A heating device applied to a gas path of an ALD device and a mounting method thereof

Abstract

The application relates to a heating device applied to a gas circuit of an ALD device and a mounting method thereof. The device is of a split quick-release structure, the quick release and disassembly of a heating belt can be realized without any tool, the disassembly time of a single set of device is less than 30 seconds, the maintenance efficiency of the ALD device is improved, the equipment downtime is reduced, the heating belt is closely combined with the gas circuit pipeline without gap, the heat conduction efficiency is improved by more than 15%, the gas circuit temperature fluctuation is reduced to + / -2 DEG C, the condensation and blockage of TiCl4, TEMAH and other precursors are effectively prevented, and the transmission stability is improved.

Description

Technical Field

[0001] This invention relates to the technical field of heating devices, and in particular to a heating device for use in the gas circuit of an ALD device and its installation method. Background Technology

[0002] Atomic layer deposition (ALD) technology, as a high-precision thin film deposition process, is widely used in the manufacturing of semiconductor integrated circuits, optoelectronic devices, and other fields. The ALD process relies on the alternating pulse injection of precursor gas and self-limiting chemical reaction in the reaction chamber. It requires the precursor to maintain a stable gaseous temperature and pressure during the transport process. Therefore, the gas path system of ALD equipment is usually equipped with a heating device to heat and insulate the precursor delivery pipeline throughout the process to prevent the precursor from condensing or decomposing in the pipeline, thereby ensuring process repeatability and film quality.

[0003] Currently, ALD equipment gas path heating devices typically use flexible heating tape wrapped around the outer wall of the gas path pipeline and pressed tightly against the pipeline surface by a fixing device to ensure heat conduction efficiency and heating uniformity. However, traditional heating tapes mainly use stainless steel clamps with bolt locking structures. Precursors such as TiCl4 and TEMAH and their hydrolysis products have strong corrosive effects. Long-term exposure to such process environments will cause corrosion products on the metal surface to fall off in the form of particulate dust, contaminating the clean process environment of ALD equipment and reducing wafer yield. Summary of the Invention

[0004] The purpose of this section is to outline some aspects of the embodiments of the present invention and to briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section, as well as in the abstract and title of the present application, to avoid obscuring the purpose of this section, the abstract and title of the invention. Such simplifications or omissions shall not be used to limit the scope of the present invention.

[0005] The purpose of this invention is to provide a heating device for the gas path of an ALD (Alternating Current Discharge) device, comprising: Heating tape is wrapped around the gas lines of the ALD equipment; The clamping assembly consists of arc-shaped positioning clamps symmetrically arranged on both sides of the gas pipeline; An anti-slip pad is inserted between the curved positioning clip and the heating band; A magnet is embedded in one end of an arc-shaped positioning clip, and the two sets of arc-shaped positioning clips are attracted to each other by the magnet. The elastic buckle and the arc-shaped positioning clip have corresponding slots, and the arc-shaped positioning clip are connected end to end by the elastic buckle.

[0006] As a preferred embodiment of the heating device of the present invention, the heating belt is fixed with two or more sets of clamping assemblies, and the two sets of clamping assemblies are respectively located at the connection points between the heating belt and the two ends of the gas pipeline.

[0007] As a preferred embodiment of the heating device of the present invention, the arc-shaped positioning clip has a length of 30mm and a width of 15-20mm, and the heating band has the same width as the arc-shaped positioning clip.

[0008] As a preferred embodiment of the heating device of the present invention, the arc-shaped positioning clip is made of PP material.

[0009] As a preferred embodiment of the heating device of the present invention, the elastic buckle is made of TPE material.

[0010] As a preferred embodiment of the heating device of the present invention, the elastic anti-slip pad is made of silicone material.

[0011] In a preferred embodiment of the heating device of the present invention, the magnet is fixedly connected to both sides of the elastic buckle by epoxy resin.

[0012] The present invention also provides an installation method, comprising: S1. Pre-winding of heating tape: The heating tape is wound around the outer wall of the gas pipeline in a spiral manner along the circumference, and after the two ends of the heating tape are wound around the beginning and end of the preset heating section, the two ends of the heating tape are electrically connected to the heater to form a circuit. S2, Anti-slip pad pre-installation: Two sets of clamping assemblies are provided, with an anti-slip pad pre-installed in the arc cavity of each arc positioning clamp; S3, Magnetic pre-positioning: Place the two arc-shaped positioning clips in each pair of clamping components on the upper and lower sides of the air passage, so that the two arc-shaped positioning clips can attract each other through the magnetic positioning end set on the inner side of their docking end and clamp them on the outer wall of the air passage to achieve magnetic pre-positioning. S4. Locking the clamping components: Press both ends of the arc-shaped positioning clips and connect the two arc-shaped positioning clips end to end along the slot with the elastic buckle. The two sets of clamping components are installed at the beginning and end of the heating section respectively.

[0013] The beneficial effects of this invention are: 1. This device features a split, quick-release structure, allowing for rapid assembly and disassembly of the heating belt without any tools. The assembly and disassembly time for a single unit is less than 30 seconds, improving the maintenance efficiency of ALD equipment and reducing equipment downtime. 2. The device is made of PP and silicone materials that are resistant to high temperature and corrosion of ALD process precursors. It will not undergo thermal deformation, aging and embrittlement, and will not cause cross-contamination to the ALD environment, ensuring that the device is structurally stable and performs reliably throughout its entire life cycle. 3. The fully sealed magnetic positioning end achieves precise pre-positioning. The arc-shaped clip perfectly matches the curvature of the pipeline. With the anti-slip pad, it ensures that the heating belt and the gas pipeline are tightly fitted without gaps, improving heat transfer efficiency by more than 15% and reducing gas temperature fluctuation to ±2℃. It effectively prevents the condensation and blockage of precursors such as TiCl4 and TEMAH, and improves transmission stability. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein: Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a perspective view of the heating device installed in this invention; Figure 3 For the present invention Figure 1 A sectional view of the view along direction A; Figure 4 This is a schematic diagram of the installation method of the present invention; Among them: 100-heating belt, 200-clamp assembly, 201-arc positioning clip, 300-anti-slip pad, 400-magnet, 500-elastic buckle, 700-heater; Detailed Implementation

[0015] Embodiments of the present invention will now be described with reference to the accompanying drawings. In this process, to ensure clarity and convenience, we may exaggerate the width of lines or the size of constituent elements in the drawings.

[0016] Furthermore, the terms used below are defined based on the functions of this invention and may vary depending on the intentions or conventions of the user or operator. Therefore, these terms are defined based on the entire contents of this specification.

[0017] like Figure 1-3 As shown, this embodiment provides a heating device for use in the gas path of an ALD device, comprising: Heating tape 100 is wrapped around the gas line 600 of the ALD device; The clamping assembly 200 has arc-shaped positioning clamps 201 symmetrically arranged on both sides of the gas pipeline 600; Anti-slip pad 300 is filled between arc-shaped positioning clip 201 and heating band 100; Magnet 400 is embedded in one end of arc-shaped positioning clip 201, and one end of the two sets of arc-shaped positioning clips 201 are attracted together by magnet 400; The elastic buckle 500 and the arc-shaped positioning clip 201 are provided with a slot corresponding to the elastic buckle 500. The arc-shaped positioning clip 201 is connected end to end through the elastic buckle 500.

[0018] In this embodiment, the heating band 100 is fixed with two or more sets of clamping assemblies 200. The two sets of clamping assemblies 200 are respectively located at the connection points of the heating band 100 and the gas pipeline 600. The arc-shaped positioning clip 201 is 30mm long and 15-20mm wide. The heating band 100 and the arc-shaped positioning clip 201 have the same width. Among them, the 15mm wide heating band 100 is adapted to the fixing device of the TiCl4 gas pipeline in the PE chamber of the ALD equipment; the 20mm wide heating band 100 is adapted to the fixing device of the TEMAH gas pipeline in the Thermal chamber of the ALD equipment, and is adapted to the heating and transmission requirements of the TEMAH precursor at 80-150℃. The number of clamping assemblies 200 configured on a single heating band 100 is 2 to 4 sets, which ensures the fixing reliability of the heating band 100 and avoids stress concentration caused by excessive constraint when the heating band 100 expands thermally.

[0019] In this embodiment, the arc-shaped positioning clip 201 is made of PP material; PP material can withstand a long-term working temperature of 200℃, can withstand the erosion of common ALD process precursors such as TiCl4 and TEMAH and their hydrolysis products, and is a non-metallic insulating material with no risk of conductivity and does not adsorb metal dust, meeting the cleanliness requirements of semiconductor-grade equipment.

[0020] In this embodiment, the elastic buckle 500 is made of TPE material; TPE material can withstand a working temperature of 180℃, can withstand the erosion of common ALD process precursors such as TiCl4 and TEMAH and their hydrolysis products, and can withstand repeated fastening ≥1000 times without fatigue deformation, which can ensure that the clamping assembly 200 still maintains good locking performance after multiple disassembly and assembly.

[0021] In this embodiment, the spring anti-slip pad 300 is made of silicone material. As the innermost part in contact with the heating band 100, the spring anti-slip pad 300 can withstand a long-term working temperature of 250°C and is resistant to corrosive gases such as TiCl4. The inner surface has anti-slip fine lines. In the locked state, the anti-slip pad 300 is compressed and deformed with a compression rate of 10% to 30%, which increases the friction between the clip and the pipeline and prevents the device from sliding along the pipeline axis.

[0022] In this embodiment, the magnet 400 is fixedly connected to both sides of the elastic buckle 500 by epoxy resin. The magnet 400 is a cylindrical strong magnet with a diameter of 8mm and a thickness of 3mm. It is embedded inside the mating end of the arc-shaped positioning clip 201. After the magnet 400 is embedded in the reserved mounting hole at the end of the clip, it is completely encapsulated with epoxy resin to form a fully sealed structure, so as to prevent the magnet 400 from falling off and contaminating the wafer after adsorbing metal dust.

[0023] Combination Figure 4 As shown, the present invention also provides an installation method, comprising: S1. Pre-winding of heating tape: The heating tape 100 is wound around the outer wall of the gas pipeline 600 in a spiral manner along the circumference, and after the two ends of the heating tape 100 are wound around the beginning and end of the preset heating section, the two ends of the heating tape 100 are electrically connected to the heater 700 to form a circuit. S2. Anti-slip pad pre-installation: Two sets of clamping assemblies 200 are provided. An anti-slip pad 300 is pre-installed in the arc cavity of each arc-shaped positioning clamp 201. The outer side of the anti-slip pad 300 is bonded and fixed to the inner arc surface of the arc-shaped positioning clamp 201 by a high-temperature resistant adhesive. S3. Magnetic pre-positioning: Place the two arc-shaped positioning clips 201 in each pair of clamping assemblies 200 on the upper and lower sides of the gas pipeline 600 respectively, so that the two arc-shaped positioning clips 201 can attract each other through the magnetic positioning end provided on the inner side of their docking end and clamp them on the outer wall of the gas pipeline 600. The inner side of the anti-slip pad 300 is in close contact with the outer surface of the heating belt 100 to achieve magnetic pre-positioning. S4. Locking the clamping components: Press the two ends of the arc-shaped positioning clamp 201, and connect the two arc-shaped positioning clamps 201 end to end along the groove with the elastic buckle 500. The two sets of clamping components 200 are installed at the beginning and end of the heating section respectively, and the spirally wound heating belt 100 is pressed tightly against the outer wall of the gas pipeline 600.

[0024] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A heating device for use in the gas circuit of an ALD (Alternating Current Discharge) device, characterized in that, include: Heating tape is wrapped around the gas lines of the ALD device; The clamping assembly consists of arc-shaped positioning clamps symmetrically arranged on both sides of the gas pipeline; An anti-slip pad is inserted between the curved positioning clip and the heating band; A magnet is embedded at one end of an arc-shaped positioning clip, and the two sets of arc-shaped positioning clips are attracted to each other by the magnet at one end. The elastic buckle and the arc-shaped positioning clip have corresponding slots, and the arc-shaped positioning clip are connected end to end by the elastic buckle.

2. The heating device for the gas circuit of an ALD device according to claim 1, characterized in that: The heating belt is fixed with two or more sets of clamping assemblies, and the two sets of clamping assemblies are respectively located at the connection points of the heating belt and the gas pipeline at both ends.

3. A heating device for use in the gas circuit of an ALD device according to claim 1, characterized in that: The arc-shaped positioning clip is 30mm long and 15-20mm wide. The heating band has the same width as the arc-shaped positioning clip.

4. A heating device for use in the gas path of an ALD device according to claim 2, characterized in that: The arc-shaped positioning clip is made of PP material.

5. A heating device for use in the gas circuit of an ALD device according to claim 1, characterized in that: The elastic buckle is made of TPE material.

6. A heating device for use in the gas circuit of an ALD device according to claim 1, characterized in that: The elastic anti-slip pad is made of silicone.

7. A heating device for use in the gas path of an ALD device according to claim 1, characterized in that: The magnet is fixedly connected to both sides of the elastic buckle with epoxy resin.

8. An installation method, employing the heating device for the gas circuit of an ALD device as described in claim 1, characterized in that, include: S1. Pre-winding of heating tape: The heating tape is wound around the outer wall of the gas pipeline in a spiral manner along the circumference, and after the two ends of the heating tape are wound around the beginning and end of the preset heating section, the two ends of the heating tape are electrically connected to the heater to form a circuit. S2, Anti-slip pad pre-installation: Two sets of clamping assemblies are provided, with an anti-slip pad pre-installed in the arc cavity of each arc positioning clamp; S3, Magnetic pre-positioning: Place the two arc-shaped positioning clips in each pair of clamping components on the upper and lower sides of the air passage, so that the two arc-shaped positioning clips can attract each other through the magnetic positioning end set on the inner side of their docking end and clamp them on the outer wall of the air passage to achieve magnetic pre-positioning. S4. Locking the clamping components: Press both ends of the arc-shaped positioning clips and connect the two arc-shaped positioning clips end to end along the slot with the elastic buckle. The two sets of clamping components are installed at the beginning and end of the heating section respectively.

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