High-throughput robotic system for the preparation of environmentally sensitive thin films and method of controlling the same

Abstract

The application provides a high-throughput intelligent robot preparation system for environment-sensitive films and a control method thereof. The high-throughput intelligent robot preparation system comprises a glove box assembly, a linear guide rail module, a collaborative robot unit, a process station group, a detection and sorting unit and a control device. The glove box assembly comprises a box body, a transition cabin and an atmosphere maintenance circulating device, and the box body is internally provided with a bottom plate. The linear guide rail module is laid on the bottom plate of the box body. The collaborative robot unit is slidingly installed on the linear guide rail module. The collaborative robot system comprises a base and a mechanical arm. The mechanical arm comprises independently controllable first and second mechanical arms. The first and second mechanical arms are arranged on the same base or are arranged on independently movable bases respectively. The application utilizes the asymmetric division of labor and time sequence cooperation of the double arms to eliminate the cross-contamination risk of the precursor solution, and combines in-situ spectrum monitoring and visual feedback mechanism to construct a high-throughput material screening platform capable of truly reflecting the performance difference of the formula.

Description

Technical Field

[0001] This invention relates to a perovskite thin film preparation system, specifically to a high-throughput embodied intelligent robot preparation system for environmentally sensitive thin films and its control method, belonging to the field of semiconductor material preparation technology. Background Technology

[0002] Next-generation optoelectronic functional materials, represented by metal halide perovskites, organic photovoltaics (OPV), and quantum dots (QLED), have attracted much attention in fields such as solar cells, light-emitting diodes, and photodetectors due to their excellent optoelectronic properties. However, these environmentally sensitive materials are extremely sensitive to moisture and oxygen in the environment. Even trace amounts of water and oxygen can cause crystal structure collapse or phase transition, which in turn seriously affects the film quality and long-term stability of the device. Therefore, their preparation process must be carried out in a strictly controlled anhydrous and oxygen-free environment. In industrial and scientific research, glove box systems filled with inert gas are commonly used.

[0003] In the context of materials genome engineering and high-throughput screening, researchers need to rapidly validate tens of thousands of formulations. This process faces three major challenges:

[0004] Maintaining extreme environments: The material is extremely sensitive to water and oxygen. Even slight environmental fluctuations can lead to abnormal film crystallization, manifested as increased film gray value, yellowing, or the formation of impurities.

[0005] Capturing extreme operations: The crystallization and nucleation process of thin films often occurs in milliseconds. Traditional timed operations cannot adapt to the different crystallization kinetics of different formulations and are prone to missing the optimal nucleation burst point.

[0006] The requirement for extreme repeatability: In high-throughput screening, it is essential to ensure that the physical conditions of each preparation, such as pipetting speed, spin coating acceleration, and droplet contact angle, are highly consistent. Only by eliminating random errors introduced by the equipment can the true performance differences between different formulations, from low to high quality, be accurately assessed.

[0007] Current methods for preparing environmentally sensitive materials mainly rely on manual operation or simple single-arm automated equipment, which have significant drawbacks:

[0008] First, manual operation is limited by physiological limits, making it impossible to guarantee the timing accuracy of extreme operations, and it is also very easy to introduce human contamination.

[0009] Secondly, existing single-arm automated equipment has poor flexibility and usually adopts serial processes, making it difficult to achieve efficient coordination of dry and wet separation, which leads to easy cross-contamination of precursor solutions.

[0010] Furthermore, existing equipment lacks closed-loop feedback capabilities for the process. When faced with different formulations, the equipment often can only execute fixed programs and cannot sense the real-time state of the film, such as fluorescence bursts and grayscale changes. This makes it impossible to distinguish whether the quality differences in the final product are due to the upper / lower limits of the formulation's performance or fluctuations in the preparation process during formulation screening, severely restricting the efficiency of new material research and development.

[0011] Therefore, there is an urgent need for a high-throughput automated preparation system that can adapt to extreme environments, has the ability to capture extreme operations, and can achieve extremely repeatable results, in order to meet the stringent requirements of environmentally sensitive materials from basic research and development to pilot production. Summary of the Invention

[0012] Based on the above background, the purpose of this invention is to provide a high-throughput embodied intelligent robot preparation system and its control method for environmentally sensitive thin films. By integrating collaborative robot units into an anhydrous and oxygen-free glovebox environment, the asymmetric division of labor and temporal coordination of the two arms are utilized to eliminate the risk of cross-contamination of precursor solutions. Combined with in-situ spectral monitoring and visual feedback mechanisms, the system can accurately capture the timing of millisecond-level phase transitions in the film formation process, and construct a high-throughput material screening platform that can truly reflect the differences in formulation performance. This addresses the shortcomings of existing preparation systems in dealing with the challenges of maintaining extreme environments, capturing extreme operations, and achieving extreme repeatability in the preparation of environmentally sensitive thin films.

[0013] To achieve the above-mentioned objectives, the present invention provides the following technical solution:

[0014] A high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films includes:

[0015] The glove box assembly includes a box that encloses a sealed cavity, a transition chamber disposed on the side wall of the box, and an atmosphere maintaining and circulating device communicating with the sealed cavity. The box has a bottom plate inside.

[0016] A linear guide module is laid horizontally on the bottom plate of the box along the length of the sealed cavity;

[0017] A collaborative robot unit is slidably mounted on the linear guide module. The collaborative robot system includes a base and a robotic arm. The robotic arm includes an independently controllable first robotic arm and a second robotic arm. The first robotic arm and the second robotic arm are disposed on the same base, or separately disposed on independently movable bases.

[0018] The process station group is linearly distributed along one side of the linear guide module. The process station group includes a consumable storage station for storing various consumables, a reagent storage station with a bottle holding mechanism, a spin coating film forming station with a spin coater, an annealing treatment station with a heating plate, a testing support platform with a backlight source, and a finished product storage station for storing finished products.

[0019] An inspection and sorting unit is located at the other end of the sealed cavity relative to the collaborative robot unit, and is adjacent to the inspection carrier and the finished product storage station. The inspection and sorting unit includes an inspection displacement mechanism and a composite execution head installed at the output end of the inspection displacement mechanism.

[0020] The control device is electrically connected to the collaborative robot unit, the process station group, and the detection and sorting unit, respectively.

[0021] Preferably, the composite execution head includes:

[0022] The mounting bracket is fixedly connected to the end of the displacement detection mechanism;

[0023] An industrial camera is vertically mounted on the front side of the mounting bracket, with the optical axis of the lens pointing vertically downwards.

[0024] The sorting gripper is mounted on the lower side of the mounting bracket and is located outside the imaging field of view of the industrial camera.

[0025] The detection displacement mechanism is configured to drive the mounting bracket to switch between a first position and a second position. In the first position, the optical axis of the industrial camera coincides with the center of the detection support platform. In the second position, the gripping center of the sorting claw coincides with the center of the detection support platform.

[0026] Preferably, the end of the first robotic arm is provided with a two-finger parallel gripper, which is capable of gripping the edge of the glass substrate and the cap of the reagent bottle; the end of the second robotic arm is provided with a pipetting drive module, which has a connecting rod for connecting a disposable pipette tip and a linear actuator for driving the connecting rod to perform piston movement.

[0027] Preferably, the bottle-holding mechanism includes:

[0028] A mounting base is fixed to the platform of the reagent storage station;

[0029] The first positioning block is fixed on the fixing seat, and the side wall of the first positioning block is provided with a plurality of first V-shaped grooves for abutting against one side outer wall of the reagent bottle.

[0030] A push rod cylinder is fixed on the fixed base and positioned relative to the first positioning block;

[0031] The second positioning block is fixedly connected to the push rod end of the push rod cylinder and is positioned relative to the first positioning block. The side wall of the second positioning block is provided with a plurality of second V-shaped grooves for abutting against the outer wall of the other side of the reagent bottle. The second V-shaped grooves are positioned opposite to the first V-shaped grooves.

[0032] The control device is configured to, while controlling the push rod cylinder to push the second positioning block to restrict the rotational degree of freedom of the reagent bottle, drive the two-finger parallel gripper at the end of the first robotic arm to clamp and rotate the bottle cap of the reagent bottle, so that the bottle cap is detached from the body of the reagent bottle.

[0033] Preferably, the control device is further configured to control the first robotic arm to place the glass substrate on the turntable of the spin coater and maintain its adsorption and fixation, and then control the second robotic arm to drive the disposable suction head containing the solution to move above the geometric center of the glass substrate, and discharge the solution within a preset delay time after the spin coater starts rotating.

[0034] Preferably, the high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films also includes an in-situ spectral detection component, which includes a fiber optic probe component and a spectrometer host. The fiber optic probe component is suspended above the heating plate of the annealing station and is configured to collect fluorescence signals on the surface of the thin film on the glass substrate during the heating process of the glass substrate by the heating plate.

[0035] Preferably, the inspection platform is configured as the physical interaction boundary between the collaborative robot unit and the inspection and sorting unit; the control device is further configured to, after controlling the second robotic arm of the collaborative robot unit to place the annealed glass substrate on the inspection platform and withdraw it to a safe area, control the inspection and sorting unit to move above the inspection platform to perform inspection and gripping actions.

[0036] A control method for a high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films as described in any of the preceding claims, the method comprising the following steps:

[0037] S1. Drive the first robotic arm to pick up the glass substrate to be processed from the consumable storage station, place the glass substrate on the spin coater of the spin coating station, and drive the second robotic arm to move above the reagent storage station after loading a disposable suction tip from the consumable storage station.

[0038] S2. Control the bottle holding mechanism to clamp the reagent bottle of the reagent storage station, drive the first robotic arm to unscrew the bottle cap of the displaced reagent bottle and keep it in the clamping state, drive the second robotic arm to insert the disposable pipette tip into the reagent bottle to draw the solution and then withdraw it, and then drive the first robotic arm to screw the bottle cap back onto the reagent bottle.

[0039] S3. Drive the second robotic arm to move to the spin coating station, and in conjunction with the rotation of the spin coater, drop the solution onto the surface of the glass substrate; after the drop is completed, drive the second robotic arm to move and detach and discard the used disposable suction tip;

[0040] S4. Drive the first robotic arm to transfer the spin-coated glass substrate to the annealing station for annealing.

[0041] S5. Drive the first robotic arm to transfer the annealed glass substrate to the inspection carrier platform, control the inspection and sorting unit to acquire images of the glass substrate on the inspection carrier platform, and if the image data meets the preset standard, control the composite execution head to grab the glass substrate and put it into the finished product storage station.

[0042] Preferably, the end of the second robotic arm is provided with a pipetting drive module, which has a connecting rod for connecting a disposable pipette tip and a linear actuator for driving the connecting rod to perform piston movement.

[0043] In step S2, when drawing the solution from the reagent bottle, the linear actuator of the pipetting drive module is controlled to draw a predetermined volume of solution at a first speed; the disposable pipette tip is kept below the liquid surface for a preset hydraulic balance time; after the disposable pipette tip is lifted off the liquid surface, the linear actuator is controlled to continue to retract a certain distance to form an air isolation column at the tip of the pipette tip; during the process of the second robotic arm moving towards the spin coating station, the acceleration curve of the end of the second robotic arm is controlled to be an S-shaped velocity plan.

[0044] Preferably, the high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films also includes an in-situ spectral detection component, which includes a fiber optic probe component and a spectrometer host. The fiber optic probe component is suspended above the heating plate of the annealing station and is configured to collect fluorescence signals on the surface of the thin film on the glass substrate during the heating process of the glass substrate by the heating plate.

[0045] In step S4, during the annealing process, the in-situ spectral detection component is controlled to continuously acquire the steady-state photoluminescence spectrum of the thin film on the glass substrate at a preset frequency; the peak position and full width at half maximum (FWHM) of the characteristic peaks in the steady-state photoluminescence spectrum are monitored in real time; when the characteristic peak position is detected to move to the preset perovskite crystal phase band and the FWHM narrows to the preset threshold and remains stable for more than a set time, it is determined that crystallization is complete, and the first robotic arm is immediately controlled to move the glass substrate out of the annealing station, regardless of whether the preset annealing time has been reached.

[0046] The present invention provides a high-throughput embodied intelligent robot fabrication system and its control method for environmentally sensitive thin films, which has the following significant advantages compared with the prior art:

[0047] This invention eliminates random errors from manual operation through high-precision automated control, ensuring high consistency in physical conditions such as pipetting volume, spin coating acceleration, and heat treatment time for each preparation. Experimental data shows that the films prepared by this system exhibit extremely high batch stability in key indicators such as water contact angle. This exceptional equipment repeatability means that differences in the quality of the final product are entirely attributable to the chemical properties of the formulation itself, rather than fluctuations in the preparation process. Therefore, this system can serve as a reliable high-throughput screening platform, helping researchers quickly distinguish a full range of formulation windows, from "low quality / specific performance" to "high quality / excellent performance."

[0048] This invention breaks through the limitations of traditional single-arm robots' serial operation. Through dual constraints of hardware configuration and control logic, the first execution robotic arm is defined as a dry arm, dedicated to handling clean substrates and unscrewing bottle caps; the second execution robotic arm is defined as a wet arm, dedicated to aspirating and dripping corrosive solutions, and immediately detaching the disposable pipette tip after dripping. This strict division of labor at the physical level, combined with the design of the detection platform as the interaction boundary, cuts off the path for the precursor solution to contaminate the finished product or detection instruments through the robotic arm tip, thereby maintaining the anhydrous and oxygen-free standard of the preparation environment at the microscopic level and effectively avoiding the formation of impurity phases.

[0049] This invention possesses the ability to capture critical operating moments, enabling adaptive process control. Addressing the extremely rapid and timing-sensitive crystallization process of environmentally sensitive materials, this invention introduces a multi-dimensional sensing strategy. In the pipetting stage, a control algorithm combining an air-isolated column and S-shaped velocity planning eliminates droplet splashing and bubble residue. In the annealing stage, an in-situ spectral detection component monitors the crystal phase evolution of the thin film in real time, accurately capturing nucleation burst points at the millisecond level, thereby dynamically determining the annealing endpoint based on the material's real-time state. This control strategy abandons rigid timing modes, ensuring that different formulations reach their upper limits of physical properties during the preparation process. Attached Figure Description

[0050] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0051] Figure 1 This is a schematic diagram of the overall structure of a high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films according to the present invention;

[0052] Figure 2 This is a schematic diagram of the internal structure of a high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films according to the present invention;

[0053] Figure 3 This is a schematic diagram of the end effector structure of the first robotic arm in this invention;

[0054] Figure 4 This is a schematic diagram of the end effector structure of the second robotic arm in this invention;

[0055] Figure 5 This is a top view of the right half of the layout of a high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films according to the present invention.

[0056] Figure 6 This is a top view of the left half of the layout of a high-throughput embodied intelligent robot fabrication system for environmentally sensitive films according to the present invention;

[0057] Figure 7 This is a schematic diagram of the bottle-holding mechanism in this invention;

[0058] Figure 8 This is a schematic diagram of the composite execution head structure of the detection and sorting unit in this invention;

[0059] Figure 9 This is a flowchart illustrating the control method of a high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films according to the present invention.

[0060] Figure 10 These are comparison images of the microstructures of films prepared by the high-throughput embodied intelligent robot fabrication system for environmentally sensitive films according to the present invention under different water and oxygen environments.

[0061] Figure 11 This is an in-situ PL spectrum collected during the annealing process of a high-throughput embodied intelligent robot preparation system for environmentally sensitive thin films according to the present invention, which shows the differences in nucleation and explosion times under different formulations.

[0062] Figure 12These are water contact angle test images of thin films with different formulations prepared by the high-throughput embodied intelligent robot preparation system for environmentally sensitive thin films according to the present invention.

[0063] In the diagram: 100, glove box assembly; 110, box body; 111, sealed cavity; 112, bottom plate; 113, atmosphere maintenance and circulation interface; 120, transition chamber;

[0064] 200. Linear guide rail module;

[0065] 300. Collaborative robot unit; 310. Base; 320. Torso; 330. First robotic arm; 331. Two-finger parallel gripper; 340. Second robotic arm; 341. Linear actuator; 342. Connecting rod;

[0066] 400. Process station assembly; 410. Consumables storage station; 411. Glass substrate carrier; 412. Pipeline carrier; 413. Reagent bottle carrier; 420. Reagent storage station; 421. Bottle holding mechanism; 422. Fixing base; 423. First positioning block; 424. Push rod cylinder; 425. Second positioning block; 430. Spin coating film forming station; 431. Spin coater; 432. Turntable; 440. Annealing station; 441. Heating plate; 450. Testing platform; 451. Backlight source; 460. Finished product storage station;

[0067] 500. Detection and sorting unit; 510. Detection and displacement mechanism; 520. Composite actuator head; 521. Mounting bracket; 522. Industrial camera; 523. Sorting gripper;

[0068] 600. Control device;

[0069] 700. In-situ spectral detection component; 701. Fiber optic probe component; 702. Spectrometer main unit. Detailed Implementation

[0070] The technical solution of the present invention will be further described in detail below through specific embodiments and in conjunction with the accompanying drawings. It should be understood that the implementation of the present invention is not limited to the following embodiments, and any modifications and / or alterations made to the present invention will fall within the protection scope of the present invention.

[0071] In this invention, unless otherwise specified, all parts and percentages are by weight, and the equipment and raw materials used are commercially available or commonly used in the art. Unless otherwise specified, the methods in the following embodiments are conventional methods in the art. Unless otherwise specified, the components or equipment in the following embodiments are general standard parts or components known to those skilled in the art, and their structures and principles can be learned by those skilled in the art through technical manuals or conventional experimental methods.

[0072] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings. In this detailed description, numerous specific details are set forth to facilitate explanation and provide a thorough understanding of the embodiments of the present invention. However, one or more embodiments may be practiced by those skilled in the art without these specific details.

[0073] This invention discloses a high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films. The system integrates a collaborative robot unit 300 in an anhydrous and oxygen-free environment, achieving full automation of the perovskite thin film fabrication process from solution preparation to detection through multi-module collaboration.

[0074] Specifically, such as Figure 1 and Figure 2 As shown, the system includes a glove box assembly 100, a linear guide module 200, a collaborative robot unit 300, a process station assembly 400, a detection and sorting unit 500, and a control device 600. The glove box assembly 100 includes a box 110 enclosing a sealed cavity 111, a transition chamber 120 located on the side wall of the box 110 for material entry and exit, and an atmosphere maintenance and circulation device (not shown) communicating with the sealed cavity 111. The side wall of the box 110 also has an atmosphere maintenance and circulation interface 113 for communicating with the atmosphere maintenance and circulation device. The atmosphere maintenance and circulation device removes water and oxygen from the sealed cavity 111 through circulation purification, ensuring that the internal environment is maintained at a water-free and oxygen-free standard, thereby protecting the perovskite precursor and film from degradation. The atmosphere maintenance and circulation device is an existing mature technology, and its structure will not be described in detail here. Inside the box 110, there is a base plate 112, on which the linear guide module 200 is horizontally laid along the length of the sealed cavity 111. The linear guide module 200 carries the collaborative robot unit 300. In this embodiment, the collaborative robot unit 300 is configured as a body-mounted dual-arm collaborative robot. Of course, in other embodiments, the collaborative robot unit 300 can also be configured as a body-mounted multi-arm collaborative robot or multiple collaborative single-arm robots. Specifically, in this embodiment, the collaborative robot unit 300 includes a base 310 slidably mounted on the linear guide module 200, a torso 320 vertically arranged on the base 310, and a first robotic arm 330 and a second robotic arm 340 extending from the shoulders on both sides of the torso 320. It should be noted that the collaborative robot unit 300 greatly expands its workspace by moving the base 310 on the linear guide module 200, enabling it to cover all workstations within the narrow glove box.

[0075] Furthermore, to achieve asymmetric precision operations, the first robotic arm 330 and the second robotic arm 340 are configured with different end-effector structures. For example... Figure 3As shown, the end of the first robotic arm 330 is equipped with a two-finger parallel gripper 331. This gripper is configured for dry operation, responsible for gripping the edge of the glass substrate for transport, and cooperating with the bottle-holding mechanism 421 described later to grip and rotate the bottle cap of the reagent bottle. Figure 4 As shown, the end of the second robotic arm 340 is equipped with a pipetting drive module. The pipetting drive module has an engagement rod 342 for connecting a disposable pipette tip and a linear actuator 341 for driving the engagement rod 342 to perform piston movement. It is configured to perform wet operations and is responsible for liquid aspiration and dripping. This left and right arm division of labor design effectively avoids the risk of cross-contamination between liquid handling and substrate transport.

[0076] Along one side of the linear guide module 200, process station groups 400 are linearly distributed. For example... Figure 5 and Figure 6 As shown, the process station group 400 sequentially includes a consumable storage station 410 for storing various consumables such as glass substrates, disposable pipette tips, and reagent bottles; a reagent storage station 420 equipped with a bottle holding mechanism 421; a spin coating station 430 equipped with a spin coater 431; an annealing station 440 equipped with a heating plate 441; a testing support platform 450 equipped with a backlight source 451; and a finished product storage station 460 for storing finished products. The consumable storage station 410 also includes a glass substrate carrier 411, a pipette tip carrier 412, and a reagent bottle carrier 413. The glass substrate carrier 411 has an array of square holes for positioning and limiting the placement of the glass substrate. The pipette tip carrier 412 has an array of circular holes for inserting disposable pipette tips, facilitating the rapid loading of disposable pipette tips by the second robotic arm 340. The reagent bottle carrier 413 has an array of circular holes for storing spare reagent bottles.

[0077] Furthermore, to achieve automated loading and unloading of disposable pipette tips, the lower end of the connecting rod 342 of the pipetting drive module at the end of the second robotic arm 340 is designed as a cylinder with a certain taper. This taper matches the inner taper of the disposable pipette tip to form an airtight interference fit. Correspondingly, the pipette tip carrier 412 of the consumable storage station 410 can also be provided with a waste pipette tip recycling area. The waste pipette tip recycling area includes a waste inlet and a gun ejection plate horizontally mounted above the waste inlet. The edge of the gun ejection plate has a U-shaped ejection groove. The opening width of the U-shaped ejection groove is larger than the diameter of the connecting rod 342, but smaller than the diameter of the tail flange of the disposable pipette tip.

[0078] Furthermore, to address the challenge of automating reagent bottle opening, a bottle-holding mechanism 421 is specifically designed for the reagent storage station 420. For example... Figure 7As shown, the bottle-holding mechanism 421 includes a fixed base 422 fixed to the table surface of the reagent storage station 420, a first positioning block 423 disposed on the fixed base 422, and a push rod cylinder 424 disposed opposite to it. The side wall of the first positioning block 423 is provided with multiple first V-shaped grooves for abutting against the outer wall of one side of the reagent bottle. The push rod end of the push rod cylinder 424 is fixedly connected to a second positioning block 425 provided with a second V-shaped groove. When the push rod cylinder 424 pushes, the second V-shaped groove of the second positioning block 425 approaches the V-shaped groove of the first positioning block 423, thereby clamping the reagent bottle from both sides and restricting the rotational freedom of the reagent bottle. This design allows the two-finger parallel gripper 331 of the first robotic arm 330 to grasp the bottle cap and rotate it to complete the opening, eliminating the need for complicated manual twisting actions of both hands, thus improving the stability of the operation.

[0079] Furthermore, to monitor the thin film crystallization process, the system also includes an in-situ spectral detection component 700. The fiber optic probe component 701 of the in-situ spectral detection component 700 is suspended above the heating plate 441 of the annealing station 440 and is configured to non-contactly acquire fluorescence signals from the thin film surface during heating. By monitoring the shift in the peak position and the change in the full width at half maximum (FWHM) of characteristic peaks, the control device 600 can determine the endpoint of perovskite phase formation and perform corresponding operations to avoid material decomposition caused by over-annealing.

[0080] At the other end of the sealed cavity 111 of the housing 110, a detection and sorting unit 500 is provided. The detection and sorting unit 500 is independent of the collaborative robot unit 300 and is located adjacent to the detection platform 450. The detection and sorting unit 500 includes a detection displacement mechanism 510 and a composite actuator 520 mounted at its output end. Specifically, as... Figure 8 As shown, the detection displacement mechanism 510 is a three-axis Cartesian coordinate robot, and the composite actuator 520 is mounted on the output end of the three-axis Cartesian coordinate robot. The composite actuator 520 includes a mounting bracket 521, an industrial camera 522, and a sorting gripper 523. Specifically, the mounting bracket 521 is mounted on the output end of the three-axis Cartesian coordinate robot, and the industrial camera 522 is vertically mounted on the front side of the mounting bracket 521 with its optical axis pointing vertically downward. The sorting gripper 523 is mounted on the lower side of the mounting bracket 521 and is located outside the camera's field of view. The detection displacement mechanism 510 is configured to drive the mounting bracket 521 to switch between a detection position and a gripping position. First, the industrial camera 522, in conjunction with the backlight source 451 at the bottom of the detection platform 450, captures a transmitted image. If the detection is qualified, the bracket is translated so that the sorting gripper 523 aligns with the substrate for gripping. The detection platform 450 here constitutes the physical interaction boundary between the collaborative robot unit 300 and the detection and sorting unit 500.

[0081] The system provided in this embodiment achieves deep automation of the perovskite preparation process through innovative hardware architecture design. The combination of the linear guide module 200 and the collaborative robot unit 300 breaks the spatial limitations of the fixed workstation of traditional single-arm robots, allowing a single robot to cover the entire process line from consumable retrieval to finished product output, improving the utilization rate of the glove box's internal space. The asymmetric end effector structure, with one arm gripping the other for liquid transfer, works in conjunction with a dedicated bottle-holding mechanism 421, enabling the system to directly operate on standard laboratory consumables for bottle opening.

[0082] Embodiments of the present invention also disclose a control method for the high-throughput embodied intelligent robot fabrication system for the above-mentioned environmentally sensitive thin films, such as... Figure 9 As shown, this method uses a control device 600 to coordinate the actions of each component to perform dry and wet operations, thereby achieving a highly efficient perovskite thin film preparation process without the risk of cross-contamination.

[0083] First, step S1, namely substrate loading and consumable preparation, is performed. The control device 600 drives the first robotic arm 330 to pick up a glass substrate to be processed from the consumable storage station 410, transports it, and places it on the spin coater 431 turntable 432 of the spin coating station 430. The second robotic arm 340 is then driven to move to the consumable storage station 410 to perform a press-fitting and tip-picking action, loading a new disposable pipette tip for this batch of reagents. Subsequently, the second robotic arm 340 is moved to a preset waiting area above the reagent storage station 420 and hovers there. Specifically, the second robotic arm 340 performs the press-fit and head-removal action as follows: the control device 600 drives the second robotic arm 340 to move above the head carrier 412 of the consumable storage station 410, aligning it with an unused head hole; then, it controls the Z-axis to descend vertically with a preset loading pressure, causing the connecting rod 342 to insert into the tail of the head; at this time, the control device 600 detects the Z-axis resistance through the end force sensor. When the resistance reaches a preset threshold, it confirms that a stable interference fit has been formed, and then the head is vertically extracted. Alternatively, if a preset position depth is used, the head is vertically extracted after the tail of the connecting rod 342 reaches the preset position depth.

[0084] Next, step S2 is executed, namely coordinated cap opening and liquid aspiration. After the first robotic arm 330 completes the tablet placement task, it immediately moves to the reagent storage station 420. The control device 600 controls the bottle-holding mechanism 421 to clamp the reagent bottle body, and the two-finger parallel gripper 331 of the first robotic arm 330 clamps and unscrews the cap before moving to avoid it. It should be noted that, in order to prevent the inside of the cap from coming into contact with the external environment and causing contamination, the first robotic arm 330 keeps the cap suspended in the air throughout the subsequent process. After the bottle opening is opened, the second robotic arm 340, which is in a standby state, immediately descends and inserts the disposable pipette tip below the liquid surface to perform the liquid aspiration procedure. After the liquid aspiration is completed, it withdraws from the bottle opening. Immediately afterwards, the first robotic arm 330 immediately performs the return and capping action to close the cap. This process achieves a seamless connection between opening, aspiration, and closing, minimizing the time the reagent is exposed.

[0085] Then, step S3, namely collaborative film formation, is performed. The second robotic arm 340 is moved to a position above the geometric center of the glass substrate. The control device 600 issues a command to start the spin coater 431 to rotate, and within a preset delay time after the rotation starts, controls the liquid dispensing drive module to discharge the solution, completing the dynamic spin coating. After the solution dripping action is completed, in order to prevent residual solution from contaminating subsequent processes, the control device 600 immediately drives the second robotic arm 340 to move to the ejector plate of the consumable storage station 410. The second robotic arm 340 performs a passive detachment action, inserting the neck of the disposable suction tip into the U-shaped ejection groove of the ejector plate, and then vertically lifting the end of the robotic arm, using the blocking force of the ejector plate to force the suction tip to detach and be discarded. Specifically, the passive detachment action performed by the second robotic arm 340 is as follows: the control device 600 drives the second robotic arm 340 to move to the waste suction head collection area; the height is adjusted so that the tail flange of the disposable suction head is lower than the plane of the ejector plate; then the end of the robotic arm is moved horizontally so that the connecting rod 342 slides into the depth of the U-shaped ejection groove; finally, the second robotic arm 340 is controlled to quickly and vertically lift upwards, using the blocking effect of the ejector plate on the tail flange of the suction head to force the suction head to overcome the interference friction and detach from the connecting rod 342 and fall into the waste box below. At this point, the second robotic arm 340 has completed all wet operation tasks for this round and exits the work area.

[0086] Next, step S4, namely annealing and monitoring, is executed. At this time, the first robotic arm 330, which has always been kept clean, intervenes again. The first robotic arm 330 is driven to move to the spin coating station 430, and its two parallel grippers 331 remove the spin-coated wet film substrate and smoothly transfer it to the heating plate 441 of the annealing station 440. During the heating process, the in-situ spectral detection component 700 continuously acquires the steady-state photoluminescence spectrum of the film at a preset frequency. The control device 600 calculates the peak position and full width at half maximum (FWHM) of the characteristic peaks in real time. When the monitored data matches the characteristics of the perovskite crystal phase and remains stable, it is determined that crystallization is complete.

[0087] Finally, step S5, the finished product inspection, is executed. Once crystallization is determined to be complete, the first robotic arm 330 is immediately driven to remove the annealed substrate from the heating plate 441 and transfer it to the inspection support platform 450, then withdraws it to a safe area. The inspection and sorting unit 500 then intervenes, with the inspection displacement mechanism 510 driving the industrial camera 522 to align with the substrate and the backlight source 451 activating to acquire an image. If the image grayscale uniformity meets the standard, the process switches to the sorting gripper 523 to pick up the glass substrate and place it in the finished product storage station 460; otherwise, it is picked up and placed in the waste area.

[0088] Furthermore, to avoid residual liquid droplets falling onto the glove box surface during pipetting operations and causing contamination, and to prevent excessively fast liquid aspiration from generating air bubbles in the disposable pipette tip, which could lead to pinhole defects during spin coating, in step S2, when drawing solution from the reagent bottle, the linear actuator 341 of the pipetting drive module is controlled to draw a predetermined volume of solution at a first speed; the disposable pipette tip is kept below the liquid surface for a preset hydraulic equilibrium time; after the disposable pipette tip is lifted from the liquid surface, the linear actuator 341 is controlled to continue to retract a certain distance to form an air isolation column at the tip of the pipette tip; during the movement of the second robotic arm 340 towards the spin coating station 430, the acceleration curve of the end of the second robotic arm 340 is controlled to be an S-shaped velocity profile to suppress the inertial sloshing of the liquid inside the pipette tip.

[0089] The principle behind the aforementioned anti-drip liquid aspiration procedure is that the perovskite precursor solution has low surface tension and viscosity, making it extremely prone to sliding off the tip of the suction head under gravity. By controlling the linear actuator 341 to continue retraction after the suction head is lifted from the liquid surface, an air isolation column is formed below the liquid at the tip of the suction head, creating a negative pressure buffer zone. Even when the second robotic arm 340 vibrates slightly during high-speed movement, this negative pressure buffer zone can effectively absorb the minute displacement of the liquid, thereby locking the liquid in and preventing the solution from dripping onto the glove box platform and causing contamination.

[0090] S-shaped velocity planning refers to the sigmoid shape of the velocity curve at the end of the second robotic arm 340. Its core principle is to ensure that the rate of change of acceleration is continuous and finite, rather than the abrupt changes seen in trapezoidal velocity planning. Since the pipette tip is filled with fluid during pipetting, a conventional trapezoidal velocity planning would cause instantaneous rigid impacts from sudden acceleration changes at the start and end points, leading to violent shaking or even splashing of the liquid due to inertia. S-shaped planning, through smooth acceleration and deceleration, suppresses free oscillations of the liquid surface within the pipette tip, allowing the second robotic arm 340 to maintain a high movement speed while ensuring stable liquid flow within the tip.

[0091] Furthermore, to address the issue that traditional timed annealing cannot handle temperature fluctuations in the heating plate 441 or differences between different batches of solutions, leading to incomplete perovskite phase transformation or over-annealing, in step S4, during the annealing process, the in-situ spectral detection component 700 continuously acquires the steady-state photoluminescence spectrum of the thin film on the glass substrate at a preset frequency; the peak position and full width at half maximum (FWHM) of the characteristic peaks in the steady-state photoluminescence spectrum are monitored in real time; when the characteristic peak position moves to the preset perovskite crystal phase band and the FWHM narrows to a preset threshold and remains stable for more than a set time, crystallization is determined to be complete, and the first robotic arm 330 is immediately controlled to remove the glass substrate from the annealing station 440, regardless of whether the preset annealing time has been reached. This operation achieves annealing endpoint determination based on material properties, rather than simply based on a preset annealing time.

[0092] The control method provided in this embodiment solves key process challenges in perovskite solution preparation through refined timing control and strict dry-wet separation logic. The anti-drip aspiration procedure and S-shaped speed planning in step S2 effectively overcome common problems such as droplet splashing and bubble residue during pipetting. The annealing endpoint determination logic introduced in step S4, based on in-situ spectral data, enables the annealing operation to cope with temperature fluctuations on the heating plate 441 or differences between different batches of solutions. Crucially, this method clearly defines the responsibilities of the two robotic arms: the second robotic arm 340 handles the liquid and promptly removes contaminants (used disposable pipette tips), while the first robotic arm 330 handles the transport of the glass substrate. This design completely eliminates the path of cross-contamination of the finished product by the precursor solution through the robotic arm ends, greatly improving the cleanliness of the preparation environment and the yield of the finished product.

[0093] Furthermore, to achieve closed-loop optimization based on process parameters and establish a feedback correction loop from the detection end to the manufacturing end, the control device 600 can be configured not only to determine whether the finished product is qualified, but also to classify the defect type. For example, if the image data shows that the film has radial stripe defects, the system determines that the spin coating speed is too high or the drop height is too high, and then automatically modifies the control parameters to reduce the acceleration of the spin coater 431 or reduce the Z-axis height of the second robotic arm 340 when dropping liquid during the preparation of the next glass substrate. If the image data shows that the film has pinhole defects in the center, the hydraulic balance time of the anti-drip liquid suction procedure in step S2 of the next substrate is increased. Through this feedback mechanism based on detection data, the system can automatically converge to the optimal process window as the experiment progresses.

[0094] To verify the capabilities of this high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films in maintaining extreme environments, capturing extreme operations, and achieving high repeatability, multiple perovskite thin film fabrication experiments were conducted using this system. Experimental results show that this system can not only fabricate high-quality thin films but also accurately reproduce the performance differences of thin films under different process parameters, such as formulation and environmental water and oxygen content, demonstrating its reliability as a high-throughput screening platform.

[0095] To demonstrate the grayscale response of this system under extreme conditions, preparation environments with different water and oxygen contents were simulated by adjusting the parameters of the atmosphere maintenance circulation device. Figure 10 The grayscale values ​​of multiple samples prepared under different water and oxygen environments are shown. Higher grayscale values ​​indicate poor film crystallinity and the presence of obvious degradation or impurities, while lower grayscale values ​​indicate dense and high-purity films. This demonstrates the system's ability to precisely control extreme environments and sensitively reflect the impact of minute environmental changes on film quality.

[0096] To demonstrate the nucleation and capture capabilities of this system under extreme operating conditions, the annealing process of precursor solutions with different formulations was monitored using an in-situ spectroscopic detection component. Figure 11 The waterfall plot clearly records the millisecond-level process of the thin film's phase transition from liquid to solid. The bright red areas represent bursts of fluorescence intensity, i.e., the critical moment for nucleation and crystallization. Experimental data show that the nucleation burst points differ significantly for different formulations. This system can capture this extreme operating moment and dynamically adjust the annealing time accordingly, demonstrating its adaptability to different formulations.

[0097] To demonstrate the system's exceptional repeatability and formulation screening capabilities, water contact angle tests were conducted on films with various formulations. Figure 12 The study demonstrated the preparation of thin films with different water contact angles. In repeated experiments with the same formulation, the contact angle data showed minimal fluctuation, demonstrating the system's exceptional repeatability. Furthermore, the system clearly distinguished the surface energy differences caused by different formulations, covering a wide range of contact angles from tens to hundreds of degrees. This demonstrates the system's broad applicability as a high-throughput material screening platform, capable of covering the entire process window from "low quality / specific performance" to "high quality / excellent performance".

[0098] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. It should be noted that those skilled in the art can make several improvements and modifications to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

Claims

1. A high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films, characterized in that: This high-throughput embodied intelligent robotic fabrication system for environmentally sensitive thin films includes: The glove box assembly (100) includes a box (110) that encloses a sealed cavity (111), a transition chamber (120) disposed on the side wall of the box (110), and an atmosphere maintaining and circulating device communicating with the sealed cavity (111). The box (110) is provided with a bottom plate (112). A linear guide module (200) is laid horizontally on the bottom plate (112) of the box (110) along the length of the sealed cavity (111); A collaborative robot unit (300) is slidably mounted on the linear guide module (200). The collaborative robot system includes a base (310) and a robotic arm. The robotic arm includes an independently controllable first robotic arm (330) and a second robotic arm (340). The first robotic arm (330) and the second robotic arm (340) are disposed on the same base (310) or on independently movable bases (310). The process station group (400) is linearly distributed along one side of the linear guide module (200). The process station group (400) includes a consumable storage station (410) for storing various consumables, a reagent storage station (420) equipped with a bottle holding mechanism (421), a spin coating film forming station (430) equipped with a spin coater (431), an annealing treatment station (440) equipped with a heating plate (441), a testing support platform (450) equipped with a backlight source (451), and a finished product storage station (460) for storing finished products. The inspection and sorting unit (500) is located in the sealed cavity (111) at the other end opposite to the collaborative robot unit (300) and adjacent to the inspection carrier (450) and the finished product storage station (460). The inspection and sorting unit (500) includes an inspection displacement mechanism (510) and a composite execution head (520) installed at the output end of the inspection displacement mechanism (510). The control device (600) is electrically connected to the collaborative robot unit (300), the process station group (400), and the detection and sorting unit (500), respectively.

2. The high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films according to claim 1, characterized in that: The composite execution head (520) includes: The mounting bracket (521) is fixedly connected to the end of the displacement detection mechanism (510); An industrial camera (522) is vertically mounted on the front side of the mounting bracket (521), with the optical axis of the lens of the industrial camera (522) pointing vertically downwards; The sorting gripper (523) is installed on the lower side of the mounting bracket (521) and is located outside the imaging field of view of the industrial camera (522). The detection displacement mechanism (510) is configured to drive the mounting bracket (521) to switch between a first position and a second position. In the first position, the optical axis of the industrial camera (522) coincides with the center of the detection support platform (450). In the second position, the clamping center of the sorting gripper (523) coincides with the center of the detection support platform (450).

3. The high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films according to claim 1, characterized in that: The end of the first robotic arm (330) is provided with a two-finger parallel gripper (331), which can grip the edge of the glass substrate and the cap of the reagent bottle; the end of the second robotic arm (340) is provided with a pipetting drive module, which has a connecting rod (342) for connecting a disposable pipette tip and a linear actuator (341) for driving the connecting rod (342) to perform piston movement.

4. The high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films according to claim 3, characterized in that: The bottle-holding mechanism (421) includes: A mounting base (422) is fixed to the table surface of the reagent storage station (420); The first positioning block (423) is fixed on the fixing seat (422). The side wall of the first positioning block (423) is provided with a plurality of first V-shaped grooves for abutting against one side outer wall of the reagent bottle. A push rod cylinder (424) is fixed on the fixed base (422) and is positioned relative to the first positioning block (423); The second positioning block (425) is fixedly connected to the push rod end of the push rod cylinder (424) and is set relative to the first positioning block (423). The side wall of the second positioning block (425) is provided with a plurality of second V-shaped grooves for abutting against the outer wall of the other side of the reagent bottle. The second V-shaped grooves are set opposite to the first V-shaped grooves. The control device (600) is configured to, while controlling the pusher cylinder (424) to push the second positioning block (425) to restrict the rotational degree of freedom of the reagent bottle, drive the two-finger parallel gripper (331) at the end of the first robotic arm (330) to grip and rotate the bottle cap of the reagent bottle, so that the bottle cap is detached from the bottle body of the reagent bottle.

5. The high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films according to claim 3, characterized in that: The control device (600) is further configured to control the first robotic arm (330) to place the glass substrate on the turntable (432) of the spin coater (431) and keep it adsorbed and fixed, and then control the second robotic arm (340) to drive the disposable suction head with the solution to move above the geometric center of the glass substrate, and discharge the solution within a preset delay time after the spin coater (431) starts rotating.

6. The high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films according to claim 1, characterized in that: The high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films also includes an in-situ spectral detection component (700), which includes a fiber optic probe component (701) and a spectrometer host (702). The fiber optic probe component (701) is suspended above the heating plate (441) of the annealing station (440) and is configured to collect fluorescence signals on the surface of the thin film on the glass substrate during the heating process of the glass substrate by the heating plate (441).

7. The high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films according to claim 1, characterized in that: The inspection platform (450) is configured as the physical interaction boundary between the collaborative robot unit (300) and the inspection and sorting unit (500); the control device (600) is further configured to control the inspection and sorting unit (500) to move above the inspection platform (450) to perform inspection and gripping actions after the first robotic arm (330) of the collaborative robot unit (300) places the annealed glass substrate on the inspection platform (450) and withdraws it to a safe area.

8. A control method for a high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films as described in any one of claims 1-7, characterized in that: The method includes the following steps: S1. Drive the first robotic arm (330) to grab the glass substrate to be processed from the consumable storage station (410), place the glass substrate on the spin coater (431) of the spin coating film forming station (430), and drive the second robotic arm (340) to load disposable pipette tips from the consumable storage station (410) and move it above the reagent storage station (420); S2. Control the bottle holding mechanism (421) to clamp the reagent bottle of the reagent storage station (420), drive the first robotic arm (330) to unscrew the bottle cap of the displaced reagent bottle and keep it in the clamping state, drive the second robotic arm (340) to insert the disposable pipette into the reagent bottle to draw the solution and then withdraw it, and then drive the first robotic arm (330) to screw the bottle cap back onto the reagent bottle. S3. Drive the second robotic arm (340) to move to the spin coating station (430), and in conjunction with the rotation of the spin coater (431), drop the solution onto the surface of the glass substrate; after the drop is completed, drive the second robotic arm (340) to move and remove and discard the used disposable suction tip; S4. Drive the first robotic arm (330) to transfer the spin-coated glass substrate to the annealing station (440) for annealing. S5. Drive the first robotic arm (330) to transfer the annealed glass substrate to the inspection carrier (450), control the inspection and sorting unit (500) to collect images of the glass substrate on the inspection carrier (450), and if the image data meets the preset standard, control the composite execution head (520) to grab the glass substrate and put it into the finished product storage station (460).

9. The control method for a high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films according to claim 8, characterized in that: The end of the second robotic arm (340) is provided with a pipetting drive module, which has a connecting rod (342) for connecting a disposable pipette tip and a linear actuator (341) for driving the connecting rod (342) to perform piston movement. In step S2, when the solution is drawn from the reagent bottle, the linear actuator (341) of the pipetting drive module is controlled to draw a predetermined volume of solution at a first speed; the disposable pipette tip is kept below the liquid surface for a preset hydraulic balance time. After the disposable suction head is lifted off the liquid surface, the linear actuator (341) is controlled to continue to retract a certain distance to form an air isolation column at the tip of the suction head; during the process of the second robotic arm (340) moving towards the spin coating station (430), the acceleration curve of the end of the second robotic arm (340) is controlled to be an S-shaped velocity plan.

10. The control method for a high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films according to claim 8, characterized in that: The high-throughput embodied intelligent robot fabrication system for environmentally sensitive thin films also includes an in-situ spectral detection component (700), which includes a fiber optic probe component (701) and a spectrometer host (702). The fiber optic probe component (701) is suspended above the heating plate (441) of the annealing station (440) and is configured to collect fluorescence signals on the surface of the thin film on the glass substrate during the heating process of the glass substrate by the heating plate (441). In step S4, during the annealing process, the in-situ spectral detection component (700) is controlled to continuously acquire the steady-state photoluminescence spectrum of the thin film on the glass substrate at a preset frequency; the peak position and full width at half maximum (FWHM) of the characteristic peaks in the steady-state photoluminescence spectrum are monitored in real time; when the characteristic peak position is detected to move to the preset perovskite crystal phase band and the FWHM narrows to the preset threshold and remains stable for more than a set time, it is determined that the crystallization is complete, and the first robotic arm (330) is immediately controlled to move the glass substrate out of the annealing station (440), regardless of whether the preset annealing time has been reached.

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