Etching spray pipe and etching spray frame

Abstract

The present application relates to etching spray technology field, and a kind of etching spray pipe and etching spray frame, etching spray pipe includes tube body, and one end of tube body is equipped with liquid inlet, and the bottom of tube body is equipped with several liquid outlet holes, and tube body is equipped with main flow channel cavity and gas collection cavity by partition, and several bubble-breaking grid plates are provided in main flow channel cavity, and bubble-breaking grid plate is inclined to liquid inlet, and bubble-breaking grid plate is equipped with several teeth, and air passage slit is provided on partition, and exhaust port is provided on the top of gas collection cavity, and exhaust valve is provided on exhaust port, and flow regulation net is provided in liquid outlet hole.The degassing link of bubble-breaking grid plate, air passage slit, gas collection cavity, exhaust valve and flow regulation net is realized in spray pipe, and the flow interruption and flow fluctuation caused by bubble are eliminated, and etching spot defective rate is reduced, and product yield is improved.And by the setting of several bubble-breaking grid plates, liquid flow is repeatedly disturbed, flow rate gradient is broken to realize flow field homogenization, flow deviation between liquid outlet holes is reduced, and etching uniformity and consistency are improved.

Description

Technical Field

[0001] This invention relates to the field of etching spraying technology, specifically to an etching spraying pipe and an etching spraying frame. Background Technology

[0002] Wet chemical etching is one of the core processes in precision metal machining. It involves spraying an etching solution under high pressure onto the surface of a workpiece, using a chemical reaction to remove exposed metal materials and achieve patterning. The spraying system is the core unit of the etching equipment, and the spray pipe, as the terminal delivery and distribution component of the etching solution, directly determines the consistency of etching depth and product yield due to the uniformity of its internal flow field and the stability of its spray.

[0003] Currently, most horizontal etching spray pipes commonly used in the industry are single-end liquid inlet straight pipes of equal diameter, which have two core defects: Firstly, the pressure distribution along the process is uneven. As the etching solution flows from the inlet to the outlet, the static pressure gradually decreases due to the frictional resistance of the pipe wall. This results in a large flow rate near the inlet and a small flow rate at the outlet, with a flow rate difference of 8-15% between the beginning and end, directly causing inconsistent etching depths on the left and right sides of the workpiece.

[0004] Secondly, air bubbles inside the pipe interfere with spray stability. During the circulation and transportation of the etching solution, air is continuously entrained. At the same time, pressure and temperature fluctuations within the pipeline cause dissolved gases to precipitate, forming a large number of micron- to millimeter-sized bubbles that enter the spray pipe with the liquid flow. After entering the spray head, these bubbles cause spray interruptions and periodic fluctuations in flow rate, resulting in etching spots and localized under-etching on the workpiece surface. The defect rate of spots on precision hardware parts can reach 8%-12%. In addition, bubbles exacerbate jet divergence, reduce etching intensity and directional consistency, and further amplify etching depth deviations.

[0005] To address the bubble problem, current industry solutions only involve adding large vacuum degassing tanks and degassing devices to the main liquid supply pipeline. This equipment is costly, space-consuming, and cannot eliminate secondary bubbles generated during pipeline transport. As the terminal link closest to the nozzle, the spray pipe has always been unable to achieve in-situ degassing. There has long been a technological bias in this field, with the view that the spray pipe's internal space is small and its structure simple, making it impossible and unnecessary to integrate degassing functionality. Consequently, no improvement solution for treating bubbles within the spray pipe has ever been developed.

[0006] Therefore, this invention proposes a degassing type pressure equalization etching spray pipe with built-in bubble breaking and gas collection grid and its etching spray frame. Summary of the Invention

[0007] The present invention provides an etching spray pipe and an etching spray frame to solve the problems mentioned in the background art.

[0008] The objective of this invention is achieved through the following means: An etching spray pipe includes a horizontally extending pipe body, one end of which is provided with a liquid inlet, and the bottom of the pipe body has a plurality of liquid outlet holes arranged linearly along the length direction. The pipe body is provided with a main channel cavity and a gas collection cavity located above the main channel cavity through a partition. The main channel cavity is provided with a number of bubble-breaking grids at intervals along the liquid flow direction. The number of bubble-breaking grids are all inclined towards the liquid inlet, and the number of bubble-breaking grids are provided with a number of tooth tips facing the liquid inlet. At least one ventilation slit is provided on the partition plate corresponding to the top position of each bubble-breaking grid plate. After the bubbles carried in the etching solution in the main channel cavity are broken by the bubble-breaking grid plate, they float to the surface and enter the gas collection cavity through the ventilation slit. The top of the gas collecting chamber is provided with an exhaust port, and the exhaust port is provided with an exhaust valve for discharging the gas in the gas collecting chamber; Each of the liquid outlet holes is provided with a rectifier screen, which is used to break up microbubbles in a secondary manner and to rectify and stabilize the liquid flow entering the liquid outlet hole.

[0009] As a preferred embodiment of the etching spray pipe, the angle between the bubble-breaking grid plate and the bottom wall of the main channel cavity is 30-45 degrees, and the tips of the teeth of two adjacent bubble-breaking grid plates are staggered relative to each other along the width and height directions of the pipe body.

[0010] As a preferred embodiment of the etching spray pipe, the upper wall of the gas collection chamber is inclined upward from the liquid inlet end, and the exhaust port is located at the upper end of the gas collection chamber away from the liquid inlet.

[0011] As a preferred embodiment of the etching spray pipe, the inclination angle of the upper wall of the gas collection chamber is 0.3-1 degree.

[0012] As a preferred embodiment of the etched spray pipe, the planar profile of the ventilation slit is an elongated waist-shaped structure.

[0013] As a preferred embodiment of the etched spray pipe, each of the bubble-breaking grid plates is provided with three ventilation slits. The three ventilation slits are arranged at equal intervals along the width direction of the pipe body, and the length direction of the ventilation slits is parallel to the length direction of the pipe body.

[0014] As a preferred embodiment of an etching spray pipe, the cross-section of the pipe body has a convex structure, and the gas collection chamber is centrally located at the top of the main channel cavity.

[0015] As a preferred embodiment of the etched spray pipe, the rectifier mesh is a 100-150 mesh corrosion-resistant plastic wire mesh.

[0016] An etching spray frame includes a frame and several etching spray pipes, and each of the several liquid outlet holes of the etching spray pipes is provided with an etching nozzle that cooperates with the rectifier mesh.

[0017] As a preferred embodiment of the etching spray frame, a plurality of the etching spray pipes are arranged in a linear array along the horizontal direction of the frame.

[0018] The beneficial effects of this invention are as follows: A five-stage degassing process is implemented within the spray pipe, consisting of breaking large bubbles with bubble-breaking grids, achieving gas-liquid separation through ventilation slits, storing gas in the gas collection chamber, continuously venting gas through the exhaust valve, and eliminating microbubbles with a rectifier mesh. This completes the entire degassing process, eliminating jet interruptions and flow fluctuations caused by bubbles, reducing the etching spot defect rate, and thus improving product yield. Furthermore, the arrangement of several bubble-breaking grids repeatedly turbulents the liquid flow, breaking the flow velocity gradient and achieving flow field homogenization, thereby reducing flow deviation between liquid outlets and improving etching uniformity and consistency. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the first structure of an etching spray pipe according to the present invention; Figure 2 This is a schematic diagram of the second structure of an etching spray pipe according to the present invention; Figure 3 This is a cross-sectional view of an etched spray pipe according to the present invention; Figure 4 for Figure 3 Enlarged diagram of A in the middle; Figure 5 This is a partial cross-sectional view of an etched spray pipe according to the present invention; Figure 6 This is a schematic diagram of the bubble-breaking grid plate in this invention; Figure 7 This is a schematic diagram of the structure of an etching spray frame according to the present invention; The reference numerals in the figure are as follows: 1-frame, 2-etching spray pipe, 21-pipe body, 211-main channel cavity, 212-gas collection cavity, 213-bubble breaking grid plate, 2131-tooth tip, 22-liquid inlet, 23-liquid outlet, 24-partition plate, 241-ventilation slit, 25-exhaust port, 26-exhaust valve, 27-rectifier screen, 3-etching nozzle. Detailed Implementation

[0020] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0021] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0022] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0023] In the description of this embodiment, terms such as "upper," "lower," "left," and "right" are based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of description and simplification of operation, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0024] In the description of this invention, unless otherwise stated, "a plurality of" means two or more. Furthermore, the terms "first" and "second" are used merely for descriptive distinction and have no specific meaning.

[0025] In one embodiment of the present invention, such as Figure 1-6 As shown, a specific embodiment of an etching spray pipe 2 includes a horizontally extending pipe body 21. One end of the pipe body 21 is provided with a liquid inlet 22. The bottom of the pipe body 21 has a plurality of liquid outlet holes 23 arranged linearly along its length. The pipe body 21 is provided with a main channel cavity 211 and a gas collection cavity 212 located above the main channel cavity 211 through a partition 24. The liquid inlet 22 is used to communicate with an external liquid supply pipeline to continuously deliver etching solution into the main channel cavity 211.

[0026] A number of bubble-breaking grids 213 are spaced apart along the liquid flow direction inside the main channel cavity 211. The bubble-breaking grids 213 are all inclined towards the liquid inlet 22. The bubble-breaking grids 213 are all provided with a number of tooth tips 2131 facing the liquid inlet 22. At least one ventilation slit 241 is provided on the baffle plate 24 corresponding to the top position of each bubble-breaking grid 213. After the bubbles carried in the etching solution in the main channel cavity 211 are broken by the bubble-breaking grids 213, they float up and enter the gas collecting cavity 212 through the ventilation slit 241. The top of the gas collecting cavity 212 is provided with an exhaust port 25. An exhaust valve 26 is provided on the exhaust port 25 to discharge the gas in the gas collecting cavity 212. A rectifier net 27 is provided in each of the liquid outlet holes 23. The rectifier net 27 is used to break the microbubbles a second time and to rectify and stabilize the liquid flow entering the liquid outlet hole 23.

[0027] The tube body 21 is constructed by splicing and welding multiple acid and alkali resistant PP or PVDF plates. The two plates on the sidewall of the main channel cavity 211 are symmetrically equipped with several slots for fixing the bubble-breaking grid plate 213. In this embodiment, the cross-section of the tube body 21 has a convex structure, with the gas collecting chamber 212 centrally located at the top of the main channel cavity 211. The upper wall of the gas collecting chamber 212 slopes upwards from the liquid inlet 22 end, and the exhaust port 25 is located at the upper end of the gas collecting chamber 212 away from the liquid inlet 22. The slope angle of the upper wall of the gas collecting chamber 212 is preferably 0.3-1 degree.

[0028] The upward-sloping upper wall of the gas collecting chamber 212 allows bubbles to migrate unidirectionally along the upper wall under the combined action of gravity and the chamber's tilt angle and accumulate near the exhaust port 25, thus facilitating the continuous discharge of accumulated gas by the exhaust valve 26 and preventing the gas pressure inside the gas collecting chamber 212 from increasing, which could lead to gas-liquid back mixing or poor exhaust.

[0029] In this embodiment, the exhaust valve 26 is a float-type automatic exhaust valve 26. Its float opens and closes the valve port as the gas-liquid interface in the gas collecting chamber 212 rises and falls. When the etching liquid level rises and enters the exhaust chamber, the float-type automatic exhaust valve 26 can automatically close the valve port to prevent liquid overflow. When the etching liquid level drops, the float-type automatic exhaust valve 26 automatically opens the valve port to discharge the accumulated gas, thereby ensuring that the gas in the gas collecting chamber 212 is continuously and stably discharged, maintaining the dynamic balance of the gas-liquid interface in the chamber, and preventing spray flow pulsation or flow mismatch between the liquid outlet holes 23 caused by gas pressure fluctuations.

[0030] In this embodiment, the angle between the bubble-breaking grid plate 213 and the bottom wall of the main channel cavity 211 is 30-45 degrees, and the tips 2131 of two adjacent bubble-breaking grid plates 213 are staggered along the width and height directions of the pipe body 21. This forms a cross-flow turbulence path, preventing the liquid flow from flowing straight through the groove of the bubble-breaking grid plate 213, ensuring that the liquid flow collides fully with the bubble-breaking grid plate 213, and maximizing the bubble breaking and pressure equalization effects.

[0031] When the angle between the bubble-breaking grid 213 and the bottom wall of the main channel cavity 211 is 30 degrees, the bubble-breaking grid 213 is relatively gentler relative to the liquid flow direction, the normal component velocity of the liquid flow impacting the bubble-breaking grid 213 is smaller, and the overall flow resistance increase is lower. At this angle, the contact path between the liquid flow and the grid tooth surface is longer, and large bubbles are gradually cut and peeled off, making it more suitable for handling conditions with a high proportion of large-sized bubbles. However, due to the weaker turbulence intensity, the radial flow velocity homogenization effect is slightly weaker, the axial pressure compensation capability is limited, and the overall natural flow deviation of the pipe is larger. It is better than ordinary equal-diameter pipes, but slightly lower than the high-angle solution. It is suitable for low-pressure, high-flow etching production lines and ordinary hardware processing scenarios where the etching solution has a high gas content but the flow uniformity accuracy requirement is generally low. It can upgrade the degassing function with almost no impact on the original production capacity.

[0032] When the angle between the bubble-breaking grid 213 and the bottom wall of the main channel cavity 211 is 45 degrees, the grid is steeper relative to the liquid flow direction, the component velocity of the liquid flow perpendicularly impacting the tooth surface is greater, the shear impact force on the bubbles is stronger, and the breaking effect is significantly improved. At this angle, the bubble breaking rate of a single set of bubble-breaking grids 213 is 22% higher than that at an angle of 30 degrees, and it also has a good breaking effect on microbubbles.

[0033] Meanwhile, strong turbulence can effectively disrupt the parabolic velocity distribution within the pipe, improving cross-sectional pressure uniformity. Furthermore, the progressively higher damping strength better compensates for pressure drop along long pipelines. Correspondingly, increased flow resistance at this angle will slightly affect the spray pressure, requiring a liquid supply system with sufficient pressure margin. This angle design is suitable for high-precision semiconductor etching, wide-width long-pipe models, and precision metal parts processing where high etching uniformity is required. It can compensate for pressure attenuation along long pipes through strong turbulence, achieving high-precision flow uniformity over long distances.

[0034] When the angle between the bubble-breaking grid 213 and the bottom wall of the main channel cavity 211 is 40 degrees, an optimal balance can be achieved between bubble-breaking efficiency, pressure equalization effect, and flow resistance loss. It also takes into account anti-clogging performance and operational stability. Therefore, it is suitable for the general needs of most mass-production etching production lines, representing the optimal balance between performance and cost.

[0035] In this embodiment, each bubble-breaking grid plate 213 is provided with three ventilation slits 241. The three ventilation slits 241 are equidistantly arranged along the width direction of the tube body 21, and the length direction of the ventilation slits 241 is parallel to the length direction of the tube body 21. The planar profile of the ventilation slit 241 is an elongated waist-shaped structure, adopting a three-section design of lower inlet, middle straight section, and upper sharp edge.

[0036] Its lower inlet edge is rounded and chamfered, forming a smooth guide arc surface. When the rising bubbles come into contact with the bottom surface of the baffle 24, they can slide naturally into the slit along the arc surface, thus avoiding being cut and broken by the flat edge and falling back into the main channel cavity 211.

[0037] The middle section is a straight section of equal width, which can form a stable throttling channel and achieve gas-liquid separation by relying on the surface tension of the liquid. When the etching solution reaches this straight section area, the etching solution forms a liquid film on the slit wall due to the surface tension, while the bubbles continue to rise due to the density difference and break through the liquid film to enter the gas collection chamber 212, thereby achieving unidirectional gas phase conduction and effective liquid phase isolation.

[0038] Its upper outlet has a sharp chamfer, which can form a sharp annular edge. This structure can destroy the liquid's wall climbing effect, prevent the etching liquid from climbing into the gas collection cavity 212 along the slit, and ensure efficient gas phase output without droplet entrainment.

[0039] The rectifying mesh 27 is a 100-150 mesh corrosion-resistant plastic wire mesh. This plastic wire mesh can be installed at the liquid outlet using snap-fit ​​methods to break up tiny air bubbles. While a 100-mesh mesh offers a larger aperture and lower flow resistance, its effectiveness in breaking up tiny air bubbles is generally limited. It is suitable for high-flow-rate, low-pressure applications and etching solutions with high impurity content, reducing the risk of mesh clogging.

[0040] When using a 120-mesh screen, its aperture effectively breaks up microbubbles larger than 10μm, while offering excellent rectification and moderate flow resistance. This is the standard configuration and suitable for most precision etching scenarios. When using a 150-mesh screen, its aperture is even smaller, resulting in a higher microbubble removal rate and better rectification and flow stabilization. However, the flow resistance is slightly higher, and it is more prone to clogging by fine impurities. This makes it suitable for ultra-precision etching scenarios where the etching solution requires high cleanliness and extremely high surface quality.

[0041] like Figure 7 The etching spray frame shown includes a frame 1 and several etching spray pipes 2. Each of the several liquid outlet holes 23 of the etching spray pipes 2 is provided with etching nozzles 3 that cooperate with the rectifier mesh 27. The several etching spray pipes 2 are linearly arrayed along the horizontal direction of the frame 1.

[0042] The etching spray pipe 2 is provided with support ears on both sides. The etching spray pipe 2 is fixedly installed on the frame 1 by the cooperation of the support ears and fasteners such as bolts, so as to ensure that the etching spray pipe 2 can move with the frame 1.

[0043] Furthermore, the operation of this spray pipe can be divided into three continuous stages, each stage working together to achieve the dual functions of degassing and pressure equalization. The specific steps are as follows: 1. High-pressure etching solution carrying bubbles of various sizes enters the main channel cavity 211 at high speed from the inlet 22, flowing towards the end along the length of the tube 21. The liquid flow first impacts the first bubble-breaking grid plate 213, where millimeter-sized large bubbles are cut and torn apart by the sharp tooth peaks, decomposing into a large number of small bubbles. At the same time, the liquid flow is guided and diverted by the inclined bubble-breaking grid plate 213, forming multiple turbulent flows along the tooth surface. The original parabolic velocity distribution with high velocity at the center and low velocity at the wall is broken, and the velocity and pressure on the cross-section begin to mix and become uniform.

[0044] As the liquid continues to flow forward, it successively impacts the staggered sets of bubble-breaking grids 213. Each time it passes through a bubble-breaking grid 213, the bubbles are further broken and refined, while the pressure field is further homogenized. The progressive damping formed by multiple bubble-breaking grids 213 can offset the frictional pressure drop along the long pipe, gradually consuming the excess static pressure at the inlet and effectively maintaining the static pressure at the end. Ultimately, this makes the static pressure at all points in the pipe tend to be consistent, ensuring uniform flow rate at each nozzle from the source.

[0045] Second, the small bubbles broken by the bubble-breaking grid 213 float to the top of the tube 21 under the action of buoyancy and move to the bottom surface of the baffle 24. Since the ventilation slit 241 is directly opposite the top of the bubble-breaking grid 213, after the floating bubbles reach the bottom surface of the baffle 24, they can slide into the slit along the arc of the inlet of the ventilation slit 241, and enter the gas collection chamber 212 at the top through the equal-width throttling straight section.

[0046] During this process, due to surface tension, the etching solution forms a stable liquid film at the slit entrance. Gas can break through the liquid film and enter the gas collecting chamber 212, while the etching solution cannot pass through the slit in large quantities, thus achieving efficient one-way gas-liquid separation. The gas entering the gas collecting chamber 212, under the combined action of buoyancy and the inclined upper wall of the gas collecting chamber 212, slowly moves and accumulates towards the exhaust port 25 at the end of the tube 21, and is then continuously discharged through the exhaust valve 26.

[0047] Third, after the bubble-breaking separation by the bubble-breaking grid 213, a small number of tiny bubbles remain in the main flow channel 211. These tiny bubbles travel with the liquid flow to several outlet holes 23. Before the liquid flows out of the outlet holes 23, it must first pass through the rectifier mesh 27. The rectifier mesh 27 cuts the tiny bubbles with fine wires, thereby breaking them up and eliminating them in the liquid flow. At the same time, the turbulent flow and swirling flow are rectified by the wire mesh as they pass through, becoming a uniform and stable laminar flow state. This ensures that the liquid flow state and pressure at the inlet of each nozzle are highly consistent, thereby further reducing the flow deviation.

[0048] After degassing, pressure equalization, and rectification, the etching solution can smoothly enter the etching nozzle 3, thus forming a continuous, uninterrupted, and waveless jet that is evenly sprayed onto the surface of the workpiece to be etched. Because the flow rate, pressure, and spray pattern of each nozzle are highly consistent, and there is no bubble interference, the etching reaction rate at all locations on the workpiece surface is uniform, ultimately achieving a high-precision, spot-free etching process.

[0049] The beneficial effects of this invention are as follows: A five-stage degassing process is achieved within the spray pipe, consisting of a bubble-breaking grid 213 to break large bubbles, a venting slit 241 to achieve gas-liquid separation, a gas collection chamber 212 to store gas, an exhaust valve 26 to continuously exhaust gas, and a rectifier mesh 27 to eliminate microbubbles. This completes the degassing process within the spray pipe, thereby eliminating jet interruptions and flow fluctuations caused by bubbles, reducing the etching spot defect rate, and thus improving product yield. Furthermore, the arrangement of several bubble-breaking grids 213 repeatedly turbulents the liquid flow, breaking the flow velocity gradient and achieving flow field homogenization, thereby reducing the flow deviation between the liquid outlet holes 23 and improving etching uniformity and consistency.

[0050] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present invention without departing from the scope of the present invention are within the scope of the present invention.

Claims

1. An etching spray pipe, comprising a horizontally extending pipe body (21), one end of the pipe body (21) having a liquid inlet (22), and the bottom of the pipe body (21) having a plurality of liquid outlet holes (23) arranged linearly along its length, characterized in that: The pipe body (21) is provided with a main channel cavity (211) and a gas collecting cavity (212) located above the main channel cavity (211) through a partition (24). The main channel cavity (211) is provided with a number of bubble-breaking grids (213) spaced apart along the liquid flow direction. The number of bubble-breaking grids (213) are all inclined toward the liquid inlet (22), and the number of bubble-breaking grids (213) are provided with a number of tooth tips (2131) facing toward the liquid inlet (22). At least one ventilation slit (241) is provided on the top position of each bubble-breaking grid plate (213) on the partition plate (24). After the bubbles in the etching solution in the main channel cavity (211) are broken by the bubble-breaking grid plate (213), they float up and enter the gas collection cavity (212) through the ventilation slit (241). The top of the gas collecting chamber (212) is provided with an exhaust port (25), and an exhaust valve (26) is provided on the exhaust port (25) for discharging the gas in the gas collecting chamber (212); Each of the liquid outlet holes (23) is provided with a rectifier mesh (27), which is used to break up microbubbles in a secondary manner and rectify and stabilize the liquid flow entering the liquid outlet holes (23).

2. The etching spray pipe according to claim 1, characterized in that: The angle between the bubble-breaking grid plate (213) and the bottom wall of the main channel cavity (211) is 30-45 degrees, and the tips (2131) of two adjacent bubble-breaking grid plates (213) are staggered relative to each other along the width and height directions of the tube body (21).

3. The etching spray pipe according to claim 1, characterized in that: The upper wall of the gas collecting chamber (212) is inclined upward from the liquid inlet (22) end, and the exhaust port (25) is located at the upper end of the gas collecting chamber (212) away from the liquid inlet (22).

4. The etching spray pipe according to claim 3, characterized in that: The inclination angle of the upper wall of the gas collecting chamber (212) is 0.3-1 degree.

5. The etching spray pipe according to claim 1, characterized in that: The planar profile of the ventilation slit (241) is an elongated waist-shaped structure.

6. The etching spray pipe according to claim 5, characterized in that: Each of the bubble-breaking grid plates (213) is provided with three ventilation slits (241). The three ventilation slits (241) are arranged at equal intervals along the width direction of the tube body (21), and the length direction of the ventilation slits (241) is parallel to the length direction of the tube body (21).

7. The etching spray pipe according to claim 1, characterized in that: The cross-section of the tube (21) is convex, and the gas collecting cavity (212) is centrally located at the top of the main channel cavity (211).

8. The etching spray pipe according to claim 1, characterized in that: The rectifier mesh (27) is a 100-150 mesh corrosion-resistant plastic wire mesh.

9. An etching spray frame, comprising a frame (1) and a plurality of etching spray pipes (2), characterized in that: The etching spray pipes (2) are all etching spray pipes (2) as described in any one of claims 1-8, and each of the etching spray pipes (2) has an etching nozzle (3) that cooperates with the rectifier mesh (27) on a plurality of liquid outlet holes (23).

10. An etching spray frame according to claim 9, characterized in that: Several of the etching spray pipes (2) are linearly arrayed along the horizontal direction of the frame (1).

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