An ultra-thin metal mask plate production process and a winding mechanism

Abstract

The application relates to a super-thin metal mask plate production process and a winding mechanism and relates to the technical field of precision machining. The super-thin metal mask plate production process comprises the following steps: step one, material taking; step two, heat treatment: the Invar alloy belt is sequentially subjected to preheating, high-temperature heating and cooling treatment, has the effects of stress removal, oil removal and surface activation; step three, primary grinding; step four, heat treatment: the process parameters of step two are repeated; step five, secondary grinding; step six, passivation treatment: the surface of the Invar alloy belt is treated by using a passivation device, the smoothness is reduced, the roughness is increased, the 0.08-micron roughness is stabilized, and a uniform and inhibited matte surface is formed; step seven, cleaning; step eight, film pasting; step nine, winding; and step ten, slicing. In the application, the production process is effectively solved by segmental grinding and twice heat treatment, and the problems of uneven stress and easy deformation caused by rolling machining in the related art are solved.

Description

Technical Field

[0001] This application relates to the field of precision machining, and in particular to a manufacturing process and winding mechanism for an ultrathin metal mask. Background Technology

[0002] In the current field of precision machining, ultrathin metal masks (F-micrometers) are a core component in the manufacturing of high-end display devices, and their application scenarios are constantly expanding, especially to meet the production needs of next-generation products such as foldable screen phones, high-end handheld terminals, and micro OLED displays. As display technology rapidly iterates towards high PPI, ultra-narrow bezels, and lightweight designs, the market is placing increasingly stringent requirements on the precision, thickness, and surface flatness of ultrathin metal masks. Among these, Invar alloys, with their extremely low coefficient of thermal expansion and excellent dimensional stability, have become the preferred substrate for ultrathin metal masks. The optimization and upgrading of their processing technology has become one of the core breakthroughs driving the development of the precision display industry.

[0003] In related technologies, a method for processing metal photomasks involves first performing pretreatment processes such as precise cutting, degreasing, and rust removal on Invar alloy 4J36 as the substrate to remove impurities and stress from the substrate surface, laying the foundation for subsequent processing. Then, the substrate is gradually made ultra-thin through a multi-pass precision rolling process, with precise control over the reduction amount and speed of each rolling pass. Finally, post-processing processes such as cleaning and drying are performed to remove residual impurities generated during processing, ultimately obtaining the finished photomask that meets the basic usage requirements of low- to mid-range display devices.

[0004] In the ultra-thinning process of Invar alloy sheets, due to the material properties of Invar alloy itself, uneven stress distribution and local deformation are very likely to occur during the process of reducing the thickness to 50μm or less through multiple rolling passes. These problems directly lead to the difficulty in accurately controlling the flatness and warpage of the finished mask, making it impossible to meet the micron-level flatness requirements of high-end display devices. This seriously restricts the application of ultra-thin metal masks in the high-end display field, and there is room for improvement. Summary of the Invention

[0005] The purpose of this application is to provide a manufacturing process and winding mechanism for ultra-thin metal photomasks, which solves the problem in the above-mentioned related technologies that uneven stress and easy deformation during ultra-thin rolling of Invar alloys make it difficult to meet the flatness and warpage of the photomasks, thus failing to meet the requirements of high-end display devices.

[0006] The technical solution for the production process of an ultrathin metal mask provided in this application is as follows: A manufacturing process for an ultrathin metal photomask includes the following steps: Step 1, material selection: 40-micron thick Invar alloy strip is selected as the raw material; Step 2, heat treatment: The Invar alloy strip undergoes preheating, high-temperature heating, and cooling treatments sequentially, which removes stress, degreases, and activates the surface; Step 3, primary grinding: The Invar alloy is processed using grinding equipment to reduce its thickness from 40 microns to 30 microns; Step 4, heat treatment: The process parameters of Step 2 are repeated to remove the stress generated by the secondary grinding, ensuring the flatness of the Invar alloy strip and preventing deformation during subsequent processing; Step 5, secondary grinding: The Invar alloy is processed using grinding equipment to reduce its thickness from 30 microns to 20 microns; Step 6, passivation treatment. Step 1: Passivation equipment is used to treat the surface of the Invar alloy strip, reducing smoothness and increasing roughness, stabilizing the 0.08-micron roughness, and forming a uniformly suppressed matte surface; Step 7: Cleaning: Megasonic cleaning is used in conjunction with ultrapure water rinsing to remove passivation residue and impurities, leaving no residue and causing no damage, ensuring surface cleanliness; Step 8: Film application: In a clean environment, a low-adhesion PE electrostatic protective film is applied to avoid surface scratches and dust accumulation, ensuring bubble-free application; Step 9: Winding: A winding mechanism is used to wind the Invar alloy strip, controlling the winding tension evenly to prevent warping and deformation; Step 10: Slicing: According to the finished product size requirements, the strip is precisely sliced, with burr-free and deformation-free cuts, ensuring edge flatness.

[0007] By adopting the above technical solution, this production process uses the following steps for Invar alloy 4J36: (I) Roll-to-roll continuous grinding to remove surface defects of the raw material; thinning to the required thickness: up to 0.012mm. (II) Heat treatment to remove internal stress and oil stains from the raw material, laying the foundation for grinding processing. Two grinding processes precisely control the thickness and avoid surface defects. (III) Ultrasonic passivation to reduce gloss and increase roughness. (IV) Cleaning, film application, uniform winding, and precision slicing further prevent scratches and warping of the finished product, ensuring the flatness and dimensional accuracy of the mask plate meet the micron-level requirements of high-end display devices, improving the finished product qualification rate and product quality. The first heat treatment is to remove the mechanical stress of the raw material; the second heat treatment is to remove the internal stress generated after grinding to ensure the shape of the plate (to keep the plate flat for subsequent processing). Because the surface of the plate has high gloss and low roughness after grinding, which is not conducive to subsequent product production, ultrasonic passivation is used to reduce gloss and increase roughness (commonly known as matte finishing).

[0008] Optionally, between steps five and six, at least one round of repeated heat treatment and grinding process is included: first, the Invar alloy strip after secondary grinding is heat treated with the same process parameters as in step two to eliminate grinding stress, and then the alloy strip is further thinned to the target thickness using grinding equipment, and then it enters the passivation treatment in step six.

[0009] By adopting the above technical solution, the number of heat treatment and grinding repetitions can be flexibly increased according to the actual target thickness requirements, achieving a gradual reduction in the thickness of the Invar alloy strip and avoiding stress concentration caused by excessive grinding in a single cycle. Simultaneous heat treatment after each grinding cycle can promptly eliminate newly generated stress, effectively ensuring the flatness of the alloy strip and preventing deformation and warping during processing. Through segmented grinding, surface defects in the raw material are removed, and the strip is thinned to the required thickness, adapting to the production needs of ultra-thin photomasks (for example, further thinning the alloy strip to the target thickness using grinding equipment (e.g., grinding the thickness from 40 micrometers to 20 micrometers, 15 micrometers, or 12 micrometers), with roll-to-roll continuous grinding using the applicant's self-developed production line), further improving product precision and adapting to the high-end photomask materials required for more advanced display applications.

[0010] A winding mechanism for the production of ultra-thin metal photomasks, applicable to step nine of the ultra-thin metal photomask production process, is used to wind up the Invar alloy strip after film application. It includes a base, a limiting guide rail fixed to the base, two winding boxes slidably mounted on the limiting guide rail above the base, and a driving component fixed to drive the winding boxes to reciprocate along the length of the limiting guide rail. Winding rollers are rotatably mounted on the sides of the two winding boxes that are close to each other, along the length of the limiting guide rail. A power component is fixed inside the winding boxes to drive the winding rollers to rotate around their own axes. Installation openings are provided on the sides of the two winding boxes that are far apart from each other, and a detachable door is installed on each side.

[0011] By adopting the above technical solution, and utilizing the sliding switching of dual winding boxes along the limiting guide rails, continuous winding operations can be achieved. When one winding box completes winding and unloading, the other side can quickly connect for winding, significantly shortening the process interval and improving production efficiency. The drive and power components respectively drive the movement of the winding box and the rotation of the winding roller, ensuring stability during the winding process. The detachable box door facilitates equipment inspection and maintenance. The overall structural design is reasonable, effectively preventing warping and deformation of the alloy strip during the winding process, ensuring winding accuracy and product quality.

[0012] Optionally, the top surface of the base is provided with a receiving seat that can reciprocate along the length direction of the limiting guide rail. The receiving seat moves to below the winding roller when the winding roller winds the alloy strip.

[0013] By adopting the above technical solution, the receiving seat can move synchronously with the take-up roller along the limiting guide rail, and support the alloy strip below the take-up roller during winding, effectively avoiding the sagging phenomenon caused by the thinness of the alloy strip itself, preventing deformation, warping and surface scratches caused by sagging, and further ensuring the flatness during the winding process.

[0014] Optionally, the upper edge of the door is rotatably connected to the upper edge of the mounting opening, and the door can be flipped to a vertically downward closed state and fixed, and flipped upward to an open state that abuts against and is parallel to the top surface of the winding box; several air inlets are provided on the vertical outer surface of the winding box, and clearance notches are provided at the lower part and the lower part of the door when it is closed, and a cooling fan is fixed on the inner wall of the clearance notch.

[0015] By adopting the above technical solutions, the flip-up door design balances equipment sealing and ease of maintenance. When closed, it ensures the cleanliness of the inside of the winding box, while opening facilitates maintenance and unloading operations for staff. The air inlet of the winding box works in conjunction with the cooling fan at the notch in the door to create internal and external airflow circulation, which can promptly dissipate the heat generated by the drive and power components, preventing high temperatures from affecting the stability of equipment operation and the performance of the alloy strip. At the same time, it prevents heat from causing deformation of the alloy strip, ensuring smooth winding.

[0016] Optionally, the rewind box is provided with a flexible collection bag on its exterior. When the box door is open, a connecting plate is rotatably connected to one side edge of the top surface along the length of the limiting guide rail. The rotation axis of the connecting plate is parallel to the length of the limiting guide rail. The side of the connecting plate away from the box door is the connecting surface. When the box door is open, the connecting plate can be flipped outward to an unfolded state where the connecting surface is flush with the vertical surface of the rewind box. When the box door is closed, it can be rotated inward to a folded state where the connecting surface is perpendicular to the inner side of the box door. The two edges of the connecting surface are connected when the connecting plate is unfolded. In the retracted state, a vertically downward-facing intermediate rod is rotatably mounted, with the rotation surface of the intermediate rod parallel to the connecting surface. The door is equipped with a locking device to limit the rotation of the intermediate rod in this state. At this time, a receiving rod is fixed to the lower end of the intermediate rod in a horizontal direction away from the winding box, and a limiting device is fixed to the top surface of the receiving rod. The two sides of the opening of the flexible collection bag are locked and limited by the limiting devices on the two receiving rods respectively. When the connecting plate is in the retracted state, the two intermediate rods rotate to a coaxial state in opposite directions, and the two receiving plates abut against the inner side of the door. At this time, the limiting device and the locking device are detachably locked to each other.

[0017] By adopting the above technical solution, when the equipment is running normally, the connecting plate, intermediate rod and other components are folded and stored inside the box door, which does not occupy external space and does not interfere with the winding operation. When the machine is stopped for maintenance, the structure can be quickly unfolded and the flexible collection bag can be fixed for temporary storage of maintenance debris, preventing debris from contaminating or scratching the ultra-thin alloy strip or damaging equipment components, ensuring the cleanliness of the maintenance process, and indirectly improving the finished product qualification rate. At the same time, the structural design is flexible and the operation is convenient.

[0018] Optionally, the limiting member includes a limiting rod with one end rotatably connected to the inner side of the receiving rod facing the corner of the intermediate rod, and an elastic torsion spring disposed at the junction of the limiting rod and the receiving rod. The elastic torsion spring is used to drive the limiting rod to rotate towards the receiving rod.

[0019] By adopting the above technical solution, the limiting rod, in conjunction with the elastic torsion spring, enables rapid clamping and fixation of the flexible collection bag opening. The elastic torsion spring continuously provides clamping force, ensuring the flexible collection bag is securely fixed and preventing debris from falling and contaminating the equipment or alloy strip. Simultaneously, the limiting rod can rotate flexibly to adapt to the switching between the unfolded and retracted states of the flexible collection bag. The structure is simple and highly practical, requiring no additional complex operations to complete fixing and unlocking, improving maintenance efficiency and ensuring the standardization of the winding and maintenance process.

[0020] Optionally, the end face of the limiting rod away from the receiving rod is coaxially rotatably connected to an elastic hook with elastic shortening performance, and the end face of the receiving rod away from the intermediate rod is provided with a first hanging groove for the elastic hook to be engaged.

[0021] By adopting the above technical solution, the elastic hook has the property of elastic shortening and can be flexibly inserted into the first hanging groove to lock the limit rod in a clamped state, further strengthening the fixing effect of the flexible collection bag and preventing the flexible collection bag from loosening and causing debris to fall.

[0022] Optionally, the locking component includes a locking plate rotatably mounted on the top surface of the door when it is in the open state. The rotation axis of the locking plate is parallel to the rotation axis of the connecting plate. When the door is closed, the locking plate rotates away from the connecting plate to a retracted state parallel to the door. When the door is open, it rotates towards the connecting plate to an extended state covering the connecting plate. When the locking plate is in the extended state, a locking notch is provided on the bottom surface for the connecting plate to be inserted. A locking groove is provided on the inner wall of the locking notch, and the upper edge of the middle rod is inserted into the locking groove. When the locking plate is in the retracted state, a second hanging groove is provided on the side away from the connecting plate, and the elastic hook can be rotated and adjusted and inserted into the second hanging groove.

[0023] By adopting the above technical solution, the locking plate can flexibly switch between retracted and extended states. When extended, the locking notch and locking slot fix the intermediate rod, ensuring the stability of the flexible collection bag when unfolded. When retracted, it can cooperate with the elastic hook of the limiting component to lock the connecting plate, intermediate rod, and other components, preventing component shaking from interfering with the winding operation. The cooperation of the second hanging slot and the elastic hook further improves the stability of the retracted state. The overall structure achieves precise limiting of component retraction and unfolding, making operation convenient and improving the convenience of equipment operation and maintenance.

[0024] Optionally, a plurality of filter holes are provided on the inner wall of the locking notch, and the plurality of filter holes face the cooling fan when the elastic hook is engaged in the second hanging slot.

[0025] By adopting the above technical solution, the filter holes face the cooling fan when the elastic hook is engaged in the second hanging slot. This effectively blocks external dust and impurities from entering the winding box through the clearance opening without affecting the ventilation and heat dissipation of the cooling fan, thus ensuring a clean environment inside the winding box.

[0026] In summary, this application includes the following beneficial technical effects: In this application, the production process gradually thins the Invar alloy strip to the target size through segmented grinding combined with two heat treatments, effectively solving the problems of uneven stress and easy deformation caused by rolling in related technologies. The initial heat treatment removes internal stress and oil stains from the raw material, laying the foundation for processing. The two grinding processes precisely control the thickness and avoid surface defects. Subsequent passivation and cleaning ensure surface roughness and cleanliness. Film lamination, uniform winding, and precision slicing further prevent scratches and warping of the finished product, ensuring that the flatness and dimensional accuracy of the mask meet the micron-level requirements of high-end display devices, thereby improving the yield rate and product quality. Attached Figure Description

[0027] Figure 1 This is a process flow diagram of Embodiment 1 of this application; Figure 2 This is a schematic diagram illustrating the installation and assembly of the base and winding box in Embodiment 3 of this application; Figure 3 This is a partial cross-sectional view of Embodiment 3 of this application, illustrating the installation and assembly of the winding box and the box door. Figure 4 This is a schematic diagram illustrating the installation and assembly of the storage components in Embodiment 3 of this application; Figure 5 This is a cross-sectional structural diagram illustrating the installation and cooperation of the connecting plate and the intermediate rod in Embodiment 3 of this application; Figure 6 This is a partial cross-sectional view of Embodiment 3 of this application illustrating the installation and fit of the limiting component; Figure 7 This is a partial cross-sectional structural diagram illustrating the installation and mating of the locking component in Embodiment 3 of this application.

[0028] In the diagram, 1. Base; 11. Limiting guide rail; 12. Drive component; 13. Slide rail; 2. Rewinding component; 21. Rewinding box; 211. Mounting port; 212. Air inlet; 22. Box door; 221. Clearance notch; 23. Rewinding roller; 24. Power component; 25. Cooling fan; 3. Support seat; 31. Moving wheel; 4. Storage assembly; 41. Flexible collection bag; 42. Connecting plate; 421. Connecting surface; 43. Intermediate rod; 44. Supporting rod; 441. First hanging slot; 5. Limiting component; 51. Limiting rod; 52. Elastic hook; 6. Locking component; 61. Locking plate; 611. Locking notch; 612. Locking slot; 613. Second hanging slot; 614. Filter hole. Detailed Implementation

[0029] The present application will be further described in detail below with reference to all the accompanying drawings. Example

[0030] Reference Figure 1 A manufacturing process for an ultrathin metal photomask includes the following steps: Step 1, Material Selection: Select Invar alloy 4J36 strip with a thickness of 40 micrometers as the raw material. During the selection process, use dust-free tools to hold the strip and avoid direct contact between fingers and the alloy strip surface to prevent oil and fingerprint contamination.

[0031] Step two, heat treatment: The Invar alloy strip is fed into the heat treatment equipment and undergoes preheating, high-temperature heating, and cooling treatment in sequence. This process can effectively remove the internal stress that originally existed in the Invar alloy strip before the rolling process, while removing residual oil stains on the surface, activating the surface of the alloy strip, and laying the foundation for the subsequent grinding process.

[0032] Step 3, primary grinding: The heat-treated Invar alloy strip is ground using precision grinding equipment to precisely reduce the thickness of the alloy strip to the specified size (grinding the thickness from 40 micrometers to 30 micrometers). Protective measures are taken during the grinding process to prevent oxidation of the alloy strip surface.

[0033] Step 4, heat treatment: Repeat the process in Step 2 to perform a second heat treatment on the Invar alloy strip after the first grinding. The purpose is to completely eliminate the new stress generated during the first grinding process, ensure the flatness of the Invar alloy strip, and avoid deformation and warping in subsequent processes.

[0034] Step 5, Secondary Grinding: Fine grinding is performed using precision grinding equipment to further reduce the thickness of the Invar alloy strip to the target size (grinding the thickness from 30 micrometers to 20 micrometers). After grinding, the surface of the alloy strip is free of scratches, pits, and other defects. The final ultra-thin metal mask is made of Invar alloy 4J36 with a thickness of 20 μm (0.02 millimeters).

[0035] Step Six, Passivation Treatment: The Invar alloy strip after secondary grinding is sent to a passivation device for treatment to ensure that the surface of the alloy strip is in full contact with the passivating agent. This process can reduce the surface smoothness of the alloy strip, increase the surface roughness, form a uniform matte surface, effectively improve the adhesion of subsequent photoresist, and prevent photoresist from falling off.

[0036] Step 7, Cleaning: The passivated Invar alloy strip is cleaned using a mega-sonic cleaning device, combined with ultrapure water rinsing, to thoroughly remove surface passivation residue and impurities, ensuring that the alloy strip surface is free of residue and damage after cleaning, meeting the requirements of subsequent processes.

[0037] Step 8, Applying the film: In a clean environment, apply the low-tack PE electrostatic protective film to both sides of the Invar alloy strip, ensuring that the application is free of bubbles and wrinkles, effectively preventing the alloy strip surface from being scratched or attracting dust.

[0038] Step 9, winding: The Invar alloy strip after film application is wound up using a winding mechanism. The winding tension is controlled to be uniform, and the flatness is monitored in real time to prevent the alloy strip from warping or deforming, which facilitates the subsequent slicing process.

[0039] Step 10, Slicing: According to the size requirements of the finished product, use precision slicing equipment to accurately slice the roll material to ensure that the cut is free of burrs and deformation. After slicing, conduct an appearance inspection on the finished product and reject unqualified products.

[0040] The implementation principle of this application embodiment is as follows: The material sourcing process employs dust-free operations to prevent raw material contamination, laying a clean foundation for subsequent processing. Two heat treatments eliminate internal stress in the raw material and new stress generated during grinding, respectively, reducing the risk of deformation at its source. Segmented grinding gradually thins the Invar alloy strip to the target size, with protective measures preventing oxidation and surface defects. Passivation treatment improves photoresist adhesion, and the cleaning process ensures surface cleanliness. Film lamination and uniform winding prevent scratches and warping of the finished product, while precision slicing and inspection ensure accurate dimensions and no defects. The overall process collaboratively solves the problems of uneven stress and easy deformation in the ultra-thin processing of Invar alloy, meeting the precision requirements of high-end display devices. Example

[0041] The difference between this application and Embodiment 1 is that, between steps five and six, there is an additional heat treatment and grinding process: that is, the production process is not limited to two grinding operations, and the heat treatment and grinding process can be repeated multiple times according to actual needs; specifically as follows: first, the Invar alloy strip after secondary grinding is heat-treated using the same process parameters as in step two to eliminate grinding stress, and then the alloy strip is further thinned to the target thickness using grinding equipment (for example, grinding the thickness from 20 micrometers to 15 micrometers, and then further grinding from 15 micrometers to 12 micrometers). The segmented grinding is carried out using the production line developed by our applicant, and then the strip enters the passivation treatment in step six.

[0042] The implementation principle of this application embodiment is as follows: To address the need for thinner photomasks, repeated heat treatment and grinding processes are used to gradually reduce the thickness, avoiding stress concentration caused by excessive grinding in a single cycle. Simultaneous heat treatment after each grinding cycle promptly eliminates newly generated internal stress, ensuring the flatness of the Invar alloy strip and preventing deformation and warping.

[0043] This process is flexible and can adjust the number of repetitions according to the actual target thickness. It can adapt to the needs of ultra-thin sizes such as 12 micrometers, and through precise stress control, it can ensure that the surface of the finished product is defect-free and meets the flatness standard, making it suitable for high-precision high-end display device applications. Example

[0044] Reference Figure 2 , Figure 3 and Figure 4 The difference between this embodiment and Embodiment 1 is that a winding mechanism for the production of ultra-thin metal photomasks is provided, which is applicable to the winding process of step nine of the ultra-thin metal photomask production process, and is used to wind up the Invar alloy strip after film application; it includes a base 1, a limiting guide rail 11 fixed on the base 1, and a winding component 2 provided above the base 1, wherein the winding component 2 includes two winding boxes 21 slidably mounted on the limiting guide rail 11, and a driving component 12 fixed above the base 1 for driving the winding boxes 21 to slide back and forth along the length direction of the limiting guide rail 11; winding rollers 23 are rotatably mounted on the sides of the two winding boxes 21 that are close to each other along the length direction of the limiting guide rail 11, and a power component 24 is fixed inside the winding box 21 to drive the winding rollers 23 to rotate around their own axis; The drive component 12 is a conventional motor screw structure mounted on the base 1, and the power component 24 is a power motor fixed on the inner wall of the winding box 21. Both will not be described in detail here. The two winding boxes 21 have mounting openings 211 on their mutually distant sides, and can be detachably mounted with boxes 22. The upper edge of the boxes 22 is rotatably connected to the upper edge of the opening of the mounting opening 211. The boxes 22 can be flipped to a vertically downward closed state and fixed by a door lock, and flipped upward to an open state that abuts against and is parallel to the top surface of the winding box 21. Several air inlets 212 are provided on the vertical outer surface of the winding box 21. The lower part and the lower part of the door 22 when it is closed are provided with clearance notches 221. A cooling fan 25 with a small motor is fixed on the inner wall of the clearance notch 221. When the door 22 is closed, the cooling fan 25 can be activated to accelerate the internal and external flow of air, so that external air enters into the winding box 21 from the air inlets 212, and the original internal air is discharged from the installation location of the cooling fan 25, thereby improving the corresponding heat dissipation performance and ensuring the normal operation of the drive component 12.

[0045] Reference Figure 2 The top surface of the base 1 is provided with a receiving seat 3 that can slide back and forth along the length direction of the limiting guide rail 11. The top surface of the base 1 is fixed with a slide rail 13 whose length direction is parallel to the length direction of the limiting guide rail 11. The bottom surface of the receiving seat 3 is fixed with four moving wheels 31 that slide in cooperation with the slide rail 13. The receiving seat 3 supports the alloy strip during winding, further preventing the strip from sagging and deforming during the winding process. After the winding roller 23 in one winding box 21 completes winding, the operator can move the winding box 21 backward and remove it from the winding position by using the corresponding drive component 12 to unload the material. At this time, the other winding box 21 can be quickly moved to the designated winding position by the drive component 12 to immediately take over the winding work without interrupting the overall production process. This alternating working mode of the two winding boxes 21 significantly shortens the interval time of the winding process.

[0046] Reference Figure 4 and Figure 5 The rewind box 21 is provided with a storage component 4 on its exterior. The storage component 4 includes a flexible collection bag 41. When the box door 22 is in the open state, a connecting plate 42 is rotatably connected to one side edge of the top surface along the length direction of the limiting guide rail 11. The rotation axis of the connecting plate 42 is parallel to the length direction of the limiting guide rail 11. The side of the connecting plate 42 away from the box door 22 is the connecting surface 421. When the box door 22 is in the open state, the connecting plate 42 can be flipped outward to the unfolded state where the connecting surface 421 is flush with the vertical surface of the rewind box 21. When the box door 22 is in the closed state, the connecting plate 42 can be rotated inward to the storage state where the connecting surface 421 is perpendicular to the inner side of the box door 22. When the connecting plate 42 is in the unfolded state, a vertically downward intermediate rod 43 is rotatably installed on both sides of the connecting surface 421. The rotating surface of the intermediate rod 43 is parallel to the connecting surface 421. The door 22 is provided with a locking piece 6 to limit the rotation of the intermediate rod 43 in this state. At this time, the lower end of the intermediate rod 43 is fixed with a receiving rod 44 in the horizontal direction away from the winding box 21. A limiting piece 5 is fixed on the top surface of the receiving rod 44. When the winding box 21 is in normal use, the connecting plate 42 is rotated to the storage state in advance, the two intermediate rods 43 are rotated to the coaxial state, the two receiving plates abut against the inner side of the box door 22 at this time, the limiting member 5 and the locking member 6 are detachably locked to each other at this time, and finally the box door 22 is adjusted to the closed state, so that the corresponding storage component 4 is folded and placed on the inner side of the box door 22 at this time. When the winding box 21 is stopped for maintenance, the box door 22 is flipped to the open state beforehand, and then the interlock between the limiting member 5 and the locking member 6 is released. Then, the connecting plate 42 is rotated to the unfolded state, and the middle rod 43 is rotated to the vertical downward state. Then, the two sides of the opening of the flexible collection bag 41 are locked and limited by the limiting members 5 on the two receiving rods 44. At this time, the debris during maintenance can be temporarily stored in the flexible collection bag 41.

[0047] Reference Figure 6The limiting member 5 includes a limiting rod 51 with one end rotatably connected to the inner side of the corner of the receiving rod 44 toward the middle rod 43, and an elastic torsion spring (not shown in the figure) provided at the junction of the limiting rod 51 and the receiving rod 44. The elastic torsion spring is used to drive the limiting rod 51 to rotate toward the receiving rod 44. An elastic hook 52 with an internal spring and elastic shortening performance is coaxially rotatably connected to the end face of the limiting rod 51 away from the receiving rod 44. The end face of the receiving rod 44 away from the intermediate rod 43 is provided with a first hanging groove 441 for the elastic hook 52 to be inserted. When the limiting rod 51 clamps the edge of the flexible collection bag 41, the elastic hook 52 is inserted into the first hanging groove 441.

[0048] Reference Figure 6 and Figure 7 The locking component 6 includes a locking plate 61 rotatably mounted on the top surface of the door 22 when it is in the open state. The rotation axis of the locking plate 61 is parallel to the rotation axis of the connecting plate 42. When the door 22 is closed, the locking plate 61 rotates in a direction away from the connecting plate 42 to a retracted state parallel to the door 22. When the door 22 is open, the locking plate 61 rotates in a direction toward the connecting plate 42 to an exposed state covering the connecting plate 42. When the locking plate 61 is in the display state, a locking notch 611 is provided on the bottom surface for the connecting plate 42 to be inserted. A locking groove 612 is provided on the inner wall of the locking notch 611. When the locking plate 61 and the connecting plate 42 are in the display state and the intermediate rod 43 is vertically downward, the upper edge of the intermediate rod 43 is inserted into the locking groove 612, thereby limiting and locking the state of the intermediate rod 43 at this time. The inner wall of the locking notch 611 is provided with several filter holes 614. When the locking plate 61 is in the retracted state, a second hanging groove 613 is provided on the side away from the connecting plate 42. When the locking plate 61 is in the retracted state and the connecting plate 42 is in the stored state, the operator can rotate and adjust the elastic hook 52 and lock it into the second hanging groove 613. At this time, the filter holes 614 face the cooling fan 25 to prevent external impurities from entering the winding box 21 through the clearance notch 221. This achieves elastic interlocking between the locking plate 61 and the limiting rod 51, and also limits and locks the connecting plate 42.

[0049] The implementation principle of this application embodiment is as follows: When the winding box 21 is working normally, the connecting plate 42 flips inward to the storage state, the two intermediate rods 43 rotate towards each other to be coaxial and abut against the inner side of the box door 22, the locking plate 61 rotates to the retracted state, the limiting rod 51 adheres to the receiving rod 44 under the action of the elastic torsion spring, and the elastic hook 52 is engaged in the second hanging groove 613 of the locking plate 61, realizing the elastic interlock between the limiting part 5 and the locking part 6, and at the same time limiting and fixing the connecting plate 42. After the box door 22 is closed, the storage component 4 is folded inside the box door 22, which does not occupy external space or interfere with the operation of winding-related components. Moreover, the filter hole 614 on the locking plate 61 faces the cooling fan 25, which can prevent external impurities from entering the box through the clearance notch 221, ensuring the cleanliness of the equipment and avoiding impurities from affecting the winding accuracy of the alloy strip.

[0050] During shutdown maintenance, first flip the box door 22 to the open position to release the interlock between the elastic hook 52 and the second hanging slot 613. Then, rotate the locking plate 61 to the extended position and rotate the connecting plate 42 to the unfolded position so that it is flush with the vertical surface of the winding box 21. Rotate the middle rod 43 to the vertical downward position so that its upper edge is engaged in the locking slot 612 to achieve a limit. Then, rotate the limiting rod 51 to clamp the opening edge of the flexible collection bag 41. The elastic hook 52 is engaged in the first hanging slot 441 of the receiving rod 44 for fixation. This can temporarily store maintenance debris to prevent debris from contaminating, scratching the ultra-thin alloy strip, or damaging equipment parts.

[0051] The embodiments described in this specific implementation are preferred embodiments of this application and are not intended to limit the scope of protection of this application. Identical components are represented by the same reference numerals. Therefore, all equivalent changes made to the structure, shape, and principle of this application should be covered within the scope of protection of this application.

Claims

1. A manufacturing process for an ultrathin metal photomask, characterized in that, Includes the following steps: Step 1, Material Selection: The raw material is a 40-micron thick Invar alloy strip; Step 2, heat treatment: The Invar alloy strip is subjected to preheating, high-temperature heating and cooling treatment in sequence, which has the functions of stress removal, degreasing and surface activation. Step 3, one-time grinding: The Invar alloy is processed using grinding equipment to reduce its thickness from 40 micrometers to 30 micrometers; Step 4, heat treatment: Repeat the process parameters of step 2 to remove the stress generated by grinding for the second time, ensure the flatness of the Invar alloy strip and avoid deformation in subsequent processing; Step 5, Secondary Grinding: Use grinding equipment to process the Invar alloy, reducing the thickness from 30 micrometers to 20 micrometers; Step 6, passivation treatment: The surface of the Invar alloy strip is treated using passivation equipment to reduce the smoothness, increase the roughness, stabilize the 0.08 micrometer roughness, and form a uniformly suppressed matte surface; Step 7, Cleaning: Megasonic cleaning is used in conjunction with ultrapure water rinsing to remove passivation residue and impurities, leaving no residue and causing no damage, ensuring surface cleanliness; Step 8, Applying the film: In a clean environment, apply the low-tack PE electrostatic protective film to avoid surface scratches and dust accumulation, ensuring a bubble-free application. Step 9, winding: The Invar alloy strip is wound up using a winding mechanism to control the winding tension evenly and prevent warping and deformation; Step 10, Slicing: Slice precisely according to the required size of the finished product, ensuring that the cut is free of burrs and deformation, and that the edges are flat.

2. The manufacturing process for an ultrathin metal mask according to claim 1, characterized in that, Between steps five and six, there is at least one round of repeated heat treatment and grinding process: first, the Invar alloy strip after secondary grinding is heat treated with the same process parameters as in step two to eliminate grinding stress, and then the alloy strip is further thinned to the target thickness by grinding equipment, and then it enters the passivation treatment in step six.

3. A winding mechanism for the production of ultra-thin metal photomasks, characterized in that, The winding process of step nine in the production process of the ultra-thin metal mask plate according to claim 1 is used to wind up the Invar alloy strip after film application; it includes a base (1) and a limiting guide rail (11) fixed on the base (1). Two winding boxes (21) are slidably installed on the limiting guide rail (11) above the base (1), and a driving component (12) is fixedly provided to drive the winding box (21) to slide back and forth along the length direction of the limiting guide rail (11). Two take-up boxes (21) are mounted with take-up rollers (23) on the sides of the two take-up boxes (21) that are close to each other, and a power component (24) that drives the take-up rollers (23) to rotate around their own axis is fixed inside the take-up box (21). The two take-up boxes (21) are provided with mounting openings (211) on the sides of the two take-up boxes (21) that are far apart from each other, and a box door (22) is detachably installed.

4. A winding mechanism for the production of ultra-thin metal photomasks according to claim 3, characterized in that, The base (1) has a receiving seat (3) that can slide back and forth along the length of the limiting guide rail (11) on its top surface. The receiving seat (3) moves to the bottom of the winding roller (23) when the winding roller (23) winds up the alloy strip.

5. A winding mechanism for the production of ultra-thin metal photomasks according to claim 3, characterized in that, The upper edge of the box door (22) is rotatably connected to the upper edge of the opening of the mounting port (211). The box door (22) can be flipped to a vertically downward closed state and fixed, and flipped upward to an open state that abuts against and is parallel to the top surface of the winding box (21). The winding box (21) has several air inlets (212) on its vertical outer surface. The lower part and the lower part of the box door (22) in the closed state are provided with clearance notches (221), and a cooling fan (25) is fixed on the inner wall of the clearance notch (221).

6. A winding mechanism for the production of ultra-thin metal photomasks according to claim 5, characterized in that, The winding box (21) is provided with a flexible collection bag (41) on the outside. When the box door (22) is in the open state, a connecting plate (42) is rotatably connected to one side edge of the top surface along the length direction of the limiting guide rail (11). The rotation axis of the connecting plate (42) is parallel to the length direction of the limiting guide rail (11). The side of the connecting plate (42) away from the box door (22) is the connecting surface (421). When the box door (22) is in the open state, the connecting plate (42) can be flipped outward to the unfolded state where the connecting surface (421) is flush with the vertical surface of the winding box (21), and when the box door (22) is in the closed state, it can be rotated inward to the storage state where the connecting surface (421) is perpendicular to the inner side of the box door (22). When the connecting plate (42) is in the unfolded state, vertically downward intermediate rods (43) are rotatably installed on both sides of the connecting surface (421). The rotating surface of the intermediate rod (43) is parallel to the connecting surface (421). The door (22) is provided with a locking member (6) to limit the rotation of the intermediate rod (43) in this state. At this time, the lower end of the intermediate rod (43) is fixed with a receiving rod (44) in the horizontal direction away from the winding box (21). A limiting member (5) is fixed on the top surface of the receiving rod (44). The two sides of the opening of the flexible collection bag (41) are locked and limited by the limiting members (5) on the two receiving rods (44). When the connecting plate (42) is in the retracted state, the two intermediate rods (43) rotate to the coaxial state. At this time, the two receiving plates abut against the inner side of the door (22). At this time, the limiting member (5) and the locking member (6) are mutually detachable and locked.

7. A winding mechanism for the production of ultra-thin metal photomasks according to claim 6, characterized in that, The limiting member (5) includes a limiting rod (51) with one end rotatably connected to the inner side of the corner of the receiving rod (44) facing the middle rod (43), and an elastic torsion spring provided at the junction of the limiting rod (51) and the receiving rod (44). The elastic torsion spring is used to drive the limiting rod (51) to rotate towards the receiving rod (44).

8. A winding mechanism for the production of ultra-thin metal photomasks according to claim 7, characterized in that, The limiting rod (51) is coaxially rotatably connected to an elastic hook (52) with elastic shortening performance on the end face away from the receiving rod (44), and a first hanging groove (441) for the elastic hook (52) to be inserted is provided on the end face away from the intermediate rod (43).

9. A winding mechanism for the production of ultra-thin metal photomasks according to claim 8, characterized in that, The locking member (6) includes a locking plate (61) rotatably mounted on the top surface of the door (22) in the open state. The rotation axis of the locking plate (61) is parallel to the rotation axis of the connecting plate (42). When the door (22) is closed, the locking plate (61) rotates in a direction away from the connecting plate (42) to a retracted state parallel to the door (22). When the door (22) is open, it rotates in a direction towards the connecting plate (42) to an exposed state covering the connecting plate (42). When the locking plate (61) is in the exhibited state, a locking notch (611) is provided on the bottom surface for the connecting plate (42) to be inserted. A locking slot (612) is provided on the inner wall of the locking notch (611). The upper edge of the middle rod (43) is inserted into the locking slot (612) at this time. When the locking plate (61) is in the retracted state, a second hanging slot (613) is provided on the side away from the connecting plate (42). The elastic hook (52) can be rotated and adjusted and inserted into the second hanging slot (613) at this time.

10. A winding mechanism for the production of ultra-thin metal photomasks according to claim 9, characterized in that, The inner wall of the locking notch (611) is provided with a plurality of filter holes (614), which face the cooling fan (25) when the elastic hook (52) is engaged in the second hanging groove (613).

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