Online expansion reconstruction construction method of chemical liquid supply system and fluid isolation device

Abstract

The application discloses an online expansion reconstruction construction method of a chemical liquid supply system and a fluid isolation device, and relates to the technical field of semiconductor factory engineering, and comprises the following steps: obtaining pressure changes, flow distribution and valve opening and closing corresponding relationships under existing liquid supply operation states, combining collection results to demarcate executable reconstruction operation section positions, and completing preparation of a matching docking component in an external processing area in advance. The application realizes liquid supply expansion through an online reconstruction mode, can complete construction without long-time shutdown, reduces chemical emissions and lowers costs through local isolation, guarantees stable liquid supply cleanliness through external prefabrication and clean environment control, reduces impact and improves operation stability through orderly opening and flow regulation, and adapts to narrow space construction through a quick docking mode, thereby improving reconstruction efficiency, stability and applicability as a whole.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing plant engineering technology, specifically to an online expansion and renovation method for a chemical supply system and a fluid isolation device. Background Technology

[0002] In the semiconductor manufacturing and printed circuit board production sectors, centralized chemical supply systems (such as CDM / SDS systems) are critical plant systems ensuring the stable operation of core processes such as etching, developing, and cleaning. These systems typically consist of a supply end (chemical storage and delivery unit) and a receiving end (production equipment), using high-cleanliness pipelines to continuously deliver acid and alkali solutions. With production line expansion or increased capacity demands, existing supply systems often require upgrades, such as adding new pumps, valves, or parallel storage tanks to meet the supply requirements of new equipment. In current engineering practice, such upgrades typically employ a "complete system shutdown and evacuation" approach. This involves first emptying all chemicals from the pipelines, then flushing with deionized water for an extended period until neutral, followed by pipeline cutting, welding, or connection work. Finally, after system testing, the supply is restored. While this method achieves system upgrades, it is poorly suited to high-end manufacturing scenarios where production continuity is crucial.

[0003] However, existing technologies have many shortcomings in practical applications: First, the full evacuation retrofit requires multiple steps such as discharge, flushing, purging, construction, and retesting, with the overall downtime typically lasting 12 to 24 hours or even longer, severely impacting the continuous operation efficiency of the production line; second, a large amount of high-purity chemicals are directly discharged into the waste liquid treatment system during the evacuation process, not only wasting expensive materials but also increasing environmental governance pressure; third, the system is prone to generating bubbles, water hammer, and pressure fluctuations during refilling, which may cause unstable liquid supply to remote equipment or even particulate contamination, affecting product yield; in addition, under conditions of limited space in the chemical station and dense pipeline layout, the traditional construction method, which requires large-scale cutting and welding, is difficult to operate and poses high safety risks.

[0004] The information disclosed in the background section is only intended to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Summary of the Invention

[0005] The purpose of this invention is to provide an online expansion and retrofit construction method and a fluid isolation device for a chemical supply system, so as to solve the problems in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an online expansion and renovation method for a chemical supply system, comprising the following steps: By acquiring the pressure changes, flow distribution, and valve opening and closing correspondence under the existing liquid supply operation status, and combining the acquisition results, the location of the work section that can be modified is delineated, and the docking parts that match the work section are prepared in advance in the external processing area, thereby providing a clear operating range for subsequent local treatment; Around the designated work area, an orderly shutdown operation is performed based on the obtained valve opening and closing correspondence to form a closed section limited to the source area. A small amount of residual liquid is discharged within the closed section to create an operable space, while the remote transportation status is maintained continuously and stably by relying on the closed section. Pure water is introduced into the enclosed section for directional rinsing, followed by the introduction of inert gas for drying, thereby creating a clean working environment within the enclosed section free of residue and active liquid, providing conditions for subsequent connection operations. The original connection points are separated by relying on the clean working environment, and the prepared docking components are used to complete the rapid connection. At the same time, the isolation function in the docking components is used to keep the remote transmission status unaffected, thereby realizing the expansion access in the online state. After completing the connection, the opening sequence is restored according to the valve opening and closing correspondence, and the original delivery pressure is used to push the liquid smoothly into the new path. At the same time, the instantaneous impact is reduced by gradually adjusting the flow rate change, thereby completing the entire process of capacity expansion and transformation under the condition of no production interruption.

[0007] Preferably, the process of finely identifying operational status information and delineating work areas involves the following steps: The pressure changes in the existing liquid supply process are continuously collected and recorded in chronological order. The collection locations are also marked to distinguish the states of different sections. The traffic distribution at each location is analyzed point by point, and the traffic changes are correlated with the corresponding time points to form the distribution relationship of traffic changes; The opening and closing status of each valve is recorded one by one, and a corresponding relationship is established by combining pressure changes and flow distribution to describe the relationship between the action and operating status of each valve. By comprehensively comparing pressure changes, flow distribution, and valve opening and closing status, operating sections with independent operating conditions are delineated, and the corresponding relationships of docking components are confirmed.

[0008] Preferably, the coordinated control of shutdown sequence and flow continuity during local isolation includes the following steps: The positions of each valve are sorted one by one according to the direction of liquid supply, and the shut-off path is determined step by step from the supply source to the far end according to the spatial distribution relationship. At the same time, the corresponding position of each valve is numbered and marked. Perform valve closing operations one by one along the shut-off path, set an interval between each closing action, and record the changes in flow state before and after the closing action to adjust the rhythm of subsequent operations; For valves located near the far end of the path, a delayed closing process is implemented, and the closing angle is controlled during the process to gradually reduce the flow to the closed section while avoiding instantaneous cutoff. Once all valves are closed, the boundary of the closed section is confirmed to limit the area of ​​the closed section to the pre-defined location and maintain continuous transport along the remote path.

[0009] Preferably, the treatment focuses on the process of removing residues and creating a clean environment within the enclosed section, with the following steps: Pure water is introduced from one end of the closed section, and the speed of entry is controlled to make the pure water advance in a single direction, while the coverage area of ​​the advancement path is recorded. By adjusting the direction and rhythm of pure water flow, the pure water forms a reciprocating flow path within the closed section, thereby repeatedly flushing different locations. During the continuous flow of pure water, the input rate is gradually reduced, and inert gas is introduced from the other end at the same time, so that the gas enters the closed section along the original flow path. By continuously introducing inert gas and maintaining a consistent flow direction, residual moisture inside the enclosed section is gradually discharged with the gas flow, thus forming a stable and dry state.

[0010] Preferably, the pure water entry path and the inert gas entry path are aligned in the same direction. The pure water continues to flow in a unidirectional manner. When the inert gas is introduced, it simultaneously replaces the original flow path of the pure water and maintains a continuous flow relationship. The pure water exit process and the inert gas entry process form a seamless transition, thereby ensuring that the flow state inside the closed section remains consistent and that residual moisture is continuously removed.

[0011] Preferably, the optimization of the coordination and connection relationship between connection location processing and online access process is carried out through the following steps: The existing connection locations are marked, and a separation operation is performed along the marked locations to break the original connection relationship and form a clear access interface, while controlling the separation range not to exceed the boundary of the closed section. Move the prepared docking components to the access interface position, and adjust the position, direction and angle to make the docking components correspond to the access interface. Complete the connection operation of each connection point of the docking components one by one according to the preset connection sequence, and keep the connection points advancing synchronously during the connection process to avoid local displacement; After all connections are completed, maintain the internal isolation of the docking components to ensure that the connection location and the remote path maintain an independent operating relationship.

[0012] Preferably, the control is performed to regulate the flow recovery and shock suppression process after capacity expansion, and the steps are as follows: The valve opening operation is performed step by step in a predetermined sequence, and the opening range is controlled during each opening process to gradually change the flow from a static state to a slow flow state. During the valve's step-by-step opening process, the existing delivery pressure is used to push the liquid into the new path, and the rhythm of the liquid entering is controlled by adjusting the valve opening speed. The flow process of liquid entering the new path is adjusted in stages. By gradually increasing the opening amplitude, the liquid flow in the new path is expanded from local flow to overall flow. After a continuous flow state is formed in each path, the current valve opening state is maintained to ensure that the new path and the existing path maintain a synchronous operation relationship.

[0013] Preferably, during the step-by-step valve opening operation, the time interval corresponding to the opening sequence is set synchronously, and the opening amplitude is kept consistent with the flow direction during the liquid entering the new path. By continuously adjusting the opening rhythm and path connectivity, a continuous transition of the flow state from initial entry to full path coverage is achieved, while maintaining the flow consistency between each path.

[0014] Preferably, the docking preparation process and on-site operation are coordinated and handled in a unified manner, with the following steps: The location of the corresponding work section is confirmed, and its relative relationship with the surrounding environment is recorded; The locations of the docking components are marked according to the connection path, and corresponding connection relationship descriptions are formed; Plan the connection sequence and form a specific operation path based on the operating space conditions; The overall condition of the docking components is checked to ensure they correspond to the location of the work area, and the preparation process is completed.

[0015] A fluid isolation device for online expansion and retrofitting of a chemical supply system includes an operating status determination module, a shutdown module, a flushing and drying module, an access module, and a flow recovery control module. The operation status delineation module obtains the pressure changes, flow distribution, and valve opening and closing correspondence under the existing liquid supply operation status. Based on the collected results, it delineates the location of the work section that can be modified. It also prepares the docking parts that match the work section in advance in the external processing area, thereby providing a clear operating range for subsequent local processing. The shut-off module, around the designated work area, performs orderly shut-off operations based on the obtained valve opening and closing correspondence, forming a closed section limited to the source area, and discharges a small amount of residual liquid within the closed section to create an operable space, while maintaining the continuous and stable remote delivery status by relying on the closed section. The rinsing and drying module introduces pure water for directional rinsing of the enclosed section, followed by the introduction of inert gas for drying, thereby creating a clean working environment within the enclosed section free of residue and active liquid, providing conditions for subsequent connection operations. The access module separates the original connection location based on the clean operation environment and calls the prepared docking parts to complete the rapid connection. At the same time, it uses the isolation function in the docking parts to keep the remote delivery status unaffected, thereby realizing the expansion access in the online state. The flow restoration control module, after completing the connection, restores the opening sequence according to the valve opening and closing correspondence, and uses the original delivery pressure to push the liquid smoothly into the new path. At the same time, it reduces the instantaneous impact by gradually adjusting the flow rate change, thereby completing the entire capacity expansion and transformation process under the condition of no production interruption.

[0016] The technical effects and advantages provided by the present invention in the above technical solution are as follows: This invention restructures key operations during the expansion and modification of the liquid supply system, transforming the traditional construction process requiring long-term downtime into a continuous operation under online conditions. In practical applications, pump output is only adjusted briefly during valve switching, thus avoiding continuous supply interruptions to downstream production lines and reducing the downtime window, which would normally last for several hours, to a negligible level. Under this operating mode, production equipment can maintain normal operation during the modification period, fundamentally resolving the contradiction between expansion construction and production continuity, and effectively improving the overall operating efficiency of the production line and the utilization level of equipment.

[0017] This invention constructs locally isolated operating sections, treating only a small amount of residual liquid within the enclosed section, thus avoiding the discharge of large amounts of chemicals throughout the entire liquid supply path. Compared to the traditional full-drainage method, this significantly reduces the loss of high-purity chemicals during a single modification process. At the same time, due to the significant reduction in discharge volume, the volume of liquid entering the waste liquid treatment stage is also reduced, thereby reducing the subsequent treatment burden and related expenses. This achieves both material conservation and environmental load control, making the expansion and modification process both economical and environmentally friendly.

[0018] This invention prefabricates the docking components in an external processing area and assembles them in a controlled environment, ensuring that the components involved in the connection are clean before entering the site. This prevents particles generated during on-site cutting from entering the existing liquid supply path. During the subsequent connection process, the operation relies on the established clean working environment, ensuring that the entire expansion and access process operates under low-pollution conditions, effectively controlling the source of particles, and guaranteeing that the liquid supply quality remains stable after the modification, thereby meeting the requirements of production scenarios with strict high cleanliness requirements.

[0019] This invention introduces an orderly opening and gradual flow diversion method during the liquid supply restoration process, allowing the liquid to continuously change state as it enters the new path. Simultaneously, combined with phased control of flow rate changes, the flow state gradually transitions to a stable state, thus avoiding violent impacts during instantaneous opening. During this operation, the liquid's propulsion within the path remains smooth, effectively suppressing pressure fluctuations and the resulting vibrations, reducing the likelihood of abnormal situations at connection points, and making the entire liquid supply restoration process more stable and reliable.

[0020] This invention enables rapid connection using pre-prepared docking components, transforming on-site operations from a traditional, complex construction process into a simple assembly process. In actual implementation, the connection operation can be completed without occupying a large operating space. In confined environments, docking operations can be completed using only conventional tools, avoiding the problems of large equipment being difficult to access or operate. This allows expansion and renovation to still have good adaptability in space-constrained scenarios, improving construction flexibility and reducing on-site operation difficulty. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0022] Figure 1 This is a schematic diagram of the online capacity expansion and modification structure and process layout of the present invention. Detailed Implementation

[0023] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the examples set forth herein; rather, they are provided so that the description of this disclosure will be more complete and fully convey the concept of the exemplary embodiments to those skilled in the art.

[0024] This invention provides, for example Figure 1The method for online expansion and retrofitting of a chemical supply system and the fluid isolation device shown herein include the following steps: By acquiring the pressure changes, flow distribution, and valve opening and closing correspondence under the existing liquid supply operation status, and combining the acquisition results, the location of the work section that can be modified is delineated, and the docking parts that match the work section are prepared in advance in the external processing area, thereby providing a clear operating range for subsequent local treatment; In practical engineering applications, to achieve accurate identification and controllable modification of existing fluid supply operation status, and to ensure that subsequent operations have clear boundaries and are feasible, the process of acquiring operation status information and determining work sections is further refined into the following implementation methods: The system acquires full-process information on the existing fluid supply operation status. Under continuous fluid supply conditions, multiple data acquisition points are deployed at key locations along the operation path to continuously record pressure changes and simultaneously acquire the trend of flow distribution changes. The opening and closing status of each valve is individually identified and correlated, unifying the mapping of pressure changes, flow distribution, and valve opening and closing status to form a complete operational status mapping relationship. During this process, by comparing the changes in operational status over different time periods, stable pressure ranges and continuous flow ranges are identified. The influence range between each section is determined by combining the valve opening and closing correspondence, further delineating multiple candidate areas with independent control characteristics. Through screening and comparison, areas that do not affect remote continuous fluid supply are prioritized for modification. The spatial location and corresponding connection relationships of these candidate areas are clearly recorded, providing a basis for subsequent work section delineation.

[0025] Based on the completion of the operational status mapping relationship and candidate area screening, and combined with the obtained pressure change and flow distribution information, the candidate areas are further refined and delineated. Through the linkage analysis of the valve opening and closing correspondence, the minimum operating range with independent closure conditions is determined, and the sequential path for performing shutdown operations is confirmed within this range. At the same time, based on the pressure change trend recorded in the operational status mapping relationship, the change response of each position during the shutdown process is predicted to ensure that the operation section will not interfere with the remote delivery status when performing the shutdown operation. In this process, by comparing multiple candidate areas, the area with operating space conditions and without affecting the existing fluid supply continuity is selected as the final operation section. The boundary range, corresponding valve position, and relationship with the remote delivery path of the operation section are uniformly marked, thus forming the result of the modification section delineation with a clear operating range.

[0026] Based on the delineation of the work area, and in conjunction with the determined boundary range and corresponding valve positions, the preparation process within the external processing area is carried out simultaneously. According to the actual location and connection relationships of the work area, the docking components to be connected are pre-matched. During the matching process, the connection positions of the docking components are adjusted based on the flow distribution recorded by the operating status mapping relationship, and the connection direction of the docking components is optimized based on pressure change trends. This ensures that the docking components can quickly connect with the work area during subsequent connection processes. Simultaneously, the overall preparation work for the docking components is completed within the external processing area, including the unified identification of each connection position, the pre-setting of the connection sequence, and the advance planning of the operation path. This allows the docking components to directly and quickly connect to the work area upon entering the site, reducing uncertainties during on-site operations.

[0027] Based on the preparation of the docking components, the docking components are as a whole associated with the delineation results of the work area. By uniformly applying the boundary range of the work area, the valve opening and closing correspondence, and the operation status mapping information to the positioning process of the docking components, the docking components can directly match the corresponding position when entering the work area and complete the docking process according to the determined connection sequence. In this process, by pre-planning the operation path of each position within the work area, the docking components can complete the connection action along the predetermined path during actual operation and maintain the stability of the remote delivery status during the connection process. This provides a clear and executable operation range for subsequent local processing operations, while ensuring that the entire transformation process maintains continuity and controllability under the existing liquid supply operation status.

[0028] Around the designated work area, an orderly shutdown operation is performed based on the obtained valve opening and closing correspondence to form a closed section limited to the source area. A small amount of residual liquid is discharged within the closed section to create an operable space, while the remote transportation status is maintained continuously and stably by relying on the closed section. To achieve local isolation and create controllable operating conditions within the existing liquid supply operation, the orderly shutdown and local discharge process is implemented in detail as follows, based on the identified operating area locations and their corresponding relationships: For the designated work area, based on the previously obtained valve opening and closing correspondence, the current status of each relevant valve is confirmed one by one, and the shut-off operation is carried out step by step in a predetermined order. During the execution, the valves closer to the supply source are closed first, while the valves closer to the remote delivery path are closed later. Through this sequential control method, the flow in the direction of the supply source is gradually weakened and eventually stopped, while the remote delivery path continues to maintain continuous output based on the original liquid storage state.

[0029] In this process, by calling the valve opening and closing correspondence item by item, each shut-off action is within the constraints of the known operating state, thereby ensuring that the entire shut-off process is completed step by step under continuous liquid supply, and initially forming a closed range with isolation conditions without interfering with remote delivery.

[0030] After completing the above-mentioned orderly shutdown operation and forming a preliminary closed area, the boundary within the work section is further converged based on the state difference between the closed supply source valve and the not yet completely cut off remote path. By continuing to execute the shutdown operation of the remaining valves, the work section is gradually transformed into a closed section limited to the source area.

[0031] During this process, by combining the pressure change information recorded in the aforementioned valve opening and closing correspondence, each shut-off action is controlled at intervals to ensure that the pressure change inside the closed section is in a continuous transition state, thereby avoiding the impact of local drastic changes on the remote delivery. At the same time, through this gradual convergence method, the boundary of the closed section is clearly defined within the pre-determined operating area, providing a stable premise for subsequent discharge operations.

[0032] Under the condition that the boundary of the closed section is stably formed, the process of treating the residual liquid inside the closed section is carried out. By calling the discharge path corresponding to the closed section, the small amount of liquid remaining inside the section is directed out. During the discharge process, the discharge rhythm is controlled in stages based on the previous pressure change information, so that the liquid is gradually released from the closed section to the external collection location, and the isolation relationship between the closed section and the remote transportation path is maintained throughout the discharge process.

[0033] Meanwhile, by synchronously controlling the opening and closing of the discharge path, the discharge process is always confined within the closed section, thereby completing the removal of residual liquid without introducing additional disturbance and creating conditions for the formation of an operable space.

[0034] After the residual liquid has been drained and an operable space has been created, the existing closed section continues to be used as an isolation boundary. By maintaining the closed state of the valve on the supply source side and the connectivity of the remote delivery path, the remote delivery can continue to operate based on the existing liquid stock. During this process, by continuously maintaining the state inside and outside the closed section, the interior of the closed section remains static, while the remote delivery path maintains a dynamic flow state, thus achieving the parallel existence of local static and overall dynamic in the same operation.

[0035] This state separation method enables subsequent operations to be carried out independently within the closed section without interfering with remote delivery, ultimately completing the entire process of local isolation and operation space construction under existing liquid supply conditions.

[0036] Pure water is introduced into the enclosed section for directional rinsing, followed by the introduction of inert gas for drying, thereby creating a clean working environment within the enclosed section free of residue and active liquid, providing conditions for subsequent connection operations. To achieve thorough cleaning and operational readiness within the closed section during existing liquid supply operations, the rinsing and drying processes are refined and implemented as follows, focusing on the established closed section: Around the boundary of the established closed section, pure water is introduced to directionally flush the inside of the closed section. During the process, based on the range of the closed section established in the previous stage, the pure water is controlled to enter from one side of the closed section and form a unidirectional advancement path inside the section along the predetermined flow direction, so that the pure water gradually covers all the inner surfaces of the closed section. At the same time, during the flow, the residual liquid is gradually replaced and discharged to the external collection location.

[0037] In this process, by segmenting the entry rhythm of pure water, the pure water forms a continuous flushing process within the closed section, rather than an instantaneous impact, thereby avoiding disturbance to the boundary of the closed section and ensuring that the flushing range is always limited to the inside of the closed section, thus achieving effective removal of residual liquid without affecting the remote delivery status.

[0038] After initial rinsing and replacement of residual liquid inside the closed section, the introduced pure water flow path is used to circulate and flush the inside of the closed section. By maintaining continuous pure water input on the existing flow path, each location inside the closed section is repeatedly flushed by the fluid, thereby further removing residual substances adhering to the inner surface.

[0039] By controlling the flow direction and considering the boundary conditions of the closed section, pure water is continuously circulated along a predetermined path, and its contents are constantly updated during the circulation process. This gradually transforms the interior of the closed section into a state containing only pure water, while maintaining the isolation relationship between the closed section and the distant transport path, thus providing uniform and controllable initial conditions for subsequent drying.

[0040] After the pure water rinsing within the closed section has been completed and a stable state has been reached, the input of pure water is gradually reduced while inert gas is introduced simultaneously. The inert gas enters the closed section along the previous pure water flow path, gradually replacing the pure water and transforming the liquid components within the closed section into a gaseous environment. During this process, the uniform distribution state established in the previous stage ensures that the inert gas covers all locations within the closed section. By continuously introducing inert gas, residual moisture is pushed outwards, thus achieving a smooth transition from a liquid to a gaseous environment while maintaining the stability of the closed section boundary, and avoiding local disturbances caused by rapid replacement.

[0041] Under the condition of continuous introduction of inert gas and completion of liquid replacement, the inert gas is maintained to flow continuously in the closed section, so that residual moisture is gradually carried out of the closed section, while keeping the interior of the closed section in a state of no residue and no active liquid. In this process, by continuously controlling the flow direction of the inert gas, it is made to circulate continuously along the predetermined path, thereby ensuring that all positions in the closed section are in a dry environment, and maintaining the stability of the remote delivery path throughout the process.

[0042] Through the above continuous operation, a clean and stable working environment is finally formed inside the closed section, providing reliable conditions for subsequent connection operations and ensuring that the entire treatment process is completed under the existing liquid supply operation conditions without introducing additional disturbances.

[0043] The original connection points are separated by relying on the clean working environment, and the prepared docking components are used to complete the rapid connection. At the same time, the isolation function in the docking components is used to keep the remote transmission status unaffected, thereby realizing the expansion access in the online state. To ensure safe separation and rapid connection of the connection points during existing liquid supply operations, and to achieve capacity expansion without interfering with remote delivery, the connection process is detailed as follows, focusing on the utilization of a clean operating environment and the synergistic application of docking components: Within the established clean working environment, the original connection points are precisely separated. During the process, relying on the clean working environment to achieve a state of no residue and no active liquid, the connection points are cut at specific points. By controlling the cutting path and cutting rhythm, the separation process is confined to the pre-defined connection area, while avoiding disturbance to the boundary of the closed section.

[0044] In this process, the dry conditions provided by the clean working environment prevent the trace amounts of adhering substances generated during the cutting process from forming residual accumulations. By pre-setting the cutting sequence, the connection position can be separated in a short time, thus providing a clear access interface for subsequent connection operations without affecting the remote conveying status.

[0045] After completing the separation of the connection points and forming the access interface, the prepared docking components are immediately invoked. The docking components are introduced into the closed section and aligned with the separated connection points for initial docking. During the process, the dry state maintained by the clean operating environment ensures that the docking process is not affected by liquids. At the same time, combined with the access interface formed in the previous stage, the alignment is gradually achieved through the positioning relationship of the docking components. In this process, by controlling the docking sequence, the connection points of the docking components are aligned sequentially according to the predetermined path, thereby ensuring that the docking components can quickly complete the initial connection within the closed section and maintain the continuity of the remote delivery status throughout the process.

[0046] Based on the initial connection of the docking components, the isolation function of the docking components is further utilized to separate the state between the closed section and the remote transport path. By maintaining the isolation state within the docking components, the remote transport path and the connection position are made to operate independently, thereby avoiding any impact on the remote transport during the connection process. In this process, combined with the aforementioned clean operating environment and the already formed connection interface, the docking components can be further fitted and fixed in the isolated state. At the same time, by continuously maintaining the isolation state, the connection position is always kept within a controllable range, thereby providing stable conditions for subsequent overall connection.

[0047] Under the premise that all docking components are fully connected and kept in an isolated state, the relationship between the connection position and the remote delivery path is gradually adjusted. Through the orderly release of the isolation state inside the docking components, the new path is connected with the existing delivery path. At the same time, relying on the residue-free conditions provided by the clean operating environment, it is ensured that no external interference is introduced during the connection process. In this process, by controlling the connection sequence, the liquid gradually enters the new path, thereby completing the capacity expansion and access process. Throughout the entire operation, the remote delivery state is kept stable, achieving the capacity expansion and access target under online conditions.

[0048] After completing the connection, the opening sequence is restored according to the valve opening and closing correspondence, and the original delivery pressure is used to push the liquid smoothly into the new path. At the same time, the instantaneous impact is reduced by gradually adjusting the flow rate change, thereby completing the entire process of capacity expansion and transformation under the condition of no production interruption. To ensure a smooth recovery and expansion of the existing fluid supply operation after the connection is completed, and to maintain continuous and stable remote delivery throughout the process, the operation recovery phase is implemented in detail as follows, focusing on the valve opening sequence recovery and fluid transition process: Based on the established connection status and the previously established valve opening and closing relationships, orderly opening operations are performed on each relevant location. During the process, priority is given to restoring the valves closer to the supply source, while delaying the opening of valves related to the remote path. Through a step-by-step opening method, the closed section is gradually connected to the existing transport path. In this process, relying on the connection status and isolation relationship established in the previous stage, the liquid gradually expands along the predetermined path when the flow is restored by precisely controlling the opening sequence. This avoids local impacts caused by synchronous opening and maintains the continuous stability of the remote transport status during the opening process, laying a continuous transition condition for the subsequent introduction of new fluid paths.

[0049] After the initial restoration of the valve opening sequence and the establishment of basic connectivity are completed, the existing delivery pressure is used to push the connection area, allowing the liquid to gradually enter the new path along the predetermined path. During the advancement process, in conjunction with the aforementioned valve opening status, the liquid entry rhythm is controlled to ensure that the distribution of the liquid in the new path is in a continuous expansion state, thereby avoiding disturbances caused by local concentrated entry. In this process, relying on the existing delivery pressure as the driving source, the entire advancement process can be completed without the introduction of an additional power source. At the same time, by controlling the direction of entry into the path, the liquid first fills the near-end area of ​​the new path and then gradually expands to the far end, thus forming a gradual filling process from near to far.

[0050] After the liquid has entered the new path and formed a preliminary flow state, the flow rate change is further adjusted in stages. By combining the valve opening status with the existing delivery pressure, the magnitude of the flow rate change is gradually released, so that the flow of the liquid in the new path gradually transitions from a low-speed state to a stable operating state. In this process, by continuously controlling the rhythm of the flow rate change, the flow state is kept to transition smoothly between each stage, thereby reducing the impact of instantaneous changes on the connection position and the remote delivery path. At the same time, relying on the stable foundation formed by the aforementioned step-by-step opening and gradual advancement, the flow rate adjustment process is always kept within a controllable range.

[0051] Under the condition of completing flow regulation and forming a stable flow state, the synergistic effect of maintaining the valve opening state and the existing delivery pressure is maintained, so that the new path and the existing delivery path form a long-term continuous operation relationship. In this process, by continuously maintaining the overall flow state, the liquid is stably distributed among the paths, while keeping the remote delivery state unaffected. Through the above continuous operation, the capacity expansion and access process is completed under the existing liquid supply operation conditions, and no production stoppage is introduced in the entire process, thus realizing the entire capacity expansion and transformation process under the condition of no production stoppage.

[0052] This invention restructures key operations during the expansion and modification of the liquid supply system, transforming the traditional construction process requiring long-term downtime into a continuous operation under online conditions. In practical applications, pump output is only adjusted briefly during valve switching, thus avoiding continuous supply interruptions to downstream production lines and reducing the downtime window, which would normally last for several hours, to a negligible level. Under this operating mode, production equipment can maintain normal operation during the modification period, fundamentally resolving the contradiction between expansion construction and production continuity, and effectively improving the overall operating efficiency of the production line and the utilization level of equipment.

[0053] This invention constructs locally isolated operating sections, treating only a small amount of residual liquid within the enclosed section, thus avoiding the discharge of large amounts of chemicals throughout the entire liquid supply path. Compared to the traditional full-drainage method, this significantly reduces the loss of high-purity chemicals during a single modification process. At the same time, due to the significant reduction in discharge volume, the volume of liquid entering the waste liquid treatment stage is also reduced, thereby reducing the subsequent treatment burden and related expenses. This achieves both material conservation and environmental load control, making the expansion and modification process both economical and environmentally friendly.

[0054] This invention prefabricates the docking components in an external processing area and assembles them in a controlled environment, ensuring that the components involved in the connection are clean before entering the site. This prevents particles generated during on-site cutting from entering the existing liquid supply path. During the subsequent connection process, the operation relies on the established clean working environment, ensuring that the entire expansion and access process operates under low-pollution conditions, effectively controlling the source of particles, and guaranteeing that the liquid supply quality remains stable after the modification, thereby meeting the requirements of production scenarios with strict high cleanliness requirements.

[0055] This invention introduces an orderly opening and gradual flow diversion method during the liquid supply restoration process, allowing the liquid to continuously change state as it enters the new path. Simultaneously, combined with phased control of flow rate changes, the flow state gradually transitions to a stable state, thus avoiding violent impacts during instantaneous opening. During this operation, the liquid's propulsion within the path remains smooth, effectively suppressing pressure fluctuations and the resulting vibrations, reducing the likelihood of abnormal situations at connection points, and making the entire liquid supply restoration process more stable and reliable.

[0056] This invention enables rapid connection using pre-prepared docking components, transforming on-site operations from a traditional, complex construction process into a simple assembly process. In actual implementation, the connection operation can be completed without occupying a large operating space. In confined environments, docking operations can be completed using only conventional tools, avoiding the problems of large equipment being difficult to access or operate. This allows expansion and renovation to still have good adaptability in space-constrained scenarios, improving construction flexibility and reducing on-site operation difficulty.

[0057] A fluid isolation device for online expansion and retrofitting of a chemical supply system includes an operating status determination module, a shutdown module, a flushing and drying module, an access module, and a flow recovery control module. The operation status delineation module obtains the pressure changes, flow distribution, and valve opening and closing correspondence under the existing liquid supply operation status. Based on the collected results, it delineates the location of the work section that can be modified. It also prepares the docking parts that match the work section in advance in the external processing area, thereby providing a clear operating range for subsequent local processing. The shut-off module, around the designated work area, performs orderly shut-off operations based on the obtained valve opening and closing correspondence, forming a closed section limited to the source area, and discharges a small amount of residual liquid within the closed section to create an operable space, while maintaining the continuous and stable remote delivery status by relying on the closed section. The rinsing and drying module introduces pure water for directional rinsing of the enclosed section, followed by the introduction of inert gas for drying, thereby creating a clean working environment within the enclosed section free of residue and active liquid, providing conditions for subsequent connection operations. The access module separates the original connection location based on the clean operation environment and calls the prepared docking parts to complete the rapid connection. At the same time, it uses the isolation function in the docking parts to keep the remote delivery status unaffected, thereby realizing the expansion access in the online state. The flow restoration control module, after completing the connection, restores the opening sequence according to the valve opening and closing correspondence, and uses the original delivery pressure to push the liquid smoothly into the new path. At the same time, it reduces the instantaneous impact by gradually adjusting the flow rate change, thereby completing the entire capacity expansion and transformation process under the condition of no production interruption.

[0058] The present invention provides an online expansion and renovation construction method for a chemical supply system, which is implemented through a fluid isolation device for the online expansion and renovation construction of a chemical supply system. The specific method and process of the fluid isolation device for the online expansion and renovation construction of a chemical supply system are detailed in the embodiments of the above-mentioned online expansion and renovation construction method for a chemical supply system, and will not be repeated here.

[0059] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A method for online expansion and renovation of a chemical supply system, characterized in that, Includes the following steps: By acquiring the pressure changes, flow distribution, and valve opening and closing correspondence under the existing liquid supply operation status, and combining the acquisition results, the location of the work section that can be modified is determined, and the docking parts that match the work section are prepared in advance in the external processing area. Around the designated work area, an orderly shutdown operation is performed based on the obtained valve opening and closing correspondence to form a closed section limited to the source area. A small amount of residual liquid is discharged within the closed section to create an operable space, while the remote transportation status is maintained continuously and stably by relying on the closed section. Pure water is introduced into the enclosed section for directional rinsing, followed by the introduction of inert gas for drying, thereby creating a clean working environment within the enclosed section that is free of residue and active liquids. The original connection points are separated by utilizing the clean operating environment, and the prepared docking components are used to complete the rapid connection. At the same time, the isolation function in the docking components is used to keep the remote delivery status unaffected. After completing the connection, the opening sequence is restored according to the valve opening and closing correspondence, and the original delivery pressure is used to push the liquid smoothly into the new path. At the same time, the instantaneous impact is reduced by gradually adjusting the flow rate change.

2. The online expansion and renovation construction method for a chemical supply system according to claim 1, characterized in that, The following steps are involved in the detailed identification of operational status information and the delineation of work zones: The pressure changes in the existing liquid supply process are continuously collected and recorded in chronological order. The collection locations are also marked to distinguish the states of different sections. The traffic distribution at each location is analyzed point by point, and the traffic changes are correlated with the corresponding time points to form the distribution relationship of traffic changes; The opening and closing status of each valve is recorded one by one, and a corresponding relationship is established by combining pressure changes and flow distribution to describe the relationship between the action and operating status of each valve. By comprehensively comparing pressure changes, flow distribution, and valve opening and closing status, operating sections with independent operating conditions are delineated, and the corresponding relationships of docking components are confirmed.

3. The online expansion and renovation construction method for a chemical supply system according to claim 2, characterized in that, The steps for coordinated control of shutdown sequence and flow continuity during local isolation are as follows: The positions of each valve are sorted one by one according to the direction of liquid supply, and the shut-off path is determined step by step from the supply source to the far end according to the spatial distribution relationship. At the same time, the corresponding position of each valve is numbered and marked. Perform valve closing operations one by one along the shut-off path, set an interval between each closing action, and record the changes in flow state before and after the closing action to adjust the rhythm of subsequent operations; For valves located near the far end of the path, a delayed closing process is implemented, and the closing angle is controlled during the process to gradually reduce the flow to the closed section while avoiding instantaneous cutoff. Once all valves are closed, the boundary of the closed section is confirmed to limit the area of ​​the closed section to the pre-defined location and maintain continuous transport along the remote path.

4. The online expansion and renovation construction method for a chemical supply system according to claim 3, characterized in that, The treatment process, focusing on the removal of residues and the creation of a clean environment within the enclosed area, involves the following steps: Pure water is introduced from one end of the closed section, and the speed of entry is controlled to make the pure water advance in a single direction, while the coverage area of ​​the advancement path is recorded. By adjusting the direction and rhythm of pure water flow, the pure water forms a reciprocating flow path within the closed section, thereby repeatedly flushing different locations. During the continuous flow of pure water, the input rate is gradually reduced, and inert gas is introduced from the other end at the same time, so that the gas enters the closed section along the original flow path. By continuously introducing inert gas and maintaining a consistent flow direction, residual moisture inside the enclosed section is gradually discharged with the gas flow, thus forming a stable and dry state.

5. The online expansion and renovation construction method for a chemical supply system according to claim 4, characterized in that, The pure water entry path and the inert gas entry path are aligned in the same direction. The pure water continues to flow in a unidirectional manner. When the inert gas is introduced, it simultaneously takes over the original flow path of the pure water and maintains a continuous flow relationship. The pure water exit process and the inert gas entry process form a seamless transition, thereby ensuring that the flow state inside the closed section remains consistent and that residual moisture is continuously removed.

6. The online expansion and renovation construction method for a chemical supply system according to claim 4, characterized in that, The following steps are taken to optimize the coordination and connection between connection location processing and online access: The existing connection locations are marked, and a separation operation is performed along the marked locations to break the original connection relationship and form a clear access interface, while controlling the separation range not to exceed the boundary of the closed section. Move the prepared docking components to the access interface position, and adjust the position, direction and angle to make the docking components correspond to the access interface. Complete the connection operation of each connection point of the docking components one by one according to the preset connection sequence, and keep the connection points advancing synchronously during the connection process to avoid local displacement; After all connections are completed, maintain the internal isolation of the docking components to ensure that the connection location and the remote path maintain an independent operating relationship.

7. The online expansion and renovation construction method for a chemical supply system according to claim 6, characterized in that, The following steps are taken to regulate the flow recovery and surge suppression process after capacity expansion: The valve opening operation is performed step by step in a predetermined sequence, and the opening range is controlled during each opening process to gradually change the flow from a static state to a slow flow state. During the valve's step-by-step opening process, the existing delivery pressure is used to push the liquid into the new path, and the rhythm of the liquid entering is controlled by adjusting the valve opening speed. The flow process of liquid entering the new path is adjusted in stages. By gradually increasing the opening amplitude, the liquid flow in the new path is expanded from local flow to overall flow. After a continuous flow state is formed in each path, the current valve opening state is maintained to ensure that the new path and the existing path maintain a synchronous operation relationship.

8. The online expansion and renovation construction method for a chemical supply system according to claim 7, characterized in that, During the step-by-step valve opening operation, the time interval corresponding to the opening sequence is set synchronously, and the opening amplitude is kept consistent with the flow direction as the liquid enters the new path. The opening rhythm and path connectivity are continuously adjusted.

9. The online expansion and renovation construction method for a chemical supply system according to claim 7, characterized in that, The following steps are taken to coordinate the preparation process for docking with the on-site operations: The location of the corresponding work section is confirmed, and its relative relationship with the surrounding environment is recorded; The locations of the docking components are marked according to the connection path, and corresponding connection relationship descriptions are formed; Plan the connection sequence and form a specific operation path based on the operating space conditions; The overall condition of the docking components is checked to ensure they correspond to the location of the work area, and the preparation process is completed.

10. A fluid isolation device for online expansion and retrofit construction of a chemical supply system, used to implement the online expansion and retrofit construction method for a chemical supply system as described in any one of claims 1-9, characterized in that, It includes a running status delineation module, a shutdown module, a rinsing and drying treatment module, an access module, and a flow recovery control module: The operation status delineation module obtains the pressure changes, flow distribution, and valve opening and closing correspondence under the existing liquid supply operation status, and delineates the location of the work section that can be modified based on the collected results, and prepares the docking parts that match the work section in advance in the external processing area. The shut-off module, around the designated work area, performs orderly shut-off operations based on the obtained valve opening and closing correspondence, forming a closed section limited to the source area, and discharges a small amount of residual liquid within the closed section to create an operable space, while maintaining the continuous and stable remote delivery status by relying on the closed section. The rinsing and drying module introduces pure water for directional rinsing of the enclosed section, followed by the introduction of inert gas for drying, thereby creating a clean working environment within the enclosed section free of residue and active liquid. The access module separates the original connection position based on the clean operation environment and calls the prepared docking parts to complete the quick connection. At the same time, it uses the isolation function in the docking parts to keep the remote delivery status unaffected. The flow restoration control module, after completing the connection, restores the opening sequence according to the valve opening and closing correspondence, and uses the original delivery pressure to push the liquid smoothly into the new path, while reducing instantaneous impact by gradually adjusting the flow rate changes.

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