X-ray analysis device

Abstract

The invention relates to an X-ray analysis apparatus for analyzing a sample. The X-ray analysis apparatus comprises a first roller and a second roller. The first roller and the second roller form an examination plane along which the sample passes. The apparatus comprises an X-ray source for irradiating the sample with X-rays and a detector configured to detect the X-rays. The X-ray source is configured to project X-rays in operation to a working area located between the first roller and the second roller and is positioned in operation at a first side of the examination plane. The apparatus further comprises a first side wall and a second side wall. The first side wall is positioned at a second side of the examination plane opposite the X-ray source and arranged between the working area and the first roller. The second side wall is likewise positioned at the second side of the examination plane opposite the X-ray source and arranged between the working area and the second roller.

Description

Technical Field

[0001] This invention relates to an apparatus and method for X-ray analysis. Specifically, examples relate to an X-ray analysis apparatus for thin film or flat plate materials. Background Technology

[0002] X-ray analysis methods can be used to characterize materials. X-ray analysis of flat and thin film materials is a technique used to study the atomic and molecular structure of materials. A thin film of the material to be examined is prepared, then irradiated with X-rays, and the resulting signal is detected. Typically, two forms of signal can be detected, and these detection methods are called X-ray diffraction or X-ray fluorescence. In X-ray diffraction, the material scatters X-rays and produces a diffraction pattern, which is detected and can then be analyzed to determine information about the crystal structure. In X-ray diffraction, the detector is positioned where the diffracted X-rays will be guided, i.e., on the same side of the film as the X-ray source. In X-ray fluorescence analysis, the material emits characteristic fluorescent X-rays, which are subsequently detected. In fluorescence analysis, the detector can also be positioned on the same side of the film as the X-ray source. In X-ray transmission measurements, the detector can be positioned on the opposite side of the film from the X-ray source.

[0003] Information that can be determined from detected X-rays includes material content, interplanar spacing, crystal orientation, information about the unit cell, and other lattice parameters. This analysis can be used to study material layers and investigate changes in crystal structure, such as under different conditions.

[0004] X-ray analysis can also be performed on flat materials such as flat glass or images, and can be used to examine the properties or changes of the material being examined.

[0005] In industrial applications, X-ray analysis of flat and thin films is a non-destructive method for identifying defects, determining material thickness, and assessing material content and properties. In particular, it can be used for quality control to ensure materials meet specific quality indicators. It can also be used to detect defects, cracks, inhomogeneities, or contamination in materials.

[0006] Thin-film X-ray analysis is also used to determine the thickness and uniformity of layers, such as in the production of photovoltaic cells. Finally, thin-film X-ray analysis can be used to analyze the structural properties and composition of materials, such as semiconductors and other advanced materials used in electronic applications.

[0007] Roll-to-roll X-ray analysis is a thin-film X-ray analysis method that involves continuous or random X-ray inspection of material on a roll of thin film. This is particularly useful in scenarios where quality control and non-destructive testing are critical, such as flexible electronics and thin films. Roll-to-roll X-ray analysis ensures the quality and consistency of processed materials without disrupting the production line.

[0008] One specific industrial application of roll-to-roll X-ray analysis methods and equipment is in the production of catalyst-coated polymer electrolyte membranes for fuel cells. Electrocatalysts are capital-intensive, and uneven application—such as too much or too little active element—either wastes valuable resources or renders the catalyst ineffective. Careful monitoring of materials can improve product quality and enhance cost control.

[0009] In applications such as fuel cell membrane manufacturing, roll-to-roll X-ray analysis allows for real-time material monitoring, enhancing process control. Regular analysis means continuous optimization of material composition and loading, minimizing the production of defective products and maximizing cost efficiency.

[0010] However, due to the nature of thin film or flat plate materials, some of the X-rays will penetrate the object being inspected. It is undesirable for these X-rays to be reflected back and detected by the detector, as this could distort the detection results.

[0011] Therefore, there is a need to provide an improved thin-film X-ray analysis device to minimize the reflection of X-rays after they penetrate the thin film. Summary of the Invention

[0012] According to one aspect of the present invention, an X-ray analysis apparatus is provided, comprising: First roller; The second roller, the first roller and the second roller form an inspection plane, and the sample passes along the inspection plane; An X-ray source is used to irradiate the sample with X-rays and is configured in operation to project X-rays into a working area in the inspection plane located between the first roller and the second roller, and is positioned in operation on a first side of the inspection plane; The detector is configured to detect X-rays; A first sidewall, positioned on the second side of the inspection plane opposite to the X-ray source, is disposed between the working area and the first roller, and has a first end near the inspection plane and a second end away from the inspection plane; and The second sidewall is also positioned on the second side of the inspection plane opposite to the X-ray source. The second sidewall is arranged between the working area and the second roller. The second sidewall has a first end close to the inspection plane and a second end away from the inspection plane.

[0013] Therefore, the X-rays passing through the sample are contained between the first and second sidewalls and are reduced or prevented from being directly reflected back to the detector. By preventing X-rays from being reflected back to the detector, the signal received by the detector is not contaminated, thus obtaining more accurate results. The first and second sidewalls form an anti-backscattering device that prevents backscattering from passing through the sample and returning to the detector.

[0014] Specifically, the proximal end of the first sidewall must be positioned between the first roller and the working area, and the proximal end of the second sidewall must be positioned between the second roller and the working area.

[0015] The inspection plane can be formed of a thin film plane. In some applications, the sample can be a thin film, and the film itself or the material deposited on the film is inspected. Alternatively, the sample can be a flat material inspected using the device. As an example, the device can be used to inspect flat glass, crystalline materials, or paintings.

[0016] In some examples, the device may also include a grating positioned between a first sidewall and a second sidewall and in the path of the X-rays. The grating scatters the X-rays to prevent a coherent beam from being reflected back to the detector. The grating is preferably made of metal.

[0017] The grating preferably extends between the first sidewall and the second sidewall, such that substantially all X-rays between the first sidewall and the second sidewall are scattered by the grating.

[0018] The first sidewall and the second sidewall may form part of a housing, the housing further including a base formed between a second end of the first sidewall and the second sidewall.

[0019] The base can move between a first position and a second position, wherein in the first position, the base extends between the first sidewall and the second sidewall. In the second position, the base may or may not extend between the first sidewall and the second sidewall. In some examples, the base may be moved (e.g., by rotation or translation) and no longer extend between the first sidewall and the second sidewall (e.g., the base may still be attached to either the first or the second wall, but moved away from the other wall). In other examples, in the second position, the base still extends between the first and second sidewalls, but the base, along with at least a portion of the first and second sidewalls, has been rotated. Thus, in the first position, the base may be substantially parallel to the inspection plane, while in the second position, the base may not be substantially parallel to the inspection plane.

[0020] In one example, the base may be configured to rotate between the first position and the second position about a pivot on the first sidewall. For example, the pivot may be adjacent to the second end of the first sidewall.

[0021] Alternatively, the pivot may be adjacent to the first end of the first sidewall. In this example, the base may be configured to rotate about the pivot together with the first sidewall.

[0022] In another alternative example, the base and at least a portion of the first sidewall and at least a portion of the second sidewall may be configured to rotate together as a unit. The base, the portion of the first sidewall, and the portion of the second sidewall may be configured to rotate about the combined centroid of the base, the portion of the first sidewall, and the portion of the second sidewall.

[0023] The first ends of the first and second sidewalls can be at most 30 mm from the inspection plane. Preferably, the distance from the first ends of the first and second sidewalls to the inspection plane is at most 10 mm or 5 mm. By positioning the first ends of the first and second sidewalls close to the inspection plane where the sample is located, the transmission of X-rays in the gap between the sample and the first ends of the first and second sidewalls is minimized.

[0024] The sidewalls can be made of metal, as this provides an effective barrier to X-rays. However, any material that can provide a barrier to X-rays can also be used.

[0025] In some examples, the first ends of the first sidewall and the second sidewall are separated by a first distance from each other, and the second ends of the first sidewall and the second sidewall are separated by a second distance from each other, and the second distance is greater than the first distance. This inclined (or ramped) arrangement of the walls can reduce or prevent X-rays from impacting the sidewalls (thereby minimizing backscattering) and allow X-rays to pass toward the second ends of the first sidewall and the second sidewall.

[0026] Specifically, the second distance can be at least 20% larger than the first distance.

[0027] The first sidewall and the second sidewall preferably form an angle of less than 80º with the inspection plane, and the second ends of the first sidewall and the second sidewall are farther apart than the first ends of the first sidewall and the second sidewall.

[0028] The first sidewall and the second sidewall may form part of a housing, which also includes a base.

[0029] The X-rays emitted by the X-ray source have an angular range relative to the inspection plane, and the angle formed between the sidewall and the inspection plane is smaller than the minimum angle formed by the X-rays. This arrangement specifically ensures that the X-rays are incident on any base or grating, rather than on the side of the housing.

[0030] The first wall and the second wall may form part of a housing, the housing further including a base formed between the second ends of the first sidewall and the second sidewall.

[0031] The housing may also have a base. In some examples, the sidewalls may form an angle of less than 80º with the base of the housing (relative to the space between the sidewalls). This is an angled arrangement, which, as mentioned above, can reduce or prevent X-rays from initially striking the sidewalls of the housing (thus reducing or preventing the possibility of backscattering to the detector). Furthermore, the angled sidewalls can help reduce backscattering from the base reaching the detector, since the sidewalls essentially trap or contain the backscattering.

[0032] The device may also include a substantially sealed housing configured to house the first roller, the second roller, the X-ray source, the detector, and the first and second sidewalls.

[0033] The apparatus may further include a sample arranged along the inspection plane between the first roller and the second roller. The sample may be in the form of a flat material, or may include a thin film spread out on the first roller and the second roller. The film itself may be studied, or alternatively, the material to be studied may be deposited on the film.

[0034] According to the present invention, a method for performing X-ray analysis is provided. The method includes providing an X-ray analysis apparatus, the apparatus comprising: a first roller and a second roller forming an inspection plane, along which a sample passes; an X-ray source for irradiating the sample with X-rays and configured in operation to project X-rays into a working area between the first roller and the second roller, and positioned in operation on a first side of the inspection plane; a detector configured to detect X-rays; a first sidewall positioned on a second side of the inspection plane opposite to the X-ray source, the first sidewall being disposed between the working area and the first roller, the first sidewall having a first end near the inspection plane and a second end away from the inspection plane; and a second sidewall, also positioned on the second side of the inspection plane opposite to the X-ray source, the second sidewall being disposed between the working area and the second roller, the second sidewall having a first end near the inspection plane and a second end away from the inspection plane. The method further includes: providing a sample in the inspection plane; irradiating at least a portion of the working area using the X-ray source; and detecting the scattered X-rays by the detector.

[0035] Scattered X-rays may include diffracted X-rays or X-rays emitted by means of, for example, fluorescence. Attached Figure Description

[0036] Examples of the invention will now be described by way of example with reference to the accompanying drawings, in which: Figure 1 This is a schematic diagram illustrating a roll-to-roll X-ray analysis apparatus according to the prior art; Figure 2 This is a schematic diagram illustrating a portion of an X-ray analysis apparatus according to an example of the present invention; Figure 3 This is a schematic diagram illustrating a portion of an X-ray analysis apparatus according to another example of the present invention; Figure 4 This is a schematic diagram illustrating a portion of an X-ray analysis apparatus according to another example of the present invention; Figure 5 This is a schematic diagram illustrating a portion of an X-ray analysis apparatus according to another example of the present invention; Figure 6 This is a schematic diagram illustrating a portion of an X-ray analysis apparatus according to another example of the present invention; Figure 7 This is a schematic diagram illustrating a portion of an X-ray analysis apparatus according to another example of the present invention; Figure 8 is a schematic diagram illustrating a portion of an X-ray analysis apparatus according to another example of the present invention; Figure 9 is a schematic diagram illustrating a portion of an X-ray analysis apparatus according to another example of the present invention; and Figure 10 is a schematic diagram illustrating a portion of an X-ray analysis apparatus according to another example of the present invention.

[0037] It should be noted that these figures are schematic and not drawn to scale. For clarity and convenience in the figures, the relative dimensions and scales of parts in these figures have been enlarged or reduced. Detailed Implementation

[0038] Figure 1 A prior art roll-to-roll X-ray apparatus is depicted. As shown, a thin film 10 extends through a plurality of rollers 4, 2, 3, and 5. These rollers can facilitate movement of the thin film 10 driven by rollers elsewhere. Alternatively, one or more of the rollers can be drive rollers that drive the thin film.

[0039] The device includes an X-ray source 1 that generates X-rays. The X-ray source includes a cathode and an anode enclosed in a sealed housing. In use, the cathode emits an electron beam that strikes the target surface of the anode, thereby irradiating the irradiated area of ​​the anode.

[0040] The anode is configured to emit X-rays. The housing includes a window arranged to allow some of the X-rays emitted by the anode to exit the housing as an X-ray beam. The X-ray source may also include X-ray optics arranged to receive X-rays from the X-ray source.

[0041] At the thin film, X-rays are scattered and / or reflected and / or transmitted by the sample material (thin film). The scattered and / or reflected X-rays are then detected by a detector (not shown). The detection results can be analyzed to determine the thickness or inconsistencies of the material deposited on the thin film, any defects in the material, etc. The detector can be part of a single unit with the X-ray source or it can be a standalone unit.

[0042] X-rays can be operated continuously to continuously acquire data about a sample, or they can be operated periodically to acquire information from, for example, each different manufacturing unit.

[0043] The X-ray source and roller are housed in a housing 8 for containing the X-rays. The film enters through a narrow slit on one side of the housing and exits through a narrow slit on the other side of the housing. The housing may have a door that can be opened (when not in operation) to allow for initial placement of the film.

[0044] Figure 2 An apparatus according to an example of the invention is depicted, comprising an X-ray source 1 and a detector, as well as a first roller 2 and a second roller 3. The top sides of rollers 2 and 3 form an inspection plane along which a sample passes. X-rays emitted by source 1 are incident on a working area of ​​the sample within the inspection plane (sometimes also referred to as a membrane plane when a membrane is used). As shown, a first sidewall 21 and a second sidewall 22 are present. The first sidewall has a first end 26 near the inspection plane and a second end 27 away from the inspection plane. The second sidewall 22 has a first end 28 near the inspection plane and a second end 29 away from the inspection plane.

[0045] The first and second sidewalls are used to contain X-rays that have passed through the sample, preventing them from being transmitted back to the sample and reaching the detector. Although a flat material sample is shown here, it can also be inspected (flexible films). The first ends 26, 28 are preferably at most 30 mm from the inspection plane along the length of the working area, more preferably at most 10 mm, and most preferably at most 5 mm. Arranging the sidewalls close to the inspection plane prevents X-ray escape. The sidewalls should be arranged close to the inspection plane at least along the length of the working area.

[0046] The sidewalls are made of metal, particularly steel or lead, so X-rays cannot penetrate them. However, they can be made of any material that X-rays cannot penetrate.

[0047] X-rays are projected from X-ray source 1 into the working area. Within the working area, some of the X-rays are reflected, diffracted, or emitted toward the detector. However, it can be seen that some of the X-rays penetrate the sample, forming a minimum angle α with the inspection plane. The X-rays pass between the first sidewall 21 and the second sidewall 22.

[0048] Sidewalls 21 and 22 have portions perpendicular to the inspection plane and portions at a non-perpendicular angle to the inspection plane. The non-perpendicular portions form an angle β with the inspection plane. Angle β is preferably less than angle α, which ensures that X-rays do not incident on the sidewalls but instead pass towards the second ends of the first and second sidewalls. Furthermore, angle β is preferably less than 80º.

[0049] Due to the inclination of the sidewalls, the distance between the first end of the first sidewall and the first end of the second sidewall is less than the distance between the second ends of the first sidewall and the second sidewall. The distance between the second ends 27 and 29 of the first sidewall 21 and the second sidewall 22 is preferably at least 20% greater than the distance between the first ends 26 and 28 of the first sidewall 21 and the second sidewall 22.

[0050] Figure 2 A sample of flat material being examined is shown. However, the invention can also be used in conjunction with thin films, such as... Figure 3 As shown. Figure 3 Alternative examples are described. Besides... Figure 2 In addition to the features shown, a grating 25 is positioned between the first sidewall and the second sidewall. The grating preferably extends the entire length between the first and second sidewalls. The grating scatters any X-rays, so that no coherent beam is reflected back to the detector. The grating is preferably made of metal. Although the grating 25 is shown positioned between the second ends 27, 29 of the first sidewall 21 and the second sidewall 22, it should be understood that the grating can be located at other positions between the sidewalls.

[0051] Figure 4 Alternative examples of the invention are depicted, wherein the shapes of the sidewalls 21, 22 are similar to... Figure 2 and Figure 3 The same as shown, but together with the base 23, it forms part of the housing. This example shows a housing with a grating arranged on the base 23; however, those skilled in the art will understand that the grating is an optional feature.

[0052] Figure 5 An alternative arrangement of sidewalls 21, 22 is depicted, wherein the sidewalls are inclined along their entire length. This results in a greater distance between the second ends 27, 29 of the first sidewall 21 and the second sidewall 22, and thus a wider grating 25.

[0053] Figure 6 An alternative arrangement is depicted, in which sidewalls 51 and 52 are not inclined, but perpendicular to the inspection plane. Figure 4 The arrangement depicted is similar, with the sidewalls forming part of the housing together with the base 53. The grating 55 is positioned on the base 53.

[0054] Figure 7 An alternative example of the invention is depicted, wherein sidewalls 51, 52 are perpendicular to the inspection plane. Figure 6 Instead, there is no base here; instead, the grating 55 extends between the second ends of the first and second sidewalls.

[0055] For simplicity, rollers 4 and 5 and housing 8 (as shown) Figure 1 (As shown) Not in Figures 2 to 7 They are depicted in the text, but they may still exist in various winding arrangements. Although Figures 3 to 7 The thin film sample being analyzed in a roll-to-roll arrangement is depicted, but the sample can alternatively be a flat material, and multiple (conveyor) rollers can be substantially located within the inspection plane, such as... Figure 2 As shown in Figures 8 to 10. Figures 8 to 10 depict an arrangement of flat material with multiple carrier rollers 85. Some of the carrier rollers may be driven rollers, and some may be non-driven rollers. Those skilled in the art will understand that the arrangement of the flat material and carriers can be consistent with... Figures 2 to 7The housing and sidewalls shown are used together, and the roll-to-roll arrangement of the film can be used with the housing and sidewalls depicted in Figures 8 to 10.

[0056] Figure 8 depicts a shell with sidewalls 51, 52 and a base 83. The base may be as follows: Figure 8a The first position described is as follows Figure 8b The base moves between the depicted second positions, extending between the first and second sidewalls. The base is rotatable about a pivot 81 at the second end of the first sidewall. When the sample is irradiated, the base is in the first position, but can rotate to the second position when there is no radiation. In the first position, a seal is formed between the base 83 and the second sidewall 52. Although the grating is not depicted in Figure 8, it can be fixed to the base 83.

[0057] The ability to open the casing is particularly useful for applications where debris may accumulate inside, as the casing can be opened to remove the debris.

[0058] Figure 9 depicts an alternative housing to the housing depicted in Figure 8. Similar to the arrangement in Figure 8, the base 93 can be in a first position (e.g., Figure 9a The depicted) and the second position (such as Figure 9b The base 93 and the first sidewall 51 move between each other as depicted. However, the base 93 and the first sidewall 51 both rotate as a single unit about the pivot 91 at the first end of the first sidewall.

[0059] Although Figures 8 and 9 depict the first sidewall not rotating at all (Figure 8) or the first sidewall rotating completely (Figure 9), as an alternative, only a portion of the first sidewall can be rotated together with the base.

[0060] Figure 10 depicts an arrangement in which a portion of the first sidewall 51, a portion of the second sidewall 52, and the base 103 all rotate together. They all rotate about a combined center of mass 101 of the first sidewall portion, the second sidewall portion, and the base. Rotation about the center of mass 101 means that easy rotation is possible between a first position and a second position.

[0061] Although Figure 10 depicts a portion of the first sidewall and a portion of the second sidewall rotating together with the base, different portions of the first and second sidewalls can also be rotated: for example, more or fewer sidewall portions can be rotated. Furthermore, although the grating 125 is shown as integrally formed with the base 103, the grating can also be located at different positions within the first and second sidewalls.

[0062] In the examples of Figures 8, 9, and 10, the base is substantially parallel to the inspection plane in the first position. This allows debris to be collected. In the second position, the base is not parallel to the inspection plane, allowing the base to be cleaned and / or emptied.

[0063] When used herein, “and / or” should be considered as a specific disclosure of each of two particular features or components having or not having the other. For example, “A and / or B” is considered as a specific disclosure of each of (i) A, (ii) B, and (iii) A and B, as if listed separately herein.

[0064] Unless the context otherwise requires, the description and definition of the features listed above are not limited to any particular aspect or example of the invention, and are equally applicable to all aspects and examples described.

[0065] Those skilled in the art will further understand that although the invention has been described by way of example with reference to several examples, the invention is not limited to the disclosed examples and alternative examples may be constructed without departing from the scope of the invention as defined in the appended claims.

Claims

1. An X-ray analysis device, comprising: First roller; The second roller, the first roller and the second roller form an inspection plane, and the sample passes along the inspection plane; An X-ray source is used to irradiate the sample with X-rays and is configured in operation to project X-rays into a working area in the inspection plane located between the first roller and the second roller, and is positioned in operation on a first side of the inspection plane; The detector is configured to detect X-rays; A first sidewall is positioned on the second side of the inspection plane opposite to the X-ray source. The first sidewall is arranged between the working area and the first roller. The first sidewall has a first end close to the inspection plane and a second end away from the inspection plane. as well as The second sidewall is also positioned on the second side of the inspection plane opposite to the X-ray source. The second sidewall is arranged between the working area and the second roller. The second sidewall has a first end close to the inspection plane and a second end away from the inspection plane.

2. The X-ray analysis apparatus of claim 1 further includes a grating positioned between the first sidewall and the second sidewall and in the path of the X-ray.

3. The X-ray analysis apparatus according to claim 2, wherein the grating is a metal grating.

4. The X-ray analysis apparatus according to claim 2 or claim 3, wherein the grating extends between the first sidewall and the second sidewall.

5. The X-ray analysis apparatus according to any one of the preceding claims, wherein the first sidewall and the second sidewall form part of a housing, the housing further comprising a base formed between a second end of the first sidewall and the second sidewall.

6. The X-ray analysis apparatus of claim 5, wherein the base is movable between a first position and a second position, wherein in the first position, the base extends between the first sidewall and the second sidewall.

7. The X-ray analysis apparatus of claim 6, wherein the base is configured to pivot about the first sidewall between the first position and the second position.

8. The X-ray analysis apparatus of claim 7, wherein the pivot is adjacent to the second end of the first sidewall.

9. The X-ray analysis apparatus of claim 7, wherein the pivot is adjacent to the first end of the first sidewall, and the base is configured to rotate about the pivot together with the first sidewall.

10. The X-ray analysis apparatus of claim 6, wherein the base and at least a portion of the first sidewall and at least a portion of the second sidewall are configured to rotate together as a unit.

11. The X-ray analysis apparatus of claim 10, wherein the base, the portion of the first sidewall, and the portion of the second sidewall are configured to rotate about a combined centroid of the base, the portion of the first sidewall, and the portion of the second sidewall.

12. The X-ray analysis apparatus according to any one of the preceding claims, wherein, The first end of the first sidewall is at most 30 mm away from the inspection plane along the length of the working area.

13. The X-ray analysis apparatus according to any one of the preceding claims, wherein the first end of the second sidewall is at most 30 mm away from the inspection plane along the length of the working area.

14. The X-ray analysis apparatus according to any one of the preceding claims, wherein the first sidewall and the second sidewall are made of metal.

15. The X-ray analysis apparatus according to any one of the preceding claims, wherein the first ends of the first sidewall and the second sidewall are separated by a first distance from each other, and the second ends of the first sidewall and the second sidewall are separated by a second distance from each other, and the second distance is greater than the first distance.

16. The X-ray analysis apparatus of claim 15, wherein the second distance is at least 20% greater than the first distance.

17. The X-ray analysis apparatus according to any one of the preceding claims, wherein the first sidewall and the second sidewall form an angle of less than 80º with the inspection plane, and the second ends of the first sidewall and the second sidewall are farther apart than the first ends of the first sidewall and the second sidewall.

18. The X-ray analysis apparatus according to any one of the preceding claims, wherein the X-rays emitted by the X-ray source have an angular range relative to the inspection plane, and wherein the angles formed by the first sidewall and the second sidewall with the inspection plane are less than the minimum angle formed by the X-rays with the inspection plane.

19. The X-ray analysis apparatus according to any one of the preceding claims further includes a substantially sealed housing configured to house the first roller, the second roller, the X-ray source, the detector, and the first sidewall and the second sidewall.

20. The X-ray analysis apparatus according to any one of the preceding claims further includes a sample arranged along the inspection plane between the first roller and the second roller.

21. A method for performing thin film X-ray analysis, comprising: Provide an X-ray analysis device, the X-ray analysis device comprising: A first roller and a second roller form an inspection plane, along which the sample passes; An X-ray source is used to irradiate a sample with X-rays and is configured in operation to project X-rays into a working area in the inspection plane located between the first roller and the second roller, and is positioned in operation on a first side of the inspection plane; The detector is configured to detect X-rays; A first sidewall, positioned on the second side of the inspection plane opposite to the X-ray source, is disposed between the working area and the first roller, and has a first end near the inspection plane and a second end away from the inspection plane; and A second sidewall, also positioned on the second side of the inspection plane opposite to the X-ray source, is disposed between the working area and the second roller. The second sidewall has a first end close to the inspection plane and a second end away from the inspection plane. A sample is provided within the inspection plane; At least a portion of the working area is irradiated using the X-ray source; and The scattered X-rays are detected by the detector.

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