Vacuum evaporation machine with high efficiency vacuum pumping function

Abstract

The present application relates to the field of evaporation machine, specifically to a vacuum evaporation machine with high efficient vacuum pumping function. It comprises a work main body, an upper chamber and a lower chamber are arranged in the work main body, the upper chamber and the lower chamber are communicated, a planetary rotation material conveying system is arranged on the top of the upper chamber, a crucible system is arranged in the lower chamber, a pre-pumping treatment assembly is arranged on one side of the work main body. The independent pre-pumping treatment assembly is arranged, during the evaporation operation of the work main body, the vacuum box body can be continuously established and maintained with higher vacuum degree by the vacuum pumping equipment in advance, when the work main body is resealed, the work main body can be directly rapidly depressurized by the pre-stored vacuum environment in the vacuum box body, the vacuum pumping preparation time is effectively shortened, the continuous evaporation efficiency of the equipment is improved, and the present application is suitable for batch continuous production.

Description

Technical Field

[0001] This invention relates to the field of vapor deposition machines, specifically a vacuum vapor deposition machine with a high-efficiency vacuum pumping function. Background Technology

[0002] Vacuum evaporation deposition machines are widely used in fields such as optical coating, semiconductor devices, display panels, new energy and precision electronics. They evaporate and deposit materials onto the surface of workpieces in a high vacuum environment to obtain uniform and stable functional films. Therefore, evaporation efficiency and vacuum establishment efficiency directly affect the production cycle and processing cost of the whole machine.

[0003] Existing vacuum evaporation machines require opening the chamber for material removal, cleaning, and reloading after completing the evaporation of a batch of workpieces, after which the chamber is returned to atmospheric pressure. Once a new batch of workpieces is loaded, a vacuum pump is typically used to evacuate the entire chamber from atmospheric pressure until the required vacuum level for evaporation is achieved. Because the chamber is relatively large, this complete vacuuming process is necessary each time, resulting in prolonged evacuation time, reduced continuous production efficiency, and lower equipment utilization.

[0004] Therefore, the urgent need for a vapor deposition machine that can improve the vacuuming efficiency after material replacement has become a technical problem that needs to be solved by those skilled in the art. Summary of the Invention

[0005] The purpose of this invention is to address the deficiencies and shortcomings of existing technologies by providing a reasonably designed vacuum evaporation machine with a high-efficiency vacuum pumping function, which can solve the aforementioned deficiencies.

[0006] To achieve the above objectives, the present invention provides the following technical solution: it includes a working body, wherein an upper chamber and a lower chamber are provided inside the working body, the upper chamber and the lower chamber are connected, a planetary material transfer system is provided at the top of the upper chamber, a crucible system is provided in the lower chamber, and a pre-extraction processing component is provided on one side of the working body.

[0007] Preferably, the pre-evacuation treatment component includes a vacuum chamber disposed on the outer wall of the working body. A connecting main pipe is disposed on one side of the top of the vacuum chamber. An electric gate valve is disposed on the connecting main pipe. A pressure gauge is also disposed on the connecting main pipe, which is located behind the electric gate valve. The other end of the connecting main pipe is disposed on the working body and is connected to the upper chamber. A vacuum suction pipe is disposed on the back of the vacuum chamber and is connected to a vacuum pumping device.

[0008] Preferably, a protective shell is provided at the top of one end of the connecting main pipe located in the upper chamber. The inlet cover at the top of the protective shell is provided with a detachable trash rack. A retaining plate is symmetrically arranged on both sides of the trash rack. A screw is provided on both sides of the protective shell corresponding to the retaining plate. A nut is threaded on the screw and abuts against the retaining plate.

[0009] Preferably, a secondary pipe is provided on one side of the main connecting pipe. One end of the secondary pipe is located behind the electric gate valve, and the other end of the secondary pipe is located in the upper chamber. An electric needle valve is provided on the secondary pipe. A dirt shield is provided on the top of the end of the secondary pipe located in the upper chamber. The inner wall of the dirt shield is connected to the port of the secondary pipe through several connecting posts. A vacuum check valve is provided in the main connecting pipe. The vacuum check valve is located between the pressure gauge and the electric gate valve. A vacuum check valve is provided in the secondary pipe. The vacuum check valve is located behind the electric needle valve.

[0010] Preferably, the main connecting pipe is provided with a loading and unloading slot, a detachable moisture filter cartridge is provided in the loading and unloading slot, and a sealed opening and closing door is provided on the loading and unloading slot.

[0011] Preferably, the top of the vacuum chamber is movably provided with a cleaning door, the cleaning door is provided with a transparent observation window, a pair of fixing plates are provided on one side of the cleaning door, and screw rods are provided on the top of the vacuum chamber corresponding to the two fixing plates. The screw rods are inserted into the fixing plates, and nuts are threaded on the screw rods. The nuts are abutted against the fixing plates. A pair of lights are provided at the bottom of the cleaning door, and the two lights are symmetrically arranged on both sides of the transparent observation window.

[0012] Preferably, a pressure relief valve is provided on one side of the top of the vacuum chamber.

[0013] Preferably, the inner wall of the vacuum chamber is provided with reinforcing ribs.

[0014] The beneficial effects of the invention after adopting the above structure are: 1. By setting up an independent pre-vacuuming process component, the vacuum chamber can be continuously established and maintained in a vacuum environment by the vacuuming equipment during the vapor deposition operation of the main body. When the main body is resealed, the pressure difference between the vacuum chamber and the main body can be used to complete the initial rapid pressure reduction, reducing the time for the external vacuuming equipment to start working from atmospheric pressure. Combined with the original vacuuming system, the subsequent high vacuum is established, thereby shortening the overall vacuum preparation cycle.

[0015] 2. This invention, by setting a secondary pipe outside the main connecting pipe and forming a hierarchical connecting structure with an electric needle valve and an electric gate valve, first uses the secondary pipe to slowly balance the pressure difference between the vacuum chamber and the working body before officially connecting the main channel, and then opens the main connecting pipe to quickly complete the vacuuming. This can effectively reduce the airflow impact caused by the instantaneous pressure difference, improve the stability of the vacuuming process, and at the same time reduce the high-speed dust entrainment and system vibration, which is beneficial to protecting the internal components of the vacuum system.

[0016] 3. By installing protective shells, baffle plates, and baffle covers at the main and secondary pipe inlets respectively, and combining them with moisture filter cartridges to filter the air entering the system, this invention can effectively block vapor deposition particles, impurities, and moisture from entering the vacuum pipeline, reduce the possibility of contamination of vacuum valves and vacuum equipment, maintain the cleanliness of the vacuum system, improve vacuum quality, and reduce the frequency and cost of subsequent maintenance.

[0017] 4. This invention, by setting a transparent observation window, lighting, cleaning and opening / closing door, and repressurization valve in the vacuum chamber, facilitates real-time observation of the internal condition of the chamber by the staff, and enables quick completion of internal cleaning, filter replacement, and maintenance after restoring normal pressure; at the same time, the inner wall of the chamber is equipped with reinforcing ribs, which improves the overall pressure bearing capacity and structural stability of the vacuum chamber, ensuring good reliability and service life of the chamber during long-term repeated vacuuming. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the main working structure of the present invention; Figure 3 This is a schematic diagram of the pre-extraction processing component structure of the present invention; Figure 4 This is a schematic diagram of the pre-extraction processing component from another side of the present invention. Figure 5 This is a schematic diagram of the main communication pipe structure of the present invention; Figure 6 for Figure 5 Enlarged view of point A in the middle; Figure 7 for Figure 5 Enlarged view at point B in the middle; Figure 8 This is a schematic diagram of the structure of the connecting main pipe of the present invention when the sealing opening and closing door is removed; Figure 9 This is a schematic diagram of the cleaning and opening / closing door structure of the present invention; Figure 10 for Figure 3 Enlarged view of point A in the middle.

[0019] Explanation of reference numerals in the attached figures: Pre-extraction processing component 1, vacuum chamber 10, connecting main pipe 11, pressure valve gauge 12, electric gate valve 13, protective shell 14, screw one 15, nut one 16, trash rack 17, clamping plate 18, sealing opening and closing door 19, moisture filter cartridge 110, reinforcing rib 111, vacuum suction pipe 112, auxiliary pipe 113, cleaning opening and closing door 114, transparent observation window 1140, fixing plate 1141, screw two 1142, nut two 1143, lighting lamp 1144, electric needle valve 115, dirt shield 116, connecting column 117, vacuum one-way valve one 118, vacuum one-way valve two 119, loading and unloading slot 120, pressure relief valve 121, working body 2, upper chamber 20, lower chamber 21, crucible system 3, planetary material transfer system 4. Detailed Implementation

[0020] The technical solutions of the embodiments of the invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the invention, and not all of them. Based on the embodiments of the invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the invention.

[0021] like Figures 1-2 As shown, the present invention proposes a vacuum evaporation coating machine with a high-efficiency vacuuming function, which includes a working body 2. The working body 2 is provided with an upper chamber 20 and a lower chamber 21 that are connected vertically. A planetary material transfer system 4 is installed on the top of the upper chamber 20 to drive the workpiece to be evaporated to revolve and rotate. A crucible system 3 is installed in the lower chamber 21 to place the evaporation material and complete the evaporation coating operation. A pre-evaporation treatment component 1 is provided on one side of the working body 2 to shorten the vacuuming time before the evaporation operation. like Figures 3-4 As shown, the pre-evacuation processing component 1 includes a vacuum chamber 10 fixedly installed on the outside of the working body 2. A connecting pipe 11 is provided on the top of the vacuum chamber 10. One end of the connecting pipe 11 is connected to the inside of the vacuum chamber 10, and the other end is connected to the upper chamber 20 of the working body 2. An electric gate valve 13 and a pressure gauge 12 are installed on the connecting pipe 11 in sequence. The pressure gauge 12 is used to detect the pressure change in the connecting pipe 11 in real time, so as to facilitate the control of the vacuuming process. A vacuum suction pipe 112 is provided on the back of the vacuum chamber 10. The vacuum suction pipe 112 is connected to an external vacuum suction device, so that the vacuum chamber 10 can establish a preset vacuum environment in advance. It should be noted that the vacuum chamber 10 in this embodiment is not used to directly bring the working body 2 to the final high vacuum state required for the vapor deposition process after it is connected to the working body 2. Instead, it is used to assist in the initial pressure reduction stage of the vacuum establishment process. In the traditional vacuuming process, when the working body 2 is reduced from the normal pressure state to the low vacuum state, the amount of gas that needs to be discharged is large and the time is long. The process of continuing to descend from the low vacuum to the high vacuum stage is mainly affected by factors such as gas desorption, material release and system leakage. This application pre-pumps the vacuum chamber 10 with the vacuum suction equipment in advance during the equipment operation to keep its interior in a preset vacuum state. When the working body 2 is resealed, the pressure difference between the vacuum chamber 10 and the working body 2 is used to quickly reduce the internal pressure of the working body 2, so that the working body 2 quickly enters the low pressure state. Then, the external vacuum suction equipment continues to complete the subsequent fine suction process, thereby reducing the time required for the equipment to establish a vacuum from the normal pressure. like Figures 5-6 As shown, in order to prevent particulate impurities generated during the vapor deposition process from entering the connecting main pipe 11, a protective shell 14 is installed at one end of the connecting main pipe 11 located in the upper chamber 20. A detachable baffle plate 17 is provided on the top of the protective shell 14. A retaining plate 18 is provided on both sides of the baffle plate 17. A screw 15 is provided on both sides of the protective shell 14. The screw 15 passes through the retaining plate 18 and is locked and fixed by the nut 16. When impurities accumulate on the baffle plate 17, the baffle plate 17 can be quickly removed for cleaning or replacement simply by removing the nut 16. like Figures 5-8 As shown, in order to achieve staged vacuuming, a secondary pipe 113 is provided on one side of the main connecting pipe 11. One end of the secondary pipe 113 is connected to the main connecting pipe 11 behind the electric gate valve 13, and the other end extends into the upper chamber 20. An electric needle valve 115 is installed on the secondary pipe 113. A dirt shield 116 is provided on the end of the secondary pipe 113 located in the upper chamber 20. The dirt shield 116 is connected to the port of the secondary pipe 113 through several connecting posts 117 to prevent particles in the chamber from directly entering the secondary pipe 113. A vacuum check valve 118 is provided inside the main connecting pipe 11, and a vacuum check valve 119 is provided inside the secondary pipe 113, which are used to prevent backflow of gas and improve the stability of vacuuming. To prevent moisture in the air from entering the vacuum system, a loading and unloading slot 120 is provided on the connecting main pipe 11. A detachable moisture filter cartridge 110 is installed in the loading and unloading slot 120 and sealed by a sealing door 19. The staff can replace the filter cartridge regularly to ensure that the inside of the vacuum system is dry. like Figures 9-10As shown, the top of the vacuum chamber 10 is equipped with a cleaning and opening door 114. The cleaning and opening door 114 is detachably connected to the vacuum chamber 10 via a fixing plate 1141, a screw 1142, and a nut 1143, which facilitates maintenance and cleaning of the interior of the vacuum chamber 10 by the staff. A transparent observation window 1140 is provided on the cleaning and opening door 114, and lighting lamps 1144 are provided on both sides of the observation window to facilitate observation of the interior of the chamber. A pressure recovery valve 121 is also provided on the top of the vacuum chamber 10 to restore the internal pressure of the chamber after maintenance. The inner wall of the vacuum chamber 10 is equipped with reinforcing ribs 111 to improve the overall pressure bearing capacity of the chamber.

[0022] Unlike existing structures that use a Loadlock loading cavity to isolate workpiece entry and exit, this application addresses the problem of internal vacuum loss caused by opening the main working body 2 during material change and maintenance of some large vapor deposition equipment. The pre-evaporation treatment component 1 is not used to replace the loading transition cavity, but to provide an auxiliary vacuum environment after the main working body 2 is closed again, so as to reduce the initial evaporation time in the process of re-establishing vacuum and improve the continuous production efficiency of the equipment. When this device is working, after the current batch of products has been vapor-deposited, the operator opens the main body 2 to remove the vapor-deposited workpieces and clean the interior of the upper chamber 20 and the lower chamber 21. At the same time, a new batch of workpieces to be vapor-deposited is placed. During this process, since the main body 2 is in the open state, its interior returns to the normal pressure environment, while the vacuum chamber 10 in the pre-extraction treatment component 1 remains sealed. During the vapor deposition process, an external vacuum suction device needs to be activated to continuously evacuate the vacuum chamber 10 through the vacuum suction pipe 112, so that the vacuum chamber 10 always maintains a high vacuum level and completes the pre-vacuum preparation before the next round of vapor deposition begins. When the main body 2 is shut down again and is ready to be vacuumed, the controller first opens the electric needle valve 115 on the secondary pipe 113. Since the secondary pipe 113 has a smaller diameter, the upper chamber 20 is first slowly connected to the vacuum chamber 10 through the secondary pipe 113, so that the internal pressure of the main body 2 gradually decreases, thereby achieving pressure buffering, avoiding sudden pressure changes caused by instantaneous connection of the main channel, improving the stability of system operation, and reducing the risk of dust and impurities being sucked in by high-speed airflow impact. Once the pressure gauge 12 detects that the pressure difference between the vacuum chamber 10 and the working body 2 has decreased to the preset range, the controller closes the electric needle valve 115 or keeps it slightly open, and at the same time opens the electric gate valve 13 on the connecting main pipe 11, so that the vacuum environment established in the vacuum chamber 10 can quickly act on the working body 2, and the pressure in the upper chamber 20 and the lower chamber 21 can quickly drop to a lower vacuum level. Since the working body 2 no longer needs to rely entirely on external vacuum equipment to gradually evacuate from the normal pressure state, but first uses the vacuum chamber 10 to complete the initial stage of large pressure reduction, the vacuum establishment time can be significantly shortened. Subsequently, by closing the electric gate valve 13 and the electric needle valve 115, the vacuum pumping equipment is turned on to evacuate the working body 2, and the system is further evacuated to the high vacuum state required for the vapor deposition process. After completion, the crucible system 3 is started to carry out the vapor deposition operation. During the vapor deposition process, the protective shell 14, the baffle plate 17, and the baffle cover 116 can prevent vapor deposition particles and impurities from entering the main pipe and the secondary pipe 113. When the vacuum chamber 10 needs maintenance, the relevant valves can be closed, the chamber pressure can be restored through the pressure recovery valve 121, the cleaning door 114 can be removed for internal cleaning, and the internal condition of the chamber can be observed with the help of the transparent observation window 1140 and the lighting lamp 1144, thereby improving maintenance efficiency.

[0023] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of the invention and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of the invention should be included within the scope of protection of the invention. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.

Claims

1. A vacuum evaporation deposition machine with high-efficiency vacuuming function, comprising a working body (2), characterized in that: The main working body (2) is provided with an upper chamber (20) and a lower chamber (21), which are connected. A planetary material transfer system (4) is provided at the top of the upper chamber (20), and a crucible system (3) is provided in the lower chamber (21). A pre-extraction processing component (1) is provided on one side of the main working body (2).

2. The vacuum evaporation machine with high-efficiency vacuuming function according to claim 1, characterized in that: The pre-extraction processing component (1) includes a vacuum chamber (10) set on the outer wall of the working body (2). A connecting pipe (11) is set on one side of the top of the vacuum chamber (10). An electric gate valve (13) is set on the connecting pipe (11). A pressure valve gauge (12) is also set on the connecting pipe (11). The pressure valve gauge (12) is located behind the electric gate valve (13). The other end of the connecting pipe (11) is set on the working body (2) and connected to the upper chamber (20). A vacuum suction pipe (112) is set on the back of the vacuum chamber (10). The vacuum suction pipe (112) is connected to the vacuum pumping equipment. According to the internal volume of the working body (2) in different models of vacuum evaporation equipment and the process requirements, the vacuum chamber (10) can be set to a corresponding effective volume.

3. A vacuum evaporation deposition machine with high-efficiency vacuum pumping function according to claim 2, characterized in that: The connecting main pipe (11) is provided with a protective shell (14) at the top of one end of the upper chamber (20). The entrance cover at the top of the protective shell (14) is provided with a detachable trash rack (17). The trash rack (17) is symmetrically provided with clamping plates (18) on both sides. The protective shell (14) is provided with screws (15) on both sides corresponding to the clamping plates (18). The screws (15) are threaded with nuts (16), and the nuts (16) abut against the clamping plates (18).

4. A vacuum evaporation machine with high-efficiency vacuuming function according to claim 2, characterized in that: A secondary pipe (113) is provided on one side of the main connecting pipe (11). One end of the secondary pipe (113) is located behind the electric gate valve (13), and the other end of the secondary pipe (113) is located in the upper chamber (20). An electric needle valve (115) is provided on the secondary pipe (113). A dirt shield (116) is provided on the top of the end of the secondary pipe (113) located in the upper chamber (20). The inner wall of the dirt shield (116) is connected to the port of the secondary pipe (113) through several connecting posts (117). A vacuum check valve (118) is provided in the main connecting pipe (11). The vacuum check valve (118) is located between the pressure valve gauge (12) and the electric gate valve (13). A vacuum check valve (119) is provided in the secondary pipe (113). The vacuum check valve (119) is located behind the electric needle valve (115).

5. A vacuum evaporation deposition machine with high-efficiency vacuum pumping function according to claim 2, characterized in that: The main connecting pipe (11) is provided with a loading and unloading slot (120), and a detachable moisture filter cartridge (110) is provided in the loading and unloading slot (120). A sealed opening and closing door (19) is provided on the loading and unloading slot (120).

6. A vacuum evaporation deposition machine with high-efficiency vacuum pumping function according to claim 2, characterized in that: The vacuum chamber (10) is movably provided with a cleaning opening and closing door (114) on the top. A transparent observation window (1140) is provided on the cleaning opening and closing door (114). A pair of fixing plates (1141) are provided on one side of the cleaning opening and closing door (114). A screw rod (1142) is provided on the top of the vacuum chamber (10) at the position corresponding to the two fixing plates (1141). The screw rod (1142) passes through the fixing plate (1141). A nut rod (1143) is threaded on the screw rod (1142). The nut rod (1143) abuts against the fixing plate (1141). A pair of lighting lamps (1144) are provided at the bottom of the cleaning opening and closing door (114). The two lighting lamps (1144) are symmetrically arranged on both sides of the transparent observation window (1140).

7. A vacuum evaporation machine with high-efficiency vacuuming function according to claim 2, characterized in that: A pressure relief valve (121) is provided on one side of the top of the vacuum chamber (10).

8. A vacuum evaporation machine with high-efficiency vacuuming function according to claim 2, characterized in that: The inner wall of the vacuum chamber (10) is provided with reinforcing ribs (111).

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