A target material fixing device for a vacuum coating machine

Abstract

The present application relates to vacuum coating machine technical field, specifically to a kind of target material fixing device for vacuum coating machine.It includes fixed frame, further include excitation carriage, slidingly installed on fixed frame, rotating sleeve is provided on excitation carriage, and water-cooling cavity is opened in the bearing swivel base, and bearing swivel base is clamped with target cylinder by clamping structure, and water return cavity is opened in target cylinder and is communicated with water-cooling cavity, and the upper portion of excitation carriage is equipped with locating seat, and magnetic control launch module and two struts are installed between locating seat and excitation carriage, and pressure cap is screw-mounted on locating seat, and the limiting ring limiting target cylinder is rotatably sleeved on pressure cap, water-cooling shaft is arranged at the axial position of target cylinder, water-cooling shaft is rotatably connected with fixed frame by bearing, and water-cooling shaft is arrayed with water-cooling jet and is fixed with helical stirring blade.The beneficial effects of the present application are: through the collaborative configuration of water-cooling shaft, helical stirring blade and water-cooling circulation module, the cooling efficiency and uniformity of target material are improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating machine technology, specifically to a target fixing device for a vacuum coating machine. Background Technology

[0002] Vacuum coating technology is widely used in electronics, optics, aerospace, and other fields. Its core lies in sputtering atoms or molecules from the target surface and depositing them onto the substrate to form a thin film. The target fixing device is a key component of the vacuum coating machine, and its design directly affects the coating quality and production efficiency. Several improved solutions for target fixing devices exist in the prior art. For example, Chinese patent CN221777981U provides a target fixing device for a vacuum coating machine. This device proposes a fixing scheme that uses a bidirectional lead screw and a servo motor to drive two fixed seats to move in opposite directions, thereby accommodating targets of different sizes. It also uses an electro-hydraulic push rod to achieve translational adjustment of the target position. However, the aforementioned prior art and currently known target fixing devices in this field still have the following technical problems: Existing target fixing devices mostly adopt indirect water cooling with backplate or built-in cooling pipes. There are usually thermal interfaces and dead zones in the flow channels between the water coolant and the target being cooled, resulting in limited heat exchange efficiency. Under high-power sputtering conditions, the local temperature rise of the target is significant, which can easily lead to target thermal deformation, accelerated growth of target nodules, and deterioration of film quality. In addition, during the magnetron sputtering process, nodules and loose deposits inevitably form on the target surface. These contaminants will reduce the sputtering rate, affect the purity of the film, and even cause local abnormal discharge of the target. In the existing technology, target surface cleaning usually requires manual processing after vacuum breaking and machine shutdown, or time-consuming methods such as plasma etching. It is impossible to complete online cleaning without interrupting the coating process, which seriously restricts the continuous production cycle of the equipment. At the same time, the movement of the target in the existing technology is singular, making it difficult to achieve a composite movement of rotational sputtering and axial micro-vibration during the sputtering process, and to inhibit nodule growth and improve film uniformity. Based on this, the present invention provides a target fixing device for a vacuum coating machine to solve the problems mentioned in the background art. Summary of the Invention

[0003] This invention addresses the technical problems existing in the prior art by providing a target fixing device for a vacuum coating machine, which solves the problems of insufficient target cooling efficiency and uniformity, and the inability to clean target nodules and deposits online.

[0004] The technical solution of the present invention to solve the above-mentioned technical problems is as follows: A target fixing device for a vacuum coating machine, comprising a fixing frame, and further comprising: An excitation slide is slidably mounted on a fixed frame. A bearing seat is rotatably mounted on the excitation slide. A water-cooling vent cavity is opened inside the bearing seat. A target cylinder is snapped onto the bearing seat through a snap-fit ​​structure. A return water cavity communicating with the water-cooling vent cavity is opened inside the target cylinder. A positioning seat is provided above the excitation slide. A magnetically controlled launch module and two support pillars are installed between the positioning seat and the excitation slide. A pressure cap is threaded onto the positioning seat. A limiting ring for limiting the movement of the target cylinder is rotatably mounted on the pressure cap. The snap-fit ​​structure includes a snap ring fixed on the bearing rotary seat, an annular snap groove connected to the snap ring is opened on the bottom surface of the target cylinder, two annular electrical distribution grooves are opened on the bearing rotary seat, two annular conductive rails are fixedly installed on the bottom surface of the target cylinder, the two annular conductive rails slide and fit with the two annular electrical distribution grooves respectively, a sealing groove is opened on the top surface of the target cylinder, and a sealing convex ring connected to the sealing groove is fixedly installed on the bottom surface of the limiting ring. A power distribution module is installed on the fixed frame. Both the cathode output port and the anode output port of the power distribution module are connected to wires. The other ends of the two wires are respectively electrically connected to two annular power distribution grooves. A central control unit is fixedly installed on the fixed frame. The central control unit is communicatively connected to the power distribution module. A water-cooled shaft is set at the axial position of the target cylinder. The water-cooled shaft is rotatably connected to the fixed frame through a bearing. The water-cooled shaft has an array of water-cooled spray holes and is fixedly fitted with a spiral stirring blade. A liquid guiding ring tube is rotatably sleeved on a bearing rotating seat. The liquid guiding ring tube is slidably connected to a fixed frame. A reflective arc cover is fixedly installed on the liquid guiding ring tube. An insulating brush bag is fixedly installed on the inner wall of the reflective arc cover. Brush bristles are evenly distributed on the inner wall of the insulating brush bag. An air pump is installed on the fixed frame. The air outlet of the air pump is connected to a pumping pipe. The other end of the pumping pipe is connected to the inner cavity of the insulating brush bag. A water-cooled circulation module includes a water-cooled tank mounted on a fixed frame. A refrigeration module and a temperature sensor are installed on the water-cooled tank. The data terminals of both the refrigeration module and the temperature sensor are communicatively connected to a central control unit. A liquid permeation hole is arrayed in the upper inner part of the target cylinder, communicating with a return water chamber. A first guide hole is arrayed in the bottom inner surface of the target cylinder, communicating with a water-cooled exhaust chamber. A second guide hole is arrayed in the top surface of the retaining ring, and the first and second guide holes are adapted to each other. The water cooling system is connected to the water cooling outlet cavity. The bearing rotary seat has through holes arrayed at the corresponding positions inside the liquid guiding ring tube. The liquid guiding ring tube is connected to a return pipe. The other end of the return pipe is connected to the water cooling box. The return pipe is provided with a corrugated metal section. The water cooling box is equipped with a pump body. The pump body's outlet port is connected to a pump outlet pipe. The water cooling shaft has a flow channel with an open bottom end. The other end of the pump outlet pipe is connected to the flow channel through a rotary joint. Each water cooling nozzle is connected to the flow channel. A vibration excitation assembly includes a servo motor fixedly mounted on a fixed frame. An active toothed roller is mounted on the output shaft of the servo motor. A driven toothed disc is fixedly mounted on a bearing seat. The active toothed roller and the driven toothed disc are meshed together. A linear transmission module is fixedly mounted on the fixed frame. An adjusting slide is drivenly connected to the linear transmission module. Two variable-diameter long cams are rotatably mounted on the adjusting slide. Two excitation wheels are rotatably mounted on the excitation slide. The outer surfaces of the two variable-diameter long cams abut against the two excitation wheels respectively. An excitation spring is mounted on the bottom surface of the excitation slide. The other end of the excitation spring is fixedly connected to the fixed frame. The water-cooled shaft and the two variable-diameter long cams are all driven by a servo motor.

[0005] Based on the above technical solution, the present invention can be further improved as follows.

[0006] Optionally, a drive shaft and two wheel axles are rotatably mounted on the fixed frame. A first synchronous belt is mounted on the output shaft of the servo motor. The first synchronous belt is connected to the water-cooled shaft. Synchronous bevel gears are mounted on both the water-cooled shaft and the drive shaft. The two synchronous bevel gears mesh orthogonally. Insertion holes are provided at the axial positions of the two variable-diameter long cams. The two wheel axles are slidably connected to the two insertion holes respectively. The cross-sections of the insertion holes and wheel axles are regular polygons. A second synchronous belt is connected to the drive shaft. Both wheel axles are connected to the second synchronous belt.

[0007] Optionally, the tooth height of the driving tooth roller is 7 times the tooth height of the driven tooth disc, the radial height of the variable diameter long cam decreases linearly, and the axial length of the variable diameter long cam is 6 times the axial length of the exciter wheel.

[0008] Optionally, two guide rails are installed on the fixed frame, and two positioning sliders are fixedly installed on the outer periphery of the reflective arc cover, with the two positioning sliders slidably connected to the two guide rails respectively.

[0009] Optionally, the insulating brush bladder is made of perfluoroether rubber, the brush bristles are made of silicon carbide fiber, the arc of the reflector is 180°, and the reflector is offset from the magnetron emission module by 180°.

[0010] The beneficial effects of this invention are: 1. This invention improves the cooling efficiency and uniformity of the target material through the coordinated configuration of a water-cooled shaft, a spiral agitator, and a water-cooled circulation module. Specifically, the water-cooled shaft is located at the axis of the target cylinder and has arrayed water-cooled nozzles. Together with the water-cooled circulation module, the coolant is directly jetted to impact the inner wall of the target cylinder. At the same time, the spiral agitator rotates with the water-cooled shaft to continuously disturb the water flow and break the laminar flow boundary layer, thereby eliminating the heat conduction interface and flow channel dead zone that exist in traditional backplate indirect water cooling or built-in cooling pipe methods. This effectively reduces the risk of excessive local temperature rise and excessive axial temperature difference of the target material, thereby slowing down the thermal deformation of the target material and the growth rate of nodules on the target surface, and ensuring the stability of the film quality under high-power sputtering conditions.

[0011] 2. This invention integrates rotary sputtering, axial vibration excitation, and online cleaning functions into a single drive and execution system, creating a multi-stage synergistic effect. Specifically, while driving the target cylinder to rotate for sputtering, the vibration excitation component, through the cooperation of a variable-diameter long cam and an excitation spring, causes the target cylinder to superimpose micro-axial vibrations, disturbing the plasma distribution and inhibiting nodule growth. Meanwhile, the inflatable, expandable, insulating brush bladder inside the reflector arc shield can perform online brushing and cleaning by inflating it with an air pump to adhere to the rotating target surface without breaking the vacuum or interrupting the coating process. After resetting, it returns to a non-contact state, avoiding interference with the sputtering path and debris contamination. The coordinated execution of the above-mentioned rotary motion, axial vibration, and online cleaning functions improves the uniformity of the film layer and extends the continuous production cycle of the equipment. Compared with existing single rotating or fixed target devices, it has significant advantages in structural compactness and process adaptability. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of a target fixing device for a vacuum coating machine according to the present invention; Figure 2 For the present invention Figure 1 A schematic diagram of the structure from an upward perspective; Figure 3 For the present invention Figure 2 A schematic diagram of the cross-sectional structure; Figure 4 For the present invention Figure 3 A magnified schematic diagram of the partial structure at point A in the middle; Figure 5 For the present invention Figure 3 A magnified view of the structure at point B in the middle; Figure 6 This is a schematic diagram of the structure of the reflective arc shield of the present invention; Figure 7 This is a schematic diagram of the structure of the water-cooled shaft and water-cooled nozzle of the present invention; Figure 8 This is a schematic diagram of the structure of the excitation carriage and support column of the present invention; Figure 9This is a schematic diagram of the excitation carriage and linear transmission module of the present invention; Figure 10 For the present invention Figure 9 A structural diagram from another angle.

[0013] The attached diagram lists the components represented by each number as follows: 1. Fixed frame; 2. Excitation carriage; 3. Water-cooled shaft; 4. Liquid guiding ring pipe; 5. Reflecting arc cover; 6. Power distribution module; 7. Water-cooled box; 8. Servo motor; 101. Central control unit; 102. Guide rail; 201. Bearing rotating seat; 202. Water-cooled exhaust chamber; 203. Target cylinder; 204. Water return chamber; 205. Positioning seat; 206. Magnetically controlled launch module; 207. Support column; 208. Pressure cap; 209. Limiting ring; 210. Snap ring; 211. Annular electrical distribution groove; 212. Annular conductive rail; 213. Sealing groove; 214. Sealing ring; 301, water-cooled spray nozzle; 302, spiral impeller; 501, insulating brush bag; 502, air pump; 701, refrigeration module; 702, temperature sensor; 703, liquid permeation hole; 704, first guide hole; 705, second guide hole; 706, return pipe; 707, pump outlet pipe; 708, through hole; 801, driving toothed roller; 802, driven toothed disc; 803, linear transmission module; 804, adjusting slide; 805, variable diameter long cam; 806, excitation wheel; 807, excitation spring; 808, drive shaft; 809, wheel axle. Detailed Implementation

[0014] The principles and features of the present invention are described below with reference to the accompanying drawings. The examples given are only for explaining the present invention and are not intended to limit the scope of the present invention.

[0015] The present invention provides the following preferred embodiments. like Figure 1-10 As shown, a target fixing device for a vacuum coating machine includes a fixing frame 1, on which a central control unit 101 is fixedly mounted. The fixing frame 1 has two hinge holes for hinged connection with the housing of the vacuum coating machine. When the target needs to be replaced, the fixing frame 1 is opened, thus quickly providing working space for the target replacement. The device also includes: The excitation slide 2 is slidably mounted on the fixed frame 1. The fixed frame 1 is equipped with a vertically arranged positioning guide, and the positioning guide is provided with a guide groove that is slidably connected to the excitation slide 2. The excitation slide 2 is rotatably mounted on a bearing with a bearing 201. An O-ring is fixedly installed on the outer periphery of the bearing slide 201, and the outer periphery of the O-ring is sealed and fitted with the fixed frame 1. The bearing rotary seat 201 has a water-cooled exhaust cavity 202, and the bearing rotary seat 201 is connected to the target cylinder 203 by a snap-fit ​​structure. The target cylinder 203 is a hollow cylindrical structure with openings at both ends. In a preferred embodiment, the snap-fit ​​structure includes a snap ring 210 fixed on the bearing rotary seat 201, an annular snap groove connected to the snap ring 210 is provided on the bottom surface of the target cylinder 203, and two annular electrical distribution grooves 211 are provided on the bearing rotary seat 201. Two annular electrode distribution grooves 211 are respectively connected to the cathode electrode distribution groove and the anode electrode distribution groove; Two annular conductive rails 212 are fixedly installed on the bottom surface of the target cylinder 203. The two annular conductive rails 212 are slidably attached to two annular electrical distribution grooves 211 respectively. A sealing groove 213 is opened on the top surface of the target cylinder 203. A sealing convex ring 214 connected to the sealing groove 213 is fixedly installed on the bottom surface of the limiting ring 209. A power distribution module 6 is installed on the fixed frame 1. Both the cathode output port and the anode output port of the power distribution module 6 are connected to wires. The other ends of the two wires are electrically connected to two annular power distribution troughs 211 respectively. The central control unit 101 is communicatively connected to the power distribution module 6. The target tube 203 has a return water chamber 204 that communicates with the water cooling vent chamber 202. The excitation slide 2 is provided with a positioning seat 205 above it. The magnetic launch module 206 and two support columns 207 are installed between the positioning seat 205 and the excitation slide 2. A pressure cap 208 is threaded on the positioning seat 205. A limiting ring 209 that limits the target tube 203 is rotatably sleeved on the pressure cap 208. When installing the target cylinder 203, align the annular groove at the bottom of the target cylinder 203 with the retaining ring 210 on the bearing seat 201 and insert it, so that the two annular conductive rails 212 on the bottom surface of the target cylinder 203 slide into the two annular electrical distribution grooves 211 respectively, thus completing the radial positioning and conductive connection of the target cylinder 203. Then tighten the pressure cap 208 on the positioning seat 205, causing the limiting ring 209 to move down, so that the sealing convex ring 214 on the bottom surface of the limiting ring 209 is engaged in the sealing groove 213 on the top surface of the target cylinder 203, thus completing the axial limiting and end face sealing of the target cylinder 203. During operation, the current output by the power distribution module 6 is conducted to the annular power distribution groove 211 through the wire, and then delivered to the target cylinder 203 through the annular conductive rail 212, providing a stable power supply path for sputtering coating. The snap-fit ​​connection method enables quick alignment and installation of the target cylinder 203, reducing the complexity of disassembly and assembly operations; The sliding contact structure of the annular electrical distribution groove 211 and the annular conductive rail 212 can maintain a continuous conductive connection during the rotation of the target cylinder 203 with the bearing rotating seat 201, and can also be used with the snap-fit ​​structure to simplify the wiring steps when replacing the target material. The fitting structure of the sealing ring 214 and the sealing groove 213 can improve the sealing performance of the end face of the target cylinder 203 and reduce the risk of water coolant leakage. The water-cooled shaft 3 is set at the axial position of the target cylinder 203. The water-cooled shaft 3 is rotatably connected to the fixed frame 1 through a bearing. The water-cooled shaft 3 has an array of water-cooled spray holes 301 and a spiral stirring blade 302 is fixedly installed on it. The vibration excitation assembly is configured to drive the excitation slide 2 to reciprocate along the axis of the bearing rotary seat 201 and linearly adjust the amplitude of the excitation slide 2, and drive the bearing rotary seat 201 and the water-cooled shaft 3 to rotate. The liquid guiding ring tube 4 is rotatably sleeved on the bearing rotating seat 201, and the liquid guiding ring tube 4 is slidably connected to the fixed frame 1. Two guide rails 102 are installed on the fixed frame 1, and two positioning sliders are fixedly installed on the outer periphery of the reflective arc cover 5. The two positioning sliders are slidably connected to the two guide rails 102 respectively. A reflective arc shield 5 is fixedly installed on the liquid guiding ring tube 4. The reflective arc shield 5 is made of non-magnetic austenitic stainless steel. An insulating brush bladder 501 is fixedly installed on the inner wall of the reflective arc shield 5. The inner wall of the insulating brush bladder 501 is evenly covered with bristles. An air pump 502 is installed on the fixed frame 1. The air outlet of the air pump 502 is connected to a pumping pipe. The other end of the pumping pipe is connected to the inner cavity of the insulating brush bladder 501.

[0016] The insulating brush bag 501 is made of perfluoroether rubber, the bristles are made of silicon carbide fiber, the arc of the reflector 5 is 180°, and the reflector 5 and the magnetically controlled transmitter module 206 are offset by 180°. During operation, the 180° reflector 5 and the magnetron emission module 206 are arranged at a 180° offset on the side of the target cylinder 203 facing away from the workpiece. During the coating stage, the insulating brush bag 501 remains in a contracted state, and the brush bristles do not contact the outer wall of the target cylinder 203. The reflector 5 serves as a grounded auxiliary anode to constrain the diffusion range of the plasma. When target surface cleaning is required, the air pump 502 fills the insulating brush bag 501 with high-purity argon gas through the air pump pipe. The insulating brush bag 501 expands radially toward the target cylinder 203, so that the bristles adhere to the outer wall of the target cylinder 203. In conjunction with the rotation of the target cylinder 203, the bristles sweep the circumferential surface of the target cylinder 203 to remove nodules and loose deposits attached to the target surface. After cleaning, the insulating brush bladder 501 is depressurized and retracts, the bristles return to their original position and detach from the target surface, restoring the non-contact state; This staggered layout can integrate target cleaning function without obstructing the sputtering path, improve the utilization of cavity space, and have less interference with plasma distribution. The non-contact design reduces brush wear and lowers the risk of abrasive debris contaminating the coating environment. The pneumatic drive structure eliminates the need for complex dynamic seals and transmission mechanisms, exhibits good reliability in a vacuum environment, and can complete online target surface cleaning without breaking the vacuum, which helps extend the continuous production cycle of the equipment. The vibration excitation assembly includes a servo motor 8 fixed on a fixed frame 1, an active toothed roller 801 mounted on the output shaft of the servo motor 8, a driven toothed disc 802 fixed on the bearing rotary seat 201, the active toothed roller 801 and the driven toothed disc 802 meshing and connected, and the tooth height of the active toothed roller 801 is 7 times the tooth height of the driven toothed disc 802. A linear transmission module 803 is fixedly installed on the fixed frame 1. An adjusting slide 804 is connected to the linear transmission module 803. Two variable diameter long cams 805 are rotatably installed on the adjusting slide 804. Two excitation wheels 806 are rotatably installed on the excitation slide 2. The outer wheel surfaces of the two variable diameter long cams 805 abut against the two excitation wheels 806 respectively. The radial height of the variable diameter long cams 805 decreases linearly, and the axial length of the variable diameter long cams 805 is 6 times the axial length of the excitation wheels 806. An excitation spring 807 is installed on the bottom surface of the excitation slide 2. The other end of the excitation spring 807 is fixedly connected to the fixed frame 1. The water-cooled shaft 3 and the two variable-diameter long cams 805 are driven by the servo motor 8. A drive shaft 808 and two wheel axles 809 are rotatably mounted on a fixed frame 1. A first synchronous belt is mounted on the output shaft of the servo motor 8. The first synchronous belt is connected to the water-cooled shaft 3. Synchronous bevel gears are mounted on both the water-cooled shaft 3 and the drive shaft 808. The two synchronous bevel gears mesh orthogonally. Insertion holes are opened at the axial positions of the two variable-diameter long cams 805. The two wheel axles 809 are slidably connected to the two insertion holes respectively. The cross-sections of the insertion holes and the wheel axles 809 are regular polygons. A second synchronous belt is connected to the drive shaft 808. Both wheel axles 809 are connected to the second synchronous belt.

[0017] During operation, the servo motor 8 drives the bearing rotating seat 201 and the target cylinder 203 to rotate synchronously through the meshing transmission of the active toothed roller 801 and the driven toothed disc 802. At the same time, the servo motor 8 drives the water-cooled shaft 3 to rotate via the first synchronous belt. The water-cooled shaft 3 is transmitted to the drive shaft 808 via the synchronous bevel gear, which drives the two wheel shafts 809 to rotate synchronously, thereby driving the variable diameter long cam 805 to rotate. The variable diameter long cam 805 cooperates with the excitation spring 807 to drive the excitation wheel 806 and the excitation slide 2 to reciprocate along the axial direction, so that the target cylinder 203 rotates while superimposed with axial micro-vibration; When amplitude adjustment is required, the linear transmission module 803 drives the adjusting slide 804 to move axially, causing the variable-diameter long cam 805 to generate axial displacement relative to the excitation wheel 806. By utilizing the linear change in the radial height of the variable-diameter long cam 805, the reciprocating stroke of the excitation slide 2 is altered, achieving continuous linear adjustment of the amplitude. A single servo motor 8 synchronously drives the target cylinder 203 to rotate, the water-cooled shaft 3 to rotate, and the axial vibration. The transmission chain structure is compact, and the synchronization of the various moving parts is good. The variable-diameter long cam 805, in conjunction with the linear transmission module 803, allows for online adjustment of vibration amplitude during equipment operation, adapting to the differentiated vibration requirements of different process stages. The axial vibration superimposed with the rotational motion can disturb the flow field of the water-cooled liquid inside the target cylinder 203, enhance the heat exchange effect, and at the same time help to inhibit the growth of nodules on the target surface and improve the stability of the sputtering process.

[0018] The water-cooled circulation module is configured to allow the coolant to circulate through the water-cooled spray hole 301, the return water chamber 204 and the water-cooled exhaust chamber 202. The water-cooled circulation module includes a water-cooled box 7 mounted on a fixed frame 1. A refrigeration module 701 and a temperature sensor 702 are mounted on the water-cooled box 7. The data terminals of the refrigeration module 701 and the temperature sensor 702 are both connected to the central control unit 101. The water-cooled box 7 contains coolant, and the refrigeration module 701 is a semiconductor cooler; The upper inner part of the target cylinder 203 is provided with liquid permeable holes 703, which communicate with the return water cavity 204. The bottom inner surface of the target cylinder 203 is provided with first guide holes 704, which communicate with the water cooling vent cavity 202. The top surface of the retaining ring 210 is provided with second guide holes 705, which are adapted to and communicate with the first guide holes 704 and the second guide holes 705. Each second guide hole 705 is also connected to the water cooling vent cavity 202. The bearing rotating seat 201 has corresponding... The inner side of the liquid guiding ring tube 4 is provided with through holes 708. The liquid guiding ring tube 4 is connected to a return pipe 706. The other end of the return pipe 706 is connected to the water cooling box 7. The return pipe 706 is provided with a corrugated metal section. The water cooling box 7 is equipped with a pump body. The pump body outlet port is connected to a pump outlet pipe 707. The water cooling shaft 3 is provided with a flow channel with an open bottom end. The other end of the pump outlet pipe 707 is connected to the flow channel through a rotary joint. Each water cooling nozzle 301 is connected to the flow channel. During operation, the pump body pumps out the coolant from the water-cooled box 7 and sends it into the flow channel inside the water-cooled shaft 3 through the pump outlet pipe 707 and the rotary joint. The coolant is then sprayed radially through the water-cooled nozzle 301, directly impacting the corresponding area of ​​the inner wall of the target cylinder 203. In conjunction with the spiral agitator 302 rotating with the water-cooled shaft 3, the water flow is disturbed, thus forcibly cooling the inner wall of the target cylinder 203. After heat exchange, the coolant flows into the return water chamber 204 through the liquid permeation hole 703 in the upper part of the target cylinder 203, and then flows into the water cooling exhaust chamber 202 in the bearing rotary seat 201 through the first guide hole 704 and the second guide hole 705. Subsequently, it enters the liquid guiding ring pipe 4 through the through hole 708 on the bearing rotary seat 201, and flows back to the water cooling box 7 through the return liquid pipe 706. The cooling module 701 works in conjunction with the temperature sensor 702 to regulate the temperature of the returning coolant and maintain a stable coolant temperature. The jet impact mode of the water-cooled nozzle 301 can specifically enhance the heat exchange efficiency of the high-heat area of ​​the target cylinder 203, and the spiral blade 302 can break the laminar boundary layer of the water flow and improve the overall cooling uniformity. The graded flow channel design of the return water chamber 204 and the water cooling discharge chamber 202 can enable the coolant to form an orderly circulation path, reduce the flow dead zone, and help reduce the temperature difference between the axial and circumferential directions of the target cylinder 203. The return pipe 706 is equipped with a corrugated metal section, which can adapt to the axial vibration displacement of the excitation slide 2 and ensure the sealing reliability of the cooling pipe under vibration.

[0019] The specific steps for using this invention are as follows: This device is compatible with a hollow cylindrical target tube 203 with a length of 1200mm; In the preparation stage, the target cylinder 203 is installed first. The annular groove at the bottom of the target cylinder 203 is aligned with the retaining ring 210 on the bearing seat 201 and inserted. The two annular conductive rails 212 on the bottom surface of the target cylinder 203 slide into the two annular electrical distribution grooves 211 respectively to complete radial positioning and conductive connection. Then, the pressure cap 208 on the positioning seat 205 is tightened, which drives the limiting ring 209 to move down and make the sealing convex ring 214 snap into the sealing groove 213 on the top surface of the target cylinder 203 to complete the axial limiting and end face sealing of the target cylinder 203. After the coating chamber is closed, the air extraction program is started. During this stage, the target cylinder 203 remains stationary, the vibration excitation component is locked and the amplitude is 0, the water cooling circulation module starts low-flow cooling, the insulating brush 501 remains in a contracted state and the brush bristles do not contact the outer wall of the target cylinder 203. Once the vacuum coating machine's cavity reaches the required vacuum level, it enters the pre-sputtering stage. In the pre-sputtering stage, the target surface cleaning program is initiated. Air pump 502 fills the insulating brush bladder 501 with high-purity argon gas through the pump pipe, causing the bladder to expand radially. The brush bristles adhere to the outer wall of the target cylinder 203. Simultaneously, servo motor 8 drives the bearing rotating seat 201 and the target cylinder 203 to rotate at a low speed of 5 rpm through the meshing of the active toothed roller 801 and the driven toothed disc 802. The vibration excitation component is simultaneously activated, and the axial amplitude of the excitation slide 2 is adjusted to 4 μm. The target cylinder 203 completes a 40-second surface cleaning under the state of rotational superimposed axial micro-vibration, removing the target from the target cylinder 203. After cleaning the nodules and loose deposits attached to the surface, the insulating brush bladder 501 is depressurized and retracted to its original position. Then, the sputtering power supply is started at low power, the coating baffle in the vacuum coating machine is kept closed, the rotation speed of the target cylinder 203 is increased to 8 rpm, and the axial amplitude is adjusted to 7 μm. The target surface is activated and degassed by argon ion bombardment. At the same time, the water cooling circulation module is switched to rated flow operation. The coolant is radially sprayed out from the water cooling nozzle 301 through the internal flow channel of the water cooling shaft 3. The spiral stirring blade 302, which rotates with the water cooling shaft 3, disturbs the water flow and performs forced heat exchange on the inner wall of the target cylinder 203. After the target surface stabilizes, the formal coating process begins. During this process, the coating baffle of the vacuum coating machine is opened, and the target cylinder 203 rotates at a constant speed in one direction to 20 rpm. The linear transmission module 803 moves the adjusting slide 804 to adjust the axial relative position of the variable diameter long cam 805 and the excitation wheel 806, reducing the axial amplitude of the excitation slide 2 to 2 μm. The target cylinder 203 continues to perform sputtering coating under the state of rotation and superimposed micro-vibration. During this process, the cooled water after heat exchange flows into the return flow through the liquid permeation hole 703 in the upper part of the target cylinder 203. The water flows from the water cavity 204, through the first guide hole 704 and the second guide hole 705 into the water-cooled exhaust cavity 202 in the bearing rotary seat 201, and then through the through hole 708 into the liquid guiding ring pipe 4. It then flows back to the water-cooled box 7 through the return liquid pipe 706 with the corrugated metal section. The cooling module 701 and the temperature sensor 702 work together to control and regulate the temperature of the return water to maintain the stability of the water-cooled liquid temperature. The reflective arc shield 5, which is arranged at a 180° offset from the magnetron emission module 206, serves as a grounded auxiliary anode to constrain the plasma diffusion range. The insulating brush bag 501 remains in a contracted state throughout the process and does not interfere with the sputtering process. After the target film thickness is reached, the process enters the final stage of stopping the coating process. During this stage, the sputtering power supply and coating baffle of the vacuum coating machine are turned off simultaneously, the rotation speed of the target cylinder 203 is reduced to 6 rpm, the axial amplitude is adjusted to 5 μm, and this is maintained for 3 minutes to allow the target cylinder 203 to dissipate heat evenly. During this period, the insulating brush bag 501 can be briefly activated to clean the residual deposits on the target surface. Subsequently, the vibration excitation component gradually stops working and the amplitude returns to zero. The target cylinder 203 decelerates to a stationary state, and the water cooling circulation module switches to a low flow cooling mode. After the overall temperature of the vacuum coating machine cavity drops to a safe range, clean gas is introduced to restore atmospheric pressure, and the material discharge and subsequent maintenance operations are completed.

[0020] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A target fixing device for a vacuum coating machine, comprising a fixing frame (1), characterized in that, Also includes: The excitation slide (2) is slidably mounted on the fixed frame (1). The excitation slide (2) is rotatably fitted with a bearing seat (201). A water-cooling vent cavity (202) is opened in the bearing seat (201). A target cylinder (203) is snapped onto the bearing seat (201) through a snap-fit ​​structure. A return water cavity (204) communicating with the water-cooling vent cavity (202) is opened in the target cylinder (203). A positioning seat (205) is provided above the excitation slide (2). A magnetic control launch module (206) and two support pillars (207) are installed between the positioning seat (205) and the excitation slide (2). A pressure cap (208) is threaded onto the positioning seat (205). A limiting ring (209) for limiting the target cylinder (203) is rotatably fitted onto the pressure cap (208). The snap-fit ​​structure includes a snap ring (210) fixed on the bearing rotating seat (201), an annular snap groove connected to the snap ring (210) is opened on the bottom surface of the target cylinder (203), two annular electrical distribution grooves (211) are opened on the bearing rotating seat (201), two annular conductive rails (212) are fixedly installed on the bottom surface of the target cylinder (203), the two annular conductive rails (212) are slidably attached to the two annular electrical distribution grooves (211) respectively, a sealing groove (213) is opened on the top surface of the target cylinder (203), and a sealing convex ring (214) connected to the sealing groove (213) is fixedly installed on the bottom surface of the limiting ring (209). A power distribution module (6) is installed on the fixed frame (1). The cathode output port and anode output port of the power distribution module (6) are connected to wires. The other ends of the two wires are electrically connected to two annular power distribution grooves (211). A central control unit (101) is fixedly installed on the fixed frame (1). The central control unit (101) is communicatively connected to the power distribution module (6). A water-cooled shaft (3) is set at the axial position of the target cylinder (203). The water-cooled shaft (3) is rotatably connected to the fixed frame (1) through a bearing. Water-cooled spray holes (301) are arrayed on the water-cooled shaft (3) and a spiral stirring blade (302) is fixedly installed. A liquid guiding ring tube (4) is rotatably sleeved on a bearing rotating seat (201). The liquid guiding ring tube (4) is slidably connected to a fixed frame (1). A reflective arc cover (5) is fixedly installed on the liquid guiding ring tube (4). An insulating brush bag (501) is fixedly installed on the inner wall of the reflective arc cover (5). Brush bristles are evenly distributed on the inner wall of the insulating brush bag (501). An air pump (502) is installed on the fixed frame (1). The air outlet of the air pump (502) is connected to a pumping pipe. The other end of the pumping pipe is connected to the inner cavity of the insulating brush bag (501). A water-cooled circulation module, comprising a water-cooled box (7) mounted on a fixed frame (1), a refrigeration module (701) and a temperature sensor (702) mounted on the water-cooled box (7), the data terminals of the refrigeration module (701) and the temperature sensor (702) being communicatively connected to a central control unit (101), liquid permeation holes (703) arrayed in the upper inner part of the target cylinder (203), the liquid permeation holes (703) communicating with the return water chamber (204), a first guide hole (704) arrayed in the bottom inner surface of the target cylinder (203), the first guide hole (704) communicating with the water-cooled exhaust chamber (202), and a second guide hole (705) arrayed in the top surface of the retaining ring (210), the first guide hole (705) communicating with the water-cooled exhaust chamber (202), and a second guide hole (705) arrayed in the top surface of the retaining ring (210), the first guide hole (705) communicating with the water-cooled exhaust chamber (202). 4) It is adapted to and connected with the second guide hole (705), and each second guide hole (705) is connected to the water cooling discharge cavity (202). The bearing rotary seat (201) has through holes (708) arrayed at the corresponding liquid guiding ring pipe (4) inside. The liquid guiding ring pipe (4) is connected to the return pipe (706). The other end of the return pipe (706) is connected to the water cooling box (7). The return pipe (706) is provided with a corrugated metal section. The water cooling box (7) is equipped with a pump body. The pump body outlet port is connected to the pump outlet pipe (707). The water cooling shaft (3) has a flow channel with an open bottom end. The other end of the pump outlet pipe (707) is connected to the flow channel through a rotary joint. Each water cooling nozzle (301) is connected to the flow channel. A vibration excitation assembly includes a servo motor (8) fixedly mounted on a fixed frame (1), an active toothed roller (801) mounted on the output shaft of the servo motor (8), a driven toothed disc (802) fixedly mounted on the bearing seat (201), the active toothed roller (801) meshing with the driven toothed disc (802), a linear transmission module (803) fixedly mounted on the fixed frame (1), and an adjusting slide (804) drivingly connected to the linear transmission module (803). Two variable-diameter long cams (805) are rotatably mounted on the slide (804), and two excitation wheels (806) are rotatably mounted on the excitation slide (2). The outer wheel surfaces of the two variable-diameter long cams (805) respectively abut against the two excitation wheels (806). An excitation spring (807) is mounted on the bottom surface of the excitation slide (2). The other end of the excitation spring (807) is fixedly connected to the fixed frame (1). The water-cooled shaft (3) and the two variable-diameter long cams (805) are all driven by a servo motor (8).

2. The target fixing device for a vacuum coating machine according to claim 1, characterized in that, A drive shaft (808) and two wheel axles (809) are rotatably mounted on the fixed frame (1). A first synchronous belt is mounted on the output shaft of the servo motor (8). The first synchronous belt is connected to the water-cooled shaft (3). Synchronous bevel gears are mounted on both the water-cooled shaft (3) and the drive shaft (808). The two synchronous bevel gears mesh orthogonally. Insertion holes are opened at the axial positions of the two variable-diameter long cams (805). The two wheel axles (809) are slidably connected to the two insertion holes respectively. The cross-sections of the insertion holes and the wheel axles (809) are regular polygons. A second synchronous belt is connected to the drive shaft (808). The two wheel axles (809) are connected to the second synchronous belt.

3. The target fixing device for a vacuum coating machine according to claim 1, characterized in that, The tooth height of the active toothed roller (801) is 7 times the tooth height of the driven toothed disc (802), the radial height of the variable diameter long cam (805) decreases linearly, and the axial length of the variable diameter long cam (805) is 6 times the axial length of the exciter wheel (806).

4. The target fixing device for a vacuum coating machine according to claim 1, characterized in that, Two guide rails (102) are installed on the fixed frame (1), and two positioning sliders are fixedly installed on the outer periphery of the reflective arc cover (5). The two positioning sliders are slidably connected to the two guide rails (102) respectively.

5. The target fixing device for a vacuum coating machine according to claim 1, characterized in that, The insulating brush bladder (501) is made of perfluoroether rubber, the brush bristles are made of silicon carbide fiber, the arc of the reflector shield (5) is 180°, and the reflector shield (5) is offset from the magnetically controlled emission module (206) by 180°.

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