A gantry robot

Abstract

The application discloses a gantry type mechanical arm, which comprises a gantry stand, a mechanical arm main body, a guide traction cross beam, an X-axis driving mechanism and a Z-axis driving mechanism; the mechanical arm main body comprises a mechanical arm carrier, and a sliding conductive module is arranged between the mechanical arm carrier and the Z-axis driving mechanism; the sliding conductive module comprises a conductive track fixedly arranged on a Z-axis support of the Z-axis driving mechanism and a contact spring fixedly connected with the mechanical arm carrier; and the sliding conductive module supplies power to an electric control system in the mechanical arm carrier through a conductive circuit. The sliding conductive module is arranged, the contact spring and the conductive track are used for power supply through sliding contact, the traditional tank chain cable is completely abandoned, the abrasion, breakage and particle pollution problems caused by reciprocating bending of the cable are fundamentally avoided, and the operation stability and service life of the equipment in a clean environment are greatly improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment technology, specifically a gantry-type robotic arm. Background Technology

[0002] In the semiconductor wafer manufacturing process, wafers need to be frequently, rapidly, and precisely transferred between different process equipment. Gantry-type robotic arms are widely used in the wafer loading and unloading process due to their advantages such as stable structure, high load capacity, and large range of motion.

[0003] However, existing gantry-type robotic arms for wafer loading and unloading still have the following shortcomings in practical applications: Poor power supply and signal transmission reliability: The moving parts of traditional robotic arms (such as the Z-axis lifting mechanism) usually rely on drag chains for cable connection. During long-term, high-frequency reciprocating motion, the cables in the drag chains are prone to bending fatigue, wear, and even breakage, which not only leads to equipment downtime, but the tiny particles generated can also contaminate the high-cleanliness environment of wafer manufacturing, seriously affecting product yield.

[0004] Insufficient mobility and spatial adaptability: The end effectors of traditional robotic arms (such as Y-axis modules) are mostly fixed in direction, making it difficult to adjust their angle according to the position of the crystal boat or process equipment, which limits their applicability in complex layouts.

[0005] Limited ability to maintain cleanliness: Dust may accumulate in the internal cavity of the robotic arm during movement. If there is a lack of effective active purification measures, this dust may escape with the airflow, affecting the cleanliness of the wafer surface.

[0006] Therefore, we propose a gantry-type robotic arm to address the problems mentioned above. Summary of the Invention

[0007] The purpose of this invention is to provide a gantry-type robotic arm to solve the problems mentioned in the background art.

[0008] To achieve the above objectives, the present invention provides the following technical solution: a gantry-type robotic arm, comprising: a gantry frame, a robotic arm body, a guide traction beam, an X-axis drive mechanism, and a Z-axis drive mechanism. The Z-axis drive mechanism is movably connected to the guide traction beam and the X-axis drive mechanism, and is driven by the X-axis drive mechanism to move along the X-axis. The robotic arm body is mounted on the Z-axis drive mechanism and is driven by it to move along the Z-axis. The main body of the robotic arm includes a robotic arm platform, which is equipped with an electronic control system and a remote signal transmission structure. The robotic arm platform also includes connecting components. A sliding conductive module is provided between the robotic arm platform and the Z-axis drive mechanism. The sliding conductive module includes a conductive rail fixedly mounted on the Z-axis support of the Z-axis drive mechanism, and a contact spring fixedly connected to the robotic arm platform. The contact spring and the conductive rail are slidably conductively connected along the Z-axis direction. The sliding conductive module supplies power to the electrical control system inside the robotic arm platform through conductive lines. The remote signal transmission structure is used to transmit signals with external control equipment to control the movement of the robotic arm body.

[0009] Preferably, the Z-axis drive mechanism includes an upper movable seat, the guide traction beam includes an X-axis upward traction belt and an X-axis upward guide rail, the upper movable seat is slidably connected to the X-axis upward guide rail, and the upper movable seat is fixedly connected to the X-axis upward traction belt.

[0010] Preferably, the X-axis drive mechanism includes an X-axis downward guide rail, an X-axis downward traction belt, a second servo reduction motor, and an X-axis moving seat. The X-axis moving seat is slidably disposed on the X-axis downward guide rail and is fixedly connected to the lower end of the Z-axis drive mechanism. The X-axis moving seat is also fixedly connected to the X-axis downward traction belt, which is driven by the second servo reduction motor. The second servo reduction motor synchronously drives the X-axis upward traction belt.

[0011] Preferably, the Z-axis drive mechanism further includes a Z-axis bracket, a Z-axis guide rail is fixedly installed inside the Z-axis bracket, and a Z-axis traction belt is also installed inside the Z-axis bracket. The Z-axis traction belt is driven by a first servo reduction motor, and the Z-axis traction belt is fixedly connected to the main body of the robotic arm. The main body of the robotic arm is slidably connected to the Z-axis guide rail.

[0012] Preferably, the main body of the robotic arm further includes a Y-axis servo module, which is rotatably mounted on the robotic arm platform. A rotation module and a rotation drive assembly are provided inside the robotic arm platform. The output end of the rotation module is connected to the Y-axis servo module, and the rotation drive assembly drives the rotation module to rotate, thereby causing the Y-axis servo module to rotate around the Z-axis.

[0013] Preferably, the connecting member is slidably connected to the Z-axis guide rail, and the connecting member is fixedly connected to the Z-axis traction belt. A fan is provided inside the connecting member, and a channel communicating with the fan is provided in the internal cavity of the robotic arm platform.

[0014] Preferably, the Y-axis servo module has a built-in dual linear module, and the Y-axis servo module includes two Y-axis moving arms that move along the Y-axis, with a support claw fixedly connected to the front end of each Y-axis moving arm.

[0015] Preferably, the dual linear module and the two Y-axis moving arms are arranged in upper and lower layers.

[0016] Preferably, a vision camera is provided at the tail of the upper surface of the Y-axis servo module, and wafer positioning clips for limiting the Y-axis movement of the wafer are also provided on both sides of the Y-axis servo module.

[0017] Preferably, the sliding conductive module further includes an insulating groove and an insulating support. The insulating groove is fixedly installed inside the Z-axis support and is arranged along the stroke of the connecting member. The conductive track is arranged inside the insulating groove. The insulating support is fixedly connected to the connecting member. The contact spring is fixedly installed at the end of the insulating support. The conductive circuit is built into the insulating support. One end of the conductive circuit is electrically connected to the contact spring, and the other end of the conductive circuit is electrically connected to the electrical control system inside the robotic arm platform.

[0018] Compared with the prior art, the beneficial effects of the present invention are: 1. By setting up a sliding conductive module and a matching electrical control system and remote signal transmission structure, power is supplied by the sliding contact between the contact spring and the conductive rail, completely eliminating the traditional tank chain cable. This fundamentally avoids the wear, breakage and particulate contamination problems caused by repeated bending of the cable, and greatly improves the operational stability and service life of the equipment in a clean environment. 2. By rotating the Y-axis servo module on the robotic arm platform, and in conjunction with the rotation module and rotation drive assembly, the Y-axis servo module can rotate flexibly around the Z-axis, adapting to different angles of the wafer boat or process equipment interface, greatly improving the layout flexibility of the equipment. Simultaneously, the use of built-in dual linear modules to drive the upper and lower layered dual Y-axis moving arms allows for independent or coordinated movement, achieving efficient and interference-free handling of two wafers and improving loading and unloading efficiency. 3. A fan is installed in the connecting part of the robotic arm stage and connected to the channel of the internal cavity of the stage. This can actively extract the micro dust generated during the movement, effectively preventing impurities accumulated in the internal cavity from contaminating the wafer and meeting the stringent cleanliness requirements of semiconductor manufacturing. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the structure of the guide traction beam and the upper movable seat in this invention; Figure 3 This is a partial front view of the guide traction beam, the X-axis drive mechanism, and the Z-axis drive mechanism in this invention. Figure 4This is a schematic diagram of the Z-axis drive mechanism and connecting component in this invention; Figure 5 This is a schematic diagram of the connecting component and the fan in this invention; Figure 6 This is a top sectional view of a portion of the structure of the robotic arm platform in this invention; Figure 7 This is a schematic diagram of the Y-axis servo module in this invention; Figure 8 This is a schematic diagram of the Y-axis moving arm and supporting claw in this invention; Figure 9 This is a top view of the Z-axis drive mechanism, sliding conductive module, and robotic arm platform in this invention. Figure 10 For the present invention Figure 9 Enlarged view of point A; Figure 11 This is a side perspective view of the sliding conductive module in this invention.

[0020] In the diagram: 1. Gantry frame; 2. Main body of the robotic arm; 21. Robotic arm platform; 211. Connecting component; 212. Fan; 213. Rotation module; 214. Rotation drive assembly; 22. Y-axis servo module; 221. Vision camera; 222. Wafer limiter; 223. Y-axis moving arm; 224. Support claw; 3. Guide traction beam; 31. X-axis upward traction belt; 32. X-axis upward guide rail; 4. X-axis drive mechanism; 41. X-axis downward guide rail; 42. X-axis downward traction belt; 43. Second servo geared motor; 44. X-axis moving seat; 5. Z-axis drive mechanism; 51. Upper moving seat; 52. Z-axis traction belt; 53. First servo geared motor; 54. Z-axis guide rail; 55. Z-axis support; 6. Sliding conductive module; 61. Insulating groove; 62. Conductive track; 63. Insulating support; 64. Contact spring; 65. Conductive circuit. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] Please see Figure 1-11The present invention provides a technical solution: a gantry-type robotic arm, comprising: a gantry frame 1, a robotic arm body 2, a guide traction beam 3, an X-axis drive mechanism 4, and a Z-axis drive mechanism 5. The gantry frame 1 is fixedly disposed between the X-axis drive mechanism 4 and the guide traction beam 3. The Z-axis drive mechanism 5 is disposed between the X-axis drive mechanism 4 and the guide traction beam 3. The Z-axis drive mechanism 5 is driven by the X-axis drive mechanism 4 to move along the X-axis. The robotic arm body 2 is disposed on the Z-axis drive mechanism 5. The Z-axis drive mechanism 5 drives the robotic arm body 2 to move along the Z-axis, thereby realizing the biaxial movement of the robotic arm body 2.

[0023] Specifically, such as Figure 2 and Figure 3 As shown, the Z-axis drive mechanism 5 includes an upper movable seat 51, and the guide traction beam 3 includes an X-axis upward traction belt 31 and an X-axis upward guide rail 32. The upper movable seat 51 is slidably connected to the X-axis upward guide rail 32, and the upper movable seat 51 is fixedly connected to the X-axis upward traction belt 31. The movement of the X-axis upward traction belt 31 drives the upper movable seat 51 to slide along the X-axis upward guide rail 32. The X-axis drive mechanism 4 includes an X-axis downward guide rail 41, an X-axis downward traction belt 42, a second servo reduction motor 43, and an X-axis moving seat 44. The X-axis moving seat 44 is slidably disposed on the X-axis downward guide rail 41. The X-axis moving seat 44 is fixedly connected to the lower end of the Z-axis drive mechanism 5. The X-axis moving seat 44 is also fixedly connected to the X-axis downward traction belt 42. The X-axis downward traction belt 42 is driven by the second servo reduction motor 43, which drives the X-axis moving seat 44 to move along the X-axis downward guide rail 41, thereby driving the Z-axis drive mechanism 5 to move along the X-axis. In addition, in this embodiment, the X-axis upward traction belt 31 is synchronously driven by the second servo reduction motor 43, so that the X-axis upward traction belt 31 and the X-axis downward traction belt 42 move synchronously, driving the Z-axis drive mechanism 5 to move along the X-axis.

[0024] like Figure 3 and Figure 4 As shown, the Z-axis drive mechanism 5 also includes a Z-axis support 55, a Z-axis guide rail 54 is fixedly installed inside the Z-axis support 55, and a Z-axis traction belt 52 is also installed inside the Z-axis support 55. The Z-axis traction belt 52 is driven by a first servo reduction motor 53. The Z-axis traction belt 52 is fixedly connected to the robotic arm body 2. The robotic arm body 2 is slidably connected to the Z-axis guide rail 54. The first servo reduction motor 53 drives the Z-axis traction belt 52 to move the robotic arm body 2 up and down along the Z-axis guide rail 54, thereby realizing the Z-axis movement of the robotic arm body 2.

[0025] like Figures 4 to 7As shown, the main body 2 of the robotic arm includes a robotic arm platform 21 and a Y-axis servo module 22. The Y-axis servo module 22 is rotatably mounted on the robotic arm platform 21, so that the Y-axis servo module 22 can rotate around the Z-axis, thereby improving applicability. The robotic arm platform 21 includes a connecting member 211, which is slidably connected to the Z-axis guide rail 54 and fixedly connected to the Z-axis traction belt 52. A fan 212 is installed inside the connecting member 211, and a channel communicating with the fan 212 is provided in the internal cavity of the robotic arm platform 21. Figure 6 As shown by the dashed arrow, the air containing impurities inside the cavity of the robotic arm stage 21 is extracted to ensure the cleanliness requirements for wafer transportation. The robotic arm platform 21 is equipped with a rotation module 213 and a rotation drive assembly 214. The output end of the rotation module 213 is connected to the Y-axis servo module 22. The rotation drive assembly 214 drives the rotation module 213 to rotate, thereby causing the Y-axis servo module 22 to rotate around the Z-axis.

[0026] like Figure 7 and Figure 8 As shown, the Y-axis servo module 22 has a built-in dual linear module. In this embodiment, the linear module consists of a geared motor and a conveyor belt. The Y-axis servo module 22 includes two Y-axis moving arms 223 that move along the Y-axis. The Y-axis moving arms 223 are connected to the conveyor belt of the linear module. The geared motor drives the conveyor belt to move, which in turn drives the Y-axis moving arms 223 to move along the Y-axis. In this embodiment, the dual linear module and the two Y-axis moving arms 223 are arranged in two layers, upper and lower. The front end of the Y-axis moving arm 223 is fixedly connected to a support claw 224 for supporting the wafer and realizing the Y-axis movement of the two wafers. In addition, a vision camera 221 is provided at the tail of the upper surface of the Y-axis servo module 22 for real-time monitoring of the wafer status. Wafer limiters 222 are also provided on both sides of the Y-axis servo module 22 to limit the Y-axis movement of the wafer for positioning the initial position of the wafer. The wafer is driven to move along the Y-axis by the Y-axis servo module 22 for loading and unloading.

[0027] To reduce the use of the line tank chain, the robotic arm platform 21 has a built-in remote signal transmission structure and related electronic control system. Since the rotation amplitude of the Y-axis servo module 22 is small, the circuit and data transmission between the Y-axis servo module 22 and the robotic arm platform 21 are connected by wire. The platform arm of the robotic arm platform 21 only needs to be connected to an external power source. To accommodate the power supply during the lifting and lowering process of the robotic arm platform 21, a sliding conductive module 6 is provided between the connecting member 211 and the Z-axis support 55. The sliding conductive module 6 includes an insulating groove 61, a conductive rail 62, an insulating support 63, and a contact spring 64. The insulating groove 61 is fixedly installed inside the Z-axis support 55 and is set along the stroke of the connecting member 211. The conductive rail 62 is set inside the insulating groove 61. The insulating support 63 is fixedly connected to the connecting member 211. The contact spring 64 is fixedly installed at the end of the insulating support 63 and is slidably conductively connected to the conductive rail 62. The insulating support 63 has a built-in conductive line 65. One end of the conductive line 65 is electrically connected to the contact spring 64, and the other end of the conductive line 65 is electrically connected to the electrical control system inside the robotic arm platform 21. As the robotic arm platform 21 lifts and lowers, the contact spring 64 and the conductive rail 62 are continuously slidably conductively connected, ensuring that the electrical control system of the robotic arm platform 21 is powered during the lifting and lowering process. The insulating groove 61 has a certain depth to ensure that the conductive track 62 is at a certain distance from the external conductive material, so as to prevent the sputtering of electric sparks and the interference of electric arcs on other components.

[0028] Working principle: When the machine starts, the second servo reduction motor 43 of the X-axis drive mechanism 4 drives the X-axis downward traction belt 42 to move, and simultaneously drives the X-axis upward traction belt 31 on the guide traction beam 3 to move. The X-axis downward traction belt 42 drives the X-axis moving seat 44 to slide along the X-axis downward guide rail 41, and the X-axis upward traction belt 31 drives the upper moving seat 51 to slide synchronously along the X-axis upward guide rail 32, thereby driving the entire Z-axis drive mechanism 5 and the robotic arm body 2 on it to move along the X-axis to the target work position.

[0029] Subsequently, the Z-axis drive mechanism 5 actuates, and the first servo reduction motor 53 drives the Z-axis traction belt 52 to move. The Z-axis traction belt 52 drives the connecting member 211 fixedly connected to it, so that the entire robotic arm body 2 performs precise lifting and lowering movements along the Z-axis guide rail 54 to adapt to crystal boats or process equipment of different heights. During the lifting and lowering process, the contact spring 64 of the sliding conductive module 6 always maintains sliding contact with the conductive rail 62, and provides a continuous and stable power supply to the electrical control system in the robotic arm platform 21 through the conductive line 65 to ensure its normal operation. At the same time, the fan 212 in the connecting member 211 starts, continuously evacuating air through the channel of the internal cavity of the robotic arm platform 21 to maintain a clean internal environment.

[0030] Once the robotic arm body 2 reaches the predetermined height, the rotation module 213 can be activated as needed. The rotation drive assembly 214 drives the rotation module 213 to rotate, causing the Y-axis servo module 22 to rotate around the Z-axis to a preset working angle to align with the interface of the crystal boat or process equipment.

[0031] Then, according to instructions, the Y-axis servo module 22, through its built-in dual linear module, drives the upper and lower Y-axis moving arms 223 to extend along the Y-axis. The support claw 224 at the front end of the Y-axis moving arm 223 extends into the wafer boat to pick up the wafer. During this process, the wafer limiting card 222 physically limits the wafer to prevent it from shifting. At the same time, the vision camera 221 at the rear of the Y-axis servo module 22 monitors the position and status of the wafer in real time to ensure the safety of the pick-and-place process.

[0032] After wafer retrieval, the Y-axis moving arm 223 retracts along the Y-axis, completing the wafer removal. Subsequently, the main body 2 of the robotic arm, through coordinated movement along the X and Z axes, transfers the wafer to the target station, where the Y-axis moving arm 223 extends to place the wafer. Throughout the process, the precise coordination of movements along each axis achieves efficient, clean, and reliable wafer loading and unloading.

[0033] The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0034] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A gantry-type robotic arm, characterized in that, include: The gantry frame (1), the main body of the robotic arm (2), the guide traction beam (3), the X-axis drive mechanism (4) and the Z-axis drive mechanism (5) are respectively movably connected to the guide traction beam (3) and the X-axis drive mechanism (4), and are driven by the X-axis drive mechanism (4) to move along the X-axis. The main body of the robotic arm (2) is set on the Z-axis drive mechanism (5) and is driven by it to move along the Z-axis. The main body (2) of the robotic arm includes a robotic arm platform (21), which is equipped with an electronic control system and a remote signal transmission structure. The robotic arm platform (21) includes a connecting member (211). A sliding conductive module (6) is provided between the robotic arm platform (21) and the Z-axis drive mechanism (5). The sliding conductive module (6) includes a conductive rail (62) fixedly mounted on the Z-axis support (55) of the Z-axis drive mechanism (5) and a contact spring (64) fixedly connected to the robotic arm platform (21). The contact spring (64) and the conductive rail (62) are slidably conductively connected along the Z-axis direction. The sliding conductive module (6) supplies power to the electrical control system inside the robotic arm platform (21) through a conductive line (65). The remote signal transmission structure is used to transmit signals with external control equipment to control the movement of the robotic arm body (2).

2. The gantry-type robotic arm according to claim 1, characterized in that, The Z-axis drive mechanism (5) includes an upper movable seat (51), and the guide traction beam (3) includes an X-axis upward traction belt (31) and an X-axis upward guide rail (32). The upper movable seat (51) is slidably connected to the X-axis upward guide rail (32), and the upper movable seat (51) is fixedly connected to the X-axis upward traction belt (31).

3. A gantry-type robotic arm according to any one of claims 1 and 2, characterized in that, The X-axis drive mechanism (4) includes an X-axis downward guide rail (41), an X-axis downward traction belt (42), a second servo reduction motor (43), and an X-axis moving seat (44). The X-axis moving seat (44) is slidably disposed on the X-axis downward guide rail (41). The X-axis moving seat (44) is fixedly connected to the lower end of the Z-axis drive mechanism (5), and the X-axis moving seat (44) is also fixedly connected to the X-axis downward traction belt (42). The X-axis downward traction belt (42) is driven by the second servo reduction motor (43), and the second servo reduction motor (43) synchronously drives the X-axis upward traction belt (31).

4. A gantry-type robotic arm according to claim 1, characterized in that, The Z-axis drive mechanism (5) also includes a Z-axis bracket (55), a Z-axis guide rail (54) is fixedly installed inside the Z-axis bracket (55), and a Z-axis traction belt (52) is also installed inside the Z-axis bracket (55). The Z-axis traction belt (52) is driven by a first servo reduction motor (53). The Z-axis traction belt (52) is fixedly connected to the main body of the robotic arm (2), and the main body of the robotic arm (2) is slidably connected to the Z-axis guide rail (54).

5. A gantry-type robotic arm according to claim 1, characterized in that, The main body (2) of the robotic arm also includes a Y-axis servo module (22). The Y-axis servo module (22) is rotatably mounted on the robotic arm platform (21). The robotic arm platform (21) is provided with a rotation module (213) and a rotation drive assembly (214). The output end of the rotation module (213) is connected to the Y-axis servo module (22). The rotation drive assembly (214) drives the rotation module (213) to rotate, thereby causing the Y-axis servo module (22) to rotate around the Z-axis.

6. A gantry-type robotic arm according to any one of claims 1 and 4, characterized in that, The connecting member (211) is slidably connected to the Z-axis guide rail (54), and the connecting member (211) is fixedly connected to the Z-axis traction belt (52). A fan (212) is provided inside the connecting member (211), and a channel communicating with the fan (212) is provided in the internal cavity of the robotic arm platform (21).

7. A gantry-type robotic arm according to claim 5, characterized in that, The Y-axis servo module (22) has a built-in dual linear module. The Y-axis servo module (22) includes two Y-axis moving arms (223) that move along the Y-axis. The front end of the Y-axis moving arm (223) is fixedly connected to a support claw (224).

8. A gantry-type robotic arm according to claim 7, characterized in that, The dual linear module and the two Y-axis moving arms (223) are arranged in two layers, upper and lower.

9. A gantry-type robotic arm according to claim 7, characterized in that, A vision camera (221) is provided at the tail of the upper surface of the Y-axis servo module (22), and wafer limiting cards (222) for limiting the Y-axis movement of the wafer are also provided on both sides of the Y-axis servo module (22).

10. A gantry-type robotic arm according to claim 1, characterized in that, The sliding conductive module (6) also includes an insulating groove (61) and an insulating bracket (63). The insulating groove (61) is fixedly installed in the Z-axis bracket (55). The insulating groove (61) is arranged along the stroke of the connector (211). The conductive track (62) is arranged in the insulating groove (61). The insulating bracket (63) is fixedly connected to the connector (211). The electric contact spring (64) is fixedly installed at the end of the insulating bracket (63). The conductive line (65) is built into the insulating bracket (63). One end of the conductive line (65) is electrically connected to the electric contact spring (64). The other end of the conductive line (65) is electrically connected to the electrical control system in the robotic arm platform (21).

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