A polishing pad conditioner mechanism

Abstract

The application discloses a polishing pad trimmer mechanism, comprising: a swing arm driving a trimmer disc to move relative to a polishing pad; a power source at least used for driving the swing arm to rotate; further comprising: a torque output mechanism connected with the power source and the swing arm respectively, at least comprising an input part, an output part, a track and an engaging unit, the input part and the output part are coaxially arranged with the swing arm; the engaging unit is circumferentially rotation-stopping matched with the output part, and has a connecting position and a separating position, at the connecting position, the engaging unit engages the input part and the output part to make them rotate synchronously, at the separating position, the input part and the output part are separated from each other; the track has at least a first working section and a second working section, at least part of the engaging unit moves on the track, when it rotates to the first working section, the engaging unit enters the connecting position, when it rotates to the second working section, the engaging unit enters the separating position. In the maintenance and repair range, the swing arm is not affected by the power source, can be freely swung by manpower, and the swinging is labor-saving.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor integrated circuit chip manufacturing technology, and in particular relates to a polishing pad dressing mechanism. Background Technology

[0002] In Chemical Mechanical Planarization (CMP) processes, polishing pads, as the core process material, have a decisive influence on the final surface morphology and processing accuracy of wafers. Their main functions include delivering polishing slurry, effectively removing reaction byproducts, and providing stable mechanical support for the polishing process. To improve the surface condition and lifespan of polishing pads, a specialized dresser is typically used to level and grind their surface. The dresser usually employs a dressing disc mounted at the end to continuously level and grind the polishing pad. Because the dressing disc experiences continuous wear during processing, it needs to be replaced periodically to maintain its dressing performance.

[0003] In existing technologies, the dressing disc swing arm mechanism typically employs a transmission structure of "motor-reducer-dresser swing arm". Due to the torque amplification effect of the reduction mechanism, manually swinging the dressing disc swing arm in a non-moving state will encounter significant resistance, making maintenance operations extremely difficult. Therefore, changing the dressing disc can usually only be done within the confined space of the polishing chamber, which not only restricts operation but also easily introduces contaminants due to personnel intervention, increasing the risk to the cleanliness of the process chamber.

[0004] To address the aforementioned issues, existing technologies propose using a motor to move the swing arm out of the cavity. However, this method requires a precise limiting device, and the movement path must be free of interference before maintenance. In practical applications, it is prone to accidental triggering or external interference, and its ease of operation and reliability remain unsatisfactory.

[0005] In addition, some solutions have attempted to incorporate clutches or ratchet mechanisms into the drive chain to achieve controllable separation between the swing arm drive mechanism and the dresser swing arm. However, clutches are typically large and complex in structure, and require additional control circuitry or manual disengagement mechanisms, increasing the complexity and cost of the dresser. Furthermore, the disengagement is 360°, making it impossible to achieve precise disengagement at the required angle. Ratchet mechanisms, on the other hand, are suitable for unidirectional transmission and cannot adapt to the reciprocating motion required by the dresser. Summary of the Invention

[0006] To overcome the shortcomings of the prior art, the present invention provides a polishing pad dressing mechanism, which solves the problem of resistance amplification in the transmission chain when the swing arm is inspected and maintained. At the separation position of the engagement unit, the swing arm is disconnected from the power source, the force of manually swinging the swing arm is reduced, and the swing arm can be easily swung from the working range to the inspection and maintenance range.

[0007] The technical solution adopted by this invention to solve its technical problem is: a polishing pad dressing mechanism, comprising: The swing arm, acting as the actuator, drives the dressing disc to move relative to the polishing pad. A power source, at least for driving the swing arm to rotate about its center of rotation; Also includes: The torque output mechanism is connected to the power source and the swing arm respectively. It includes at least an input component, an output component, a track, and a connecting unit. The input component and the output component are both arranged concentrically and coaxially with the rotation center of the swing arm. The engagement unit is circumferentially anti-rotating with the output component, and has a connection position and a separation position. In the connection position, the engagement unit engages the input component and the output component so that they rotate synchronously; in the separation position, the input component and the output component disengage from each other and can rotate relatively independently. The track has at least a first working section and a second working section, and at least a portion of the engagement unit moves on the track. When it rotates to the first working section, the engagement unit enters the connection position, and when it rotates to the second working section, the engagement unit enters the separation position.

[0008] Furthermore, the first working section and the second working section have an axial height difference, and the input component has a slot. When the engagement unit rotates along the track to the first working section, a portion of the engagement unit extends axially into the slot, so that the input component and the output component are circumferentially rigidly connected; when the engagement unit rotates along the track to the second working section, the engagement unit disengages from the slot.

[0009] Furthermore, the engagement unit includes a rolling element movable on the track, an engagement element partially suspended above the rolling element, and an elastic element that abuts against the engagement element to push the engagement element in the direction of the rolling element.

[0010] Furthermore, the track has an inclined transition section between the first working segment and the second working segment; the track includes two or more sets of first working segments and second working segments, and when there are N sets, the first working segment and the second working segment are N-order rotationally symmetric about the rotation center of the swing arm.

[0011] Furthermore, the swing arm has an edge position where the dressing disc and the polishing pad are tangent together, and an initial position; in the initial position, the dressing disc and the polishing pad are tangent together or tend to be tangent together, and the central angle between the initial position and the edge position is α.

[0012] Furthermore, the central angle of the inclined transition section is 5°-10°; at the edge position, the joining unit rotates to the first working section, and at this time the central angle between the contact surface of the joining unit and the track and the inclined transition section is α.

[0013] Furthermore, the track is located on the inner or outer ring of the fixed track ring, and the fixed track ring is concentrically and coaxially arranged with the input component and the output component.

[0014] Furthermore, the inner wall of the output component forms a receiving groove, and the engaging unit is axially movable within the receiving groove, with the engaging unit circumferentially abutting against the side wall of the receiving groove; an open groove is formed on the inner side of the engaging component, the rolling component abuts against the top surface of the open groove, one end of the elastic component abuts against the inner top surface of the receiving groove, and the other end abuts against the outer top surface of the engaging component; the height of the open groove is greater than or equal to the total axial height of the rolling component, the first working section of the track, and the second working section of the track.

[0015] Furthermore, the central angle of the first working segment is 40°-70°.

[0016] The beneficial effects of this invention are: 1) The working range (connection position) angle and maintenance (separation position) range angle of the dressing mechanism can be customized. Within the working range, the swing arm is driven by the power source and swings back and forth, which can dress the polishing pad; while within the maintenance range, the swing arm is not affected by the power source and is in a free state, which can be manually controlled to swing freely, and the swing is labor-saving; 2) The dressing mechanism has a simple structure, requires few parts, and the pure mechanical structure is stable and reliable; 3) Within the maintenance range, the swing arm can be manually controlled to swing in both directions. Attached Figure Description

[0017] Figure 1 This is a perspective view of the polishing pad dressing mechanism and the polishing pad provided by the present invention in action.

[0018] Figure 2 This is a top view of the polishing pad dressing mechanism and its interaction with the polishing pad provided by the present invention.

[0019] Figure 3 This is a side view of the polishing pad dressing mechanism and its engagement with the polishing pad provided by the present invention.

[0020] Figure 4 A simplified diagram showing the swing arm in the edge position and the initial position provided by the present invention.

[0021] Figure 5 A perspective view of the torque output mechanism provided by the present invention.

[0022] Figure 6 This is an exploded structural diagram of the torque output mechanism provided by the present invention.

[0023] Figure 7 Cross-sectional view of the torque output mechanism provided by the present invention Figure 1 At this time, the joining unit is in the connection position.

[0024] Figure 8Cross-sectional view of the torque output mechanism provided by the present invention Figure 2 At this time, the joining unit is in the separated position.

[0025] Figure 9 The three-dimensional representation of the track portion provided by the present invention Figure 1 .

[0026] Figure 10 The three-dimensional representation of the track portion provided by the present invention Figure 2 .

[0027] Figure 11 Cross-sectional view of the torque output mechanism provided by the present invention Figure 3 .

[0028] Figure 12 for Figure 4 Enlarged view of the structure at point A in the image.

[0029] Figure 13 A cross-sectional view of the portion containing the track provided by the present invention.

[0030] Figure 14 This is a partial cross-sectional view of the track after it has been unfolded, as provided by the present invention.

[0031] Figure 15 Cross-sectional view of the torque output mechanism provided by the present invention Figure 4 At this time, the joining unit is in the connection position.

[0032] Figure 16 Cross-sectional view of the torque output mechanism provided by the present invention Figure 5 .

[0033] Figure 17 Cross-sectional view of the torque output mechanism provided by the present invention Figure 6 At this time, the joining unit is in the separated position.

[0034] Among them, 1-swing arm, 2-dressing disc, 3-polishing pad, 4-power source, 41-motor, 42-reducer, 5-torque output mechanism, 51-input component, 511-slot, 52-output component, 521-accommodating groove, 53-track, 531-first working section, 532-second working section, 533-inclined transition section, 534-fixed track ring, 54-joining unit, 541-rolling component, 542-joining component, 543-elastic component, 544-open groove. Detailed Implementation

[0035] To enable those skilled in the art to better understand the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0036] like Figures 1-3 As shown, a polishing pad dressing mechanism includes a swing arm 1, at least for driving the swing arm 1 about its rotation center ( Figure 3 The power source 4 (O line in the middle) rotates, and the torque output mechanism 5 is connected to the power source 4 and the swing arm 1 respectively. The swing arm 1, as the execution end, drives the dressing disc 2 to move relative to the polishing pad 3, so as to level and grind the polishing pad 3.

[0037] Power source 4 is a structure found in existing technologies, such as... Figure 3 As shown, it includes at least a motor 41 and a reducer 42. The reducer 42 is a torque amplification mechanism that reduces speed and increases torque, lowers the output speed of the motor 41, and increases the torque reduction ratio to over 160. The dressing disc 2 can dress the polishing pad 3, activate the polishing pad 3, and increase the polishing effect and lifespan of the polishing pad 3.

[0038] The torque output mechanism 5 includes at least an input component 51, an output component 52, a track 53, and a coupling unit 54. Both the input component 51 and the output component 52 are concentrically and coaxially arranged with respect to the rotation center (O-line) of the swing arm 1. In this embodiment, both the input component 51 and the output component 52 are hollow cylindrical structures. The input component 51 is fixedly connected to the output shaft of the reducer 42. The coupling unit 54 is circumferentially anti-rotationally engaged with the output component 52, and has a connection position and a separation position. In the connection position, the coupling unit 54 engages the input component 51 and the output component 52, thereby allowing the input component 51 and the output component 52 to rotate synchronously around the rotation center of the swing arm 1. In the separation position, the input component 51 and the output component 52 disengage from each other, allowing them to rotate relatively independently.

[0039] Track 53 is annular and can be set on the outer ring of fixed track ring 534, such as... Figures 6-9 As shown, it can also be set in the inner ring of the fixed track ring 534, such as... Figure 10 , Figure 11 As shown, the fixed track ring 534 is coaxially arranged with the input component 51 and the output component 52. The input component 51 and the output component 52 are fixed relative to the fixed track ring 534 in the axial position through two bearings. However, both the input component 51 and the output component 52 can rotate around the center of the fixed track ring 534. The fixed track ring 534 is fixedly connected to the frame of the polishing pad dressing mechanism.

[0040] The track 53 has at least a first working section 531 and a second working section 532 connected end to end. At least a portion of the engagement unit 54 moves on the track 53. When the engagement unit 54 rotates to the first working section 531 of the track 53, the engagement unit 54 enters the connection position, so that the input component 51 and the output component 52 can rotate synchronously. Thus, in the connection position, the swing arm 1 can swing under the drive of the power source 4 to achieve the dressing of the polishing pad 3 with the dressing disc 2.

[0041] When the engagement unit 54 rotates to the second working section 532 of the track 53, the engagement unit 54 enters the separation position, so that the input component 51 and the output component 52 rotate relatively independently. Thus, in the separation position, the swing arm 1 is disconnected from the power source 4. At this time, when the swing arm 1 is manually swung, it is not necessary to overcome the resistance of the power source 4, which makes it convenient for the swing arm 1 to swing away from the polishing pad 3 for maintenance and repair.

[0042] This invention solves the problem of resistance amplification in the "motor-reducer-swinger" transmission chain when the swing arm, as the actuator, swings out of the cavity for maintenance. The swing arm achieves torque transmission from "motor-reducer-swinger arm" within a specific working range, while manual control of the swing arm is achieved within the maintenance range. That is, in the original "motor-reducer-swinger arm" power transmission route, the reducer of the power source is disconnected from the swing arm, so there is no need to overcome the resistance of the reducer when manually swinging the swing arm.

[0043] like Figure 6 As shown, the first working section 531 and the second working section 532 have an axial height difference. In this embodiment, the height of the first working section 531 is below the height of the second working section 532. The input component 51 has a slot 511. When the engaging unit 54 rotates along the track 53 to the first working section 531, part of the engaging unit 54 extends axially into the slot 511, thereby making the input component 51 and the output component 52 circumferentially rigidly connected, and thus realizing the synchronous rotation of the input component 51 and the output component 52. When the engaging unit 54 rotates along the track 53 to the second working section 532, the engaging unit 54 disengages from the slot 511, thereby making the input component 51 and the output component 52 disengage. The power source 4 is only connected to the input component 51. At this time, the output component 52 is not restricted by the input component 51, that is, the output component 52 can rotate freely. The final result is that the swing arm 1 can rotate freely, which facilitates swinging the swing arm 1 away from the polishing pad 3 for inspection and maintenance.

[0044] Specifically, such as Figures 5-9As shown, the engagement unit 54 includes a rolling element 541 movable on the track 53, an engagement element 542 partially suspended above the rolling element 541, and an elastic element 543. The elastic element 543 abuts against the engagement element 542, thereby pushing the engagement element 542 in the direction of the rolling element 541. Figure 6 As shown, the inner wall of the output member 52 has a receiving groove 521. The bottom of the receiving groove 521 is open. The engaging unit 54 is axially movable in the receiving groove 521. The engaging unit 54 abuts against the side wall of the receiving groove 521 in the circumferential direction to achieve a circumferential anti-rotation fit between the engaging unit 54 and the output member 52.

[0045] An open groove 544 is formed on the inner side of the connector 542. The three adjacent sides of the open groove 544 are open and connected. The track 53 is provided corresponding to the open groove 544. For example... Figure 7 As shown, after assembly, the rolling element 541 abuts against the top surface of the open groove 544, the top end of the elastic element 543 abuts against the inner top surface of the receiving groove 521, and the bottom end of the elastic element 543 abuts against the outer top surface of the connecting element 542. Furthermore, the height of the open groove 544 is greater than or equal to the total axial height of the rolling element 541, the first working section 531 of the track 53, and the second working section 532 of the track 53, thus providing sufficient axial space for the open groove 544 to accommodate changes in the track 53 when the connecting element 542 moves around the track 53.

[0046] In this embodiment, there are two engagement units 54, which are symmetrically arranged on both radial sides of the output member 52, and correspondingly, there are also two slots 511. Of course, in other embodiments, the number of engagement units 54 and slots 511 is not limited.

[0047] To facilitate smoother movement of the rolling element 541 on the track 53, an inclined transition section 533 is provided between the first working section 531 and the second working section 532 of the track 53. For example... Figure 13 , Figure 14 As shown, the central angle of the inclined transition section 533 is 5°-10°, and in this embodiment, it is 10°.

[0048] In the illustration of this embodiment, there are two sets of first working segments 531 and second working segments 532. Each set includes one first working segment 531 and one second working segment 532. Adjacent first working segments 531 and second working segments 532 within a set have an inclined transition section 533. The inclined transition section 533 may not be provided between first working segments 531 and second working segments 532 in different sets. The two sets of first working segments 531 and second working segments 532 are rotationally symmetrical. Figure 13 , Figure 14The central angle of the first working segment 531 shown is 40°-70°, and in this embodiment it is 60°; the central angle of the second working segment 532 is 110°.

[0049] Of course, in other embodiments, the track 53 may also include multiple sets of first working segments 531 and second working segments 532. When there are N sets, the first working segments 531 and second working segments 532 are N-order rotationally symmetrical about the rotation center of the swing arm 1.

[0050] like Figure 2 , Figure 13 , Figure 14 As shown, the swing arm 1 has an initial position and an edge position where the dressing disc 2 is tangent to the polishing pad 3. In the edge position, the dressing disc 2 is located above the polishing pad 3, which is the starting point where the dressing disc 2 can begin dressing on the polishing pad 3 and reciprocate. In the initial position, the dressing disc 2 is externally tangent to or nearly externally tangent to the polishing pad 3, meaning the dressing disc 2 is completely swung out of the area above the polishing pad 3. The central angle between the initial position and the edge position is... Figure 4 In the α section, the installation angle of the fixed track ring 534 is related to the edge position. Correspondingly, at the edge position, such as... Figure 12 As shown, the joining unit 54 rotates to the first working section 531, and at this time the central angle between the contact surface of the joining unit 54 and the track 53 and the inclined transition section 533 is also α, which is generally 15°-20°.

[0051] like Figure 15 As shown, when the engagement unit 54 is in the connection position, that is, when the swing arm 1 is in the working range, the rolling element 541 moves on the first working section 531 of the track 53. At this time, the engagement element 542 is inserted into the slot 511 of the input element 51 under the compression of the elastic element 543. The input element 51 and the output element 52 form a rigid connection, constructing a motion transmission path of "motor 41-reducer 42-input element 51-output element 52-swing arm 1". Thus, the swing arm 1 swings back and forth in the working range under the drive of the power source 4.

[0052] The specific working process is as follows: Motor 1 rotates, and the speed is reduced and the torque is amplified by reducer 42. At this time, the input component 51 and the output component 52 form a circumferential rigid connection under the action of the connecting component 542. At this time, the output shaft of reducer 42 drives the torque output mechanism 5 and the swing arm to reciprocate within the range of 0° to 60°, completing the normal process action.

[0053] like Figure 16As shown, when the swing arm 1 rotates from the working range to the maintenance range, the fixed track ring 534 remains stationary. The rolling element 541 and the engaging element 542 rotate with the output element 52. The contact position between the rolling element 541 and the track 53 gradually moves from the first working section 531 (low track surface) through the inclined transition section 533 to the second working section 532 (high track surface). The engaging element 542 moves upward within the receiving groove 521 of the output element 52, gradually disengaging from the slot 511 of the input element 51. At this time, the rigid connection between the output element 52 and the input element 51 is released.

[0054] like Figure 17 As shown, when the engagement unit 54 is in the disengaged position, that is, when the swing arm 1 is within the maintenance range, the rolling element 541 moves on the second working section 532 of the track 53, and the corresponding engagement element 542 is in the high position, that is, the engagement element 542 is disengaged from the slot 511. At this time, there is no rigid connection between the input element 51 and the output element 52, and the motion transmission path is only "motor 41-reducer 42-input element 51". The transmission relationship between the output element 52 and the reducer 42 is cut off. When manually pushing the swing arm 1 for maintenance, the force does not need to pass through the reducer 42, avoiding the force attenuation caused by the reverse transmission of the reducer 42, thereby significantly reducing the operating resistance and making the maintenance process more labor-saving and convenient.

[0055] When the equipment needs to be stopped for maintenance, zero-position adjustment, or emergency manual operation, the operator needs to move the swing arm 1 directly. At this time, due to the large reduction ratio of the reducer 42, directly driving the swing arm 1 means overcoming a huge "reverse transmission" resistance. The "disengagement" function of the dressing mechanism of this invention, within this "maintenance range," disconnects the mechanical connection between the swing arm 1 and the high reduction ratio transmission chain inside the reducer 42. After disengagement, the operator (or auxiliary tool) directly drives the swing arm 1, bypassing the reducer 42. Therefore, only the friction of the swing arm 1 bearing and the inertia / gravity of the load itself need to be overcome, greatly reducing the required swing force.

[0056] When the swing arm 1 rotates from the maintenance range to the working range, the fixed track ring 534 remains stationary. The rolling element 541 and the engaging element 542 rotate with the output element 52. Under the action of the elastic element 543, the contact position between the rolling element 541 and the track 53 gradually moves from the second working section 532 (high track surface) to the first working section 531 (low track surface). The engaging element 542 moves downward in the receiving groove 521 of the output element 52 and gradually inserts into the slot 511 of the input element 51. At this time, the output element 52 and the input element 51 form a rigid connection.

[0057] The above specific embodiments are used to explain and illustrate the present invention, but not to limit the present invention. Any modifications and changes made to the present invention within the spirit and scope of the claims shall fall within the protection scope of the present invention.

Claims

1. A polishing pad dressing mechanism, comprising: The swing arm (1) acts as the actuator to drive the dressing disc (2) to move relative to the polishing pad (3); Power source (4), at least for driving the swing arm (1) to rotate about its rotation center; Its characteristic is that it also includes: The torque output mechanism (5) is connected to the power source (4) and the swing arm (1) respectively. It includes at least an input component (51), an output component (52), a track (53), and a connecting unit (54). The input component (51) and the output component (52) are both coaxially arranged with the rotation center of the swing arm (1). The engaging unit (54) is circumferentially anti-rotating with the output member (52), and has a connecting position and a separating position. In the connecting position, the engaging unit (54) engages the input member (51) and the output member (52) so that they rotate synchronously. In the separating position, the input member (51) and the output member (52) disengage from each other and can rotate relatively independently. The track (53) has at least a first working section (531) and a second working section (532), at least a portion of the engagement unit (54) is movable on the track (53), and when it rotates to the first working section (531), the engagement unit (54) enters the connection position, and when it rotates to the second working section (532), the engagement unit (54) enters the separation position.

2. The polishing pad conditioner mechanism of claim 1, wherein: The first working section (531) and the second working section (532) have an axial height difference. The input member (51) has a slot (511). When the engaging unit (54) rotates along the track (53) to the first working section (531), a portion of the engaging unit (54) extends axially into the slot (511) so that the input member (51) and the output member (52) are circumferentially rigidly connected. When the engaging unit (54) rotates along the track (53) to the second working section (532), the engaging unit (54) disengages from the slot (511).

3. The polishing pad truer mechanism of claim 1, wherein: The engagement unit (54) includes a rolling element (541) movable on the track (53), an engagement element (542) partially suspended above the rolling element (541), and an elastic element (543) abutting against the engagement element (542) to push the engagement element (542) in the direction of the rolling element (541).

4. The polishing pad truing mechanism of claim 1, wherein: The track (53) has an inclined transition section (533) between the first working section (531) and the second working section (532); the track (53) includes two or more sets of first working sections (531) and second working sections (532), and when there are N sets, the first working section (531) and the second working section (532) are N-order rotationally symmetric about the rotation center of the swing arm (1).

5. The polishing pad truing mechanism of claim 4, wherein: The swing arm (1) has an edge position where the dressing disc (2) and the polishing pad (3) are tangent, and an initial position; in the initial position, the dressing disc (2) and the polishing pad (3) are tangent or tend to be tangent, and the central angle between the initial position and the edge position is α.

6. The polishing pad conditioner mechanism of claim 5, wherein: The central angle of the inclined transition section (533) is 5°-10°; at the edge position, the joining unit (54) rotates to the first working section (531), and at this time the central angle between the contact surface of the joining unit (54) and the track (53) and the inclined transition section (533) is α.

7. The polishing pad truer mechanism of claim 1, wherein: The track (53) is located on the inner or outer ring of the fixed track ring (534), and the fixed track ring (534) is coaxially arranged with the input component (51) and the output component (52).

8. The polishing pad truing mechanism of claim 3, wherein: The inner wall of the output component (52) forms a receiving groove (521), and the connecting unit (54) is axially movable in the receiving groove (521), and the connecting unit (54) abuts against the side wall of the receiving groove (521) circumferentially; the inner side of the connecting component (542) forms an open groove (544), the rolling component (541) abuts against the top surface of the open groove (544), one end of the elastic component (543) abuts against the inner top surface of the receiving groove (521), and the other end abuts against the outer top surface of the connecting component (542); the height of the open groove (544) is greater than or equal to the total axial height of the rolling component (541), the first working section (531) of the track (53), and the second working section (532) of the track (53).

9. The polishing pad truing mechanism of claim 1, wherein: The central angle of the first working segment (531) is 40°-70°.

Images