Electrostatic chuck power calibration method, device and storage medium

Abstract

Embodiments of the present application relate to the field of semiconductors, and provide an electrostatic chuck power supply calibration method, device and storage medium, comprising: switching to a corresponding to-be-tested calibration working condition according to the type of a target bias power supply; performing a calibration adjustment step in the to-be-tested calibration working condition; in the calibration adjustment process, obtaining a monitor reading to be reported and an actual value, and adjusting a corresponding potentiometer based on the difference between the monitor reading and the actual value until the difference falls within an allowed error range; after the calibration adjustment step is completed, calling corresponding test point sequences and segmented determination parameters according to the type of the target bias power supply, and performing multi-point linearity verification and current monitor precision verification; if the verification fails, locating a fault and reviewing the corresponding calibration adjustment step until the calibration passes or the number of retests reaches a preset upper limit. The calibration efficiency and result consistency can be improved, and the traceability of the calibration verification process can be enhanced.

Description

Technical Field

[0001] This application relates to the semiconductor field, and more specifically to an electrostatic chuck power calibration method, apparatus, and storage medium. Background Technology

[0002] An electrostatic chuck power supply typically includes a main high-voltage output and a bias voltage output that works in conjunction with it. The bias voltage output includes, but is not limited to, a center-tap bias power supply and a substrate bias power supply.

[0003] During maintenance testing, remanufacturing testing, or factory verification, the bias voltage output typically requires zero bias calibration, zero current calibration, gain adjustment, linearity verification, and current monitor accuracy verification to ensure the setting accuracy, feedback accuracy, and operational stability of the bias voltage output.

[0004] In existing technologies, the aforementioned calibration and verification processes typically rely heavily on manual experience. Specifically, before reporting the equipment measurement results, operators often need to manually switch ranges, observe instrument readings, and manually calibrate errors, making the testing process cumbersome and resulting in low calibration efficiency for the electrostatic chuck power supply. Summary of the Invention

[0005] This application provides an electrostatic chuck power supply calibration method, apparatus, and storage medium, which can improve calibration efficiency and result consistency, and enhance the traceability of the calibration verification process.

[0006] In a first aspect, embodiments of this application provide an electrostatic chuck power supply calibration method, the method comprising: Switch to the corresponding calibration condition under test according to the type of the target bias power supply; Under the test calibration condition, calibration adjustment steps are executed in a predetermined order; during the calibration adjustment process, the monitor reading to be reported and the actual value are obtained, and the corresponding potentiometer is adjusted based on the difference between the monitor reading and the actual value until the difference falls within the allowable error range; After the calibration and adjustment steps are completed, the corresponding test point sequence and segmentation judgment parameters are called according to the type of the target bias power supply to perform multi-point linearity verification and current monitor accuracy verification, and the verification results are obtained. The test point sequence for multi-point linearity verification is obtained based on the range segmentation configuration of the target bias power supply, and the verification results are obtained based on the segmentation judgment parameters corresponding to different range segments. Based on the verification results, determine whether the preset accuracy conditions are met; if the preset accuracy conditions are met, the calibration is deemed to have passed; if the preset accuracy conditions are not met, locate and review the corresponding calibration adjustment steps according to the failed verification items, until the calibration is passed or the number of retests reaches the preset upper limit.

[0007] Secondly, embodiments of this application provide an electrostatic chuck power supply calibration device, which has the function of implementing the electrostatic chuck power supply calibration method corresponding to the first aspect described above. The function can be implemented by hardware or by hardware executing corresponding software. The hardware or software includes one or more modules corresponding to the above function, and the modules can be software and / or hardware. In one embodiment, the electrostatic chuck power supply calibration device is used to calibrate a target bias power supply, and the device includes the following modules: The switching module is configured to switch to the corresponding calibration condition under test based on the type of the target bias power supply. The adjustment module is configured to perform calibration adjustment steps in a predetermined sequence under the calibration condition to be tested; during the calibration adjustment process, it acquires the monitor reading to be reported and the actual value, and adjusts the corresponding potentiometer based on the difference between the monitor reading and the actual value until the difference falls within the allowable error range; The verification module is configured to, after the calibration and adjustment steps are completed, call the corresponding test point sequence and segmentation judgment parameters according to the type of the target bias power supply, perform multi-point linearity verification and current monitor accuracy verification, and obtain the verification results; wherein, the test point sequence for multi-point linearity verification is obtained based on the range segmentation configuration of the target bias power supply, and the verification results are obtained based on the segmentation judgment parameters corresponding to different range segments. The judgment module is configured to determine whether the preset accuracy conditions are met based on the verification results; if the preset accuracy conditions are met, the calibration is deemed to have passed; if the preset accuracy conditions are not met, the corresponding calibration adjustment steps are located and reviewed according to the failed verification items until the calibration is passed or the number of retests reaches the preset limit.

[0008] Thirdly, embodiments of this application provide a computer-readable storage medium including instructions that, when executed on a computer, cause the computer to perform the electrostatic chuck power calibration method as described in the first aspect.

[0009] In some embodiments, the electrostatic chuck power calibration method of the first aspect described above can be executed by an electrostatic chuck power calibration device, the electrostatic chuck power calibration device including a processor and a memory, the memory storing a computer program, and the processor implementing the electrostatic chuck power calibration method of the first aspect when executing the computer program.

[0010] Compared to existing technologies, this embodiment reduces human error and improves the standardization and efficiency of the calibration process by switching the corresponding calibration conditions for different types of target bias power supplies and performing calibration adjustment steps in a predetermined order under those conditions. Since this embodiment acquires monitor readings and actual values ​​during calibration and adjusts the corresponding potentiometer based on the difference between the monitor readings and actual values ​​until the difference falls within the allowable error range, instead of relying primarily on human experience for judgment and adjustment as in existing technologies, it reduces the risk of human error, avoids issues such as missed judgments, misjudgments, or inconsistent retest paths, and improves the consistency of calibration results. After calibration adjustment, this embodiment further calls the corresponding test point sequence and segmented judgment parameters to perform multi-point linearity verification and current monitor accuracy verification, enabling the verification process to be automatically judged according to different ranges. If verification fails, the corresponding calibration adjustment steps are located and reviewed based on the failed verification items until calibration passes or the retest limit is reached, thereby improving the reliability, accuracy, and traceability of the calibration process and verification results. In summary, the embodiments of this application, through overall improvements in switching the calibration conditions under test, guiding calibration adjustment, multi-point verification, and failure-based rollback verification, can improve the calibration efficiency of electrostatic chuck power supplies, ensure the consistency of calibration results and the traceability of the verification process, and adapt to various automated calibration scenarios for electrostatic chuck power supplies. Attached Figure Description

[0011] The objectives, features, and advantages of the embodiments of this application will become readily understood by referring to the accompanying drawings and reading the detailed description of the embodiments.

[0012] Figure 1 This is a flowchart illustrating the electrostatic chuck power supply calibration method in an embodiment of this application. Figure 2 This is a schematic diagram of the preheating jump interface in an embodiment of this application; Figure 3 This is a schematic diagram of the electrostatic chuck power supply calibration device according to an embodiment of this application; Figure 4 This is a schematic diagram of the electrostatic chuck power calibration device according to an embodiment of this application. Detailed Implementation

[0013] The solutions provided in this application involve technologies such as automated test control, industrial control, human-computer interaction, and data acquisition and processing, which are specifically illustrated through the following embodiments.

[0014] In existing technologies, the calibration and verification of the bias voltage output of electrostatic chuck power supplies typically relies heavily on manual experience. Specifically, operators often need to manually switch ranges, adjust and observe instrument readings, and finally manually calibrate the error, making the testing process cumbersome and the calibration efficiency of the electrostatic chuck power supply low. Furthermore, the aforementioned testing processes are fragmented, and records cannot be standardized, resulting in poor consistency of calibration results and poor process traceability.

[0015] Compared to existing technologies, this application provides an electrostatic chuck power supply calibration method, apparatus, and storage medium. By switching the corresponding calibration conditions for different types of target bias power supplies and executing calibration adjustment steps in a predetermined sequence under these conditions, it can reduce the differences in manual operation and improve the standardization and efficiency of the calibration process. Because this application obtains the monitor reading to be reported and the actual value during the calibration adjustment process, and adjusts the corresponding potentiometer based on the difference between the monitor reading and the actual value until the difference falls within the allowable error range, instead of relying mainly on manual experience for judgment and adjustment as in existing technologies, it can reduce the risk of human error, avoid problems such as missed judgments, misjudgments, or inconsistent retest paths, and improve the consistency of calibration results. After calibration adjustment is completed, this application further calls the corresponding test point sequence and segmented judgment parameters to perform multi-point linearity verification and current monitor accuracy verification, enabling the verification process to be automatically judged according to different range segments. If the verification fails, it further locates and reviews the corresponding calibration adjustment steps based on the failed verification item until the calibration passes or the retest limit is reached, thereby improving the reliability, accuracy, and traceability of the calibration process and verification results. In summary, the embodiments of this application, through overall improvements in switching the calibration conditions under test, guiding calibration adjustment, multi-point verification, and failure-based rollback verification, can improve the calibration efficiency of electrostatic chuck power supplies, ensure the consistency of calibration results and the traceability of the verification process, and adapt to various automated calibration scenarios for electrostatic chuck power supplies.

[0016] The embodiments of this application can be applied to electrostatic chuck power supply calibration devices in manufacturing testing, repair testing, or factory verification scenarios. It should be noted that the electrostatic chuck power supply calibration device involved in the embodiments of this application can be a programmable logic controller, industrial computer, server, and / or terminal equipment, or it can be a dedicated test platform integrating control programs, data acquisition programs, and human-machine interaction programs.

[0017] In practical applications, the implementation of an electrostatic chuck power supply calibration device includes, but is not limited to, programmable logic controllers, industrial computers, control servers, dedicated test hosts, or other computing devices capable of executing automated calibration control programs. Furthermore, the electrostatic chuck power supply calibration device can also be equipped with touch display terminals, host computer interfaces, maintenance operation terminals, or other devices capable of outputting prompts and receiving manual operation commands, as well as analog signal acquisition modules, digital signal acquisition modules, multimeters, high-voltage probes, or other test equipment capable of acquiring target bias power supply output parameters and monitor parameters.

[0018] In some embodiments, the aforementioned electrostatic chuck power supply calibration device can be integrated into the same test platform, with the same control system performing operations such as switching the calibration conditions under test, guiding calibration adjustments, verifying and judging, and recording the process. Alternatively, the electrostatic chuck power supply calibration device can be deployed separately. For example, the data processing part can be deployed in the control host or programmable logic controller, the interaction part in the host computer terminal or maintenance operation terminal, and the data acquisition part in the test platform side, which includes a structure capable of accommodating the electrostatic chuck power supply under test. These three separately deployed parts can communicate and interact via wireless or wired connections.

[0019] It should be noted that the storage medium involved in the embodiments of this application may store a computer program, which, when executed by a processor, is used to implement the various steps of the above-described electrostatic chuck power calibration method.

[0020] Figure 1 This is a schematic flowchart illustrating an electrostatic chuck power supply calibration method provided in an embodiment of this application. This method can be executed by an electrostatic chuck power supply calibration device and is used to calibrate a target bias power supply. (Refer to...) Figure 1 The electrostatic chuck power supply calibration method includes steps 101-107: Step 101: Switch to the corresponding calibration condition under test according to the type of the target bias power supply.

[0021] In the embodiments of this application, the target bias power supply refers to the bias voltage output section of the electrostatic chuck power supply that needs to be calibrated and verified, and may include a center-tap bias power supply and / or a substrate bias power supply. In some embodiments, the target bias power supply is preferably at least one of a center-tap bias power supply and a substrate bias power supply. In other embodiments, the target bias power supply may also be other bias voltage output units in the electrostatic chuck power supply that employ similar calibration logic. The embodiments of this application do not limit the specific type of the target bias power supply; as long as it can perform the corresponding bias calibration, linearity verification, and monitor accuracy verification, the calibration method provided in this application can be applied.

[0022] A calibration test condition refers to a set of operating conditions configured to bring a target bias power supply into a preset test state suitable for calibration and verification. The calibration test condition may include load connection conditions corresponding to the target bias power supply type, main high-voltage output, interlock enable conditions, monitor acquisition conditions, and necessary warm-up conditions. By switching to the corresponding calibration test condition, different types of target bias power supplies can perform subsequent calibration, adjustment, and verification steps in a test environment that matches their calibration requirements, thereby improving the accuracy and consistency of calibration results.

[0023] As an optional embodiment, the calibration condition under test includes a load matched with the target bias power supply, main high-voltage output, and interlock state. Based on this, step 101, switching to the corresponding calibration condition under test according to the type of the target bias power supply, includes: determining the type of the target bias power supply; when the target bias power supply is a center-tap bias power supply, determining the first output current value corresponding to the center-tap bias power supply, switching to the first load corresponding to the center-tap bias power supply based on the first output current value, enabling the interlock signal, and switching the main high-voltage output to the matched first high-voltage output state; when the target bias power supply is a substrate bias power supply, determining the second output current value corresponding to the substrate bias power supply, switching to the second load corresponding to the substrate bias power supply based on the second output current value, enabling the interlock signal, and applying a substrate bias voltage setpoint to a preset negative voltage range.

[0024] By using the above switching method, a test environment matching the calibration requirements of different types of target bias power supplies can be pre-established, so that the load connection state, interlock state or main high voltage output state meet the preset conditions before entering the subsequent calibration and adjustment steps. This avoids the operational differences and inconsistencies in operating conditions caused by manually switching test conditions item by item, and provides a unified basic condition for subsequent calibration and adjustment, multi-point linearity verification and current monitor accuracy verification.

[0025] First, determine the type of the target bias power supply. In this embodiment, the target bias power supply specifically includes, but is not limited to, a center tap bias power supply (CT) and a base plate bias power supply (BP).

[0026] It is worth noting that in semiconductor manufacturing equipment, the electrostatic chuck (ESC) is a key component used to hold wafers in place. To ensure that wafers can be firmly held and maintained at a specific potential state during processing (such as etching, physical vapor deposition, etc.), ESC systems are typically equipped with multiple high-voltage power supplies.

[0027] The center-tapped bias power supply is primarily connected to the center electrode region of the electrostatic chuck (ESC), which typically corresponds to the center of the wafer. The center-tapped bias power supply forms an electrical connection with the center electrode through a separate output terminal, used to establish a specific potential in the wafer's center region to control the electric field distribution or achieve fine adjustment of localized adhesion forces. The circuit topology of the center-tapped bias power supply is often designed for high-voltage, low-current output to accommodate the small physical area of ​​the center electrode and the low current requirement. During testing, the center-tapped bias power supply needs to be matched with a high-impedance load. This is because the center electrode area is small and the required current is low; a high-impedance load can simulate the electric field distribution characteristics under actual operating conditions and is suitable for its low-current output capability (e.g., 400μA range). The high-impedance load helps to accurately reflect the output linearity and stability of the center-tapped bias power supply under low-current conditions during calibration and verification.

[0028] The substrate bias power supply is connected to the ESC base plate or overall back electrode, covering the entire substrate area where the wafer is placed. The substrate bias power supply is connected to the base plate through corresponding output terminals to provide the main electrostatic attraction force or bias potential for the entire wafer, ensuring that the wafer is firmly attached to the chuck surface during processing. The circuit topology of the substrate bias power supply typically supports high current output capability to drive a large-area base plate and meet overall adsorption requirements. During testing, a lower impedance load can be used for the substrate bias power supply. Given the large area of ​​the base plate and the need to handle larger currents (e.g., a 667μA range), a lower resistance load can be used to simulate the operating state of the substrate bias power supply when actually adsorbing wafers, ensuring that its performance evaluation under high current output (e.g., linearity, current monitoring accuracy) meets process requirements.

[0029] Furthermore, when the target bias power supply is a center-tapped bias power supply, a first output current value corresponding to the center-tapped bias power supply is determined. Based on the first output current value, the system switches to a first load corresponding to the center-tapped bias power supply, switches the interlock signal to the enabled state, and switches the main high-voltage output to the matching first high-voltage output state. In an optional embodiment, the first load is a 10-megohm (MΩ) load (corresponding to a 400µA full-scale current) connected between the output terminals of the center-tapped bias power supply. Furthermore, the main high-voltage output can also be switched to a preset high-voltage output state corresponding to 7000V (i.e., the first high-voltage output state, for example, by setting CLAMP_SETPOINT = +10.0 VDC) so that the center-tapped bias power supply can be subsequently calibrated and verified under the test environment required for linearity verification and current monitor accuracy verification.

[0030] When the target bias power supply is the substrate bias power supply, a second output current value corresponding to the substrate bias power supply is determined. Based on the second output current value, the system switches to a second load corresponding to the substrate bias power supply, switches the interlock signal to the enabled state, and applies the substrate bias voltage setpoint to a preset negative voltage range. In an optional embodiment, the second load includes a 6MΩ load (corresponding to a 667µA full-scale current) connected between the output terminal of the substrate bias power supply and the reference ground. It should be understood that the above port names and load resistance values ​​are exemplary descriptions. As long as a load, main high-voltage output, and interlock state that match the target bias power supply can be formed, they can all be applied to the embodiments of this application. Further optionally, monitoring the establishment state of the substrate bias voltage includes: acquiring a feedback signal from a substrate bias voltage monitor. When the feedback signal reaches the expected value corresponding to the substrate bias voltage setpoint and remains stable, it is determined that the substrate bias voltage has been successfully established and is in a stable state. When the feedback signal does not reach the expected value or abnormal fluctuations occur, the output of the interlock enable signal is blocked.

[0031] Therefore, by using the above method, different loads can be set for the center-tapped bias power supply and the substrate bias power supply, allowing different target bias power supplies to perform subsequent calibration and verification under an operating environment close to the actual verification requirements. On the one hand, for the center-tapped bias power supply and the substrate bias power supply, the matched load helps to accurately reflect the output characteristics and monitor response characteristics of the target bias power supply under the corresponding load. On the other hand, for the center-tapped bias power supply, the preset main high-voltage output state and interlock enable state also help to ensure that the bias power supply-related tests are carried out under stable and safe conditions, thereby improving the accuracy, repeatability, and reliability of the linearity verification results and the current monitor accuracy verification results.

[0032] As an optional embodiment, before switching to the corresponding calibration condition based on the type of the target bias power supply, environmental parameters of the current test environment can be obtained. These environmental parameters can characterize whether the current test environment meets the preset calibration conditions, allowing for environmental adaptation processing before entering the formal calibration condition. In practical applications, environmental parameters include, but are not limited to, ambient temperature, humidity, and temperature drift coefficients from historical calibration records.

[0033] When the ambient temperature is below a set threshold or the historical temperature drift coefficient exceeds a preset threshold, the preheating time is automatically extended, and an environmental compensation prompt is displayed on the human-machine interface. For example, referring to maintenance testing standards, the system can default to a preheating time of at least 30 minutes. When a large fluctuation in ambient temperature is detected, this preheating time is automatically extended. By extending the preheating time when environmental conditions deviate from the preset range, the target bias power supply can enter the subsequent calibration and verification process in a more stable thermal state, thereby reducing the impact of environmental fluctuations on the calibration results. By outputting the environmental compensation prompt, the operator can also be notified that the system has adjusted the test preparation process according to environmental conditions, thereby enhancing operational transparency and process traceability.

[0034] Furthermore, before connecting a 10MΩ or 6MΩ load, a voltage detection circuit confirms that the absolute value of the output voltage of the target bias power supply is less than 50 volts (V). When an abnormally high voltage is detected, an interlock disable signal is automatically triggered and a safety alarm is generated. The above process is used to confirm that the target bias power supply is in a safe state before load switching, thereby reducing the safety risks that may be caused by switching loads while they are energized. In practical applications, the preset safety threshold can be, for example, 50V or 36V, and this application does not limit this.

[0035] Furthermore, the main high-voltage output state is dynamically set based on the type and range of the target bias power supply. By associating the main high-voltage output state with the type and range of the target bias power supply, subsequent calibration and test conditions can be matched with the actual operating range of the target bias power supply, thereby improving the specificity of the test environment configuration. For example, when calibrating a center-tap bias power supply with a range of 4000V, the clamping voltage setpoint is switched to 10VDC to match the 7000V main high-voltage output. This setting method helps to pre-establish the main high-voltage output and bias start conditions corresponding to the target bias power supply before entering formal calibration and verification, thereby reducing subsequent manual adjustments and improving test preparation efficiency.

[0036] Different interlocking enable strategies are implemented for different types of bias power supplies to ensure the safety and compliance of the testing process. Furthermore, when the target bias power supply is a center-tapped bias power supply, the interlocking signal is switched to the enabled state after confirming the stability of the main high-voltage output. Specifically, the feedback voltage at the main high-voltage output is monitored. When the voltage value enters a preset stable range (e.g., the set range corresponding to 7000V) and the fluctuation is less than a preset threshold, an interlocking enable command is generated. This method employs a timing logic of high voltage first, then interlocking, ensuring that the center-tapped bias power supply has a stable operating electric field environment before the interlock is activated, thereby avoiding insufficient adsorption force or measurement errors caused by voltage drops.

[0037] When the target bias power supply is the substrate bias power supply, the interlock enable logic is executed. That is, after applying the substrate bias voltage setpoint to the preset negative voltage range, the establishment status of the substrate bias voltage is monitored in real time. Only when it is confirmed that the substrate bias voltage has been successfully established and is in a stable state is the interlock signal logically operated with this stable state, and the interlock enable signal is output. For example, the interlock enable logic includes: using the feedback signal of the substrate bias voltage monitor (BP_BIAS_VMONITOR) as the condition variable of the interlock loop; if the feedback signal does not reach the expected value or exhibits abnormal jitter, the output of the interlock signal is blocked. Thus, using the voltage establishment state as a prerequisite for interlocking, a safe soft start of the substrate bias power supply is achieved, preventing high-voltage erroneous output or load surges caused by the failure to establish the bias voltage. The above interlock enable logic aims to ensure that the substrate electrodes have reliably established the required bias potential before proceeding to subsequent testing or process steps, thereby preventing the risk of wafer adsorption failure, high-voltage surges, or equipment damage due to the unprepared bias voltage.

[0038] Finally, a progressive interlock enable mechanism is adopted, setting the interlock signal to an intermediate level and maintaining it for a preset duration. The interlock signal is first set to an intermediate level and maintained for the preset duration. After confirming that no abnormalities are detected, the interlock signal is then raised to the enable level. During this process, the interlock current value is monitored. When the interlock current value exceeds the preset range, it reverts to the disabled state. By adopting a phased interlock enable method, the instantaneous abnormality risk caused by the interlock signal directly transitioning to the enable state can be avoided, and abnormal states can be identified in advance during the interlock enable process, improving system safety and the stability of operating condition switching. For example, the interlock signal is set to a 12V DC (VDC) intermediate level and maintained for 200 milliseconds (msec). After monitoring the system for abnormal alarms, it is then raised to the 24V DC enable level, while the interlock current value is monitored in real time. When the interlock current exceeds the range of 35mA±5mA, it automatically reverts to the disabled state. If no abnormality is detected, the level will rise to the enable level. The intermediate level is the middle value of the enable level. The interlock current value will be monitored. When the interlock current value exceeds the preset range, the level will fall back to the disabled state.

[0039] The aforementioned intermediate level, holding time, and interlock current range are all exemplary parameters used to illustrate the implementation of progressive interlock enable, rather than limiting the scope of protection of this application.

[0040] It is understood that the environmental threshold, voltage threshold, duration parameters, current range, and setpoint values ​​given in the above steps are merely examples. In practical applications, they can be adjusted according to the model of the electrostatic chuck power supply, the configuration of the test platform, and safety requirements. This application does not limit these adjustments. Furthermore, dynamic parameters can also be used so that the embodiments of this application can be applied to different models of electrostatic chuck power supplies and different automated test platforms.

[0041] Optionally, in the above embodiments, if no abnormality is detected, the process of raising the interlock signal to the enable level can also involve acquiring the interlock current waveform at a preset sampling rate and calculating the harmonic distortion of the current waveform during the process of the interlock signal rising from the intermediate level to the enable level. When the harmonic distortion is greater than the distortion threshold, it is determined that there is an abnormality in the interlock drive circuit, the set value of the clamping voltage setpoint is reduced, and the interlock enable is re-executed. After the interlock enable is completed, a dynamic load impact test is performed. Under the substrate bias power supply calibration condition, the clamping voltage setpoint is stepped from -10.0VDC to 0.0VDC, and the transient response time of the interlock current is monitored. When the transient response time exceeds the response threshold, the health of the interlock system is marked as degraded, and the verification point density is increased in subsequent linearity verification.

[0042] Among them, the preset sampling rate is used to determine the acquisition accuracy of the interlock current waveform, the harmonic distortion is used to quantify the degree of distortion of the interlock current waveform, the distortion threshold is used to determine whether there is an abnormality in the interlock drive circuit, the preset stabilization time is used to wait for the system to recover stability after an abnormal rollback, the transient response time is used to characterize the dynamic response capability of the interlock system to sudden changes at the set point, the response threshold is used to determine whether the dynamic response capability meets the preset requirements, and the health degradation status is used to characterize that although the interlock system has not failed, its dynamic performance has fallen below the preset standard.

[0043] By using waveform analysis and dynamic load impact testing in the above embodiments, combined with harmonic distortion and transient response time to quantify the interlock system status, the problem of verification data distortion caused by interlock anomalies in traditional calibration is solved.

[0044] It should be noted that the specific process of acquiring the interlock current waveform at a preset sampling rate and calculating the harmonic distortion of the current waveform can be as follows: During the process of the interlock signal rising from the intermediate level to the enable level, the data acquisition circuit is controlled to continuously acquire the interlock current value at a preset sampling rate, obtaining the interlock current waveform within the corresponding time period. Then, the interlock current waveform is preprocessed to remove DC bias and high-frequency noise. Next, spectral analysis is performed on the preprocessed interlock current waveform to obtain the fundamental component and at least one harmonic component. Based on the proportional relationship between at least one harmonic component and the fundamental component, the harmonic distortion of the interlock current waveform is calculated. Finally, the harmonic distortion is compared with a preset distortion threshold to determine if there is any abnormality in the interlock drive circuit.

[0045] For example, during the process of the interlock signal rising from the intermediate level of 12VDC to the enable level of 24VDC, the control data acquisition circuit continuously acquires the interlock current value at a preset sampling rate of 10kHz, obtaining an interlock current waveform lasting 500ms. After de-DC biasing and low-pass filtering of the interlock current waveform, the fundamental component, as well as the second, third, and fifth harmonic components, are extracted using spectrum analysis. If the harmonic distortion calculated based on the proportional relationship between the second, third, and fifth harmonic components and the fundamental component is 12%, while the preset distortion threshold is 8%, then it can be determined that there is an abnormality in the interlock drive circuit.

[0046] When the harmonic distortion exceeds the distortion threshold, an anomaly is detected in the interlock drive circuit. In response to this anomaly detection, the clamping voltage setpoint is lowered, and the interlock signal is returned to the disabled state. After waiting for a preset stabilization period, the interlock signal corresponding to the intermediate level is re-output, and the interlock enabling process from the intermediate level to the enable level is executed again. If the harmonic distortion meets the preset requirements after re-enabling the interlock, the subsequent dynamic load impact test is initiated.

[0047] For example, when the harmonic distortion exceeds the distortion threshold, the clamping voltage setpoint is reduced from 10VDC to 8VDC, and the interlock signal is returned to the disabled state corresponding to 0VDC. After waiting for a preset stabilization period of 500ms, the intermediate level interlock signal corresponding to 12VDC is output again, and the interlock enable process of increasing from 12VDC to 24VDC is executed again. If, after re-executing the interlock enable, the harmonic distortion obtained by re-collection and calculation decreases to 5%, and is lower than the preset distortion threshold of 8%, then it can be determined that the interlock drive circuit has recovered to the required operating state and enters the subsequent dynamic load impact test.

[0048] After interlocking is enabled, a dynamic load impact test is performed. Under substrate bias power supply calibration conditions, the clamping voltage setpoint is stepped from -10.0VDC to 0.0VDC, and the interlocking current value is continuously acquired before and after the step change to obtain the transient response waveform of the interlocking current. The transient response time of the interlocking current is determined based on the time difference between the trigger moment of the step change in the clamping voltage setpoint and the moment when the interlocking current reaches a steady state. For example, under substrate bias power supply calibration conditions, at time t0, the clamping voltage setpoint is stepped from -10.0VDC to 0.0VDC, and the interlocking current value is continuously acquired from 100ms before time t0 to 500ms after time t0 to obtain the transient response waveform of the interlocking current. The moment when the clamping voltage setpoint undergoes a step change is determined as the trigger moment, and the moment when the interlocking current enters a preset stable range and remains there for a preset duration is determined as the stable moment. The preset stable range can be ±5% of the steady-state target current value, and the preset duration can be 20ms. If the interlocking current enters the preset stable range at time t1 and remains there for more than 20 ms, the time difference between time t1 and time t0 is determined as the transient response time of the interlocking current. For example, when t1 minus t0 is 18 ms, the transient response time can be determined to be 18 ms. For example, when the transient response time is 18 ms and the preset response threshold is 25 ms, the interlocking system is judged to have a normal dynamic response. When the transient response time is 42 ms and the preset response threshold is still 25 ms, the interlocking system is judged to have an abnormal dynamic response, and the health status of the interlocking system is marked as degraded.

[0049] When the transient response time exceeds the response threshold, the interlocking system is determined to have a dynamic response anomaly, and its health is marked as degraded. When the health is degraded, the subsequent linearity verification strategy is adjusted. This could involve inserting additional verification points in preset critical voltage sections, or reducing the interval between adjacent verification points to increase the verification point density. For example, this could involve inserting intermediate test points between existing test points, reducing the scan step size, or resampling critical segments.

[0050] By combining the above methods, the state of the interlocked system can be quantitatively evaluated by combining harmonic distortion and transient response time. This allows for the identification of interlock drive anomalies or dynamic response anomalies before proceeding to subsequent linearity verification, thereby reducing the impact of interlock anomalies on the accuracy of subsequent verification data.

[0051] As an optional embodiment, before step 101, when a specific pattern is detected in the linearity error distribution in the historical calibration data of the target bias power supply, the load resistance is dynamically adjusted to improve the matching of subsequent calibration and verification.

[0052] For example, if the historical absolute value of the error of the center-tap bias power supply in the range of -4000V to -3000V is greater than the voltage threshold, the load is reduced by 10MΩ. For example, the 10MΩ load is automatically adjusted to 9.2MΩ ± 0.1MΩ. If the historical average value of the second derivative of the substrate bias power supply in the range of -800V to 0V is greater than the threshold value of the average value of the second derivative, the load is reduced by 6MΩ. For example, the 6MΩ load is automatically adjusted to 5.5MΩ ± 0.1MΩ.

[0053] During load adjustment, a digital potentiometer array is used to configure the resistance value. The digital potentiometer array includes a main potentiometer and a fine-tuning potentiometer. The main potentiometer is responsible for coarse adjustment of the target resistance value, and the fine-tuning potentiometer is responsible for fine adjustment of the target resistance value. For example, the main potentiometer is responsible for coarse adjustment to 95% of the target resistance value, and the fine-tuning potentiometer is responsible for fine adjustment to within ±0.1% of the target resistance value.

[0054] Finally, after load adjustment is complete, open-circuit voltage verification is performed. Specifically, the open-circuit voltage is measured after disconnecting the load. If the difference between the open-circuit voltage and the load voltage exceeds a preset proportional threshold, the load matching is deemed a failure, and load adjustment is re-executed. For example, if the load voltage corresponding to the center-tap bias power supply is -3600V, and the open-circuit voltage measured after disconnecting the load is -3850V, then the difference between the open-circuit voltage and the load voltage is 250V. If the preset proportional threshold is 5%, then the difference ratio calculated based on the absolute value of the load voltage is approximately 6.9%, which is greater than the preset proportional threshold. Therefore, the current load matching is deemed a failure, and load adjustment is re-executed. When re-executing load adjustment, the target resistance value can be reconfigured using a digital potentiometer array, and the open-circuit voltage verification is performed again after adjustment until the difference ratio does not exceed the preset proportional threshold.

[0055] Step 102: Under the calibration conditions to be tested, perform the calibration adjustment steps in a predetermined sequence.

[0056] Specifically, after switching to the calibration condition corresponding to the target bias power supply, the electrostatic chuck power supply calibration device can sequentially execute each calibration adjustment step according to the pre-configured calibration adjustment sequence. Each calibration adjustment step can correspond to different adjustment targets and monitoring parameters. Among them, zero bias calibration is used to reduce the static offset of the bias voltage output under zero setting conditions, and zero current calibration is used to reduce the zero-point drift of the current monitoring channel. Gain switching adjustment is used to match the monitor output under different ranges or different gain levels with the actual value. Full-scale fine-tuning is used to further reduce output error or feedback error under near full-scale output conditions.

[0057] Understandably, the calibration and adjustment steps include zero-bias calibration, zero-current calibration, gain switching adjustment, and full-scale fine-tuning, and the execution order of these steps is dynamically configured based on the type of the target bias power supply. Different calibration and adjustment sequence templates can be invoked for different types of target bias power supplies, thus adapting the calibration process to the output characteristics, monitor characteristics, and subsequent verification requirements of the corresponding bias power supply.

[0058] Optionally, when the target bias power supply is a center-tap bias power supply, the execution sequence from first to last is zero bias calibration, zero current calibration, gain switching adjustment, and full-scale fine-tuning. When the target bias power supply is a substrate bias power supply, the execution sequence from first to last is zero bias calibration, gain switching adjustment, full-scale fine-tuning, and zero current calibration. By configuring different adjustment sequences for different target bias power supplies, adjustment steps that have a greater impact on the calibration results can be completed first, thereby improving the overall calibration efficiency and adjustment accuracy.

[0059] Step 103: During the calibration and adjustment process, obtain the monitor reading to be reported, the actual value, the difference between the monitor reading and the actual value, and the allowable error range, and adjust the corresponding potentiometer based on the difference until the difference falls within the allowable error range.

[0060] Specifically, in step 103, the monitor reading and actual value corresponding to the current calibration adjustment step are obtained; the difference between the monitor reading and the actual value is determined based on the monitor reading to be reported and the actual value; if the difference does not enter the allowable error range or does not continuously meet the preset stability condition, an adjustment strategy is generated based on the sign and absolute value of the difference; during the execution of the adjustment strategy, the process jumps back to the step of obtaining the monitor reading corresponding to the current calibration adjustment step until the difference enters the allowable error range and continuously meets the preset stability condition, at which point the current calibration adjustment step is determined to be completed.

[0061] In this embodiment, the adjustment strategy is used to automatically adjust the adjustment step size based on the error magnitude, so that the monitor reading to be reported is close to the actual value.

[0062] For example, the potentiometer's rotation amplitude, direction, and / or angle are controlled by an adjustment strategy. The adjustment strategy includes large-amplitude adjustment, small-amplitude adjustment, and fine-tuning. Specifically, when the absolute value of the difference is greater than a first preset threshold, a corresponding large-amplitude adjustment can be performed. When the absolute value of the difference is less than the first preset threshold but greater than a second preset threshold, a corresponding small-amplitude adjustment can be performed. When the absolute value of the difference approaches the boundary of the allowable error range, fine-tuning can be performed to reduce the rotation amplitude and avoid overshoot.

[0063] The adjustment range indicates the magnitude of the change in the current automatic adjustment operation. Specifically, when the absolute value of the difference is greater than a first preset threshold (e.g., 10% of full scale), a large adjustment can be performed. When the absolute value of the difference is less than the first preset threshold but greater than a second preset threshold (e.g., 1% of full scale), a small adjustment can be performed. When the absolute value of the difference approaches the boundary of the allowable error range, a fine adjustment can be performed to reduce the rotation amplitude and avoid overshoot.

[0064] The adjustment status indicates the progress of the current calibration adjustment step. For example, when the difference has not yet entered the allowable error range, the adjustment status is "Continue Adjustment". When the difference has entered the allowable error range but has not yet continuously met the preset stability condition, the adjustment status is "Stay Observing or Fine-Tuning". When the difference has entered the allowable error range and continuously met the preset stability condition, the adjustment status is "Stop Adjustment", and the current calibration parameters are saved, waiting for or triggering the next calibration adjustment step.

[0065] In some implementations, the dynamic adjustment strategy further includes predictive adjustment based on error change trends. For example, if continuous sampling shows an increasing trend in the absolute value of the difference, a larger adjustment step size is used to counteract the trend, even if the current error is small. If continuous sampling shows a converging trend in the absolute value of the difference, the current step size is maintained or the step size is reduced.

[0066] It should be understood that the above-mentioned rotation direction, rotation amplitude, rotation angle or number of rotations are only the execution method of the adjustment action, and this application does not limit them. As long as the corresponding calibration adjustment steps can be completed based on the difference, they can be applied to the embodiments of this application.

[0067] After introducing the calibration and adjustment steps, the above embodiments will be described below with examples.

[0068] First, the monitor reading and actual value corresponding to the current calibration adjustment step are obtained, and the difference between the monitor reading and the actual value is determined. Then, the monitor reading, actual value, difference, and allowable error range are displayed on the human-machine interface. For example, when the current calibration adjustment step is zero bias calibration, the actual value can be 0.00V, and the currently acquired monitor reading can be 0.18V; therefore, the electrostatic chuck power supply calibration device determines the difference to be 0.18V. As another example, when the current calibration adjustment step is gain switching adjustment, the actual value can be 10.00V, and the currently acquired monitor reading can be 9.72V; therefore, the difference is -0.28V. Based on these differences, the direction and degree of deviation of the current monitor reading from the actual value can be further determined, thus providing a basis for generating subsequent human-machine interaction guidance prompts.

[0069] For example, if the current calibration adjustment step is gain switching adjustment, and the monitor reading obtained by the electrostatic chuck power supply calibration device is 9.72V, while the actual value corresponding to the current calibration adjustment step is 10.00V, with an allowable error range of ±0.10V, then the difference between the monitor reading and the actual value is -0.28V. At this time, the human-machine interface can simultaneously display the current value of 9.72V, the actual value of 10.00V, the difference of -0.28V, and the allowable error range of ±0.10V. By observing the direction and degree of deviation between the current monitor reading and the actual value, the corresponding adjustment direction and adjustment range can be determined.

[0070] Optionally, the target adjustment range for the calibration adjustment step and the percentage difference between the current monitor reading and the actual value can also be calculated. The target adjustment range characterizes the acceptable adjustment interval corresponding to the current calibration adjustment step, and the percentage difference characterizes the degree of deviation of the current monitor reading from the actual value. Optionally, the human-machine interface can display the monitor reading to be reported, the actual value, the difference, and the allowable error range, and can also simultaneously display the target adjustment range and the percentage difference, allowing the operator to more intuitively judge the current adjustment status.

[0071] For example, if the actual value corresponding to the current calibration adjustment step is 10.00V, the allowable error range is ±0.10V, and the current monitor reading is 9.72V, then the target adjustment range can be determined to be 9.90V to 10.10V, with a difference of -0.28V and a difference percentage of 2.8%. This method not only determines whether the current monitor reading has entered the target adjustment range, but also determines whether subsequent adjustments should be coarse or fine based on the difference percentage, thereby improving the accuracy and efficiency of the calibration adjustment process.

[0072] Then, during the adjustment process, the process jumps back to the step of obtaining the monitor reading corresponding to the current calibration adjustment step until the difference enters the allowable error range and continuously meets the preset stability conditions, at which point the current calibration adjustment step is determined to be complete.

[0073] For example, during the current calibration adjustment step, the corresponding potentiometer is adjusted. After each adjustment, the monitor reading corresponding to the current calibration adjustment step is reacquired, and a new difference is determined based on the reacquired monitor reading and the actual value. If the new difference is still not within the allowable error range, the adjustment and sampling are repeated. If the new difference is within the allowable error range, monitor readings are acquired again within a preset sampling period to determine whether the difference continuously meets the preset stability condition. For example, when the actual value is 10.00V and the allowable error range is ±0.10V, the monitor reading obtained after one adjustment is 9.95V, corresponding to a difference of -0.05V, indicating that the difference has entered the allowable error range. At this time, the electrostatic chuck power supply calibration device continues to sample continuously. If the difference corresponding to the monitor readings obtained from the subsequent five consecutive samples is within the range of ±0.10V, the current calibration adjustment step is determined to be completed, and the next calibration adjustment step is entered. If the difference corresponding to any sample during the continuous sampling process exceeds the allowable error range, the adjustment process is returned to continue execution.

[0074] Optionally, during the adjustment process, when the absolute value of the difference is greater than a first preset proportional threshold of the allowable error range, a first sampling interval is used to obtain the monitor reading corresponding to the current calibration adjustment step. When the absolute value of the difference is less than a second preset proportional threshold of the allowable error range, a second sampling interval is used to obtain the monitor reading corresponding to the current calibration adjustment step, where the second sampling interval is less than the first sampling interval. When the difference is within the allowable error range after a preset number of consecutive samplings, the current calibration adjustment step is considered complete, and the process proceeds to the next calibration adjustment step. For example, when the allowable error range corresponding to a certain calibration adjustment step is ±0.10V, the first preset proportional threshold can be set to 300%, and the second preset proportional threshold can be set to 120%. When the absolute value of the current difference is greater than 0.30V, it indicates that the current deviation is large, and a first sampling interval of 200ms is used for sampling. When the absolute value of the current difference is less than 0.12V, it indicates that the current reading is close to the actual value, and a second sampling interval of 50ms is used for sampling. If the difference is within the ±0.10V range after 5 consecutive samplings, the current calibration adjustment step is considered complete, and the process proceeds to the next calibration adjustment step. This method allows for both adjustment efficiency in the initial stages and improved accuracy in identifying stable states as the system approaches the target range.

[0075] In an optional example, during the execution of the zero-bias calibration step, step 103 can be implemented as follows: when the target bias power supply is a center-tap bias power supply, under the condition that the center-tap bias voltage setpoint is equal to zero volt DC, monitor the center-tap bias voltage monitor value, requiring it to meet a preset voltage range. When the target bias power supply is a substrate bias power supply, under the condition that the substrate bias voltage setpoint is equal to zero volt DC, monitor the substrate bias high voltage value, requiring it to meet a preset absolute value range. If the initial monitored value exceeds the allowable error range, the potentiometer is automatically adjusted according to the deviation direction and amplitude. When the monitored value is less than the preset lower limit, the zero-bias potentiometer is rotated clockwise, and the rotation angle is proportional to the deviation amplitude. When the monitored value is greater than the preset upper limit, the zero-bias potentiometer is rotated counterclockwise, and the rotation angle is proportional to the deviation amplitude. During the execution of the zero-bias calibration step, a curve of the monitored value change is generated synchronously, and the relative position between the current monitored value and the allowable error range is marked.

[0076] In the example above, during the zero-bias calibration step, the system first enters the corresponding zero-bias calibration condition based on the type of the target bias power supply. When the target bias power supply is a center-tap bias power supply, the center-tap bias voltage setpoint is set to 0VDC, and the center-tap bias voltage monitor value is acquired. When the target bias power supply is a substrate bias power supply, the substrate bias voltage setpoint is set to 0VDC, and the monitoring value corresponding to the substrate bias power supply is acquired. Subsequently, the acquired monitoring value is compared with the actual value corresponding to the zero-bias calibration step to determine whether the current monitoring value falls within the preset allowable error range.

[0077] When the initial monitoring value does not fall within the allowable error range, adjust the potentiometer based on the direction and magnitude of the deviation between the current monitoring value and the actual value, and adjust the corresponding zero bias potentiometer.

[0078] Specifically, when the current monitored value is below a preset lower limit, the potentiometer can be adjusted in the first direction. When the current monitored value is above a preset upper limit, the potentiometer can be adjusted in the second direction. As the current monitored value gradually approaches the boundary of the allowable error range, fine-tuning of the potentiometer can also be performed to reduce the risk of overshoot. In some embodiments, adjustment amplitude information corresponding to the current deviation magnitude is obtained, and adjustment operations of the corresponding amplitude are performed based on the adjustment amplitude information. Finally, the monitored value is re-acquired, and the comparison and adjustment process is repeated until the current monitored value enters the allowable error range.

[0079] Furthermore, during the zero-bias calibration process, the monitor reading to be reported, the actual value, the difference between the monitor reading and the actual value, and the allowable error range are collected to determine the current adjustment status. For example, when the actual value is the zero-bias target corresponding to zero volts and the current monitored value deviates from zero, the real-time change result of the current monitored value is obtained, and a matching adjustment direction and adjustment amplitude are generated. In this way, the zero-point adjustment process, which originally relied on human experience, can be transformed into an automatic adjustment process based on real-time monitoring results, thereby reducing the risk of human error.

[0080] In some implementations, the trend of monitor readings can be acquired during the zero-bias calibration process to determine whether the adjustment has stabilized. For example, the trend information of monitor readings over time can be acquired, and the allowable error range can be identified, so that the operator can observe whether the currently adjusted monitoring value gradually approaches the actual value and stably falls within the allowable error range. When the monitor reading enters the allowable error range and continuously meets the preset stability conditions, the zero-bias calibration step is determined to be complete, and the next calibration adjustment step is initiated.

[0081] In another example, during the gain switching adjustment process, step 103 can be implemented as follows: when the calibration center tap is biased, multiple preset current values ​​for range gain adjustment are sequentially executed. When the calibration substrate is biased, multiple preset voltage values ​​for voltage range gain adjustment are sequentially executed. For each range or range, a corresponding target setpoint value is set, and the corresponding monitor reading is monitored. The gain error is calculated based on the monitor reading. When the gain error is greater than a preset error threshold, the gain adjustment potentiometer is activated. A dynamic adjustment strategy is generated based on the sign and trend of the gain error. If the gain error is greater than a preset positive threshold and continuous sampling shows an upward trend, a first adjustment step size is used. If the gain error is less than a preset negative threshold and continuous sampling shows a downward trend, a second adjustment step size is used, which is smaller than the first adjustment step size. During range switching, the calibration parameters of the current range are saved, and the continuity with the calibration parameters of adjacent ranges is verified. When the difference between adjacent range parameters exceeds a preset continuity threshold, a cross-validation process is triggered.

[0082] In the above example, after determining the gain error at the current gear, a dynamic adjustment strategy can be generated based on the sign, absolute value, and changing trend of the gain error obtained from continuous sampling. Specifically, when the gain error is greater than a preset positive threshold and the continuous sampling results show an upward trend, it indicates that the deviation of the current monitor reading from the actual value is still increasing. In this case, a larger first adjustment step size can be used to improve adjustment efficiency. When the gain error is less than a preset negative threshold and the continuous sampling results show a downward trend, it indicates that the current monitor reading has gradually approached the actual value. In this case, a smaller second adjustment step size can be used to reduce the risk of adjustment overshoot. The second adjustment step size is smaller than the first adjustment step size.

[0083] For example, at a certain gain setting, when the actual value is 10.00V, and the monitor reading continuously changes from 9.20V to 9.10V and then to 9.00V, it indicates that the current error is negative and its absolute value is gradually increasing. This suggests that the current adjustment deviation is trending upwards, and a coarse adjustment strategy is generated to use a larger step size to adjust the gain potentiometer. Conversely, when the monitor reading changes from 9.82V to 9.88V and then to 9.93V, it indicates that the absolute value of the current error is gradually decreasing and approaching the allowable error range. At this point, a fine-tuning strategy can be switched to, and a fine-tuning strategy is generated to improve adjustment accuracy.

[0084] Furthermore, after completing the gain adjustment at a certain range or gear, the corresponding calibration parameters can be saved, and the continuity of calibration parameters between adjacent ranges or gears can be verified when switching to an adjacent range or gear. Calibration parameters may include at least one of the following: target setpoint value at the current gear, monitor reading, error value, adjustment direction, number of adjustments, and final adjustment result. By comparing the differences in calibration parameters corresponding to adjacent ranges or gears, it can be determined whether there are abnormal jumps when switching between different ranges.

[0085] For example, after completing gain adjustment in the first range, the final calibration parameters for that range are saved. Upon entering the second range and completing the corresponding adjustment, the final calibration parameters for the second range are compared with those for the first range. If the difference between the two parameters does not exceed a preset continuity threshold, the range switching process is considered continuous and normal. If the difference exceeds the preset continuity threshold, it indicates that there may be local gain mismatch, abnormal range switching, or discontinuous adjustment between adjacent ranges, triggering the cross-validation process.

[0086] In the cross-validation process, the target setpoint values ​​corresponding to the previous and current ranges can be retrieved again, and the corresponding monitor readings can be collected again. The adjustment results under the previous and current ranges are then compared. If the cross-validation results show that the monitor responses of both the current and previous ranges meet the preset requirements, the existing calibration parameters are maintained. If the cross-validation results show that the monitor response under at least one range does not meet the preset requirements, the gain adjustment is re-executed in the corresponding range until the continuity requirement is met or the preset maximum number of re-adjustments is reached.

[0087] In this way, during the gain switching adjustment process, not only can the gain error under a single range or position be guided, but the adjustment continuity between adjacent ranges or positions can also be verified, thereby reducing the accumulation of local errors caused by discontinuous range switching and providing a more stable calibration basis for subsequent multi-point linearity verification and current monitor accuracy verification.

[0088] In practical applications, the cross-validation process can be implemented using a rule-based algorithm based on the difference in calibration parameters between adjacent ranges. Specifically, the electrostatic chuck power supply calibration device reads the calibration parameters corresponding to the previous and current ranges, calculates the parameter difference between adjacent ranges, and compares the parameter difference with a preset continuity threshold. When the parameter difference exceeds the preset continuity threshold, the target setpoint values ​​corresponding to the previous and current ranges are retrieved again, and repeated sampling is performed. Based on the repeated sampling results, the corresponding average error value and fluctuation range are calculated. If the repeated sampling results still show that the parameter difference between adjacent ranges exceeds the preset continuity threshold, it is determined that there is an anomaly in the range switching, and the gain adjustment is re-executed in the corresponding range. In addition, the cross-validation process can also be implemented using a trend continuity analysis algorithm, that is, performing sequence analysis on the monitor readings, error values, or adjustment parameters corresponding to adjacent ranges according to the range order. When an abnormal jump or discontinuous local change trend is detected, cross-validation is triggered. The above cross-validation process is only an example and is not limited in this application.

[0089] Step 104: After the calibration and adjustment steps are completed, the corresponding test point sequence and segmentation judgment parameters are called according to the type of the target bias power supply to perform multi-point linearity verification and current monitor accuracy verification, and the verification results are obtained.

[0090] After completing the calibration and adjustment corresponding to steps 102 and 103, the electrostatic chuck power supply calibration device first identifies the type of the current target bias power supply and calls up the test point sequence and segmentation judgment parameters corresponding to that target bias power supply. The test point sequence is used to determine the distribution of setpoints required for subsequent linearity verification and current monitor accuracy verification, while the segmentation judgment parameters are used to determine the error judgment criteria for different range segments or different voltage ranges. By associating the test point sequence and segmentation judgment parameters according to the target bias power supply type, the verification process can be matched with the output characteristics and monitor characteristics of the corresponding bias power supply.

[0091] The test point sequence for multi-point linearity verification is based on the segmented configuration of the target bias power supply's range. In other words, different types of target bias power supplies can employ different test point arrangements: for center-tap bias power supplies, a test point sequence consisting of multiple discrete set points can be used to cover their typical operating range. For substrate bias power supplies, a test point sequence that gradually scans from the high-voltage end to the low-voltage end can be used to cover the continuously varying range. The verification results are then determined based on the segmentation judgment parameters corresponding to different range segments. Specifically, different error thresholds, feedback error thresholds, current accuracy thresholds, and / or second derivative thresholds are used in different segments to improve the specificity and accuracy of the verification results.

[0092] For example, when the target bias power supply is a center-tap bias power supply, a discrete test point sequence corresponding to the center-tap bias power supply can be invoked. In some embodiments, the discrete test point sequence may include multiple preset bias voltage settings corresponding to -4000V, -3000V, -2000V, -1000V, -500V, -250V, and -100V. Under the calibration condition corresponding to the center-tap bias power supply, the electrostatic chuck power supply calibration device sequentially sets each preset bias voltage setting value according to the test point sequence, and collects the actual output voltage, the center-tap bias voltage monitor reading, and the center-tap bias current monitor reading at each setting point. Subsequently, the actual output voltage is compared with the permissible voltage range of the corresponding setting point, and the center-tap bias voltage monitor reading is compared with the reference feedback value calculated based on the actual output voltage to determine whether the feedback error is within the preset range; simultaneously, the center-tap bias current monitor reading is compared with the reference current value to determine whether the current monitor accuracy meets the preset requirements. Based on the judgment results of each discrete test point, the multi-point linearity verification results and current monitor accuracy verification results corresponding to the center tap bias power supply can be obtained.

[0093] For example, when the target bias power supply is the substrate bias power supply, a scan test point sequence corresponding to the substrate bias power supply can be invoked. In some embodiments, the scan test point sequence may include a progressive setpoint sequence from -4000V to 0V. Under the calibration condition corresponding to the substrate bias power supply, the electrostatic chuck power supply calibration device performs a progressive scan on the output of the substrate bias power supply according to the scan test point sequence, and collects multiple samples at each setpoint to generate a monitoring array and a setpoint array. Subsequently, the output voltage error of the substrate bias power supply is calculated based on the monitoring array and the setpoint array, and the change in the output voltage error is further calculated, such as calculating the second derivative of the output voltage error. Based on this, corresponding segmentation judgment parameters are invoked according to different voltage segments to segmentally determine the output voltage error and its change results. For example, a first set of second derivative thresholds is used in higher voltage segments, and a second set of second derivative thresholds is used in lower voltage segments, thereby achieving targeted determination of the linearity characteristics of different voltage segments. Based on the above judgment results, the multi-point linearity verification results and current monitor accuracy verification results corresponding to the substrate bias power supply can be obtained.

[0094] In practical applications, the method for calculating the second derivative of the output voltage error is not limited. For example, multiple samples collected at each set point can be statistically processed to obtain the output voltage error corresponding to each set point. Then, according to the scanned test point sequence, the first-order difference between the output voltage errors corresponding to adjacent set points is calculated, and the second derivative of the output voltage error is determined based on the change between adjacent first-order differences. When the voltage interval between adjacent set points is the same, the ratio of the difference between adjacent first-order differences to the square of the voltage interval can be used as the second derivative at the corresponding set point. When the voltage interval between adjacent set points is different, the first-order difference can be normalized according to the actual voltage interval between each set point, and the second derivative is determined based on the difference between the normalized first-order differences.

[0095] For example, the current setpoint and several adjacent setpoints can be selected as a local data window. Curve fitting is then performed on the output voltage error within this local data window, and the second derivative of the output voltage error is determined based on the second derivative of the fitted curve at the current setpoint. The fitting method used can include polynomial fitting, spline fitting, or local regression fitting. This reduces the impact of sampling noise or local outliers on the second derivative calculation results, improving the stability of the segmented judgment results.

[0096] In one alternative implementation, when the same voltage interval exists between each scan test point, the first... The second derivative of the output voltage error at each setpoint It can be represented as: .in, Indicates the first The output voltage error corresponding to each set point and Respectively represent the first The output voltage error between two adjacent setpoints. This represents the voltage interval between adjacent setpoints. Furthermore, the calculated second derivative can be filtered, averaged, or have outlier removed. The processed second derivative is then compared with the second derivative threshold corresponding to the voltage range of the current setpoint to determine whether the linearity of the substrate bias power supply within that voltage range meets preset requirements.

[0097] Furthermore, the electrostatic chuck power supply calibration device can summarize the judgment results corresponding to each test point or each scanning segment to form a verification result corresponding to the current target bias power supply. The verification result can include at least one of the following: whether each test point passes, whether each segment passes, the corresponding error value, the corresponding feedback error value, the corresponding current monitor accuracy value, and whether the overall result meets the preset accuracy conditions. If the verification result shows that all test points or all segments meet the corresponding segment judgment parameters, the current target bias power supply calibration is deemed successful; if there are any failed test points or failed segments, the failed items will be used as the basis for subsequent rollback verification.

[0098] In the above manner, the embodiments of this application can match the corresponding test point sequence and segmentation judgment parameters according to the type of the target bias power supply, so that multi-point linearity verification and current monitor accuracy verification no longer rely on manual point selection and manual judgment, but are automatically completed under the preset test point distribution and segmentation judgment rules, thereby improving the consistency, objectivity and traceability of the verification results.

[0099] As an optional embodiment, in step 104, when the target bias power supply is a center-tap bias power supply, the test point sequence and segmentation judgment parameters corresponding to the center-tap bias power supply are invoked. The test point sequence includes multiple preset bias voltage settings, and the segmentation judgment parameters include permissible voltage ranges, feedback error ranges, and current accuracy ranges configured for different test point segments. The output voltage of the center-tap bias power supply is set sequentially according to the multiple preset bias voltage settings in the test point sequence. The actual output voltage, center-tap bias voltage monitor reading, and center-tap bias current monitor reading corresponding to each preset bias voltage setting in the test point sequence are collected. Based on the segment where each preset bias voltage setting is located in the test point sequence, the corresponding segmentation judgment parameters are invoked to determine whether the actual output voltage is within the permissible voltage range corresponding to the preset bias voltage setting. Based on the segmentation judgment parameters of the segment corresponding to each preset bias voltage setting, it is determined whether the error between the center-tap bias voltage monitor reading and the reference feedback value calculated based on the actual output voltage is within the corresponding feedback error range. Furthermore, based on the segmentation judgment parameters corresponding to each preset bias voltage setting value, it is determined whether the error between the center tap bias current monitor reading and the reference current value is within the corresponding current accuracy range.

[0100] Specifically, assuming that in the aforementioned steps the center-tapped bias power supply is switched to the corresponding calibration condition under test, a 10MΩ load is connected between the output terminals of the center-tapped bias power supply, and the main high-voltage output is switched to the corresponding preset high-voltage output state of 7000V, while the interlock signal is enabled. In step 104, the test point sequence corresponding to the center-tapped bias power supply is first called, and the output voltage of the center-tapped bias power supply is set sequentially according to the multiple preset bias voltage settings in the test point sequence, so that the center-tapped bias power supply can be verified at multiple discrete test points.

[0101] In some implementations, the test point sequence may include preset bias voltage settings corresponding to -4000V, -3000V, -2000V, -1000V, -500V, -250V, and -100V. For example, by sequentially setting the corresponding center tap bias setting points, the output voltage of the center tap bias power supply can sequentially reach the above-mentioned multiple target voltage levels, and data can be collected after maintaining the voltage at each setting point for a preset duration, thereby reducing the impact of instantaneous fluctuations on the verification results.

[0102] At each test point corresponding to a preset bias voltage setting, the electrostatic chuck power supply calibration device collects the actual output voltage, the center tap bias voltage monitor reading, and the center tap bias current monitor reading. The actual output voltage characterizes the true output of the center tap bias power supply at the current test point; the center tap bias voltage monitor reading reflects the tracking accuracy of the feedback channel on the actual output voltage; and the center tap bias current monitor reading reflects the measurement accuracy of the current monitor under the current operating conditions.

[0103] Then, the electrostatic chuck power supply calibration device, based on the segment of each preset bias voltage setting in the test point sequence, calls the corresponding segment judgment parameters to determine the output result at the current test point. First, it determines whether the actual output voltage is within the permissible voltage range corresponding to the preset bias voltage setting. For example, when the current test point corresponds to -4000V, it can determine whether the actual output voltage is within the permissible range of -4050V to -3950V. When the current test point corresponds to -3000V, it can determine whether the actual output voltage is within the permissible range of -3037.5V to -2962.5V. For test points such as -2000V, -1000V, -500V, -250V, and -100V, the corresponding permissible voltage range can also be called for determination.

[0104] Based on the actual output voltage determination, it is further determined whether the error between the center tap bias voltage monitor reading and the reference feedback value is within the corresponding feedback error range. Specifically, the reference feedback value can be calculated from the actual output voltage, and the center tap bias voltage monitor reading can be compared with the reference feedback value. For example, for center tap bias voltage feedback, the error between it and the actual output voltage conversion result can be required to be controlled within a preset percentage range, thereby verifying the accuracy of the feedback channel at different test points.

[0105] Further optionally, the plurality of preset bias voltage settings include at least settings corresponding to -4000V, -3000V, -2000V, -1000V, -500V, -250V, and -100V. Furthermore, the error between the center tap bias current monitor reading and the reference current value meets an accuracy requirement of ±3%.

[0106] In addition, the accuracy of the center tap bias current monitor reading is determined. Specifically, a reference current value can be determined based on the externally measured load current, and the center tap bias current monitor reading is compared with the reference current value to determine whether the error falls within the corresponding current accuracy range. For example, the reference current value can be obtained by measuring the actual current on a 10MΩ load and converting it, and then determining whether the center tap bias current monitor reading is within a preset percentage range of the reference current value.

[0107] After completing the acquisition and judgment of all test points corresponding to the preset bias voltage settings, the electrostatic chuck power supply calibration device summarizes the judgment results of each test point to obtain the multi-point linearity verification results and current monitor accuracy verification results for the center tap bias power supply. If the actual output voltage corresponding to each test point is within the permissible voltage range, and the error between the center tap bias voltage monitor reading and the reference feedback value is within the feedback error range, and the error between the center tap bias current monitor reading and the reference current value is within the current accuracy range, then the current center tap bias power supply is determined to meet the preset accuracy conditions. Otherwise, the failed test points and corresponding failed items are recorded as the basis for subsequent rollback verification.

[0108] By using the above method, under actual test conditions corresponding to the center-tap bias power supply, the output linearity, feedback accuracy, and current monitor accuracy can be jointly verified based on multiple discrete test points, thereby improving the objectivity, consistency, and traceability of the verification results.

[0109] As an optional embodiment, in step 104, a test point sequence and segmentation judgment parameters corresponding to the substrate bias power supply are invoked. The test point sequence is used to determine the incremental scan setpoints for the substrate bias power supply output voltage, and the segmentation judgment parameters are used to determine the error thresholds and second derivative thresholds corresponding to different voltage segments. Incremental scanning is performed on the output of the substrate bias power supply according to the multiple setpoints determined by the test point sequence. Multiple samples are collected at each setpoint in the test point sequence, and a monitoring array and a setpoint array are generated based on the collection results. The output voltage error of the substrate bias power supply is calculated based on the monitoring array and the setpoint array, and the second derivative of the output voltage error is calculated based on the output voltage error. According to the voltage segment where each setpoint is located, the corresponding segmentation judgment parameters are invoked to determine whether the output voltage error of the substrate bias power supply is within the corresponding error threshold range, and the scan results are segmented based on whether the second derivative of the output voltage error of the substrate bias power supply is within the corresponding second derivative threshold range.

[0110] Specifically, in the above embodiments, it is assumed that the substrate bias power supply is first switched to the corresponding test calibration condition, and a 6MΩ load is connected between the output of the substrate bias power supply and the reference ground. An interlocking enable logic is then executed on the substrate bias voltage via an interlock signal. Under this condition, a progressive scan from -4000V to 0V is performed on the output of the substrate bias power supply according to the test point sequence corresponding to the substrate bias power supply.

[0111] The incremental scanning in the above embodiments can be achieved by gradually changing the substrate bias setpoint from a starting setpoint of -4000V to an ending setpoint of 0V. At each setpoint, the electrostatic chuck power calibration device collects multiple samples after waiting for a preset stabilization period, and generates a monitoring array and a setpoint array based on the collected samples. The monitoring array is used to characterize the actual monitoring results of the substrate bias power supply during the scanning process, and the setpoint array is used to characterize the target output value corresponding to each setpoint during the scanning process.

[0112] Subsequently, the output voltage error of the substrate bias power supply is calculated based on the monitoring array and the setpoint array, and the second derivative of the output voltage error is calculated based on the output voltage error. Then, according to the voltage segment of each setpoint, the corresponding segment judgment parameters are called to perform segment judgment on the scanning results. Specifically, it is first determined whether the output voltage error corresponding to each setpoint is within the error threshold range corresponding to that segment, and then it is determined whether the second derivative of the output voltage error is within the second derivative threshold range corresponding to that segment. Through the above method, the output linearity and smoothness of the substrate bias power supply during continuous scanning from the high-voltage segment to the low-voltage segment can be jointly verified. After completing the scanning and judgment of all setpoints, the electrostatic chuck power supply calibration device summarizes the judgment results of each setpoint and each segment to obtain the multi-point linearity verification results and current monitor accuracy verification results corresponding to the substrate bias power supply. If the output voltage error corresponding to each setpoint is within the error threshold range, and the second derivative of the output voltage error corresponding to each segment is within the corresponding threshold range, then the substrate bias power supply is determined to meet the preset accuracy conditions. Otherwise, record the failed setpoints or failed segments as the basis for subsequent rollback and review.

[0113] Further optionally, in the above embodiments, calculating the output voltage error of the substrate bias power supply based on the monitoring array and the setpoint array, and calculating the second derivative of the output voltage error based on the output voltage error, includes: calculating the difference between each monitoring value and the corresponding set value point by point based on each monitoring value in the monitoring array and the corresponding set value in the setpoint array; multiplying the difference corresponding to each setpoint by a preset amplification factor to obtain the corresponding output voltage error, and calculating the second derivative of the output voltage error based on the output voltage error.

[0114] Specifically, after completing the gradient scan of the substrate bias power supply from -4000V to 0V, a monitoring array and a setpoint array corresponding to each scan setpoint are obtained. For each setpoint, the difference between the monitored value and the setpoint is first calculated, and then the difference is multiplied by a preset amplification factor to obtain the output voltage error corresponding to that setpoint. For example, the preset amplification factor can be 1000, thereby converting the difference between the monitored value and the setpoint into an easily identifiable output voltage error result.

[0115] After obtaining the output voltage error corresponding to each setpoint, the second derivative of the output voltage error can be calculated based on the relationship between the output voltage errors of adjacent setpoints. Specifically, the first-order change of the output voltage error can be calculated based on the output voltage errors of adjacent setpoints, and then the second derivative of the output voltage error can be calculated based on the difference between adjacent first-order changes. The second derivative of the output voltage error is used to characterize the curvature or smoothness of the output voltage error curve during the scanning process. If the absolute value of the second derivative is small, it indicates that the output voltage error changes relatively smoothly. If the absolute value of the second derivative is large, it indicates that there is a significant abrupt change in the output voltage error between adjacent setpoints.

[0116] Subsequently, in the above embodiments, based on the voltage segment where each set point is located, the corresponding segmentation judgment parameters are called to determine whether the output voltage error is within the corresponding error threshold range, and the scanning result is segmented based on whether the second derivative of the output voltage error is within the corresponding second derivative threshold range. This includes: if the target bias power supply is a substrate bias power supply, a preset voltage range is used as the output voltage error threshold range, and the second derivative of the output voltage error is segmented based on the segment where the output voltage of the substrate bias power supply is located; wherein, the high voltage segment and the low voltage segment are respectively configured with different second derivative thresholds for the output voltage error; based on the output voltage error judgment result corresponding to each set point and the second derivative judgment result corresponding to each voltage segment, scanning judgment results corresponding to each set point and each voltage segment are generated; and the scanning judgment results are summarized to obtain the verification result.

[0117] For example, it can be determined whether the output voltage error corresponding to each set point is within the error threshold range of the corresponding segment. Assuming that -80V to +80V is used as the output voltage error threshold during the scanning process of the substrate bias power supply, it is required that the output voltage error corresponding to each set point is within the range of -80V to +80V.

[0118] Based on the condition that the output voltage error meets the error threshold requirement, the second derivative of the output voltage error is then determined according to the segment in which the output voltage is located. For example, if the target bias power supply is the substrate bias power supply, then -80V to +80V is used as the output voltage error threshold, i.e., it is determined whether the output voltage error corresponding to each set point is within the range of -80V to +80V. Further, the second derivative of the output voltage error is segmented according to the segment in which the output voltage is located. The high-voltage segment and the low-voltage segment are each configured with different second derivative thresholds for the output voltage error. For example, in the high-voltage segment from -3995V to -800V, -3 to +3 is used as the second derivative threshold corresponding to the output voltage error. In the low-voltage segment where the absolute value is less than 800V, -10 to +10 is used as the second derivative threshold corresponding to the output voltage error. For example, within the high-voltage segment, if the output voltage error corresponding to a certain setpoint is within the range of -80V to +80V, and the second derivative of the output voltage error corresponding to that setpoint is within the range of -3 to +3, then the setpoint and its segment are deemed to meet the high-voltage segment requirements. Within the low-voltage segment, if the output voltage error corresponding to a certain setpoint is still within the range of -80V to +80V, and its second derivative is within the range of -10 to +10, then the setpoint and its segment are deemed to meet the low-voltage segment requirements. Conversely, if the output voltage error or its second derivative exceeds the corresponding threshold range, then the setpoint or segment is deemed to have failed verification.

[0119] By using the above method, it is possible not only to verify whether the output voltage error of the substrate bias power supply meets the accuracy requirements throughout the entire scanning range, but also to verify whether its error curve has the expected smoothness in different voltage segments, thereby improving the accuracy of judging the linearity characteristics and dynamic change characteristics of the substrate bias power supply.

[0120] Optionally, in step 104, before performing multi-point linearity verification and current monitor accuracy verification, a warm-up timing can also be performed. Upon receiving a skip warm-up command, the command is confirmed. After confirmation, the warm-up step is skipped, and the corresponding skip information is recorded. This skip information includes at least the trigger time of the skip command, the operator's identifier, and the reason for skipping. The preset duration of the warm-up timing can be 30 minutes. Thus, through these steps, the target bias power supply can reach a relatively stable thermal state before entering the subsequent multi-point linearity verification and current monitor accuracy verification, thereby reducing the impact of device temperature drift or short-term drift on the verification results.

[0121] During the warm-up timing process, the operator can issue a skip warm-up command through the human-machine interface. Upon receiving the skip warm-up command, the electrostatic chuck power calibration device confirms it. Confirmation may include at least one of the following: popping up a confirmation window again, requiring the operator to re-enter confirmation information, or requiring the operator to select a reason for skipping. If the confirmation is successful, the warm-up skip operation is executed, and the process directly proceeds to the subsequent multi-point linearity verification and current monitor accuracy verification procedures; if the confirmation fails, the current warm-up timing state is maintained, and the remaining warm-up process continues.

[0122] After performing the preheating skip operation, the electrostatic chuck power calibration device records the corresponding skip information, which includes at least the trigger time of the skip command, the operator's identification, and the reason for the skip. This method allows for process tracking of the preheating skip action while retaining the flexibility of manual skipping, thereby improving the traceability of subsequent verification results.

[0123] For example, refer to Figure 2 After the target bias power supply completes zero bias calibration, zero current calibration, and gain switching adjustment, a 30-minute warm-up timer begins, displaying "29 minutes and 35 seconds remaining" on the human-machine interface. If the operator clicks "Skip Warm-up" for maintenance verification, a confirmation interface pops up, requiring the operator to confirm again whether to skip the warm-up and select "Retest after component replacement" as the reason for skipping. After confirmation, the warm-up timer stops, the current trigger time, the currently logged-in operator ID, and the reason for skipping are recorded, and subsequent verification steps proceed.

[0124] Optionally, upon receiving a skip warm-up instruction, the system can also perform permission verification on the currently logged-in account to determine whether it is a high-level operation account with pre-warm-up skip privileges and whether its permission level exceeds a preset threshold. If the currently logged-in account does not meet the permission requirements, the pre-warm-up skip operation will be refused, and an insufficient permission message will be displayed on the user interface. If the currently logged-in account meets the permission requirements, the system will proceed to a risk confirmation process.

[0125] In the risk confirmation process, a preset risk confirmation code entered by the currently logged-in account is received and verified. Verification may include comparing the entered risk confirmation code with a pre-stored code in the system, verifying whether the code was entered within a valid time window, and confirming whether it is bound to the currently logged-in account. If the verification fails, the warm-up skip operation is terminated. If the verification passes, the warm-up skip operation is executed, and the calibration data corresponding to this calibration is marked as risky.

[0126] After completing the warm-up skip, record the account identifier, permission level, risk confirmation code, and trigger time corresponding to the warm-up skip operation for the advanced operation account. In some implementations, the risk confirmation result and the identifier of this calibration task can also be recorded. Through these methods, high-risk warm-up skip behaviors can be linked to the corresponding operator, permission level, and confirmation process, thereby improving the traceability of abnormal calibration behaviors.

[0127] For example, when 18 minutes remain in the 30-minute warm-up timer, the currently logged-in account issues a command to skip the warm-up. First, the system reads the account information to determine if it is a high-level operation account with warm-up skip privileges, and if its privilege level is higher than a preset threshold. Then, a risk confirmation window pops up on the human-machine interface, requiring the high-level operation account to enter a preset risk confirmation code. If the entered risk confirmation code passes verification, the warm-up skip operation is executed, and the calibration data corresponding to the current center tap bias power supply or substrate bias power supply is marked as risky. Afterwards, the system records the account identifier, privilege level, entered risk confirmation code, and the trigger time of this warm-up skip operation, and proceeds to the subsequent multi-point linearity verification and current monitor accuracy verification processes.

[0128] In another optional embodiment, when the target bias power supply is a center-tap bias power supply, the verification results also include the clamping voltage and center-tap bias voltage test results. Specifically, under different center-tap bias voltage settings, an incremental scan is performed on the main high-voltage output to obtain the main high-voltage output monitoring value and the corresponding setting value; the clamping voltage error is calculated based on the main high-voltage output monitoring value and the corresponding setting value to determine whether the main high-voltage output establishment characteristics under different center-tap bias voltages meet the preset conditions.

[0129] Specifically, after completing the calibration, linearity verification, and current monitor accuracy verification of the center-tap bias power supply, further testing of the clamping voltage and center-tap bias voltage can be performed. During this test, a corresponding center-tap bias voltage setpoint is set, and an incremental scan is performed on the main high-voltage output under this center-tap bias voltage. During the scan, the center-tap bias setpoint is iterated sequentially to multiple preset bias voltages, and the main high-voltage output is triggered to perform an incremental scan at each bias voltage. This allows the acquisition of the main high-voltage output monitoring value and its corresponding main high-voltage output setpoint, and the clamping voltage error is calculated based on the main high-voltage output monitoring value and the corresponding setpoint. By comparing the clamping voltage error distribution under different center-tap bias voltages, it can be determined whether the output settling characteristics of the main high-voltage output under different center-tap bias voltages meet the preset requirements.

[0130] In some embodiments, the different center tap bias voltage setting values may include a plurality of bias voltages. Based on the plurality of center tap bias voltage setting values, a linkage test of the clamp voltage and the center tap bias voltage is performed to verify the output establishment stability of the main high-voltage output under different center tap bias loads, which specifically includes: after completing the calibration of the center tap bias power supply, the linearity verification and the accuracy verification of the current monitor, a plurality of center tap bias voltage setting values are set, and the plurality of center tap bias voltage setting values respectively represent different bias voltages. Next, for each preset center tap bias voltage setting value, the main high-voltage output is controlled to gradually increase from the starting voltage to the preset upper limit, and a plurality of samples are collected after each setpoint increment, so as to generate a corresponding main high-voltage output monitoring value array and a main high-voltage output setpoint array. For each bias voltage, it is determined that the clamp voltage errors of all sampling points all satisfy the preset clamp voltage error range, and if all are satisfied, it is determined that the output establishment characteristic under the current bias voltage is qualified. If there is a clamp voltage error exceeding the preset range under any bias voltage, the unpassed test result is recorded as a basis for subsequent calibration adjustment or troubleshooting. The above test may be started synchronously or asynchronously according to actual test requirements or test environments, which is not limited in the present application.

[0131] For example, after completing the calibration of the center tap bias power supply, the linearity verification and the accuracy verification of the current monitor, a plurality of center tap bias voltage setting values may be set, including but not limited to the center tap bias voltage setting values corresponding to -100V, -200V, -400V, -500V, -600V, -800V, -1000V and -4000V in sequence. Further, for each preset center tap bias voltage setting value, the main high-voltage output is controlled to gradually increase from the starting voltage to the preset upper limit, and a plurality of samples are collected after each setpoint increment, so as to generate a corresponding main high-voltage output monitoring value array (denoted as Clamp_Mon[i]) and a main high-voltage output setpoint array (denoted as Clamp_Set[i]). Through the above manner, it can be verified whether the establishment process of the main high-voltage output under the influence of different center tap bias loads is stable and consistent.

[0132] Alternatively, in the above example, the clamping voltage error is calculated according to the following formula: ClampError=(Clamp_Mon[i]-Clamp_Set[i])×700, where ClampError is the clamping voltage error (unit: V), Clamp_Mon[i] is the main high-voltage output monitoring array value at the i-th sampling point (unit: kV), and Clamp_Set[i] is the main high-voltage output setpoint array value at the i-th sampling point (unit: kV). The clamping voltage error is then determined within the output range of 900V to 3000V to meet the requirement that the clamping voltage error is within the range of -50V to +50V, i.e., -50V. <Clamp Error<+50V。

[0133] Specifically, during the incremental scanning process of the main high-voltage output, the electrostatic chuck power calibration device can control the clamping setpoint to start from a lower clamping voltage value and gradually increase it to a preset upper limit. Multiple samples are collected after each setpoint increment to generate a main high-voltage output monitoring array and a corresponding setpoint array. The initial voltage value of the clamping setpoint can be set according to the actual scenario and is not limited here. Subsequently, the clamping voltage error is calculated for each sampling point, and the clamping voltage error is judged within a preset evaluation range.

[0134] In some implementations, when the center tap bias voltage is set to a bias voltage other than -4000V, it can be determined whether the clamping voltage error meets the requirement of being within the range of -50V to +50V within the main high-voltage output range of 900V to 3000V. In other words, within the evaluation range, if the clamping voltage error corresponding to each sampling point falls within the range of -50V to +50V, it is determined that the main high-voltage output establishment characteristics under the current center tap bias voltage meet the preset conditions.

[0135] When the center tap bias voltage setting corresponds to -4000V, since this center tap bias voltage has a more significant impact on the main high-voltage output establishment process, the evaluation range of the clamping voltage error can be adjusted to 1900V to 3000V. Within this adjusted evaluation range, it is determined whether the clamping voltage error still meets the requirement of being within the range of -50V to +50V. If it does, it is determined that the main high-voltage output establishment characteristics still meet the preset conditions under the corresponding -4000V center tap bias voltage. If it does not meet the requirements, the corresponding failed test results are recorded as the basis for subsequent review or rollback adjustment.

[0136] Through the above methods, the embodiments of this application can not only verify the output accuracy, feedback accuracy, and current monitor accuracy of the center-tapped bias power supply itself, but also further verify the establishment characteristics of the main high-voltage output under the condition of center-tapped bias, thereby improving the completeness of the verification of the overall working stability of the electrostatic chuck power supply.

[0137] Step 105: Determine whether the preset accuracy conditions are met based on the verification results.

[0138] Step 106: If the preset accuracy conditions are met, the calibration is deemed successful.

[0139] Step 107: If the preset accuracy conditions are not met, locate and review the corresponding calibration adjustment steps based on the failed verification items until the calibration is passed or the number of retests reaches the preset limit.

[0140] After completing the multi-point linearity verification and current monitor accuracy verification corresponding to step 104, the electrostatic chuck power supply calibration device summarizes and analyzes the verification results corresponding to the current target bias power supply.

[0141] The verification results may include at least one of the following: the actual output voltage determination result for each test point, the feedback error determination result, the current monitor accuracy determination result, the error determination result for each segment, the second derivative determination result, and the overall verification conclusion. Based on the above verification results, it is determined whether the current target bias power supply meets the preset accuracy conditions.

[0142] The preset accuracy condition can be understood as follows: within the verification range corresponding to the called test point sequence and segment judgment parameters, each test point, segment, or verification indicator of the current target bias power supply meets the corresponding threshold requirements. In other words, if the multi-point linearity verification result meets the requirements, and the current monitor accuracy verification result also meets the requirements, then the current target bias power supply is determined to meet the preset accuracy condition. If any test point, any segment, or any verification indicator fails to meet the requirements, then the current target bias power supply is determined not to meet the preset accuracy condition.

[0143] When the current target bias power supply is determined to meet the preset accuracy conditions, step 106 is executed, i.e., the calibration is deemed successful. At this time, the electrostatic chuck power supply calibration device can record the calibration results, verification results, and related process data corresponding to the current target bias power supply, and allow it to proceed to subsequent processes. In this way, after completing the calibration adjustment and verification, the system can automatically provide a judgment result on whether the current target bias power supply has passed calibration, thereby reducing inconsistencies caused by manual judgment.

[0144] When it is determined that the current target bias power supply does not meet the preset accuracy conditions, step 107 is executed, that is, the corresponding calibration adjustment steps are located and reviewed based on the failed verification items. In an optional embodiment, the verification type and corresponding test section of the failed verification item are identified; the calibration adjustment steps to be reviewed are determined according to the pre-established mapping relationship between verification items and calibration adjustment steps; wherein, when the deviation of the failed verification item exceeds the allowable range of zero-point error, zero bias calibration is determined as the calibration adjustment step to be reviewed; when the failed verification item is an abnormal current monitor reading, zero current calibration is determined as the calibration adjustment step to be reviewed; when the failed verification item is an error abnormality under range, gear, or full-scale conditions, gain switching adjustment and / or full-scale fine-tuning are determined as the calibration adjustment steps to be reviewed; the calibration adjustment steps to be reviewed are re-executed, and the test points or test sections corresponding to the failed verification items are re-verified, and the number of retests and calibration judgment results are updated according to the re-verification results.

[0145] Specifically, in the above embodiments, the electrostatic chuck power supply calibration device identifies the verification type and corresponding test segment of the currently failed verification item. The verification type can be determined based on the failed verification indicator, including but not limited to at least one of bias voltage output error, bias voltage monitor feedback error, current monitor reading error, and second derivative anomaly of output voltage error. The test segment can be determined based on the setpoint corresponding to the failed verification item, the position of the setpoint in the test point sequence, and the range segment to which the setpoint belongs. Thus, a correspondence between the failed verification indicator, test point, or test segment and subsequent review processing can be established in the verification results.

[0146] Based on the pre-established mapping relationship between verification items and calibration adjustment steps, the calibration adjustment steps corresponding to the failed verification items are determined. Here, the mapping relationship can record the verification type, test section, calibration adjustment steps to be reviewed, and the verification process that needs to be re-executed after review. The mapping relationship can be pre-established based on the correspondence between the target parameters adjusted in each calibration adjustment step and the power output characteristics verified by each verification item.

[0147] Specifically, when the deviation of a failed item exceeds the allowable range of zero-point error, the zero-bias calibration step can be used for verification. For example, zero-bias calibration corresponds to the bias voltage output error under zero-set conditions, zero-current calibration corresponds to the zero-point error of the current monitoring channel, gain switching adjustment corresponds to the monitor gain error under different ranges or levels, and full-scale fine-tuning corresponds to the output error or feedback error under near-full-scale output conditions. The zero-point error can be the difference between the monitor reading to be reported and the corresponding actual value when the bias voltage setpoint is zero. The allowable range of zero-point error can be pre-configured according to the type of the target bias power supply and the accuracy requirements corresponding to the zero-bias calibration. When the abnormal deviation of a failed verification item exceeds the allowable range of zero-point error, it indicates that the target bias power supply still has a static offset that does not meet the requirements under zero-set conditions; therefore, zero-bias calibration is identified as the calibration adjustment step to be verified. When performing zero bias calibration, the corresponding bias voltage setpoint can be reset to zero, the monitor reading and the corresponding actual value can be obtained, and the zero bias potentiometer can be adjusted according to the difference between the two until the difference enters the zero-point error allowable range.

[0148] When the current monitor reading for a failed test item is abnormal, the process can be redirected to the zero-current calibration step for verification. For example, if the error between the current monitor reading and the corresponding reference current value exceeds the current accuracy range for the current test section, zero-current calibration can be identified as the calibration adjustment step to be verified based on a pre-established mapping relationship. The electrostatic chuck power supply calibration device re-recalls the actual value and allowable error range corresponding to zero-current calibration, obtains the current current monitor reading, and adjusts the potentiometer corresponding to zero-current calibration based on the difference between the current monitor reading and the corresponding actual value.

[0149] When a failed test item corresponds to an error anomaly under different ranges, gears, or full-scale conditions, the error can be traced back to the gain switching adjustment step and / or the full-scale fine-tuning step for verification. Specifically, based on the setpoint corresponding to the failed verification item and its corresponding range or gear, it can be determined whether the error anomaly is related to the gain mismatch after range or gear switching. When the error anomaly occurs in the test section corresponding to different ranges or gears, gain switching adjustment can be identified as the calibration adjustment step to be verified; when the error anomaly occurs at a test point or test section close to full-scale output, full-scale fine-tuning can be identified as the calibration adjustment step to be verified; when the same failed verification item involves both range gain and full-scale output error, gain switching adjustment and full-scale fine-tuning can be performed sequentially. By selecting the corresponding adjustment step based on the range, gear, and output section where the anomaly occurs, the repetitive execution of calibration steps unrelated to the anomaly can be reduced.

[0150] After locating the corresponding calibration adjustment step, the electrostatic chuck power supply calibration device recalls the actual value, allowable error range, and guidance prompt rules corresponding to the calibration adjustment step, and executes the adjustment process in steps 102 and 103 again. During the adjustment process, the electrostatic chuck power supply calibration device reacquires the monitor reading to be reported, and determines the adjustment direction and adjustment range of the potentiometer based on the difference between the monitor reading and the corresponding actual value. After each adjustment, the monitor reading is reacquired until the difference falls within the corresponding allowable error range and meets the preset stability condition, thereby completing the calibration adjustment step to be verified.

[0151] After completing the calibration and adjustment following the review, the electrostatic chuck power supply calibration device re-executes the multi-point linearity verification and current monitor accuracy verification corresponding to step 104 to obtain new verification results, and then re-executes the preset accuracy condition judgment in step 105. Specifically, the electrostatic chuck power supply calibration device, based on the test points or test sections corresponding to the failed verification items, re-calls the corresponding test point sequence and segment judgment parameters, and re-verifies the test points or test sections. During re-verification, the output voltage of the target bias power supply can be reset at the corresponding test point, and the actual output voltage, bias voltage monitor reading, and / or current monitor reading can be collected. The judgment is then made using the permissible voltage range, feedback error range, or current accuracy range corresponding to the section to which the test point belongs. Alternatively, the corresponding voltage section can be re-scanned, the output voltage error and corresponding second derivative corresponding to each set point within the voltage section can be calculated, and the judgment is made using the error threshold and second derivative threshold corresponding to the voltage section. When multiple verification items fail, the corresponding test points or test sections can be identified separately for each failed item. After reviewing the corresponding calibration and adjustment steps, each test point or test section can be re-verified sequentially. For multiple failed verification items belonging to the same test section or corresponding to the same calibration and adjustment step, the corresponding test point sequence and segment judgment parameters can be merged to reduce repetitive operating condition switching and data acquisition operations. This enables automated judgment for multi-point linearity verification and current monitor accuracy verification, helping to improve verification efficiency.

[0152] In practical applications, preset accuracy conditions can be configured according to the type of target bias power supply, verification type, and range segmentation.

[0153] Specifically, when the target bias power supply is a center-tap bias power supply, the preset accuracy conditions may include: the actual output voltage corresponding to each discrete test point is within the corresponding permissible voltage range; the error between the center-tap bias voltage monitor reading and the reference feedback value is within the preset feedback error range; and the error between the center-tap bias current monitor reading and the reference current value is within the preset current accuracy range. When there are discrete test points that fail in the center-tap bias power supply, after completing the verification of the corresponding calibration and adjustment steps, the preset bias voltage setting value corresponding to the discrete test point can be reset, and the actual output voltage, center-tap bias voltage monitor reading, and center-tap bias current monitor reading can be re-acquired. The electrostatic chuck power supply calibration device judges the re-acquired results according to the segment judgment parameters corresponding to the segment where the discrete test point is located, to determine whether the discrete test point has passed the re-verification.

[0154] When the target bias power supply is a substrate bias power supply, the preset accuracy conditions may include: the output voltage error corresponding to each scan set point is within a preset error threshold range, and the second derivative of the output voltage error within different voltage segments is within the second derivative threshold range of the corresponding segment. When there are failed test segments in the substrate bias power supply, after completing the verification of the corresponding calibration adjustment steps, a progressive scan can be re-executed according to the scan set points corresponding to the test segment. Multiple samples are collected at each set point, and the output voltage error and its second derivative are calculated based on the regenerated monitoring array and set point array. The electrostatic chuck power supply calibration device calls the error threshold and second derivative threshold corresponding to the test segment to judge the results obtained from the re-scanning to determine whether the test segment has passed the re-verification.

[0155] The preset accuracy condition is only deemed met when all verification items corresponding to the current target bias power supply meet the aforementioned threshold requirements. If the re-verified test point or test section meets the corresponding segmentation judgment parameters and there are no other failed verification items, the calibration judgment result is updated to calibration passed. If the re-verified test point or test section still does not meet the corresponding segmentation judgment parameters, the calibration failed state is maintained, and the calibration adjustment steps that need to be reviewed are determined again according to the mapping relationship.

[0156] Furthermore, the electrostatic chuck power supply calibration device can update the current number of retests each time it enters the verification process and compare it with a preset upper limit. If the current number of retests has not yet reached the preset upper limit, the verification of the corresponding calibration adjustment step and subsequent verification will continue. If the current number of retests reaches the preset upper limit, the current calibration process will be terminated, and the current target bias power supply will be marked as calibration failed or requiring manual verification. By setting a preset upper limit, the problem of infinite retesting caused by local anomalies, device failures, or adjustment failures can be avoided. In one specific embodiment, the number of retests can be recorded separately for each failed verification item, or it can be accumulated uniformly for this target bias power supply calibration task. Regardless of the recording method used, the test points, test sections, reverification results, and updated number of retests for each reverification can be associated and saved for traceability of the verification process.

[0157] For example, during multi-point linearity verification of a center-tap bias power supply, if the feedback error at a discrete test point exceeds the preset feedback error range, this failed item can be mapped to the corresponding gain switching adjustment step, and the operator can be guided to adjust the corresponding potentiometer again. After adjustment, the test point sequence verification for the center-tap bias power supply is re-executed, and the preset accuracy conditions are checked again. For instance, the preset bias voltage setting value for the discrete test point is reset, the corresponding actual output voltage and center-tap bias voltage monitor readings are collected, and it is determined whether the feedback error between the two is within the feedback error range corresponding to the section where the discrete test point is located. If the feedback error meets the requirements, the verification result for the discrete test point is updated to pass. If the feedback error still does not meet the requirements, the number of retests is updated, and the corresponding gain switching adjustment is executed again if the number of retests has not reached the preset upper limit. For example, when the second derivative of the output voltage error in a certain voltage segment exceeds the corresponding threshold during the incremental scanning process of the substrate bias power supply, the electrostatic chuck power supply calibration device can map this failure to a calibration adjustment step related to output linearity, and re-execute the corresponding scan verification after review. If the verification passes after review, the calibration is considered successful. If it still fails after multiple reviews, and the number of retests reaches the preset upper limit, the current process ends and a failure result is output.

[0158] In the above manner, the embodiments of this application can, when the verification results do not meet the preset accuracy conditions, not simply repeat the overall test, but specifically locate and review the corresponding calibration adjustment steps based on the failed verification items, thereby improving review efficiency, reducing invalid retests, and enhancing the automation, consistency and traceability of the entire calibration verification process.

[0159] In this embodiment, by switching to the corresponding calibration condition under test according to the type of the target bias power supply, and performing calibration adjustment steps in a predetermined order under the calibration condition under test, the monitor reading, actual value, difference, and allowable error range are displayed during the calibration process. Based on the difference, guidance prompts are output to instruct the operator to adjust the corresponding potentiometer. After the calibration adjustment is completed, the corresponding test point sequence and segmented judgment parameters are called to perform multi-point linearity verification and current monitor accuracy verification. Guided calibration and automated verification for different bias power supplies can be realized, resulting in consistent and traceable calibration results. This reduces human judgment errors and the probability of invalid retests, providing users with a more efficient and intuitive calibration operation experience, and reducing test time and manual operation costs.

[0160] The above describes an electrostatic chuck power supply calibration method according to an embodiment of this application. The following describes the electrostatic chuck power supply calibration device (e.g., a server) that performs the above electrostatic chuck power supply calibration method.

[0161] See Figure 3 ,like Figure 3 The diagram shows a structural schematic of an electrostatic chuck power supply calibration device. The electrostatic chuck power supply calibration device in this embodiment can achieve the corresponding functions described above. Figure 1 The steps of the electrostatic chuck power supply calibration method performed in the corresponding embodiments are described below. The functions implemented by the electrostatic chuck power supply calibration device can be implemented by hardware or by hardware executing corresponding software. The hardware or software includes one or more modules corresponding to the above functions, and the modules can be software and / or hardware. The functional implementation of the electrostatic chuck power supply calibration device can be found in [reference]. Figure 1 The specific execution process described in the corresponding embodiments is not detailed here. The electrostatic chuck power calibration device includes the following modules: The switching module is configured to switch to the corresponding calibration condition under test based on the type of the target bias power supply. The adjustment module is configured to perform calibration adjustment steps in a predetermined sequence under the calibration condition to be tested; during the calibration adjustment process, it acquires the monitor reading to be reported and the actual value, and adjusts the corresponding potentiometer based on the difference between the monitor reading and the actual value until the difference falls within the allowable error range; The verification module is configured to, after the calibration and adjustment steps are completed, call the corresponding test point sequence and segmentation judgment parameters according to the type of the target bias power supply, perform multi-point linearity verification and current monitor accuracy verification, and obtain the verification results; wherein, the test point sequence for multi-point linearity verification is obtained based on the range segmentation configuration of the target bias power supply, and the verification results are obtained based on the segmentation judgment parameters corresponding to different range segments. The judgment module is configured to determine whether the preset accuracy conditions are met based on the verification results; if the preset accuracy conditions are met, the calibration is deemed to have passed; if the preset accuracy conditions are not met, the corresponding calibration adjustment steps are located and reviewed according to the failed verification items until the calibration is passed or the number of retests reaches the preset limit.

[0162] In some embodiments, the calibration condition under test includes a load matched to the target bias power supply, a main high-voltage output, and an interlocking state; the switching module switches to the corresponding calibration condition under test according to the type of the target bias power supply, and is specifically configured as follows: Determine the type of the target bias power supply; When the target bias power supply is a center-tap bias power supply, determine the first output current value corresponding to the center-tap bias power supply, switch to the first load corresponding to the center-tap bias power supply based on the first output current value, switch the interlock signal to the enabled state, and switch the main high voltage output to the matching first high voltage output state. When the target bias power supply is the substrate bias power supply, the second output current value corresponding to the substrate bias power supply is determined, and the second load corresponding to the substrate bias power supply is switched based on the second output current value. The interlock signal is switched to the enabled state, and the substrate bias voltage set point is applied to the preset negative voltage range.

[0163] In some embodiments, the verification module, based on the type of the target bias power supply, calls the corresponding test point sequence and segmentation judgment parameters to perform multi-point linearity verification and current monitor accuracy verification, and obtains the verification results. Specifically, it is configured as follows: When the target bias power supply is a center tap bias power supply, the test point sequence and segment judgment parameters corresponding to the center tap bias power supply are called. The test point sequence includes multiple preset bias voltage settings, and the segment judgment parameters include the permissible voltage range, feedback error range, and current accuracy range configured for different test point segments. The output voltage of the center tap bias power supply is set sequentially according to multiple preset bias voltage settings in the test point sequence; Collect the actual output voltage, center tap bias voltage monitor reading, and center tap bias current monitor reading corresponding to each preset bias voltage setting value in the test point sequence. Based on the segment in the test point sequence where each preset bias voltage setting value is located, the corresponding segmentation judgment parameter is called to determine whether the actual output voltage is within the permissible voltage range corresponding to the preset bias voltage setting value. Based on the segmentation judgment parameters corresponding to each preset bias voltage setting value, determine whether the error between the center tap bias voltage monitor reading and the reference feedback value calculated based on the actual output voltage is within the corresponding feedback error range. Based on the segmentation judgment parameters corresponding to each preset bias voltage setting value, it is determined whether the error between the center tap bias current monitor reading and the reference current value is within the corresponding current accuracy range, and the verification result is obtained.

[0164] In some embodiments, the verification module, based on the type of the target bias power supply, calls the corresponding test point sequence and segmentation judgment parameters to perform multi-point linearity verification and current monitor accuracy verification, and obtains the verification results. Specifically, it is configured as follows: If the target bias power supply is a substrate bias power supply, then the test point sequence and segmentation judgment parameters corresponding to the substrate bias power supply are called. The test point sequence is used to determine the incremental scan set point of the substrate bias power supply output voltage, and the segmentation judgment parameters are used to determine the error threshold and second derivative threshold corresponding to different voltage segments. According to the multiple set points determined by the test point sequence, a progressive scan is performed on the output of the substrate bias power supply; Multiple samples are collected at each set point in the test point sequence, and a monitoring array and a set point array are generated based on the collection results; The output voltage error is calculated based on the monitoring array and the setpoint array, and the second derivative of the output voltage error is calculated based on the output voltage error. Based on the voltage segment where each set point is located, the corresponding segmentation judgment parameters are called to determine whether the output voltage error is within the corresponding error threshold range. Based on whether the second derivative of the output voltage error is within the corresponding second derivative threshold range, the scanning result is segmented to obtain the verification result.

[0165] In some embodiments, the verification module calculates the output voltage error based on the monitoring array and the setpoint array, and calculates the second derivative of the output voltage error based on the output voltage error, specifically configured as follows: Based on each monitoring value in the monitoring array and the corresponding set value in the set point array, calculate the difference between each monitoring value and the corresponding set value point by point; Multiply the difference corresponding to each set point by a preset amplification factor to obtain the corresponding output voltage error, and calculate the second derivative of the output voltage error based on the output voltage error.

[0166] In some embodiments, the verification module, based on the voltage segment where each set point is located, calls the corresponding segmentation judgment parameter to determine whether the output voltage error is within the corresponding error threshold range, and performs segmentation judgment on the scan result based on whether the second derivative of the output voltage error is within the corresponding second derivative threshold range to obtain the verification result, specifically configured as follows: A preset voltage range is used as the output voltage error threshold range, and the second derivative of the output voltage error is segmented according to the segment in which the output voltage is located; wherein, the high voltage segment and the low voltage segment are respectively configured with different second derivative thresholds of the output voltage error; Based on the output voltage error judgment results corresponding to each set point and the second derivative judgment results corresponding to each voltage segment, the scan judgment results corresponding to each set point and each voltage segment are generated. The verification results are obtained by summarizing the scan judgment results.

[0167] In some embodiments, the adjustment module acquires the monitor reading to be reported and the actual value, and adjusts the corresponding potentiometer based on the difference between the monitor reading and the actual value until the difference falls within the allowable error range. Specifically, it is configured as follows: Obtain the monitor readings to be reported and the corresponding actual values ​​in the current calibration and adjustment step; Determine the difference between the monitor reading and the actual value; If the difference does not fall within the allowable error range, or does not continuously meet the preset stability condition, an adjustment strategy is generated based on the sign and absolute value of the difference. During the execution of the adjustment strategy, the process jumps back to the step of obtaining the monitor reading corresponding to the current calibration adjustment step until the difference enters the allowable error range and continuously meets the preset stability conditions, at which point the current calibration adjustment step is determined to be complete.

[0168] In some embodiments, when the target bias power supply is a center-tap bias power supply, the verification result further includes clamping voltage and center-tap bias voltage results, and the verification module is further configured to: Before obtaining the verification results, an incremental scan was performed on the main high voltage output under different center tap bias voltage settings to obtain the main high voltage output monitoring value and the corresponding setting value; The clamping voltage error is calculated based on the main high voltage output monitoring value and the corresponding set value to determine whether the main high voltage output establishment characteristics meet the preset conditions under different center tap bias voltages.

[0169] In some embodiments, if the preset accuracy condition is not met, the determination module locates and reviews the corresponding calibration adjustment steps based on the failed verification items. Specifically, it is configured to: identify the verification type and corresponding test segment of the failed verification item; determine the calibration adjustment steps to be reviewed based on the pre-established mapping relationship between verification items and calibration adjustment steps; wherein, when the deviation of the failed verification item exceeds the allowable range of zero-point error, zero-bias calibration is determined as the calibration adjustment step to be reviewed; when the failed verification item is an abnormal current monitor reading, zero-current calibration is determined as the calibration adjustment step to be reviewed; when the failed verification item is an abnormal error under range, gear, or full-scale conditions, gain switching adjustment and / or full-scale fine-tuning are determined as the calibration adjustment steps to be reviewed; re-execute the calibration adjustment steps to be reviewed, and re-verify the test points or test segments corresponding to the failed verification items, and update the retest count and calibration determination result based on the re-verification result.

[0170] Having described the electrostatic chuck power supply calibration device proposed in the embodiments of this application, the following describes an embodiment of a computing device proposed in this application. Please refer to... Figure 4 , Figure 4 This is a schematic block diagram of the electrostatic chuck power calibration device provided in an embodiment of this application. The electrostatic chuck power calibration device includes a processor, a memory, and a network interface connected via a device bus, wherein the memory may include a storage medium and internal memory.

[0171] The storage medium can store operating devices and computer programs. The computer program includes program instructions that, when executed, cause the processor to perform any electrostatic chuck power calibration method.

[0172] The processor provides computing and control capabilities to support the operation of the entire electrostatic chuck power calibration equipment.

[0173] The internal memory provides an environment for the execution of computer programs in non-volatile storage media, which, when executed by the processor, enable the processor to perform any electrostatic chuck power calibration method.

[0174] Network interfaces are used for network communication, such as sending assigned tasks.

[0175] Those skilled in the art will understand that Figure 4The structure shown is merely a block diagram of a portion of the structure related to the present application and does not constitute a limitation on the terminal to which the present application is applied. Specific electrostatic chuck power calibration equipment may include more or fewer components than shown in the diagram, or combine certain components, or have different component arrangements. It should be understood that the processor may be a Central Processing Unit (CPU), or other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor may be a microprocessor or any conventional processor.

[0176] In one embodiment, the processor is configured to run a computer program stored in a memory to perform the following steps: switching to the corresponding calibration condition under test based on the type of the target bias power supply; performing calibration adjustment steps in a predetermined order under the calibration condition under test; during the calibration adjustment process, acquiring the monitor reading to be reported and the actual value, and adjusting the corresponding potentiometer based on the difference between the monitor reading and the actual value until the difference falls within the allowable error range; after the calibration adjustment steps are completed, calling the corresponding test point sequence and segmented judgment parameters according to the type of the target bias power supply, performing multi-point linearity verification and current monitor accuracy verification, and obtaining verification results; wherein, the test point sequence for multi-point linearity verification is obtained based on the range segmentation configuration of the target bias power supply, and the verification results are determined based on the segmented judgment parameters corresponding to different range segments; determining whether the preset accuracy conditions are met based on the verification results; if the preset accuracy conditions are met, the calibration is determined to be passed; if the preset accuracy conditions are not met, the corresponding calibration adjustment steps are located and reviewed according to the failed verification items until the calibration is passed or the number of retests reaches a preset upper limit.

[0177] In some embodiments, the calibration condition under test includes a load matched with the target bias power supply, a main high-voltage output, and an interlock state; switching to the corresponding calibration condition under test according to the type of the target bias power supply includes: determining the type of the target bias power supply; when the target bias power supply is a center-tap bias power supply, determining a first output current value corresponding to the center-tap bias power supply, switching to a first load corresponding to the center-tap bias power supply based on the first output current value, enabling the interlock signal, and switching the main high-voltage output to a matched first high-voltage output state; when the target bias power supply is a substrate bias power supply, determining a second output current value corresponding to the substrate bias power supply, switching to a second load corresponding to the substrate bias power supply based on the second output current value, enabling the interlock signal, and applying a substrate bias voltage setpoint to a preset negative voltage range.

[0178] In some embodiments, based on the type of the target bias power supply, the corresponding test point sequence and segmentation judgment parameters are invoked to perform multi-point linearity verification and current monitor accuracy verification, obtaining verification results, including: When the target bias power supply is a center-tapped bias power supply, the test point sequence and segmentation judgment parameters corresponding to the center-tapped bias power supply are invoked. The test point sequence includes multiple preset bias voltage settings, and the segmentation judgment parameters include permissible voltage ranges, feedback error ranges, and current accuracy ranges configured for different test point segments. The output voltage of the center-tapped bias power supply is set sequentially according to the multiple preset bias voltage settings in the test point sequence. The actual output voltage, center-tapped bias voltage monitor reading, and center-tapped bias current monitor reading corresponding to each preset bias voltage setting in the test point sequence are collected. Based on each preset bias voltage setting... The voltage setting value is located in the segment of the test point sequence. The corresponding segment judgment parameters are called to determine whether the actual output voltage is within the permissible voltage range corresponding to the preset bias voltage setting value. Based on the segment judgment parameters of each preset bias voltage setting value corresponding segment, it is determined whether the error between the center tap bias voltage monitor reading and the reference feedback value calculated based on the actual output voltage is within the corresponding feedback error range. Based on the segment judgment parameters of each preset bias voltage setting value corresponding segment, it is determined whether the error between the center tap bias current monitor reading and the reference current value is within the corresponding current accuracy range.

[0179] In some embodiments, based on the type of the target bias power supply, the corresponding test point sequence and segmentation judgment parameters are invoked to perform multi-point linearity verification and current monitor accuracy verification, and the verification results are obtained, including: The system invokes a test point sequence and segmentation judgment parameters corresponding to the substrate bias power supply. The test point sequence determines the incremental scan setpoints for the substrate bias power supply output voltage, and the segmentation judgment parameters determine the error threshold and second derivative threshold corresponding to different voltage segments. A incremental scan is performed on the output of the substrate bias power supply according to the multiple setpoints determined by the test point sequence. Multiple samples are collected at each setpoint in the test point sequence, and a monitoring array and a setpoint array are generated based on the collection results. The output voltage error is calculated based on the monitoring array and the setpoint array, and the second derivative of the output voltage error is calculated accordingly. Based on the voltage segment where each setpoint is located, the corresponding segmentation judgment parameters are invoked to determine whether the output voltage error is within the corresponding error threshold range, and the scan results are segmented based on whether the second derivative of the output voltage error is within the corresponding second derivative threshold range.

[0180] In some embodiments, calculating the output voltage error based on the monitoring array and the setpoint array includes: calculating the difference between each monitoring value and the corresponding setpoint value point by point according to each monitoring value in the monitoring array and the corresponding setpoint value in the setpoint array; multiplying the difference corresponding to each setpoint by a preset amplification factor to obtain the corresponding output voltage error; and calculating the second derivative of the output voltage error based on the output voltage error.

[0181] In some embodiments, based on the voltage segment where each set point is located, the corresponding segmentation judgment parameter is called to determine whether the output voltage error is within the corresponding error threshold range, and the scanning result is segmented based on whether the second derivative of the output voltage error is within the corresponding second derivative threshold range, including: If the target bias power supply is a substrate bias power supply, then a preset voltage range is used as the output voltage error threshold range, and the second derivative of the output voltage error is segmented according to the segment in which the output voltage is located; wherein, the high voltage segment and the low voltage segment are respectively configured with different second derivative thresholds of the output voltage error. Based on the output voltage error judgment results corresponding to each set point and the second derivative judgment results corresponding to each voltage segment, the scan judgment results corresponding to each set point and each voltage segment are generated. The verification results are obtained by summarizing the scan judgment results.

[0182] In some embodiments, acquiring the monitor reading to be reported and the actual value, and adjusting the corresponding potentiometer based on the difference between the monitor reading and the actual value until the difference falls within the allowable error range, includes: acquiring the monitor reading to be reported and the corresponding actual value in the current calibration adjustment step; determining the difference between the monitor reading and the actual value; if the difference does not enter the allowable error range or does not continuously meet the preset stability condition, generating an adjustment strategy based on the sign and absolute value of the difference; during the execution of the adjustment strategy, jumping back to the step of acquiring the monitor reading corresponding to the current calibration adjustment step until the difference enters the allowable error range and continuously meets the preset stability condition, and determining that the current calibration adjustment step is completed.

[0183] In some embodiments, when the target bias power supply is a center-tap bias power supply, the verification result further includes clamping voltage and center-tap bias voltage results. Before obtaining the verification result, the method further includes: performing an incremental scan on the main high-voltage output under different center-tap bias voltage settings to obtain the main high-voltage output monitoring value and the corresponding setting value; calculating the clamping voltage error based on the main high-voltage output monitoring value and the corresponding setting value to determine whether the main high-voltage output establishment characteristics under different center-tap bias voltages meet the preset conditions.

[0184] In some embodiments, if the preset accuracy condition is not met, the corresponding calibration adjustment steps are located and reviewed based on the failed verification items, including: identifying the verification type and corresponding test segment of the failed verification item; determining the calibration adjustment steps to be reviewed based on the pre-established mapping relationship between verification items and calibration adjustment steps; wherein, when the deviation of the failed verification item exceeds the allowable range of zero-point error, zero-bias calibration is determined as the calibration adjustment step to be reviewed; when the failed verification item is an abnormal current monitor reading, zero-current calibration is determined as the calibration adjustment step to be reviewed; when the failed verification item is an abnormal error under range, gear, or full-scale conditions, gain switching adjustment and / or full-scale fine-tuning are determined as the calibration adjustment steps to be reviewed; the calibration adjustment steps to be reviewed are re-executed, and the test points or test segments corresponding to the failed verification items are re-verified, and the number of retests and calibration judgment results are updated based on the re-verification results.

[0185] This application also provides a computer-readable storage medium storing a computer program that, when executed by a processor, causes the processor to implement the steps of the electrostatic chuck power calibration method provided in any embodiment of this application. The computer-readable storage medium may be an internal storage unit of the electrostatic chuck power calibration device described in the foregoing embodiments, such as the hard disk or memory of the electrostatic chuck power calibration device. The computer-readable storage medium may also be an external storage device of the electrostatic chuck power calibration device, such as a pluggable hard disk, smart media card (SMC), secure digital (SD) card, flash card, etc., equipped on the electrostatic chuck power calibration device.

[0186] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A method for calibrating an electrostatic chuck power supply, characterized in that, The method is used to calibrate a target bias power supply, and the method includes: Switch to the corresponding calibration condition under test according to the type of the target bias power supply; Under the specified calibration conditions, calibration adjustment steps are executed in a predetermined sequence. During the calibration adjustment process, the monitor reading to be reported and the actual value are acquired, and the corresponding potentiometer is adjusted based on the difference between the monitor reading and the actual value until the difference falls within the allowable error range. This includes: acquiring the monitor reading to be reported and the corresponding actual value in the current calibration adjustment step; determining the difference between the monitor reading and the actual value; if the difference does not enter the allowable error range or does not continuously meet the preset stability condition, an adjustment strategy is generated based on the sign and absolute value of the difference; during the execution of the adjustment strategy, the process jumps back to the step of acquiring the monitor reading corresponding to the current calibration adjustment step until the difference enters the allowable error range and continuously meets the preset stability condition, at which point the current calibration adjustment step is considered complete. After the calibration and adjustment steps are completed, the corresponding test point sequence and segmentation judgment parameters are called according to the type of the target bias power supply to perform multi-point linearity verification and current monitor accuracy verification, and the verification results are obtained. The test point sequence for multi-point linearity verification is obtained based on the range segmentation configuration of the target bias power supply, and the verification results are obtained based on the segmentation judgment parameters corresponding to different range segments. Based on the verification results, determine whether the preset accuracy conditions are met; if the preset accuracy conditions are met, the calibration is deemed to have passed; if the preset accuracy conditions are not met, locate and review the corresponding calibration adjustment steps according to the failed verification items, until the calibration is passed or the number of retests reaches the preset upper limit.

2. The electrostatic chuck power supply calibration method according to claim 1, characterized in that, The calibration conditions to be tested include the load matched with the target bias power supply, the main high voltage output, and the interlock status. The step of switching to the corresponding calibration condition under test based on the type of the target bias power supply includes: Determine the type of the target bias power supply; When the target bias power supply is a center-tap bias power supply, determine the first output current value corresponding to the center-tap bias power supply, switch to the first load corresponding to the center-tap bias power supply based on the first output current value, switch the interlock signal to the enabled state, and switch the main high voltage output to the matching first high voltage output state. When the target bias power supply is the substrate bias power supply, the second output current value corresponding to the substrate bias power supply is determined, and the second load corresponding to the substrate bias power supply is switched based on the second output current value. The interlock signal is switched to the enabled state, and the substrate bias voltage set point is applied to the preset negative voltage range.

3. The electrostatic chuck power supply calibration method according to claim 1, characterized in that, The step involves calling the corresponding test point sequence and segmentation judgment parameters according to the type of the target bias power supply, performing multi-point linearity verification and current monitor accuracy verification, and obtaining verification results, including: When the target bias power supply is a center tap bias power supply, the test point sequence and segment judgment parameters corresponding to the center tap bias power supply are called. The test point sequence includes multiple preset bias voltage settings, and the segment judgment parameters include the permissible voltage range, feedback error range, and current accuracy range configured for different test point segments. The output voltage of the center tap bias power supply is set sequentially according to multiple preset bias voltage settings in the test point sequence; Collect the actual output voltage, center tap bias voltage monitor reading, and center tap bias current monitor reading corresponding to each preset bias voltage setting value in the test point sequence. Based on the segment in the test point sequence where each preset bias voltage setting value is located, the corresponding segmentation judgment parameter is called to determine whether the actual output voltage is within the permissible voltage range corresponding to the preset bias voltage setting value. Based on the segmentation judgment parameters corresponding to each preset bias voltage setting value, determine whether the error between the center tap bias voltage monitor reading and the reference feedback value calculated based on the actual output voltage is within the corresponding feedback error range. Based on the segmentation judgment parameters corresponding to each preset bias voltage setting value, it is determined whether the error between the center tap bias current monitor reading and the reference current value is within the corresponding current accuracy range, and the verification result is obtained.

4. The electrostatic chuck power supply calibration method according to claim 1, characterized in that, The step involves calling the corresponding test point sequence and segmentation judgment parameters according to the type of the target bias power supply, performing multi-point linearity verification and current monitor accuracy verification, and obtaining verification results, including: If the target bias power supply is a substrate bias power supply, then the test point sequence and segmentation judgment parameters corresponding to the substrate bias power supply are called. The test point sequence is used to determine the incremental scan set point of the substrate bias power supply voltage output, and the segmentation judgment parameters are used to determine the error threshold and second derivative threshold corresponding to different voltage segments. According to the multiple set points determined by the test point sequence, a progressive scan is performed on the output of the substrate bias power supply; Multiple samples are collected at each set point in the test point sequence, and a monitoring array and a set point array are generated based on the collection results; The output voltage error of the substrate bias power supply is calculated based on the monitoring array and the setpoint array, and the second derivative of the output voltage error is calculated based on the output voltage error. Based on the voltage segment where each set point is located, the corresponding segmentation judgment parameter is called to determine whether the output voltage error is within the corresponding error threshold range. Based on whether the second derivative of the output voltage error is within the corresponding second derivative threshold range, the scanning result is segmented to obtain the verification result.

5. The electrostatic chuck power supply calibration method according to claim 4, characterized in that, The step of calculating the output voltage error of the substrate bias power supply based on the monitoring array and the setpoint array, and calculating the second derivative of the output voltage error based on the output voltage error, includes: Based on each monitoring value in the monitoring array and the corresponding set value in the set point array, calculate the difference between each monitoring value and the corresponding set value point by point; Multiply the difference corresponding to each set point by a preset amplification factor to obtain the corresponding output voltage error, and calculate the second derivative of the output voltage error based on the output voltage error.

6. The electrostatic chuck power supply calibration method according to claim 4, characterized in that, The method involves segmenting the voltage at each set point, calling the corresponding segmentation judgment parameters, determining whether the output voltage error is within the corresponding error threshold range, and segmenting the scan result based on whether the second derivative of the output voltage error is within the corresponding second derivative threshold range to obtain the verification result, including: A preset voltage range is used as the output voltage error threshold range, and the second derivative of the output voltage error is segmented according to the segment in which the output voltage is located; wherein, the high voltage segment and the low voltage segment are respectively configured with different second derivative thresholds of the output voltage error; Based on the output voltage error judgment results corresponding to each set point and the second derivative judgment results corresponding to each voltage segment, the scan judgment results corresponding to each set point and each voltage segment are generated. The verification results are obtained by summarizing the scan judgment results.

7. The electrostatic chuck power supply calibration method according to claim 1, characterized in that, When the target bias power supply is a center-tap bias power supply, the verification result also includes the clamping voltage and center-tap bias voltage test results. Before obtaining the verification result, the following steps are also included: Under different center tap bias voltage settings, an incremental scan is performed on the main high voltage output to obtain the main high voltage output monitoring value and the corresponding setting value; The clamping voltage error is calculated based on the main high voltage output monitoring value and the corresponding set value to determine whether the main high voltage output establishment characteristics meet the preset conditions under different center tap bias voltages.

8. The electrostatic chuck power supply calibration method according to claim 1, characterized in that, If the preset accuracy condition is not met, the corresponding calibration and adjustment steps are located and reviewed based on the failed verification items, including: Identify the verification type and corresponding test section of the failed verification item; The calibration and adjustment steps to be reviewed are determined based on the pre-established mapping relationship between verification items and calibration and adjustment steps. Specifically, when the deviation of the failed verification item exceeds the allowable range of zero-point error, zero-bias calibration is determined as the calibration and adjustment step to be reviewed. When the failed verification item is an abnormal current monitor reading, zero-current calibration is determined as the calibration and adjustment step to be reviewed. When the failed verification item is an abnormal error under range, gear, or full-scale conditions, gain switching adjustment and / or full-scale fine-tuning are determined as the calibration and adjustment steps to be reviewed. Re-execute the calibration adjustment steps to be reviewed, and re-verify the test points or test sections corresponding to the failed verification items. Update the number of retests and calibration judgment results based on the re-verification results.

9. An electrostatic chuck power supply calibration device, characterized in that, The device is used to calibrate a target bias power supply, and the device includes: The switching module is configured to switch to the corresponding calibration condition under test based on the type of the target bias power supply. The adjustment module is configured to perform calibration adjustment steps in a predetermined sequence under the calibration condition to be tested; during the calibration adjustment process, it acquires the monitor reading to be reported and the actual value, and adjusts the corresponding potentiometer based on the difference between the monitor reading and the actual value until the difference falls within the allowable error range; The adjustment module acquires the monitor reading to be reported and the actual value, and adjusts the corresponding potentiometer based on the difference between the monitor reading and the actual value until the difference falls within the allowable error range. Specifically, it is configured to: acquire the monitor reading to be reported and the corresponding actual value in the current calibration adjustment step; determine the difference between the monitor reading and the actual value; if the difference does not enter the allowable error range or does not continuously meet the preset stability condition, generate an adjustment strategy based on the sign and absolute value of the difference; during the execution of the adjustment strategy, jump back to the step of acquiring the monitor reading corresponding to the current calibration adjustment step until the difference enters the allowable error range and continuously meets the preset stability condition, at which point the current calibration adjustment step is determined to be complete. The verification module is configured to, after the calibration and adjustment steps are completed, call the corresponding test point sequence and segmentation judgment parameters according to the type of the target bias power supply, perform multi-point linearity verification and current monitor accuracy verification, and obtain verification results; wherein, the test point sequence for multi-point linearity verification is obtained based on the range segmentation configuration of the target bias power supply, and the verification results are obtained based on the segmentation judgment parameters corresponding to different range segments. The determination module is configured to determine whether the preset accuracy conditions are met based on the verification results; if the preset accuracy conditions are met, the calibration is determined to be passed; if the preset accuracy conditions are not met, the corresponding calibration adjustment steps are located and reviewed according to the failed verification items until the calibration is passed or the number of retests reaches the preset limit.

10. A computer-readable storage medium, characterized in that, It includes instructions that, when executed on a computer, cause the computer to perform the method as described in any one of claims 1-8.

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