the same process. Taking the operation process of the first branch 53 as an example, both the first branch 53 and the second branch 54 are equipped with a drying shell 6. The two drying shells 6 are connected in series on the corresponding branches. The drying shell 6 is a rectangular cylindrical structure. The desiccant 55 is placed inside the drying shell 6. The adjacent sides of the drying shell 6 are provided with mesh plates 61 for compressed air to flow through. The size of the mesh plates 61 is equal to the diameter of the corresponding branch pipe. The mesh plates 61 can prevent the desiccant 55 from scattering and losing, while ensuring the flow of compressed air. This allows the compressed air in the air circuit system 3 to flow through the inside of the drying shell 6 and fully contact the desiccant 55 inside the shell, ensuring that the compressed air can be fully dehumidified.

[0048] There are two sets of first temperature control components 51, each corresponding to a drying housing 6. Each first temperature control component 51 includes a gas drive element 62 and a temperature control element 63. In this embodiment, the gas drive element 62 is a motor-driven fan 621, and the temperature control element 63 is a built-in pipe-type semiconductor temperature sensor. This semiconductor temperature sensor can switch between cooling and heating modes based on the direction and magnitude of the current, and can adjust the temperature. The fan 621 is fixedly mounted on the frame and sealed to the drying housing 6 via an airflow pipe 622. The drying housing 6 has an air outlet 64, and an exhaust pipe 641 is located at the air outlet 64. The exhaust pipe 641 has a valve; when compressed air flows through the first branch 53, the valve on the exhaust pipe 641 is closed. The temperature control element 63 is located inside the airflow pipe 622 and is electrically connected to the control module.

[0049] When compressed air flows through the desiccant 55 in the first branch 53 for a preset time, and the desiccant 55 becomes saturated with moisture, the three-way valve 57 in the reversing assembly 52 is activated, switching the flow of compressed air to the second branch 54. Then, the fan 621 starts running, continuously blowing air into the drying housing 6 of the first branch 53. The airflow passes through the desiccant 55 inside the drying housing 6 and is discharged from the air outlet 64, forming a stable airflow path inside the drying housing 6. At the same time, the temperature control 63 is activated and heats the airflow driven by the fan 621. The heated air continues to act on the moist desiccant 55 in the first branch 53, achieving continuous drying of the desiccant 55. After the preset heating time is over, the desiccant 55 in the first branch 53 returns to a dry state and still retains some residual heat. At this time, the temperature control 63 adjusts the output temperature to match the temperature required by the load, and gradually adjusts the temperature of the desiccant 55 in the first branch 53 again, so that the desiccant 55 in the first branch 53 matches the temperature of the compressed air after heat exchange, and avoids the residual heat of the desiccant 55 from causing disturbance to the temperature of the compressed air.

[0050] In addition, the drying shell 6 is tilted at 45°, and the connection between the drying shell 6 and the output end of the airflow duct 622 is located at the bottom of the drying shell 6. The airflow duct 622 is also tilted at 45°, so that the airflow output from the airflow duct 622 can be sprayed upward from the bottom of the desiccant 55. Since the desiccant 55 is composed of several color-changing silica gel particles, the airflow will disturb the desiccant 55 in the shell during the flow process. The desiccant 55 falls back to the bottom of the tilted drying shell 6, so that the desiccant 55 in the drying shell 6 can circulate. This greatly increases the contact area between the desiccant 55 and the airflow, avoids the local accumulation of desiccant 55 to form dead corners, and improves the speed of temperature regulation of desiccant 55.

[0051] A pressing assembly 65 is provided on the drying housing 6. The pressing assembly 65 can press the desiccant 55 into the drying housing 6. The pressing assembly 65 includes a linear cylinder 651 and a pressing block 652. The cylinder body of the linear cylinder 651 is fixedly connected to the drying housing 6, and the piston rod of the cylinder body of the linear cylinder 651 faces the desiccant 55 inside the drying housing 6. The pressing block 652 is fixedly connected to the piston rod of the cylinder body of the linear cylinder 651. The size of the pressing block 652 is equal to the cross-section of the drying housing 6. The linear cylinder 651 can drive the pressing block 652 to slide inside the drying housing 6 and move towards the desiccant 55. An elastic gasket 653 is provided on the side of the pressing block 652 near the desiccant 55. Both the pressing block 652 and the elastic gasket 653 have several through holes for airflow. The direction of the through holes is parallel to the displacement direction of the pressing block 652.

[0052] When the linear cylinder 651 is in the retracted state, the clamping block 652 is located above the connection between the input end of the first branch 53 and the drying housing 6; when the linear cylinder 651 is in the clamping state, the clamping block 652 is located below the connection between the input end of the first branch 53 and the drying housing 6. When the compressed gas after heat exchange is introduced into the drying shell 6, the valve on the exhaust pipe 641 is closed. The compressed gas flows into the desiccant 55 through the through holes of the clamping block 652 and the elastic gasket 653 in sequence. After being dehumidified, the compressed gas flowing through the desiccant 55 flows out to the load from the first branch 53. When blowing air onto the humid desiccant 55, the temperature control 63 first heats up to a high temperature. In this embodiment, the drying temperature of the desiccant 55 is 50°C, so the temperature control 63 can raise the airflow to 50°C. After heating and drying for a period of time, the temperature control 63 cools down to the temperature required by the load and gradually adjusts the temperature of the desiccant 55 in the first branch 53 again, so that the temperature of the desiccant 55 in the first branch 53 is adapted to the temperature of the compressed air after heat exchange, and the residual heat of the desiccant 55 is prevented from disturbing the temperature of the compressed air.

[0053] The implementation principle of a compressed gas temperature control device according to an embodiment of this application is as follows: the pump body 22 drives the cooling medium in the water tank 21 to flow continuously along the circulation pipe 23. It first passes through the first heat exchanger 411 and completes a large-range coarse temperature adjustment with the refrigeration cycle system 412, and then flows through two sets of third temperature control components 42 in sequence. According to the requirements of the load, the hot and cold valves are switched to open the branch pipes 24 corresponding to the cold or hot end of the TEC semiconductor chip, and the multi-level fine gradient temperature adjustment of the semiconductor chip is used. The cooling medium after semiconductor temperature adjustment enters the buffer tank 422, which can suppress the temperature fluctuation of the medium. The temperature-adjusted cooling medium flows into the heat exchange module 7 and completes non-contact heat exchange with the compressed gas in the gas circuit system 3, so that the compressed gas can reach the temperature required by the load and the temperature fluctuation is low. The compressed gas output from the compressed gas cylinder 31 first passes through the oil removal component and the filter component in sequence to complete the oil and impurity removal pretreatment. The compressed gas after heat exchange first enters the first branch 53 and flows through the desiccant 55 in the drying shell 6 to achieve dehumidification. When the desiccant 55 in the first branch 53 becomes saturated with water, the two sets of three-way valves 57 switch the gas path to the second branch 54. At the same time, the fan 621 and temperature control 63 in the first branch 53 are started to introduce hot air to dry the saturated desiccant 55. After drying, the temperature of the desiccant 55 is adjusted to keep the temperature of the desiccant 55 consistent with the temperature of the compressed gas after heat exchange, which greatly reduces the disturbance of the temperature of the desiccant 55 itself to the temperature of the compressed gas, thereby meeting the high-precision constant temperature requirement of the compressed gas after heat exchange in the gas path system 3.

[0054] The above are all preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A compressed gas temperature control device, characterized in that: It includes an air path system (3), a temperature control module (4), a heat exchange module (7), a dehumidification module (5), and a circulation system (2) containing a cooling medium. The temperature control module (4) is installed on the circulation system (2) and can adjust the temperature of the cooling medium in the circulation system (2). The circulation system (2) and the air path system (3) exchange heat through the heat exchange module (7). The air path system (3) is used to transport compressed gas. The dehumidification module (5) is installed on the gas system (3) and located downstream of the heat exchange module (7). The dehumidification module (5) includes a first temperature control component (51), a reversing component (52), and a first branch (53) and a second branch (54) loaded with desiccant (55). The first branch (53) and the second branch (54) are both connected to the gas system (3). The reversing component (52) is installed at the connection between the first branch (53), the second branch (54) and the gas system (3) and can switch the conduction of the first branch (53) and the second branch (54). The first temperature control component (51) can adjust the temperature of the desiccant (55) to match the temperature of the compressed gas after heat exchange.

2. The compressed gas temperature control device according to claim 1, characterized in that: The first branch (53) and the second branch (54) are each provided with a drying shell (6), and each drying shell (6) is provided with a mesh plate (61) at both ends to block the flow of desiccant. The desiccant (55) is placed in the drying shell (6).

3. The compressed gas temperature control device according to claim 2, characterized in that: The first temperature control component (51) includes a gas driving element (62) and a temperature control element (63). The drying housing (6) is provided with an air outlet (64). The gas driving element (62) is disposed on the frame (1) and connected to the drying housing (6) through an airflow pipe (622). The temperature control element (63) is disposed in the airflow pipe (622) and can control the temperature of the gas in the airflow pipe (622) to match the temperature of the compressed gas after heat exchange. The gas driving element (62) can drive the gas in the airflow pipe (622) to flow through the drying housing (6).

4. The compressed gas temperature control device according to claim 3, characterized in that: The drying housing (6) is inclined, the connection between the drying housing (6) and the output end of the airflow pipe (622) is located below the drying housing (6), and the air outlet (64) is located above the drying housing (6).

5. The compressed gas temperature control device according to claim 2, characterized in that: The drying housing (6) is provided with a pressing assembly (65), which is connected to the drying housing (6) and can press the desiccant (55) into the drying housing (6).

6. The compressed gas temperature control device according to claim 5, characterized in that: The pressing assembly (65) includes a linear cylinder (651) and a pressing block (652). The pressing block (652) is fixedly connected to the output end of the linear cylinder (651) and slidably connected to the drying housing (6). The size of the pressing block (652) is adapted to the cross-section of the drying housing (6). The linear cylinder (651) can drive the pressing block (652) to move toward the desiccant (55).

7. The compressed gas temperature control device according to claim 1, characterized in that: The temperature control module (4) includes a second temperature control component (41) and a third temperature control component (42) disposed in the circulation system (2). The second temperature control component (41) is located upstream of the third temperature control component (42). The second temperature control component (41) and the third temperature control component (42) can sequentially adjust the temperature of the cooling medium in the circulation system (2).

8. The compressed gas temperature control device according to claim 7, characterized in that: There are multiple sets of the third temperature control components (42), which are arranged sequentially along the flow direction of the cooling medium. The multiple sets of the third temperature control components (42) can gradually adjust the temperature of the cooling medium in a gradient manner.

9. The compressed gas temperature control device according to claim 8, characterized in that: The third temperature control component (42) includes a temperature control element (421) and a buffer tank (422). The temperature control element (421) and the buffer tank (422) are arranged sequentially downstream of the second temperature control component (41). The temperature control element (421) is capable of performing secondary temperature regulation on the cooling medium in the circulation system (2).

10. The compressed gas temperature control device according to claim 1, characterized in that: The gas path system (3) is provided with an oil removal component (33), a filter component (34) and a drying component (35). The oil removal component (33), the filter component (34) and the drying component (35) are all located upstream of the reversing component (52) and can pre-treat the compressed gas.

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