Diluent multi-layer filtration apparatus for manufacturing semiconductors

Abstract

This invention discloses a multi-layer filtration device for diluents used in semiconductor manufacturing, comprising a filter tank containing a funnel-shaped coarse filter screen, a first fine filter screen, and a second fine filter screen, with the mesh size decreasing sequentially. A motor is fixed to the bottom of the filter tank and drives a rotating shaft. One end of an auxiliary elastic rod is fixed to the rotating shaft, and the other end elastically abuts against the outer surface of the coarse filter screen. Several assisting blocks are fixed to the inner wall of the filter tank, each having an inclined surface and a rectangular surface sequentially connected along the rotation path. During filtration, the motor drives the rotating shaft to rotate the auxiliary elastic rod. Its elastic abutting end first climbs along the inclined surface of the assisting block to store energy and move away from the surface of the coarse filter screen. When it crosses the rectangular surface, it instantly resets and impacts the side surface of the coarse filter screen. This invention avoids particle accumulation at the same interface through three-stage gradient filtration, the impact vibration promotes particle movement to prevent screen clogging, and the impact deformation of the side wall squeezes and compresses the accumulated particles, forming an extrusion and rolling cycle, thereby improving filtration efficiency.

Description

Technical Field

[0001] This invention belongs to the field of filtration equipment technology, and relates to a multilayer filtration device for diluents used in semiconductor manufacturing. Background Technology

[0002] Semiconductor diluents are chemical reagents used to dilute semiconductor materials or related solutions. They are widely used in semiconductor manufacturing processes, including photoresist removal, RRC processes, TFT-LCD display cleaning, photoresist nozzle cleaning, wafer EBR (edge ​​bead removal), and coating machine cleaning. During production, transportation, and use, diluents inevitably introduce impurities such as particulate matter, organic matter, and metal ions, severely affecting their purity. To meet process requirements, particulate matter is typically filtered out first, followed by deep purification of organic matter and metal ions to prevent interference from particulate matter in subsequent purification units.

[0003] Semiconductor diluents contain complex particulate matter with a wide particle size distribution. Typical impurities include metal shavings, oxides from rusted pipes or containers, crystalline salts formed by scale, microgels, plastic debris, hard particles generated by equipment wear, and particulate aggregates.

[0004] The existing patent document with publication number CN223732330U discloses a diluent filtration device for manufacturing semiconductors, comprising: a filter cartridge assembly, the filter cartridge assembly including a fixed pipe joint, a central tube provided in the inner cavity of the filter cartridge assembly, a lower water distributor connected to the lower end of the central tube and an upper water distributor connected to the upper end, a multi-way valve body connected to the upper end of the upper water distributor, the multi-way valve body being threadedly connected to the outer circular surface of the fixed pipe joint; two circular support rings are connected at intervals to the inner wall of the filter cartridge assembly, and hollow-shaped bearing ring mechanisms are respectively connected to the circular support rings, the hollow-shaped bearing ring mechanism including an inner circular feeding cavity, a hollow-shaped bearing ring assembly and an outer circular feeding cavity arranged sequentially from the inside to the outside; the projection of the hollow-shaped bearing ring assembly on the upper hollow-shaped bearing ring mechanism is located in the inner circular feeding cavity on the lower hollow-shaped bearing ring mechanism.

[0005] Regarding the aforementioned existing technologies, the inventors believe that the following defects exist: the above-mentioned filtration equipment uses a single filtration stage to simultaneously filter the diluent, without classifying and intercepting particles according to their size. Under this method, particles of different sizes are concentrated and intercepted at the same filtration interface, and large and small particles quickly accumulate on the surface and inside of the filter element, which can easily cause clogging of the filter media, thereby greatly reducing the filtration efficiency. Summary of the Invention

[0006] The purpose of this invention is to address the aforementioned problems in existing technologies by proposing a multilayer filtration device for diluents used in semiconductor manufacturing, thereby solving the technical problem of poor filtration efficiency in existing filtration devices mentioned in the background section.

[0007] The objective of this invention can be achieved through the following technical solutions: A multilayer filtration apparatus for diluents used in semiconductor manufacturing, comprising: The filter tank contains a funnel-shaped coarse filter screen, a first fine filter screen, and a second fine filter screen arranged sequentially, with the mesh size of the coarse filter screen, the first fine filter screen, and the second fine filter screen decreasing sequentially. The motor is fixed to the bottom of the filter tank. The output end of the motor drives a rotating shaft that extends into the filter tank. Both the first and second fine filter screens have through holes for the rotating shaft to pass through and fit. An auxiliary elastic rod is fixed at one end to the rotating shaft and elastically abuts against the outer surface of the coarse filter screen at the other end. Several assist blocks are fixed to the inner wall of the filter tank, and have inclined surfaces and rectangular surfaces that are sequentially arranged and obliquely connected along the rotation path of the auxiliary elastic rod; When the auxiliary elastic rod rotates with the shaft, its elastic contact end first climbs along the inclined surface and gradually moves away from the surface of the coarse filter screen. When it crosses the rectangular surface, the auxiliary elastic rod instantly resets under its own elastic force and impacts the side surface of the coarse filter screen.

[0008] By setting up a coarse filter screen, a first fine filter screen, and a second fine filter screen with decreasing mesh size, a three-stage gradient filtration system is achieved for particles of different sizes in the diluent. Large particles are trapped on the coarse filter screen, while medium and small particles are trapped in the latter two fine filter screens. This avoids the accumulation of particles of all sizes on the same filtration interface and fundamentally alleviates the problem of filter media clogging. The motor drives the auxiliary elastic rod to rotate. Under the action of the inclined and rectangular surfaces of the assist block, the elastic contact end of the auxiliary elastic rod first gradually stores energy and then releases it instantaneously, impacting the side surface of the coarse filter screen to generate instantaneous vibration. This impact causes the entire coarse filter screen to vibrate, promoting particle movement and preventing particles from getting stuck at the screen holes. On the other hand, the impact causes local elastic deformation of the side wall of the coarse filter screen, squeezing the large particle accumulation inside the screen inward. After being squeezed laterally, some particles are squeezed upward and roll down from the high point of the accumulation to the low point of the side wall of the coarse filter screen with the assistance of liquid buoyancy. This forms a cyclical motion of extrusion and rolling of the accumulated particles, avoiding the static accumulation of large particles that trap and block small particles, thus affecting the filtration effect. The side wall recovers its elasticity quickly after the impact, and an instantaneous space is formed at the impact point, which facilitates the liquid to pass through the filter holes, further improving the filtration efficiency.

[0009] Preferably, at least two equidistant ring-shaped limiting plates are fixed to the outer periphery of the coarse filter screen. A limiting groove for the limiting plates to be embedded is provided on the inner wall of the opening of the filter tank. A notch is provided on the top of the filter tank for the limiting plates to pass through and communicate with the limiting groove. The coarse filter screen enters the limiting groove through the limiting plate and rotates after entering the limiting groove through the notch to achieve anti-detachment installation. The space inside the limiting groove is larger than the volume of the limiting plate, and the diameter of the outer peripheral wall of the coarse filter screen is smaller than the diameter of the opening of the filter tank, so that the installed coarse filter screen can move up and down and tilt to a certain extent with the help of the gap between the limiting plate and the limiting groove.

[0010] The space inside the limiting groove is larger than the volume of the limiting plate, and the diameter of the outer peripheral wall of the coarse filter screen is smaller than the diameter of the filter tank opening, resulting in a clearance for the coarse filter screen in its installed state. When the auxiliary elastic rod applies an impact force to one side of the coarse filter screen, this clearance allows the coarse filter screen to undergo a certain amplitude of vertical displacement and tilting deflection along the direction of the force. After the impact, it resets under the action of gravity and the limiting mechanism. This combined vertical and deflection vibration causes the particles inside the coarse filter screen to be subjected to inertial forces in multiple directions, and the relative positions of the particles are constantly rearranged, resulting in a screening efficiency significantly higher than that of planar vibration in a single direction.

[0011] Preferably, the elastic abutment end of the auxiliary elastic rod is provided with a plurality of dynamic balls, which elastically abut against the outer surface of the coarse filter screen.

[0012] Preferably, both the first and second fine filter screens are sloped.

[0013] Preferably, a first stirring rod and a second stirring rod are fixed to the outer periphery of the rotating shaft, and the first stirring rod and the second stirring rod are respectively close to the surface of the first fine filter screen and the second fine filter screen.

[0014] Preferably, both the lower ends of the first fine filter and the second fine filter are fixed with a shielding ring, and the shielding ring fixed at the lower end of the first fine filter is fixedly connected to the second fine filter through a connecting rod.

[0015] Preferably, a hydraulic telescopic rod is fixed to the top wall of the filter tank, and the telescopic end of the hydraulic telescopic rod is fixedly connected to the first fine filter screen; The filter tank has a drain port on its side wall. The hydraulic telescopic rod can drive the first fine filter and the second fine filter to descend as a whole, so that the first fine filter and the second fine filter fall to the corresponding two drain ports respectively, so that the impurities on the surface of the first fine filter and the second fine filter are discharged through the corresponding drain ports respectively. The hydraulic telescopic rod can also drive the first fine filter and the second fine filter to rise as a whole, so that the two shielding rings block the corresponding drain ports respectively.

[0016] Preferably, two sludge collection boxes are fixed on the outside of the filter tank at the corresponding drain outlet. Each sludge collection box has a sludge collection chamber with an inclined arc-shaped bottom surface. A drain pipe is installed on the filter tank and is connected to the two sludge collection boxes.

[0017] Preferably, it also includes a support plate fixed above the filter tank by a support rod, a feed pipe fixed on the support plate, an extension pipe slidably connected to the lower end of the feed pipe, and the extension pipe can move downward to above the coarse filter screen. A water collection tank is also fixed on the support plate. An inner sleeve is connected to the bottom of the water collection tank. An outer sleeve that can be moved to the top of the coarse filter screen is slidably fitted on the inner sleeve. The outer sleeve and the extension pipe are fixedly connected by a connecting plate.

[0018] Preferably, a magnet is fixed on the support plate, and the extension tube is an iron pipe. When the extension tube slides upward to a high position, the magnet attracts the extension tube for positioning. A handle is fixed on the coarse filter screen.

[0019] The main technical effects of this invention are reflected in the following aspects: 1. The multi-layer filtration device for diluents used in semiconductor manufacturing provided by the present invention achieves three-level gradient interception of particles of different sizes in the diluent by setting a coarse filter screen, a first fine filter screen and a second fine filter screen with successively decreasing filter mesh size. This avoids the problem of rapid clogging of the filter medium caused by the concentrated interception of impurities of different sizes at the same filter interface, thereby improving the filtration efficiency.

[0020] 2. At the same time, the motor drives the auxiliary elastic rod and the assist block to apply periodic instantaneous impacts to the side surface of the coarse filter screen in multiple directions. This causes the coarse filter screen to vibrate, promotes the movement of particles on the screen surface, and prevents particles from getting stuck in the screen holes. On the other hand, the impact causes local elastic deformation of the side wall of the coarse filter screen, squeezing the large particles accumulated inside the screen and causing them to be squeezed out and roll off in a cyclical motion. This prevents the large particles from trapping and obscuring the small particles and affecting filtration, maintaining a continuous effective filtration area around the coarse filter screen, thereby ensuring filtration efficiency. In addition, the side wall recovers its elasticity quickly after the impact, and an instantaneous space is formed at the impact point, which facilitates the liquid to pass through the filter holes, further improving filtration efficiency.

[0021] 3. The first and second fine filter screens are equipped with stirring rods that rotate with the shaft to achieve flow-type stirring filtration, further reducing the risk of clogging of the fine filter screen mesh. The coarse filter screen adopts a large-gap limiting groove installation structure, which can produce a certain range of lifting and tilting under impact, making the vibration pattern more diverse and further improving the filtration efficiency. At the same time, the deflection motion causes the particles accumulated on the screen surface to tend to slide to the lower side. Combined with the above-mentioned extrusion and rolling of the particles, it further promotes the uniform distribution of particles on the screen surface and effective screening. Attached Figure Description

[0022] Figure 1 This is a structural schematic diagram of an embodiment of the present invention; Figure 2 This is a cross-sectional view of an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of the coarse filter screen according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the structure of the assist block according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the assembly structure of the first and second fine filters according to an embodiment of the present invention; Figure 6 This is an embodiment of the present invention. Figure 1 Enlarged view of point A in the middle; Figure 7 This is an embodiment of the present invention. Figure 2 Enlarged view of point B in the middle; Figure 8 This is an exploded structural diagram of the sludge collection box according to an embodiment of the present invention; Figure 9 This is a partial structural schematic diagram of an embodiment of the present invention; Figure 10 This is an embodiment of the present invention. Figure 2 Enlarged view of point C in the middle.

[0023] Explanation of reference numerals in the attached drawings: 1. Filter tank; 11. Coarse filter screen; 111. Limiting plate; 112. Handle; 12. First fine filter screen; 121. Shielding ring; 122. Connecting rod; 13. Second fine filter screen; 131. Through hole; 14. Auxiliary block; 141. Inclined surface; 142. Rectangular surface; 15. Limiting groove; 151. Notch; 16. Hydraulic telescopic rod; 17. Drain outlet; 18. Drain pipe; 2. Motor; 21. Rotating shaft; 211. Auxiliary elastic rod; 212. First stirring rod; 213. Second stirring rod; 22. Power ball; 3. Sewage collection box; 31. Sewage collection chamber; 32. Sewage discharge pipe; 33. Connection port; 4. Support plate; 41. Support rod; 42. Feed pipe; 421. Extension pipe; 43. Magnet block; 5. Water collection tank; 51. Inner sleeve; 511. Outer sleeve; 52. Connecting plate; 53. Inlet pipe; 6. First annular block; 61. Second annular block; 62. Annular sealing plate; 63. Sealing gasket. Detailed Implementation

[0024] The following are specific embodiments of the present invention, which are described in conjunction with the accompanying drawings. However, the present invention is not limited to these embodiments.

[0025] like Figure 1-4 As shown, a multilayer filtration device for diluents used in semiconductor manufacturing includes: The filter tank 1 is provided with a funnel-shaped coarse filter screen 11, a first fine filter screen 12 and a second fine filter screen 13 in sequence. The mesh size of the coarse filter screen 11, the first fine filter screen 12 and the second fine filter screen 13 decreases in sequence. A drain pipe 18 located below the second fine filter screen 13 is fixed on the filter tank 1. The sidewalls of the coarse filter screen 11 have an inclined angle so that large particles of impurities trapped by the filter gradually accumulate at the bottom of the coarse filter screen 11, while the periphery of the coarse filter screen 11 maintains its filtering capacity for the diluent solution. Motor 2 is fixed to the bottom of filter tank 1. The output end of motor 2 is connected to a rotating shaft 21 that extends into filter tank 1. The first fine filter screen 12 and the second fine filter screen 13 both have through holes 131 for the rotating shaft 21 to pass through and fit. A first stirring rod 212 and a second stirring rod 213 are fixed on the outer periphery of the rotating shaft 21, and the first stirring rod 212 and the second stirring rod 213 are respectively close to the surfaces of the first fine filter screen 12 and the second fine filter screen 13. The auxiliary elastic rod 211 is fixed at one end to the rotating shaft 21 and elastically abuts against the outer surface of the coarse filter screen 11 at the other end. The elastic abutting end of the auxiliary elastic rod 211 is provided with multiple dynamic balls 22, which elastically abut against the outer surface of the coarse filter screen 11. Several assist blocks 14 are fixed on the inner wall of the filter tank 1, and have inclined surfaces 141 and rectangular surfaces 142 that are sequentially arranged and obliquely connected along the rotation path of the auxiliary elastic rod 211. During the filtration process, motor 2 drives shaft 21 to rotate continuously, and shaft 21 drives auxiliary elastic rod 211 to rotate circumferentially along the inner wall of filter tank 1. The elastic contact end of auxiliary elastic rod 211 contacts the inclined surface 141 and rectangular surface 142 of assist block 14 in sequence along the rotation path: when the elastic contact end climbs along inclined surface 141, auxiliary elastic rod 211 undergoes elastic bending deformation, and its contact end gradually moves away from the outer surface of coarse filter screen 11 to store energy; when the elastic contact end passes over inclined surface 141 and rectangular surface 142 in sequence, the support of assist block 14 disappears instantaneously, and auxiliary elastic rod 211 instantly resets under its own elastic force, and its elastic contact end impacts the side surface of coarse filter screen 11 at a certain speed, generating instantaneous vibration. Every time shaft 21 rotates, auxiliary elastic rod 211 and each assist block 14 cooperate in sequence to form periodic continuous impact vibration on the side surface of coarse filter screen 11.

[0026] Reference Figure 2 , 7At least two ring-shaped, equally spaced limiting plates 111 are fixed to the outer periphery of the coarse filter screen 11. A limiting groove 15 is provided on the inner wall of the opening of the filter tank 1 for the limiting plates 111 to be inserted. A notch 151 is provided on the top of the filter tank 1 for the limiting plates 111 to pass through and communicate with the limiting groove 15. The coarse filter screen 11 enters the limiting groove 15 through the notch 151 via the limiting plates 111 and rotates to achieve anti-detachment installation. The space inside the limiting groove 15 is larger than the volume of the limiting plate 111, and the diameter of the outer peripheral wall of the coarse filter screen 11 is smaller than the diameter of the opening of the filter tank 1, so that the coarse filter screen 11 after installation can move up and down and tilt and deflect to a certain extent with the help of the gap between the limiting plate 111 and the limiting groove 15.

[0027] Under the aforementioned impact, since the limiting plate 111 of the coarse filter screen 11 is embedded in the limiting groove 15, and the space inside the limiting groove 15 is larger than the volume of the limiting plate 111, and the diameter of the outer peripheral wall of the coarse filter screen 11 is smaller than the diameter of the opening of the filter tank 1, the coarse filter screen 11 can generate a certain amplitude of up-and-down movement and tilting and deflection movement by means of the movable gap between the limiting plate 111 and the limiting groove 15 when subjected to a unilateral impact force. After the impact ends, it resets under the action of gravity and limiting, so that the coarse filter screen 11 forms a vibration mode of combined up-and-down and deflection.

[0028] like Figure 2 , 5 As shown, both the lower ends of the first fine filter 12 and the second fine filter 13 are fixed with a shielding ring 121. The shielding ring 121 fixed at the lower end of the first fine filter 12 is fixedly connected to the second fine filter 13 through a connecting rod 122. Both the first fine filter 12 and the second fine filter 13 are sloping.

[0029] A hydraulic telescopic rod 16 is fixed to the top wall of the filter tank 1, and the telescopic end of the hydraulic telescopic rod 16 is fixedly connected to the first fine filter screen 12. Reference Figure 2 , 10The inner wall of the filter tank 1 is fixed with a first annular block 6 and a second annular block 61. A hydraulic telescopic rod 16 is fixed to the first annular block 6 and located between the first annular block 6 and the second annular block 61. The lower end of the frame of the coarse filter screen 11 abuts against the first annular block 6. An annular sealing plate 62 is welded between the first annular block 6 and the second annular block 61. The first annular block 6, the second annular block 61, and the annular sealing plate 62 cooperate to form a protective cavity. This protective cavity is used to prevent liquid corrosion of the hydraulic telescopic rod 16. The telescopic rod of the hydraulic telescopic rod 16 is made of corrosion-resistant material. The telescopic end of the hydraulic telescopic rod 16 passes through the through hole 131 opened in the second annular block 61. The through hole 131 is adapted to the telescopic movement of the hydraulic telescopic rod 16, which greatly reduces the leakage of liquid into the protective cavity. A sealing gasket 63 is provided between the second annular block 61 and the first fine filter screen 12. The sealing gasket 63 is fixed to the upper end face of the first fine filter screen 12. The telescopic end of the hydraulic telescopic rod 16 passes through the sealing gasket 63 and is fixedly connected to the first fine filter screen 12. When the first fine filter screen 12 is in the filtering position, the sealing gasket 63 forms a seal to further block the through hole 131 and prevent liquid from seeping into the protective cavity. The filter tank 1 has a drain port 17 on its side wall. The hydraulic telescopic rod 16 can drive the first fine filter screen 12 and the second fine filter screen 13 to descend as a whole, so that the first fine filter screen 12 and the second fine filter screen 13 descend to the corresponding two drain ports 17, so that the impurities on the surface of the first fine filter screen 12 and the second fine filter screen 13 are discharged through the corresponding drain ports 17. The hydraulic telescopic rod 16 can drive the first fine filter screen 12 and the second fine filter screen 13 to rise as a whole, so that the two shielding rings 121 block the corresponding drain ports 17.

[0030] Referring to 8-10, two sludge collection boxes 3 are fixed on the outside of the filter tank 1 at the corresponding drain outlet 17. The sludge collection box 3 is provided with a sludge collection chamber 31. The sludge collection box 3 has a connection port 33 that connects the corresponding drain outlet 17 and the sludge collection chamber 31. The filter tank 1 is provided with a drain pipe 32, which is connected to the two sludge collection boxes 3. The drain pipe 32 is used to discharge impurities. The bottom surface of the sludge collection chamber 31 is an inclined arc surface so that the impurities entering the sludge collection box 3 are oriented and discharged to the drain pipe 32 and discharged outside through the inclined arc surface.

[0031] After the filtration of a batch of diluent solution is completed, the drain pipe 18 at the bottom of the filter tank 1 discharges the filtered clean diluent. At this time, the surfaces of the first fine filter screen 12 and the second fine filter screen 13 respectively retain particulate impurities of corresponding particle size ranges, which need to be cleaned.

[0032] The hydraulic telescopic rod 16 is activated, extending its telescopic end downwards to drive the first fine filter 12 to descend. Since the first fine filter 12 is fixedly connected to the second fine filter 13 as a single unit via the shielding ring 121 and connecting rod 122, both fine filters move downwards synchronously. As the first fine filter 12 descends, the sealing gasket 63, which was originally against the lower surface of the second annular block 61, disengages, exposing the through hole 131. Simultaneously, the two shielding rings 121 move away from the drain port 17 as the fine filters descend, opening the drain port 17. When the two fine filters descend to the corresponding height of the drain port 17, the sloping surface structure of the first and second fine filters 12 and 13 causes the trapped impurities to slide towards their respective drain ports 17 under the influence of gravity and residual liquid. The impurities then enter the collection chamber 31 of the collection tank 3 through the drain port 17 and connecting port 33.

[0033] like Figure 1-2 As shown in Figures 6 and 7, the system also includes a support plate 4 fixed above the filter tank 1 by a support rod 41. A feed pipe 42 is fixed on the support plate 4. An extension pipe 421 is slidably sleeved at the lower end of the feed pipe 42. The extension pipe 421 can move downwards to above the coarse filter screen 11. A water collection tank 5 is also fixed on the support plate 4. An inner sleeve 51 is connected to the bottom of the water collection tank 5. An outer sleeve 511 that can slide to the top of the coarse filter screen 11 is fitted on the inner sleeve 51. The outer sleeve 511 and the extension pipe 421 are fixedly connected by a connecting plate 52 so as to realize the synchronous lifting and lowering of the outer sleeve 511 and the extension pipe 421. Cleaning water can be introduced into the filter tank 1 through the water collection tank 5. The cleaning water flows from top to bottom through the coarse filter screen 11, the first fine filter screen 12, and the second fine filter screen 13, rinsing the surfaces of each filter screen and the inner wall of the filter tank 1. A magnet 43 is fixed on the support plate 4. The extension tube 421 is an iron tube. When the extension tube 421 slides upward to the high position, the magnet 43 attracts the extension tube 421 for positioning, so that the coarse filter screen 11 can be taken out from the filter tank 1 for cleaning after the extension tube 421 is positioned at the high position. A handle 112 is fixed on the coarse filter screen 11. When large particles of impurities trapped in the coarse filter screen 11 accumulate to the point where they need to be cleaned, the operator holds the handle 112 and rotates the coarse filter screen 11 so that the limiting plate 111 can be dislodged from the limiting groove 15 through the notch 151. The coarse filter screen 11 can then be removed from the filter tank 1 for cleaning. After cleaning, the limiting plate 111 is aligned with the notch 151, inserted, and rotated in the opposite direction to complete the installation and reset.

[0034] Before starting the filtration operation, the operator pulls down the outer sleeve 511. The outer sleeve 511 slides down along the inner sleeve 51 and simultaneously drives the extension tube 421 to move down along the feed tube 42 through the connecting plate 52. This makes the lower outlet of the extension tube 421 and the lower outlet of the outer sleeve 511 close to the inside of the coarse filter screen 11, shortening the liquid falling distance and preventing the diluent solution from splashing. When it is necessary to clean the inside of the coarse filter screen 11, water is supplied to the water collection tank 5 through the water inlet pipe 53 on the water collection tank 5. The cleaning water in the water collection tank 5 is guided through the inner sleeve 51 and the outer sleeve 511 and discharged at a position close to the inside of the coarse filter screen 11 to avoid water flow directly impacting the screen surface from a height, causing liquid splashing or excessive particle disturbance.

[0035] When large particles of impurities trapped inside the coarse filter screen 11 accumulate to the point where cleaning is necessary, the operator pushes the outer sleeve 511 upwards. The outer sleeve 511, via the connecting plate 52, simultaneously drives the extension tube 421 upwards to its highest position. After the extension tube 421 reaches its highest position, the magnet 43 fixed on the support plate 4 generates a magnetic attraction force on the iron extension tube 421, holding it in place at the retracted position and preventing it from sliding down under gravity. After the extension tube 421 and outer sleeve 511 are simultaneously retracted and positioned, the operating space above the coarse filter screen 11 is completely cleared, preventing the extension tube 421 and outer sleeve 511 from obstructing the removal of the coarse filter screen 11.

[0036] Subsequently, the operator holds the handle 112 on the coarse filter screen 11 and rotates the coarse filter screen 11 so that the limiting plate 111 fixed on its outer periphery can be dislodged from the limiting groove 15 through the notch 151, and the coarse filter screen 11 can be vertically removed from the filter tank 1 to clean the large particles of impurities trapped therein.

[0037] The working principle of the filtration process of this invention is as follows: The diluent solution first enters the funnel-shaped coarse filter 11 for primary coarse filtration. The sidewall of the coarse filter 11 has a certain inclination angle. After the larger particle impurities in the solution are intercepted by the coarse filter 11, they gradually slide down and accumulate towards the bottom of the sieve under the action of gravity. Meanwhile, the middle and upper peripheral sidewalls of the coarse filter 11 remain unobstructed, continuously and effectively filtering the solution.

[0038] The solution filtered through the coarse filter screen 11 falls to the first fine filter screen 12 for secondary fine filtration. The first fine filter screen 12 traps medium-sized particulate impurities. After passing through the filter screen, the solution continues to fall to the second fine filter screen 13 for tertiary fine filtration, trapping even smaller particulate impurities.

[0039] During the filtration process, the motor 2 fixed to the bottom of the filter tank 1 drives the rotating shaft 21 to rotate continuously. The rotating shaft 21 drives the first stirring rod 212 and the second stirring rod 213 to continuously sweep near the surface of the first fine filter screen 12 and the second fine filter screen 13, respectively, stirring the liquid near the surface of the filter screen, so that the particles trapped on the surface of the fine filter screen are in a continuous state of motion, destroying the particle accumulation structure at the mesh, realizing flow-type stirring filtration, and reducing the clogging rate of the fine filter screen.

[0040] Simultaneously, the rotating shaft 21 drives the auxiliary elastic rod 211 to rotate circumferentially along the inner wall of the filter tank 1. Multiple dynamic balls 22 on the elastic contact end of the auxiliary elastic rod 211 elastically abut against the outer surface of the coarse filter screen 11, moving circumferentially along the side wall of the coarse filter screen 11 with the rotation. When the dynamic balls 22 rotate with the auxiliary elastic rod 211 to the position of the assist block 14, they first contact the inclined surface 141 of the assist block 14, causing the auxiliary elastic rod 211 to undergo elastic bending deformation. The dynamic balls 22 gradually move away from the outer surface of the coarse filter screen 11, storing elastic energy during this process. When the dynamic balls 22 successively pass the inclined surface 141 and the rectangular surface 142, the support of the assist block 14 on the auxiliary elastic rod 211 instantly disappears. The auxiliary elastic rod 211 instantly resets under its own elastic force, causing the dynamic balls 22 to impact the side surface of the coarse filter screen 11 at a certain speed, generating instantaneous vibration.

[0041] Each rotation of the shaft 21 causes the auxiliary elastic rod 211 to engage sequentially with the multiple circumferentially distributed assist blocks 14, generating periodic, multi-frequency continuous impact vibrations on the side surface of the coarse filter screen 11. This impact vibration works synergistically to prevent clogging in two ways: Firstly, regarding the vibrating screening: the impact vibration causes the coarse filter screen 11 to vibrate as a whole, and the particles trapped inside the screen are continuously excited and in motion, preventing the particles from being statically blocked at the screen holes; at the same time, the vibration causes the particle layer accumulated on the screen surface to continuously loosen and rearrange, avoiding the formation of stable gap structures between large particles that trap and block small particles, ensuring that small particles can fully contact the screen surface and pass through the screen holes, thereby improving the effective filtration area and screening efficiency of the coarse filter screen 11.

[0042] Secondly, regarding the particle circulation motion: At the moment of impact, the impact force exerted by the power ball 22 on the side wall of the coarse filter screen 11 causes a slight elastic deformation in the side wall, squeezing the large particle accumulation inside the screen inward. After being laterally squeezed, some particles are squeezed upward from the accumulation. Since the filtration environment is liquid, the buoyancy of the liquid reduces the effective weight of the particles, making it easier for the squeezed particles to detach from the higher part of the accumulation and roll towards the side wall of the coarse filter screen 11. After the impact, the side wall elastically recovers, and a momentary space is formed at the impact point. Thus, with the continuous rotation and periodic impact of the auxiliary elastic rod 211, the accumulated particles continuously undergo a cyclical motion of "laterally squeezed - squeezed upward - rolled down to the lower part of the side wall - side wall recovery," preventing large particles from accumulating and trapping small particles, thus affecting filtration.

[0043] When the auxiliary elastic rod 211 impacts the side surface of the coarse filter screen 11, the limiting plate 111 fixed to the outer periphery of the coarse filter screen 11 is embedded in the limiting groove 15 on the inner wall of the filter tank 1. Since the space inside the limiting groove 15 is larger than the volume of the limiting plate 111, and the diameter of the outer periphery of the coarse filter screen 11 is smaller than the diameter at the opening of the filter tank 1, there is a movable gap between the limiting plate 111 and the limiting groove 15. When the coarse filter screen 11 is subjected to a unilateral impact force from the auxiliary elastic rod 211, it can move up and down a certain amplitude along the direction of the force using this movable gap. Simultaneously, because the impact force acts on one side of the coarse filter screen 11 rather than the center, the coarse filter screen 11 will also tilt and deflect at a certain angle around the support point of the limiting plate 111. After the impact ends, the coarse filter screen 11 returns to its original position under its own weight and the limiting action of the limiting groove 15.

[0044] With the continuous rotation of the shaft 21 and the periodic impact of the auxiliary elastic rod 211, the coarse filter screen 11 forms a combined vibration pattern of lifting and deflection. This combined vibration causes the particles inside the coarse filter screen 11 to be subjected to multi-directional inertial forces superimposed in the vertical and horizontal directions. The relative positions and accumulation patterns of the particles are continuously disrupted and reorganized, further promoting the movement and redistribution of particles on the screen surface. The screening efficiency is significantly better than that of single-direction planar vibration. At the same time, the deflection motion causes the particles accumulated on the screen surface to tend to slide towards the inclined lower side. Combined with the aforementioned particle extrusion and rolling cycle, this further prevents excessive accumulation of particles in certain areas.

[0045] Of course, the above are just typical examples of this application. In addition, this application may have many other specific implementation methods. All technical solutions formed by equivalent substitution or equivalent transformation fall within the scope of protection claimed in this application.

Claims

1. A multilayer filtration apparatus for diluents used in semiconductor manufacturing, characterized in that, include: The filter tank (1) is provided with a funnel-shaped coarse filter screen (11), a first fine filter screen (12) and a second fine filter screen (13) in sequence. The mesh size of the coarse filter screen (11), the first fine filter screen (12) and the second fine filter screen (13) decreases in sequence. The motor (2) is fixed at the bottom of the filter tank (1). The output end of the motor (2) is connected to a rotating shaft (21) that extends into the filter tank (1). The first fine filter screen (12) and the second fine filter screen (13) both have through holes (131) for the rotating shaft (21) to pass through and fit. An auxiliary elastic rod (211) is fixed at one end to a rotating shaft (21) and elastically abuts against the outer surface of a coarse filter screen (11) at the other end. Several auxiliary blocks (14) are fixed on the inner wall of the filter tank (1) and have inclined surfaces (141) and rectangular surfaces (142) that are arranged sequentially and obliquely connected along the rotation path of the auxiliary elastic rod (211). When the auxiliary elastic rod (211) rotates with the rotating shaft (21), its elastic contact end first climbs along the inclined surface (141) and gradually moves away from the surface of the coarse filter screen (11). When it crosses the rectangular surface (142), the auxiliary elastic rod (211) instantly resets under its own elastic force and impacts the side surface of the coarse filter screen (11).

2. The multilayer filtration device for diluents used in semiconductor manufacturing according to claim 1, characterized in that, At least two equidistant ring-shaped limiting plates (111) are fixed on the outer periphery of the coarse filter screen (11). The inner wall of the opening of the filter tank (1) is provided with a limiting groove (15) for the limiting plates (111) to be embedded. The top of the filter tank (1) is provided with a notch (151) for the limiting plates (111) to pass through and communicate with the limiting groove (15). The coarse filter screen (11) enters the limiting groove (15) through the limiting plate (111) and rotates after passing through the notch (151) to achieve anti-detachment installation. The space inside the limiting groove (15) is larger than the volume of the limiting plate (111), and the diameter of the outer peripheral wall of the coarse filter screen (11) is smaller than the diameter of the opening of the filter tank (1), so that the coarse filter screen (11) after installation can move up and down and tilt and deflect to a certain extent by means of the gap between the limiting plate (111) and the limiting groove (15).

3. The multilayer filtration apparatus for diluents used in semiconductor manufacturing according to claim 1, characterized in that, The auxiliary elastic rod (211) has multiple dynamic balls (22) at its elastic contact end, and the dynamic balls (22) elastically contact the outer surface of the coarse filter screen (11).

4. A multilayer filtration apparatus for diluents used in semiconductor manufacturing according to claim 1, characterized in that, Both the first fine filter screen (12) and the second fine filter screen (13) are sloped.

5. A multilayer filtration apparatus for diluents used in semiconductor manufacturing according to claim 1, characterized in that, The rotating shaft (21) has a first stirring rod (212) and a second stirring rod (213) fixed on its outer periphery. The first stirring rod (212) and the second stirring rod (213) are respectively close to the surfaces of the first fine filter screen (12) and the second fine filter screen (13).

6. A multilayer filtration apparatus for diluents used in semiconductor manufacturing according to claim 1, characterized in that, The lower ends of the first fine filter (12) and the second fine filter (13) are both fixed with a shielding ring (121). The shielding ring (121) fixed at the lower end of the first fine filter (12) is fixedly connected to the second fine filter (13) through a connecting rod (122).

7. A multilayer filtration apparatus for diluents used in semiconductor manufacturing according to claim 6, characterized in that, A hydraulic telescopic rod (16) is fixed to the inner top wall of the filter tank (1), and the telescopic end of the hydraulic telescopic rod (16) is fixedly connected to the first fine filter screen (12). The filter tank (1) has a drain port (17) on its side wall. The hydraulic telescopic rod (16) can drive the first fine filter screen (12) and the second fine filter screen (13) to descend as a whole, so that the first fine filter screen (12) and the second fine filter screen (13) descend to the corresponding two drain ports (17) respectively, so that the impurities on the surface of the first fine filter screen (12) and the second fine filter screen (13) are discharged through the corresponding drain ports (17) respectively. The hydraulic telescopic rod (16) can drive the first fine filter screen (12) and the second fine filter screen (13) to rise as a whole, so that the two shielding rings (121) respectively block the corresponding drain ports (17).

8. A multilayer filtration apparatus for diluents in semiconductor manufacturing according to claim 7, characterized in that, Two sludge collection boxes (3) are fixed at the corresponding drain outlet (17) on the outside of the filter tank (1). The sludge collection box (3) is provided with a sludge collection chamber (31). The bottom surface of the sludge collection chamber (31) is an inclined arc surface. The sludge collection box (3) has a connection port (33) that connects the corresponding drain outlet (17) and the sludge collection chamber (31). The filter tank (1) is provided with a drain pipe (32), which is connected to the two sludge collection boxes (3).

9. A multilayer filtration apparatus for diluents used in semiconductor manufacturing according to claim 1, characterized in that, It also includes a support plate (4) fixed above the filter tank (1) by a support rod (41), a feed pipe (42) fixed on the support plate (4), an extension pipe (421) slidably connected to the lower end of the feed pipe (42), and the extension pipe (421) can move downward to above the coarse filter screen (11). A water collection tank (5) is also fixed on the support plate (4). An inner sleeve (51) is connected to the bottom of the water collection tank (5). An outer sleeve (511) that can be moved to the top of the coarse filter screen (11) is slidably fitted on the inner sleeve (51). The outer sleeve (511) and the extension pipe (421) are fixedly connected by a connecting plate (52). One end of the water collection tank (5) is connected to a water inlet pipe (53).

10. A multilayer filtration apparatus for diluents in semiconductor manufacturing according to claim 9, characterized in that, A magnet (43) is fixed on the support plate (4), and the extension tube (421) is an iron pipe. When the extension tube (421) slides upward to a high position, the magnet (43) attracts the extension tube (421) for positioning; a handle (112) is fixed on the coarse filter screen (11).

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