An adaptive positioning laser micromachining device and method

Abstract

The application relates to the technical field of laser processing, in particular to a self-adaptive positioning laser micro-processing device and method, which comprises a gas-solid removal module; the gas-solid removal module comprises a supporting plate fixedly connected with a processing platform, a gas blowing box and a gas suction box are arranged below the supporting plate, a plurality of groups of first air cylinders are arranged in the gas blowing box, a lower gas blowing frame, a middle layer separation mechanism and an upper gas blowing frame are fixedly connected above the first air cylinders respectively, and an exhaust device is fixedly connected with the gas blowing box outside; the lower gas blowing frame, the middle layer separation mechanism, the upper gas blowing frame and a gas suction mechanism are sequentially arranged outside a workpiece; during laser processing, a layout mode of one-side gas blowing and opposite-side synchronous and instant gas suction is adopted, air flow disturbance to the surrounding air is effectively reduced, solid impurities and smoke generated during laser processing are directionally migrated along a single direction, the interference of impurities on a laser light path is reduced from the source, and the laser micro-processing precision and product quality are guaranteed.

Description

Technical Field

[0001] This invention relates to the field of laser processing technology, specifically to an adaptive positioning laser micromachining device and method. Background Technology

[0002] The adaptive positioning laser micromachining device is an intelligent precision machining equipment that integrates visual recognition, multi-sensor fusion, precision motion control, and laser processing. Even if the workpiece has clamping deviations, shape variations, or differences in surface morphology, the device can autonomously complete precise positioning, automatic focusing, and real-time correction of the machining trajectory, achieving ultra-high precision micromachining at the micron or even sub-micron level.

[0003] Laser processing relies on a focused laser beam to melt and vaporize the workpiece material to complete precision micromachining. During the process, molten fumes and slag debris diffuse in all directions and remain on the surface of the machined surface and inside the grooves. For the processing of large components, the interference caused by such fumes and debris is relatively weak; however, in the high-precision micromachining of small workpieces, fumes, molten debris, and micron-sized aerosols tend to float and mix disorderly in the processing area, easily obstructing the laser transmission path for subsequent scanning, causing spot distortion, energy attenuation, and focus shift, which severely restricts the processing accuracy and forming consistency of the workpiece. Therefore, an adaptive positioning laser micromachining device and method are proposed to address the above problems. Summary of the Invention

[0004] The purpose of this invention is to provide an adaptive positioning laser micromachining device and method to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: As an optional solution to the adaptive positioning laser micromachining device and method described in this invention, the adaptive positioning laser micromachining device and method includes a processing platform, an operating device, a multi-angle adjustment device, a laser processing device, and a gas-solid removal module. The operating device is installed above the processing platform, and a multi-angle adjustment device is installed on one side of the operating device above the processing platform. A laser processing device is fixedly connected to one side of the multi-angle adjustment device. An adaptive positioning mechanism for fixing the workpiece is installed below the laser processing device, and a gas-solid rejection module is fixedly connected to the processing platform on the outside of the adaptive positioning mechanism. The gas-solid rejection module includes a support plate fixedly connected to the processing platform. Below the support plate are an air blowing box and an air suction box. Multiple sets of first cylinders are installed inside the air blowing box. A lower air blowing frame, a middle layer separation mechanism, and an upper air blowing frame are fixedly connected above the first cylinders. Exhaust equipment is connected to the lower part of the lower air blowing frame, the middle layer separation mechanism, and the upper air blowing frame. The outside of the exhaust equipment is fixedly connected to the air blowing box. A second cylinder is fixedly connected to the top of the intake box. A suction mechanism is fixedly connected to the free end of the second cylinder. Two sets of suction devices are connected to the bottom of the suction mechanism. The outer side of the suction devices is fixedly connected to the intake box. The output ends of the two sets of suction devices are respectively connected to the first impurity treatment device and the second impurity treatment device. The output ends of the first impurity treatment device and the second impurity treatment device are both connected to a circulation pipe. The other end of the circulation pipe is connected to the input end of the exhaust device. The middle layer separation mechanism includes a middle layer air blowing frame. The bottom of the middle layer air blowing frame is fixedly connected to the free end of the first cylinder. A vertically distributed separation groove and exhaust hole are opened on one side of the middle layer air blowing frame. A connecting pipe is also fixedly connected inside the middle layer air blowing frame. The bottom of the connecting pipe is connected to the exhaust device. A hollow pipe is connected above the connecting pipe. Multiple sets of air injection pipes are connected above the hollow pipe. The other end of the air injection pipe is connected to a flexible separator. The outer side of the connecting pipe is also connected to a longitudinal pipe, and one side of the longitudinal pipe is connected to multiple sets of exhaust nozzles.

[0006] As an optional embodiment of the adaptive positioning laser micromachining device and method described in this invention, an electromagnetic valve is installed on the outside of the connecting pipe between the hollow tube and the longitudinal tube.

[0007] As an optional embodiment of the adaptive positioning laser micromachining device and method described in this invention, an air blowing hole is provided on one side of both the lower air blowing frame and the upper air blowing frame, and the air blowing hole of the upper air blowing frame is inclined.

[0008] As an optional embodiment of the adaptive positioning laser micromachining device and method described in this invention, the steps of the method are as follows: Step 1: First, fix the workpiece using the adaptive positioning mechanism, and then perform the calibration. Step 2: Process the workpiece by controlling the multi-angle adjustment equipment and laser processing equipment through the operating equipment; Step 3: During workpiece processing, the gas-solid rejection module can treat impurities generated during processing in layers. Step 4: The collected solids and gases enter the first and second impurity treatment devices for targeted treatment, and then are collected again by the circulation pipe and discharged into the exhaust device to achieve recycling.

[0009] Laser processing relies on a focused laser beam to melt and vaporize the workpiece material to complete precision micromachining. The molten fumes and slag generated during processing disperse in all directions and remain on the surface of the processed shape and inside the grooves. For large components, the interference caused by such fumes and debris is relatively weak; however, in high-precision micromachining scenarios for small workpieces, fumes, molten debris, and micron-sized aerosols tend to float and mix disorderly within the processing area, easily obstructing the laser transmission path for subsequent scanning, causing spot distortion, energy attenuation, and focus shift. This severely restricts the processing accuracy and consistency of the workpiece. To address this, a lower air-blowing frame, a middle-layer separation mechanism, an upper air-blowing frame, and a suction mechanism are sequentially arranged on the outside of the workpiece. During laser processing, a layout of single-sided air blowing and simultaneous, real-time suction on the opposite side is adopted, effectively reducing airflow disturbance to the surrounding air. This allows solid impurities and fumes generated during laser processing to migrate directionally in a single direction, reducing interference from impurities to the laser path from the source and ensuring the precision of laser micromachining and the quality of the finished product. The lower air-blowing frame, the middle partition mechanism, and the upper air-blowing frame are arranged vertically in a hierarchical manner to achieve layered isolation of the processing space. The lower air-blowing frame and the middle partition mechanism work together to directionally and laterally discharge debris and fumes generated at the bottom of the processing layer. Simultaneously, when the middle partition mechanism is in operation, it stabilizes the airflow; its internal flexible partitions unfold to form a physical isolation barrier, which, in conjunction with the upper air-blowing frame, effectively prevents dust and impurities from rising into the laser beam path. This structure not only extends the lifespan of laser optical components and maintains long-term stability of laser spot energy, but also possesses multiple technical advantages: firstly, it reduces secondary pollution and damage to the workpiece surface from dust and debris, stabilizing processing quality; secondly, it can quickly remove heat accumulated in the workpiece processing area, suppressing thermal deformation and adapting to high-precision micro-machining requirements; and thirdly, dust, exhaust gas, and solid debris can be collected and treated centrally, reducing the impact of exhaust gas and dust spillage on the surrounding environment.

[0010] As an optional embodiment of the adaptive positioning laser micromachining device and method described in this invention, the flexible separator includes an elastic plastic film layer arranged in a roll shape, and multiple airbags are installed on the surface of the elastic plastic film layer, with one end of the airbag connected to an air injection tube.

[0011] The blowing airflow enters the hollow tube through the connecting pipe, and then fills the airbag through the injection pipe. This expands the elastic plastic film layer, forming a physical barrier between the upper and lower spaces, reducing crosstalk between the upper and lower airflows and impurities. The upper blowing frame adopts a downward blowing direction, which creates downward pressure to guide the upward-dispersing smoke and impurities, causing the impurities to converge along the set flow direction. This facilitates full suction by the suction mechanism on the same side, significantly reducing the contamination and interference of smoke and impurities on the optical components of the laser processing equipment.

[0012] As an optional embodiment of the adaptive positioning laser micromachining device and method described in this invention, the suction mechanism includes a solid suction frame, and the bottom center of the solid suction frame is fixedly connected to the free end of the second cylinder. A gas suction frame is installed inside the solid suction frame. Suction devices are respectively connected to the bottom of the solid suction frame and the bottom of the gas suction frame. A first suction nozzle is opened on one side of the solid suction frame, and a second suction nozzle is opened on one side of the gas suction frame.

[0013] As an optional embodiment of the adaptive positioning laser micromachining device and method described in this invention, one side of the gas suction frame is arranged in an arc shape, and the second suction nozzle inside the gas suction frame is arranged in an arc-shaped trajectory.

[0014] The air intake mechanism is divided into a lower first intake nozzle and an upper second intake nozzle, which can be used to selectively adsorb and collect solid debris, fine dust and fumes of different levels. The airflow containing impurities after suction is sent to the first impurity treatment device and the second impurity treatment device for purification. The purified air can be internally circulated and reused to build a closed airflow circulation loop, further weakening the disturbance to the external airflow field.

[0015] Compared with the prior art, the beneficial effects of the present invention are: A lower air blowing frame, a middle partition mechanism, an upper air blowing frame, and an air suction mechanism are sequentially arranged on the outside of the workpiece. During laser processing, a layout of single-sided air blowing and simultaneous instantaneous air suction on the opposite side is adopted, which effectively reduces the airflow disturbance to the surrounding air and causes solid impurities and fumes generated by laser processing to migrate in a single direction, thereby reducing the interference of impurities on the laser optical path from the source and ensuring the precision of laser micromachining and the quality of finished products.

[0016] The lower air-blowing frame, the middle partition mechanism, and the upper air-blowing frame are arranged vertically in a hierarchical manner to achieve layered isolation of the processing space. The lower air-blowing frame and the middle partition mechanism work together to directionally and laterally discharge debris and fumes generated at the bottom of the processing layer. Simultaneously, when the middle partition mechanism is in operation, it stabilizes the airflow; its internal flexible partitions unfold to form a physical isolation barrier, which, in conjunction with the upper air-blowing frame, effectively prevents dust and impurities from rising into the laser beam path. This structure not only extends the lifespan of laser optical components and maintains long-term stability of laser spot energy, but also possesses multiple technical advantages: firstly, it reduces secondary pollution and damage to the workpiece surface from dust and debris, stabilizing processing quality; secondly, it can quickly remove heat accumulated in the workpiece processing area, suppressing thermal deformation and adapting to high-precision micro-machining requirements; and thirdly, dust, exhaust gas, and solid debris can be collected and treated centrally, reducing the impact of exhaust gas and dust spillage on the surrounding environment.

[0017] The blowing airflow enters the hollow tube through the connecting pipe, and then fills the airbag through the injection pipe. This expands the elastic plastic film layer, forming a physical barrier between the upper and lower spaces, reducing crosstalk between the upper and lower airflows and impurities. The upper blowing frame adopts a downward blowing direction, which creates downward pressure to guide the upward-dispersing smoke and impurities, causing the impurities to converge along the set flow direction. This facilitates full suction by the suction mechanism on the same side, significantly reducing the contamination and interference of smoke and impurities on the optical components of the laser processing equipment.

[0018] The air intake mechanism is divided into a lower first intake nozzle and an upper second intake nozzle, which can be used to selectively adsorb and collect solid debris, fine dust and fumes of different levels. The airflow containing impurities after suction is sent to the first impurity treatment device and the second impurity treatment device for purification. The purified air can be internally circulated and reused to build a closed airflow circulation loop, further weakening the disturbance to the external airflow field. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of an adaptive positioning laser micromachining device and method; Figure 2 This is a schematic diagram of the gas-solid removal module of an adaptive positioning laser micromachining device and method. Figure 3 An exploded view of the layer separation mechanism in an adaptive positioning laser micromachining device and method; Figure 4 This is a schematic diagram of a flexible separator in an adaptive positioning laser micromachining device and method. Figure 5 This is a schematic diagram of the air intake mechanism of an adaptive positioning laser micromachining device and method.

[0020] In the diagram: 1-Processing platform, 2-Operating equipment, 3-Multi-angle adjustment equipment, 4-Laser processing equipment, 5-Gas-solid removal module, 501-Support plate, 502-Blowing box, 503-First cylinder, 504-Lower blowing frame, 505-Middle layer separation mechanism, 5051-Middle layer blowing frame, 5052-Separation groove, 5053-Exhaust hole, 5054-Connecting pipe, 5055-Hollow pipe, 5056-Injection pipe, 5057-Flexible separator, 571-Elastic plastic film layer, 572 - Airbag, 5058 Solenoid valve, 5059 Longitudinal tube, 5060 Exhaust nozzle, 506 Upper air blowing frame, 507 Inhalation mechanism, 5071 Solid intake frame, 5072 Gas intake frame, 5073 First intake nozzle, 5074 Second intake nozzle, 508 First impurity treatment device, 509 Second impurity treatment device, 510 Second cylinder, 511 Inhalation device, 512 Exhaust device, 513 Circulation pipe, 514 Inhalation box, 6 Adaptive positioning mechanism. Detailed Implementation

[0021] Example 1: Please refer to Figure 1 , Figure 2 and Figure 3 The present invention provides a technical solution: An adaptive positioning laser micromachining device and method includes a processing platform 1, an operating device 2, a multi-angle adjustment device 3, a laser processing device 4, and a gas-solid removal module 5. The operating device 2 is installed above the processing platform 1, and a multi-angle adjustment device 3 is installed on one side of the operating device 2 above the processing platform 1. A laser processing device 4 is fixedly connected to one side of the multi-angle adjustment device 3. An adaptive positioning mechanism 6 for fixing the workpiece is provided below the laser processing device 4, and a gas-solid rejection module 5 fixedly connected to the processing platform 1 is provided on the outside of the adaptive positioning mechanism 6. The gas-solid rejection module 5 includes a support plate 501 fixedly connected to the processing platform 1. A blowing box 502 and a suction box 514 are arranged below the support plate 501. Multiple sets of first cylinders 503 are installed inside the blowing box 502. A lower blowing frame 504, a middle separation mechanism 505 and an upper blowing frame 506 are fixedly connected above the first cylinders 503 respectively. An exhaust device 512 is connected to the lower part of the lower blowing frame 504, the middle separation mechanism 505 and the upper blowing frame 506. The outside of the exhaust device 512 is fixedly connected to the blowing box 502. A second cylinder 510 is fixedly connected to the top of the intake box 514. An intake mechanism 507 is fixedly connected to the free end of the second cylinder 510. Two sets of intake devices 511 are connected to the bottom of the intake mechanism 507. The outer side of the intake device 511 is fixedly connected to the intake box 514. The output ends of the two sets of intake devices 511 are respectively connected to a first impurity treatment device 508 and a second impurity treatment device 509. The output ends of the first impurity treatment device 508 and the second impurity treatment device 509 are both connected to a circulation pipe 513. The other end of the circulation pipe 513 is connected to the input end of the exhaust device 512. The middle layer separation mechanism 505 includes a middle layer air blowing frame 5051. The bottom of the middle layer air blowing frame 5051 is fixedly connected to the free end of the first cylinder 503. A separation groove 5052 and an exhaust hole 5053 are provided on one side of the middle layer air blowing frame 5051. A connecting pipe 5054 is also fixedly connected inside the middle layer air blowing frame 5051. The bottom of the connecting pipe 5054 is connected to the exhaust device 512. A hollow pipe 5055 is connected above the connecting pipe 5054. Multiple sets of air injection pipes 5056 are connected above the hollow pipe 5055. The other end of the air injection pipe 5056 is connected to a flexible separator 5057. The outer side of the connecting pipe 5054 is also connected to a longitudinal pipe 5059, and one side of the longitudinal pipe 5059 is connected to multiple sets of exhaust nozzles 5060.

[0022] A solenoid valve 5058 is installed on the outside of the connecting pipe 5054 between the hollow pipe 5055 and the longitudinal pipe 5059.

[0023] Air holes are provided on one side of both the lower air blowing frame 504 and the upper air blowing frame 506, with the air holes of the upper air blowing frame 506 being set at an angle.

[0024] The steps for using this method are as follows: Step 1: First, fix the workpiece using the adaptive positioning mechanism 6, and then perform the calibration. Step 2: Control the multi-angle adjustment device 3 and laser processing device 4 through operating device 2 to process the workpiece; Step 3: During workpiece processing, the gas-solid rejection module 5 can perform targeted treatment of impurities generated during processing in layers; Step 4: The collected solids and gases enter the first impurity treatment device 508 and the second impurity treatment device 509 for targeted treatment, and then are collected again by the circulation pipe 513 and discharged into the exhaust device 512, realizing recycling. Laser processing relies on a focused laser beam to melt and vaporize the workpiece material to complete precision micromachining. During processing, molten fumes and slag debris diffuse in all directions and remain on the surface of the processed shape and inside the grooves. For large components, the interference caused by such fumes and debris is relatively weak; however, in high-precision micromachining scenarios for small workpieces, fumes, molten debris, and micron-sized aerosols tend to float and mix disorderly within the processing area, easily obstructing the laser transmission path for subsequent scanning, causing spot distortion, energy attenuation, and focus shift. This severely restricts the processing accuracy and consistency of the workpiece. To address this, a lower air-blowing frame 504, a middle-layer separation mechanism 505, an upper air-blowing frame 506, and a suction mechanism 507 are sequentially arranged on the outside of the workpiece. The laser processing employs a layout of single-sided air blowing and simultaneous, real-time suction from the opposite side, effectively reducing airflow disturbance to the surrounding air and causing solid impurities and fumes generated during laser processing to migrate directionally in a single direction. This reduces interference from impurities to the laser path from the source, ensuring the precision of laser micromachining and the quality of the finished product. The lower air-blowing frame 504, the middle-layer partition mechanism 505, and the upper air-blowing frame 506 are arranged vertically in a hierarchical manner to achieve layered isolation of the processing space. The lower air-blowing frame 504 and the middle-layer partition mechanism 505 work together to directionally discharge debris and fumes generated at the bottom layer of the processing layer to the side. Simultaneously, when the middle-layer partition mechanism 505 is in operation, it stabilizes the flow, with its internal flexible partition 5057 unfolding to form a physical isolation barrier. This barrier, combined with the upper air-blowing frame 506, effectively prevents dust and impurities from rising into the laser beam path. This structure not only extends the lifespan of laser optical components and maintains long-term stability of laser spot energy, but also possesses multiple technical advantages: firstly, it reduces secondary pollution and damage to the workpiece surface caused by dust and debris, stabilizing processing quality; secondly, it can quickly remove heat accumulated in the workpiece processing area, suppressing thermal deformation and adapting to high-precision micro-machining requirements; and thirdly, dust, exhaust gas, and solid debris can be collected and treated centrally, reducing the impact of exhaust gas and dust spillage on the surrounding environment. Also includes the following: The multi-angle adjustment device 3 is used to drive the laser processing equipment 4 to perform multi-angle displacement adjustment and complete the multi-directional laser processing of the workpiece; the adaptive positioning mechanism 6 can drive the workpiece to achieve adaptive position fine adjustment during the processing, and rely on the existing image recognition equipment to identify the processing point in real time, thereby accurately correcting and compensating the workpiece position.

[0025] The lower blowing frame 504, the middle partition mechanism 505, and the upper blowing frame 506 work in a hierarchical and coordinated manner, with the following specific functions: The lower blowing frame 504 is responsible for directionally blowing debris, dust, and other impurities generated during laser processing to one side. Due to its relatively high working air pressure, it is prone to causing the surrounding air to collapse and turbulently. At this time, the middle partition mechanism 505 plays a role in stabilizing the flow and replenishing pressure, effectively reducing the disturbance to the external airflow field. At the same time, the middle partition mechanism 505 can automatically unfold to form a physical barrier with the upper blowing frame 506, so that the airflow is concentrated and matched to the working area of ​​the lower blowing frame 504, reducing the interference of airflow to the upper space. The upper blowing frame 506 forms an air curtain to block upward-escaping impurities and fumes, preventing them from interfering with the laser processing equipment above; at the same time, it directionally guides the dispersed gas and impurities to the suction side, making it convenient for the suction mechanism to collect and process them.

[0026] The first impurity treatment device 508 and the second impurity treatment device 509 can purify the solid and gas impurities collected by the pump. The purified gas is then introduced into the exhaust device 512 inside the blowing box 502 through the circulation pipe 513 to realize the closed-loop recycling of gas.

[0027] The partition groove 5052 provides storage and unfolding space for the flexible partition 5057; the exhaust port 5053 has an internal exhaust nozzle 5060, which can achieve uniform and orderly exhaust and achieve pressure and flow stabilization; the configured solenoid valve 5058 can prevent gas leakage inside the flexible partition 5057, ensuring the stability of the unfolded shape of the flexible partition and the reliable isolation effect. The exhaust pressure of the 512 varies depending on the location of the exhaust device, and it is matched according to the actual situation.

[0028] Example 2: This example is an improvement upon Example 1. Please refer to [link / reference]. Figure 4 Specifically, the flexible separator 5057 includes an elastic plastic film layer 571 arranged in a roll shape, and multiple airbags 572 are mounted on the surface of the elastic plastic film layer 571, with one end of the airbag 572 connected to the air injection tube 5056.

[0029] The blowing airflow enters the hollow tube 5055 through the connecting pipe 5054, and then fills the airbag 572 through the air injection pipe 5056. This expands the elastic plastic film layer 571, forming a physical barrier between the upper and lower spaces, reducing the crosstalk between the upper and lower airflows and impurities. The upper blowing frame 506 adopts a downward blowing direction, which forms a downward pressure guide for the upward-dispersing smoke and impurities, causing the impurities to converge along the set flow direction, facilitating the full suction by the suction mechanism 507 on the same side, and significantly reducing the pollution and interference of smoke and impurities on the optical components of the laser processing equipment 4. The elastic plastic film layer 571 has an elastic reset function. After the gas is discharged, it can automatically reset. Alternatively, a torsion spring can be designed inside the elastic plastic film layer 571 to ensure reset. The design can be customized according to the actual situation.

[0030] Example 3: This example is an improvement on Example 2. Please refer to [link / reference]. Figure 5 Specifically, the suction mechanism 507 includes a solid suction frame 5071, and the bottom center of the solid suction frame 5071 is fixedly connected to the free end of the second cylinder 510. A gas suction frame 5072 is installed inside the solid suction frame 5071. The bottom of the solid suction frame 5071 and the bottom of the gas suction frame 5072 are respectively connected to the suction device 511. A first suction nozzle 5073 is opened on one side of the solid suction frame 5071, and a second suction nozzle 5074 is opened on one side of the gas suction frame 5072.

[0031] One side of the gas suction frame 5072 is curved, and the second suction nozzle 5074 inside the gas suction frame 5072 is arranged in an arc-shaped trajectory.

[0032] The suction mechanism 507 is divided into a lower first suction nozzle 5073 and an upper second suction nozzle 5074, which can be used to selectively adsorb and collect solid debris, fine dust and fumes at different levels. The first suction nozzle 5073 usually collects a large amount of solid and gaseous impurities, while the second suction nozzle 5074 is used to collect a small amount of gaseous impurities that have escaped. The impurity-laden airflow after suction is sent to the first impurity treatment device 508 and the second impurity treatment device 509 for purification. The purified air can be internally recycled and reused, forming a closed airflow circulation loop to a certain extent, which further weakens the disturbance to the external ambient airflow field. Also includes the following: The second intake nozzle 5074 is arranged along an arc-shaped trajectory, which can better adapt to the airflow direction of the upper blowing frame 506 and fully receive the airflow that it guides and discharges; at the same time, the upper intake coverage area is larger than the exhaust range of the upper blowing frame 506, which can fully collect the scattered smoke and dust impurities and avoid airflow overflow and residual interference with the light path.

[0033] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only for the purpose of helping to understand the method and core ideas of the present invention. The above descriptions are only preferred embodiments of the present invention. It should be noted that due to the limitations of textual expression, while there are objectively infinite specific structures, those skilled in the art can make several improvements, modifications, or changes without departing from the principles of the present invention, and can also combine the above technical features in an appropriate manner. These improvements, modifications, changes, or combinations, or the direct application of the inventive concept and technical solution to other situations without modification, should all be considered within the scope of protection of the present invention.

Claims

1. An adaptive positioning laser micromachining device, characterized in that: It includes a processing platform (1), operating equipment (2), multi-angle adjustment equipment (3), laser processing equipment (4), and gas-solid removal module (5); The operating device (2) is installed above the processing platform (1), and a multi-angle adjustment device (3) is installed on one side of the operating device (2) above the processing platform (1). A laser processing device (4) is fixedly connected to one side of the multi-angle adjustment device (3). An adaptive positioning mechanism (6) for fixing the workpiece is provided below the laser processing device (4), and a gas-solid rejection module (5) is fixedly connected to the processing platform (1) on the outside of the adaptive positioning mechanism (6). The gas-solid rejection module (5) includes a support plate (501) fixedly connected to the processing platform (1). A blowing box (502) and a suction box (514) are provided below the support plate (501). Multiple sets of first cylinders (503) are installed inside the blowing box (502). A lower blowing frame (504), a middle separation mechanism (505) and an upper blowing frame (506) are fixedly connected above the first cylinders (503). An exhaust device (512) is connected to the lower part of the lower blowing frame (504), the middle separation mechanism (505) and the upper blowing frame (506). An exhaust device (512) is fixedly connected to the outside of the blowing box (502). A second cylinder (510) is fixedly connected to the top of the suction box (514). A suction mechanism (507) is fixedly connected to the free end of the second cylinder (510). Two sets of suction devices (511) are connected to the bottom of the suction mechanism (507). The outer side of the suction device (511) is fixedly connected to the suction box (514). The output ends of the two sets of suction devices (511) are respectively connected to the first impurity treatment device (508) and the second impurity treatment device (509). The output ends of the first impurity treatment device (508) and the second impurity treatment device (509) are both connected to the circulation pipe (513). The other end of the circulation pipe (513) is connected to the input end of the exhaust device (512). The middle layer separation mechanism (505) includes a middle layer air blowing frame (5051). The bottom of the middle layer air blowing frame (5051) is fixedly connected to the free end of the first cylinder (503). A separation groove (5052) and an exhaust hole (5053) are provided on one side of the middle layer air blowing frame (5051) in an up-down distribution. A connecting pipe (5054) is also fixedly connected inside the middle layer air blowing frame (5051). The bottom of the connecting pipe (5054) is connected to the exhaust device (512). A hollow pipe (5055) is connected above the connecting pipe (5054). Multiple sets of air injection pipes (5056) are connected above the hollow pipe (5055). The other end of the air injection pipe (5056) is connected to a flexible separator (5057). The outer side of the connecting pipe (5054) is also connected to a longitudinal pipe (5059), and one side of the longitudinal pipe (5059) is connected to multiple sets of exhaust nozzles (5060).

2. The adaptive positioning laser micromachining device according to claim 1, characterized in that: A solenoid valve (5058) is installed on the outside of the connecting pipe (5054) between the hollow tube (5055) and the longitudinal tube (5059).

3. The adaptive positioning laser micromachining device according to claim 1, characterized in that: The flexible separator (5057) includes a roll-shaped elastic plastic film layer (571), and multiple airbags (572) are mounted on the surface of the elastic plastic film layer (571), with one end of the airbag (572) connected to an air injection tube (5056).

4. The adaptive positioning laser micromachining device according to claim 1, characterized in that: Air holes are provided on one side of both the lower air blowing frame (504) and the upper air blowing frame (506), and the air holes of the upper air blowing frame (506) are set at an angle.

5. The adaptive positioning laser micromachining device according to claim 1, characterized in that: The suction mechanism (507) includes a solid suction frame (5071), and the bottom center of the solid suction frame (5071) is fixedly connected to the free end of the second cylinder (510). A gas suction frame (5072) is installed inside the solid suction frame (5071). The bottom of the solid suction frame (5071) and the bottom of the gas suction frame (5072) are respectively connected to a suction device (511). A first suction nozzle (5073) is opened on one side of the solid suction frame (5071), and a second suction nozzle (5074) is opened on one side of the gas suction frame (5072).

6. The adaptive positioning laser micromachining device according to claim 5, characterized in that: One side of the gas suction frame (5072) is curved, and the second suction nozzle (5074) inside the gas suction frame (5072) is curved.

7. A method for adaptive positioning laser micromachining according to any one of claims 1-6, characterized in that: The steps for using this method are as follows: Step 1: First, fix the workpiece using the adaptive positioning mechanism (6), and then perform the calibration work; Step 2: The workpiece is processed by controlling the multi-angle adjustment device (3) and the laser processing device (4) through the operation device (2); Step 3: When processing the workpiece, the gas-solid rejection module (5) can be set up to treat the impurities generated during processing in layers. Step 4: The collected solids and gases enter the first impurity treatment device (508) and the second impurity treatment device (509) for targeted treatment, and then are collected again by the circulation pipe (513) and discharged into the exhaust device (512) to achieve recycling.

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