Diamond wire saw cutting track rectification device and rectification method thereof
Patent Information
- Application Number
- CN202611011074.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-07-08
- Publication Date
- 2026-08-21
AI Technical Summary
但金刚石线锯在实际切割过程中,由于工件内部材质组分不均或存在硬质点,作为柔性刀具的锯丝极易发生“避硬就软”的受力偏转现象,导致切缝轨迹偏离预定直线,引发切削平面倾斜或弯曲
[0050]有益效果:与现有技术相比,本发明具有如下显著优点:本发明的偏差监测组件实时监测切缝轨迹,纠偏组件在偏差监测组件监测到切缝轨迹偏移时,主动调整待加工工件左右两侧金刚石锯丝的高度,避免切缝轨迹偏离预定直线,有利于提升整体的加工质量。本发明连续采集待加工工件左右两侧的切缝图像,基于左右两侧的切缝图像计算待加工工件的切削面状态参数,再基于切削面状态参数判断加工工件左右两侧金刚石锯丝的状态并生成相应的纠偏组件的控制策略,纠偏组件执行控制策略使加工工件左右两侧金刚石锯丝高度差始于预设的范围内,进而避免切缝轨迹偏离预定直线。本发明采用小步长闭环控制策略调整金刚石锯丝高度,在有效保障加工质量的同时,显著降低了因调节过激引起的设备故障和断丝风险,有利于提升加工安全性和稳定性。
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Figure CN122606753A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of mechanical engineering and precision machining technology, and particularly relates to a diamond wire saw cutting slit trajectory correction device and its correction method. Background Technology
[0002] Diamond wire saws are the mainstream machining equipment used for processing hard and brittle materials such as single-crystal silicon, sapphire, and zirconium oxide. However, during the actual cutting process, due to the uneven material composition or the presence of hard particles inside the workpiece, the saw wire, as a flexible tool, is prone to a force deflection phenomenon of "avoiding hardness and going towards softness," causing the kerf trajectory to deviate from the predetermined straight line, resulting in tilting or bending of the cutting plane.
[0003] To address these issues, existing technologies primarily focus on tension control and basic visual monitoring. In tension control, a closed-loop system combining cylinders, tension springs, and PID algorithms is often used to maintain the stability of the saw wire. However, traditional correction methods based on table tilt adjustment or simple tension control often suffer from significant mechanical inertia and response lag, and struggle to overcome localized force deviations caused by the saw wire cutting workpieces with uneven material. In machine vision applications, these are mostly limited to passive monitoring or post-processing evaluation of conditions such as wire bow angle and wear, failing to monitor in real-time kerf trajectory deviations caused by uneven material hardness. Summary of the Invention
[0004] Purpose of the invention: The first purpose of this invention is to provide a diamond wire saw cutting trajectory correction device that can monitor the cutting trajectory deviation in real time and actively correct the diamond saw wire.
[0005] The second objective of this invention is to provide a correction method for a diamond wire saw cutting slit trajectory correction device.
[0006] Technical Solution: The present invention discloses a diamond wire saw kerf trajectory correction device, comprising a deviation monitoring component installed on the diamond wire saw for monitoring the kerf deviation on the left and right sides of the workpiece to be processed, and a correction component installed on the diamond wire saw for adjusting the height of the diamond saw wires on the left and right sides of the workpiece to be processed when the deviation monitoring component detects that the deviation exceeds a preset value; the correction component includes a mounting frame fixedly installed on the diamond wire saw, two sets of guide wheels symmetrically arranged and respectively used to guide the diamond saw wires on the left and right sides of the workpiece to be processed, and an adjusting component set on the mounting frame for adjusting the height of the guide wheels.
[0007] Furthermore, the deviation monitoring component includes cameras symmetrically arranged on both sides of the workpiece to be processed for capturing the cut, a telecentric lens mounted on the camera, and a perforated surface light source coaxially mounted on the telecentric lens.
[0008] Furthermore, the adjusting component includes an adjusting plate for supporting the guide wheel, a motor fixedly mounted on one side of the mounting frame, a lead screw rotatably mounted on the mounting frame and fixedly connected at one end to the output shaft of the motor, a movable seat threaded to the outer periphery of the lead screw, wedges symmetrically mounted on both sides of the movable seat and slidably connected to the mounting frame, two inclined blocks symmetrically mounted on the bottom of the adjusting plate and slidably disposed on the corresponding wedges, and a guide component disposed on the mounting frame to guide the inclined blocks vertically; the inclined surface of the inclined block slides in contact with the inclined surface of the wedge.
[0009] Based on the same inventive concept, this invention also discloses a correction method for a diamond wire saw kerf trajectory correction device, comprising the following steps.
[0010] S1: Perform intrinsic parameter calibration and distortion correction on the cameras on the left and right sides to obtain the transformation formula from the pixel coordinate system of the image acquired by the camera to the global coordinate system; perform spatial unified calibration on the cameras of the two sets of deviation monitoring components based on the spatial transfer calibration method of the common reference plane, so that the height data output by the cameras on the left and right sides are unified under the same physical reference.
[0011] S2: Enables the left and right cameras to continuously acquire images of the cuts on both sides of the workpiece within a preset sampling period.
[0012] S3: Preprocess the slit images on the left and right sides within the current sampling period to obtain corrected images of the slit images on both sides, and extract the ROI containing the slit region from the corrected images on both sides respectively;
[0013] S4: Obtain the edge points of the slits within the ROI of the left and right slit images and the slit edge lines in the global coordinate system respectively; Based on the slit edge lines on the left and right sides, calculate the height difference between the two sides of the slit of the workpiece to be processed at the current time.
[0014] S5: Determine the state of the diamond saw wires on the left and right sides of the workpiece by comprehensively considering the preset tilt angle threshold of the cutting surface after the workpiece is cut, the target surface roughness of the cutting surface after the workpiece is cut, and the height difference; when the diamond saw wires on the left and right sides of the workpiece are in a normal state, control the correction component to maintain the current state; when the diamond saw wires on the left and right sides of the workpiece are in an abnormal state, generate a control strategy based on the current height difference, the first threshold, and the target surface roughness, and adjust the correction component based on the control strategy; after executing the control strategy, return to step S2.
[0015] Furthermore, the transformation formula for converting the pixel coordinate system of the image acquired by the camera to the global coordinate system in step S1 is as follows:
[0016] Using a calibration plate with known geometric dimensions, acquire multiple calibration images in different poses within the camera's field of view;
[0017] Extract the marker points from the calibration image;
[0018] By combining the known world physical coordinates of the marker points in the global coordinate system and the actual observed pixel coordinates of the marker points in the pixel coordinate system, a transformation relationship between the pixel coordinate system and the global coordinate system is established.
[0019] The camera intrinsic parameters and distortion parameters are solved by minimizing the reprojection error.
[0020] Furthermore, in step S2, the method of continuously acquiring the cut images of the left and right sides of the workpiece to be processed within the sampling period is as follows: when acquiring the cut image of the left side of the workpiece to be processed, the perforated surface light source of the right deviation monitoring component is turned on, and at the same time, the camera of the left deviation monitoring component acquires the cut image of the left side; when acquiring the cut image of the right side of the workpiece to be processed, the perforated surface light source of the left deviation monitoring component is turned on, and at the same time, the camera of the right deviation monitoring component acquires the cut image of the right side.
[0021] Furthermore, the preprocessing method in step S3 is as follows: coordinate correction is performed on the slit image; brightness correction is performed on the coordinate-corrected slit image using a contrast-limited adaptive histogram equalization algorithm; and filtering and denoising processing is performed on the brightness-corrected slit image to obtain the corrected image.
[0022] The method for extracting the ROI containing the cut area in step S3 is as follows:
[0023] The corrected image is subjected to fast binarization, which initially divides the corrected image into slit candidate regions and background regions; the number of pixels or the intensity of grayscale changes in each slit candidate region in each row are counted along the row direction of the corrected image to form a row-direction projection distribution;
[0024] Based on the row-direction projection distribution of the corrected image, the initial pixel row position of the slit in the corrected image is determined;
[0025] With initial pixel row position Centered on the image, extend the specified pixel range upwards and downwards along the row direction of the corrected image, and extract the local region containing the cut edge as the ROI;
[0026] Edge enhancement processing is performed on the image within the ROI to obtain the final ROI of the cut image.
[0027] Furthermore, the method for obtaining the edge points of the ROI inner cut and the straight line of the cut edge in the global coordinate system in step S4 is as follows:
[0028] The Sobel operator is used to calculate the gray-level gradient of the ROI, and the gradient direction, gradient magnitude and gradient direction angle of each pixel in the ROI are obtained.
[0029] Get the gradient magnitude of the current pixel and the two pixels adjacent to the current pixel along the gradient direction, and retain the pixel with the largest gradient magnitude as a candidate edge point;
[0030] Subpixel interpolation is performed on the candidate edge points to obtain the subpixel coordinates corresponding to each candidate edge point;
[0031] Based on the transformation relationship, the sub-pixel coordinates of the candidate edge points are converted into world physical coordinates. In the global coordinate system, the RANSAC robust straight line fitting method is used to remove outliers from the candidate edge points, thus obtaining the edge points of the ROI and the cut edge straight line.
[0032] Furthermore, in step S4, the height difference is calculated as follows: the height of the cut in the left cut image is obtained based on the cut edge line of the left cut image, and the height of the cut in the right cut image is obtained based on the cut edge line of the right cut image, and the height difference between the two sides of the cut is calculated.
[0033] Furthermore, the method for determining the state of the diamond saw wires on both sides of the workpiece in step S5 is as follows:
[0034] Calculate the height threshold corresponding to the height difference based on the tilt angle threshold;
[0035] Based on the target surface roughness of the cutting surface of the workpiece after cutting, calculate the allowable residual height error of the cutting surface;
[0036] The smaller of the height threshold and the allowable residual height error is used as the compensation judgment threshold;
[0037] When the absolute value of the height difference is less than or equal to the compensation judgment threshold, the diamond saw wires on the left and right sides of the workpiece to be processed are judged to be in a normal state; when the absolute value of the height difference is greater than the compensation judgment threshold, the diamond saw wires on the left and right sides of the workpiece to be processed are judged to be in an abnormal state.
[0038] The control strategy is generated in the following ways:
[0039] Set a control cycle, and calculate the deviation amount for the current control cycle based on the height difference and compensation judgment threshold. The formula for calculating the deviation amount is as follows:
[0040] ,
[0041] in This refers to the height difference corresponding to the current control cycle g; Indicates the direction of high compensation; The compensation judgment threshold;
[0042] Based on the deviation in the current control cycle, the servo pulse increment of the motor of the deviation monitoring component is calculated using a PID control algorithm within the current control cycle; the formula for calculating the servo pulse increment is as follows:
[0043] ,
[0044] in This refers to the servo pulse increment in the current control cycle g; This refers to the deviation in the previous control period. The deviation refers to the amount of deviation in the first two control cycles; Refers to the proportional control coefficient. Integral control coefficient, Refers to the differential control coefficient;
[0045] Based on the lead p of the lead screw of the deviation monitoring component, the number of effective pulses N corresponding to one revolution of the motor, and the inclination angle α of the wedge block, the displacement of the diamond saw wire on the Z-axis of the global coordinate system under a single pulse of the motor is calculated. Displacement The calculation formula is: ;
[0046] The vertical compensation amount of the diamond saw wire displacement on the Z-axis of the global coordinate system under the action of servo pulse increment is calculated based on the displacement. Vertical compensation amount The calculation formula is: ;
[0047] Set the maximum allowable vertical compensation step size during a single adjustment of the diamond saw wire. Based on the maximum vertical compensation step size and vertical compensation amount Calculate the number of compensation steps within the current control cycle. Compensation steps The calculation formula is: ;
[0048] Based on compensation steps and vertical compensation amount The actual vertical compensation amount generated by a single adjustment of the diamond saw wire is calculated as follows: The actual vertical compensation amount is The calculation formula is: ;
[0049] Vertical displacement under single pulse action And the actual vertical compensation amount generated by a single adjustment Calculate the first The number of pulses output by the motor for each compensation step within each control cycle ,and ,in Indicates rounding; regulation and The motor of the deviation monitoring component on the side corresponding to the direction of height compensation, in each compensation step of the g-th control cycle, causes the motor to output... A pulse causes the diamond saw wire on that side to generate an actual vertical compensation amount. Return to step S2.
[0050] Beneficial Effects: Compared with existing technologies, this invention has the following significant advantages: The deviation monitoring component of this invention monitors the kerf trajectory in real time. When the deviation monitoring component detects a deviation in the kerf trajectory, the correction component actively adjusts the height of the diamond saw wires on both sides of the workpiece to be processed, preventing the kerf trajectory from deviating from the predetermined straight line, which is beneficial to improving the overall processing quality. This invention continuously acquires kerf images from both sides of the workpiece to be processed, calculates the cutting surface state parameters of the workpiece based on the kerf images, and then judges the state of the diamond saw wires on both sides of the workpiece based on the cutting surface state parameters and generates a corresponding control strategy for the correction component. The correction component executes the control strategy to ensure that the height difference between the diamond saw wires on both sides of the workpiece is within a preset range, thereby preventing the kerf trajectory from deviating from the predetermined straight line. This invention uses a small-step closed-loop control strategy to adjust the height of the diamond saw wires, which effectively ensures processing quality while significantly reducing the risk of equipment failure and wire breakage caused by excessive adjustment, thus improving processing safety and stability. Attached Figure Description
[0051] Figure 1 This is a schematic diagram of the structure of the present invention;
[0052] Figure 2 This is a schematic diagram of the structure of the correction component of the present invention;
[0053] Figure 3 For the present invention Figure 2 Side view;
[0054] Figure 4 This is a schematic diagram of the mounting bracket of the present invention;
[0055] Figure 5 This is a schematic diagram of the structure of the adjusting component of the present invention;
[0056] Figure 6 For the present invention Figure 5 Side view;
[0057] Figure 7 This is a schematic diagram of the structure of the wedge and inclined block of the present invention;
[0058] Figure 8 This is a schematic diagram of the wedge block of the present invention. Detailed Implementation
[0059] The technical solution of the present invention will be further described below with reference to the accompanying drawings.
[0060] Example 1
[0061] This invention discloses a diamond wire saw kerf trajectory correction device, such as... Figure 1 As shown, the system includes a deviation monitoring component and a correction component 5. The deviation monitoring component is mounted on the diamond wire saw 1 and is used to monitor the kerf deviation on the left and right sides of the workpiece. The correction component 5 is mounted on the diamond wire saw 1 and is located directly below the diamond saw wire. The workpiece is fed at a uniform speed in the horizontal direction and interacts with the diamond saw wire to form a kerf. When the deviation monitoring component detects that the deviation exceeds a preset value, the correction component 5 adjusts the height of the diamond saw wires on the left and right sides of the workpiece to prevent the kerf trajectory from deviating from the predetermined straight line.
[0062] like Figure 1 As shown, the deviation monitoring component includes two cameras 2, two telecentric lenses 3, and two perforated surface light sources 4. The two cameras 2 are mounted on the diamond wire saw 1 and symmetrically arranged on both sides of the workpiece to be processed. The cameras 2 are used to capture the kerf. The two telecentric lenses 3 are respectively mounted on the two cameras 2. The optical axes of the two telecentric lenses 3 are both horizontal with the diamond saw wire. The two telecentric lenses 3 are coaxially mounted on the two telecentric lenses 3.
[0063] like Figure 2 and Figure 3 As shown, the correction assembly 5 includes a mounting frame 6, guide wheels 7, and adjusting components. The mounting frame 6 is fixedly mounted on the diamond wire saw 1; two sets of guide wheels 7 are provided, and the two sets of guide wheels 7 are symmetrically arranged on the left and right sides of the workpiece to be processed. The two sets of guide wheels 7 are used to guide the diamond saw wires on the left and right sides of the workpiece to be processed, respectively; two sets of adjusting components are provided, and both sets of adjusting components are mounted on the mounting frame 6. The two sets of adjusting components are used to adjust the height of the two sets of guide wheels 7, thereby adjusting the height of the diamond saw wires on the left and right sides of the workpiece to be processed.
[0064] like Figure 2 , Figure 5 and Figure 6As shown, the adjusting components include an adjusting plate 8, a motor 9, a lead screw 10, a movable seat 11, wedges 12, inclined blocks 13, and guide members. The adjusting plate 8 is installed at the bottom of the guide wheel 7 to support the guide wheel 7; the motor 9 is fixedly installed on the mounting frame 6, one end of the lead screw 10 is fixedly connected to the output shaft of the motor 9, and the other end of the lead screw 10 is rotatably connected to the mounting frame 6 through a bearing; the movable seat 11 is threadedly connected to the outer periphery of the lead screw 10. Two wedges 12 are provided, and the two wedges 12 are symmetrically installed on both sides of the movable seat 11, and the wedges 12 slide against the mounting frame 6; preferably, two symmetrically arranged horizontal guide rails 14 are fixedly connected to the inner wall of the mounting frame 6, and the bottom of each of the two wedges 12 is equipped with a horizontal slider 15 that is slidably connected to the corresponding horizontal guide rail 14. Two inclined blocks 13 are provided, and the two inclined blocks 13 are symmetrically installed at the bottom of the adjusting plate 8. The sides of both the inclined blocks 13 and the wedge blocks 12 are right-angled triangles, and the inclined surfaces of the inclined blocks 13 and 12 match the inclined surfaces of the wedge blocks 12, with the same inclination angle. The inclined surfaces of the inclined blocks 13 are slidably disposed on the inclined surfaces of the corresponding wedge blocks 12, and the inclined surfaces of the inclined blocks 13 and 12 are in sliding contact. Preferably, as follows... Figure 7 and Figure 8 As shown, cross roller guides 16 are installed on the inclined surfaces of the inclined block 13 and the wedge block 12, respectively. An existing roller retainer assembly 17 is installed between the two cross roller guides 16. The roller retainer assembly 17 restricts the position of the cross roller guides 16, achieving a high-rigidity embedded coupling between the bidirectional V-shaped tracks, thus converting sliding friction into controlled cross-rolling friction. A guide is mounted on the mounting bracket 6, providing vertical guidance for the inclined block 13. The motor 9 drives the lead screw 10 to rotate, causing the moving seat 11 to move the wedge block 12 in a horizontal linear motion. The thrust from the inclined surface of the wedge block 12 drives the corresponding inclined block 13 to move vertically in a linear motion, thereby adjusting the height of the adjusting plate 8 and the guide wheel 7.
[0065] The present invention uses the wedge block 12 and the inclined block 13 to cooperate to convert the horizontal displacement into the vertical displacement, which can effectively avoid the horizontal disturbances that the guide wheel 7 is subjected to during the lifting and lowering process.
[0066] Preferred, such as Figure 4 As shown, a partition for separating the two sets of adjustment plates 8 is fixedly installed inside the mounting frame 6. The two sets of adjustment components of the present invention are set independently, and they can independently perform the lifting and lowering compensation action of the diamond saw wire without interfering with each other.
[0067] like Figure 5 and Figure 6 As shown, the guide includes a vertical guide cylinder 18 and a vertical guide rod 19. The vertical guide cylinder 18 is fixedly installed on the inner wall of the mounting frame, and the vertical guide rod 19 is fixedly installed on the bottom of the adjusting plate 8. The vertical guide rod 19 passes through the vertical guide cylinder 18 and is slidably connected to the vertical guide cylinder 18.
[0068] Let the inclination angle of the inclined surface of wedge 12 be denoted as... The horizontal displacement of wedge 12 is The vertical displacement of the inclined block 205 is The horizontal displacement is and vertical displacement are satisfy .
[0069] In practical applications, Configure according to actual needs. The preferred tilt angle is 23°. A 23° tilt angle can shorten the horizontal feed distance required to achieve the same vertical compensation amount while ensuring the ability to compensate for small lifting and lowering, thereby improving the execution response efficiency and facilitating the integrated arrangement of the device within the limited space of the machine.
[0070] At 23°, That is, for every unit of horizontal feed generated by the wedge block 12, the inclined block 13 generates approximately 0.424 units of vertical lifting. Thus, a clear one-to-one correspondence is established between the feed amount generated by the lower motor 9 and the lifting amount of the upper diamond saw wire, which facilitates the adjustment of the height of the diamond saw wire on the left and right sides of the workpiece to be processed, and makes it easier to further convert the diamond saw wire height that needs to be adjusted into the rotation amount of the motor 9 or the number of drive pulses.
[0071] The deviation monitoring component of this invention monitors the kerf trajectory in real time. When the deviation monitoring component detects a deviation in the kerf trajectory, the correction component actively adjusts the height of the diamond saw wires on the left and right sides of the workpiece to be processed, so as to prevent the kerf trajectory from deviating from the predetermined straight line, which is beneficial to improving the overall processing quality. The correction component can provide an active reverse correction force, forcing the diamond saw wires back to the preset height, thereby making the cutting surface return to a flat state in real time, which greatly improves the problems of cutting surface tilt and excessive total thickness deviation during the processing.
[0072] Example 2
[0073] This invention discloses a correction method for a diamond wire saw kerf trajectory correction device, comprising the following steps:
[0074] S1: Perform intrinsic parameter calibration and distortion correction on the left and right cameras 2 to obtain the transformation formula from the pixel coordinate system of the image acquired by the camera 2 to the global coordinate system; perform spatial unified calibration on the camera 2 of the two sets of deviation monitoring components based on the spatial transfer calibration method of the common reference plane, so that the height data output by the left and right cameras 2 are unified under the same physical reference.
[0075] The intrinsic parameter calibration and distortion correction for cameras 2 on both the left and right sides are performed as follows:
[0076] Using a calibration plate with known geometric dimensions, multiple calibration images with different poses are acquired within the field of view of camera 2; the calibration plate is preferably a high-precision ceramic calibration plate. Different poses refer to the calibration plate having different positions and angles relative to camera 2. Acquiring multiple calibration images with different poses helps improve the stability of the intrinsic parameter solution for camera 2.
[0077] Extract marker points from the calibration image. This can be done using Halcon, OpenCV, or other machine vision algorithm libraries. The marker points are the centers of circles, corner points of checkerboard grids, or other regular feature points whose geometric positions on the calibration plate are known in advance.
[0078] By combining the known world physical coordinates of the marker points in the global coordinate system and the actual observed pixel coordinates of the marker points in the pixel coordinate system, a transformation relationship between world physical coordinates and pixel coordinates is established, that is, a transformation relationship between the pixel coordinate system and the global coordinate system.
[0079] The intrinsic parameters and distortion parameters of camera 2 are solved by minimizing the reprojection error.
[0080] The expression for the reprojection error E is as follows:
[0081] ,
[0082] in The actual observed pixel coordinates of the j-th feature point in the i-th calibration image; The theoretical projected coordinates of the j-th feature point in the i-th calibration image calculated based on the camera 2 imaging model; A is the camera 2 intrinsic parameter matrix; Refers to the rotation matrix corresponding to the i-th calibration image. The translation vector corresponding to the i-th calibration image. and Used to represent the spatial pose of the calibration board relative to camera 2; The world physical coordinates of the j-th marker point on the calibration plate. When using a planar calibration plate, It can usually be expressed as ,in and The actual arrangement of the markers on the calibration plate is predetermined.
[0083] The Halcon core calibration correction operator or other camera calibration algorithms are used to generate a correction mapping relationship, which can be saved in the form of a correction mapping map, mapping table or lookup table. In subsequent real-time detection, the correction mapping relationship is used to map the pixels in the original image to the corrected image coordinates, so as to reduce the impact of lens distortion on the slit edge positioning and height measurement results.
[0084] The camera 2 of the two sets of deviation monitoring components is calibrated using a spatial transfer calibration method based on a common reference plane. The specific calibration method is as follows:
[0085] Using the machine table or standard plane of the diamond wire saw 1 as a common reference plane, a calibration rod of known length is placed on the common reference plane, with the left end of the calibration rod located within the field of view of the left camera 2 and the right end located within the field of view of the right camera 2. The length of the calibration rod is denoted as... .
[0086] Camera 2 on the left takes a picture of the left end of the calibration rod. Camera 2 on the right side captures the right end of the calibration rod. .
[0087] Based on the left endpoint and right endpoint Calculate the left endpoint based on its position in the pixel coordinate system of camera 2. and right endpoint World physical coordinates in the global coordinate system; based on the left endpoint. and right endpoint Given the world physical coordinates and the length of the calibration rod, establish the translation vectors of the world physical coordinates of the left and right cameras 2 in the global coordinate system.
[0088] When the coordinate difference between the left and right endpoints of the calibration rod under a unified physical reference matches the length of the calibration rod, it indicates that the spatial transfer calibration of the left and right cameras meets the preset accuracy requirements, and the measurement results of the left and right cameras can be compared under the same physical reference.
[0089] In practical applications, when the measurement directions of the left and right cameras 2 have been aligned through installation adjustment or calibration correction, and the calibration rod is placed along the X-axis of the global coordinate system with its left and right endpoints at the same height reference plane, the translation relationship between the measurement coordinates of the left and right cameras can be established based on the length of the calibration rod. If there is an angle between the calibration rod and the X-axis of the global coordinate system, or if there is an attitude deviation in the measurement directions of the left and right cameras 2, the translation vector and attitude relationship are corrected by combining the position of the calibration rod endpoints, the attitude of the reference plane, and the camera extrinsic parameters.
[0090] Through the above spatial transfer calibration, the kerf height data acquired by the left and right cameras 2 are under the same physical reference, which facilitates the subsequent calculation of height difference and cutting surface tilt angle.
[0091] After completing the above pixel coordinate system to global coordinate system conversion and the unified spatial calibration of the left and right cameras 2, the image height data collected by the left and right cameras 2 can be unified under the same physical reference. In other words, the height of the left kerf and the height of the right kerf are in the same measurement reference, and the two can be directly compared, which facilitates the subsequent calculation of the height difference of the kerfs on the left and right sides of the workpiece to be processed and the tilt angle of the cutting surface of the workpiece to be processed.
[0092] S2: Enable the left camera 2 and the right camera 2 to continuously acquire the cut images of the left and right sides of the workpiece to be processed within the preset sampling period.
[0093] When acquiring the cut image on the left side of the workpiece to be processed, the perforated surface light source 4 of the right deviation monitoring component is turned on, and the camera 2 of the left deviation monitoring component acquires the cut image on the left side; when acquiring the cut image on the right side of the workpiece to be processed, the perforated surface light source 4 of the left deviation monitoring component is turned on, and the camera 2 of the right deviation monitoring component acquires the cut image on the right side.
[0094] Preferably, when acquiring the cut image, a high-speed strobe controller can be used for time-division multiplexing control. When the left camera 2 exposes and acquires the cut image, the strobe controller synchronously drives the right perforated surface light source 4 to light up instantaneously, so that the right perforated surface light source 4 serves as the transmissive backlight of the left camera 2; when the right camera 2 exposes and acquires the cut image, the strobe controller synchronously drives the left perforated surface light source 4 to light up instantaneously, so that the left perforated surface light source 4 serves as the transmissive backlight of the right camera 2.
[0095] Preferably, annular air knives with an air outlet slit width of 0.05mm are installed at the front ends of both telecentric lenses 3 and perforated surface light source 4. By introducing 0.5MPa compressed air, a high-speed air curtain is formed using the Coanda effect, which physically blocks the coolant splashed when the diamond wire saw 1 cuts the workpiece, thus improving the clarity of the acquired cut image.
[0096] In this invention, when acquiring kerf images, the exposure times of the left and right cameras 2 are staggered, and the perforated surface light sources 4 on both sides are also alternately illuminated according to their corresponding exposure times, forming a cross-transmission imaging optical path of camera 2-workpiece-opposite perforated surface light source 4. This invention, in conjunction with a strobe controller and perforated surface light source 4, performs short-exposure synchronous acquisition, matching the exposure time of camera 2 with the instantaneous illumination time of the light source. This allows for continuous acquisition of kerf images from both sides within a preset sampling period, achieving high-contrast transmissive backlight imaging within a limited installation space while avoiding glare interference caused by the simultaneous illumination of the perforated surface light sources 4 on both sides. Simultaneously, the instantaneous illumination of the strobe light source shortens the effective exposure time, reducing the impact of workpiece movement and micro-vibrations of the diamond wire saw 1 on the image clarity of the kerf edge.
[0097] S3: Preprocess the cut images on the left and right sides respectively to obtain corrected images of the cut images on both sides, and extract the ROI containing the cut region from the corrected images on both sides respectively.
[0098] The preprocessing method for the cut image is as follows: coordinate correction is performed on the cut image; brightness correction is performed on the coordinate-corrected cut image using a contrast-limited adaptive histogram equalization algorithm; and the brightness-corrected cut image is filtered and denoised to obtain the corrected image.
[0099] Based on the camera 2 intrinsic parameter matrix, distortion parameters, and correction mapping relationship in step S1, coordinate correction is performed on the slit image. The correction mapping relationship refers to the correspondence between the original image coordinates and the corrected image coordinates established based on the camera intrinsic parameters and distortion parameters; in practice, this correction mapping relationship can be saved and retrieved in the form of a correction mapping diagram, mapping table, or lookup table. Pixels in the slit image are remapped to the corrected image coordinates to reduce the influence of factors such as lens barrel distortion and pincushion distortion on the slit edge positioning results. After coordinate correction, the slit edge position in the slit image is more consistent with the actual physical measurement, thus providing a basis for subsequent pixel-to-physical size conversion.
[0100] During the cutting process of the diamond wire saw 1, the cutting fluid will splash, resulting in local reflections. In addition, the machine tool lighting of the diamond wire saw 1 is difficult to ensure uniform illumination. Therefore, it is necessary to perform brightness correction on the cut image to address the problems of local shadows caused by splashed cutting fluid, local reflections, and uneven machine tool lighting of the diamond wire saw 1.
[0101] The contrast-limited adaptive histogram equalization algorithm divides the cut image into several sub-regions, enhances the grayscale of each sub-region, and limits the local contrast amplification to avoid excessive noise enhancement. This algorithm is primarily used to enhance the grayscale difference between the cut region and the background region.
[0102] The preferred methods for noise reduction are Gaussian filtering, Gaussian-Laplacian filtering, or morphological filtering. Gaussian filtering smooths random noise, Gaussian-Laplacian filtering highlights areas of grayscale variation while suppressing noise, and morphological filtering removes isolated noise points caused by coolant splashes or localized reflections. In practical applications, the filtering parameters can be set according to the image noise intensity and the sharpness of the cut edges to avoid over-smoothing that could lead to loss of edge information.
[0103] The method for extracting the ROI containing the cut area is as follows:
[0104] The corrected image undergoes rapid binarization, initially dividing it into candidate slit regions and background regions. The number of pixels or grayscale variation intensity in each candidate slit region along the row direction of the corrected image is statistically analyzed to form a row-direction projection distribution. Rapid binarization projection refers to quickly determining the approximate location of the slit in the corrected image through binarization and row-direction pixel statistics; that is, quickly determining the approximate location of the slit in the slit image. Its purpose is to achieve coarse slit localization, rather than directly using it as the final height measurement result.
[0105] Based on the row-direction projection distribution of the corrected image, the initial pixel row position of the slit in the corrected image is determined, and the initial pixel row position is denoted as... Initial pixel row position It represents the pixel position in the row direction of the pixel coordinate system.
[0106] With initial pixel row position Centered on the image, extend a specified pixel range upwards and downwards along the row direction to extract a local region containing the cut edge as the Region of Interest (ROI). The specified upward and downward pixel ranges can be set based on the expected width of the cut in the image, the workpiece position fluctuation range, the safety margin required for edge extraction, and the real-time requirements of the calculation. The ROI should cover all possible locations where the cut edge may appear, while minimizing the introduction of irrelevant background areas.
[0107] Edge enhancement processing is performed on the image within the ROI to obtain the final ROI of the cut image.
[0108] The Sobel operator, gradient operator, or other edge enhancement methods are used to calculate the grayscale changes in the ROI image, making the grayscale jumps at the edges of the cutting plane of the workpiece more obvious. The edge-enhanced image is then used for sub-pixel edge extraction and line fitting in subsequent S4 steps to improve the stability of the kerf edge localization.
[0109] S4: Obtain the edge points of the slits within the ROI of the left and right slit images and the slit edge lines in the global coordinate system respectively; based on the slit edge lines on the left and right sides, calculate the height difference between the two sides of the slit of the workpiece to be processed at the current time.
[0110] The method for obtaining the edge points of the cut within the ROI and the straight line of the cut edge in the global coordinate system is as follows:
[0111] (1) The Sobel operator is used to calculate the gray-level gradient of the ROI image, and the gradient direction, gradient magnitude and gradient direction angle of each pixel in the ROI are obtained.
[0112] The gradient direction includes the horizontal gradient direction. and vertical gradient direction The gradient magnitude is denoted as ,and The gradient direction angle is denoted as... ,and .
[0113] (2) Obtain the gradient magnitude of the current pixel and the two adjacent pixels along the gradient direction. Keep the pixel with the largest gradient magnitude as a candidate edge point.
[0114] (3) Perform subpixel interpolation on the candidate edge points to obtain the subpixel coordinates corresponding to each candidate edge point.
[0115] Obtain the pixel coordinates of the current candidate edge point and the two candidate edge points adjacent to it along the gradient direction in the pixel coordinate system. Then, label the pixel coordinates of the current candidate edge point as follows: .
[0116] Let the one-dimensional local position coordinate t along the gradient direction represent the relative position of the current candidate edge point, and fit a quadratic curve based on the gradient magnitude of these three candidate edge points. .
[0117] The sub-pixel offset of the current candidate edge point relative to its integer pixel position is calculated based on the coefficients a, b, and c of the quadratic curve. ,and .
[0118] Sub-pixel coordinates of current candidate edge points The calculation formula is: , .
[0119] (4) Based on the transformation relationship, the sub-pixel coordinates of the candidate edge points are converted into world physical coordinates; in the global coordinate system, the RANSAC robust straight line fitting method is used to remove outliers from the candidate edge points to obtain the edge points of the ROI and the cut edge line.
[0120] The RANSAC robust line fitting method is used to remove outliers from candidate edge points, and the edge points of the ROI and the cut edge lines are obtained as follows:
[0121] (41) Let the world physical coordinates of the m-th edge point be denoted as ,in The coordinates of the m-th candidate edge point on the X-axis of the global coordinate system; This refers to the coordinates of the m-th candidate edge point on the Z-axis of the global coordinate system, which is also the physical height of the m-th candidate edge point.
[0122] (42) Randomly select two candidate edge points from all candidate edge points. and Based on candidate edge points and Fitting the straight line of the cut edge ,and ,in , .
[0123] (43) Calculate the straight lines from the remaining candidate edge points to the cut edge. The straight-line distance, if the straight-line distance is less than or equal to the preset distance threshold. If the line distance is greater than a preset distance threshold, then the corresponding candidate edge point is determined to be an interior point; If so, the corresponding candidate edge point is determined to be an anomaly.
[0124] In practical applications, distance threshold The settings are based on the pixel-physical size calibration accuracy, the kerf edge fluctuation range, and the detection accuracy requirements.
[0125] (44) Set the number of samplings, repeat steps (42) and (43), and cut the straight edge of the seam with the maximum number of inner points in one go. As the final cut edge straight line The corresponding outlier points are removed, while the inner points are retained as edge points.
[0126] The height difference is calculated as follows: the height of the cut in the left cut image is obtained based on the straight line of the cut edge in the left cut image, and the height of the cut in the right cut image is obtained based on the straight line of the cut edge in the right cut image. The height difference between the two sides of the cut is then calculated.
[0127] Let the straight line of the cut edge in the left-side cut image be denoted as... The straight line of the cut edge in the cut image on the right is denoted as... .
[0128] The cut height in the left-side cut image is ,and The cut height in the cut image on the right is... ,and Height difference The calculation formula is: .
[0129] S5: Based on the preset tilt angle threshold of the cutting surface after the workpiece is cut, the target surface roughness and height difference of the cutting surface after the workpiece is cut, determine the current state of the diamond saw wires on the left and right sides of the workpiece; when the diamond saw wires on the left and right sides of the workpiece are in a normal state, control the correction component 5 to maintain the current state; when the diamond saw wires on the left and right sides of the workpiece are in an abnormal state, generate a control strategy based on the current height difference, the first threshold and the target surface roughness, and adjust the correction component 5 based on the control strategy; after executing the control strategy, return to step S2.
[0130] The method for determining the state of the diamond saw wires on both sides of the workpiece to be processed is as follows:
[0131] (1) Set the tilt angle threshold of the cutting surface of the workpiece after cutting, and calculate the height threshold corresponding to the height difference based on the tilt angle threshold. The calculation formula for the height threshold is as follows:
[0132] ,
[0133] Where W refers to the calibration horizontal span of the left and right measuring points of the workpiece under the same physical reference. The tilt angle threshold. This refers to the height threshold. Compared to directly using the tilt angle as the control quantity for the subsequent correction component 5, using the height difference as the judgment quantity makes it easier to establish a correspondence with the lifting and lowering displacement of the diamond saw wire.
[0134] (2) Based on the target surface roughness of the cutting surface of the workpiece after cutting. Calculate the allowable residual height error of the cutting surface. .
[0135] Allowable residual height error The calculation formula is: ,in These are calibration coefficients. In practical applications... The parameters are determined based on the material of the workpiece to be processed, the linear speed of the diamond wire saw 1 during cutting, the feed rate of the workpiece to be processed, the tension of the diamond wire, the cooling conditions of the diamond wire saw 1 during cutting, and the surface quality test results of the cutting surface.
[0136] In practical applications, the target surface roughness is set by the product drawings, customer requirements, process documents, or process database of the workpiece to be processed.
[0137] Allowable residual height error This refers to the maximum remaining height deviation that the cutting surface is allowed to have, provided that the target surface roughness requirements of the cutting surface are met.
[0138] (3) Use the smaller value between the height threshold and the allowable residual height error as the compensation judgment threshold. .
[0139] (4) When the absolute value of the height difference is less than or equal to the compensation judgment threshold, the diamond saw wires on the left and right sides of the workpiece to be processed are judged to be in normal condition; when the absolute value of the height difference is greater than the compensation judgment threshold, the diamond saw wires on the left and right sides of the workpiece to be processed are judged to be in abnormal condition.
[0140] The control strategy is generated in the following ways:
[0141] (1) Set the control cycle, and calculate the deviation amount of the current control cycle based on the height difference and compensation judgment threshold. The formula for calculating the deviation amount is as follows:
[0142] ,
[0143] in This refers to the height difference corresponding to the current control cycle g; This refers to the direction of height compensation. If... A positive number indicates that the kerf height on the left is higher than that on the right, meaning the diamond saw wire height on the left is higher than that on the right. A negative number indicates that the kerf height on the left is higher than the kerf height on the right, meaning the diamond saw wire height on the left is higher than the diamond saw wire height on the right. A value of zero indicates that the kerf height on the left is equal to the kerf height on the right, which means that the diamond saw wire height on the left is equal to the diamond saw wire height on the right.
[0144] (2) Based on the deviation in the current control cycle, the servo pulse increment of motor 9 of the deviation monitoring component in the current control cycle is calculated using the PID control algorithm; the calculation formula for the servo pulse increment is as follows:
[0145] ,
[0146] in The increment of the servo pulse in the g-th control cycle; This refers to the deviation in the previous control period. The deviation refers to the amount of deviation in the first two control cycles; Refers to the proportional control coefficient. Integral control coefficient, This refers to the differential control coefficient. In practical applications, the proportional control coefficient, integral control coefficient, and differential control coefficient are set according to the response speed of the deviation monitoring component, the lead screw, the tension state of the diamond saw wire, and the cutting stability requirements.
[0147] (3) Based on the lead p of the lead screw 10 of the deviation monitoring component, the number of effective pulses N corresponding to one revolution of the motor 9, and the inclined angle α of the wedge block 12, calculate the displacement of the diamond saw wire on the Z-axis of the global coordinate system under the action of a single pulse of the motor 9. Displacement The calculation formula is: .
[0148] (4) Based on displacement Calculate servo pulse increment The corresponding vertical compensation amount, and the vertical compensation amount The calculation formula is: ; This refers to the vertical compensation amount of the diamond saw wire corresponding to the g-th control cycle.
[0149] (5) Set the maximum allowable vertical compensation step size when adjusting the diamond saw wire in a single operation. Based on the maximum vertical compensation step size and vertical compensation amount Calculate the number of compensation steps within the current control cycle. Compensation steps The calculation formula is: .
[0150] (6) Based on the number of compensation steps and vertical compensation amount Calculate the actual vertical compensation amount generated by a single adjustment of the diamond saw wire. The actual vertical compensation amount is The calculation formula is: .
[0151] (7) Vertical displacement based on a single pulse And the actual vertical compensation amount generated by a single adjustment Calculate the first The number of pulses output by motor 9 for each compensation step within each control cycle ,and ,in Indicates rounding; regulation and The motor 9 of the deviation monitoring component corresponding to the direction of height compensation is configured to output [something] in each compensation step of the g-th control cycle. A pulse causes the diamond saw wire on that side to generate an actual vertical compensation amount. Return to step S2.
[0152] In practical applications, if If the remaining compensation amount is generated after rounding, the remaining pulse amount is allocated to the last compensation step, or it is corrected in the next control cycle based on the height difference re-acquired.
[0153] according to The sign of the pulse determines the direction of the pulse output of motor 9, and is determined according to the number of compensation steps. The first Total servo pulse increment within one control cycle Assigned to Each pulse segment. In each compensation step, the signal is directed towards... The direction of height compensation corresponds to the output of motor 9 in the correction assembly on one side. One pulse; after receiving the pulse, motor 9 rotates by a corresponding angle, driving lead screw 10 to rotate, causing moving seat 11 and wedge block 12 to move horizontally. Wedge block 12 further pushes inclined block 13 to move along the Z-axis of the global coordinate system, thereby driving adjusting plate 8, guide wheel 7 and corresponding diamond saw wire to generate actual vertical compensation. .
[0154] In the Within each control cycle, after each compensation step is executed, the system returns to step S2 to reacquire the cutting images on both sides and determine the state of the diamond saw wire on both sides of the workpiece. If it is in a normal state, the system stops outputting subsequent pulses and locks motor 9 in the current position. If it is in an abnormal state, the system continues to output the number of pulses corresponding to the next compensation step until the height difference returns to the compensation judgment threshold range or the compensation step of the g-th control cycle is completed.
Claims
1. A diamond wire saw slit trajectory correction device, characterized in that: The device includes a deviation monitoring component installed on a diamond wire saw (1) for monitoring the kerf deviation on the left and right sides of the workpiece to be processed, and a correction component (5) installed on a diamond wire saw (1) for adjusting the height of the diamond saw wires on the left and right sides of the workpiece to be processed when the deviation monitoring component detects that the deviation exceeds a preset value; the correction component (5) includes a mounting frame (6) fixedly installed on the diamond wire saw (1), two sets of guide wheels (7) symmetrically arranged and used to guide the diamond saw wires on the left and right sides of the workpiece to be processed, and an adjusting component set on the mounting frame (6) for adjusting the height of the guide wheels (7).
2. The diamond wire saw kerf trajectory correction device according to claim 1, characterized in that: The deviation monitoring component includes a camera (2) symmetrically arranged on both sides of the workpiece to be processed and used to capture the cut, a telecentric lens (3) mounted on the camera (2), and a perforated surface light source (4) coaxially mounted on the telecentric lens (3).
3. The diamond wire saw kerf trajectory correction device according to claim 1, characterized in that: The adjusting components include an adjusting plate (8) for supporting the guide wheel (7), a motor (9) fixedly installed on one side of the mounting frame (6), a lead screw (10) rotatably installed on the mounting frame (6) and fixedly connected at one end to the output shaft of the motor (9), a movable seat (11) threaded to the outer periphery of the lead screw (10), wedges (12) symmetrically installed on both sides of the movable seat (11) and slidably connected to the mounting frame (6), two inclined blocks (13) symmetrically installed on the bottom of the adjusting plate (8) and slidably set on the wedges (12) on the corresponding sides, and a guide component set on the mounting frame (6) to guide the inclined blocks (13) vertically; the inclined surface of the inclined block (13) slides in contact with the inclined surface of the wedge (12).
4. A method for correcting the deviation of a diamond wire saw cutting slit trajectory, characterized in that: Includes the following steps, S1: Perform intrinsic parameter calibration and distortion correction on the cameras (2) on the left and right sides to obtain the transformation formula of the pixel coordinate system of the image acquired by the camera (2) to the global coordinate system; perform spatial unified calibration on the cameras (2) of the two sets of deviation monitoring components based on the spatial transfer calibration method of the common reference plane, so that the height data output by the cameras (2) on the left and right sides are unified under the same physical reference. S2: Make the left camera (2) and the right camera (2) continuously acquire the cut images of the left and right sides of the workpiece to be processed within the preset sampling period; S3: Preprocess the slit images on the left and right sides within the current sampling period to obtain corrected images of the slit images on both sides, and extract the ROI containing the slit region from the corrected images on both sides respectively; S4: Obtain the edge points of the slits within the ROI of the left and right slit images and the slit edge lines in the global coordinate system respectively; Based on the slit edge lines on the left and right sides, calculate the height difference between the two sides of the slit of the workpiece to be processed at the current time. S5: Based on the preset tilt angle threshold of the cutting surface after the workpiece is cut, the target surface roughness and height difference of the cutting surface after the workpiece is cut, the state of the diamond saw wires on the left and right sides of the workpiece is determined; when the diamond saw wires on the left and right sides of the workpiece are in a normal state, the correction component (5) is controlled to maintain the current state; when the diamond saw wires on the left and right sides of the workpiece are in an abnormal state, a control strategy is generated based on the height difference, the first threshold and the target surface roughness at the current moment, and the correction component (5) is adjusted based on the control strategy; after executing the control strategy, return to step S2.
5. The correction method of the diamond wire saw kerf trajectory correction device according to claim 4, characterized in that: The transformation formula for converting the pixel coordinate system of the image acquired by camera (2) to the global coordinate system in step S1 is as follows: Using a calibration plate with known geometric dimensions, multiple calibration images with different poses are acquired within the field of view of the camera (2); Extract the marker points from the calibration image; By combining the known world physical coordinates of the marker points in the global coordinate system and the actual observed pixel coordinates of the marker points in the pixel coordinate system, a transformation relationship between the pixel coordinate system and the global coordinate system is established. The camera's intrinsic parameters and distortion parameters (2) are solved by minimizing the reprojection error.
6. The correction method of the diamond wire saw cutting slit trajectory correction device according to claim 5, characterized in that: In step S2, the method of continuously acquiring the cut images of the left and right sides of the workpiece to be processed within the sampling period is as follows: when acquiring the cut image of the left side of the workpiece to be processed, the perforated surface light source (4) of the right deviation monitoring component is turned on, and at the same time, the camera (2) of the left deviation monitoring component acquires the cut image of the left side; when acquiring the cut image of the right side of the workpiece to be processed, the perforated surface light source (4) of the left deviation monitoring component is turned on, and at the same time, the camera (2) of the right deviation monitoring component acquires the cut image of the right side.
7. The correction method of the diamond wire saw kerf trajectory correction device according to claim 6, characterized in that: The preprocessing method in step S3 is as follows: coordinate correction is performed on the slit image; brightness correction is performed on the coordinate-corrected slit image using a contrast-limited adaptive histogram equalization algorithm; and the brightness-corrected slit image is filtered and denoised to obtain the corrected image. The method for extracting the ROI containing the cut area in step S3 is as follows: The corrected image is subjected to fast binarization, which initially divides the corrected image into slit candidate regions and background regions; the number of pixels or the intensity of grayscale changes in each slit candidate region in each row are counted along the row direction of the corrected image to form a row-direction projection distribution; Based on the row-direction projection distribution of the corrected image, the initial pixel row position of the slit in the corrected image is determined; With initial pixel row position Centered on the image, extend the specified pixel range upwards and downwards along the row direction of the corrected image, and extract the local region containing the cut edge as the ROI; Edge enhancement processing is performed on the image within the ROI to obtain the final ROI of the cut image.
8. The correction method of the diamond wire saw kerf trajectory correction device according to claim 7, characterized in that: The method for obtaining the edge points of the ROI inner cut and the straight line of the cut edge in the global coordinate system in step S4 is as follows: The Sobel operator is used to calculate the gray-level gradient of the ROI, and the gradient direction, gradient magnitude and gradient direction angle of each pixel in the ROI are obtained. Get the gradient magnitude of the current pixel and the two pixels adjacent to the current pixel along the gradient direction, and retain the pixel with the largest gradient magnitude as a candidate edge point; Subpixel interpolation is performed on the candidate edge points to obtain the subpixel coordinates corresponding to each candidate edge point; Based on the transformation relationship, the sub-pixel coordinates of the candidate edge points are converted into world physical coordinates. In the global coordinate system, the RANSAC robust straight line fitting method is used to remove outliers from the candidate edge points, thus obtaining the edge points of the ROI and the cut edge straight line.
9. The correction method of the diamond wire saw kerf trajectory correction device according to claim 8, characterized in that: In step S4, the height difference is calculated as follows: the height of the cut in the left cut image is obtained based on the cut edge line of the left cut image, and the height of the cut in the right cut image is obtained based on the cut edge line of the right cut image. The height difference between the two sides of the cut is then calculated.
10. The correction method of the diamond wire saw kerf trajectory correction device according to claim 9, characterized in that: The method for determining the state of the diamond saw wires on both sides of the workpiece in step S5 is as follows: Calculate the height threshold corresponding to the height difference based on the tilt angle threshold; Based on the target surface roughness of the cutting surface of the workpiece after cutting, calculate the allowable residual height error of the cutting surface; The smaller of the height threshold and the allowable residual height error is used as the compensation judgment threshold; When the absolute value of the height difference is less than or equal to the compensation judgment threshold, the diamond saw wires on the left and right sides of the workpiece to be processed are judged to be in a normal state; when the absolute value of the height difference is greater than the compensation judgment threshold, the diamond saw wires on the left and right sides of the workpiece to be processed are judged to be in an abnormal state. The control strategy is generated in the following ways: Set a control cycle, and calculate the deviation amount for the current control cycle based on the height difference and compensation judgment threshold. The formula for calculating the deviation amount is as follows: , in This refers to the height difference corresponding to the current control cycle g; Indicates the direction of high compensation; The compensation judgment threshold; Based on the deviation in the current control cycle, the servo pulse increment of the motor (9) of the deviation monitoring component within the current control cycle is calculated using a PID control algorithm; the formula for calculating the servo pulse increment is as follows: , in This refers to the servo pulse increment in the current control cycle g; This refers to the deviation in the previous control period. The deviation refers to the amount of deviation in the first two control cycles; Refers to the proportional control coefficient. Integral control coefficient, Refers to the differential control coefficient; Based on the lead p of the lead screw (10) of the deviation monitoring component, the number of effective pulses N corresponding to one revolution of the motor (9), and the inclination angle α of the wedge (12), the displacement of the diamond saw wire on the Z-axis of the global coordinate system under a single pulse of the motor (9) is calculated. Displacement The calculation formula is: ; The vertical compensation amount of the diamond saw wire displacement on the Z-axis of the global coordinate system under the action of servo pulse increment is calculated based on the displacement. Vertical compensation amount The calculation formula is: ; Set the maximum allowable vertical compensation step size during a single adjustment of the diamond saw wire. Based on the maximum vertical compensation step size and vertical compensation amount Calculate the number of compensation steps within the current control cycle. Compensation steps The calculation formula is: ; Based on compensation steps and vertical compensation amount The actual vertical compensation amount generated by a single adjustment of the diamond saw wire is calculated as follows: The actual vertical compensation amount is The calculation formula is: ; Vertical displacement under single pulse action And the actual vertical compensation amount generated by a single adjustment Calculate the first The number of pulses output by the motor (9) for each compensation step within each control cycle ,and ,in Indicates rounding down; Regulation and The motor (9) of the deviation monitoring component on the side corresponding to the direction of height compensation, in each compensation step of the g-th control cycle, causes the motor (9) to output... A pulse causes the diamond saw wire on that side to generate an actual vertical compensation amount. Return to step S2.