A multi-single tube semiconductor laser based on multiple shaping lenses

Abstract

The application discloses a multi-single-tube semiconductor laser based on multiple shaping lenses, which comprises a heat sink, a surface of which is provided with a step array, the step array comprising multiple step surfaces distributed from high to low along a first direction; and multiple single-tube lasers fixedly connected to the step surfaces and emitting beams propagating along a second direction. Along the propagation direction of the beams, the rear end of each single-tube laser is sequentially connected with a fast-axis collimating lens, a reflecting mirror and a slow-axis shaping lens, and the multiple slow-axis shaping lenses on the step array are arranged from high to low along the first direction. After being turned by the reflecting mirror, the beams emitted by each single-tube laser pass through at least two slow-axis shaping lenses arranged in succession along the first direction, so that the beams are shaped from slow-axis divergent beams into parallel beams propagating along the first direction. The application can realize sufficient slow-axis collimation in a limited space through the hierarchical collimation of the multiple short-focal-length slow-axis shaping lenses, thereby effectively reducing the volume of the device and improving the integration.

Description

Technical Field

[0001] This application relates to the field of semiconductor laser technology, and in particular to a multi-single-tube semiconductor laser based on multiple shaping lenses. Background Technology

[0002] With industrial upgrading, high-power lasers have been rapidly applied across various industries. Applications in industrial processing, such as laser heating and laser welding, are increasingly demanding higher output power density from lasers. Methods to increase laser power typically include improving heat dissipation efficiency, increasing the number of laser units, and increasing input current to boost single-tube power. In conventional designs, significantly increasing the output power of a laser by increasing the number of laser units is one of the main approaches to boosting output or integrated power.

[0003] Existing multi-single-tube semiconductor lasers typically have a stepped array arrangement in the first direction of the heat sink, with the beam exiting in the second direction. The beams exiting from each step are first collimated in the fast-axis direction by a fast-axis collimating lens, then collimated in the slow-axis direction by a slow-axis collimating lens, and then redirected by a mirror before exiting in the first direction to form a beam array.

[0004] However, since the slow-axis emission angle of multi-single-tube semiconductor lasers is about 8 to 12 degrees, a long focal length is required to shape the diverging beam into a parallel beam of a fixed size. The long focal length results in a low integration density of conventional semiconductor lasers, which in turn leads to a large product size and low output power density. Summary of the Invention

[0005] The purpose of this invention is to provide a multi-single-tube semiconductor laser based on multiple shaping lenses, which can solve the above-mentioned problems existing in the prior art.

[0006] To achieve the above objectives, this application adopts the following technical solution: A multi-single-tube semiconductor laser based on multiple shaping lenses is provided, comprising: A heat sink, one surface of which is provided with a stepped array, the stepped array comprising a plurality of stepped surfaces distributed from high to low along a first direction; Multiple single-tube lasers, each corresponding to a step surface and fixedly connected to the step surface, wherein the emitted beam of each single-tube laser propagates along a second direction; Along the propagation direction of the light beam, the rear end of the single-tube laser is sequentially connected to a fast-axis collimating lens, a reflecting mirror, and a slow-axis shaping lens. The fast-axis collimating lens is used to collimate the beam emitted from the corresponding single-tube laser in the fast-axis direction; the reflecting mirror is used to redirect the beam collimated by the fast-axis collimating lens, so that the beam is redirected from the second direction to propagate along the first direction; and the slow-axis shaping lens is used to perform slow-axis shaping on the redirected beam. The slow-axis shaping lens and the reflector are in one-to-one correspondence, and the multiple slow-axis shaping lenses located on the stepped array are arranged from high to low along the first direction; After being redirected by the reflector, the emitted beams of each of the single-tube lasers pass through at least two consecutively arranged slow-axis shaping lenses along the first direction, so as to shape the beams from a slow-axis diverging state into a parallel beam propagating along the first direction. The beam emitted from the single-tube laser is shaped by at least two consecutively arranged slow-axis shaping lenses and passes over the adjacent downstream slow-axis shaping lens.

[0007] Preferably, all of the slow-axis shaping lenses have the same focal length.

[0008] Preferably, the plurality of slow-axis shaping lenses are distributed at equal intervals along the first direction.

[0009] Preferably, the first direction and the second direction are set at an angle.

[0010] Preferably, at least two slow-axis shaping lenses are fixedly connected to the lowest step surface of the step array, and the beam emitted by the single-tube laser located on the lowest step surface can pass through all the slow-axis shaping lenses on the current step surface.

[0011] Preferably, the heat sink has a stepped array with the same height difference and the stepped surfaces are parallel to each other.

[0012] Preferably, in the first direction, the plurality of single-tube lasers are arranged at equal intervals.

[0013] Preferably, the heat sink is internally connected to a plurality of step arrays, and the plurality of step arrays are spaced apart along the second direction; the optical elements located on each of the step arrays allow multiple array beams to be output in the first direction.

[0014] Preferably, the heat sink is provided with a heat dissipation structure, which is an integrally formed heat dissipation fin or a cooling channel opened inside the heat sink.

[0015] The beneficial effects of this application are as follows: By arranging multiple slow-axis shaping lenses into a lens array along a first direction, and making each beam of light, after being deflected by a mirror, pass through at least two consecutively arranged slow-axis shaping lenses along the first direction, the graded collimation of multiple short-focal-length slow-axis shaping lenses replaces a single long-focal-length slow-axis shaping lens. This achieves full collimation of the slow-axis beam within a limited space, effectively reducing device size and improving integration.

[0016] Meanwhile, all slow-axis shaping lenses have the same focal length, which ensures that each beam is uniformly collimated during the multi-stage slow-axis shaping process, effectively guaranteeing the accuracy and consistency of slow-axis collimation. Attached Figure Description

[0017] The present application will now be described in further detail with reference to the accompanying drawings and embodiments.

[0018] Figure 1 This is a partial structural schematic diagram of a multi-single-tube semiconductor laser based on multiple shaping lenses according to an embodiment of this application; Figure 2 This is a top view of a partial structural diagram of a multi-single-tube semiconductor laser structure based on multiple shaping lenses according to an embodiment of this application; Figure 3 This is a top view of the optical components of a multi-single-tube semiconductor laser based on multiple shaping lenses according to an embodiment of this application; Figure 4 This is a schematic diagram of the beam propagation in a first direction of a multi-single-tube semiconductor laser based on multiple shaping lenses according to an embodiment of this application; Figure 5 These are schematic diagrams of two heat dissipation structures for a multi-single-tube semiconductor laser based on multiple shaping lenses, as described in an embodiment of this application. Figure 6 This is a schematic diagram of the optical path structure for trimming the beam using three slow-axis shaping lenses of a multi-single-tube semiconductor laser based on multiple shaping lenses, according to an embodiment of this application. Figure 7 This is a top view of a multi-single-tube semiconductor laser based on multiple shaping lenses, according to an embodiment of this application, comprising two stepped arrays.

[0019] In the picture: 100. Heat sink; 110. Stepped array; 111. Stepped surface; 112. Heat dissipation structure; 200. Single-tube laser; 300. Fast-axis collimating lens; 400. Reflector; 500. Slow-axis shaping lens. Detailed Implementation

[0020] To make the technical problems solved by this application, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of this application are further described in detail below. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0021] In the description of this application, unless otherwise expressly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0022] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0023] In the description of this invention, it should be understood that the terms "first direction", "second direction", "third direction", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0024] like Figures 1 to 7 As shown, this embodiment provides a multi-single-tube semiconductor laser based on multiple shaping lenses, including a heat sink 100. A step array 110 is provided on one surface of the heat sink 100, and the step array 110 includes a plurality of step surfaces 111 distributed from high to low along a first direction (X direction in the figure).

[0025] The heat sink 100 is used to support and fix the various components of the laser, and also serves as the main heat dissipation channel. The heat sink 100 can be made of metals with good thermal conductivity, such as copper or aluminum, or materials with high thermal conductivity, such as diamond-copper composite materials, to ensure that the heat generated by the laser during operation can be dissipated in a timely manner and maintain the stable operating temperature of the device. A stepped array 110 is disposed on the upper surface of the heat sink 100, and the stepped surfaces 111 gradually decrease along the first direction to form a stepped structure.

[0026] Multiple single-tube lasers 200 correspond one-to-one with the stepped surface 111 and are fixedly connected to the stepped surface 111. Each single-tube laser 200 is the most basic independent light-emitting unit in a semiconductor laser, and each single-tube laser 200 independently emits a laser beam. The emitted beam of the single-tube laser 200 propagates along a second direction (Y direction in the figure). The second direction is set at a certain angle to the first direction; in a preferred embodiment, the first direction and the second direction are perpendicular to each other, i.e., the angle is 90 degrees.

[0027] The single-tube laser 200 can be a conventional semiconductor laser chip in the art, and its light emission direction is along the second direction toward the internal region of the stepped array 110. The single-tube laser 200 and the stepped surface 111 can be fixedly connected by welding, bonding or fixing with a clamping block, etc., to ensure that the single-tube laser 200 is stable in position and does not shift during operation.

[0028] Along the direction of beam propagation, the rear end of the single-tube laser 200 is sequentially connected to a fast-axis collimating lens 300, a reflecting mirror 400, and a slow-axis shaping lens 500.

[0029] Specifically, the fast-axis collimating lens 300 is positioned in the light-emitting direction of the single-tube laser 200, between the single-tube laser 200 and the reflecting mirror 400. The fast-axis collimating lens 300 is used to collimate the beam emitted from its corresponding single-tube laser 200 in the fast-axis direction. The beam emitted from the semiconductor laser has a large divergence angle in the fast-axis direction (i.e., the direction perpendicular to the PN junction), typically approximately 30 to 60 degrees. The function of the fast-axis collimating lens 300 is to collimate the divergent beam in the fast-axis direction into a parallel or nearly parallel beam, thereby reducing beam divergence loss in the fast-axis direction.

[0030] A reflector 400 is positioned in the exit direction of the fast-axis collimating lens 300 to redirect the light beam collimated by the fast-axis collimating lens 300, causing the beam to propagate along the first direction instead of the second. The reflector 400 can be a plane mirror, with its reflecting surface set at a 45-degree angle to the second direction, thus reflecting the light beam propagating along the second direction back to propagate along the first direction. The reflecting surface of the reflector 400 can be coated with a high-reflectivity coating such as gold, silver, or a dielectric film to minimize beam reflection loss.

[0031] A slow-axis shaping lens 500 is positioned in the emission direction of the reflector 400 to slowly shape the redirected beam. The divergence angle of the beam emitted from a semiconductor laser in the slow-axis direction (i.e., parallel to the PN junction) is relatively small, typically around 8 to 12 degrees. However, even so, the beam still diverges significantly after long-distance propagation. The function of the slow-axis shaping lens 500 is to shape the diverging beam in the slow-axis direction into a parallel beam, preventing further divergence in that direction.

[0032] The slow-axis shaping lens 500 and the reflecting mirror 400 are in one-to-one correspondence, that is, each reflecting mirror 400 corresponds to one slow-axis shaping lens 500. Multiple slow-axis shaping lenses 500 located on the stepped array 110 are arranged from high to low along the first direction. In other words, the slow-axis shaping lenses 500 are disposed on each stepped surface 111 of the stepped array 110, and as the stepped surface 111 gradually decreases along the first direction, the slow-axis shaping lenses 500 located on it are also arranged from high to low along the first direction.

[0033] After being redirected by the reflector 400, the emitted beams of each single-tube laser 200 pass through at least two consecutively arranged slow-axis shaping lenses 500 along the first direction, so as to shape the beams from a slow-axis diverging state into a parallel beam propagating along the first direction.

[0034] Specifically, since multiple slow-axis shaping lenses 500 are arranged along the first direction on each step surface 111 of the step array 110, and the beam propagates along the first direction after being deflected by the reflector 400, the beam will sequentially pass through multiple slow-axis shaping lenses 500 located on different step surfaces 111 during its propagation along the first direction. Each slow-axis shaping lens 500 converges or collimates the beam in the slow-axis direction once. After being successively shaped by at least two consecutively arranged slow-axis shaping lenses 500, the slow-axis divergence angle of the beam is gradually reduced, eventually becoming a parallel beam propagating along the first direction.

[0035] In this embodiment, the number of slow-axis shaping lenses 500 corresponding to each single-tube laser 200 can be two, three, or more, depending on the focal length of the slow-axis shaping lenses 500 and the required collimation accuracy. In a preferred embodiment, the emitted beam of each single-tube laser 200 is sequentially shaped by three slow-axis shaping lenses 500 to achieve sufficient slow-axis collimation.

[0036] In this embodiment, by arranging multiple slow-axis collimating lenses 500 along a first direction into a lens array, and ensuring that each beam passes through at least two consecutively arranged slow-axis collimating lenses 500, multi-stage collimation in the slow-axis direction is achieved. Compared to the prior art scheme that uses only a single slow-axis collimating lens, this embodiment utilizes the graded collimation of multiple short-focal-length slow-axis collimating lenses to replace a single long-focal-length slow-axis collimating lens, achieving sufficient slow-axis collimation within a limited space, thereby effectively reducing the device size.

[0037] Secondly, since the slow-axis shaping lenses 500 are arranged along the first direction on the stepped surface 111, and the beam passes through multiple slow-axis shaping lenses 500 along the first direction, this arrangement can fully utilize the space of the stepped array 110 along the first direction, making the optical path extension in the horizontal direction more compact and improving the integration of the device. Multiple single-tube lasers 200 are respectively set on their respective stepped surfaces 111, and each beam works independently yet collaboratively. Through reasonable arrangement, a high output power density can be achieved within a limited volume. Furthermore, this embodiment can adjust the number and focal length of the slow-axis shaping lenses 500 according to actual needs to adapt to different collimation accuracy requirements and space constraints, providing good design flexibility.

[0038] It is understood that although this embodiment uses three slow-axis shaping lenses 500 as an example, in other embodiments, depending on specific design requirements and space constraints, the number of slow-axis shaping lenses 500 through which each beam passes can be two, four, or more, as long as the purpose of shaping the beam from a slow-axis divergent shape into a parallel beam can be achieved. The focal length of the slow-axis shaping lens 500 can be selected and optimized based on the height difference of the step surface 111 and the step spacing to ensure that the beam achieves the expected collimation effect after passing through each slow-axis shaping lens 500.

[0039] like Figure 1 and Figure 4 As shown, based on the above embodiments, this embodiment further explains and clarifies the height relationship of the slow-axis shaping lens 500 and the path of the light beam. Specifically, the light beam emitted from the single-tube laser 200 is shaped by at least two consecutively arranged slow-axis shaping lenses 500 and passes above the adjacent downstream slow-axis shaping lens 500.

[0040] The stepped array 110 includes multiple stepped surfaces 111 distributed from high to low along a first direction. The slow-axis shaping lens 500 located on the i-th stepped surface 111 is designated as the i-th slow-axis shaping lens. When a beam emitted from a single-tube laser 200 propagates along the first direction after being redirected by the corresponding reflector 400, the beam first passes through its corresponding slow-axis shaping lens 500 (e.g., the i-th slow-axis shaping lens), then continues propagating along the first direction, passing through the (i+1)-th slow-axis shaping lens, then the (i+2)-th slow-axis shaping lens, and so on. After passing through several slow-axis shaping lenses 500 in sequence, the beam needs to pass above the adjacent downstream slow-axis shaping lens 500 to avoid being blocked by that downstream slow-axis shaping lens 500.

[0041] For example, a laser beam emitted from a single-tube laser 200 located on the first-level step surface 111, after being deflected by the reflector 400, passes sequentially through the first, second, and third slow-axis shaping lenses 500, and then passes over the fourth slow-axis shaping lens 500. Since the step surface 111 gradually decreases in elevation along the first direction, the beam's height relative to the step surface 111 changes gradually as it propagates along the first direction. By appropriately setting the height of the slow-axis shaping lenses 500, it can be ensured that after passing through the current slow-axis shaping lens 500, the beam can pass unobstructed over the adjacent downstream slow-axis shaping lens 500.

[0042] In order to achieve the above-mentioned effect of "passing over the adjacent downstream slow-axis shaping lens", in this embodiment, the height of the adjacent downstream slow-axis shaping lens 500 can be less than or equal to the total height difference between the step surface 111 through which the beam passes and the adjacent downstream step surface 111.

[0043] Taking the light beam on the first-level step surface 111 as an example, the light beam passes sequentially through the slow-axis shaping lenses 500 on the first, second, and third-level step surfaces 111, and then passes above the slow-axis shaping lens 500 on the fourth-level step surface 111. The height of the slow-axis shaping lens 500 on the fourth-level step surface 111 should be less than or equal to the total height difference between the first-level step surface 111 and the fourth-level step surface 111 (i.e., the sum of the height differences of the three steps). In this way, after the light beam exits from the slow-axis shaping lens 500 on the third-level step surface 111, its height is higher than the top surface of the slow-axis shaping lens 500 on the fourth-level step surface 111, thus allowing it to pass above it without obstruction.

[0044] It is understandable that by limiting the light beam to pass above the adjacent downstream slow-axis shaping lens 500 and limiting the relationship between the height of the adjacent downstream slow-axis shaping lens 500 and the total height difference of the step surface 111, the light path of the light beam can be ensured to be unobstructed during the multi-stage slow-axis shaping process, and the light energy loss and collimation effect caused by the light beam being blocked by the subsequent slow-axis shaping lens 500 can be avoided.

[0045] It should be noted that the implementation of "passing over the adjacent downstream slow-axis shaping lens" in this embodiment is not limited to the specific description above. In actual design, the same avoidance effect can also be achieved by adjusting the installation height of the slow-axis shaping lens 500, changing the height difference of the step surface 111, or adjusting the size of the slow-axis shaping lens 500. For example, the slow-axis shaping lens 500 can be set at a lower position on the step surface 111, or a slow-axis shaping lens 500 with a smaller height can be used so that its top surface is lower than the beam's passing height.

[0046] In one embodiment, all slow-axis shaping lenses 500 have the same focal length.

[0047] In other words, all slow-axis shaping lenses 500 positioned on each step surface 111 of the stepped array 110 have the same focal length. Figure 4 and Figure 6 Taking the structure shown as an example, the slow-axis shaping lens 500 located on the first step surface 111, the slow-axis shaping lens 500 located on the second step surface 111, the slow-axis shaping lens 500 located on the third step surface 111, and all the slow-axis shaping lenses 500 located on subsequent step surfaces 111 have the same focal length, i.e., f1=f2=f3.

[0048] When each beam of light passes through multiple consecutively arranged slow-axis shaping lenses 500 along the first direction, since each slow-axis shaping lens 500 has the same focal length, the convergence or collimation effect of the beam is consistent when passing through each slow-axis shaping lens 500. This causes the slow-axis divergence angle of the beam to decrease at the same rate after passing through each slow-axis shaping lens 500. After being successively shaped by multiple slow-axis shaping lenses 500, the slow-axis divergence angle of the beam is gradually and uniformly reduced, eventually becoming a parallel beam.

[0049] If the focal lengths of the various slow-axis shaping lenses 500 are not the same, the convergence or collimation effect of the light beam will differ when it passes through slow-axis shaping lenses 500 with different focal lengths. This may result in the light beam being over-converged or under-collimated when passing through a certain slow-axis shaping lens 500, affecting the final collimation effect.

[0050] Meanwhile, by using multiple slow-axis shaping lenses 500 with the same focal length for graded collimation, the same collimation effect as a single long focal length lens can be achieved in a smaller space using a shorter focal length lens, thereby effectively reducing the size of the device while ensuring collimation accuracy.

[0051] It is understandable that although all slow-axis shaping lenses 500 in this embodiment have the same focal length, in certain special applications, combinations of slow-axis shaping lenses 500 with different focal lengths can be used as needed to achieve specific beam shaping effects. For example, a sequence of slow-axis shaping lenses 500 with gradually changing focal lengths can be used to achieve non-linear changes in the beam divergence angle. However, in conventional high-power multi-single-tube semiconductor laser applications, having all slow-axis shaping lenses 500 with the same focal length is the optimal choice.

[0052] In one embodiment, a plurality of slow-axis shaping lenses 500 are distributed at equal intervals along a first direction.

[0053] In other words, the spacing between any two slow-axis shaping lenses 500 disposed on each step surface 111 of the step array 110 is equal in the horizontal projection along the first direction. The horizontal distance between the first and second slow-axis shaping lenses 500, the horizontal distance between the second and third slow-axis shaping lenses 500, and the horizontal distance between subsequent adjacent slow-axis shaping lenses 500 are all equal.

[0054] The slow-axis shaping lenses 500 are evenly spaced along the first direction, meaning that the step surfaces 111 of the step array 110 are also evenly spaced along the first direction. This is because the slow-axis shaping lenses 500 are disposed on the step surfaces 111, and the position of the step surfaces 111 determines the position of the slow-axis shaping lenses 500. Therefore, the evenly spaced distribution of the slow-axis shaping lenses 500 actually reflects the evenly spaced distribution of the step surfaces 111.

[0055] For example, when a light beam passes through a plurality of consecutively arranged slow-axis shaping lenses 500 along a first direction, the propagation distance of the light beam between any two adjacent slow-axis shaping lenses 500 is equal. Since all slow-axis shaping lenses 500 have the same focal length and the spacing between adjacent slow-axis shaping lenses 500 is equal, the incident and exit conditions of the light beam are the same when passing through each slow-axis shaping lens 500, which makes the slow-axis shaping process of the light beam have good symmetry and consistency.

[0056] It is understandable that, although the equidistant distribution of the slow-axis shaping lenses 500 along the first direction is the preferred embodiment in this case, a non-equidistant distribution can be used in certain special applications as needed. For example, when single-tube lasers 200 on different step surfaces 111 require different slow-axis collimation accuracies, the collimation path length of the beam can be changed by adjusting the spacing between adjacent slow-axis shaping lenses 500, thereby achieving differentiated collimation effects. However, in conventional applications, an equidistant distribution is the best choice.

[0057] In one embodiment, the first direction and the second direction are set at an angle.

[0058] The first direction refers to the arrangement direction of the stepped array 110, that is, the direction in which the multiple stepped surfaces 111 are arranged. The second direction refers to the propagation direction of the beam emitted from the single-tube laser 200.

[0059] The angle between the first direction and the second direction can be selected according to the specific structural design and optical path layout. In a preferred embodiment, the first direction and the second direction are perpendicular to each other, i.e., the angle is 90 degrees. When the first direction and the second direction are perpendicular, the reflector 400 only needs to turn the light beam by 90 degrees to achieve the redirection from the second direction to the first direction. The reflecting surface of the reflector 400 can be set at a 45-degree angle with the second direction, which is simple in structure and easy to implement.

[0060] However, the angle between the first direction and the second direction is not limited to 90 degrees. In other embodiments, the angle between the first direction and the second direction can be 60 degrees, 120 degrees, or other angles, as long as the reflector 400 can redirect the light beam from the second direction to propagate along the first direction. When the angle is not 90 degrees, the angle between the reflecting surface of the reflector 400 and the second direction needs to be adjusted accordingly to ensure that the reflected light beam propagates along the first direction.

[0061] Understandably, while perpendicularity between the first and second directions is the most common design choice, a non-perpendicular angle can be used in certain special applications, such as when the heat sink 100 has an irregular shape or needs to interface with other optical systems. This is as long as the reflector 400 can redirect the beam from the second direction to propagate along the first direction, and the slow-axis shaping lens 500 can perform slow-axis shaping of the beam along the first direction.

[0062] In one embodiment, at least two slow-axis shaping lenses 500 are fixedly connected to the lowest step surface 111 of the step array 110. The beam emitted by the single-tube laser 200 located on the lowest step surface 111 can pass through all the slow-axis shaping lenses 500 on the current step surface 111.

[0063] The stepped array 110 includes multiple stepped surfaces 111 distributed from high to low along a first direction, wherein at least two slow-axis shaping lenses 500 are fixedly connected to the lowest stepped surface 111 (i.e., the last stepped surface). This is different from the case where only one slow-axis shaping lens 500 is usually provided on the higher stepped surfaces 111.

[0064] On each of the conventional stepped surfaces 111, a slow-axis shaping lens 500 is provided to perform slow-axis shaping on the beam passing through that stepped surface 111. However, on the lowest stepped surface 111, since this is the last stepped surface, the beam passing through this stepped surface 111 may originate from multiple different single-tube lasers 200. For example, as... Figure 4 As shown, the beam emitted from the single-tube laser 200 located on the first-level step surface 111 passes through the first, second, and third slow-axis shaping lenses 500 and then passes over the fourth slow-axis shaping lens 500; the beam emitted from the single-tube laser 200 located on the second-level step surface 111 passes through the second, third, and fourth slow-axis shaping lenses 500 and then passes over the fifth slow-axis shaping lens 500; and so on, the beam emitted from the single-tube laser 200 located on the Nth-level step surface 111 passes through the Nth, N+1th, and N+2th slow-axis shaping lenses 500. Therefore, at least two slow-axis shaping lenses 500 are provided on the lowest step surface 111 (e.g., the N+2th step surface) to serve beams from different single-tube lasers 200 respectively.

[0065] The beam emitted by the single-tube laser 200 located on the lowest step surface 111 can pass through all the slow-axis shaping lenses 500 on the current step surface 111. That is, the beam emitted by the single-tube laser 200 on the lowest step surface 111 (i.e., the single-tube laser 200 located on the last step surface 111), after being deflected by the reflector 400, passes through all the slow-axis shaping lenses 500 located on the same step surface 111 along the first direction. Since these slow-axis shaping lenses 500 are all located on the same step surface 111, the beam has the same incident height and exit height when passing through these slow-axis shaping lenses 500, which helps to ensure the accuracy of slow-axis shaping.

[0066] At least two slow-axis shaping lenses 500 are arranged on the lowest step surface 111, so that the beam emitted from the single-tube laser 200 located on the lowest step surface 111 can also be shaped sequentially by multiple slow-axis shaping lenses 500, thereby obtaining a good slow-axis collimation effect. At the same time, the multiple slow-axis shaping lenses 500 on the lowest step surface 111 can simultaneously serve multiple different single-tube lasers 200 (the beam of each single-tube laser 200 passes through a portion of the slow-axis shaping lenses 500), realizing the shared use of the slow-axis shaping lenses 500 and improving the utilization rate of optical components. By setting multiple slow-axis shaping lenses 500 on the lowest step surface 111, the beam can be directly emitted as a parallel beam after the final slow-axis shaping on the step surface 111, without having to pass through other step surfaces, simplifying the optical path structure.

[0067] It is understood that although this embodiment describes the example of setting at least two slow-axis shaping lenses 500 on the lowest step surface 111, in some embodiments, multiple slow-axis shaping lenses 500 may also be set on some higher step surfaces 111, the specific number depending on the number of beams that the step surface 111 needs to serve and the collimation requirements of the beams.

[0068] In one embodiment, the heat sink 100 has a stepped array 110 with the same height difference, and the individual stepped surfaces 111 are parallel to each other. "Same height difference in the stepped array" means that the height difference between any two adjacent stepped surfaces 111 in the stepped array 110 is equal. Figure 4 Taking the structure shown as an example, the height difference between the first step surface 111 and the second step surface 111 is Δh1, the height difference between the second step surface 111 and the third step surface 111 is Δh2, and so on, Δh1=Δh2=Δh3=……=Δh, that is, the height difference between all adjacent step surfaces 111 is equal.

[0069] The term "parallel" for the step surfaces 111 means that the surfaces of each step surface 111 are planar and parallel to each other. In other words, each step surface 111 lies within a parallel plane and has the same orientation and angle of inclination. In a preferred embodiment, each step surface 111 is a horizontal plane and is arranged parallel to each other.

[0070] The uniform height difference ensures that as the beam passes through multiple slow-axis shaping lenses 500 along the first direction, the height change of the beam relative to each step surface 111 is the same, making the slow-axis shaping process of the beam highly regular and predictable. Secondly, the parallelism of the step surfaces 111 guarantees that the optical elements (single-tube laser 200, mirror 400, slow-axis shaping lens 500, etc.) mounted on each step surface 111 have the same mounting reference surface, which helps ensure the relative positional accuracy between the optical elements.

[0071] It is understandable that while having the same height difference between adjacent step surfaces 111 is preferred in this embodiment, in certain special application scenarios, step arrays 110 with slightly different height differences can also be used according to actual needs. For example, when single-tube lasers 200 on different step surfaces 111 require different slow-axis collimation path lengths, this can be achieved by adjusting the height difference between adjacent step surfaces 111. However, in conventional high-density integration applications, step arrays 110 with the same height difference are the best choice.

[0072] In one embodiment, the plurality of single-tube lasers 200 are arranged at equal intervals along the first direction. That is, the distance between any two adjacent single-tube lasers 200 disposed on each step surface 111 of the step array 110 is equal in the horizontal projection along the first direction. Since the single-tube lasers 200 are arranged in a one-to-one correspondence with the step surfaces 111, and the step surfaces 111 are arranged along the first direction, the equal interval distribution of the single-tube lasers 200 actually reflects the equal interval distribution of the step surfaces 111.

[0073] After the beams emitted from each individual laser diode 200 are redirected along the first direction by the reflector 400, the horizontal spacing between adjacent beams is equal. This ensures that each beam has the same incident position and incident angle when passing through the slow-axis collimating lens 500, thereby guaranteeing the consistency of the slow-axis collimation effect of each beam. Furthermore, the equidistant distribution of the individual laser diodes 200 also contributes to the uniformity of heat dissipation. Because the individual laser diodes 200 are uniformly distributed on the heat sink 100, the heat generated during operation is also uniformly distributed, avoiding heat concentration in certain areas and preventing excessively high local temperatures. This helps extend the device's lifespan and improve operational stability.

[0074] Meanwhile, the equidistant distribution of the single-tube lasers 200 also facilitates subsequent beam combining or coupling. When it is necessary to spatially combine or couple the beams emitted from multiple single-tube lasers 200 into an optical fiber, the equidistant beam array has better symmetry and regularity, which facilitates the design and adjustment of the beam combining optical system.

[0075] It is understood that although the equidistant distribution of the single-tube lasers 200 is the preferred option in this embodiment, in certain special application scenarios, a non-equidistant distribution can also be adopted according to actual needs. For example, when it is necessary to generate a non-uniform beam array or to match with other optical systems, the spacing of the single-tube lasers 200 can be adjusted to achieve a specific beam arrangement.

[0076] In one embodiment, a plurality of stepped arrays 110 are connected within the heat sink 100, and the plurality of stepped arrays 110 are spaced apart along a second direction. Optical elements located on each stepped array 110 allow multiple array beams to be output in a first direction.

[0077] In other words, the heat sink 100 is not limited to having one set of step arrays 110, but can have multiple sets of step arrays 110, which are distributed at intervals along the second direction (i.e., the original propagation direction of the beam). Each set of step arrays 110 is equipped with corresponding optical elements such as a single-tube laser 200, a fast-axis collimating lens 300, a reflector 400, and a slow-axis shaping lens 500, forming a complete optical unit.

[0078] The optical elements on each set of stepped array 110 are arranged and operate in accordance with the manner described in the above embodiment: the beam emitted from the single-tube laser 200 propagates along the second direction, is collimated by the fast-axis collimating lens 300, is then turned by the reflector 400 to propagate along the first direction, and then passes through at least two consecutively arranged slow-axis shaping lenses 500 for slow-axis shaping, and finally outputs a parallel beam propagating along the first direction.

[0079] Since multiple stepped arrays 110 are spaced apart along the second direction, the beams on each stepped array 110 are at different positions in the second direction when propagating along the first direction, and do not interfere with each other. Therefore, the optical elements located on each stepped array 110 can allow multiple array beams to be output in the first direction. These multiple array beams can be used independently, or they can be combined by a subsequent optical system to obtain a higher total output power.

[0080] In one embodiment, multiple sets of stepped arrays 110 are distributed at equal intervals along the second direction, so that the beam arrays output by each set of stepped arrays 110 are uniformly distributed in the second direction, which facilitates subsequent beam combining or coupling.

[0081] In another implementation, multiple sets of stepped arrays 110 are distributed along the second direction in a non-equidistant manner to adapt to different spatial constraints or specific beam arrangement requirements.

[0082] By incorporating multiple sets of stepped arrays 110 within the heat sink 100, the number of single-tube lasers 200 can be multiplied, thereby significantly increasing the total output power of the lasers. Furthermore, the multiple sets of stepped arrays 110 are spaced apart along the second direction, and the beams from each set are spatially independent and do not interfere with each other, facilitating individual control and adjustment. The multiple array beams output from the multiple sets of stepped arrays 110 can be spatially combined, polarization combined, or spectral combined as needed to obtain higher power density or specific beam characteristics.

[0083] It is understood that although this embodiment uses the example of multiple stepped arrays 110 spaced apart along the second direction, in other embodiments, the multiple stepped arrays 110 may also be arranged in other directions (e.g., a third direction perpendicular to the first and second directions), as long as the beams of each stepped array 110 do not interfere with each other in space. Furthermore, each stepped array 110 may have the same number of steps and optical element configuration, or it may have different configurations to adapt to different power requirements and space constraints.

[0084] In one embodiment, the heat sink 100 is provided with a heat dissipation structure 112, which is either an integrally formed heat dissipation fin or a cooling channel opened inside the heat sink.

[0085] Semiconductor lasers generate a significant amount of heat during operation, especially when multiple single-tube lasers 200 are integrated together, where the heat concentration is even more pronounced. If this heat cannot be dissipated in time, the device temperature will rise, leading to a decrease in laser output power, wavelength drift, and reduced efficiency; in severe cases, it can even cause permanent damage to the device. Therefore, the heat dissipation structure 112 is an indispensable and crucial component in high-power multi-single-tube semiconductor lasers.

[0086] In this embodiment, the heat dissipation structure 112 can take one of the following two forms or a combination of the two forms.

[0087] The first type: one-piece molded heat dissipation fins.

[0088] The heat dissipation fins are sheet-like heat dissipation structures 112 disposed on the surface of the heat sink 100. They improve heat dissipation efficiency by increasing the contact area between the heat sink 100 and the surrounding air or cooling medium. The heat dissipation fins are integrally formed with the heat sink 100, meaning they are formed into a single unit through casting, extrusion, or machining, without any connecting interface, resulting in low thermal resistance and high thermal conductivity. The heat dissipation fins can be disposed on the bottom surface, side surface, or other suitable locations of the heat sink 100 to fully utilize its surface space. The shape of the heat dissipation fins can be straight, corrugated, needle-like, etc., and the specific shape can be selected according to heat dissipation requirements and space constraints.

[0089] The second type: cooling channels are located inside the heat sink.

[0090] Cooling channels are passages created inside the heat sink 100 for the flow of cooling media (such as cooling water, cooling oil, or refrigerant). These channels are typically located near the stepped array 110 to remove heat from the vicinity of the stepped surfaces 111 as much as possible. As the cooling medium flows within the channels, it removes heat from the heat sink 100 through convection heat transfer, achieving efficient cooling. The shape of the cooling channels can be straight, spiral, serpentine, etc., and the specific shape can be designed according to the heat dissipation requirements and the structure of the heat sink 100. Inlet and outlet ports are typically located at both ends of the cooling channels for connecting to an external cooling system.

[0091] In a preferred embodiment, the heat sink 100 is equipped with both heat dissipation fins and cooling channels to achieve combined air cooling and liquid cooling. When the device operates at low power, it can rely solely on the heat dissipation fins for passive heat dissipation; when the device operates at high power, the coolant circulation system can be activated for active heat dissipation, thereby ensuring that the device can maintain a suitable operating temperature under various operating conditions.

[0092] By incorporating a heat dissipation structure 112 within the heat sink 100, the heat generated during the operation of the single-tube laser 200 can be promptly dissipated, effectively reducing the operating temperature of the device and improving the laser's output power and electro-optical conversion efficiency. The cooling channels are located inside the heat sink 100, allowing the cooling medium to flow directly within it, resulting in high heat exchange efficiency, making it particularly suitable for high-power-density applications.

[0093] It is understood that although this embodiment lists two heat dissipation structures 112, namely heat dissipation fins and cooling channels, the heat dissipation structure 112 of the present invention is not limited to these. In other embodiments, other types of heat dissipation structures 112 can also be used, such as heat pipe radiators, thermoelectric coolers (TECs), etc., as long as they can effectively dissipate the heat from the heat sink 100. The specific form and parameters of the heat dissipation structure 112 can be selected and optimized according to the power level of the device, the operating environment, and cost requirements.

[0094] In summary, this disclosure provides a multi-single-tube semiconductor laser based on multiple shaping lenses. By arranging multiple slow-axis shaping lenses into a lens array along a first direction, and ensuring that each beam, after being deflected by a mirror, passes through at least two consecutively arranged slow-axis shaping lenses along the first direction, the laser utilizes the graded collimation of multiple short-focal-length slow-axis shaping lenses instead of a single long-focal-length slow-axis shaping lens. This achieves sufficient collimation of the slow-axis beam within a limited space, effectively reducing the device size and improving integration density. Furthermore, the identical focal length of all slow-axis shaping lenses ensures uniform collimation of each beam during the multi-stage slow-axis shaping process, guaranteeing the accuracy and consistency of slow-axis collimation.

[0095] In the description herein, it should be understood that the terms "upper," "lower," "left," "right," and other orientations or positional relationships are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used merely for descriptive distinction and have no special meaning.

[0096] In the description of this specification, references to terms such as "an embodiment," "example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0097] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0098] The technical principles of this application have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of this application and should not be construed as limiting the scope of protection of this application in any way. Based on this explanation, those skilled in the art can readily conceive of other specific embodiments of this application without inventive effort, and these embodiments will all fall within the scope of protection of this application.

Claims

1. A multi-single-tube semiconductor laser based on multiple shaping lenses, characterized in that, include: A heat sink (100) has a stepped array (110) on one surface, the stepped array (110) including a plurality of stepped surfaces (111) distributed from high to low along a first direction. Multiple single-tube lasers (200) are provided, each corresponding to one of the stepped surfaces (111) and fixedly connected to the stepped surfaces (111). The emitted beams of the single-tube lasers (200) propagate along a second direction. Along the propagation direction of the beam, the rear end of the single-tube laser (200) is sequentially connected to a fast-axis collimating lens (300), a reflecting mirror (400), and a slow-axis shaping lens (500). The fast-axis collimating lens (300) is used to collimate the beam emitted from the corresponding single-tube laser (200) in the fast-axis direction; the reflecting mirror (400) is used to redirect the beam collimated by the fast-axis collimating lens (300), so that the beam is redirected from the second direction to propagate along the first direction; and the slow-axis shaping lens (500) is used to perform slow-axis shaping on the redirected beam. The slow-axis shaping lens (500) and the reflector (400) correspond one-to-one, and the multiple slow-axis shaping lenses (500) located on the stepped array (110) are arranged from high to low along the first direction; The emitted beams of each of the single-tube lasers (200) are redirected by the reflector (400) and then pass through at least two consecutively arranged slow-axis shaping lenses (500) along the first direction to shape the beams from a slow-axis divergent shape into a parallel beam propagating along the first direction. The beam emitted from the single-tube laser (200) is shaped by at least two consecutively arranged slow-axis shaping lenses (500) and passes over the adjacent downstream slow-axis shaping lens (500).

2. The multi-single-tube semiconductor laser based on multiple shaping lenses according to claim 1, characterized in that, All of the slow-axis shaping lenses (500) have the same focal length.

3. The multi-single-tube semiconductor laser based on multiple shaping lenses according to claim 1, characterized in that, The plurality of slow-axis shaping lenses (500) are distributed at equal intervals along the first direction.

4. The multi-single-tube semiconductor laser based on multiple shaping lenses according to claim 1, characterized in that, The first direction and the second direction are set at an angle.

5. The multi-single-tube semiconductor laser based on multiple shaping lenses according to claim 1, characterized in that, The step array (110) has at least two slow-axis shaping lenses (500) fixedly connected to the lowest step surface (111). The beam emitted by the single-tube laser (200) located on the lowest step surface (111) can pass through all the slow-axis shaping lenses (500) on the current step surface (111).

6. The multi-single-tube semiconductor laser based on multiple shaping lenses according to claim 1, characterized in that, The heat sink (100) has a stepped array (110) with the same height difference and each stepped surface (111) is parallel to each other.

7. The multi-single-tube semiconductor laser based on multiple shaping lenses according to claim 1, characterized in that, In the first direction, the plurality of single-tube lasers (200) are arranged at equal intervals.

8. The multi-single-tube semiconductor laser based on multiple shaping lenses according to claim 1, characterized in that, The heat sink (100) is internally connected to a plurality of step arrays (110), and the plurality of step arrays (110) are spaced apart along the second direction; The optical elements located on each of the stepped arrays (110) allow multiple array beams to be output in the first direction.

9. The multi-single-tube semiconductor laser based on multiple shaping lenses according to claim 1, characterized in that, The heat sink (100) is provided with a heat dissipation structure (112), which is either an integrally formed heat dissipation fin or a cooling channel opened inside the heat sink (100).

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