Electrically operated silicon rod gripper

Abstract

The application discloses a silicon rod electric clamping jaw, which comprises an electric clamping jaw body and a clamping jaw cylinder, the clamping jaw cylinder is connected with at least one clamping jaw of the electric clamping jaw body, and an electromagnetic valve is arranged between the clamping jaw cylinder and a gas storage tank. When the electric clamping jaw body clamps a product, and when power failure occurs, the electromagnetic valve is turned on to connect the clamping jaw cylinder and the gas storage tank, and the gas storage tank supplies gas to the clamping jaw cylinder so that the clamping jaw has a tendency to clamp the product. When the electric clamping jaw body clamps a silicon rod, the clamping jaw cylinder is driven by high-pressure gas in the gas storage tank to make the clamping jaw of the electric clamping jaw body have a tendency to clamp the silicon rod, so that the whole process of transporting the silicon rod is stable. If power failure occurs, the state of the clamping jaw clamping the product is maintained due to the fact that the electromagnetic valve is turned on to connect the clamping jaw cylinder and the gas storage tank, and the silicon rod is prevented from falling off.

Description

Technical Field

[0001] This invention relates to the field of semiconductors, and more specifically to a conveying device for semiconductor products. Background Technology

[0002] During transport, monocrystalline silicon rods need to be removed from their packaging and placed into a silicon rod fixture. This process can only involve clamping the ends of the silicon rods. Since silicon rods are valuable, the entire transportation process must ensure stable handling and prevent them from falling. Summary of the Invention

[0003] The technical problem solved by this invention is: how to ensure stable handling and prevent the silicon rod from falling during the entire transportation process, especially in the event of a power outage, when the existing technology uses electric grippers to hold the silicon rod.

[0004] To solve the above-mentioned technical problems, the present invention provides the following technical solution: an electric gripper for silicon rods, comprising an electric gripper body and a gripper cylinder, wherein the gripper cylinder is connected to at least one gripper of the electric gripper body, and an electromagnetic valve is provided between the gripper cylinder and an air storage tank; when the electric gripper body clamps the product, and when the power is off, the electromagnetic valve connects the gripper cylinder and the air storage tank, and the air storage tank supplies air to the gripper cylinder so that the gripper tends to clamp the product.

[0005] According to the above technical solution, the electric gripper body holds the end of the silicon rod. When a pair of grippers clamp the silicon rod, the solenoid valve connects the gripper cylinder and the air tank. The air tank supplies air to the gripper cylinder, and the gripper cylinder acts on the gripper connected to it. The gripper is the gripper of the electric gripper body, and the gripper has the tendency to clamp the product.

[0006] According to the above technical solution, while the electric gripper body clamps the silicon rod, the gripper cylinder operates under the action of high-pressure gas in the gas tank, causing the gripper of the electric gripper body to tend to clamp the silicon rod. In this way, the gripper clamps the silicon rod under the dual action of the electric gripper body and the gripper cylinder, which can ensure the stability of the entire silicon rod transportation process and prevent the rod from falling off.

[0007] According to the above technical solution, after the electric gripper body clamps the silicon rod, and during the transportation of the silicon rod, if a power failure occurs, the solenoid valve connects the gripper cylinder and the air tank. The air tank supplies air to the gripper cylinder, causing the gripper to tend to clamp the product. At this time, when the electric gripper body loses power and does not work, the gripper cylinder ensures that the gripper remains in a clamped state, thereby preventing the rod from falling off.

[0008] As an alternative, when the solenoid valve is de-energized, it connects the gripper cylinder to the air tank; when the solenoid valve is energized, the gripper cylinder is connected to the outside atmosphere. Under the control of the control unit, the solenoid valve can switch between energized and de-energized states; in the event of a power outage, the solenoid valve can only be in the de-energized state.

[0009] When power is available, under the control of the control unit, the solenoid valve is energized, the gripper cylinder is connected to the outside atmosphere and disconnected from the gas tank. In this state, the electric gripper body clamps the silicon rod until it is firmly clamped. The gripper moves the piston of the gripper cylinder accordingly, and the gripper cylinder has no effect on the gripper. When the electric gripper body clamps the silicon rod, under the control of the control unit, the solenoid valve switches to the de-energized state. The solenoid valve connects the gripper cylinder and the gas tank. The gripper cylinder actuates under the action of high-pressure gas in the gas tank, causing the gripper body of the electric gripper body to tend to clamp the silicon rod. In this way, the state of the gripper clamping the silicon rod is maintained.

[0010] In the event of a power outage, the solenoid valve is naturally de-energized. The solenoid valve connects the gripper cylinder and the air tank. The gripper cylinder operates under the action of high-pressure gas in the air tank, causing the gripper of the electric gripper body to tend to clamp the silicon rod. In this way, the gripper clamps the silicon rod, preventing the silicon rod from loosening due to power failure and falling off.

[0011] Alternatively, the gripper is equipped with a pressure sensor that monitors the clamping force of the gripper on the product. The pressure sensor is electrically connected to the control unit, which in turn is electrically connected to the solenoid valve. When the pressure sensor detects that the clamping force has reached a preset value, the control unit controls the electric gripper to stop clamping and simultaneously switches the solenoid valve to a de-energized state. The solenoid valve then connects the gripper cylinder and the air tank, allowing the air tank to supply air to the gripper cylinder, thus causing the gripper to tend to clamp the product.

[0012] As an improvement, the pressure sensor is electrically connected to a pressure sensor instrument, which can display the clamping force in real time. This allows for quantifiable adjustment of clamping parameters when clamping the silicon rod, reducing control complexity.

[0013] When releasing the product, the control unit switches the solenoid valve to the energized state, and the gripper cylinder is connected to the outside atmosphere; under the control of the control unit, the electric gripper body releases the product.

[0014] The air tank is equipped with an air pressure monitoring device, which is connected to an alarm system. In the event of an unexpected air supply interruption, the compressed air in the air tank can maintain the required holding force pressure for the gripper cylinder for a certain period of time. Simultaneously, the air pressure monitoring device monitors the air pressure inside the tank and immediately alarms to alert the operator if the air supply is interrupted. Alternatively, the air pressure monitoring device can be installed on the connecting air pipe between the air source and the air tank; if the air source detects a lack of air supply to the air tank, the alarm system will sound.

[0015] As an improvement, the electric gripper body has at least two sets of first photoelectric sensors on each pair of grippers, positioned horizontally on the grippers to detect whether the product is offset horizontally relative to the grippers. The electric gripper body also has at least two sets of second photoelectric sensors on each pair of grippers, positioned vertically on the grippers to detect whether the product is offset vertically relative to the grippers.

[0016] The electric gripper body is used to clamp products of different sizes. When all the first and second photoelectric sensors are active, it ensures that the first product does not shift horizontally or vertically. Conversely, when all the first photoelectric sensors are deactivated, the upper second photoelectric sensor is deactivated, while the lower second photoelectric sensor is active, ensuring that the second product does not shift horizontally or vertically. The control unit will only allow a lifting action when the electric gripper body is holding the first / second product without shifting, preventing the silicon rod from falling due to gripping misalignment.

[0017] The present invention has the following technical effects: First, the gripper cylinder can ensure that the electric gripper is in a stable clamping state after clamping the product, thus preventing the product from falling during transportation. Secondly, under the action of the solenoid valve, even in the event of a power outage, the electric gripper can still maintain a clamped state on the product, preventing the product from falling due to the loosening of the electric gripper. Third, thanks to the gas tank, even in the event of a gas outage, the electric gripper can still keep the product clamped for a period of time. Fourth, the pressure sensor is paired with a pressure sensor instrument, which allows the electric gripper to adjust the clamping torque parametrically, reducing the difficulty of operation and improving the efficiency of operation. Fifth, the first photoelectric sensor set on the left and right, and the second photoelectric sensor set on the top and bottom, can determine whether there is product deviation when the electric gripper is holding the product. If there is no product deviation, the product is lifted to prevent the product from falling due to gripping deviation. Sixth, the several first photoelectric sensors arranged on the left and right, and the several second photoelectric sensors arranged on the top and bottom, can determine whether products of different sizes are offset through different signal feedback combinations, thus expanding the application range of the electric gripper. Attached Figure Description

[0018] The invention will be further described below with reference to the accompanying drawings: Figure 1 A schematic diagram of an electric gripper for silicon rods; Figure 2 for Figure 1 A schematic diagram showing the silicon rod electric gripper viewed from the right side; Figure 3 for Figure 1 A schematic diagram obtained from viewing the silicon rod electric gripper from below; Figure 4 This is a front view of the electric gripper for silicon rods. Figure 5 A schematic diagram of an electric gripper holding an 8-inch silicon rod; Figure 6 for Figure 5 A partial view from center A; Figure 7 A schematic diagram of a 6-inch silicon rod being held by an electric gripper. Figure 8 for Figure 7 A partial view from point B; Figure 9 This is a schematic diagram of the air path for the gripper cylinder 20.

[0019] Explanation of symbols in the diagram: 10. Electric gripper body; 11. Gripper; 12. Pressure sensor; 13. First photoelectric sensor; 14. Second photoelectric sensor; 15. Servo motor; 151. Planetary reducer; 16. Bidirectional lead screw; 17. Base frame; 171. Guide rail; 20. Gripper cylinder; 21. Air tank; 22. Connecting block; 23. First solenoid valve; 24. Second solenoid valve; 25. Air source; 26. Check valve; 91. 8-inch silicon rod; 92. 6-inch silicon rod. Detailed Implementation

[0020] Combination Figure 1 , Figure 5 , Figure 9 The silicon rod electric gripper includes an electric gripper body 10 and a gripper cylinder 20. The gripper cylinder is connected to at least one gripper 11 of the electric gripper body. A solenoid valve is provided between the gripper cylinder and the air storage tank 21. When the electric gripper body clamps the product, and when the power is off, the solenoid valve opens the gripper cylinder 20 and the air storage tank 21, and the air storage tank supplies air to the gripper cylinder, so that the gripper 11 tends to clamp the product.

[0021] Combination Figures 1 to 3The electric gripper body 10 includes a servo motor 15, a bidirectional lead screw 16, and a pair of grippers 11. The servo motor 15 is mounted on a base frame 17 and is connected to a planetary reducer 151. The planetary reducer is connected to the bidirectional lead screw 16, which is mounted on the bottom of the base frame 17 via bearings and bearing seats. A guide rail 171 is provided at the bottom of the base frame 17. The pair of grippers 11 are slidably engaged with the guide rail 171 via sliders. The bidirectional lead screw 16 is screwed to the pair of grippers 11. Specifically, the left-hand threaded portion of the bidirectional lead screw is screwed to one gripper, and the right-hand threaded portion is screwed to the other gripper. Driven by the servo motor 15, the bidirectional lead screw 16 rotates in the forward / reverse direction, driving the pair of grippers 11 to move towards each other / away from each other along the guide rail 171.

[0022] like Figure 1 The gripper cylinder 20 is mounted on the base frame 17, which has a clearance groove. The piston rod of the gripper cylinder 20 is connected to a gripper 11 of the electric gripper body 10 via a connecting block 22, which passes through the clearance groove. When both air chambers of the gripper cylinder 20 are in communication with the outside atmosphere, the connecting block 22 slides along the clearance groove under the drive of the bidirectional lead screw 16, and the connecting block 22 drives the piston rod of the gripper cylinder 20 to move accordingly.

[0023] like Figure 9 The piston of the gripper cylinder 20 divides the cylinder body into a left chamber and a right chamber. The piston rod extends outward from the left chamber and is connected to a gripper 11 of the electric gripper body 10 via the connecting block 22. A first solenoid valve 23 is provided between the left chamber and the air tank 21, and a second solenoid valve 24 is connected to the right chamber. When the first solenoid valve 23 is de-energized, it connects the gripper cylinder 20 to the air tank 21; when it is energized, the left chamber of the gripper cylinder 20 is connected to the outside atmosphere. Regardless of whether the second solenoid valve 24 is energized or de-energized, the right chamber of the gripper cylinder 20 is always connected to the outside atmosphere.

[0024] When power is available, under the control of the control unit, the first solenoid valve 23 is energized, the left air chamber of the gripper cylinder 20 is connected to the outside atmosphere and disconnected from the air tank 21. In this state, the electric gripper body 10 clamps the silicon rod until it is tightly clamped. The gripper 11 drives the piston rod of the gripper cylinder to move accordingly, and the gripper cylinder 20 has no effect on the gripper 11. When the electric gripper body 10 clamps the silicon rod, under the control of the control unit, the first solenoid valve 23 switches to the de-energized state. The first solenoid valve connects the left air chamber of the gripper cylinder 20 to the air tank 21. The piston of the gripper cylinder 20 moves to the right under the action of the high-pressure gas in the air tank 21, and the gripper 11 connected to the piston rod tends to clamp the silicon rod. In this way, the state in which the gripper 11 clamps the silicon rod is maintained.

[0025] In the event of a power outage, the first solenoid valve 23 is naturally de-energized. The first solenoid valve connects the left air chamber of the gripper cylinder 20 to the air tank 21. Under the action of the high-pressure gas in the air tank, the piston of the gripper cylinder 20 moves to the right, causing the gripper 11 of the electric gripper body 10 to tend to clamp the silicon rod. In this way, the state of the gripper clamping the silicon rod is maintained, preventing the electric gripper body 10 from losing power and loosening the silicon rod, causing the silicon rod to fall.

[0026] Combination Figure 1 , Figure 9 The gripper 11 is equipped with a pressure sensor 12, which monitors the clamping force of the gripper on the product. The pressure sensor is electrically connected to the control unit, which is also electrically connected to the solenoid valve. When the pressure sensor 12 detects that the clamping force has reached a preset value, the control unit controls the electric gripper body 10 to stop the clamping action. At the same time, the solenoid valve is switched to the de-energized state, and the first solenoid valve 23 connects the gripper cylinder 20 and the air tank 21. The air tank supplies air to the gripper cylinder, causing the gripper 11 to have a tendency to clamp the product. This tendency allows the gripper 11 to maintain the state of clamping the silicon rod.

[0027] Pressure sensor 12 is electrically connected to a pressure sensor instrument, which displays the clamping force in real time. The pressure sensor instrument can be mounted on the base frame 17 or in other locations on the equipment containing the silicon rod electric gripper, allowing the operator to easily read the instrument's values. Through the pressure sensor instrument, the operator can parameterize and adjust the clamping torque, reducing operational difficulty and improving efficiency.

[0028] refer to Figure 9 When releasing the product, the control unit switches the first solenoid valve 23 and the second solenoid valve 24 to the energized state, and the left and right air chambers of the gripper cylinder 20 are connected to the outside atmosphere. Under the control of the control unit, the pair of grippers 11 of the electric gripper body 10 move away from each other, releasing the product, and the movement of the gripper cylinder 20 on the pair of grippers 11 is unimpeded.

[0029] like Figure 9 The gas storage tank 21 is connected to the gas source 25 via a gas pipeline, which is equipped with a one-way valve 26. The gas storage tank 21 is equipped with a pressure monitoring device, which can be installed on the gas pipeline and is connected to an alarm device. In the event of an accidental gas outage, the compressed air in the gas storage tank 21 can maintain the required holding pressure for the gripper cylinder 20 for a certain period. Simultaneously, the pressure monitoring device detects the gas outage and immediately alarms to alert the operator.

[0030] like Figure 6 , Figure 8The electric gripper body 10 has two sets of first photoelectric sensors 13 on its pair of grippers 11. These sensors are positioned horizontally on the grippers to detect whether the product is offset horizontally relative to the grippers. The electric gripper body 10 also has two sets of second photoelectric sensors 14 on its pair of grippers 11. These sensors are positioned vertically on the grippers to detect whether the product is offset vertically relative to the grippers. The first photoelectric sensors 13 are through-beam photoelectric sensors, and the second photoelectric sensors 14 are diffuse reflection photoelectric sensors.

[0031] The electric gripper body 10 is used to grip 8-inch silicon rods and 6-inch silicon rods.

[0032] In actual operation, the 8-inch / 6-inch silicon ingot is located inside the packaging box. Driven by the robotic arm, the electric grippers extend into the packaging box. Driven by the servo motor 15, a pair of grippers 11 close together to hold the silicon ingot. (Refer to...) Figure 5 Both sets of first photoelectric sensors 13, distributed horizontally on the gripper 11, are transmitting signals, and both sets of second photoelectric sensors 14, distributed vertically, are transmitting signals. This indicates that the 8-inch silicon rod 91 has not shifted horizontally or vertically, and the relative position between the silicon rod and the electric gripper is guaranteed. (Reference) Figure 6 Then, a pair of grippers 11 clamp the silicon rod. When the pressure sensor 12 detects that the clamping force has reached a preset value, the control unit controls the electric gripper body 10 to stop the clamping action, and at the same time switches the first solenoid valve 23 and the second solenoid valve 24 from the energized state to the de-energized state. Figure 9 The first solenoid valve 23 connects the gripper cylinder 20 and the air tank 21. The air tank 21 supplies air to the left air chamber of the gripper cylinder 20, causing the gripper 11 to tend to clamp the silicon rod, thus maintaining the state of the pair of grippers 11 clamping the silicon rod. During the process of the pair of grippers 11 clamping and clamping the silicon rod, under the control of the control unit, the first solenoid valve 23 and the second solenoid valve 24 are energized. The left air chamber of the gripper cylinder 20 is connected to the outside atmosphere and disconnected from the air tank 21, while the right air chamber of the gripper cylinder 20 is connected to the outside atmosphere. In this way, the electric gripper body 10 can clamp and clamp the silicon rod without obstruction.

[0033] refer to Figure 7 , Figure 8When clamping a 6-inch silicon rod 92, both sets of first photoelectric sensors 13 distributed on the left and right sides of the grippers 11 of the electric gripper body 10 are completely silent. Furthermore, the upper second photoelectric sensor 14 is silent, while the lower second photoelectric sensor is active, indicating that the 6-inch silicon rod 92 has not shifted in the left-right or up-down directions, and the relative position between the silicon rod and the electric grippers is maintained. Then, the pair of grippers 11 clamp the silicon rod. When the pressure sensor 12 detects that the clamping force has reached a preset value, the control unit controls the electric gripper body 10 to stop the clamping action, and simultaneously switches the first solenoid valve 23 and the second solenoid valve 24 from the energized state to the de-energized state. (Refer to...) Figure 9 The first solenoid valve 23 connects the gripper cylinder 20 and the air tank 21. The air tank 21 supplies air to the left air chamber of the gripper cylinder 20, causing the gripper 11 to tend to clamp the silicon rod, thus maintaining the state of the pair of grippers 11 clamping the silicon rod.

[0034] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A silicon rod electric gripper, comprising an electric gripper body (10) and a gripper cylinder (20), characterized in that: The gripper cylinder is connected to at least one gripper (11) of the electric gripper body. An electromagnetic valve is provided between the gripper cylinder and the air tank (21). When the electric gripper body clamps the product, and when the power is off, the electromagnetic valve connects the gripper cylinder (20) and the air tank (21). The air tank supplies air to the gripper cylinder, causing the gripper (11) to have a tendency to clamp the product.

2. The silicon rod electric gripper as described in claim 1, characterized in that: When the solenoid valve is de-energized, it connects the gripper cylinder (20) to the air tank (21); when the solenoid valve is energized, the gripper cylinder is connected to the outside atmosphere.

3. The silicon rod electric gripper as described in claim 1, characterized in that: The gripper (11) is equipped with a pressure sensor (12). The pressure sensor can monitor the gripping force of the gripper on the product. The pressure sensor is electrically connected to the control unit, and the control unit is electrically connected to the solenoid valve. When the pressure sensor (12) detects that the clamping force has reached the preset value, the control unit controls the electric gripper body (10) to stop the clamping action, and at the same time switches the solenoid valve to the de-energized state. The solenoid valve connects the gripper cylinder (20) and the air tank (21). The air tank supplies air to the gripper cylinder, so that the gripper (11) tends to clamp the product.

4. The silicon rod electric gripper as described in claim 3, characterized in that: The pressure sensor (12) is electrically connected to the pressure sensor instrument, which can display the clamping force in real time.

5. The silicon rod electric gripper as described in claim 3, characterized in that: When releasing the product, the control unit switches the solenoid valve to the energized state, and the gripper cylinder (20) is connected to the outside atmosphere; under the control of the control unit, the electric gripper body (10) releases the product.

6. The silicon rod electric gripper as described in claim 1, characterized in that: The gas storage tank (21) is equipped with a gas pressure monitoring device, which is connected to an alarm device.

7. The silicon rod electric gripper as described in claim 1, characterized in that: The electric gripper body (10) has at least two sets of first photoelectric sensors (13) on a pair of grippers (11). The two sets of first photoelectric sensors are set on the grippers left and right to detect whether the product is offset from the grippers in the left and right directions. The electric gripper body (10) has at least two sets of second photoelectric sensors (14) on a pair of grippers (11). The two sets of second photoelectric sensors are arranged on the grippers in an up-down distribution to detect whether the product is offset up or down relative to the grippers.

8. The silicon rod electric gripper as described in claim 7, characterized in that: The electric gripper body (10) is used to grip products of different sizes; All of the first photoelectric sensors (13) have signals, and all of the second photoelectric sensors (14) have signals, ensuring that the first product does not shift in the left-right and up-down directions; All of the first photoelectric sensors (13) are without signal, and the second photoelectric sensor (14) located above is without signal, while the second photoelectric sensor located below is with signal, ensuring that the second product (92) does not deviate in the left-right and up-down directions.

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