A conveying tray, a tray conveying machine, and a plate grinding system

Abstract

The present application provides a kind of conveying tray, tray conveying machine and plate grinding system, it is related to plate surface grinding equipment technical field, including: disc body;Suction mechanism;Clamping mechanism, clamping mechanism includes first clamping plate that is oppositely active arranged on disc body, first clamping plate side is provided with drive assembly;Spray mechanism, spray mechanism includes gas container, gas container and first clamping plate are oppositely connected, first clamping plate is provided with first gas jet hole, first gas jet hole and gas container are oppositely communicated, when first clamping plate moves in the direction of being close to the direction of being clamped piece, at least part of gas in gas container is extruded and is discharged from first gas jet hole;By this kind of setting, the surface of the clamped piece is formed in the process of preliminary clamping and is cleaned Sweep, clean the waste chip or other sundries attached to the surface of the clamped piece, on the other hand, clamping mechanism and suction mechanism constitute two-level fixed structure, the fixing firmness of the clamped piece is higher, guarantee subsequent machining precision.

Description

Technical Field

[0001] This invention relates to the field of plate surface grinding equipment, and more specifically, to a pallet conveyor, a pallet conveyor, and a plate grinding system. Background Technology

[0002] With the rapid development of industries such as display panels, integrated circuits, high-end optical devices and semiconductor lighting, extremely high requirements have been placed on the surface flatness and roughness of core substrate materials such as glass, silicon wafers, sapphire, and precision ceramics. Based on this, higher precision grinding and polishing production lines are needed to meet production demands.

[0003] In existing grinding and polishing production lines, substrates are fixed to pallets on pallet conveyors by adsorption. The pallet conveyors then transport the substrates to various workstations for processing. However, on the one hand, fixing the substrates by adsorption alone is not secure enough, especially for larger substrates. On the other hand, processing waste or other debris may adhere to the substrate surface, affecting the adsorption strength. Insufficient substrate fixation may lead to positional shifts during transport, affecting the accuracy of subsequent processing. Summary of the Invention

[0004] The present invention aims to solve the problem that insufficient firmness of the tray in fixing the substrate affects the accuracy of subsequent processing.

[0005] To solve the above problems, the present invention provides a transport pallet, comprising: Disk body; An adsorption mechanism is disposed on the disc body; A clamping mechanism, the clamping mechanism including a first clamping plate relatively movably disposed on the disc body, a driving component disposed on one side of the first clamping plate, the driving component driving the first clamping plate to move in a direction close to or away from the clamped part; The spraying mechanism includes a gas container and a first clamping plate connected to each other. The first clamping plate is provided with a first air jet hole, which is in communication with the gas container. When the first clamping plate moves in a direction close to the clamped part, at least part of the gas in the gas container is compressed and discharged from the first air jet hole.

[0006] The transfer pallet provided by this invention has, but is not limited to, the following beneficial effects compared to the prior art: A two-stage fixing structure is formed by the clamping mechanism and the adsorption mechanism to improve the fixing effect on the clamped part. Before fixing the clamped part, the spraying mechanism first blows the surface of the clamped part to reduce the impact of waste or other debris on the adsorption firmness of the adsorption mechanism. Specifically, the clamping process is as follows: the clamped part is first placed on the disk, and then the drive assembly drives the first clamping plate to gradually approach the clamped part. As the first clamping plate approaches the clamped part, part of the gas in the gas container is compressed. Since the first jet hole on the first clamping plate is connected to the gas container, the compressed gas flows to the first jet hole and is discharged. The gas discharged from the first jet hole affects the surface of the clamped part. The surface of the clamped part is blew away to remove debris or other impurities. As the first clamping plate gradually approaches and eventually abuts against the clamped part, it forms an initial clamping. Then, the adsorption mechanism adsorbs the clamped part, forming a secondary clamping and fixing. This arrangement serves two purposes: firstly, the surface of the clamped part is blew away during the initial clamping process to remove debris or other impurities, preventing these impurities from affecting the adsorption firmness of the adsorption mechanism; secondly, the clamping mechanism and the adsorption mechanism form a secondary fixing structure, providing a stronger fixation for the clamped part and reducing the possibility of positional displacement during subsequent transport, thus ensuring processing accuracy.

[0007] Furthermore, the driving assembly includes a baffle fixed to the disc body, an electromagnet is provided on the baffle, the first clamping plate is made of ferromagnetic material and is arranged parallel to the baffle, a return spring is fixed on the first clamping plate, and the end of the return spring away from the first clamping plate is fixed to the baffle.

[0008] Furthermore, the gas container is cylindrical and vertically fixed to the baffle. A piston is movably disposed inside the gas container. A first connecting rod is disposed on the side of the piston near the first clamping plate. The end of the first connecting rod away from the piston is fixed to the first clamping plate. The first connecting rod is a hollow structure that communicates with the first jet hole. The portion of the first connecting rod located inside the gas container is provided with a first air inlet.

[0009] Furthermore, the adsorption mechanism includes an adsorption platform coaxially disposed on the upper part of the disk, and the adsorption platform is provided with adsorption holes.

[0010] Furthermore, a second connecting rod is provided on the side of the piston away from the first connecting rod, and a second clamping plate is fixed to the end of the second connecting rod away from the piston. A second jet hole is provided on the second clamping plate. The second connecting rod is a hollow structure that communicates with the second jet hole, and a second air inlet is provided on the part of the second connecting rod located inside the gas container.

[0011] Furthermore, the adsorption platform is movably mounted on the disc body, and a cylinder is vertically mounted on the disc body. The top of the cylinder is connected to the adsorption platform to drive the adsorption platform to rise and fall.

[0012] Furthermore, a first clamping opening is provided on the side of the first clamping plate away from the baffle, and a first buffer pad is provided on the inner wall of the first clamping opening. The second clamping plate has a second clamping opening on the side near the baffle, and a second buffer pad is provided on the inner wall of the second clamping opening.

[0013] Furthermore, the first clamping plate is provided with first air jet holes on both the upper and lower sides of the first clamping opening; The second clamping plate is provided with second air jet holes on both the upper and lower sides of the first clamping opening.

[0014] The present invention also provides a pallet conveyor, including the pallet conveying described above.

[0015] Since the technological improvements and beneficial effects of pallet conveyors are at least the same as those of pallet transport, pallet conveyors will not be discussed further here.

[0016] The present invention also provides a plate grinding system, including the pallet conveyor described above.

[0017] Since the technological improvements and beneficial effects of the plate grinding system are at least the same as those of the pallet conveyor, the plate grinding system will not be described in detail here. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the pallet conveyor in this application; Figure 2 This is a schematic diagram of the clamping mechanism. Figure 3 This is a schematic diagram of the spraying mechanism; Figure 4 This is a schematic diagram of the structure when the first clamping plate clamps the clamped part. Figure 5 A schematic diagram of the structure when the second clamping plate clamps the clamped part; Figure 6 This is a structural diagram of the application of this invention when using a pallet transporter.

[0019] Explanation of reference numerals in the attached figures: 1. Disc body; 2. Adsorption mechanism; 21. Adsorption stage; 22. Adsorption hole; 23. Cylinder; 24. Guide column; 3. Clamping mechanism; 31. First clamping plate; 32. Drive assembly; 33. Second clamping plate; 311. First air jet; 312. First clamping port; 313. First buffer pad; 321. Baffle; 322. Electromagnet; 323. Return spring; 331. Second air jet; 332. Second clamping port; 333. Second buffer pad; 4. Spraying mechanism; 41. Gas container; 42. Piston; 43. First connecting rod; 44. First air inlet; 45. Second connecting rod; 46. Second air inlet. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this application clearer, specific embodiments of this application are described clearly and completely below with reference to the accompanying drawings. It should be understood that the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments described in this application without creative effort will fall within the scope of protection of this application.

[0021] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used in the specification of this application is for the purpose of describing specific embodiments only and is not intended to limit this application; the terms "comprising," "including," "having," "containing," "comprise," etc., in the specification, claims, and accompanying drawings of this application are open-ended terms. They indicate that a method comprises one or more steps, or an apparatus comprises one or more elements, but do not exclude the inclusion of other steps or elements. The terms "first," "second," etc., in the specification, claims, or accompanying drawings of this application are used to distinguish different objects, not to describe a specific order or hierarchy. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0022] In the description of this application, it should be understood that the terms "upper", "lower", "left", "right", "front", "rear", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0023] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "attachment" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0024] In this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, in this application, the character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0025] See Figures 1 to 4 A conveying pallet according to an embodiment of the present invention includes: Disk body 1; Adsorption mechanism 2 is disposed on disk body 1; The clamping mechanism 3 includes a first clamping plate 31 that is relatively movably disposed on the disc body 1. A driving component 32 is provided on one side of the first clamping plate 31. The driving component 32 drives the first clamping plate 31 to move in a direction that is close to or away from the clamped part. The spraying mechanism 4 includes a gas container 41, which is connected to a first clamping plate 31. The first clamping plate 31 is provided with a first jet hole 311, which is in communication with the gas container 41. When the first clamping plate 31 moves in a direction close to the clamped part, at least part of the gas in the gas container 41 is compressed and discharged from the first jet hole 311.

[0026] In this embodiment, the clamping mechanism 3, together with the adsorption mechanism 2, forms a two-stage fixing structure to improve the fixing effect on the clamped part. Before fixing the clamped part, the spraying mechanism 4 first blows the surface of the clamped part to reduce the influence of waste or other debris on the adsorption firmness of the adsorption mechanism 2. Specifically, the fixing process of the clamped part is as follows: the clamped part is first placed on the disk 1, and then the driving component 32 drives the first clamping plate 31 to gradually approach the clamped part. During the process of the first clamping plate 31 approaching the clamped part, part of the gas in the gas container 41 is compressed. Since the first jet hole 311 on the first clamping plate 31 is relatively connected to the gas container 41, the compressed gas flows to the first jet hole 311 and is discharged. The gas discharged from the first jet hole 311 has an effect on the clamped part. The surface is blown away to remove debris or other impurities adhering to the surface of the clamped part. As the first clamping plate 31 gradually approaches and eventually abuts against the clamped part, it forms an initial clamping of the clamped part. The adsorption mechanism 2 adopts a negative pressure adsorption system, just like in the prior art. Then, the adsorption mechanism 2 adsorbs the clamped part, forming a secondary clamping and fixing. With this setting, on the one hand, the surface of the clamped part is blown away during the initial clamping process to remove debris or other impurities adhering to the surface of the clamped part, avoiding the influence of debris or other impurities on the adsorption firmness of the adsorption mechanism 2. On the other hand, the clamping mechanism 3 and the adsorption mechanism 2 form a secondary fixing structure, which provides a higher fixing firmness for the clamped part, reduces the possibility of positional displacement of the clamped part during subsequent transportation, and ensures processing accuracy.

[0027] Of course, as with the prior art, the disc body 1 in this embodiment has a rectangular plate structure, the adsorption mechanism 2 is located at the center of the disc body 1, and the clamping mechanism 3 is located near the edge of the disc body 1. Specifically, the clamping mechanism 3 is provided at the four edges of the disc body 1, and the clamping mechanism 3 at the two opposite edges of the disc body 1 cooperates to clamp the clamped part.

[0028] Furthermore, referring to Figure 1 and Figure 2 The drive assembly 32 includes a baffle 321 fixed on the disc body 1, an electromagnet 322 is provided on the baffle 321, the first clamping plate 31 is made of ferromagnetic material and is arranged parallel to the baffle 321, and a reset spring 323 is fixed on the first clamping plate 31, with one end of the reset spring 323 away from the first clamping plate 31 fixed on the baffle 321.

[0029] In this embodiment, the baffles 321 can be configured as four elongated strips, and the four baffles 321 are fixed to the disk body 1 near the edge, parallel to the four sides of the disk body 1. Alternatively, the baffles 321 can be configured as a single rectangular frame, and the baffles 321 are coaxially fixed to the disk body 1, with the four sides of the baffles 321 parallel to the four sides of the disk body 1. An electromagnet 322 is fixed on the baffles 321. The first clamping plate 31 is made of a ferromagnetic material that can be attracted by the electromagnet 322. The first clamping plate 31 is specifically arranged parallel to the baffle 321 on which it is located. The specific clamping mechanism 3 clamps the clamped part as follows: the electromagnet 322 is initially energized. At this time, the first clamping plate 31 is located close to the baffle 321 due to the attraction of the electromagnet 322, and the return spring 323 is in a compressed state. After the clamped part is placed on the disc 1, the electromagnet 322 is de-energized, releasing the attraction on the first clamping plate 31. The return spring 323 releases its elasticity, pushing the first clamping plate 31 to move closer to the clamped part. Finally, the first clamping plate 31 contacts the clamped part and clamps it.

[0030] Furthermore, referring to Figures 1 to 3 The gas container 41 is cylindrical and vertically fixed on the baffle 321. A piston 42 is movably disposed inside the gas container 41. A first connecting rod 43 is disposed on the side of the piston 42 near the first clamping plate 31. The end of the first connecting rod 43 away from the piston 42 is fixed on the first clamping plate 31. The first connecting rod 43 is a hollow structure that communicates with the first jet hole 311. The part of the first connecting rod 43 located inside the gas container 41 is provided with a first air inlet 44.

[0031] In this embodiment, the gas container 41 is specifically a cylindrical shape with openings at both ends. The piston 42 is a circular plate shape and is coaxially and movably disposed inside the gas container 41. The piston 42 is specifically slidably disposed along the axial direction of the gas container 41, and the edge of the piston 42 is sealed and fitted against the inner wall of the gas container 41. The end of the piston 42 near the first clamping plate 31 is connected to the first clamping plate 31 through the first connecting rod 43. The first connecting rod 43 specifically and movably passes through the opening at the end of the gas container 41 and is fixedly connected to the first clamping plate 31, so that the first clamping plate 31 can drive the piston 42 to move synchronously. The first connecting rod 43 has a hollow structure and is equipped with a first air inlet 44 on its upper part. The first air inlet 44 is located on the first connecting rod 43 near the piston 42, so that the part of the first air inlet 44 inside the gas container 41, that is, the part inside the gas container 41 between the piston 42 and the first clamping plate 31, communicates with the first jet hole 311 on the first clamping plate 31. The first jet hole 311 is specifically located on the side of the first clamping plate 31 away from the baffle 321. The first clamping plate 31 is a hollow plate that communicates with the first connecting rod 43.

[0032] The specific blowing process of the spraying mechanism 4 on the clamped part is as follows: After the electromagnet 322 is de-energized, when the first clamping plate 31 moves towards the clamped part due to the release of the elastic force of the return spring 323, the first clamping plate 31 drives the piston 42 to move towards the clamped part through the first connecting rod 43. The piston 42 squeezes the gas on the side close to the first clamping plate 31. The gas on this side is squeezed and enters the first connecting rod 43 from the first air inlet 44. Then it flows through the first connecting rod 43 to the first jet hole 311 and is ejected. The ejected gas blows the clamped part.

[0033] In addition, by designing the size of the first air inlet 44, a buffer can be achieved for the movement of the first clamping plate 31 toward the clamped part, so that the first clamping plate 31 approaches the clamped part smoothly, avoiding the first clamping plate 31 from generating a large impact force on the clamped part and causing damage to the clamped part. Specifically, the diameter of the first air inlet 44 can be designed to be smaller than the diameter of the exhaust port required when the piston 42 moves. The first air inlet 44 cannot quickly discharge the compressed gas, causing the air pressure to increase, forming an obstacle to the movement of the piston 42, and thus hindering the rapid movement of the first clamping plate 31. As the compressed gas slowly exits from the first jet port 311 through the first air inlet 44 and the first connecting rod 43, the first clamping plate 31 slowly approaches the clamped part and clamps the clamped part.

[0034] Furthermore, referring to Figure 1 The adsorption mechanism 2 includes an adsorption platform 21 coaxially disposed on the upper part of the disk body 1, and an adsorption hole 22 is provided on the adsorption platform 21.

[0035] As with the prior art, the adsorption mechanism 2 in this embodiment also includes an external negative pressure system, which is in communication with the adsorption holes 22 on the adsorption stage 21 to form a negative pressure at the adsorption holes 22.

[0036] Furthermore, referring to Figures 1 to 3 as well as Figure 5 A second connecting rod 45 is provided on the side of the piston 42 away from the first connecting rod 43. A second clamping plate 33 is fixed to the end of the second connecting rod 45 away from the piston 42. A second jet hole 331 is provided on the second clamping plate 33. The second connecting rod 45 is a hollow structure that is connected to the second jet hole 331. A second air inlet 46 is provided on the part of the second connecting rod 45 located inside the gas container 41.

[0037] In this embodiment, the second connecting rod 45 is specifically coaxially fixed on the side of the piston 42 away from the first connecting rod 43. The end of the second connecting rod 45 away from the piston 42 is movably sealed through the opening at the end of the gas container 41 and then fixedly connected to the second clamping plate 33. The second clamping plate 33 is provided for clamping and fixing large-sized clamped parts. The second clamping plate 33 is also equipped with a second jet hole 331 for blowing the clamped parts during clamping.

[0038] Specifically, the clamping principle of the second clamping plate 33 on the clamped part is as follows: the top of the baffle 321 is higher than the top of the first clamping plate 31, and the top of the second clamping plate 33 is higher than the top of the baffle 321. When the clamped part is larger than the clamping range of the first clamping plate 31, the first clamping plate 31 has difficulty clamping the clamped part. However, when the return spring 323 releases its elastic force and drives the first clamping plate 31 to move, the first clamping plate 31 drives the piston 42 to move. The piston 42 drives the second clamping plate 33 to move in the direction closer to the clamped part through the second connecting rod 45. Finally, the part of the second clamping plate 33 that is higher than the baffle 321 contacts and clamps the clamped part. The second air hole 331 on the second clamping plate 33 blows the clamped part in the same way as the first air hole 311 blows the clamped part, which will not be described again here.

[0039] When placing a large clamped part, it can be placed directly on the top of the baffle 321 to provide initial support for the clamped part. Of course, in order to purge the bottom surface of the clamped part, a notch for gas to pass through is provided at the top of the baffle 321.

[0040] Furthermore, referring to Figure 1 The adsorption platform 21 is movably mounted on the disc body 1. A cylinder 23 is vertically mounted on the disc body 1. The top of the cylinder 23 is connected to the adsorption platform 21 to drive the adsorption platform 21 to rise and fall.

[0041] In this embodiment, since the large-sized clamped part is placed at a relatively high height relative to the disk 1, the cylinder 23 drives the movable adsorption platform 21 to rise and fall to adapt to the adsorption of the large-sized clamped part.

[0042] In addition, in this embodiment, a guide post 24 is slidably inserted on the adsorption stage 21. The lower end of the guide post 24 is fixed on the disk body 1 to guide the lifting and lowering of the adsorption stage 21. At the same time, when the clamped part is initially placed, it can be placed at the top of the guide post 24. The initial height of the adsorption stage 21 is lower than the top of the guide post 24, so that when the clamped part is initially placed, there is a gap between the bottom surface of the clamped part and the adsorption stage 21 for gas to pass through, so as to facilitate purging. Of course, in order to ensure the initial support of the clamped part, multiple guide posts 24 are designed at uniform intervals around the adsorption stage 21.

[0043] Furthermore, referring to Figure 2The first clamping plate 31 is provided with a first clamping opening 312 on the side away from the baffle 321, and a first buffer pad 313 is provided on the inner wall of the first clamping opening 312. The second clamping plate 33 is provided with a second clamping opening 332 on the side near the baffle 321, and a second buffer pad 333 is provided on the inner wall of the second clamping opening 332.

[0044] In this embodiment, the first clamping port 312 and the second clamping port 332 are provided so that the edge of the clamped part can be placed in the first clamping port 312 or the second clamping port 332 during clamping, forming vertical support and lateral clamping, without requiring a large lateral clamping force. If the edge of the clamped part is squeezed and clamped only by the first clamping plate 31 or the second clamping plate 33, a large squeezing and clamping force is required, which may easily damage the clamped part.

[0045] Specifically, the center height of the first clamping opening 312 is the same as the height of the top surface of the guide post 24, so that when the clamped part is initially placed on the top of the guide post 24, the edge of the clamped part is directly facing the first clamping opening 312; the center height of the second clamping opening 332 is the same as the height of the top surface of the baffle 321, so that when the clamped part is initially placed on the top of the baffle 321, the edge of the clamped part is directly facing the second clamping opening 332.

[0046] Of course, when grinding the clamped part later, the first clamping plate 31 or the second clamping plate 33 can be retracted by turning the electromagnet 322 on and off to grind the edge of the clamped part. Specifically, when a certain edge of the clamped part needs to be ground, the electromagnet 322 at that edge is energized, and the electromagnet 322 attracts the first clamping plate 31 at that edge, so that the clamping opening of the first clamping plate 31 or the second clamping plate 33 moves out of the edge of the clamped part, and the grinding can be delayed.

[0047] Furthermore, referring to Figure 2 The first clamping plate 31 is provided with first air jet holes 311 on both the upper and lower sides of the first clamping opening 312; The second clamping plate 33 is provided with second air jet holes 331 on both the upper and lower sides of the first clamping opening 312.

[0048] In this embodiment, the first air jet hole 311 on the upper side of the first clamping plate 31 is used to blow away the upper surface of the clamped part, which facilitates subsequent grinding. The first air jet hole 311 on the lower side of the first clamping plate 31 is used to blow away the lower surface of the clamped part, so that the adsorption mechanism 2 adsorbs the clamped part more firmly.

[0049] Reference Figure 6 An embodiment of the present invention provides a pallet conveyor, which includes the pallet conveyor described above.

[0050] An embodiment of the present invention provides a plate grinding system, including the pallet conveyor described above.

[0051] While the present invention has been disclosed above, its scope of protection is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and all such changes and modifications will fall within the scope of protection of the present invention.

Claims

1. A pallet for transporting goods, characterized in that, include: Disk body (1); Adsorption mechanism (2), wherein the adsorption mechanism (2) is disposed on the disk body (1); The clamping mechanism (3) includes a first clamping plate (31) that is relatively movably disposed on the disc body (1). A driving component (32) is provided on one side of the first clamping plate (31). The driving component (32) drives the first clamping plate (31) to move in a direction close to or away from the clamped part. The spraying mechanism (4) includes a gas container (41) and a first clamping plate (31) connected to each other. The first clamping plate (31) is provided with a first jet hole (311). The first jet hole (311) and the gas container (41) are in communication with each other. When the first clamping plate (31) moves in a direction close to the clamped part, at least part of the gas in the gas container (41) is compressed and discharged from the first jet hole (311).

2. The pallet for transporting goods according to claim 1, characterized in that, The drive assembly (32) includes a baffle (321) fixed on the disc body (1), an electromagnet (322) is provided on the baffle (321), the first clamping plate (31) is made of ferromagnetic material and is arranged parallel to the baffle (321), a return spring (323) is fixed on the first clamping plate (31), and the end of the return spring (323) away from the first clamping plate (31) is fixed on the baffle (321).

3. The pallet conveyor according to claim 2, characterized in that, The gas container (41) is cylindrical and vertically fixed on the baffle (321). A piston (42) is movably disposed inside the gas container (41). A first connecting rod (43) is disposed on the side of the piston (42) near the first clamping plate (31). The end of the first connecting rod (43) away from the piston (42) is fixed on the first clamping plate (31). The first connecting rod (43) is a hollow structure that communicates with the first jet hole (311). The part of the first connecting rod (43) located inside the gas container (41) is provided with a first air inlet (44).

4. The pallet for transporting goods according to claim 3, characterized in that, The adsorption mechanism (2) includes an adsorption platform (21) coaxially disposed on the upper part of the disk body (1), and an adsorption hole (22) is provided on the adsorption platform (21).

5. The pallet for transporting goods according to claim 4, characterized in that, A second connecting rod (45) is provided on the side of the piston (42) away from the first connecting rod (43). A second clamping plate (33) is fixed to the end of the second connecting rod (45) away from the piston (42). A second jet hole (331) is provided on the second clamping plate (33). The second connecting rod (45) is a hollow structure that is connected to the second jet hole (331). A second air inlet (46) is provided on the part of the second connecting rod (45) located inside the gas container (41).

6. The pallet for transporting goods according to claim 5, characterized in that, The adsorption platform (21) is movably mounted on the disc body (1). A cylinder (23) is vertically mounted on the disc body (1). The top of the cylinder (23) is connected to the adsorption platform (21) to drive the adsorption platform (21) to rise and fall.

7. The pallet conveyor according to claim 5, characterized in that, The first clamping plate (31) is provided with a first clamping opening (312) on the side away from the baffle (321), and a first buffer pad (313) is provided on the inner wall of the first clamping opening (312). The second clamping plate (33) is provided with a second clamping opening (332) on the side near the baffle (321), and a second buffer pad (333) is provided on the inner wall of the second clamping opening (332).

8. The pallet for transporting goods according to claim 7, characterized in that, The first clamping plate (31) is provided with first air jet holes (311) on both the upper and lower sides of the first clamping opening (312); The second clamping plate (33) is provided with second air jet holes (331) on both the upper and lower sides of the first clamping port (312).

9. A pallet conveyor, characterized in that, Includes the transport pallet as described in any one of claims 1 to 8.

10. A plate grinding system, characterized in that: Includes the pallet conveyor as described in claim 9.

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