A double-sided exposure machine

Abstract

The application provides a double-sided exposure machine, and relates to the field of printed circuit board manufacturing. The exposure table top is provided with a sliding support and a containing support. The moving frame is in sliding connection with the sliding support. The moving frame comprises a first mounting portion, a connecting portion and a second mounting portion which are connected in sequence. The first mounting portion and the second mounting portion are respectively located on opposite sides of the substrate to be exposed. The two ends of the connecting portion are fixedly connected with the first mounting portion and the second mounting portion. The upper exposure source is arranged on the first mounting portion and is connected with the first mounting portion. The lower exposure source is arranged on the second mounting portion and is connected with the second mounting portion. The first driving member is in transmission connection with the moving frame and is used for driving the upper exposure source and the lower exposure source to move synchronously along the first direction, so as to realize the exposure of the substrate to be exposed. The double-sided exposure machine provided by the application eliminates the asynchronous error between the upper exposure source and the lower exposure source, guarantees the high consistency of the trajectories of the upper exposure source and the lower exposure source, and the illumination areas of the two sides are always accurately aligned.

Description

Technical Field

[0001] This invention relates to the field of printed circuit board manufacturing, and more specifically, to a double-sided exposure machine. Background Technology

[0002] In the semiconductor and printed circuit board manufacturing industries, exposure machines are one of the core pieces of equipment, and their performance directly affects product quality and production efficiency. As integrated circuits and electronic devices move towards higher density and miniaturization, the industry's requirements for the precision, efficiency, and capacity of exposure machines are becoming increasingly stringent.

[0003] Traditional exposure technologies mainly include single-sided exposure and double-sided exposure. Double-sided exposure machines improve production efficiency by simultaneously exposing both sides of the substrate. During high-precision alignment, the flexible printed circuit board (FPC) must remain absolutely stationary during the exposure process, without any movement. This is because FPCs typically use polyimide (PI) or polyester (PET) as the substrate, with a thickness of only 0.05~0.2 mm. The material is soft and has a low modulus of elasticity, making it extremely susceptible to bending, wrinkling, or drifting under external forces such as airflow, mechanical vibration, or gravity. High-precision double-sided alignment requires micron-level positional stability; therefore, any minute movement can lead to alignment failure.

[0004] In view of this, designing and manufacturing a double-sided exposure machine with high-precision alignment and high-efficiency mass production capabilities is particularly important in the field of printed circuit board manufacturing. Summary of the Invention

[0005] This invention provides a double-sided exposure machine that can significantly reduce the offset and misalignment of the upper and lower circuit patterns, and achieve high-precision double-sided exposure of the substrate.

[0006] The present invention is achieved by the following technical solution.

[0007] A double-sided exposure machine includes an exposure table, a movable frame, an upper exposure source, a lower exposure source, and a first driving component. The exposure table has a sliding support and a holding support connected to each other, with the substrate to be exposed placed on the holding support. The movable frame is slidably connected to the sliding support and includes a first mounting part, a connecting part, and a second mounting part connected in sequence. The first mounting part and the second mounting part are respectively located on opposite sides of the substrate to be exposed, and both ends of the connecting part are fixedly connected to the first mounting part and the second mounting part, respectively. The upper exposure source is disposed on and connected to the first mounting part; the lower exposure source is disposed on and connected to the second mounting part. The first driving component is drively connected to the movable frame and is used to drive the upper and lower exposure sources to move synchronously along a first direction to achieve exposure of the substrate to be exposed.

[0008] Optionally, the sliding bracket has a first sliding surface, a second sliding surface, and a third sliding surface connected in sequence, wherein the first sliding surface and the third sliding surface are arranged opposite to each other along a third direction, wherein, A first guide rail is fixedly disposed on the first sliding surface, and a third guide rail is fixedly disposed on the third sliding surface. Both the first guide rail and the third guide rail extend along the first direction. The first guide rail is slidably connected to the first mounting part, and the third guide rail is slidably connected to the second mounting part.

[0009] Optionally, a second guide rail is fixedly provided on the second sliding surface. The second guide rail extends along the first direction and is slidably connected to the connecting part.

[0010] Optionally, the double-sided exposure machine also includes a second driving component and a third driving component, with the upper exposure source slidably connected to the first mounting part and the lower exposure source slidably connected to the second mounting part; The second driving component is used to drive the upper exposure source to move along the second direction, and the third driving component is used to drive the lower exposure source to move along the second direction, which is perpendicular to the first direction.

[0011] Optionally, the double-sided exposure machine also includes a vision camera, which is movably connected to a sliding bracket for photographing the substrate to be exposed and obtaining image information of the substrate.

[0012] Optionally, the sliding bracket further has a fourth sliding surface disposed opposite to the second sliding surface. The double-sided exposure machine also includes a fourth driving member and an L-shaped sliding plate. The fourth driving member is used to drive the L-shaped sliding plate to move along the first direction. A vision camera is mounted on the L-shaped sliding plate for capturing image information of the substrate to be exposed. The L-shaped sliding plate includes a sliding part and a fixed part that are fixedly connected. The fixed part extends along a second direction, and the sliding part extends along a third direction and is disposed on a fourth sliding surface. It is slidably connected to the movable frame. The first direction, the second direction, and the third direction are perpendicular to each other.

[0013] Optionally, the double-sided exposure machine also includes a controller, which is electrically connected to a vision camera, a first drive unit, a second drive unit, and a third drive unit. The controller controls the first drive unit, the second drive unit, and the third drive unit to adjust the positions of the moving frame, the upper exposure source, and the lower exposure source, respectively, according to the image information.

[0014] Optionally, the upper exposure source includes a first sliding mounting plate and a first upper exposure engine that are fixedly connected, and the lower exposure source includes a second sliding mounting plate and a second lower exposure engine that are fixedly connected, with the first upper exposure engine slidably connected to the first sliding mounting plate and the second lower exposure engine slidably connected to the second sliding mounting plate; The double-sided exposure machine also includes a fourth drive unit and a fifth drive unit. The fourth drive unit is used to drive the first upper exposure engine to move along a third direction, and the fifth drive unit is used to drive the second lower exposure engine to move along a third direction. The controller is electrically connected to the fourth and fifth driving components. Based on the image information, the controller controls the fourth and fifth driving components to adjust the positions of the first upper exposure engine and the second lower exposure engine, respectively.

[0015] Optionally, there are two moving frames, two upper exposure sources, and two lower exposure sources. The two moving frames are a first moving frame and a second moving frame, respectively located on opposite sides of the exposure table surface and slidably connected to the sliding support. The first driving component includes a left driving component and a right driving component, respectively used to drive the first moving frame and the second moving frame to move along a first direction. The first moving frame and the second moving frame have two working modes: In the first working mode, the first moving frame and the second moving frame are exposed separately under the drive of the left drive and the right drive, respectively; In the second working mode, the first and second moving frames move synchronously under the drive of the left and right driving components, respectively, to perform coordinated exposure.

[0016] Optionally, both the exposure table and the moving stand can be made of marble.

[0017] Optionally, the exposure stage, consisting of the sliding support and the holding support, is an integrated structure.

[0018] The beneficial effects of the double-sided exposure machine according to embodiments of the present invention include: A double-sided exposure machine includes an exposure table with a sliding support and a holding support connected to each other. A movable frame is slidably connected to the sliding support. The movable frame includes a first mounting part, a connecting part, and a second mounting part connected in sequence. The first mounting part and the second mounting part are respectively located on opposite sides of the substrate to be exposed. The two ends of the connecting part are fixedly connected to the first mounting part and the second mounting part, respectively. An upper exposure source is disposed on and connected to the first mounting part; a lower exposure source is disposed on and connected to the second mounting part. A first driving member is drivenly connected to the movable frame to drive the upper and lower exposure sources to move synchronously along a first direction to expose the substrate to be exposed. Compared with the prior art, the double-sided exposure machine provided by the present invention, by disposing of the upper and lower exposure sources on the first and second mounting parts of the movable frame respectively, and by fixing the two ends of the connecting part to the first and second mounting parts, can eliminate the asynchronous error between the upper and lower exposure sources, ensuring a high degree of consistency in the trajectories of the upper and lower exposure sources, and ensuring that the two illumination areas are always precisely aligned. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 A schematic diagram of the double-sided exposure machine provided in the first embodiment from a first viewing angle; Figure 2 A schematic diagram of the double-sided exposure machine provided in the first embodiment from a second perspective; Figure 3 A schematic diagram of the double-sided exposure machine provided in the first embodiment from a third-view perspective; Figure 4 A schematic diagram of the double-sided exposure machine provided in the second embodiment; Figure 5 for Figure 4 A magnified view of a portion of region A in the middle; Figure 6 A schematic diagram of the structure of the double-sided exposure machine provided in the third embodiment.

[0021] Icons: 1-Double-sided exposure machine; 2-Substrate to be exposed; 10-Exposure stage; 11-Sliding bracket; 111-First sliding surface; 112-Second sliding surface; 113-Third sliding surface; 114-Fourth sliding surface; 13-First guide rail; 15-Third guide rail; 16-Fourth guide rail; 17-Fifth guide rail; 18-Sixth guide rail; 12-Storage stand; 14-Foot; 30-Moving frame; 31-First mounting part; 32-Connecting part; 33-Second mounting part; 301-First moving frame; 302-Second moving frame; 41-Upper exposure source; 411-First sliding mounting plate; 412-First upper exposure engine; 42 - Lower exposure source; 43 - Mounting bracket; 44 - L-shaped sliding plate; 441 - Sliding part; 442 - Fixing part; 45 - Visual camera. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0024] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0025] In the description of this invention, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0026] Furthermore, the terms "first," "second," etc., are used only for distinguishing descriptions and should not be construed as indicating or implying relative importance. Also, in the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0027] It should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections, electrical connections, or connections that allow for communication; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0028] It should also be noted that, where there is no conflict, the features in the embodiments of the present invention can be combined with each other.

[0029] First Embodiment Please refer to Figures 1 to 3 This invention provides a double-sided exposure machine 1, which can achieve high-precision alignment.

[0030] It should be noted that the substrate 2 to be exposed is placed on the holding bracket 12, and the upper mask and the lower mask are respectively disposed on the upper and lower sides of the substrate 2 to be exposed along the third direction. During the same exposure cycle, the upper exposure source 41 and the lower exposure source 42 simultaneously and precisely transfer the circuit patterns on the upper and lower masks to both sides of the substrate (usually the photoresist layer on the copper foil), and the patterns on both sides of the substrate 2 to be exposed remain aligned.

[0031] The double-sided exposure machine 1 includes an exposure table 10, a movable frame 30, an upper exposure source 41, a lower exposure source 42, and a first driving component. The exposure table 10 has a sliding support 11 and a holding support 12 connected to each other. The movable frame 30 is slidably connected to the sliding support 11. The movable frame 30 includes a first mounting part 31, a connecting part 32, and a second mounting part 33 connected in sequence. The first mounting part 31 and the second mounting part 33 are located on opposite sides of the substrate 2 to be exposed. The two ends of the connecting part 32 are fixedly connected to the first mounting part 31 and the second mounting part 33, respectively. The upper exposure source 41 is disposed on and connected to the first mounting part 31; the lower exposure source 42 is disposed on and connected to the second mounting part 33. The first driving component is drively connected to the movable frame 30 and is used to drive the upper exposure source 41 and the lower exposure source 42 to move synchronously along a first direction to expose the substrate 2 to be exposed. The first direction is the Y direction, which is also the length direction of the substrate 2 to be exposed.

[0032] The movable frame 30 structure adopts an exposure mode of "light source moves, substrate remains stationary." The substrate is fixed on the exposure stage 10, and the movable frame 30 carries the upper and lower light sources to slide and scan along the length of the substrate, avoiding the deformation or vibration risks caused by moving the substrate in traditional methods. Crucially, traditional double-sided exposure machines 1 typically use independent driving of the lower exposure source 42, which is prone to asynchronous movement of the upper and lower light sources due to mechanical tolerances or control delays, thus affecting alignment accuracy. This solution, however, fixes the upper exposure source 41 and lower exposure source 42 on the same movable frame 30, forcing synchronous movement through a mechanical structure, completely eliminating asynchronous errors between the upper and lower exposure sources 41 and 42, ensuring precise alignment of the two illuminated areas at all times.

[0033] In this embodiment, the movable frame 30 is C-shaped, and the projections of the first mounting part 31 and the second mounting part 33 in a third direction coincide. This third direction is the Z-direction, i.e., the vertical direction.

[0034] Specifically, multiple columns and a bottom frame are provided below the exposure platform 10, and the exposure platform 10 and the bottom frame are fixedly connected by the multiple columns. Multiple feet 14 are also provided on the side of the bottom frame away from the exposure platform 10, and the water level of the exposure platform 10 can be calibrated by adjusting the height of the feet 14.

[0035] In this embodiment, the sliding bracket 11 has a first sliding surface 111, a second sliding surface 112, and a third sliding surface 113 connected in sequence. The first sliding surface 111 and the third sliding surface 113 are arranged opposite each other along a third direction. A first guide rail 13 is fixedly mounted on the first sliding surface 111, and a third guide rail 15 is fixedly mounted on the third sliding surface 113. Both the first guide rail 13 and the third guide rail 15 extend along a first direction. The first guide rail 13 is slidably connected to the first mounting portion 31, and the third guide rail 15 is slidably connected to the second mounting portion 33. Specifically, a first sliding block is fixedly mounted on the side of the first mounting portion 31 facing the first sliding surface 111, and the first sliding block is slidably engaged with the first guide rail 13. A third sliding block is fixedly mounted on the side of the second mounting portion 33 facing the third sliding surface 113, and the third sliding block is slidably engaged with the third guide rail 15. Both the first guide rail 13 and the third guide rail 15 extend parallel to the first direction and are located on both sides of the sliding bracket 11 (first sliding surface 111 and third sliding surface 113), forming a double-sided support and guide structure. This ensures that the moving bracket 30 is subjected to uniform force during sliding, making it less prone to swaying or twisting, thereby guaranteeing a high degree of consistency between the trajectories of the upper exposure source 41 and the lower exposure source 42.

[0036] During the exposure process, the movable frame 30 moves smoothly relative to the sliding bracket 11 along a first direction under the drive of the first driving member. Specifically, the first sliding block and the third sliding block engage with the guide rails on the first sliding surface 111 and the third sliding surface 113 of the sliding bracket 11, respectively. By engaging the sliding blocks on the two inner walls of the C-shaped movable frame 30 with the guide rails on the corresponding sliding surfaces of the sliding bracket 11, the consistency and operational stability of the movement trajectories of the upper exposure source 41 and the lower exposure source 42 are significantly improved, thereby ensuring that the illumination areas on the upper and lower sides of the substrate are always precisely aligned, effectively avoiding exposure errors caused by positional offset.

[0037] In another embodiment, a second guide rail is fixedly disposed on the second sliding surface 112, the second guide rail extends along the first direction and is slidably connected to the connecting part 32. Specifically, a second sliding block is fixedly disposed on the side of the connecting part 32 facing the second sliding surface 112, and a second guide rail extending along the first direction is fixedly disposed on the second sliding surface 112, the second guide rail being slidably connected to the second slider.

[0038] In this embodiment, the double-sided exposure machine 1 further includes a second driving member and a third driving member. The upper exposure source 41 is slidably connected to the first mounting portion 31, and the lower exposure source 42 is slidably connected to the second mounting portion 33. The second driving member is used to drive the upper exposure source 41 to move along a second direction, and the third driving member is used to drive the lower exposure source 42 to move along the second direction, which is perpendicular to the first direction. The second direction is the X-direction, corresponding to the length direction of the first mounting portion 31. The upper exposure source 41 and the lower exposure source 42 can be precisely aligned in the second direction (corresponding to the width direction of the substrate), and in conjunction with the movement in the first direction (corresponding to the length direction of the substrate), positional correction in two dimensions is achieved. This ensures that the upper and lower illumination areas are always precisely aligned on both sides of the substrate, effectively avoiding exposure misalignment caused by width direction offset.

[0039] In this embodiment, the double-sided exposure machine 1 further includes a vision camera 45, which is movably connected to the sliding bracket 11 and used to photograph the substrate 2 to be exposed and obtain image information of the substrate 2. Specifically, the vision camera 45 is fixedly connected to the mounting bracket 43, and the mounting bracket 43 is slidably connected to the sliding bracket 11. Multiple vision cameras 45 are mirror-arranged on both sides of the substrate 2 to be exposed, and are used to acquire image information of the upper and lower surfaces of the substrate 2.

[0040] During operation, the vision camera 45 first aligns a specific area of ​​the substrate, capturing the target points within that area to determine the initial exposure position. Subsequently, the upper exposure source 41 and lower exposure source 42 move to that exposure area to perform the exposure operation. Simultaneously, the vision camera 45 begins aligning the remaining areas of the substrate, pre-capturing the target points required for subsequent exposures, preparing for the next step. Once the upper and lower exposure sources 41 and 42 have completed the exposure of the first area, the system can immediately drive them to sequentially perform the exposure actions for the remaining areas, as the vision camera 45 has already pre-positioned the remaining target points. This achieves a "simultaneous alignment and exposure" workflow. This parallel processing mechanism significantly shortens the overall exposure cycle, effectively improving the production efficiency and equipment utilization of the double-sided exposure machine 1.

[0041] In this embodiment, the double-sided exposure machine 1 also includes a controller, which is electrically connected to the vision camera 45, the first drive unit, the second drive unit, and the third drive unit. The controller controls the first drive unit, the second drive unit, and the third drive unit to adjust the positions of the moving frame 30, the upper exposure source 41, and the lower exposure source 42 respectively based on image information. The controller integrates the image information acquired by the vision camera 45, analyzes the substrate position and target offset in real time, and synchronously drives the first drive unit, the second drive unit, and the third drive unit to perform position compensation for the moving frame 30, the upper exposure source 41, and the lower exposure source 42 respectively. This achieves closed-loop control from "image acquisition—deviation calculation—motion adjustment," eliminating the need for manual intervention and significantly improving alignment accuracy and automation. Faced with substrate placement deviations or slight dimensional changes, the controller can dynamically and promptly correct the motion parameters of each drive unit based on image information, ensuring that the exposure source always follows the actual position of the substrate. This adaptive adjustment capability effectively avoids misalignment defects caused by accumulated mechanical errors or substrate offset, significantly improving the uniformity of double-sided exposure and product yield.

[0042] In this embodiment, there are two moving frames 30, two upper exposure sources 41, and two lower exposure sources 42. The two moving frames 30 are a first moving frame 301 and a second moving frame 302, which are respectively arranged on opposite sides of the exposure table 10 and are slidably connected to the sliding bracket 11. The first driving member includes a left driving member and a right driving member, which are used to drive the first moving frame 301 and the second moving frame 302 to move along a first direction, respectively. The first moving frame 301 and the second moving frame 302 have two working modes: in the first working mode, the first moving frame 301 and the second moving frame 302 are exposed individually under the drive of the left driving member and the right driving member, respectively; in the second working mode, the first moving frame 301 and the second moving frame 302 move synchronously under the drive of the left driving member and the right driving member, respectively, to perform cooperative exposure.

[0043] Specifically, in the first working mode, the first moving frame 301 and the second moving frame 302 can be driven independently, with their respective upper exposure source 41 and lower exposure source 42 exposing different areas or different sizes of the substrate, suitable for partitioning small or irregularly shaped substrates. In the second working mode, the two moving frames 30 move synchronously, working together to complete double-sided exposure of large-area substrates, ensuring continuous and aligned illumination areas to meet the production needs of large-format products. The flexible switching between the two modes allows the equipment to be compatible with substrates of various specifications, significantly improving its versatility.

[0044] In this embodiment, both the exposure table 10 and the moving frame 30 are made of marble. Marble has extremely high rigidity and density. The exposure table 10 and the moving frame 30 made of marble can effectively resist the deformation and vibration caused by mechanical movement, ensuring structural stability under high-speed or high-load conditions, thereby providing a solid mechanical foundation for surface exposure.

[0045] Furthermore, the exposure stage 10, composed of the sliding bracket 11 and the holding bracket 12, is an integral structure. The integral exposure stage 10, composed of the sliding bracket 11 and the holding bracket 12, eliminates the assembly gaps and connection errors that may exist in traditional split structures, resulting in higher flatness and mutual positional accuracy of the guide rail mounting surface and the substrate bearing surface, thereby improving the repeatability of the linear motion of the moving frame 30 and the alignment with the light source.

[0046] The double-sided exposure machine 1 provided in this embodiment of the invention has an exposure table 10 with a sliding support 11 and a holding support 12 connected to each other. A movable frame 30 is slidably connected to the sliding support 11. The movable frame 30 includes a first mounting part 31, a connecting part 32 and a second mounting part 33 connected in sequence. The first mounting part 31 and the second mounting part 33 are respectively located on opposite sides of the substrate 2 to be exposed. The two ends of the connecting part 32 are fixedly connected to the first mounting part 31 and the second mounting part 33 respectively. An upper exposure source 41 is disposed on the first mounting part 31 and connected to the first mounting part 31. A lower exposure source 42 is disposed on the second mounting part 33 and connected to the second mounting part 33. A first driving member is drivenly connected to the movable frame 30 to drive the upper exposure source 41 and the lower exposure source 42 to move synchronously along a first direction to achieve exposure of the substrate 2 to be exposed. Compared with the prior art, the double-sided exposure machine 1 provided by the present invention, by setting the upper exposure source 41 and the lower exposure source 42 on the first mounting part 31 and the second mounting part 33 of the moving frame 30 respectively, and fixing both ends of the connecting part 32 to the first mounting part 31 and the second mounting part 33 respectively, can eliminate the asynchronous error between the upper exposure source 41 and the lower exposure source 42, ensuring a high degree of consistency in the trajectory of the upper exposure source 41 and the lower exposure source 42, and ensuring that the two illumination areas are always precisely aligned. In addition, the double-sided exposure machine 1 in this embodiment also has a wide range of applicability and significant efficiency advantages: it can flexibly adapt to diverse combinations of substrate materials of different specifications, and the production capacity is increased to more than twice that of conventional exposure machines.

[0047] Second Embodiment Please refer to Figure 4 and Figure 5 This invention provides a double-sided exposure machine 1. Compared with the first embodiment, the difference in this embodiment is that the upper exposure source 41 and the lower exposure source 42 have added a third-dimensional motion degree of freedom.

[0048] In this embodiment, the upper exposure source 41 includes a first sliding mounting plate 411 and a first upper exposure engine 412 fixedly connected, and the lower exposure source 42 includes a second sliding mounting plate and a second lower exposure engine fixedly connected. The first upper exposure engine 412 is connected to the first sliding mounting plate 411, and the second lower exposure engine is connected to the second sliding mounting plate. The double-sided exposure machine 1 also includes a fourth driving member and a fifth driving member. The fourth driving member is used to drive the first upper exposure engine 412 to move in a third direction, and the fifth driving member is used to drive the second lower exposure engine to move in a third direction. The controller is electrically connected to the fourth and fifth driving members, and the controller controls the fourth and fifth driving members to adjust the positions of the first upper exposure engine 412 and the second lower exposure engine respectively according to the image information.

[0049] Please refer to Figure 5 The first mounting portion 31 is fixedly provided with a fifth guide rail 17 along its length. The side of the first sliding mounting plate 411 facing the first mounting portion 31 has a slider that is slidably connected to the fifth guide rail 17. The side of the first sliding mounting plate 411 facing away from the first mounting portion 31 has a sixth guide rail 18 that is slidably connected to the first upper exposure engine 412. The second sliding mounting plate is installed in a similar manner to the first sliding mounting plate 411. The second lower exposure engine is movably connected to the second mounting portion 33 through the second sliding mounting plate, thus enabling movement in the second and third directions.

[0050] During operation, the vision camera 45 acquires surface images of the substrate 2 to be exposed, and the controller extracts topographic information (such as height variations or tilt) from the images. Subsequently, the controller calculates the required vertical offset for each of the upper and lower exposure sources 41 and 42 according to a preset algorithm, and sends commands to the fourth and fifth driving components respectively. The fourth driving component moves the first upper exposure engine 412 along a third direction to the target height, and the fifth driving component simultaneously adjusts the second lower exposure engine to the corresponding height, ensuring the optimal working distance between the light source and the substrate surface. During exposure, if there are height variations in different areas of the substrate, the controller can correct the driving component parameters in real time to achieve dynamic tracking and focusing, thereby ensuring the uniformity of illumination and alignment accuracy of each exposure area.

[0051] Third Embodiment Please refer to Figure 6 This invention provides a double-sided exposure machine 1. Compared with the first embodiment, the difference in this embodiment is that the installation position of the visual camera 45 is different.

[0052] In this embodiment, the mounting bracket 43 that is slidably connected to the sliding bracket 11 is no longer provided. Instead, the vision camera 45 is fixedly mounted on the fixing part 442 of the L-shaped sliding plate 44.

[0053] Specifically, the sliding bracket 11 also has a fourth sliding surface 114 disposed opposite to the second sliding surface 112, and a fourth guide rail 16 extending along the first direction is disposed on the fourth sliding surface 114. The double-sided exposure machine 1 also includes a fourth driving member. The fourth driving member is used to drive the L-shaped sliding plate 44 to move along the first direction, and the vision camera 45 is mounted on the fixing part 442 of the L-shaped sliding plate 44 to capture image information of the substrate 2 to be exposed. The L-shaped sliding plate 44 includes a sliding part 441 and a fixing part 442 fixedly connected. The fixing part 442 extends along the second direction, and the sliding part 441 extends along the third direction and is slidably connected to the fourth guide rail 16 and slidably connected to the sliding bracket 11. The first direction, the second direction and the third direction are perpendicular to each other.

[0054] Other beneficial effects of the double-sided exposure machine 1 provided in this embodiment of the invention are the same as those of the first embodiment, and will not be repeated here.

[0055] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A double-sided exposure machine (1), having a first direction, characterized in that, include: Exposure table (10) has a sliding bracket (11) and a holding bracket (12) connected to each other, and the substrate (2) to be exposed is placed on the holding bracket (12); The movable frame (30) is slidably connected to the sliding bracket (11), and includes a first mounting part (31), a connecting part (32) and a second mounting part (33) connected in sequence. The first mounting part (31) and the second mounting part (33) are respectively located on opposite sides of the substrate to be exposed (2), and the two ends of the connecting part (32) are respectively fixedly connected to the first mounting part (31) and the second mounting part (33). Upper exposure source (41) is disposed on the first mounting part (31) and connected to the first mounting part (31); The lower exposure source (42) is disposed on the second mounting part (33) and connected to the second mounting part (33); The first driving member is connected to the moving frame (30) for driving the upper exposure source (41) and the lower exposure source (42) to move synchronously along the first direction to expose the substrate (2) to be exposed.

2. The double-sided exposure machine (1) according to claim 1, characterized in that, The sliding bracket (11) has a first sliding surface (111), a second sliding surface (112), and a third sliding surface (113) connected in sequence. The first sliding surface (111) and the third sliding surface (113) are arranged opposite to each other along a third direction. A first guide rail (13) is fixedly provided on the first sliding surface (111), and a third guide rail (15) is fixedly provided on the third sliding surface (113). Both the first guide rail (13) and the third guide rail (15) extend along the first direction. The first guide rail (13) is slidably connected to the first mounting part (31), and the third guide rail (15) is slidably connected to the second mounting part (33).

3. The double-sided exposure machine (1) according to claim 2, characterized in that, A second guide rail is fixedly provided on the second sliding surface (112), the second guide rail extends along the first direction and is slidably connected to the connecting part (32).

4. The double-sided exposure machine (1) according to claim 1, characterized in that, The mobile frame (30) is C-shaped.

5. The double-sided exposure machine (1) according to claim 2, characterized in that, The double-sided exposure machine (1) further includes a second driving component and a third driving component. The upper exposure source (41) is slidably connected to the first mounting part (31), and the lower exposure source (42) is slidably connected to the second mounting part (33). The second driving member is used to drive the upper exposure source (41) to move along the second direction, and the third driving member is used to drive the lower exposure source (42) to move along the second direction, the second direction being perpendicular to the first direction.

6. The double-sided exposure machine (1) according to claim 5, characterized in that, The double-sided exposure machine (1) also includes a vision camera (45), which is movably connected to the sliding bracket (11) for taking pictures of the substrate to be exposed (2) and obtaining image information of the substrate to be exposed (2).

7. The double-sided exposure machine (1) according to claim 6, characterized in that, The double-sided exposure machine (1) also includes a controller, which is electrically connected to the vision camera (45), the first drive unit, the second drive unit, and the third drive unit. The controller controls the first drive unit, the second drive unit, and the third drive unit to adjust the positions of the moving frame (30), the upper exposure source (41), and the lower exposure source (42) respectively according to the image information.

8. The double-sided exposure machine (1) according to claim 6, characterized in that, The sliding bracket (11) also has a fourth sliding surface (114) opposite to the second sliding surface (112). The double-sided exposure machine (1) further includes a fourth driving member and an L-shaped sliding plate (44). The fourth driving member is used to drive the L-shaped sliding plate (44) to move along a first direction. The visual camera (45) is mounted on the L-shaped sliding plate (44). The L-shaped sliding plate (44) includes a sliding part (441) and a fixed part (442) that are fixedly connected. The fixed part (442) extends along a second direction, and the sliding part (441) extends along a third direction and is disposed on the fourth sliding surface (114) and is slidably connected to the moving frame (30). The first direction, the second direction and the third direction are perpendicular to each other.

9. The double-sided exposure machine (1) according to claim 7, characterized in that, The upper exposure source (41) includes a first sliding mounting plate (411) and a first upper exposure engine (412) fixedly connected, and the lower exposure source (42) includes a second sliding mounting plate and a second lower exposure engine fixedly connected. The first upper exposure engine (412) is connected to the first sliding mounting plate (411), and the second lower exposure engine is connected to the second sliding mounting plate. The double-sided exposure machine (1) further includes a fourth driving member and a fifth driving member. The fourth driving member is used to drive the first upper exposure engine (412) to move along a third direction, and the fifth driving member is used to drive the second lower exposure engine to move along a third direction. The controller is electrically connected to the fourth and fifth driving components. The controller controls the fourth and fifth driving components to adjust the positions of the first upper exposure engine (412) and the second lower exposure engine respectively according to the image information.

10. The double-sided exposure machine (1) according to any one of claims 1 to 9, characterized in that, The number of the movable frame (30), the upper exposure source (41), and the lower exposure source (42) are all two. The two movable frames (30) are a first movable frame (301) and a second movable frame (302), and are respectively arranged on opposite sides of the exposure table surface (10), and are slidably connected to the sliding bracket (11). The first driving member includes a left driving member and a right driving member, which are respectively used to drive the first movable frame (301) and the second movable frame (302) to move along a first direction. The first movable frame (301) and the second movable frame (302) have two working modes: In the first working mode, the first moving frame (301) and the second moving frame (302) are exposed separately under the drive of the left driving member and the right driving member, respectively; In the second working mode, the first moving frame (301) and the second moving frame (302) move synchronously under the drive of the left driving member and the right driving member, respectively, to perform coordinated exposure.

11. The double-sided exposure machine (1) according to claim 1, characterized in that, Both the exposure table (10) and the movable frame (30) are made of marble.

12. The double-sided exposure machine (1) according to claim 1, characterized in that, The exposure table (10), which is composed of the sliding support (11) and the holding support (12), is an integral structure.

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