Coil module, linear motor and electronic device

Abstract

The application discloses a coil module, a linear motor and an electronic device. The coil module comprises a shell provided with a receiving cavity, a coil installed in the receiving cavity, and a first insulating coating arranged on an inner wall surface of the receiving cavity, and the first insulating coating is used for isolating a part of the shell provided with the first insulating coating from the coil. The coil module can improve the problem that the heat dissipation performance of a motor is affected due to the use of insulating adhesive tape for heat dissipation in the prior art.

Description

Technical Field

[0001] This application relates to the field of linear motor structure technology, specifically to a coil module, a linear motor, and electronic equipment. Background Technology

[0002] A linear motor is an electric drive device that directly converts electrical energy into linear motion mechanical energy. It boasts advantages such as low wear, low noise, fast response speed, and high positioning accuracy. A linear motor mainly consists of a stator and a mover. For example, the stator of a moving-coil linear motor typically includes a magnet, while the mover usually includes a housing, an iron core, and a coil. Insulation structures are required between the iron core and the coil, and between the coil and the housing, to ensure insulation of the coil to ground. Traditional insulation methods include attaching insulating tape and mica tape to the teeth of the iron core and the surface of the coil, and attaching insulating tape and mica tape to the inner wall of the housing. However, this type of insulation, such as attaching insulating tape, is difficult to achieve a complete fit for complex structures such as curved surfaces, right angles, and irregularly shaped holes in the mover or stator. This can easily create air gaps, increase thermal resistance, and consequently affect the heat dissipation performance of the linear motor, failing to meet the requirements of high-power applications.

[0003] In conclusion, there is an urgent need to improve the insulation structure of the coil module of the linear motor in order to at least address one of the aforementioned technical problems. Summary of the Invention

[0004] This application discloses a coil module, a linear motor, and an electronic device for improving the insulation and heat dissipation performance of the coil module of a linear motor.

[0005] In a first aspect, this application provides a coil module, comprising: a housing having a receiving cavity; a coil mounted in the receiving cavity; and a first insulating coating disposed on the inner wall surface of the receiving cavity, the first insulating coating being used to isolate the portion of the housing with the first insulating coating from the coil. By providing the first insulating coating on the inner wall surface of the housing, an insulating barrier is formed between the coil and the housing, replacing insulating tape and mica tape, etc. Since the first insulating coating is a coating attached to the inner wall surface of the housing, compared to the method of pasting insulating tape and mica tape on the inner wall surface of the housing, no air gap is generated between the first insulating coating and the housing. Therefore, it can improve the shortcomings of related technologies where the heat dissipation performance of motors is affected by the use of insulating tape for heat dissipation.

[0006] In one possible implementation, the inner wall of the receiving cavity includes a bottom wall, a top wall, and a side wall. The coil is mounted on the bottom wall, which is opposite to the top wall. The side wall connects the bottom and top walls, and the bottom, side, and top walls together form the receiving cavity. At least a portion of the first insulating coating is disposed on the bottom wall to isolate the bottom wall from the coil. The coil is directly mounted on the bottom wall, which is typically the mounting surface of the coil. Providing the first insulating coating on the bottom wall creates an insulating barrier at a critical location for ground insulation.

[0007] In one possible implementation, the bottom wall surface and the side wall surface form one or more corners at their connection points, and / or the top wall surface and the side wall surface form one or more such corners at their connection points, and / or the side wall surface includes a plurality of connecting surfaces sequentially connected along the edge of the bottom wall surface, with a corner formed between two adjacent connecting surfaces; wherein the first insulating coating covers at least one of the corners. Corners are areas of abrupt curvature change in the metal casing, which are more prone to point discharge due to electric field concentration under high voltage. Therefore, providing a first insulating coating at the corners can effectively reduce the risk of insulation failure caused by electric field concentration.

[0008] In one possible implementation, the sidewall surface includes a curved surface. Setting the sidewall surface as curved can provide more space for the coil, and the curved structure can also increase the heat dissipation area, improving the heat dissipation performance of the mover or stator.

[0009] In one possible implementation, the first insulating coating covers the entire inner wall surface of the receiving cavity. Covering the entire inner wall surface of the receiving cavity with the first insulating coating can reduce the risk of discharge due to the lack of insulation in certain areas, thus achieving comprehensive insulation protection to ground.

[0010] In one possible implementation, the coil includes a coil body and leads. The coil body is housed within the receiving cavity, and the leads are connected to the coil body and pass through the housing. The leads are used to draw current to generate a magnetic field in the coil body. The housing has a lead hole through which the leads pass, and the inner wall of the lead hole is coated with a second insulating coating. The leads need to exit through the lead hole to connect to an external power source. The second insulating coating on the inner wall of the lead hole reduces the risk of direct contact between the leads and the metal wall of the hole, or air breakdown under high voltage, thereby solving or mitigating the problem of partial discharge and insulation failure at the edge of the lead hole due to the tip effect.

[0011] In one possible implementation, the first insulating coating and / or the second insulating coating comprises a polyimide coating mixed with thermally conductive particles, wherein the thermally conductive particles include at least one of boron nitride particles, aluminum nitride particles, and silicon nitride particles. The insulating coating employs a polyimide matrix mixed with highly thermally conductive nanoparticles. Polyimide itself possesses excellent electrical insulation properties, while the doped boron nitride, aluminum nitride, or silicon nitride particles have high thermal conductivity. This significantly improves the thermal conductivity of the insulating coating without reducing insulation performance, thereby effectively enhancing the heat dissipation performance of the linear motor's mover or stator and meeting the heat dissipation requirements of high-power operating conditions.

[0012] In one possible implementation, the coil module further includes a potting compound layer, at least partially disposed between the coil and the housing; the coil module includes a plurality of coils, and at least partially disposed between two adjacent coils. The potting compound layer fills the gaps between the coil and the housing, as well as the gaps between the coils, effectively filling the air gaps between the coil and the insulating coating, reducing the risk of partial discharge. Simultaneously, curing the coil and housing together provides resistance to vibration and shock during linear motor operation. The potting compound layer, together with the first insulating coating, constitutes the internal insulation protection of the linear motor, thereby improving the insulation reliability and mechanical stability of the linear motor.

[0013] In one possible implementation, the coil module is either the mover or the stator of a linear motor. Furthermore, the applicability of this coil module is given: it can be applied to both the mover of a moving-coil linear motor and the stator of a moving-magnet linear motor.

[0014] Secondly, this application provides a linear motor comprising a stator and a mover, wherein the stator and / or the mover comprises the aforementioned coil module. The linear motor employs a linear motor mover or stator containing the aforementioned coil module, enabling the linear motor to operate reliably for extended periods under high-voltage power supply, meeting the requirements for high integration and good heat dissipation performance, and is suitable for applications in precision motor equipment where space and insulation performance are strictly limited.

[0015] Thirdly, this application provides an electronic device including a linear motion mechanism and the aforementioned linear motor, wherein the linear motor is used to drive the linear motion mechanism in the electronic device. The electronic device includes the aforementioned linear motor, which features reliable high-voltage insulation, excellent heat dissipation, and a compact structure. Using it to drive the linear motion mechanism in the electronic device can meet the stringent requirements of semiconductor manufacturing processes for high precision, high acceleration, long-term stable operation, and a clean environment, while saving internal space and improving overall integration and production efficiency. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a partial structural schematic diagram of the coil module of a linear motor according to an embodiment of this application;

[0018] Figure 2 This is a simplified structural diagram of the coil module of a linear motor according to one embodiment of this application;

[0019] Figure 3 This is a schematic diagram of the structure of a linear motor according to an embodiment of this application;

[0020] Figure 4 This is a schematic diagram of the structure of an electronic device according to this application.

[0021] Explanation of reference numerals in the attached figures:

[0022] 10-Shell;

[0023] 11-Receiving cavity; 12-Lead wire hole; 131-Injection hole; 132-Discharge hole;

[0024] 111 - Bottom wall surface; 112 - Top wall surface; 113 - Side wall surface; 114 - Corner;

[0025] 20-coil;

[0026] 21-Coil body; 22-Lead wire;

[0027] 30 - First insulating coating;

[0028] 40 - Second insulating coating;

[0029] 50 - Potting compound layer. Detailed Implementation

[0030] This application provides a coil module, a linear motor, and an electronic device. The coil module can be applied to a linear motor, such as as the stator or mover of a linear motor; and the linear motor can be applied to an electronic device as a linear drive mechanism, such as a drive motor for a wafer handling robot in semiconductor equipment, a drive motor for a lifting or translating mechanism in deposition equipment, a drive motor for a workpiece stage, or a drive motor for a mask stage.

[0031] Example 1

[0032] Embodiment 1 of this application provides a coil module, such as Figure 1 and Figure 2 As shown, the coil module may include a housing 10, a coil 20, and a first insulating coating 30. The housing 10 may be made of a metallic material (e.g., aluminum alloy, stainless steel), thus providing better heat dissipation for the coil module. The housing 10 is the basic supporting component of the coil module, and its overall shape is box-shaped or cylindrical, with a hollow interior forming a receiving cavity 11. This receiving cavity 11 can be used to accommodate the coil 20, and its shape can match the shape of the coil 20 to facilitate the accommodating and fixing of the coil 20.

[0033] The coil 20 can be installed within the receiving cavity 11. The coil 20 can be made of enameled wire, the core of which can be a high-conductivity conductor such as copper or aluminum, and the surface of the enameled wire can be an insulating varnish film, such as polyurethane or polyimide insulating varnish film, covering the surface of the conductor. The coil module in this embodiment can include one or more coils 20. When there are multiple coils 20, they can be arranged linearly to form a coil array. These multiple coils 20 can be of the same specifications, such as the same number of turns, or they can be of different specifications, such as different numbers of turns. For example, in this embodiment, two coils 20 can be provided, and these two coils are arranged along... Figure 1 The two are arranged in a horizontal linear pattern, but they have different numbers of turns.

[0034] The first insulating coating 30 can be disposed on the inner wall surface of the receiving cavity 11. In this application, "insulating coating," such as the "first insulating coating" described here and the "second insulating coating" described below, refers to a material coating with insulating properties disposed on the surface of a component (such as the surface of the housing 10 located in the receiving cavity), thereby giving the component insulating properties in the area where the insulating coating is provided, thus enabling the component to resist high-voltage breakdown. For example, in this embodiment, the first insulating coating 30 can be a polyimide coating. Polyimide has excellent dielectric strength and good heat resistance, suitable for operating conditions of -200℃ to 400℃. Of course, in other embodiments, the first insulating coating 30 can also be a coating made of other materials such as ceramics or epoxy resin, specifically determined according to the actual operating conditions of the coil module. The first insulating coating 30 can be used to isolate the portion of the housing 10 with the first insulating coating 30 from the coil 20. The first insulating coating 30 can form an insulating barrier between the coil 20 and the housing 10, replacing the insulating components and insulating tape in the prior art, thereby improving the problem that air gaps may exist when using insulating tape for insulation in related technologies, which may lead to increased thermal resistance.

[0035] In one example, the inner wall surface of the receiving cavity 11 may include a bottom wall surface 111, a top wall surface 112, and a side wall surface 113. The bottom wall surface 111 may be disposed opposite to the top wall surface 112, and the side wall surface 113 may be connected between the bottom wall surface 111 and the top wall surface 112, thereby forming the aforementioned receiving cavity 11 together with the bottom wall surface 111, the side wall surface 113, and the top wall surface 112. The coil 20 may be mounted on the bottom wall surface 111. Exemplarily, the coil 20 may be attached to the bottom wall surface 111 by dispensing adhesive. At least a portion of the first insulating coating 30 is disposed on the bottom wall surface 111 to isolate the bottom wall surface 111 from the coil 20. The bottom wall surface 111 is typically the mounting surface of the coil 20, and the first insulating coating 30 disposed on the bottom wall surface 111 can form an insulating barrier at a critical location for ground insulation.

[0036] In one example, the receiving cavity 11 forms one or more corner portions 114 at the connection position between the bottom wall surface 111 and the side wall surface 113. In this application, a corner portion 114 refers to the boundary area formed by the intersection of two adjacent planes or curved surfaces, such as the edge area formed by the intersection of two planes, the edge area obtained by the intersection of a curved surface and a plane, or the turning edge area obtained by the intersection of two curved surfaces. Specifically, the corner portion can be the area obtained by extending a predetermined distance from the aforementioned edge or turning edge along the direction perpendicular to the edge of the two adjacent surfaces. The predetermined distance is a positive value close to zero, such as 3mm, 2mm, 1mm, 50mm, etc. Similarly, the receiving cavity 11 also forms one or more corner portions 114 at the connection position between the top wall surface 112 and the side wall surface 113. The side wall surface 113 can include multiple connecting surfaces connected sequentially along the edge of the bottom wall surface 111, and a corner portion 114 can be formed between two adjacent connecting surfaces. The first insulating coating 30 covers at least one corner 114; for example, the first insulating coating 30 can cover all corners 114. Since the corner 114 is a region of abrupt curvature change in the metal casing 10, it is more prone to point discharge due to electric field concentration under high voltage. Therefore, providing the first insulating coating 30 at the corner 114 can effectively reduce the risk of insulation failure caused by electric field concentration.

[0037] In one example, the sidewall 113 may include a curved surface, such as a partially cylindrical surface, a partially elliptical cylindrical surface, or a wavy surface. Setting the sidewall 113 to include a curved surface increases the inner wall area of ​​the housing 10, thereby increasing the heat dissipation area and improving heat dissipation performance. Simultaneously, the shape of the curved surface can be adapted to the shape of the coil; for example, the edge contour of the coil 20 projected along the thickness direction of the housing 10 includes two straight sections and a curved section connecting the two straight sections. The sidewall 113 can be configured as a plane in the area corresponding to the straight sections and as a curved surface in the area corresponding to the curved sections. Where the curved section convexes outwards towards the sidewall, the sidewall 113 can be configured as a concave curved surface at the position corresponding to the curved section; this method can increase the internal space without increasing the external volume of the housing 10, improving the utilization rate of the internal space.

[0038] In one example, the first insulating coating 30 can cover the entire inner wall surface of the receiving cavity 11, namely, the aforementioned top wall surface 112, side wall surface 113, and bottom wall surface 111. Covering the entire inner wall surface of the receiving cavity 11 with the first insulating coating 30 can significantly reduce the risk of discharge caused by the lack of insulation structure in some areas, and achieve all-round insulation protection to ground.

[0039] Furthermore, the coil 20 may include a coil body 21 and a lead wire 22. The coil body 21 is the main body of the coil 20, wound in a multi-turn spiral shape and housed in the receiving cavity 11. The lead wire 22 is the energized part of the coil 20, connected to the coil body 21, and can pass through the housing 10. The lead wire 22 is used to connect current to generate a magnetic field in the coil body 21. The housing 10 may be provided with a lead wire hole 12 for the lead wire 22 to pass through, and the inner wall surface of the lead wire hole 12 may be provided with a second insulating coating 40. Since the working conditions are the same as those of the first insulating coating 30, the second insulating coating 40 can be obtained using the same materials and / or processes as the first insulating coating 30 described above, as detailed above, and will not be repeated here. The lead wire 22 needs to pass through the lead wire hole 12 to connect to the external power supply. The second insulating coating 40 on the inner wall of the lead wire hole 12 can reduce the risk of the lead wire 22 directly contacting the metal of the hole wall or the risk of air breakdown under high voltage, thereby solving or mitigating the problem of partial discharge and insulation failure caused by the tip effect at the edge of the lead wire hole 12.

[0040] In one example, the first insulating coating 30 and / or the second insulating coating 40 may be polyimide coatings comprising mixed thermally conductive particles. Thermally conductive particles refer to nanoscale or microscale inorganic fillers with high thermal conductivity, wherein high thermal conductivity means a thermal conductivity greater than 50 W / m·K. Exemplarily, the thermally conductive particles may include at least one of boron nitride particles, aluminum nitride particles, and silicon nitride particles. The first and second insulating coatings employ a polyimide matrix mixed with highly thermally conductive nanoparticles. Polyimide itself possesses excellent electrical insulation properties, while the doped boron nitride, aluminum nitride, or silicon nitride particles have high thermal conductivity. This significantly improves the thermal conductivity of the insulating coating without reducing insulation performance, thereby effectively improving the heat dissipation performance of the linear motor's mover or stator and meeting the heat dissipation requirements of high-power operation.

[0041] In one example, the thickness of the first insulating coating 30 and / or the second insulating coating 40 can range from 20 micrometers to 50 micrometers. Specifically, the thickness of the first insulating coating 30 and / or the second insulating coating 40 can range from 30 micrometers to 40 micrometers. This thickness is significantly smaller than that of traditional insulating tape. While meeting high-voltage insulation requirements, this thickness of insulating coating minimizes space occupation and impacts on heat dissipation performance, which is beneficial for motor miniaturization and highly integrated design. Simultaneously, setting a 50-micrometer upper limit for the insulating coating thickness also prevents excessively thick films from affecting their bonding strength with the metal housing. In one example, the first insulating coating 30 and the second insulating coating 40 can be formed by multiple spraying processes, further improving the density and bonding stability of the insulating coatings.

[0042] Furthermore, the coil module may also include a potting compound layer 50, at least a portion of which is disposed between the coil 20 and the housing 10. The potting compound used to form the potting compound layer 50 may be epoxy resin or the like. In one example, the coil module may also include multiple coils 20, and at least a portion of the potting compound layer 50 may be disposed between two adjacent coils 20. Filling the space between the coil 20 and the housing 10, and in the gaps between two adjacent coils 20, with the potting compound layer 50 can fill the air gaps between the coil 20 and the first insulating coating 30, as well as the air gaps between two adjacent coils. This not only serves to fix the coil 20, but also reduces the risk of partial discharge, and provides better heat dissipation compared to filling with air, thereby improving mechanical and electrical insulation properties.

[0043] Furthermore, the housing 10 may be provided with an injection hole 131 and an exhaust hole 132, both of which are connected to the receiving cavity 11 for injecting potting compound into the receiving cavity 11. When injecting potting compound, the potting compound can be injected through the injection hole 131, and air can be discharged through the exhaust hole 132, forming a clear injection path. This allows the potting compound to fill the entire cavity, reducing the risk of air entrapment and forming air gaps, and ensuring the density and insulation reliability of the potting compound layer 50.

[0044] The coil module provided in this embodiment can be the mover or stator of a linear motor. For example, the coil module can be applied to both the mover of a moving-coil linear motor and the stator of a moving-magnet linear motor.

[0045] Example 2

[0046] Based on the above embodiment one, this embodiment two provides a linear motor, such as... Figure 3 As shown, the main structure of a linear motor includes a mover and a stator. The coil module provided in Embodiment 1 can be applied to the mover of a moving-coil linear motor and also to the stator of a moving-magnet linear motor.

[0047] This embodiment uses a moving-coil linear motor as an example, with the coil module applied to the mover. The moving-coil linear motor includes a stator and a mover. The stator includes a base and permanent magnets disposed on the base. The base can extend in a straight line, and multiple permanent magnets are arranged along the extension direction of the base. The base and permanent magnets together constitute the magnetic track of the moving-coil linear motor. The mover includes the aforementioned housing 10 and a coil 20. The mover and stator are magnetically coupled through the coil 20 and the permanent magnets. When the magnitude and / or direction of the current in the control coil changes, the motion state of the mover can be changed. The moving load is mechanically connected to the housing 10. When the coil 20 is energized, it experiences a Lorentz force in the magnetic field generated by the permanent magnets, thereby driving the housing 10 and the load to perform linear reciprocating motion along the stator. At this time, the first insulating coating 30 and the potting compound layer 50 inside the housing 10 jointly ensure electrical insulation between the coil 20 and the housing 10, while also withstanding vibrations and impacts during the motion process.

[0048] Example 3

[0049] This third embodiment provides an electronic device, such as... Figure 4 As shown, it includes a linear motion mechanism and the linear motor from the aforementioned embodiment two. This linear motor is used to drive the linear motion mechanism in an electronic device.

[0050] Specifically, the coil module in the linear motor can adopt the structure described in Embodiment 1, wherein the inner wall of the housing 10 is provided with a first insulating coating 30, the inner wall of the lead-out hole 12 is provided with a second insulating coating 40, and the space between the coil 20 and the housing 10, as well as between adjacent coils 20, is filled with a potting compound layer 50. The housing 10 is provided with a glue injection hole 131 and a glue discharge hole 132. This linear motor has the characteristics of reliable high-voltage insulation, excellent heat dissipation performance, and compact structure.

[0051] In electronic devices, linear motors can be applied to various scenarios requiring high-precision linear drive. For example, linear motors can serve as drive motors for wafer handling robots, enabling rapid and smooth transfer of wafers between different workstations; they can also serve as drive motors for workpiece stages or mask stages to achieve nanometer-level positioning; and they can serve as drive motors for lifting or translation mechanisms in deposition equipment, controlling the position and trajectory of the substrate. Correspondingly, linear motion mechanisms can be robots, worktables, or substrates, etc., that require linear motion.

[0052] Thanks to the use of the aforementioned coil module, this electronic device can operate stably for a long time in a clean environment, meeting the production requirements of high precision and high acceleration. At the same time, the compact structure of the linear motor helps to reduce the overall size of the equipment and improve integration and production efficiency.

[0053] For example, the electronic device of this application can be a semiconductor device, such as an etching device, a thin film deposition device, and a detection and measurement device.

[0054] The above-described preferred embodiments have further detailed the purpose, technical solutions, and advantages of this application. It should be understood that the above description is only a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A coil module, characterized in that, include: The shell has a receiving cavity; A coil is installed in the receiving cavity; and, A first insulating coating is provided on the inner wall surface of the receiving cavity, and the first insulating coating is used to isolate the part of the housing with the first insulating coating from the coil.

2. The coil module according to claim 1, characterized in that, The inner wall surface of the receiving cavity includes a bottom wall surface, a top wall surface, and a side wall surface; The coil is mounted on the bottom wall surface, which is opposite to the top wall surface. The side wall surface is connected between the bottom wall surface and the top wall surface. The bottom wall surface, the side wall surface, and the top wall surface together form the receiving cavity. At least a portion of the first insulating coating is disposed on the bottom wall surface to isolate the bottom wall surface from the coil.

3. The coil module according to claim 2, characterized in that, The bottom wall surface and the side wall surface form one or more corners at the connection position, and / or the top wall surface and the side wall surface form one or more of the corners at the connection position, and / or the side wall surface includes a plurality of connecting surfaces that are sequentially connected along the edge of the bottom wall surface, and a corner is formed between two adjacent connecting surfaces; The first insulating coating covers at least one of the corner portions.

4. The coil module according to claim 2, characterized in that, The sidewall surface includes a curved surface.

5. The coil module according to claim 1, characterized in that, The first insulating coating covers the entire inner wall surface of the receiving cavity.

6. The coil module according to claim 1, characterized in that, The coil includes a coil body and leads. The coil body is housed in the receiving cavity. The leads are connected to the coil body and pass through the housing. The leads are used to connect current to the coil body to generate a magnetic field. The housing is provided with a lead wire hole for the lead wire to pass through, and the inner wall surface of the lead wire hole is provided with a second insulating coating.

7. The coil module according to claim 6, characterized in that, The first insulating coating and / or the second insulating coating comprises a polyimide coating containing mixed thermally conductive particles, wherein the thermally conductive particles include at least one of boron nitride particles, aluminum nitride particles, and silicon nitride particles.

8. The coil module according to any one of claims 1 to 7, characterized in that, It also includes a potting compound layer, at least a portion of which is disposed between the coil and the housing; The coil module includes a plurality of coils, and at least a portion of the potting compound is disposed between two adjacent coils.

9. The coil module according to any one of claims 1 to 7, characterized in that, The coil module is the mover or stator of a linear motor.

10. A linear motor, characterized in that, It includes a stator and a mover, wherein the stator and / or the mover includes a coil module according to any one of claims 1 to 9.

11. An electronic device, characterized in that, It includes a linear motion mechanism and the linear motor of claim 10, the linear motor being used to drive the linear motion mechanism in the electronic device.

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