Vacuum coating chamber pressure equalization system with symmetrical pumping structure

Abstract

The application provides a vacuum coating chamber equalizing pressure system with a symmetrical pumping structure, comprising a vacuum chamber and two equalizing pressure mechanisms. The two equalizing pressure mechanisms are symmetrically arranged along a first direction. The equalizing pressure mechanism comprises a driving assembly and two pumping assemblies, the driving assembly is installed on the vacuum chamber, the two pumping assemblies are respectively installed on two ends of the driving assembly along a second direction and are symmetrically arranged. The vacuum coating chamber equalizing pressure system with the symmetrical pumping structure provided by the application is symmetrically arranged along the first direction and the second direction by the four pumping assemblies, so that the suction force is uniformly distributed from the geometric center of the vacuum chamber to the periphery or the two ends. Compared with the prior art, the four pumping assemblies can form a symmetrical pumping structure, effectively inhibit the airflow disturbance and vortex caused by one-side large pumping speed, the uniform flow of the process gas on the workpiece surface can make the pressure uniformly distributed, the uneven coating situation can be avoided as much as possible, and the forming quality of the workpiece is effectively improved.

Description

Technical Field

[0001] This application relates to the field of coating equipment technology, and in particular to a pressure equalization system for a vacuum coating chamber with a symmetrical air extraction structure. Background Technology

[0002] In the semiconductor and flat panel display industries, physical vapor deposition (PVD) or chemical vapor deposition (CVD) coatings on photomask substrates are performed within a vacuum coating chamber. Currently, to achieve vacuum conditions, vacuum coating chambers typically employ one or more molecular pumps on one side for evacuation. This setup results in uneven pressure distribution—lower pressure near the pump vents and higher pressure further away—leading to airflow disturbances and eddies within the vacuum coating chamber. During the coating process, the uniformity of the process gas is crucial for determining film thickness uniformity, film stress, and consistency of optical properties. Therefore, current vacuum coating chambers suffer from uneven coating, leading to deterioration in the quality of photomask substrate formation. Summary of the Invention

[0003] The purpose of this application is to provide a vacuum coating chamber pressure equalization system with a symmetrical pumping structure to solve the technical problem of uneven coating on photomask substrates caused by uneven pressure gradient distribution in the vacuum coating chamber in the prior art.

[0004] To achieve the above objectives, the technical solution adopted in this application is: to provide a vacuum coating chamber pressure equalization system with a symmetrical pumping structure, comprising: Vacuum chamber; Two pressure equalization mechanisms are arranged symmetrically along the first direction; The pressure equalization mechanism includes a drive assembly and two pumping assemblies. The drive assembly is installed in the vacuum chamber, and the two pumping assemblies are respectively installed at both ends of the drive assembly along the second direction and are arranged symmetrically.

[0005] Optionally, the vacuum chamber is provided with four air extraction ports, and the four air extraction ports are respectively configured to correspond one-to-one with the four air extraction components; The vacuum pump assembly includes a mounting frame, a telescopic tube, a first end plate, a second end plate, a connecting plate, a connecting tube, a regulating valve, a molecular pump, and multiple buffer components. The mounting frame is installed in the vacuum chamber and seals over the vacuum port. The telescopic tube is installed on the side of the mounting frame facing away from the vacuum chamber. The first end plate is installed at the end of the telescopic tube away from the mounting frame. The second end plate is located on the side of the first end plate facing away from the telescopic tube. The connecting plate connects the first end plate and the second end plate. The connecting tube is slidably inserted into the telescopic tube and passes through the first end plate. The regulating valve is installed at the end of the connecting tube away from the telescopic tube. The molecular pump is installed at the end of the regulating valve away from the connecting tube. Multiple buffer components are installed between the connecting tube and the first end plate, and between the molecular pump and the second end plate.

[0006] Optionally, the telescopic fitting includes a fixed tube, a sliding tube, and a plurality of first sealing rings. The fixed tube is installed on the mounting bracket, the sliding tube passes through the fixed tube, and the plurality of first sealing rings are all sleeved on the outer periphery of the sliding tube and elastically abut against the fixed tube and the sliding tube.

[0007] Optionally, the connecting pipe includes a pipe body and a plurality of second sealing rings. The pipe body passes through the telescopic pipe, and the plurality of second sealing rings are sleeved on the outer periphery of the pipe body and elastically abut against the telescopic pipe and the pipe body.

[0008] Optionally, the buffer includes a limiting rod and an elastic structure. The limiting rod passes through the first end plate or the second end plate, and the elastic structure is sleeved on the limiting rod and abuts against the first end plate or the second end plate.

[0009] Optionally, the drive assembly includes a first driver and a connecting frame, the first driver being mounted in the vacuum chamber, and the connecting frame being mounted between the two mounting frames and moving in a third direction under the drive of the first driver.

[0010] Optionally, the mounting bracket includes two guide members and a frame, with both guide members mounted on the outer wall of the vacuum chamber and the frame mounted between the two guide members.

[0011] Optionally, the guide includes two mounting seats, a guide rod, and multiple mounting ears. The two mounting seats are both mounted on the outer side wall of the vacuum chamber, the guide rod is mounted between the two mounting seats, and the multiple mounting ears are all mounted on the frame and are all sleeved on the guide rod.

[0012] Optionally, the drive assembly further includes two second drivers and two transmission frames. The two second drivers are mounted on the connecting frame, and the two transmission frames are respectively mounted on the two second drivers and respectively mounted on the two connecting plates, and move along the second direction under the drive of the second drivers.

[0013] Optionally, the pressure equalization mechanism further includes two pressure sensors, both of which are installed on the inner wall of the vacuum chamber and are used to detect the pressure at the corresponding pumping assembly, and are set up one-to-one with the two pumping assemblies.

[0014] The beneficial effects of the vacuum coating chamber pressure equalization system with a symmetrical pumping structure provided in this application are as follows: This application provides a vacuum coating chamber pressure equalization system with a symmetrical pumping structure. Four pumping components are symmetrically arranged along a first direction and a second direction, respectively, so that the suction force is evenly distributed from the geometric center of the vacuum chamber to the surrounding area or both ends. Compared with the prior art, the four pumping components can form a symmetrical pumping structure, which effectively suppresses airflow disturbance and eddies caused by high pumping speed on one side. The uniform flow of process gas on the workpiece surface makes the pressure evenly distributed, which can avoid uneven coating as much as possible and effectively improve the forming quality of the workpiece. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 A three-dimensional view of the overall structure of a vacuum coating chamber pressure equalization system with a symmetrical pumping structure provided for this application; Figure 2 An internal perspective view of a vacuum coating chamber pressure equalization system with a symmetrical evacuation structure provided for this application; Figure 3 A perspective view of the pumping component of a vacuum coating chamber pressure equalization system with a symmetrical pumping structure provided for this application; Figure 4 for Figure 3 A magnified view of a section at point A in the middle; Figure 5 A cross-sectional view of the telescopic pipe and connecting pipe of a vacuum coating chamber pressure equalization system with a symmetrical evacuation structure provided in this application.

[0017] The following are the labeling elements in the figure: 1. Vacuum chamber; 2. Pressure equalization mechanism; 21. Drive assembly; 211. First driver; 212. Connecting frame; 213. Second driver; 214. Transmission frame; 22. Vacuum assembly; 221. Mounting frame; 2211. Guide component; 22111. Mounting base; 22112. Guide rod; 22113. Mounting ear; 2212. Frame body; 222. Telescopic fitting; 2221. Fixed pipe; 2222. Sliding pipe; 2223. First sealing ring; 2224. Fixed flange; 2225. Sliding rod; 223. First end plate; 224. Second end plate; 225. Connecting plate; 226. Connecting fitting; 2261. Pipe body; 2262. Second sealing ring; 227. Regulating valve; 228. Molecular pump; 229. Buffer component; 2291. Limiting rod; 2292. Elastic structure; 2293. Locking nut; 3. Air extraction port. Detailed Implementation

[0018] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0019] It should be noted that when a component is referred to as being "mounted to," "fixed to," or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0020] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0021] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0022] like Figures 1 to 5As shown, this application provides a vacuum coating chamber pressure equalization system with a symmetrical pumping structure, including a vacuum chamber 1 and two pressure equalization mechanisms 2. The two pressure equalization mechanisms 2 are symmetrically arranged along a first direction. Each pressure equalization mechanism 2 includes a driving assembly 21 and two pumping assemblies 22. The driving assembly 21 is installed in the vacuum chamber 1, and the two pumping assemblies 22 are respectively installed at both ends of the driving assembly 21 along a second direction, and are symmetrically arranged.

[0023] It should be noted that the first direction above and below refers to the bidirectional direction along its axis, specifically as follows: Figure 1 The X-axis is shown in the diagram. The second direction, above and below, refers to the bidirectional direction along its axis, specifically as shown in the diagram. Figure 1 The Y-axis is shown below. The following third directions refer to bidirectional directions along its axis, specifically as follows: Figure 1 The Z-axis is shown in the figure.

[0024] This application provides a vacuum coating chamber pressure equalization system with a symmetrical pumping structure. Four pumping components 22 are symmetrically arranged along the first and second directions, respectively, so that the suction force is evenly distributed from the geometric center of the vacuum chamber 1 to the surrounding area or both ends. Compared with the prior art, the four pumping components 22 can form a symmetrical pumping structure, which effectively suppresses airflow disturbance and eddies caused by high pumping speed on one side. The uniform flow of process gas on the surface of the workpiece ensures uniform pressure distribution, which can avoid uneven coating as much as possible and effectively improve the forming quality of the workpiece.

[0025] In one embodiment of this application, please refer to Figures 1 to 5 The vacuum chamber 1 has four extraction ports 3, each corresponding to one of the four extraction components 22. Each extraction component 22 includes a mounting frame 221, a telescopic tube 222, a first end plate 223, a second end plate 224, a connecting plate 225, a connecting tube 226, a regulating valve 227, a molecular pump 228, and multiple buffer components 229. The mounting frame 221 is installed in the vacuum chamber 1 and seals over the extraction ports 3. The telescopic tube 222 is installed on the side of the mounting frame 221 facing away from the vacuum chamber 1. The first end plate 223 is installed at the end of the telescopic tube 222 away from the mounting frame 221, and the second end plate 224 is located on the back of the first end plate 223. On one side of the telescopic tube 222, a connecting plate 225 is connected between the first end plate 223 and the second end plate 224. A connecting tube 226 is slidably inserted into the telescopic tube 222 and passes through the first end plate 223. A regulating valve 227 is installed at the end of the connecting tube 226 away from the telescopic tube 222. A molecular pump 228 is installed at the end of the regulating valve 227 away from the connecting tube 226. Multiple buffers 229 are installed between the connecting tube 226 and the first end plate 223, and between the molecular pump 228 and the second end plate 224.

[0026] This configuration, under the action of the telescopic fitting 222, allows for adjustment of the distance between the first end plate 223 and the vacuum chamber 1, and consequently, the distance between the molecular pump 228 and the vacuum chamber 1. Adjusting the distance between the molecular pumps 228 and the vacuum chamber 1 ensures that the distances between each molecular pump 228 and the vacuum chamber 1 are approximately consistent, preventing excessive distances that could affect the pumping action of the molecular pumps 228. Furthermore, adjusting the distance between the molecular pumps 228 and the vacuum chamber 1 keeps overheated molecular pumps 228 away from the vacuum chamber 1, minimizing heat conduction from the molecular pumps 228 into the vacuum chamber 1 and preventing temperature instability that could affect the workpiece heating and temperature control accuracy, thus contributing to improved workpiece forming quality. The regulating valve 227 can be used to adjust the airflow rate, thereby creating processing environments with different parameters, making it widely applicable. The molecular pumps 228 can draw gas from the vacuum chamber 1 to create a vacuum environment. With the action of multiple buffer components 229, the molecular pump 228 and the regulating valve 227 can be elastically installed between the first end plate 223 and the second end plate 224, preventing the axial vibration of the molecular pump 228 from being transmitted to the vacuum chamber 1. This avoids the axial vibration of the molecular pump 228 from affecting the coating uniformity and also helps to improve the forming quality of the workpiece. Through the first end plate 223, the second end plate 224, and the connecting plate 225, there is no interference with the movement of the molecular pump 228 in the second direction, and a seal is also achieved, ensuring the stability of operation. With the action of the connecting pipe 226, the telescopic pipe 222 and the regulating valve 227 can be connected, preventing the direct connection of the telescopic pipe 222 and the regulating valve 227 from causing the vibration of the molecular pump 228 to be directly transmitted to the telescopic pipe 222. Moreover, the molecular pump 228 and the regulating valve 227 can move slightly relative to the telescopic pipe 222 in the second direction to achieve vibration reduction.

[0027] In one embodiment of this application, please refer to the following: Figures 1 to 5 The telescopic tube 222 includes a fixed tube 2221, a sliding tube 2222 and a plurality of first sealing rings 2223. The fixed tube 2221 is installed on the mounting bracket 221, the sliding tube 2222 passes through the fixed tube 2221, and the plurality of first sealing rings 2223 are all sleeved on the outer periphery of the sliding tube 2222 and elastically abut against the fixed tube 2221 and the sliding tube 2222.

[0028] This configuration allows the sliding tube 2222 to slide relative to the fixed tube 2221, enabling telescoping and adjusting the distance between the molecular pump 228 and the vacuum chamber 1. Multiple first sealing rings 2223 form a seal between the sliding tube 2222 and the fixed tube 2221, ensuring the vacuum level of the vacuum chamber 1. Furthermore, the multiple first sealing rings 2223 buffer the radial vibration of the molecular pump 228, preventing its transmission to the vacuum chamber 1 and affecting the coating uniformity, thus also contributing to improved workpiece forming quality.

[0029] Optionally, the telescopic fitting 222 also includes a fixed flange 2224 and a plurality of sliding rods 2225. The fixed flange 2224 is formed at the end of the fixed pipe 2221 away from the mounting bracket 221 and is located on the outer periphery of the fixed pipe 2221. The plurality of sliding rods 2225 are all installed on the first end plate 223 and pass through the fixed flange 2224.

[0030] With this configuration, under the action of the fixed flange 2224 and multiple sliding rods 2225, the sliding tube 2222 can be guided when it slides relative to the fixed tube 2221, which helps to improve the movement stability of the sliding tube 2222 in the second direction. The first sealing ring 2223 can thus be stably sealed between the sliding tube 2222 and the fixed tube 2221.

[0031] Optionally, the cross-sectional area of ​​the air extraction port 3 in the second direction is greater than the cross-sectional area of ​​the fixed pipe 2221 in the second direction.

[0032] With this configuration, when adjusting the angle of the fixed tube 2221 in the third direction, it is possible to avoid the fixed tube 2221 failing to align with the air extraction port 3, ensuring that the fixed tube 2221 is always aligned with the air extraction port 3.

[0033] In one embodiment of this application, see [reference] Figures 1 to 5 The connecting pipe fitting 226 includes a pipe body 2261 and a plurality of second sealing rings 2262. The pipe body 2261 passes through the telescopic pipe fitting 222, and the plurality of second sealing rings 2262 are sleeved on the outer periphery of the pipe body 2261 and elastically abut against the telescopic pipe fitting 222 and the pipe body 2261.

[0034] This configuration allows the regulating valve 227 and the sliding tube 2222 to be connected by the tube body 2261. The multiple second sealing rings 2262 seal the gap between the tube body 2261 and the sliding tube 2222, ensuring the vacuum level of the vacuum chamber 1.

[0035] In one embodiment of this application, please refer to Figures 1 to 5The buffer 229 includes a limiting rod 2291 and an elastic structure 2292. The limiting rod 2291 passes through the first end plate 223 or the second end plate 224, and the elastic structure 2292 is sleeved on the limiting rod 2291 and abuts against the first end plate 223 or the second end plate 224.

[0036] This configuration, under the action of the limiting rod 2291, allows the elastic structure 2292 to be stably supported between the regulating valve 227 and the first end plate 223, or stably supported between the molecular pump 228 and the second end plate 224. The elastic structure 2292 prevents the axial vibration of the molecular pump 228 from being transmitted to the first end plate 223 and the second end plate 224, achieving vibration reduction and thus helping to improve the coating uniformity of the vacuum chamber 1.

[0037] Optionally, the elastic structure 2292 can be configured as a sheet or a spring.

[0038] Optionally, the limiting rod 2291 has a threaded section (not shown in the figure), and the buffer 229 further includes a locking nut 2293, which is screwed to the limiting rod 2291 through the threaded section and is located on the side of the first end plate 223 facing away from the second end plate 224, or on the side of the second end plate 224 facing away from the first end plate 223.

[0039] This configuration, under the action of the locking nut 2293, allows the threaded section to limit the position of the limiting rod 2291. When adjusting the position of the molecular pump 228, this prevents the limiting rod 2291 from dislodging from the first end plate 223 or the second end plate 224, thus improving the structural stability between the limiting rod 2291 and the first end plate 223, and also improving the structural stability between the limiting rod 2291 and the second end plate 224. This prevents the molecular pump 228 and the regulating valve 227 from dislodging from between the first end plate 223 and the second end plate 224. During use, rotating the locking nut 2293 moves it away from the first end plate 223 or the second end plate 224, providing space for the movement of the limiting rod 2291.

[0040] In one embodiment of this application, please refer to the following: Figures 1 to 5 The drive assembly 21 includes a first driver 211 and a connecting frame 212. The first driver 211 is installed in the vacuum chamber 1, and the connecting frame 212 is installed between two mounting frames 221 and moves along a third direction under the drive of the first driver 211.

[0041] With this configuration, under the action of the first driver 211, the two molecular pumps 228 symmetrically arranged along the second direction can be driven to a position in the third direction via the connecting frame 212. This allows for adjustment according to the position and size of the workpiece, making it suitable for various workpieces and offering a wide range of applications. Furthermore, under the action of the connecting frame 212, the two molecular pumps 228 symmetrically arranged along the second direction can move simultaneously along the third direction, ensuring the symmetry of the two molecular pumps 228. This ensures that the two molecular pumps 228 remain symmetrical after adjustment, eliminating the need for repeated adjustments and improving ease of use.

[0042] Optionally, the first actuator 211 is configured as a hydraulic cylinder or an electric cylinder.

[0043] In one embodiment of this application, see [reference] Figures 1 to 5 The mounting frame 221 includes two guide members 2211 and a frame body 2212. The two guide members 2211 are both installed on the outer side wall of the vacuum chamber 1, and the frame body 2212 is installed between the two guide members 2211.

[0044] This configuration, with the help of the two guide members 2211, helps improve the stability of the frame 2212 and the molecular pump 228 in the third direction.

[0045] In one embodiment of this application, please refer to Figures 1 to 5 The guide component 2211 includes two mounting seats 22111, a guide rod 22112, and multiple mounting ears 22113. The two mounting seats 22111 are both installed on the outer side wall of the vacuum chamber 1. The guide rod 22112 is installed between the two mounting seats 22111. The multiple mounting ears 22113 are all installed on the frame 2212 and are all sleeved on the guide rod 22112.

[0046] This configuration, with the help of multiple mounting ears 22113 and guide rods 22112, can guide the frame 2212, which helps to improve the stability of the frame 2212 in the third direction, thereby helping to improve the stability of the telescopic pipe 222, connecting pipe 226, regulating valve 227 and molecular pump 228 in the third direction.

[0047] In one embodiment of this application, please refer to the following: Figures 1 to 5 The drive assembly 21 also includes two second drivers 213 and two transmission frames 214. The two second drivers 213 are mounted on the connecting frame 212, and the two transmission frames 214 are respectively mounted on the two second drivers 213 and respectively mounted on the two connecting plates 225, and move along the second direction under the drive of the second drivers 213.

[0048] It should be noted that when one of the molecular pumps 228 overheats, the suction force exerted by the molecular pump 228 on the workpiece will decrease after the corresponding second actuator 213 moves the molecular pump 228 away from the vacuum chamber 1. Therefore, after adjustment, the suction force of the other symmetrically arranged molecular pump 228 is reduced through the external control system to balance the pressure.

[0049] With this configuration, under the action of the second driver 213, the positions of the molecular pump 228 and the regulating valve 227 in the second direction can be adjusted via the transmission frame 214, the connecting plate 225, the first end plate 223 and the second end plate 224, thereby adjusting the distance between the molecular pump 228 and the vacuum chamber 1 according to the heat generated by the molecular pump 228.

[0050] Optionally, the second actuator 213 is configured as a hydraulic cylinder or an electric cylinder.

[0051] In one embodiment of this application, see [reference] Figures 1 to 5 The pressure equalization mechanism 2 also includes two pressure sensors (not shown in the figure). Both pressure sensors are installed on the inner wall of the vacuum chamber 1 and are used to detect the pressure at the corresponding pumping assembly 22. They are set one-to-one with the two pumping assemblies 22.

[0052] This setup, with the help of pressure sensors, allows for the detection of pressure at each extraction port 3. Under the control of an external control system, the suction force of each molecular pump 228 can be controlled in real time to ensure a uniform pressure distribution within the vacuum chamber 1.

[0053] One or more embodiments in this application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of this application. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of one or more embodiments in this application should be included within the protection scope of this application.

Claims

1. A pressure equalization system for a vacuum coating chamber with a symmetrical pumping structure, characterized in that, include: Vacuum chamber; Two pressure equalization mechanisms are arranged symmetrically along the first direction; The pressure equalization mechanism includes a drive assembly and two pumping assemblies. The drive assembly is installed in the vacuum chamber, and the two pumping assemblies are respectively installed at both ends of the drive assembly along the second direction and are arranged symmetrically. The vacuum chamber has four air extraction ports, and each of the four air extraction ports is respectively set to correspond one-to-one with the four air extraction components. The vacuum assembly includes a mounting frame, a telescopic tube, a first end plate, a second end plate, a connecting plate, a connecting tube, a regulating valve, a molecular pump, and multiple buffer components. The mounting frame is installed in the vacuum chamber and seals over the vacuum port. The telescopic tube is installed on the side of the mounting frame facing away from the vacuum chamber. The first end plate is installed at the end of the telescopic tube away from the mounting frame. The second end plate is located on the side of the first end plate facing away from the telescopic tube. The connecting plate connects the first end plate and the second end plate. The connecting tube is slidably inserted into the telescopic tube and passes through the first end plate. The regulating valve is installed at the end of the connecting tube away from the telescopic tube. The molecular pump is installed at the end of the regulating valve away from the connecting tube. Multiple buffer components are installed between the connecting tube and the first end plate, and between the molecular pump and the second end plate. The drive assembly includes a first driver and a connecting frame. The first driver is installed in the vacuum chamber, and the connecting frame is installed between the two mounting frames and moves along a third direction under the drive of the first driver. The drive assembly further includes two second drivers and two transmission frames. The two second drivers are mounted on the connecting frame, and the two transmission frames are respectively mounted on the two second drivers and respectively mounted on the two connecting plates, and move along the second direction under the drive of the second drivers.

2. The pressure equalization system of a vacuum coating chamber with a symmetrical pumping structure as described in claim 1, characterized in that, The telescopic tube includes a fixed tube, a sliding tube, and a plurality of first sealing rings. The fixed tube is installed on the mounting bracket, the sliding tube passes through the fixed tube, and the plurality of first sealing rings are all sleeved on the outer periphery of the sliding tube and elastically abut against the fixed tube and the sliding tube.

3. The vacuum coating chamber pressure equalization system with a symmetrical pumping structure as described in claim 1, characterized in that, The connecting pipe includes a pipe body and a plurality of second sealing rings. The pipe body passes through the telescopic pipe, and the plurality of second sealing rings are sleeved on the outer periphery of the pipe body and elastically abut against the telescopic pipe and the pipe body.

4. The pressure equalization system of a vacuum coating chamber with a symmetrical pumping structure as described in claim 1, characterized in that, The buffer includes a limiting rod and an elastic structure. The limiting rod passes through the first end plate or the second end plate, and the elastic structure is sleeved on the limiting rod and abuts against the first end plate or the second end plate.

5. The pressure equalization system of a vacuum coating chamber with a symmetrical pumping structure as described in claim 1, characterized in that, The mounting frame includes two guide members and a frame body. The two guide members are installed on the outer side wall of the vacuum chamber, and the frame body is installed between the two guide members.

6. The pressure equalization system of a vacuum coating chamber with a symmetrical pumping structure as described in claim 5, characterized in that, The guide includes two mounting seats, a guide rod, and multiple mounting ears. The two mounting seats are both mounted on the outer wall of the vacuum chamber, the guide rod is mounted between the two mounting seats, and the multiple mounting ears are all mounted on the frame and are all sleeved on the guide rod.

7. The pressure equalization system of a vacuum coating chamber with a symmetrical pumping structure as described in claim 1, characterized in that, The pressure equalization mechanism also includes two pressure sensors, both of which are installed on the inner wall of the vacuum chamber and are used to detect the pressure at the corresponding pumping components. They are arranged in a one-to-one correspondence with the two pumping components.

Images