An ultrasonic cleaning apparatus

Abstract

The application relates to the field of ultrasonic cleaning, in particular to an ultrasonic cleaning device which comprises a box body, a lifting plate is arranged in the box body, a moving block is arranged at the upper end of the box body, a hydraulic cylinder two is arranged in the moving block, an installation plate whose position is adjusted by the hydraulic cylinder two is arranged on one side of the moving block, a transducer three is arranged at the middle of one side of the installation plate, transducers two are arranged on the two sides of the transducer three, angle-adjustable rotating plates are rotatably arranged on the two sides of the installation plate, and transducers four are arranged on one side of the rotating plates and linearly arranged in a longitudinal direction. The device has the functions of overall cleaning, local intensified dirt removal and accurate cleaning of super-deep holes, and solves the problems of the existing ultrasonic cleaning device, such as cleaning dead angle, incomplete cleaning of dirt in deep holes and incapability of adapting to complex workpiece dirt.

Description

Technical Field

[0001] This invention relates to the field of silicon wafer cleaning, and more particularly to an ultrasonic cleaning device. Background Technology

[0002] In the manufacturing process of semiconductor devices, the cleaning of silicon wafer surfaces is crucial, as any contaminants on the wafer surface can negatively impact the quality of the manufactured devices. Ultrasonic cleaning equipment, utilizing principles such as cavitation and acceleration effects, can quickly remove contaminants from workpiece surfaces. Due to its high cleaning efficiency and lack of mechanical damage, it is widely used in fields such as precision parts processing.

[0003] Currently, traditional ultrasonic cleaning equipment on the market has a relatively simple structure, mostly using a fixed array of single transducers for overall ultrasonic cleaning, which can only achieve basic cleaning of shallow dirt on the surface of the workpiece. When cleaning precision workpieces with deep holes, micropores, or complex uneven structures, traditional equipment has significant shortcomings. On the one hand, fixed transducers cannot perform targeted and intensive cleaning of deep dirt on the workpiece, and dirt inside deep holes is difficult to remove effectively, easily leaving residual dirt and resulting in a low cleaning pass rate. On the other hand, traditional equipment cannot flexibly adjust the cleaning position, cleaning distance, and cleaning intensity according to the location, depth, and density of the dirt, and lacks the functions of graded cleaning and precise focused cleaning, making it extremely unsuitable for different working conditions.

[0004] Meanwhile, existing cleaning equipment lacks precise stain monitoring and alignment adjustment structures, making it impossible to perceive the stain distribution on the workpiece in real time. This hinders targeted and precise stain removal, resulting in problems such as indiscriminate cleaning, low efficiency, and incomplete removal of complex stains. Consequently, it cannot meet the deep cleaning needs of high-precision workpieces and complex structures, limiting the equipment's practicality and versatility. Based on these shortcomings of existing technologies, there is an urgent need to design a multifunctional ultrasonic cleaning device capable of comprehensive cleaning, localized enhancement, and precise removal of stains in ultra-deep holes. Summary of the Invention

[0005] The purpose of this invention is to address the problems in the prior art, such as the lack of precise stain monitoring and alignment adjustment structures, the inability to perceive the distribution of stains on workpieces in real time, the difficulty in achieving targeted and precise stain removal, the large degree of blind cleaning, low cleaning efficiency, and incomplete cleaning of complex stains, which cannot meet the deep cleaning needs of high-precision workpieces and workpieces with complex structures, and the limited practicality and versatility of the equipment. Therefore, this invention proposes an ultrasonic cleaning device.

[0006] The technical solution of the present invention: An ultrasonic cleaning device includes a housing, a lifting plate inside the housing, a moving block at the upper end of the housing, a hydraulic cylinder II inside the moving block, a mounting plate whose position is adjusted by the hydraulic cylinder II on one side of the moving block, a transducer III in the middle of one side of the mounting plate, transducers II on both sides of the transducer III, and an angle-adjustable rotating plate rotatably mounted on both sides of the mounting plate. A transducer IV distributed in a longitudinal linear array is provided on one side of the rotating plate. When using this device, the object to be cleaned is placed on the upper part of the lifting plate. Then, hydraulic cylinder one drives the lifting plate to the bottom of the chamber. Cleaning fluid is then added into the chamber, and transducer one is activated. Transducer one is evenly distributed on the inner wall of the chamber, providing an overall ultrasonic cleaning effect on the object from all directions. When a deep hole is detected on the surface of the object, the monitor detects this location. Then, motor one drives the moving block to move on the upper part of the gear ring, adjusting the position of the mounting plate. Once the position is fixed, hydraulic cylinder two drives the mounting plate to adjust its lateral position, thereby adjusting the interaction between transducers two, three, and four and the cleaning fluid. Depending on the density of the stains, transducers 3 and 2 can be activated sequentially. Transducer 2 assists transducer 3 in cleaning, expanding its cleaning intensity. If the stains are deeper and transducers 1, 2, and 3 cannot effectively clean them, transducer 4 is activated. Motor 2 drives the rotating plate to rotate in the center, allowing transducer 4 to focus on a single point. The monitor is used to monitor in real time and activate transducer 4 at the corresponding height position to achieve precise ultra-deep ultrasonic cleaning. This device has the effect of overall, local, and ultra-deep aperture cleaning, and has high practicality.

[0007] Preferably, a controller assembly is fixed to the outer wall of one side of the housing, and transducers are arranged in a ring array on the inner wall of the housing. By arranging the transducers in a ring array on the inner wall of the housing and combining them with the electrical control structure of the controller assembly, a full-area uniform ultrasonic vibration cleaning control function is achieved. This enables synchronous cleaning of workpieces in all directions within the housing, ensuring the uniformity of basic cleaning and preventing localized missed cleaning. A water pump is installed on one side of the housing, and the water pump has inlet and outlet pipes. Through the housing's matching water pump and inlet / outlet pipe piping structure, an automatic inlet / outlet and circulation replacement function for cleaning fluid is achieved, allowing for rapid replacement and replenishment of the cleaning fluid within the housing, improving the convenience and automation of the equipment cleaning operation.

[0008] Preferably, a spray pipe is fixedly arranged around the upper part of the inner side of the box, and the spray pipe is connected to the water outlet of the water pump. The spray pipe has evenly distributed spray holes on its lower side. After the lifting plate is raised above the cleaning liquid level, the water pump sprays and rinses the workpiece surface under high pressure through the spray pipe. The surface of the lifting plate has hollow drainage holes, and a corrosion-resistant filter screen is embedded inside the lifting plate. The hollow drainage holes allow the cleaning liquid to flow back quickly, and the corrosion-resistant filter screen is used to intercept large particles of impurities that fall off the workpiece.

[0009] Preferably, a bracket is fixed to the lower end of the housing, and a base is fixed to the lower end of the bracket. Through the supporting and fixing structure of the bracket and the base at the bottom of the housing, the overall equipment is stably supported, and vibration is reduced and leveled. This can reduce the vibration deviation amplitude of the equipment during operation, ensure the long-term stable operation of the equipment, and improve the overall structural stability of the equipment. A damping shock-absorbing pad is sandwiched between the bracket and the base, and several evenly distributed shock-absorbing springs are embedded inside the damping shock-absorbing pad. The damping shock-absorbing pad and the shock-absorbing springs are used to absorb the vibration generated by ultrasonic oscillation, hydraulic cylinder and motor operation.

[0010] Preferably, a hydraulic cylinder is fixed at the lower end of the housing, and an oil cylinder is provided on one side of the hydraulic cylinder. The output end of the hydraulic cylinder is fixedly connected to the lower end of the lifting plate. The lifting structure of the lifting plate is driven by the hydraulic cylinder in conjunction with the oil cylinder, which has the functions of automatic lifting and feeding of workpieces and positioning. It can accurately adjust the immersion height of the workpiece in the cleaning solution and adapt to the cleaning and immersion requirements of workpieces of different specifications.

[0011] Preferably, a gear ring is fixed to the upper outer wall of the housing, and a gear is rotatably mounted on the lower end of the moving block. The gear meshes with the gear ring, and a motor is fixed to the upper end of the moving block. The output end of the motor is fixedly connected to the rotation center of the upper end of the gear. Through the meshing transmission structure of the gear ring, the gear, and the motor, the moving block has a circumferential displacement adjustment function, which can drive the cleaning component to rotate and align around the entire workpiece, achieving precise alignment and cleaning of any local stain point on the workpiece.

[0012] Preferably, a hydraulic rod is provided on one side of the hydraulic cylinder, and the hydraulic rod is fixedly connected to one side of the mounting plate. Through the telescopic transmission structure of the hydraulic cylinder and the hydraulic rod, the lateral spacing of the mounting plate can be precisely adjusted, and the cleaning distance between the transducer and the stain can be flexibly adjusted to meet the optimal cleaning distance requirements of different stains.

[0013] Preferably, the rotating plate surface is provided with monitors arranged in a linear array. The monitors are aligned with the height of each transducer. Through the monitor structure that is aligned with the height of the transducer and arranged in a linear array, it has the function of real-time and accurate monitoring of stain depth and position. It can accurately match the transducer at the corresponding height to start working, and achieve targeted and precise cleaning.

[0014] Preferably, a guide wheel one is rotatably mounted on the upper end of the mounting plate, and a guide wheel two is provided on one side of the guide wheel one. The guide wheel two rotates coaxially with the rotating plate, and a belt is provided between the guide wheel one and the guide wheel two. Through the transmission structure of the guide wheel one, the guide wheel two and the belt, the rotating plate has the function of synchronous and smooth rotation adjustment, ensuring the synchronicity of the angle adjustment of the rotating plates on both sides, so that the transducer four can accurately focus on the decontamination point.

[0015] Preferably, a mounting base is fixed to one side of the mounting plate, a second motor is fixed to one side of the mounting base, and a second gear is fixed to the upper end of the second guide wheel. The second gears on the upper ends of the two second guide wheels mesh with each other. Through the transmission structure of the mounting base, the second motor, and the meshing second gears, the dual-sided rotating plates can be synchronously centered and rotated for adjustment. This can achieve precise energy concentration of multiple sets of transducers, greatly improving the cleaning power and effect of ultra-deep hole stains.

[0016] The chamber is equipped with a liquid level sensor and a temperature sensor, both of which are electrically connected to the controller assembly. The controller assembly collects the liquid level and temperature data of the cleaning fluid in the chamber in real time and links the water pump to complete the replenishment of liquid and constant temperature control. The surfaces of the mounting plate and the rotating plate are covered with anti-corrosion, waterproof and insulating coatings. The terminals of transducer two, transducer three and transducer four are all equipped with sealed waterproof joints.

[0017] Compared with the prior art, the advantages of this invention are: 1. The transducers arranged in a ring on the inner wall can generate 360° omnidirectional ultrasonic vibrations around the workpiece inside the chamber, achieving synchronous cleaning of the entire workpiece in all directions. This completely eliminates the cleaning dead corners, side and back omissions that exist in traditional fixed single transducers, ensuring the uniformity of basic cleaning. The mounting plate integrates transducers two and three, which can perform targeted and intensified energy removal of stubborn stains on local planes and protrusions of the workpiece, making up for the deficiency of the whole-area cleaning in the cleaning of local heavy stains. The rotating plate can be angled and, together with the longitudinal array of transducers four, can focus the angle and concentrate energy for deep holes, micro holes and complex internal cavities of the workpiece, accurately transmitting ultrasonic energy into the deep holes, solving the problems of difficult removal of stains in deep holes, serious residues and incomplete cleaning in traditional equipment. Multiple sets of transducers can be started and stopped in stages according to the depth and distribution density of stains, realizing a graded cleaning mode of whole-area basic cleaning - local intensive cleaning - ultra-deep hole precision cleaning, matching the cleaning intensity as needed, with controllable cleaning effect and lower energy consumption.

[0018] 2. Motor 1 drives gear 1 to mesh with the gear ring at the upper end of the housing, driving the moving block to perform circular motion; the moving block has a built-in hydraulic cylinder 2 that can push the mounting plate to extend and retract laterally; Motor 2 drives the rotating plates on both sides to rotate synchronously and centered through meshing gear 2, guide wheel and belt transmission. The circular transmission structure can drive the entire cleaning assembly to revolve around the workpiece at any angle, achieving precise alignment of any stain point without moving the workpiece, adapting to the cleaning needs of complex-shaped workpieces in all directions; the lateral adjustment structure of hydraulic cylinder 2 can precisely adjust the distance between the transducer and the stain on the workpiece, adjusting to the optimal ultrasonic action distance according to the workpiece material and stain type, improving the cavitation cleaning effect; the double rotating plates adopt a synchronous transmission structure, with good angle adjustment consistency, enabling multiple transducers 4 to accurately focus on the same deep hole point, concentrating energy without dispersion, greatly improving the cleaning power of ultra-deep holes; it has the ability to adjust the circumferential, lateral and pitch angles with multiple degrees of freedom, and can adapt to various specifications and types of complex workpieces such as silicon wafers, precision parts, and structures with concave and convex features and deep holes, making the equipment highly versatile and adaptable.

[0019] 3. The chamber is equipped with a lifting plate driven by a hydraulic cylinder and an oil cylinder. The surface of the lifting plate has perforated drainage holes, and a corrosion-resistant filter screen is embedded inside. The hydraulic cylinder and the oil cylinder work together to drive the lifting plate to automatically raise and lower, realizing automatic workpiece immersion and automatic lifting and unloading. No manual loading and unloading is required, resulting in a high degree of automation, suitable for continuous cleaning of batch workpieces. It can precisely control the depth of workpiece immersion in the cleaning solution, and can adapt to immersion cleaning conditions of workpieces of different sizes and heights, with a wide range of applications. The perforated drainage holes of the lifting plate allow the cleaning solution carried out by the workpiece to quickly flow back into the chamber, reducing liquid retention and improving work efficiency. The built-in corrosion-resistant filter screen can intercept large particles of impurities that fall off the workpiece, preventing impurities from flowing back and causing secondary contamination of the workpiece, while protecting pipelines and transducers from impurity blockage and wear.

[0020] 4. The equipment is equipped with a water pump, inlet and outlet pipes, and a surrounding spray pipe. The tank contains built-in level and temperature sensors, and is centrally controlled by a controller assembly. The water pump and inlet / outlet pipes form a cleaning fluid circulation and replenishment structure, automatically completing the replenishment, water replacement, and circulation of the cleaning fluid within the tank. This eliminates the need for frequent manual filling and emptying, simplifying the operation process and improving convenience. The surrounding spray pipe at the top of the tank, after the lifting plate raises the workpiece above the liquid surface, provides high-pressure spray rinsing, quickly removing residual dirt and cleaning fluid, eliminating the need for a separate subsequent rinsing step. The level and temperature sensors collect real-time data on the tank's internal conditions, which, through the controller assembly, links the water pump and temperature control unit to achieve automatic liquid replenishment and constant temperature control of the cleaning fluid. This ensures stable output of the ultrasonic cavitation effect, preventing insufficient liquid level or temperature fluctuations from affecting cleaning quality and guaranteeing consistent cleaning results for batches of workpieces.

[0021] 5. A fixed bracket and base are installed at the lower end of the chamber, with damping and shock-absorbing pads sandwiched between the bracket and base. Multiple evenly distributed shock-absorbing springs are embedded within the shock-absorbing pads. The damping and shock-absorbing pads, in conjunction with the shock-absorbing springs, can efficiently absorb the vibration energy generated by high-frequency ultrasonic oscillations, hydraulic cylinder extension and retraction, and motor operation, effectively suppressing overall equipment resonance; reducing vibration transmission to the ground, lowering equipment operating noise, and preventing equipment displacement and loosening of connections due to vibration, thus extending the equipment's service life; the shock-absorbing structure can weaken the disturbance of vibration to precision workpieces inside the chamber, preventing workpiece displacement and collisions during cleaning, protecting the integrity of precision workpieces.

[0022] 6. Monitors are arranged in a linear array on the surface of the rotating plate, with each monitor flush with the corresponding transducer at the same height. The monitors can detect the location, depth, and longitudinal distribution of stains on the workpiece in real time, enabling automatic detection of stain status and overcoming the drawbacks of blind operation in traditional ultrasonic cleaning. Based on the detection signals from the monitors, the corresponding transducer at the specified height can be precisely activated, ensuring that the device is activated precisely where there is stain, targeting and removing dirt, improving cleaning efficiency while reducing ineffective energy consumption.

[0023] 7. The mounting plate and rotating plate are coated with an anti-corrosion, waterproof, and insulating coating. Sealed waterproof connectors are installed at transducer terminals two, three, and four. In environments with prolonged dampness and contact with chemical cleaning solutions, the anti-corrosion and waterproof coating prevents corrosion of the metal structure and insulation failure, improving the equipment's corrosion resistance and operational safety. The sealed waterproof connectors at the transducer terminals effectively prevent moisture and cleaning solutions from entering the circuit interfaces, preventing short circuits, leakage, and electrical malfunctions. This design is suitable for the long-term damp and corrosive conditions of ultrasonic cleaning, significantly improving the equipment's operational reliability and durability. Attached Figure Description

[0024] Figure 1 This is a three-dimensional schematic diagram of the present invention; Figure 2 This is a schematic diagram showing the location of the water pump and controller assembly of the present invention; Figure 3 This is a top view of the present invention; Figure 4 This is a bottom view diagram of the present invention; Figure 5 For the present invention Figure 1 Enlarged schematic diagram of structure A in the middle.

[0025] Reference numerals in the attached diagram: 1. Housing; 2. Gear ring; 3. Transducer 1; 4. Base; 5. Lifting plate; 6. Bracket; 7. Inlet / outlet water pipes; 8. Water pump; 9. Controller assembly; 10. Oil cylinder; 11. Hydraulic cylinder 1; 12. Gear 1; 13. Moving block; 14. Mounting plate; 15. Transducer 2; 16. Transducer 3; 17. Rotating plate; 18. Transducer 4; 19. Monitor; 20. Guide wheel 2; 21. Belt; 22. Guide wheel 1; 23. Motor 2; 24. Hydraulic rod 2; 25. Mounting seat; 26. Hydraulic cylinder 2; 27. Gear 2; 28. Motor 1. Detailed Implementation

[0026] To make the above-mentioned objectives, features and advantages of the present invention more readily understood, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0027] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0028] Secondly, the present invention will be described in detail with reference to the schematic diagrams. When describing the embodiments of the present invention, for ease of explanation, the cross-sectional views illustrating the device structure will be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. In addition, actual fabrication should include the three-dimensional spatial dimensions of length, width, and depth.

[0029] To make the objectives, technical solutions, and advantages of the present invention clearer, the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0030] Example 1 Please see Figures 1-5 As shown, this embodiment is an ultrasonic cleaning device, including a housing 1, a lifting plate 5 inside the housing 1, a moving block 13 at the upper end of the housing 1, a hydraulic cylinder 26 inside the moving block 13, a mounting plate 14 on one side of the moving block 13 whose position is adjusted by the hydraulic cylinder 26, a transducer 3 16 in the middle of one side of the mounting plate 14, transducers 2 15 on both sides of the transducer 3 16, and an adjustable rotating plate 17 rotatably mounted on both sides of the mounting plate 14. A transducer 4 18 arranged in a longitudinal linear array on one side of the rotating plate 17. When using this device, the object to be cleaned is placed on the upper end of the lifting plate 5. Then, hydraulic cylinder 11 drives the lifting plate 5 to move to the bottom of the housing 1. Cleaning fluid is then added into the housing 1, and transducer 3 is activated. Transducer 3 is evenly distributed on the inner wall of the housing 1, providing an overall ultrasonic cleaning effect on the object from all directions. When a deep hole is found on the surface of the object, the monitor 19 detects the location. Then, motor 28 drives the moving block 13 to move on the upper end of the gear ring 2, adjusting the position of the mounting plate 14. Once the position is fixed, hydraulic cylinder 26 drives the mounting plate 14 to adjust its lateral position, thereby adjusting the position of transducers 2 15, 3 16, and 4 18. Depending on the density of the cleaning points, transducers 3 (16) and 2 (15) can be activated sequentially. Transducer 2 (15) can assist transducer 3 (16) in cleaning and expand its cleaning intensity. If the cleaning points are deeper, transducers 1 (3), 2 (15), and 3 (16) cannot effectively clean them. In this case, transducer 4 (18) is activated. Motor 2 (23) drives the rotating plate 17 to rotate in the center, so that transducer 4 (18) focuses on one point. Monitor 19 monitors in real time and activates transducer 4 (18) at the corresponding height position to achieve accurate ultra-deep ultrasonic cleaning. This device has the effects of overall, local, and ultra-deep aperture cleaning and has high practicality.

[0031] A controller assembly 9 is fixed on one side of the outer wall of the housing 1. A transducer 3 is arranged in a ring array on the inner wall of the housing 1. By arranging the transducer 3 in a ring array on the inner wall of the housing 1 and combining it with the electrical control structure of the controller assembly 9, the housing has a function of uniform ultrasonic oscillation cleaning control throughout the entire area. This can realize the all-round synchronous cleaning of the workpieces in the housing, ensure the uniformity of the basic cleaning of the workpieces, and avoid local missed cleaning.

[0032] A water pump 8 is installed on one side of the housing 1, and the water pump 8 is equipped with inlet and outlet water pipes 7. Through the pipeline structure of the housing 1, the water pump 8, and the inlet and outlet water pipes 7, the cleaning fluid can be automatically replenished and replaced. This allows for quick replacement and replenishment of the cleaning fluid inside the housing, improving the convenience and automation of the equipment cleaning operation. A spray pipe is installed at the upper part of the interior of the housing 1. The spray pipe is connected to the water pump 8. After cleaning, the lifting plate 5 rises, and the spray pipe automatically sprays and rinses the workpiece.

[0033] Inside the housing 1, a spray pipe is fixedly arranged around the upper part of the casing. The spray pipe is connected to the outlet of the water pump 8. The spray pipe has evenly distributed spray holes on its lower side. After the lifting plate 5 is raised above the cleaning liquid level, the water pump 8 sprays the workpiece surface with high pressure through the spray pipe. The surface of the lifting plate 5 has hollow drainage holes, and a corrosion-resistant filter screen is embedded inside the lifting plate 5. The hollow drainage holes allow the cleaning liquid to flow back quickly, and the corrosion-resistant filter screen is used to intercept large particles of impurities that fall off the workpiece.

[0034] The housing 1 is equipped with a liquid level sensor and a temperature sensor, both of which are electrically connected to the controller assembly 9. The controller assembly 9 collects the liquid level and temperature data of the cleaning fluid in the housing in real time and links the water pump 8 to complete the replenishment of liquid and constant temperature control. The surfaces of the mounting plate 14 and the rotating plate 17 are covered with anti-corrosion, waterproof and insulating coatings. The terminals of transducers 2 15, 3 16 and 4 18 are all equipped with sealed waterproof joints.

[0035] Example 2 Please see Figures 1-5 As shown, this embodiment, based on embodiment 1, further includes: a bracket 6 fixed to the lower end of the housing 1, and a base 4 fixed to the lower end of the bracket 6. Through the supporting and fixing structure of the bracket 6 and the base 4 at the bottom of the housing 1, the device provides overall stable support, vibration damping, and leveling functions, reducing the vibration deviation amplitude during device operation, ensuring long-term stable operation, and improving the overall structural stability of the device. A damping shock-absorbing pad is provided between the base 4 and the bracket 6, with a shock-absorbing spring embedded inside, used to absorb the vibrations generated by the ultrasonic waves and the operation of the hydraulic cylinder during cleaning, maintaining device stability.

[0036] A hydraulic cylinder 11 is fixed at the lower end of the housing 1. A hydraulic cylinder 10 is provided on one side of the hydraulic cylinder 11. The output end of the hydraulic cylinder 11 is fixedly connected to the lower end of the lifting plate 5. The lifting structure of the lifting plate 5 is driven by the hydraulic cylinder 11 in conjunction with the hydraulic cylinder 10. It has the functions of automatic lifting and feeding of workpieces and positioning. It can accurately adjust the immersion height of the workpiece in the cleaning solution and adapt to the cleaning and immersion requirements of workpieces of different specifications.

[0037] A gear ring 2 is fixed to the upper outer wall of the housing 1. A gear 12 is rotatably mounted on the lower end of the moving block 13. The gear 12 meshes with the gear ring 2. A motor 28 is fixed to the upper end of the moving block 13. The output end of the motor 28 is fixedly connected to the rotation center of the upper end of the gear 12. Through the meshing transmission structure of the gear ring 2, the gear 12 and the motor 28, the moving block 13 has the function of circumferential displacement adjustment. It can drive the cleaning component to rotate around the entire workpiece for positioning, so as to achieve precise positioning and cleaning of any local stains on the workpiece.

[0038] Hydraulic cylinder 26 has a hydraulic rod 24 on one side. The hydraulic rod 24 is fixedly connected to one side of the mounting plate 14. Through the telescopic transmission structure of hydraulic cylinder 26 and hydraulic rod 24, the mounting plate 14 has the function of precise adjustment of the lateral spacing. The cleaning distance between the transducer and the stain can be flexibly adjusted to meet the optimal cleaning distance requirements of different stains.

[0039] The rotating plate 17 is equipped with a linear array of monitors 19. The monitors 19 are aligned with the height of each transducer 18. Through the structure of the monitors 19, which are aligned with the height of the transducer 18 and arranged in a linear array, the plate has the function of real-time and accurate monitoring of the depth and position of stains. It can accurately match the transducer 18 of the corresponding height to start working, and achieve targeted and precise cleaning.

[0040] A guide wheel 22 is rotatably mounted on the upper end of the mounting plate 14. A guide wheel 20 is provided on one side of the guide wheel 22. The guide wheel 20 rotates coaxially with the rotating plate 17. A belt 21 is provided between the guide wheel 22 and the guide wheel 20. Through the transmission structure of the guide wheel 22, the guide wheel 20 and the belt 21, the rotating plate 17 can be adjusted synchronously and smoothly, ensuring the synchronicity of the angle adjustment of the rotating plates 17 on both sides, so that the transducer 18 can accurately focus on the cleaning point.

[0041] Mounting plate 14 is fixed with mounting base 25 on one side, motor 23 is fixed with one side of mounting base 25, and gear 27 is fixed with the upper end of guide wheel 20. The gears 27 on the upper ends of the two guide wheels 20 mesh with each other. Through the transmission structure of mounting base 25, motor 23 and meshing gears 27, it has the function of synchronous centering and rotation adjustment of double rotating plates 17, which can realize the precise energy concentration of multiple transducers 18, and greatly improve the cleaning power and effect of ultra-deep hole stains.

[0042] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An ultrasonic cleaning device, comprising a housing (1), characterized in that: The housing (1) is equipped with a lifting plate (5) inside. The upper end of the housing (1) is equipped with a moving block (13). The moving block (13) is equipped with a hydraulic cylinder (26) inside. The moving block (13) is equipped with a mounting plate (14) whose position is adjusted by the hydraulic cylinder (26) on one side. The mounting plate (14) is equipped with a transducer (3) (16) in the middle of one side. The transducer (3) (16) is equipped with transducers (2) (15) on both sides. The mounting plate (14) is equipped with an adjustable rotating plate (17) on both sides. The rotating plate (17) is equipped with transducers (4) (18) arranged in a longitudinal linear array on one side.

2. The ultrasonic cleaning equipment according to claim 1, characterized in that: A controller assembly (9) is fixed on one side of the outer wall of the housing (1), and a transducer (3) arranged in a ring array is provided on the inner wall of the housing (1); a water pump (8) is provided on one side of the housing (1), and the water pump (8) is provided with inlet and outlet water pipes (7).

3. The ultrasonic cleaning equipment according to claim 2, characterized in that: The upper part of the box (1) is surrounded by a spray pipe, which is connected to the outlet of the water pump (8). The spray pipe has evenly arranged spray holes on the lower side. After the lifting plate (5) is raised above the cleaning liquid level, the water pump (8) sprays the workpiece surface with high pressure through the spray pipe. The lifting plate (5) has hollow drainage holes on its surface and a corrosion-resistant filter screen is embedded inside the lifting plate (5). The hollow drainage holes allow the cleaning liquid to flow back quickly, and the corrosion-resistant filter screen is used to intercept large particles of impurities that fall off the workpiece.

4. The ultrasonic cleaning equipment according to claim 1, characterized in that: The lower end of the housing (1) is fixed with a bracket (6), and the lower end of the bracket (6) is fixed with a base (4); a damping shock absorber is sandwiched between the bracket (6) and the base (4), and several uniformly distributed shock absorber springs are embedded inside the damping shock absorber; the damping shock absorber and the shock absorber springs are used to absorb the vibrations generated by ultrasonic oscillation, hydraulic cylinder and motor operation.

5. The ultrasonic cleaning equipment according to claim 1, characterized in that: A hydraulic cylinder (11) is fixed at the lower end of the housing (1). A cylinder (10) is provided on one side of the hydraulic cylinder (11). The output end of the hydraulic cylinder (11) is fixedly connected to the lower end of the lifting plate (5).

6. The ultrasonic cleaning equipment according to claim 1, characterized in that: A gear ring (2) is fixed on the upper outer wall of the housing (1), and a gear (12) is rotatably installed on the lower end of the moving block (13). The gear (12) meshes with the gear ring (2), and a motor (28) is fixed on the upper end of the moving block (13). The output end of the motor (28) is fixedly connected to the rotation center of the upper end of the gear (12).

7. The ultrasonic cleaning equipment according to claim 1, characterized in that: The hydraulic cylinder (26) is provided with a hydraulic rod (24) on one side, and the hydraulic rod (24) is fixedly connected to one side of the mounting plate (14).

8. The ultrasonic cleaning equipment according to claim 1, characterized in that: The rotating plate (17) is provided with monitors (19) arranged in a linear array on its surface, and the monitors (19) are aligned with the height of each transducer (18).

9. The ultrasonic cleaning equipment according to claim 1, characterized in that: The mounting plate (14) is rotatably mounted with a guide wheel 1 (22), and a guide wheel 2 (20) is provided on one side of the guide wheel 1 (22). The guide wheel 2 (20) rotates coaxially with the rotating plate (17). A belt (21) is provided between the guide wheel 1 (22) and the guide wheel 2 (20). A mounting base (25) is fixed on one side of the mounting plate (14), and a motor 2 (23) is fixed on one side of the mounting base (25). A gear 2 (27) is fixed on the upper end of the guide wheel 2 (20), and the gears 2 (27) on the upper ends of the two guide wheels 2 (20) mesh with each other.

10. An ultrasonic cleaning device according to claim 2, characterized in that: The box (1) is equipped with a liquid level sensor and a temperature sensor. The liquid level sensor and the temperature sensor are electrically connected to the controller assembly (9). The controller assembly (9) collects the liquid level and temperature data of the cleaning fluid in the box in real time and links the water pump (8) to complete the replenishment and constant temperature control. The surfaces of the mounting plate (14) and the rotating plate (17) are covered with anti-corrosion, waterproof and insulating coatings. The terminals of transducer two (15), transducer three (16) and transducer four (18) are all equipped with sealed waterproof joints.

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