Double track linear cavity vacuum coating machine and using method

Abstract

The present application relates to the technical field of double-track coating technology, and discloses a double-track linear cavity vacuum coating machine and a use method, which comprises a material conveying channel, a process chamber for vacuum coating of materials is arranged on the material conveying channel, and a first conveying track and a second conveying track are installed on the material conveying channel and arranged in parallel. The first conveying track and the second conveying track arranged in parallel are combined with a movable reversing track and a driving switching component to construct a flexible material conveying loop. When the detection device determines that the material coating is unqualified, the driving switching component can drive the reversing track to be connected to the two conveying tracks at the same time, a circulating path is formed, and the material is automatically sent back to the process chamber for re-coating. If the product is qualified, the switching track directly outputs the material. This design realizes online automatic repair of unqualified products without manual intervention, significantly improves the automation level of coating production and the yield of final products.

Description

Technical Field

[0001] This invention relates to the field of dual-track coating technology, and more particularly to a dual-track linear cavity vacuum coating machine and its usage method. Background Technology

[0002] Generally, vacuum coating machines are mainly divided into two types according to the physical state of the target material deposition: evaporation and sputtering. The coating process needs to be carried out under a high vacuum degree and includes many process technologies, such as resistance heating evaporation, electromagnetic heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. Each coating technology direction will generate a variety of specific coating processes according to the actual coating needs, and then the corresponding coating machine will be customized.

[0003] Currently, all existing vacuum coating processes are completed within a single vacuum chamber. In the field of vacuum coating, especially for linear cavity coating equipment, the following technical problems are common: When performing vacuum coating, the transfer cart and materials are usually in a fixed state. For workpieces with complex shapes or requiring uniform coating on multiple sides, it is not possible to easily adjust the horizontal or vertical position of the materials or to flip them in a vacuum environment. This results in poor coating uniformity or requires additional flipping mechanisms, increasing the complexity and cost of the equipment. In some existing rail transport systems, when the transfer vehicle moves on the track, especially when precise positioning is required or when it is subject to external disturbances, it is prone to slippage or positional deviation, which affects the stability and accuracy of the coating process.

[0004] To address this, we designed a dual-track linear cavity vacuum coating machine and its usage method. Summary of the Invention

[0005] The purpose of this invention is to solve the problem that in the prior art, it is not possible to conveniently adjust the position of materials in the horizontal or vertical directions or to flip them in a vacuum environment, which leads to poor coating uniformity or requires an additional flipping mechanism, increasing the complexity and cost of the equipment. Therefore, this invention proposes a dual-track linear cavity vacuum coating machine and its usage method.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A dual-track linear cavity vacuum coating machine includes a material conveying channel, a process chamber for vacuum coating of materials is provided on the material conveying channel, a first transport track and a second transport track are installed in parallel on the material conveying channel, and a reversing track is provided at both ends of the first transport track and the second transport track. One of the reversing tracks moves in the material conveying channel through a drive switching component, and the other reversing track connects the first transport track and the second transport track. The material transport channel is also equipped with a transfer vehicle body that moves on the first transport track, the second transport track and the reversing track. The transfer vehicle body is equipped with a drive positioning component that connects to and moves on the first transport track, the second transport track and the reversing track. The transfer vehicle is also equipped with a deflection and tilting component that drives the transfer vehicle to tilt vertically.

[0007] Preferably, the first transport track, the second transport track, and the reversing track have the same cross-sectional structure. The first transport track includes a vertical rail and a horizontal rail, which are arranged in a vertical cross shape. Multiple side grooves are symmetrically arranged on both sides of the horizontal rail, and the side grooves are arranged linearly.

[0008] Preferably, the bottom of the transfer vehicle body is provided with a track groove, which includes a vertical groove and a horizontal groove, and the vertical groove and the horizontal groove are arranged vertically. The first transport track, the second transport track and the reversing track are arranged in a cross shape and slide in the track groove, and there is a gap between the first transport track, the second transport track and the reversing track and the track groove.

[0009] Preferably, the driving positioning component includes: A conveyor trough is provided, and a conveyor belt is provided inside the conveyor belt. Drive rollers are provided at both ends of the conveyor belt to drive the conveyor belt. The drive rollers are located inside the conveyor trough, and the two drive rollers are tensioned on the conveyor belt by an elastic component. The conveyor belt protrudes from the conveyor groove and connects to the first transport track, the second transport track, and the reversing track.

[0010] Preferably, the driving positioning component further includes: The movable cavity of the support is located on the side wall of the conveying groove, and a movable roller support that slides and extends through an external drive device is provided inside the movable cavity. The movable roller support is H-shaped, and a pressing roller is also provided on the movable cavity of the support. The pressing roller is located between the annular conveyor belts, and the pressing roller abuts against the inner wall of the conveyor belt.

[0011] Preferably, the deflection and reversal assembly includes: The rotating cavity is provided in two symmetrically located on the top of both sides of the horizontal groove. The rotating cavity is provided with a pressing plate that abuts against the first transport track, the second transport track and the reversing track.

[0012] Preferably, the deflection and reversal assembly further includes: The movable cavity is located on the rotating cavity, and a pressing cavity is provided inside the rotating cavity. A pressing column connected to the extrusion plate is provided inside the pressing cavity, and an elastic rubber sleeve is provided on the inner wall of the movable cavity.

[0013] Preferably, the deflection and reversal assembly further includes: A rotating rod is installed inside the moving cavity and slides up and down. The rotating rod is fixed to the top of the lower pressure column. A drive motor connected to the rotating rod is also slidably installed inside the moving cavity.

[0014] Preferably, the process chamber is also equipped with a vacuum assembly and a coating assembly, which coats the materials on the transfer vehicle body.

[0015] A method for using a dual-track linear cavity vacuum coating machine is described below: S1: First, fix the object to be vacuum coated on the transfer car body. Then, place the transfer car body containing the object to be vacuum coated in the first transport track. Then, turn on the peripheral drive mechanism in the drive positioning component to drive the transfer car body to move in the material transport channel. The transfer car body first moves on the first transport track, stops at the process chamber, and completes the vacuum coating of the material. Then, drive the transfer car body to move on the first transport track again and leave the process chamber. Then, the material passes through the reversing track to reach the second transport track. The transport channel is also equipped with a detection device to check whether the material on the transfer vehicle body is qualified. If it is qualified, the drive switching component drives the reversing track to connect with the second transport track and send the qualified material out of the transport channel. If it is not qualified, the drive switching component drives the reversing track to connect with the first transport track and the second transport track to form a path loop and send the unqualified vacuum coating material back to the process room for vacuum coating again through the transfer vehicle body. S2: When the transfer car body moves with the material into the process room, the vacuum component and coating component are turned on and the material on the transfer car body is coated. The external drive device in the transfer trough is turned on to drive the two moving roller brackets to move in the same direction to achieve locking, so as to prevent the transfer car body from sliding on the first transport track. S3: For the vacuum coating and flipping operation of materials in the vertical plane, it is only necessary to turn on the external push mechanism to drive the drive motor in the moving cavity to slide down, thereby realizing the lifting and lowering movement of the transfer vehicle body with the materials in the vertical plane. S4: Then turn on the drive motor to make the rotating rod deflect the pressure column in the pressure chamber, thereby enabling the transfer car body to move horizontally, vertically, and flip over the material in the process chamber.

[0016] The beneficial effects of this invention are as follows: 1. This invention constructs a flexible material transport loop by setting up parallel first and second transport tracks, along with a movable reversing track and a drive switching component. When the detection device determines that the material coating is unqualified, the drive switching component can drive the reversing track to simultaneously connect with the two transport tracks, forming a loop path and automatically sending the material back to the process chamber for re-coating. If the product is qualified, the switching track directly outputs the material. This design enables online automatic rework of defective products without manual intervention, significantly improving the automation level of coating production and the yield rate of the final product.

[0017] 2. This invention controls the movement of the moving roller bracket in the same direction, using the pressing roller and conveyor belt to push the transfer car horizontally within the reserved gap, and can precisely position the pressing roller into the side groove of the horizontal rail to prevent slippage; the external pushing mechanism drives the lower pressing column, making the extrusion plate close to the rail and generating a pushing force, realizing the smooth lifting and lowering of the transfer car in the vertical direction; the drive motor drives the rotating rod and the lower pressing column to deflect, and with the reset action of the elastic rubber sleeve, the extrusion plate pushes against the rail, realizing the controllable flipping of the transfer car. The combination of the above three actions allows for fine adjustment of the material posture according to the process requirements during the coating process, which is especially suitable for workpieces with complex shapes or high uniformity requirements, and greatly improves the coating effect. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a dual-track linear cavity vacuum coating machine proposed in this invention; Figure 2 This is a top view of a dual-track linear cavity vacuum coating machine proposed in this invention; Figure 3 This is a schematic diagram of the transport track in a dual-track linear cavity vacuum coating machine proposed in this invention; Figure 4 This is a schematic diagram of the transfer vehicle body in a dual-track linear cavity vacuum coating machine proposed in this invention; Figure 5 for Figure 4 Enlarged structural diagram at point A; Figure 6 for Figure 4 Enlarged structural diagram at point B; Figure 7 This is a front sectional view of the transfer vehicle body in a dual-track linear cavity vacuum coating machine proposed in this invention.

[0019] In the diagram: 1. Material conveying channel; 2. First transport track; 3. Second transport track; 201. Vertical rail; 202. Horizontal rail; 203. Side groove; 4. Transfer vehicle body; 5. Reversing track; 6. Process chamber; 7. Drive switching assembly; 8. Vertical slot; 9. Horizontal slot; 10. Drive positioning assembly; 101. Conveyor belt; 102. Drive roller; 103. Moving roller bracket; 104. Pressing roller; 105. Support movable cavity; 11. Deflection and flipping assembly; 111. Moving cavity; 112. Pressing cavity; 113. Pressing column; 114. Extrusion plate; 115. Rotating rod; 116. Elastic rubber sleeve; 117. Rotating cavity; 118. Drive motor. Detailed Implementation

[0020] Reference Figures 1-5 A dual-track linear cavity vacuum coating machine includes a material conveying channel 1, a process chamber 6 for vacuum coating of materials is provided on the material conveying channel 1, and a transfer car body 4 that moves on a first transport track 2, a second transport track 3 and a reversing track 5 is also provided in the material conveying channel 1. The object to be vacuum coated is fixedly installed on the transfer car body 4, and then the transfer car body 4 containing the object to be vacuum coated is placed in the first transport track 2.

[0021] The process chamber 6 is also equipped with a vacuum component and a coating component. The coating component coats the materials on the transfer car body 4. Therefore, a new design scheme for a vacuum coating machine that combines the flexibility of a single unit with the high efficiency of continuous operation is proposed. The equipment adopts a multi-channel linear cavity structure. The process chambers 6 are installed on both sides of the material conveying channel 1 and are equipped with independent slide gate valves and transition chambers. By setting up two sets of track groups and multiple transfer cars, multiple materials can be alternately entered into different process chambers 6 for coating, making the idle time of the process chambers extremely short, thereby significantly improving production efficiency. The coating process in the process chamber 6 is existing technology and will not be described in detail here.

[0022] The transfer vehicle body 4 is equipped with a drive positioning component 10 that connects to and moves with the first transport track 2, the second transport track 3 and the reversing track 5. Then, the external drive mechanism in the drive positioning component 10 is activated to drive the drive roller 102 to rotate, which in turn drives the conveyor belt 101 that is close to the first transport track 2, the second transport track 3 and the reversing track 5 to rotate, thereby driving the transfer vehicle body 4 to move in the material transport channel 1.

[0023] The material conveying channel 1 is equipped with a first transport track 2 and a second transport track 3 arranged in parallel. Both ends of the first transport track 2 and the second transport track 3 are provided with a reversing track 5. One of the reversing tracks 5 moves in the material conveying channel 1 through a drive switching component 7, and the other reversing track 5 connects the first transport track 2 and the second transport track 3. It can move on the first transport track 2, the second transport track 3 and the reversing track 5.

[0024] The transfer vehicle body 4 first moves on the first transport track 2, stops at the process chamber 6, and completes the vacuum coating of the material. Then, it moves back on the first transport track 2 and leaves the process chamber 6. It then passes through the reversing track 5 to reach the second transport track 3. The material transport channel 1 is also equipped with a detection device to detect whether the material on the transfer vehicle body 4 is qualified. If it is qualified, the drive switching component 7 drives the reversing track 5 to connect with the second transport track 3, and sends the qualified material out of the material transport channel 1. If it is unqualified, the drive switching component 7 drives the reversing track 5 to connect with the first transport track 2 and the second transport track 3 to form a path loop, and the unqualified vacuum-coated material is sent back to the process chamber 6 through the transfer vehicle body 4 for vacuum coating again.

[0025] The first transport track 2, the second transport track 3, and the reversing track 5 have the same cross-sectional structure. The first transport track 2 includes a vertical rail 201 and a horizontal rail 202. The vertical rail 201 and the horizontal rail 202 are arranged in a vertical cross. Multiple side grooves 203 are symmetrically arranged on both sides of the horizontal rail 202, and the side grooves 203 are arranged linearly.

[0026] The bottom of the transfer vehicle body 4 is provided with a track groove, which includes a vertical groove 8 and a horizontal groove 9. The vertical groove 8 and the horizontal groove 9 are arranged vertically. The first transport track 2, the second transport track 3 and the reversing track 5, which are arranged in a cross shape, slide in the track groove. There is a gap between the first transport track 2, the second transport track 3 and the reversing track 5 and the track groove. The bottom of the transfer vehicle body 4 is provided with a track groove, which includes a vertical groove 8 and a horizontal groove 9. They are arranged vertically. There is a gap between the track groove and the track to facilitate fine adjustment and flipping operation.

[0027] The drive positioning assembly 10 includes a conveyor groove, a conveyor belt 101 is provided in the conveyor groove, and drive rollers 102 are provided at both ends of the conveyor belt 101 to drive the conveyor belt 101 to convey. The drive rollers 102 are provided in the conveyor groove, and the two drive rollers 102 are tensioned to the conveyor belt 101 by an elastic component.

[0028] When the transfer car body 4 carries the material to the process chamber 6, the vacuum component and coating component are turned on and the material on the transfer car body 4 is coated. In the traditional coating method, the transfer car body 4 is fixed, while this solution adopts a method of fine adjustment of the material along with the transfer car body 4, which can effectively solve the inconvenience caused by the material flipping during the vacuum coating process. That is, for the horizontal movement in the left and right directions, it is only necessary to turn on the external drive device in the transfer slot to drive the two moving roller brackets 103 to move in the same direction.

[0029] The conveyor belt 101 protrudes from the conveyor groove and connects with the first transport track 2, the second transport track 3, and the reversing track 5. Since there is a gap between the first transport track 2, the second transport track 3, and the reversing track 5 and the track groove, the pressing roller 104 on the moving roller bracket 103 is pushed and moved by the conveyor belt 101, thereby completing the horizontal movement. Since multiple side grooves 203 are symmetrically arranged on both sides of the horizontal track 202, the extended pressing roller 104, along with the conveyor belt 101, is locked onto the side groove 203 to achieve a latch, thus preventing the transfer vehicle body 4 from sliding on the first transport track 2.

[0030] The drive positioning assembly 10 also includes a support movable cavity 105, which is formed on the side wall of the conveyor trough. A movable roller support 103, which slides and extends via an external drive device, is disposed within the support movable cavity 105. The movable roller support 103 is H-shaped. A pressing roller 104 is also provided on the support movable cavity 105, positioned between the annular conveyor belts 101, and abutting against the inner wall of the conveyor belts 101. The drive positioning assembly 10 includes a conveyor trough, a conveyor belt 101, drive rollers 102, a movable roller support 103, a pressing roller 104, and a support movable cavity 105. The conveyor belt 101 is sleeved on two drive rollers 102 and kept taut by an elastic component, protruding from the conveyor trough and contacting the track surface. The movable cavity 105 of the support is opened on the side wall of the conveyor trough. Inside it is an H-shaped movable roller support 103 that slides and extends via an external drive device. A pressing roller 104 is provided on the support. The pressing roller 104 is located inside the annular conveyor belt 101 and abuts against its inner wall.

[0031] For the vacuum coating and flipping operation of materials in the vertical plane, it is only necessary to activate the external pushing mechanism to drive the drive motor 118 in the moving cavity 111 to slide down. The transfer vehicle body 4 is also equipped with a deflection and flipping assembly 11 that drives the transfer vehicle body 4 to flip in the vertical direction. The deflection and flipping assembly 11 includes a rotating cavity 117. There are two rotating cavities 117, which are symmetrically opened on the top of both sides of the horizontal groove 9. The rotating cavity 117 is equipped with a pressing plate 114 that abuts against the first transport track 2, the second transport track 3 and the reversing track 5. This can push the lower pressing column 113 to slide in the lower pressing cavity 112 to make the pressing plate 114 stick to and push against the first transport track 2. Thus, the transfer vehicle body 4 can carry the material in the vertical plane for lifting and lowering movement.

[0032] The deflection and reversal assembly 11 also includes a moving cavity 111, which is opened on the rotating cavity 117. A pressing cavity 112 is opened in the rotating cavity 117. A pressing column 113 connected to the extrusion plate 114 is provided in the pressing cavity 112. An elastic rubber sleeve 116 is provided on the inner wall of the moving cavity 111.

[0033] The deflection and flipping assembly 11 also includes a rotating rod 115, which is set in the moving cavity 111 and slides up and down. The rotating rod 115 is fixed to the top of the lower pressure column 113. A drive motor 118 connected to the rotating rod 115 is also slidably set in the moving cavity 111. Then, the drive motor 118 is turned on, so that the rotating rod 115 carries the lower pressure column 113 and deflects it in the lower pressure cavity 112. Due to the presence of the elastic rubber sleeve 116, the lower pressure column 113 can have a certain reset effect during the deflection of the extrusion plate 114. At the same time, it can also push the first transport track 2, realize the flipping of the transfer car body 4 on the first transport track 2. Thus, the transfer car body 4 can carry the material in the process chamber 6 to achieve three operations: horizontal movement, vertical movement and flipping.

[0034] The working steps of this invention are as follows: S1: First, the object to be vacuum coated is fixedly mounted on the transfer carriage body 4. Then, the transfer carriage body 4, containing the object to be vacuum coated, is placed in the first transport track 2. Next, the external drive mechanism in the drive positioning assembly 10 is activated to drive the drive roller 102 to rotate, which in turn drives the conveyor belt 101, which is closely attached to the first transport track 2, the second transport track 3, and the reversing track 5, to rotate. This causes the transfer carriage body 4 to move in the material transport channel 1. The transfer carriage body 4 first moves on the first transport track 2, then stops at the process chamber 6, completing the vacuum coating of the material. Then, the transfer carriage body 4 is moved again in the process chamber 6. The material moves on the first transport track 2 and leaves the process chamber 6. Then it passes through the reversing track 5 to reach the second transport track 3. The material transport channel 1 is also equipped with a detection device to detect whether the material on the transfer vehicle body 4 is qualified. If it is qualified, the drive switching component 7 drives the reversing track 5 to connect with the second transport track 3 and send the qualified material out of the material transport channel 1. If it is not qualified, the drive switching component 7 drives the reversing track 5 to connect with the first transport track 2 and the second transport track 3 to form a path loop and send the unqualified vacuum coating material back to the process chamber 6 through the transfer vehicle body 4 for vacuum coating again. S2: When the transfer car body 4 moves with the material to the process chamber 6, the vacuum component and coating component are turned on and the material on the transfer car body 4 is coated. In the traditional coating method, the transfer car body 4 is fixed, while this solution adopts the method of fine adjustment of the material along with the transfer car body 4, which can effectively solve the inconvenience caused by the material flipping during the vacuum coating process. That is, for the horizontal movement, it is only necessary to turn on the external drive device in the conveyor groove to drive the two moving roller brackets 103 to move in the same direction. Since there is a gap between the first transport track 2, the second transport track 3 and the reversing track 5 and the track groove, the pressing roller 104 on the moving roller bracket 103 is pushed to move by the conveyor belt 101, thereby completing the horizontal movement. Since multiple side grooves 203 are symmetrically arranged on both sides of the horizontal rail 202, the extended pressing roller 104 with the conveyor belt 101 is locked on the side groove 203 to achieve a lock, thus preventing the transfer car body 4 from sliding on the first transport track 2. S3: For the vacuum coating and flipping operation of materials in the vertical plane, it is only necessary to turn on the external push mechanism to drive the drive motor 118 in the moving cavity 111 to slide down, thereby pushing the pressure column 113 to slide in the pressure cavity 112 to make the extrusion plate 114 close to and push the first transport track 2, thereby realizing the lifting and lowering movement of the transfer vehicle body 4 with the materials in the vertical plane. S4: Then turn on the drive motor 118, so that the rotating rod 115 carries the lower pressure column 113 to deflect in the lower pressure chamber 112. Due to the presence of the elastic rubber sleeve 116, the lower pressure column 113 can have a certain reset function during the deflection of the extrusion plate 114, and can also push the first transport track 2 to realize the flipping of the transfer car body 4 on the first transport track 2. Thus, the transfer car body 4 can carry the material in the process chamber 6 to realize three operations: horizontal movement, vertical movement and flipping.

[0035] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A dual-track linear cavity vacuum coating machine, comprising a material conveying channel 1, wherein a process chamber 6 for vacuum coating of materials is provided on the material conveying channel 1, characterized in that, The material conveying channel 1 is equipped with a first transport track 2 and a second transport track 3 arranged in parallel. Both ends of the first transport track 2 and the second transport track 3 are provided with a reversing track 5. One of the reversing tracks 5 moves in the material conveying channel 1 through a drive switching component 7, and the other reversing track 5 connects the first transport track 2 and the second transport track 3. The material transport channel 1 is also equipped with a transfer vehicle body 4 that moves on the first transport track 2, the second transport track 3 and the reversing track 5. The transfer vehicle body 4 is equipped with a drive positioning component 10 that connects with and moves on the first transport track 2, the second transport track 3 and the reversing track 5. The transfer vehicle body 4 is also equipped with a deflection and flipping component 11 that drives the transfer vehicle body 4 to flip in the vertical direction.

2. The dual-track linear cavity vacuum coating machine according to claim 1, characterized in that, The first transport track 2, the second transport track 3, and the reversing track 5 have the same cross-sectional structure. The first transport track 2 includes a vertical rail 201 and a horizontal rail 202. The vertical rail 201 and the horizontal rail 202 are arranged in a vertical cross. Multiple side grooves 203 are symmetrically arranged on both sides of the horizontal rail 202, and the side grooves 203 are arranged linearly.

3. The dual-track linear cavity vacuum coating machine according to claim 2, characterized in that, The bottom of the transfer vehicle body 4 is provided with a track groove, which includes a vertical groove 8 and a horizontal groove 9. The vertical groove 8 and the horizontal groove 9 are arranged vertically. The first transport track 2, the second transport track 3 and the reversing track 5, which are arranged in a cross shape, slide in the track groove, and there is a gap between the first transport track 2, the second transport track 3 and the reversing track 5 and the track groove.

4. The dual-track linear cavity vacuum coating machine according to claim 3, characterized in that, The drive positioning component 10 includes: A conveyor trough is provided, and a conveyor belt 101 is provided inside the conveyor trough. Drive rollers 102 are provided at both ends of the conveyor belt 101 to drive the conveyor belt 101 to convey. The drive rollers 102 are provided inside the conveyor trough, and the two drive rollers 102 are tensioned to the conveyor belt 101 by an elastic component. The conveyor belt 101 protrudes from the conveyor groove and is connected to the first transport track 2, the second transport track 3 and the reversing track 5.

5. A dual-track linear cavity vacuum coating machine according to claim 4, characterized in that, The drive positioning component 10 also includes: The support movable cavity 105 is opened on the side wall of the conveying groove, and a movable roller support 103 is provided in the support movable cavity 105, which is telescopically slidable by an external driving device. The movable roller support 103 is H-shaped, and a pressing roller 104 is also provided on the support movable cavity 105. The pressing roller 104 is located between the annular conveyor belts 101, and the pressing roller 104 abuts against the inner wall of the conveyor belts 101.

6. A dual-track linear cavity vacuum coating machine according to claim 5, characterized in that, The deflection and flipping assembly 11 includes: There are two rotating cavities 117, which are symmetrically opened on the top of both sides of the horizontal groove 9. The rotating cavities 117 are equipped with extrusion plates 114 that abut against the first transport track 2, the second transport track 3 and the reversing track 5.

7. A dual-track linear cavity vacuum coating machine according to claim 6, characterized in that, The deflection and flipping assembly 11 also includes: The movable cavity 111 is located on the rotating cavity 117, and the rotating cavity 117 has a pressing cavity 112. The pressing cavity 112 is provided with a pressing column 113 connected to the extrusion plate 114, and the inner wall of the movable cavity 111 is provided with an elastic rubber sleeve 116.

8. A dual-track linear cavity vacuum coating machine according to claim 7, characterized in that, The deflection and flipping assembly 11 also includes: A rotating rod 115 is disposed in the moving cavity 111 and slides up and down. The rotating rod 115 is fixed to the top of the lower pressure column 113. A drive motor 118 connected to the rotating rod 115 is also slidably disposed in the moving cavity 111.

9. A dual-track linear cavity vacuum coating machine according to claim 8, characterized in that, The process chamber 6 is also equipped with a vacuum assembly and a coating assembly, which coats the materials on the transfer vehicle body 4.

10. A method of using a dual-track linear cavity vacuum coating machine, applied to the dual-track linear cavity vacuum coating machine of claim 9, characterized in that... The specific operating method is as follows: S1: First, fix the object to be vacuum coated on the transfer car body 4. Then, place the transfer car body 4 containing the object to be vacuum coated in the first transport track 2. Then, turn on the external drive mechanism in the drive positioning component 10 to drive the transfer car body 4 to move in the material transport channel 1. The transfer car body 4 first moves on the first transport track 2, moves to the process chamber 6 and stops, and completes the vacuum coating of the material. Then, drive the transfer car body 4 to move on the first transport track 2 again and leave the process chamber 6. Then, the material passes through the reversing track 5 to reach the second transport track 3. The material transport channel 1 is also equipped with a detection device to detect whether the material on the transfer vehicle body 4 is qualified. If it is qualified, the drive switching component 7 drives the reversing track 5 to connect with the second transport track 3 and send the qualified material out of the material transport channel 1. If it is not qualified, the drive switching component 7 drives the reversing track 5 to connect with the first transport track 2 and the second transport track 3 to form a path loop and send the unqualified vacuum coating material back to the process chamber 6 through the transfer vehicle body 4 for vacuum coating again. S2: When the transfer car body 4 moves with the material to the process room 6, the vacuum component and coating component are turned on and the material on the transfer car body 4 is coated. The external drive device in the conveying groove is turned on to drive the two moving roller brackets 103 to move in the same direction to achieve locking, so as to prevent the transfer car body 4 from sliding on the first transport track 2. S3: For the vacuum coating and flipping operation of materials in the vertical plane, it is only necessary to turn on the external push mechanism to drive the drive motor 118 in the moving cavity 111 to slide down, thereby realizing the lifting and lowering movement of the transfer vehicle body 4 with the materials in the vertical plane. S4: Then turn on the drive motor 118, so that the rotating rod 115 carries the pressing column 113 to deflect in the pressing chamber 112, thereby enabling the transfer car body 4 to carry the material in the process chamber 6 to perform three operations: horizontal movement, vertical movement and flipping.

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