Graphite boat washing and drying integrated device

Abstract

The application relates to the technical field of semiconductor device cleaning, in particular to a graphite boat washing and drying integrated equipment, which comprises a box body, an inverted cylindrical hollow cylinder is arranged at the center of the inside of the box body, a plurality of partitions are arranged between the inner wall of the box body and the cylindrical hollow cylinder, and the inside space is divided into an initial groove, an acid pickling groove, a cold water groove and a hot water groove; a bubbling mechanism and a circulating filtering mechanism I in communication with the acid pickling groove are arranged outside the acid pickling groove; an ultrasonic generator is arranged at the bottom of the cold water groove, and a circulating filtering mechanism II is arranged outside the cold water groove; the box body is divided into the initial groove, the acid pickling groove, the cold water groove and the hot water groove through the central cylindrical hollow cylinder and the partitions; the temporary storage, acid pickling, cold water ultrasonic washing, hot water rinsing and fixed-point drying functions after each process of the graphite boat are integrated in the single box body; seamless and automatic transfer of the graphite boat among the multiple process grooves is realized; and the problem of secondary pollution easily generated in the transfer process is avoided.

Description

Technical Field

[0001] This invention relates to the field of semiconductor device cleaning technology, and in particular to a graphite boat washing and drying integrated equipment. Background Technology

[0002] A graphite boat is a porous, frame-like, precision graphite or silicon carbide frame. As a precision instrument that carries high-value silicon wafers, cleaning the graphite boat is a crucial step in photovoltaic and semiconductor manufacturing. Improper cleaning can directly lead to product contamination, reduced yield, or even equipment damage.

[0003] Because silicon-based thin film contaminants will be deposited on the surface and pores of the graphite boat during use, existing equipment cleans it by cleaning with a cleaning brush or by direct ultrasonic cleaning. However, particulate matter in the liquid cannot be removed in time, and there is a lack of effective online particulate matter removal methods. The cleaning ability is insufficient for cleaning residual particles, and the production cycle between cleaning processes is long, the area occupied is large, and secondary pollution is easily generated during the connection.

[0004] To address these issues, those skilled in the art have proposed a graphite boat washing and drying integrated equipment. Summary of the Invention

[0005] Therefore, the technical problem to be solved by the present invention is that particulate matter in liquid cannot be removed in time, and secondary pollution is likely to occur when the cleaning process is connected.

[0006] The above-mentioned technical problems are solved by the following technical solution: This invention proposes a graphite boat washing and drying integrated device, which includes: The box body has an inverted cylindrical cavity at the center of the interior. Multiple partitions are provided between the inner wall of the box body and the cylindrical cavity, and the partitions divide the internal space into an initial tank, an acid pickling tank, a cold water tank and a hot water tank. The pickling tank is equipped with a bubbling mechanism and a circulating filtration mechanism connected to its outer side. An ultrasonic generator is installed at the bottom of the cold water tank, and a second circulating filter mechanism is installed on the outside of the cold water tank. The cylindrical hollow tube is equipped with a fixing mechanism, one end of which is used to clamp the graphite boat and move it between the initial tank, the pickling tank, the cold water tank, and the hot water tank; and... A drying mechanism is installed on the hollow cylindrical tube.

[0007] As a preferred embodiment of the graphite boat washing and drying integrated equipment of the present invention, the bubbling mechanism includes a nitrogen tank, a horizontal plate is installed on the outer wall of the box near the pickling tank, the nitrogen tank is installed on the horizontal plate, an outlet pipe is installed at the output end of the nitrogen tank, an outlet valve is provided on the outlet pipe, a bubbling pipe is installed at one end of the outlet pipe, the bubbling pipe is installed on the bottom inner wall of the pickling tank, and multiple nozzles are installed on the surface of the bubbling pipe.

[0008] As a preferred embodiment of the graphite boat washing and drying integrated equipment of the present invention, the circulating filtration mechanism includes a pump body, the pump body is mounted on a horizontal plate, a filter element is installed at the input end of the pump body, an inlet pipe is installed at one end of the filter element, the inlet pipe is connected to the pickling tank, and an outlet pipe is inserted at the output end of the pump body, one end of the outlet pipe is connected to the pickling tank.

[0009] As a preferred embodiment of the graphite boat washing and drying integrated equipment of the present invention, a heater is fixedly installed at the bottom of the hot water tank.

[0010] As a preferred embodiment of the graphite boat washing and drying integrated equipment of the present invention, wherein: an arc-shaped opening is opened on the outer side of the initial tank, liquid inlet pipes are provided on the outer walls of the pickling tank, cold water tank and hot water tank, and liquid drain pipes are provided at the bottom of the pickling tank, cold water tank and hot water tank.

[0011] As a preferred embodiment of the graphite boat washing and drying integrated equipment of the present invention, an observation window is provided on the outer wall of the box near the top.

[0012] As a preferred embodiment of the graphite boat washing and drying integrated equipment of the present invention, the fixing mechanism includes a motor installed on the inner wall of the top of the cylindrical hollow cylinder and an annular rail installed on the upper part of the inner wall of the box. One end of the output shaft of the motor is equipped with a transmission shaft, one end of the transmission shaft is horizontally equipped with an electric slide rail, the other end of the electric slide rail is slidably disposed on the inner wall of the annular rail, a slider is slidably disposed inside the electric slide rail, and a clamping member is disposed at the bottom of the slider.

[0013] As a preferred embodiment of the graphite boat washing and drying integrated equipment of the present invention, the clamping component includes an electric cylinder installed on the outer wall of the bottom of the slider, and an electric gripper is fixedly installed at the bottom end of the electric cylinder.

[0014] In a preferred embodiment of the graphite boat washing and drying integrated device of the present invention, the electric gripper is located inside the initial slot in both the initial and final states, and is used to grip and remove the graphite boat.

[0015] As a preferred embodiment of the graphite boat washing and drying integrated equipment of the present invention, the drying mechanism includes a heating box fixed on the surface of a cylindrical hollow cylinder. The heating box is annular, and an electric heating wire is provided inside the heating box. Three blowers are provided on the surface of the heating box. The blowers face the pickling tank, the cold water tank, and the hot water tank. One end of the blower is provided with a flared bucket.

[0016] The beneficial effects of the graphite boat washing and drying integrated equipment of the present invention are as follows: The central cylindrical cavity and partitions divide the chamber into an initial tank, an acid pickling tank, a cold water tank, and a hot water tank. The four processes of graphite boat storage, acid pickling, cold water ultrasonic washing, and hot water rinsing, as well as the fixed-point drying function after each process, are integrated into a single chamber. The graphite boat is clamped by a fixing mechanism and moved to each tank for cleaning. This achieves seamless and automatic transfer of graphite boats between multiple process tanks, completely solving the problems of discrete processes, long production cycle, large footprint, and secondary pollution during the transfer process of traditional split equipment. This significantly improves processing efficiency and site utilization. The device's bubbling mechanism provides continuous agitation through nitrogen bubbling pipes and nozzles, ensuring uniform acid concentration and temperature, enhancing the cleaning effect, and suppressing local overheating. The physical scouring effect of the bubbles helps to peel off the loose film, and the nitrogen atmosphere can inhibit excessive oxidation of the graphite boat substrate by the acid. The device's circulating filtration mechanism promptly removes precipitates generated during pickling, maintains acid activity, extends service life, and ensures the stability and consistency of the pickling process. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings of the embodiments of the present invention will be briefly described below. Obviously, the drawings described below only relate to some embodiments of the present invention and are not intended to limit the present invention. Wherein: Figure 1 This is a schematic diagram of the overall structure of a graphite boat washing and drying integrated equipment.

[0018] Figure 2 This is a schematic diagram of the structure of a graphite boat washing and drying integrated device after the top cover is opened.

[0019] Figure 3 This is a schematic diagram of the bottom structure of a graphite boat washing and drying integrated equipment.

[0020] Figure 4 This is a schematic diagram of the internal structure of a graphite boat washing and drying integrated equipment.

[0021] Figure 5 This is a schematic diagram of the fixing mechanism of a graphite boat washing and drying integrated equipment.

[0022] Figure 6This is a schematic diagram of the bubbling mechanism and the circulating filtration mechanism of a graphite boat washing and drying integrated equipment.

[0023] In the diagram: 1. Box body; 101. Initial tank; 102. Pickling tank; 103. Cold water tank; 1031. Ultrasonic generator; 104. Hot water tank; 1041. Heater; 105. Liquid inlet pipe; 106. Observation window; 2. Cylindrical empty cylinder; 3. Baffle plate; 4. Bubbling mechanism; 401. Nitrogen tank; 402. Gas outlet pipe; 403. Bubbling pipe; 404. Nozzle; 5. Circulating filtration mechanism one; 501. Pump body; 502. Filter element; 503. Inlet pipe; 504. Outlet pipe; 6. Fixing mechanism; 601. Motor; 602. Drive shaft; 603. Circular rail; 604. Electric slide rail; 605. Slider; 606. Electric cylinder; 607. Electric gripper; 7. Drying mechanism; 701. Heating box; 702. Blower; 703. Flared hopper; 8. Circulating filtration mechanism two. Detailed Implementation

[0024] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0025] The terminology used in this invention is that which is currently widely used in the art in consideration of the function of the invention; however, these terms may vary according to the intent of those skilled in the art, precedent, or new technology in the art. Furthermore, specific terms may be chosen by the applicant, and in such cases, their detailed meanings will be described in the detailed description of the invention. Therefore, the terms used in this specification should not be construed as simple names, but rather based on their meanings and the overall description of the invention.

[0026] Reference Figures 1 to 6 This is the first embodiment of the present invention, which provides a graphite boat washing and drying integrated device, comprising: Box 1, with an inverted cylindrical empty cylinder 2 set at the center of the inside of box 1, and multiple partitions 3 set between the inner wall of box 1 and the cylindrical empty cylinder 2. The partitions 3 divide the internal space into an initial tank 101, an acid pickling tank 102, a cold water tank 103 and a hot water tank 104. A bubbling mechanism 4 and a circulating filtration mechanism 5 are connected to the outside of the pickling tank 102. An ultrasonic generator 1031 is installed at the bottom of the cold water tank 103, and a circulating filter mechanism 8 is installed on the outside of the cold water tank 103. The cylindrical hollow cylinder 2 is equipped with a fixing mechanism 6. One end of the fixing mechanism 6 is used to clamp the graphite boat and move it between the initial tank 101, the pickling tank 102, the cold water tank 103, and the hot water tank 104; and, Drying mechanism 7 is installed on the cylindrical empty cylinder 2.

[0027] First, open the clamping end of the fixing mechanism 6 located in the initial tank 101 to clamp and fix the graphite boat to be cleaned; then the fixing mechanism 6 is activated, and its end lifts the graphite boat, rotates it horizontally around the central axis of the cylindrical empty cylinder 2 and positions it above each process tank in sequence, and then the graphite boat is sequentially immersed into each tank through vertical lifting to complete the treatment. First, the acid is introduced into the pickling tank 102. At this time, the bubbling mechanism 4 introduces gas into the tank to generate bubbles for physical rinsing and stirring. Meanwhile, the circulating filtration mechanism 5 continuously circulates and filters the acid to maintain its cleanliness and activity. After pickling is completed, the graphite boat is lifted and then dried by the drying mechanism 7. Then the graphite boat is moved to the cold water tank 103 for rinsing. At this time, the ultrasonic generator 1031 located at the bottom of the tank is activated to generate cavitation effect in the cold water to forcefully remove residual particles. At the same time, the circulating filter mechanism 8 works synchronously to filter and remove particles in the water to prevent secondary adhesion. After the cold wash is completed, the graphite boat is lifted and then dried by the drying mechanism 7. The graphite boat is then sent into the hot water tank 104 for a final hot water rinse to remove residual contaminants and raise the workpiece temperature. After the hot wash is completed, the graphite boat is lifted and then dried by the drying mechanism 7. After all cleaning and drying are completed, the graphite boat is transferred back to the initial tank 101 by the fixing mechanism 6. It can then be manually or automatically removed and placed into the next workpiece to be processed. This achieves fully automated, integrated, and continuous operation from loading and unloading, pickling, ultrasonic cleaning, rinsing to drying, efficiently completing the complex process of traditional multi-machine segmented processing within a single compact device.

[0028] Specifically, the bubbling mechanism 4 includes a nitrogen tank 401. A horizontal plate is installed on the outer wall of the housing 1 near the pickling tank 102. The nitrogen tank 401 is installed on the horizontal plate. An outlet pipe 402 is installed at the output end of the nitrogen tank 401. An outlet valve is provided on the outlet pipe 402. A bubbling pipe 403 is installed at one end of the outlet pipe 402. The bubbling pipe 403 is installed on the bottom inner wall of the pickling tank 102. Multiple nozzles 404 are installed on the surface of the bubbling pipe 403.

[0029] Nitrogen tank 401 provides high-purity nitrogen as a gas source. The gas flow is controlled by the gas outlet valve through the gas outlet pipe 402 and flows to the bubble tube 403 installed on the inner wall of the bottom of the pickling tank 102. The nitrogen is finally continuously sprayed into the pickling solution in the form of small bubbles through multiple nozzles 404. These densely rising bubbles form a comprehensive physical scouring and stirring effect on the graphite boat immersed in the tank, effectively promoting the contact and renewal of the acid solution and the surface of the contaminants, preventing uneven local concentration and temperature. At the same time, the agitation of the bubbles helps to peel off the reacted deposits and accelerate their diffusion, thereby significantly improving the uniformity of pickling and the overall cleaning efficiency.

[0030] Furthermore, the circulating filtration mechanism 5 includes a pump body 501, which is mounted on a horizontal plate. A filter element 502 is installed at the input end of the pump body 501, and an inlet pipe 503 is installed at one end of the filter element 502. The inlet pipe 503 is connected to the pickling tank 102. An outlet pipe 504 is inserted into the output end of the pump body 501, and one end of the outlet pipe 504 is connected to the pickling tank 102.

[0031] After the pump body 501 is started, the acid solution containing reaction precipitates and suspended particles is drawn from the pickling tank 102 through the inlet pipe 503. The acid solution first flows through the filter element 502 for physical filtration to remove solid impurities and reaction products. The purified acid solution is then pressurized by the pump body 501 and reinjected into the pickling tank 102 through the outlet pipe 504, thereby realizing a continuous closed-loop circulation of the acid solution between the pickling tank 102 and the filtration system, which can maintain the activity of the acid solution, uniformly distribute the liquid composition in the tank, and effectively extend the service life of the acid solution.

[0032] A heater 1041 is fixedly installed at the bottom of the hot water tank 104.

[0033] The heater 1041 is activated to heat the water in the hot water tank 104, which facilitates the hot washing of the graphite boat.

[0034] It should be noted that the outer side of the initial tank 101 has an arc-shaped opening, and the outer walls of the pickling tank 102, cold water tank 103 and hot water tank 104 are all equipped with liquid inlet pipes 105, and the bottoms of the pickling tank 102, cold water tank 103 and hot water tank 104 are all equipped with liquid drain pipes.

[0035] Specifically, an observation window 106 is provided on the outer wall of the enclosure 1 near the top.

[0036] Furthermore, the fixing mechanism 6 includes a motor 601 installed on the inner wall of the top of the cylindrical empty cylinder 2 and an annular rail 603 installed on the upper part of the inner wall of the housing 1. A transmission shaft 602 is installed at one end of the output shaft of the motor 601, and an electric slide rail 604 is horizontally installed at one end of the transmission shaft 602. The other end of the electric slide rail 604 is slidably disposed on the inner wall of the annular rail 603. A slider 605 is slidably disposed inside the electric slide rail 604, and a clamping member is provided at the bottom of the slider 605.

[0037] The clamping component is moved in the initial tank 101, pickling tank 102, cold water tank 103 and hot water tank 104 by the motor 601, and its position is adjusted by the electric slide rail 604.

[0038] The clamping component includes an electric cylinder 606 mounted on the bottom outer wall of the slider 605, and an electric gripper 607 is fixedly mounted on the bottom end of the electric cylinder 606.

[0039] The graphite boat is held by an electric gripper 607 and its height is adjusted by an electric cylinder 606 to facilitate cleaning or drying.

[0040] It should be noted that the electric gripper 607 is located inside the initial slot 101 in both the initial and final states, and is used to grip and remove the graphite boat.

[0041] Specifically, the drying mechanism 7 includes a heating box 701 fixed on the surface of the cylindrical empty cylinder 2. The heating box 701 is annular and has an electric heating wire inside. Three blowers 702 are arranged on the surface of the heating box 701. The blowers 702 face the pickling tank 102, the cold water tank 103 and the hot water tank 104. One end of the blower 702 is provided with a flared bucket 703.

[0042] The electric heating wire is activated for heating, and then the graphite boat is dried by blower 702 to avoid the previous process affecting the cleaning process in the next process.

[0043] In use, the graphite boat is held by the electric gripper 607 and the height of the graphite boat is adjusted by the electric cylinder 606. The graphite boat to be cleaned is held and fixed, rotated horizontally around the central axis of the cylindrical hollow cylinder 2 and positioned above each process tank in sequence. Then, the graphite boat is immersed into each tank in sequence by vertical lifting to complete the treatment. First, the acid is introduced into the pickling tank 102. At this time, the bubbling mechanism 4 introduces gas into the tank to generate bubbles for physical rinsing and stirring. Meanwhile, the circulating filtration mechanism 5 continuously circulates and filters the acid to maintain its cleanliness and activity. After pickling is completed, the graphite boat is lifted and then dried by the drying mechanism 7. Then the graphite boat is moved to the cold water tank 103 for rinsing. At this time, the ultrasonic generator 1031 located at the bottom of the tank is activated to generate cavitation effect in the cold water to forcefully remove residual particles. At the same time, the circulating filter mechanism 8 works synchronously to filter and remove particles in the water to prevent secondary adhesion. After the cold wash is completed, the graphite boat is lifted and then dried by the drying mechanism 7. The graphite boat is then sent into the hot water tank 104 for a final hot water rinse to remove residual contaminants and raise the workpiece temperature. After the hot wash is completed, the graphite boat is lifted and then dried by the drying mechanism 7. After all cleaning and drying are completed, the graphite boat is transferred back to the initial tank 101 by the fixing mechanism 6, and can then be taken out manually or automatically and placed into the next workpiece to be processed.

[0044] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0045] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A graphite boat washing and drying integrated equipment, characterized in that: include: Box (1), with an inverted cylindrical empty cylinder (2) set at the center of the box (1), and multiple partitions (3) set between the inner wall of the box (1) and the cylindrical empty cylinder (2), the partitions (3) dividing the internal space into an initial tank (101), a pickling tank (102), a cold water tank (103) and a hot water tank (104). The pickling tank (102) is provided with a bubble mechanism (4) and a circulating filter mechanism (5) connected to it. An ultrasonic generator (1031) is provided at the bottom of the cold water tank (103), and a circulating filter mechanism (8) is provided on the outside of the cold water tank (103). The cylindrical hollow tube (2) is equipped with a fixing mechanism (6), one end of which is used to clamp the graphite boat and move it between the initial tank (101), the pickling tank (102), the cold water tank (103), and the hot water tank (104); and, The drying mechanism (7) is installed on the cylindrical empty cylinder (2).

2. The graphite boat washing and drying integrated equipment as described in claim 1, characterized in that: The bubbling mechanism (4) includes a nitrogen tank (401). A horizontal plate is installed on the outer wall of the box (1) near the pickling tank (102). The nitrogen tank (401) is installed on the horizontal plate. An outlet pipe (402) is installed at the output end of the nitrogen tank (401). An outlet valve is provided on the outlet pipe (402). A bubbling pipe (403) is installed at one end of the outlet pipe (402). The bubbling pipe (403) is installed on the bottom inner wall of the pickling tank (102). Multiple nozzles (404) are installed on the surface of the bubbling pipe (403).

3. The graphite boat washing and drying integrated equipment as described in claim 2, characterized in that: The circulating filtration mechanism (5) includes a pump body (501), which is mounted on a horizontal plate. A filter element (502) is installed at the input end of the pump body (501), and an inlet pipe (503) is installed at one end of the filter element (502). The inlet pipe (503) is connected to the pickling tank (102). An outlet pipe (504) is inserted into the output end of the pump body (501), and one end of the outlet pipe (504) is connected to the pickling tank (102).

4. The graphite boat washing and drying integrated equipment as described in claim 1, characterized in that: A heater (1041) is fixedly installed at the bottom of the hot water tank (104).

5. The graphite boat washing and drying integrated equipment as described in claim 1, characterized in that: The initial tank (101) has an arc-shaped opening on its outer side. The pickling tank (102), cold water tank (103) and hot water tank (104) are all equipped with inlet pipes (105) on their outer walls. The bottom of the pickling tank (102), cold water tank (103) and hot water tank (104) is equipped with drain pipes.

6. The graphite boat washing and drying integrated equipment as described in claim 1, characterized in that: An observation window (106) is provided on the outer wall of the box (1) near the top.

7. The graphite boat washing and drying integrated equipment as described in claim 1, characterized in that: The fixing mechanism (6) includes a motor (601) installed on the inner wall of the top of the cylindrical hollow cylinder (2) and an annular rail (603) installed on the upper part of the inner wall of the box (1). A transmission shaft (602) is installed at one end of the output shaft of the motor (601), and an electric slide rail (604) is installed horizontally at one end of the transmission shaft (602). The other end of the electric slide rail (604) is slidably disposed on the inner wall of the annular rail (603). A slider (605) is slidably disposed inside the electric slide rail (604), and a clamping member is disposed at the bottom of the slider (605).

8. The graphite boat washing and drying integrated equipment as described in claim 7, characterized in that: The clamping component includes an electric cylinder (606) mounted on the bottom outer wall of the slider (605), and an electric gripper (607) is fixedly mounted on the bottom end of the electric cylinder (606).

9. The graphite boat washing and drying integrated equipment as described in claim 8, characterized in that: The electric gripper (607) is located inside the initial slot (101) in both the initial and final states, and is used to grip and remove the graphite boat.

10. The graphite boat washing and drying integrated equipment as described in claim 9, characterized in that: The drying mechanism (7) includes a heating box (701) fixed on the surface of a cylindrical hollow cylinder (2). The heating box (701) is annular and has an electric heating wire inside. Three blowers (702) are provided on the surface of the heating box (701). The blowers (702) face the pickling tank (102), the cold water tank (103), and the hot water tank (104). One end of the blower (702) is provided with a flared bucket (703).

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