Processing device, working device, and working method

Abstract

A processing device has a flange for fastening a processing wheel for grinding or polishing by a bolt. The bolt has a cylindrical portion and a threaded portion, and a threaded hole engaging with the threaded portion is provided on the processing wheel. The flange has a through hole having a diameter larger than that of the cylindrical portion and the threaded portion, and an annular groove in which an elastic ring clamping the cylindrical portion is installed is provided on an inner wall surface of the through hole.

Description

Technical Field

[0001] This disclosure relates to processing apparatus, working apparatus, and working methods. Background Technology

[0002] The grinding unit described in Patent Document 1 includes: a spindle; a wheel mount disposed at the lower end of the spindle; and a grinding wheel detachably mounted on the lower surface of the wheel mount. The grinding wheel has an annular base and a plurality of grinding stones arranged in a ring on the lower surface of the annular base. The grinding wheel is fastened to the wheel mount by bolts.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2015-178149 Summary of the Invention

[0006] The problem the invention aims to solve

[0007] One embodiment of this disclosure provides a technique for temporarily securing a bolt to a flange, the bolt fastening a machining wheel used for grinding or lapping to the flange.

[0008] Solution for solving the problem

[0009] One embodiment of the processing apparatus disclosed herein includes a flange to which a processing wheel for grinding or lapping is fastened using a bolt. The bolt has a cylindrical portion and a threaded portion, and the processing wheel has a threaded hole that engages with the threaded portion. The flange has a through hole with a diameter larger than the diameters of the cylindrical portion and the threaded portion, and an annular groove is provided on the inner wall surface of the through hole for mounting an elastic ring that clamps the cylindrical portion.

[0010] Invention Effects

[0011] According to one embodiment of the present disclosure, a bolt can be temporarily fixed to a flange, which secures a machining wheel used for grinding or lapping to the flange. Attached Figure Description

[0012] [ Figure 1 ] Figure 1 This is a cross-sectional view showing a processing apparatus and a replacement apparatus according to one embodiment.

[0013] [ Figure 2 ] Figure 2 This is a cross-sectional view showing the drive mechanism of a processing apparatus according to one embodiment.

[0014] [ Figure 3 ] Figure 3 It is an enlarged representation Figure 1 A partial sectional view.

[0015] [ Figure 4 ] Figure 4 It is an enlarged representation Figure 1 A cross-sectional view of another part of it. Detailed Implementation

[0016] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. Additionally, sometimes the same or similar structures are labeled with the same reference numerals in the various drawings, and descriptions are omitted. In this specification, the X-axis, Y-axis, and Z-axis are mutually perpendicular directions. The X-axis and Y-axis are horizontal directions, and the Z-axis is a vertical direction. The X-axis includes the positive X-axis direction and the direction opposite to the positive X-axis direction, i.e., the negative X-axis direction. The Y-axis includes the positive Y-axis direction and the direction opposite to the positive Y-axis direction, i.e., the negative Y-axis direction. The Z-axis includes the positive Z-axis direction and the direction opposite to the positive Z-axis direction, i.e., the negative Z-axis direction.

[0017] Figure 1 The processing apparatus 10 shown performs grinding or polishing on the object. The object is, for example, a substrate W (see reference). Figure 2 The substrate W includes a semiconductor substrate such as a silicon wafer or a compound semiconductor wafer, or a glass substrate. The substrate W may also include a device layer formed on the surface of the semiconductor substrate or the glass substrate. The device layer includes electronic circuitry. Furthermore, the substrate W may also be an overlay substrate formed by bonding multiple substrates.

[0018] The processing apparatus 10 includes, for example, a drive mechanism 11 for driving the processing wheel 20, a holding mechanism 16 for holding an object (e.g., a substrate W), and a rotation mechanism 17 for rotating the holding mechanism 16. The rotation mechanism 17 rotates the object together with the holding mechanism 16. Furthermore, the processing apparatus 10 has an outer casing 18. The outer casing 18 internally houses the drive mechanism 11 and the holding mechanism 16, preventing particles such as processing chips from flowing out.

[0019] like Figure 2 As shown, the drive mechanism 11 presses the processing wheel 20 against the object (e.g., substrate W) to grind the object. The processing wheel 20 includes, for example, an annular base 21 and a plurality of grinding stones 22 arranged in a ring on the lower surface of the base 21. The processing wheel 20 is used for grinding in this embodiment, but it can also be used for abrasion. In the latter case, an abrasive pad is used instead of the grinding stones 22.

[0020] The drive mechanism 11 includes, for example, a flange 12 for securing the machining wheel 20 with bolts 30, a rotation mechanism 13 for rotating the flange 12, and a lifting mechanism 14 for raising and lowering the flange 12. The rotation mechanism 13 includes, for example, a rotary motor 13a and a vertical rotating shaft 13b that rotates via the rotary motor 13a. The flange 12 is provided at the lower end of the rotating shaft 13b. The flange 12 is horizontally arranged, and the machining wheel 20 is mounted on its lower surface. The rotary motor 13a causes the flange 12 and the machining wheel 20 to rotate together with the rotating shaft 13b.

[0021] The lifting mechanism 14 includes, for example, a vertical Z-axis guide 14a, a Z-axis slider 14b that moves along the Z-axis guide 14a, and a lifting motor 14c that moves the Z-axis slider 14b. A rotary motor 13a is fixed to the Z-axis slider 14b by means of a motor retainer 15. The lifting mechanism 14 has a ball screw (not shown) that converts the rotational motion of the lifting motor 14c into the linear motion of the Z-axis slider 14b.

[0022] The lifting mechanism 14 lowers the processing wheel 20 from the standby position. The processing wheel 20 rotates as it descends, contacting the upper surface of the substrate W, which rotates separately from the processing wheel 20, and grinding the entire upper surface of the substrate W. When the thickness of the substrate W reaches a set value, the lifting mechanism 14 stops the descent of the processing wheel 20. Afterward, the lifting mechanism 14 raises the processing wheel 20 back to the standby position.

[0023] like Figure 1 As shown, the processing apparatus 10 includes a control circuit 19. The control circuit 19 includes, for example, an arithmetic unit 19a such as a CPU (Central Processing Unit) and a storage unit 19b such as a memory. The storage unit 19b stores programs for controlling various processes executed in the processing apparatus 10. The control circuit 19 controls the operation of the processing apparatus 10 by causing the arithmetic unit 19a to execute the programs stored in the storage unit 19b.

[0024] The control circuit 19 includes electronic circuits such as CPU, GPU (Graphics Processing Unit), FPGA (Field Programmable Gate Array), or ASIC (Application Specific Integrated Circuit), and executes various control actions described in this application specification by executing command codes stored in memory or by designing circuits for special purposes.

[0025] The work device 60 performs at least one of the following operations: installing the machining wheel 20 onto the flange 12 and removing the machining wheel 20 from the flange 12. The work device 60 can be a stationary robot or a self-propelled robot. In the latter case, the work device 60 can sequentially maintain multiple machining devices 10. Maintenance includes at least one of the following operations: installing the machining wheel 20 onto the flange 12 and removing the machining wheel 20 from the flange 12.

[0026] The working device 60 includes a control circuit 69. The control circuit 69 includes, for example, an arithmetic unit 69a such as a CPU (Central Processing Unit) and a storage unit 69b such as a memory. The storage unit 69b stores programs for controlling various processes executed in the working device 60. The control circuit 69 controls the operation of the working device 60 by causing the arithmetic unit 69a to execute the programs stored in the storage unit 69b.

[0027] The control circuit 69 includes electronic circuits such as CPU, GPU (Graphics Processing Unit), FPGA (Field Programmable Gate Array), or ASIC (Application Specific Integrated Circuit), and executes various control actions described in this application specification by executing command codes stored in memory or by designing circuits for special purposes.

[0028] like Figure 3 As shown, the machining wheel 20 is fastened to the flange 12 by bolts 30. Bolt 30, for example, has a shaft portion 31 and a head 32 with a diameter larger than that of the shaft portion 31. The head 32 may also have a polygonal bottomed hole 32a on the side opposite to the shaft portion 31. A tool 40 is inserted into the bottomed hole 32a. The tool 40 is used to loosen or tighten the bolt 30.

[0029] The shaft portion 31 has a threaded portion 31a and a cylindrical portion 31b. The threaded portion 31a is inserted into and engages with the threaded hole 20a of the machining wheel 20. The cylindrical portion 31b is disposed between the head 32 and the threaded portion 31a. Unlike the threaded portion 31a, the cylindrical portion 31b does not have a threaded groove on its outer circumferential surface. Preferably, the outer diameter of the cylindrical portion 31b is greater than or equal to the outer diameter of the threaded portion 31a. However, it is preferable that the difference between the outer diameter of the cylindrical portion 31b and the outer diameter of the threaded portion 31a is 1.0 mm or less.

[0030] The flange 12 has a through hole 12a with a diameter larger than that of the threaded portion 31a and the cylindrical portion 31b. The diameter of the through hole 12a is smaller than that of the head 32 of the bolt 30. No thread groove is formed on the inner wall surface of the through hole 12a. Alternatively, although not shown, the through hole 12a may also have a large-diameter hole with a diameter larger than that of the head 32 of the bolt 30 and a small-diameter hole with a diameter smaller than that of the head 32 of the bolt 30. The head 32 of the bolt 30 can be accommodated in the large-diameter hole.

[0031] Multiple through holes 12a and bolts 30 can be provided at intervals along the rotation direction of flange 12. Preferably, the through holes 12a and bolts 30 are arranged rotationally symmetrically about the rotation center line of flange 12. The rotation center line of flange 12 is the rotation center line of rotation axis 13b. One bolt 30 is inserted into each of the multiple through holes 12a.

[0032] Flange 12 has an annular groove 12b on the inner wall surface of the through hole 12a. An elastic ring 50 is installed in the annular groove 12b. The elastic ring 50 is, for example, an O-ring. Furthermore, the cross-sectional shape of the elastic ring 50 is not limited to circular. The cross-sectional shape of the annular groove 12b is not particularly limited, but is preferably trapezoidal or T-shaped. The deeper the groove is from the inner wall surface of the through hole 12a, the more continuously or progressively the width of the annular groove 12b expands, thereby suppressing the detachment of the elastic ring 50.

[0033] The elastic ring 50 is made of, for example, rubber. The elastic ring 50 clamps the cylindrical portion 31b of the bolt 30 by its elastic restoring force. The bolt 30 can be temporarily fixed to the flange 12 by utilizing the static friction between the elastic ring 50 and the bolt 30. For example, even when the through hole 12a and the bolt 30 are vertically arranged, the bolt 30 can be temporarily fixed against gravity.

[0034] After loosening the bolt 30 and separating the machining wheel 20 from the flange 12, the bolt 30 is temporarily fixed to the flange 12, thus eliminating the need for a dedicated storage area for the bolt 30. Furthermore, the time spent transporting the bolt 30 to the storage area is eliminated, improving work efficiency. Also, the time spent returning the bolt 30 from the storage area to the flange 12 is eliminated, further improving work efficiency. Additionally, the loss of the bolt 30 is prevented.

[0035] Alternatively, as a method for temporarily fixing the bolt 30 to the flange 12, a threaded hole could be formed in the through hole 12a, and the threaded portion 31a could be temporarily fixed using this threaded hole. However, this would complicate the construction of the bolt 30. To avoid interference with the threaded hole in the through hole 12a, the cylindrical portion 31b needs to be machined to have a diameter smaller than the diameter of the threaded portion 31a that engages with the threaded hole. Furthermore, the threaded portion 31a needs to be configured so that it does not simultaneously engage with both the threaded hole in the through hole 12a and the threaded hole 20a of the machining wheel 20.

[0036] When the bolt 30 is temporarily fixed to the flange 12 using the static friction between the elastic ring 50 and the bolt 30, compared to the case where the bolt 30 is temporarily fixed to the flange 12 using the threaded hole 12a (not shown) and the threaded portion 31a of the bolt 30, the following effects (A) and (B) can be obtained: (A) The structure of the bolt 30 can be simplified, and a conventional structure can be used. (B) It is not necessary to strictly control the posture of the threaded portion 31a in order to make the threaded portion 31a engage with the two threaded holes in sequence.

[0037] Preferably, the length L1 of the through hole 12a of the flange 12 is longer than the length L2 of the threaded portion 31a of the bolt 30 (L1 > L2). Furthermore, preferably, the distance L3 from the opposing surface of the flange 12 opposite to the machining wheel 20 to the annular groove 12b is longer than the length L2 of the threaded portion 31a of the bolt 30 (L3 > L2). Additionally, since the annular groove 12b is located in the middle of the through hole 12a, L1 is larger than L3 (L1 > L3 > L2).

[0038] When (L1>L3>L2) holds true, the cylindrical portion 31b of the bolt 30 is held by the elastic ring 50, and the following state can be maintained. Figure 3 As shown, it is possible to maintain the state in which the threaded portion 31a of the bolt 30 is disengaged from the threaded hole 20a of the machining wheel 20. In other words, as Figure 3 As shown, the bolt 30's threaded portion 31a is able to be fully accommodated in the through hole 12a of the flange 12.

[0039] As a result, interference between the threaded portion 31a and the threaded hole 20a can be suppressed when changing the machining wheel 20. For example, as Figure 3 As shown, with the threaded portion 31a of the bolt 30 disengaged from the threaded hole 20a of the machining wheel 20, the machining wheel 20 can be separated from the flange 12. Furthermore, as... Figure 3 As shown, with the threaded portion 31a of the bolt 30 entirely accommodated in the through hole 12a of the flange 12, the machining wheel 20 can abut against the flange 12.

[0040] like Figure 3 As shown, the working device 60 includes a first arm 61. The first arm 61 is, for example, a multi-joint robot. The working device 60 has a first drive mechanism 63 and a second drive mechanism 64 at the front end of the first arm 61. The first drive mechanism 63 uses a tool 40 to loosen or tighten the bolt 30. The second drive mechanism 64, after the first drive mechanism 63 pulls the threaded portion 31a out of the threaded hole 20a, causes the threaded portion 31a to disengage from the threaded hole 20a.

[0041] The first drive mechanism 63 includes, for example, a rotary motor 63a that rotates the bolt 30 together with the tool 40, and a moving motor 63b that moves the bolt 30 and the tool 40 together axially (e.g., in the Z-axis direction). The axial movement of the bolt 30 per revolution is equal to the pitch of the thread teeth of the threaded portion 31a. The tool 40 has, for example, a polygonal prism-shaped bar. This bar is inserted into a bottomed hole 32a in the head 32. Alternatively, the tool 40 may have a sleeve (not shown). This sleeve may also fit around the outer periphery of the head 32.

[0042] The second drive mechanism 64 includes, for example, a first moving motor 64a that moves the second tool 41 along the axial direction (e.g., the Z-axis direction) of the bolt 30 and a second moving motor 64b that moves the second tool 41 along a direction orthogonal to the axis of the bolt 30 (e.g., the Y-axis direction). The second tool 41 is, for example, a two-toothed fork that holds the cylindrical portion 31b of the bolt 30 between the two teeth and lifts the head 32 of the bolt 30 with the two teeth.

[0043] like Figure 4 As shown, the working device 60 includes a second arm 62. The second arm 62 operates independently of the first arm 61. The second arm 62 is, for example, a multi-joint robot. The working device 60 has, for example, a gripper 65 and a rotating mechanism 66 at the front end of the second arm 62. The gripper 65 holds the machining wheel 20. The rotating mechanism 66 rotates the gripper 65. The rotating mechanism 66 causes the machining wheel 20 to rotate together with the gripper 65.

[0044] The clamp 65, for example, has multiple telescopic cylinders 65a. The multiple telescopic cylinders 65a clamp the annular base 21 of the machining wheel 20 from the inside. The multiple telescopic cylinders 65a are spaced apart and open around the circumference of the base 21. Alternatively, the clamp 65 can also clamp the annular base 21 of the machining wheel 20 from the outside. To prevent damage to the grinding stone 22, the clamp 65 does not clamp the grinding stone 22.

[0045] The clamp 65 includes a pad 65b disposed at the front end of the telescopic cylinder 65a. The pad 65b abuts against the inner circumferential surface of the annular base 21. The inner circumferential surface of the base 21 slopes upwards towards the radially inward side of the base 21. The pad 65b has a conical surface 65b1 that abuts against the inner circumferential surface of the base 21. The pad 65b abuts against the lower surface of the annular base 21. The lower surface of the base 21 is horizontally disposed. The pad 65b has a horizontal surface 65b2 that abuts against the lower surface of the base 21.

[0046] The first arm 61 and the second arm 62 enter the interior from the outside of the outer cover 18, respectively, to perform at least one of the following operations: installing the machining wheel 20 onto the flange 12 and removing the machining wheel 20 from the flange 12. Furthermore, the configuration of the first drive mechanism 63, the second drive mechanism 64, the clamp 65, and the rotating mechanism 66 is not particularly limited. For example, the first drive mechanism 63, the second drive mechanism 64, the clamp 65, and the rotating mechanism 66 may all be located at the front end of the first arm 61.

[0047] The following mainly refers to Figure 3 and Figure 4 An example of the operation of the work device 60, i.e., the work method, will be described. The work device 60 performs the work in place of a person, thus preventing the person from being contaminated by the buildup inside the outer casing 18. The operation of the work device 60 is controlled by the control circuit 69. Alternatively, a person can also perform the work.

[0048] First, an example of the operation of removing the machining wheel 20 from the flange 12 (hereinafter also referred to as the disassembly operation) will be described. The disassembly operation has the following (A1) to (A6): (A1) The clamp 65 holds the machining wheel 20. (A2) The first drive mechanism 63 loosens one bolt 30. (A3) After the first drive mechanism 63 loosens one bolt 30, the second drive mechanism 64 causes the threaded portion 31a of one bolt 30 to leave the threaded hole 20a. (A4) The elastic ring 50 clamps the cylindrical portion 31b of the bolt 30, thereby maintaining the state in which the threaded portion 31a of the bolt 30 leaves the threaded hole 20a. (A5) Based on the rotation mechanism 66 causing the machining wheel 20 and the clamp 65 to rotate together, (A2) to (A4) are performed again to cause the remaining threaded portion 31a of the bolt 30 to leave the threaded hole 20a. (A6) With all the bolts 30's threaded portions 31a disengaged from the threaded holes 20a and all the bolts 30 remaining on the flange 12, the second arm 62 lowers the clamp 65 and separates the machining wheel 20 from the flange 12 together with the clamp 65.

[0049] To restrict the free rotation of the flange 12, it is preferable to perform the above-described (A6) state while the rotation of the flange 12 is restricted by pressing down a bolt 30 using either the first drive mechanism 63 or the second drive mechanism 64. The first drive mechanism 63 can restrict the rotation of the flange 12 by hooking the tool 40 onto the bolt 30. Furthermore, the second drive mechanism 64 can restrict the rotation of the flange 12 by hooking the second tool 41 onto the bolt 30.

[0050] Alternatively, the disassembly operation can also include the following (A7) between (A3) and (A4). (A7) The first drive mechanism 63 presses the bolt 30 axially, narrowing the gap between the threaded portion 31a and the threaded hole 20a. However, the threaded portion 31a remains disengaged from the threaded hole 20a. According to (A7), the height of the bolt 30 can be adjusted, and the tool 40 can be accurately positioned relative to the head 32 of the bolt 30 when tightening the bolt 30.

[0051] Next, an example of the operation of installing the machining wheel 20 onto the flange 12 (hereinafter also referred to as the installation operation) will be described. The installation operation has the following steps (B1) to (B5): (B1) With all the threaded portions 31a of all the bolts 30 completely accommodated in the through holes 12a of the flange 12 and all the bolts 30 remaining in the flange 12, the second arm 62 raises the clamp 65 so that the machining wheel 20 and the clamp 65 abut against the flange 12. (B2) The first drive mechanism 63 presses one bolt 30 axially so that the threaded portion 31a abuts against the threaded hole 20a. (B3) The first drive mechanism 63 tightens one bolt 30. (B4) Based on the rotation mechanism 66 rotating the machining wheel 20 and the clamp 65 together, steps (B2) to (B3) are repeated to tighten the remaining bolts 30. (B5) The clamp 65 releases the machining wheel 20 from the clamp. According to this embodiment, since the bolt 30 is temporarily fixed to the flange 12 in advance, the operation time can be shortened.

[0052] To restrict the free rotation of the flange 12, it is preferable to perform the above (B1) while the rotation of the flange 12 is restricted by pressing a bolt 30 using either the first drive mechanism 63 or the second drive mechanism 64. The first drive mechanism 63 can restrict the rotation of the flange 12 by hooking the tool 40 onto the bolt 30. Furthermore, the second drive mechanism 64 can restrict the rotation of the flange 12 by hooking the second tool 41 onto the bolt 30.

[0053] The above (B3) may also include the following steps: after the first drive mechanism 63 tightens the bolt 30, the first arm 61 tightens the bolt 30 with a preset torque. The first arm 61 can tighten the bolt 30 by rotating around the bolt 30. The first arm 61 has a load sensor (not shown), and the torque is managed by tightening the bolt 30 in such a way that the detected value of the load sensor becomes a set value. Alternatively, torque management can also be performed by the first drive mechanism 63.

[0054] Regarding the above-described embodiments, the following notes are disclosed.

[0055] [Appendix 1]

[0056] A method of operation in which the machining wheel is disassembled from the flange of the machining apparatus, wherein...

[0057] The operation method includes the following steps:

[0058] (a1) Loosen the bolts;

[0059] (a2) After loosening the bolt, the threaded portion of the bolt is disengaged from the threaded hole;

[0060] (a3) The cylindrical portion of the bolt is held by the elastic ring to maintain the state in which the threaded portion of the bolt is disengaged from the threaded hole;

[0061] (a4) Based on rotating the rotating wheel, repeat steps (a1), (a2), and (a3); and

[0062] (a5) With all the threads of the bolts disengaged from the threaded holes and all the bolts remaining on the flange, the machining wheel is separated from the flange.

[0063] [Appendix 2]

[0064] A method of operation in which the machining wheel is mounted onto the flange of the machining apparatus, wherein...

[0065] The operation method includes the following steps:

[0066] (b1) With all the threaded portions of all the bolts completely accommodated in the through hole and all the bolts remaining in the flange, the machining wheel abuts against the flange;

[0067] (b2) Press the bolt axially so that the threaded portion abuts against the threaded hole;

[0068] (b3) Tighten the bolts; and

[0069] (b4) Based on rotating the rotating wheel, perform (b2) and (b3) again.

[0070] The processing apparatus, operating device, and operating method of this disclosure have been described above, but this disclosure is not limited to the above-described embodiments. Various changes, modifications, substitutions, additions, deletions, and combinations can be made within the scope of the claims. These, of course, also fall within the technical scope of this disclosure.

[0071] This application claims priority based on Japanese Patent Application No. 2024-009916, filed with the Japan Patent Office on January 26, 2024, and all contents of Japanese Patent Application No. 2024-009916 are incorporated herein by reference.

[0072] Explanation of reference numerals in the attached figures

[0073] 10. Machining device; 12. Flange; 12a. Through hole; 12b. Annular groove; 20. Machining wheel; 20a. Threaded hole; 30. Bolt; 31a. Threaded part; 31b. Cylindrical part; 50. Elastic ring; 60. Working device; 63. First drive mechanism; 64. Second drive mechanism; 65. Fixture.

Claims

1. A processing apparatus having a flange to which a processing wheel for grinding or lapping is fastened by bolts, wherein, The bolt has a cylindrical portion and a threaded portion, and the machining wheel is provided with a threaded hole that engages with the threaded portion. The flange has a through hole with a diameter larger than that of the cylindrical portion and the threaded portion, and an annular groove on the inner wall surface of the through hole for mounting an elastic ring that clamps the cylindrical portion.

2. The processing apparatus according to claim 1, wherein, The length of the through hole is longer than the length of the threaded portion, and the distance from the opposite surface of the flange to the annular groove is longer than the length of the threaded portion.

3. The processing apparatus according to claim 1, wherein, The flange is horizontally arranged, the through hole is vertically arranged, and the machining wheel is mounted on the lower surface of the flange.

4. The processing apparatus according to claim 1, wherein, The processing apparatus includes a rotation shaft that rotates the flange. The through holes and the bolts are provided in multiple spaced intervals along the rotation direction of the flange.

5. A working device for performing the operation of removing the processing wheel from the flange of the processing device according to any one of claims 1 to 4, wherein, The working device includes: A clamp that holds the machining wheel; A first drive mechanism, which loosens the bolt; and The second drive mechanism, after the first drive mechanism pulls the threaded portion out of the threaded hole, causes the threaded portion to leave the threaded hole.

6. The working device according to claim 5, wherein, The working device includes a control circuit for controlling the clamp, the first drive mechanism, and the second drive mechanism. The control circuit controls the separation of the machining wheel from the flange while the elastic ring clamps the cylindrical portion of the bolt, causing the threaded portion to separate from the threaded hole.

7. The working device according to claim 5, wherein, The processing apparatus includes a rotation shaft that rotates the flange. The working device includes a control circuit for controlling the clamp, the first drive mechanism, and the second drive mechanism. The control circuit controls the separation of the processing wheel from the flange while the bolt is pressed down by the first drive mechanism or the second drive mechanism to limit the rotation of the flange.

8. The working device according to claim 5, wherein, The working device includes a control circuit for controlling the clamp, the first drive mechanism, and the second drive mechanism. The control circuit controls the machining wheel to abut against the flange while the cylindrical portion of the bolt is clamped by the elastic ring and the entire threaded portion is accommodated in the through hole.

9. The working device according to claim 8, wherein, The control circuit controls the tightening of the bolt using the first drive mechanism while the machining wheel is in contact with the flange.

10. A method of operation in which the machining wheel is disassembled from the flange of the machining apparatus according to any one of claims 1 to 4, wherein, The operation method includes the following steps: Loosen the bolts; After loosening the bolt, the threaded portion of the bolt is disengaged from the threaded hole; as well as With the cylindrical portion of the bolt held in place by the elastic ring, causing the threaded portion to separate from the threaded hole, the machining wheel is separated from the flange.

11. The operating method according to claim 10, wherein, The processing apparatus includes a rotation shaft that rotates the flange. The operation method includes the following steps: while using a tool for loosening the bolt or a two-toothed fork hooked to the bolt to restrict the rotation of the flange, the processing wheel is separated from the flange.

12. The operating method according to claim 10, wherein, The operation method includes the following steps: With the cylindrical portion of the bolt held by the elastic ring and the entire threaded portion accommodated in the through hole, the machining wheel abuts against the flange; Pressing the bolt axially to abut the threaded portion against the threaded hole; and Tighten the bolts.

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