A displacement driver and apparatus

Abstract

The application discloses a displacement driver and a device. The displacement driver comprises a bearing mechanism and a switching mechanism. The bearing mechanism is provided with at least a first displacement reduction mechanism and a second displacement reduction mechanism with different reduction ratios. The switching mechanism is used to drive the bearing mechanism to move, so that the first displacement reduction mechanism or the second displacement reduction mechanism is switched to a working position. By integrating at least two displacement reduction mechanisms with different reduction ratios, the switching mechanism is arranged, so that the displacement driver can switch and use the displacement reduction mechanisms with different reduction ratios according to different application scenes, thereby meeting the requirements of micro-positioning with different accuracies.

Description

Technical Field

[0001] This application relates to the field of precision displacement transmission mechanism technology, and in particular to a displacement driver and device. Background Technology

[0002] Precision displacement actuators are core execution components in the fields of micro-nano manipulation, high-precision positioning, and precision equipment. Their technology integrates precision mechanical design, flexible hinge transmission, piezoelectric drive control, and multi-rate displacement output to form a dedicated drive structure with high rigidity, zero backlash, and nanometer-level positioning. In micro-nano operating systems, precision positioning platforms, semiconductor testing equipment, and high-precision execution devices, the displacement reduction mechanism is used in displacement actuators to convert the driven displacement of the piezoelectric actuator into a high-precision micro-displacement output with a specified reduction ratio, ensuring long-term stability and positioning accuracy.

[0003] However, traditional displacement reduction mechanisms are mostly fixed reduction ratio structures, with limited output accuracy, making it difficult to meet the micro-positioning requirements of multiple precisions at the same time. Summary of the Invention

[0004] This application proposes a displacement actuator to effectively solve the technical problem in related technologies that can only provide displacement output of a single accuracy level and do not have a rate switching function.

[0005] This application also proposes an apparatus including the above-described displacement actuator.

[0006] The first aspect of this application provides a displacement actuator, comprising:

[0007] The load-bearing mechanism is provided with at least a first displacement reduction mechanism and a second displacement reduction mechanism with different reduction ratios;

[0008] A switching mechanism is used to drive the carrier mechanism to switch the first displacement reduction mechanism or the second displacement reduction mechanism to the working position.

[0009] Furthermore, the first displacement reduction mechanism includes a first input end, a first output end, and two secondary lever-type flexible displacement mechanisms. The two secondary lever-type flexible displacement mechanisms are respectively connected to the first input end and the first output end, and are symmetrically arranged with the first input end and the first output end as a reference.

[0010] Furthermore, the two-stage lever-type flexible displacement mechanism includes a first fixed structure, a first lever, a second lever, and a first connecting rod;

[0011] The first fixing structure is fixedly installed and has a first fixing end and a second fixing end that are spaced apart;

[0012] The first lever is mounted on the first fixed end via a flexible hinge, and one end of the first lever is connected to the first input end via a flexible hinge.

[0013] One end of the first connecting rod is connected to the other end of the first lever via a flexible hinge, and the other end of the first connecting rod is connected to one end of the second lever via a flexible hinge;

[0014] The second lever is mounted on the second fixed end via a flexible hinge, and the other end of the second lever is connected to the first output end via a flexible hinge.

[0015] Furthermore, the second displacement reduction mechanism includes a second input end, a second output end, and a second fixed structure, a first Scott-Russell mechanism, a second Scott-Russell mechanism, and a first bridge mechanism symmetrically arranged with the second input end and the second output end as references;

[0016] The second fixing structure is fixedly installed and has a third fixing end and a fourth fixing end that are spaced apart;

[0017] The first Scott-Russell mechanism is mounted on the third fixed end via a flexible hinge, and the second Scott-Russell mechanism is mounted on the fourth fixed end via a flexible hinge.

[0018] One end of the first Scott-Russell mechanism is connected to the second input end via a flexible hinge, and the other end of the first Scott-Russell mechanism is connected to one end of the second Scott-Russell mechanism via a flexible hinge.

[0019] One end of the first bridge mechanism is connected to the other end of the second Scott-Russell mechanism via a flexible hinge, and the other end of the first bridge mechanism is connected to the second output end via a flexible hinge.

[0020] Furthermore, the bearing mechanism is also provided with a third displacement reduction mechanism. The reduction ratios of the first displacement reduction mechanism, the second displacement reduction mechanism, and the third displacement reduction mechanism are different from each other. The switching mechanism is used to switch the first displacement reduction mechanism, the second displacement reduction mechanism, or the third displacement reduction mechanism to the working position.

[0021] The third displacement reduction mechanism includes a bridge-bridge differential mechanism and a lever-bridge differential mechanism arranged in series.

[0022] Furthermore, the third displacement reduction mechanism includes a third input end, a third output end, a third fixed structure, and a second bridge mechanism, a third bridge mechanism, a fourth bridge mechanism, a lever mechanism, a second connecting rod, and a fourth fixed structure symmetrically arranged with the third input end, the third output end, and the third fixed structure as a reference.

[0023] The third input terminal has a first connection terminal and a second connection terminal that are spaced apart.

[0024] One end of the second bridge mechanism is connected to the third fixed structure via a flexible hinge, and the other end of the second bridge mechanism is connected to one end of the second connecting rod via a flexible hinge; the other end of the second connecting rod is connected to one end of the third bridge mechanism via a flexible hinge to form the bridge-bridge differential mechanism, and the other end of the third bridge mechanism is connected to the first connecting end;

[0025] The lever mechanism is mounted on the fourth fixed structure via a flexible hinge. One end of the lever mechanism is connected to the second connecting end via a flexible hinge, and the other end of the lever mechanism is connected to one end of the fourth bridge mechanism via a flexible hinge to form the lever-bridge differential mechanism. The other end of the fourth bridge mechanism is connected to the third output end via a flexible hinge.

[0026] Furthermore, the carrying mechanism includes a switching turntable and a locking assembly;

[0027] The first displacement reduction mechanism, the second displacement reduction mechanism, and the third displacement reduction mechanism are disposed on the switching turntable, and the switching mechanism is used to drive the switching turntable to rotate;

[0028] The locking assembly is used to lock the position of the switching turntable when the first displacement reduction mechanism, the second displacement reduction mechanism, or the third displacement reduction mechanism is switched to the working position.

[0029] Furthermore, the locking assembly is configured in a one-to-one correspondence with the first displacement reduction mechanism, the second displacement reduction mechanism, and the third displacement reduction mechanism;

[0030] The displacement actuator further includes a housing on which positioning recesses are formed;

[0031] The locking assembly includes a spherical plunger and an elastic component. The spherical plunger moves synchronously with the switching turntable and slides against the housing. The elastic component acts on the spherical plunger so that when the first displacement reduction mechanism, the second displacement reduction mechanism, or the third displacement reduction mechanism is switched to the working position, the elastic force causes the spherical plunger to be engaged and maintained in the positioning socket.

[0032] Furthermore, the switching mechanism includes a driving component, a worm gear, and a worm. The driving component drives the worm to rotate, the worm is connected to the worm gear, and the worm gear is connected to the switching turntable.

[0033] As can be seen from the above technical solutions, the embodiments of this application have at least the following beneficial effects: by integrating at least two displacement reduction mechanisms with different magnifications, and by setting the switching mechanism, the displacement driver of this application can switch and use different magnification reduction mechanisms according to different application scenarios, thereby meeting various precision micro-positioning requirements.

[0034] A second aspect of this application provides an apparatus including a displacement driver as described in the first aspect of this application.

[0035] It is easy to understand that the apparatus in the second aspect embodiment of this application has the same technical effects as the displacement actuator in the first aspect embodiment, and therefore will not be described again.

[0036] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0037] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 This is a schematic diagram of the structure of a displacement actuator provided in one embodiment of this application;

[0039] Figure 2 This is an internal schematic diagram of a displacement actuator provided in one embodiment of this application;

[0040] Figure 3 A schematic diagram of a first displacement reduction mechanism provided in one embodiment of this application;

[0041] Figure 4 A pseudo-rigid body model diagram of a first displacement reduction mechanism provided in one embodiment of this application;

[0042] Figure 5 A schematic diagram of a second displacement reduction mechanism provided in one embodiment of this application;

[0043] Figure 6 A pseudo-rigid body model diagram of a second displacement reduction mechanism provided in one embodiment of this application;

[0044] Figure 7 A schematic diagram of a third displacement reduction mechanism provided in one embodiment of this application;

[0045] Figure 8 A pseudo-rigid body model diagram of a third displacement reduction mechanism provided in one embodiment of this application;

[0046] Figure 9 This is a schematic diagram of the locking assembly in one embodiment of this application when it is locked.

[0047] Figure label:

[0048] 100. Bearing mechanism; 110. Switching turntable; 120. Locking assembly; 121. Spherical plunger; 122. Spring component;

[0049] 200. First displacement reduction mechanism; 210. First input end; 220. First output end; 230. Two-stage lever-type flexible displacement mechanism; 231. First fixed structure; 2311. First fixed end; 2312. Second fixed end; 232. First lever; 233. Second lever; 234. First connecting rod;

[0050] 300. Second displacement reduction mechanism; 310. Second input end; 320. Second output end; 330. Second fixed structure; 331. Third fixed end; 332. Fourth fixed end; 340. First Scott-Russell mechanism; 350. Second Scott-Russell mechanism; 360. First bridge mechanism;

[0051] 400. Third displacement reduction mechanism; 410. Bridge-bridge differential mechanism; 411. Second bridge mechanism; 412. Third bridge mechanism; 413. Second connecting rod; 420. Lever-bridge differential mechanism; 421. Lever mechanism; 422. Fourth bridge mechanism; 423. Fourth fixed structure; 430. Third input end; 431. First connecting end; 432. Second connecting end; 440. Third output end; 450. Third fixed structure;

[0052] 500. Switching mechanism; 510. Drive component; 520. Worm gear; 530. Worm;

[0053] 600, shell; 610, positioning socket. Detailed Implementation

[0054] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0055] It should be noted that some existing technologies are fixed-ratio displacement reduction actuators based on piezoelectric actuation and flexible hinges. These actuators use piezoelectric ceramics as the driving source and achieve fixed-ratio displacement reduction through lever-type, bridge-type, or composite flexible hinges. The output direction and driving form are fixed, and they can only provide displacement output with a single accuracy level, lacking the function of ratio switching. Among them, lever-type flexible displacement reduction mechanisms use single-stage or multi-stage lever-type flexible hinge combinations to achieve fixed-ratio displacement reduction and direction conversion, with the reduction ratio typically only a few to tens of times; bridge-type flexible displacement reduction mechanisms rely on symmetrical bridge-type flexible hinges to achieve displacement scaling, with a fixed reduction ratio, mostly at medium to low levels; composite flexible displacement reduction mechanisms combine lever and bridge-type hinges to improve the reduction ratio, but are still fixed and non-adjustable structures, with limited output accuracy and displacement range.

[0056] In response to this need for flexible switching of accuracy levels and multi-precision positioning in multiple scenarios, as well as the problem of large magnification scaling ratio required for ultra-high precision positioning, this application proposes a displacement actuator with switchable accuracy and large magnification scaling capability to solve the technical problems of existing displacement actuators, such as fixed and unswitchable accuracy levels and lack of large scaling ratios of thousands of times.

[0057] See Figures 1 to 9 As shown, an embodiment of the first aspect of this application discloses a displacement actuator, which belongs to the field of precision displacement drive and flexible transmission mechanism. More specifically, it relates to a precision switchable displacement actuator, wherein the displacement actuator includes a bearing mechanism 100 and a switching mechanism 500.

[0058] The bearing mechanism 100 is provided with at least a first displacement reduction mechanism 200 and a second displacement reduction mechanism 300 with different reduction ratios; the switching mechanism 500 is used to drive the bearing mechanism 100 to switch the first displacement reduction mechanism 200 or the second displacement reduction mechanism 300 to the working position.

[0059] In the embodiments of this application, by integrating at least two displacement reduction mechanisms with different magnifications, and by setting the switching mechanism 500, the displacement driver of this application can switch and use different magnification reduction mechanisms according to different application scenarios, thereby meeting various precision micro-positioning requirements.

[0060] It is understood that in some embodiments, by integrating two displacement reduction structures with different magnifications on the supporting mechanism 100, and then relying on the switching mechanism 500 to achieve flexible position switching, a single displacement actuator can possess micro-positioning drive capabilities with more than two accuracies, overcoming the limitations of traditional single-magnification actuators with fixed accuracy and limited adaptability to a single scenario. The displacement actuator of this application embodiment does not require replacement of the device body; it can switch between the corresponding accuracy displacement reduction mechanism according to the actual working conditions, adapting to the micro-positioning operation requirements of various accuracies, and significantly improving the versatility and working condition adaptability of the displacement actuator.

[0061] In some embodiments, the first displacement reduction mechanism 200 and the second displacement reduction mechanism 300 achieve a fixed displacement reduction based on lever-type, bridge-type or composite flexible hinges. Through structural design, displacement reduction mechanisms with different reduction ratios are obtained to meet the function of switching adjustment accuracy.

[0062] In some embodiments, the switching mechanism 500 can switch the first displacement reduction mechanism 200 or the second displacement reduction mechanism 300 to the working position by driving the bearing mechanism 100 to move linearly or rotate. The structure of the specific switching mechanism 500 can be adapted and designed to meet the switching function.

[0063] The following will combine Figures 1 to 9 The displacement actuator disclosed in the embodiments of this application will be explained and described in detail.

[0064] In some embodiments of this application, reference is made to Figure 3 and Figure 4 The first displacement reduction mechanism 200 includes a first input end 210, a first output end 220, and two secondary lever-type flexible displacement mechanisms 230. The two secondary lever-type flexible displacement mechanisms 230 are respectively connected to the first input end 210 and the first output end 220, and are symmetrically arranged with the first input end 210 and the first output end 220 as references. It can be understood that the symmetrical arrangement of the double secondary lever mechanisms can achieve synchronous displacement on both sides and balanced force, effectively offsetting the lateral offset and assembly stress generated by unilateral transmission, and avoiding deviations in displacement output. Specifically, during operation, the input displacement is synchronously transmitted through the first input end 210 to the two symmetrical secondary lever-type flexible displacement mechanisms 230. The secondary displacement reduction transmission is completed synchronously through the double lever flexible structure, and then converged to the first output end 220 to output the precisely reduced micro-displacement.

[0065] In some embodiments, the first displacement reduction mechanism 200 is a 10x displacement reduction mechanism, whose basic structure is a lever mechanism. By adjusting the arm lengths of the two levers and designing the reduction ratio, the two levers reduce the input displacement in sequence, thereby enabling the reduction ratio of the mechanism to reach 10.

[0066] In one embodiment, the two-stage lever-type flexible displacement mechanism 230 includes a first fixed structure 231, a first lever 232, a second lever 233, and a first connecting rod 234; the first fixed structure 231 is fixedly disposed and has a first fixed end 2311 and a second fixed end 2312 spaced apart; the first lever 232 is disposed on the first fixed end 2311 via a flexible hinge, and one end of the first lever 232 is connected to the first input end 210 via a flexible hinge; one end of the first connecting rod 234 is connected to the other end of the first lever 232 via a flexible hinge, and the other end of the first connecting rod 234 is connected to one end of the second lever 233 via a flexible hinge; the second lever 233 is disposed on the second fixed end 2312 via a flexible hinge, and the other end of the second lever 233 is connected to the first output end 220 via a flexible hinge.

[0067] With the above structure, a fixed first fixed structure 231 serves as the overall support reference, forming a first fixed end 2311 and a second fixed end 2312 spaced apart. A first lever 232 is hinged to the first fixed end 2311 via a flexible hinge. The input displacement is transmitted to the first lever 232 via the flexible hinge, completing the first stage of lever displacement scaling. The first lever 232 is linked to the second lever 233 via a first connecting rod 234. The smooth transmission of force and displacement is achieved through the flexible hinges at both ends. The second lever 233 is hinged to the second fixed end 2312 and completes the second stage of lever displacement scaling. Finally, the precisely reduced displacement is output to the first output end 220 via the flexible hinge. The entire structure relies on the linkage of multiple levers and flexible hinges to achieve two stages of continuous flexible displacement reduction transmission.

[0068] In some embodiments of this application, reference is made to Figure 5 and Figure 6The second displacement reduction mechanism 300 includes a second input end 310, a second output end 320, and a second fixed structure 330, a first Scott-Russell mechanism 340, a second Scott-Russell mechanism 350, and a first bridge mechanism 360 symmetrically arranged with respect to the second input end 310 and the second output end 320. The second fixed structure 330 is fixedly arranged and has a third fixed end 331 and a fourth fixed end 332 spaced apart. The first Scott-Russell mechanism 340 is connected to the third fixed end 331 via a flexible hinge. -Russell mechanism 350 is mounted on the fourth fixed end 332 via a flexible hinge; one end of the first Scott-Russell mechanism 340 is connected to the second input end 310 via a flexible hinge, and the other end of the first Scott-Russell mechanism 340 is connected to one end of the second Scott-Russell mechanism 350 via a flexible hinge; one end of the first bridge mechanism 360 is connected to the other end of the second Scott-Russell mechanism 350 via a flexible hinge, and the other end of the first bridge mechanism 360 is connected to the second output end 320 via a flexible hinge.

[0069] Understandably, employing a bilaterally symmetrical Scott-Russell mechanism can effectively suppress lateral displacement and parasitic motion during transmission, improve the accuracy of displacement output, and avoid offset errors in micro-positioning. Combined with a bridge mechanism, it further optimizes the displacement reduction ratio and standardizes the transmission path, making the overall displacement output more linear and stable. This results in different accuracy and ratio characteristics compared to the two-stage lever mechanism, achieving differentiated gear positions.

[0070] With the above structure, the second displacement reduction mechanism 300 uses the second input end 310 and the second output end 320 as the central reference, symmetrically arranging two sets of Scott-Russell mechanisms and the first bridge mechanism 360, and relying on the fixed second fixed structure 330 for support. The second fixed structure 330 forms a third fixed end 331 and a fourth fixed end 332 at intervals, which are used to install and fix the first Scott-Russell mechanism 340 and the second Scott-Russell mechanism 350, respectively. All transmission nodes are hinged with flexible hinges. The input displacement is transmitted from the second input end 310, driving the first Scott-Russell mechanisms on both sides to move synchronously and complete the first-level displacement correction and scaling; then the power is transmitted to the second Scott-Russell mechanism and the first bridge mechanism 360 through the flexible hinges, and finally the bridge mechanism performs displacement constraint and precise reduction to output a stable, low-deviation micro-displacement to the second output end 320.

[0071] In some embodiments, the second displacement reduction mechanism 300 is a 100-fold displacement reduction mechanism, whose basic structure is a Scott-Russell mechanism and a bridge mechanism; the two Scott-Russell mechanisms first reduce the input displacement and reverse its direction, and then transfer the displacement to the bridge mechanism. The bridge mechanism uses parasitic motion that is approximately perpendicular to the input direction as the final output, so that the mechanism reduction ratio reaches 100.

[0072] Understandably, the displacement actuators in related technologies all use displacement reduction mechanisms with a fixed reduction ratio, which can only output micro-displacements of a single precision level. They cannot be flexibly adjusted according to the precision requirements of different working conditions such as micro-nano operations, precision positioning, semiconductor testing, and ultra-precision assembly, and their applicable scenarios are highly limited. The reduction ratio of existing displacement reduction mechanisms is generally limited to a few times to several hundred times, and there are few technical solutions for ultra-high reduction ratios of 1000 times. They cannot further compress the micron-level drive displacement of piezoelectric actuators to the nanometer-level displacement.

[0073] Based on this, in some embodiments of this application, the bearing mechanism 100 is further provided with a third displacement reduction mechanism 400. The reduction ratios of the first displacement reduction mechanism 200, the second displacement reduction mechanism 300, and the third displacement reduction mechanism 400 are different from each other. The switching mechanism 500 is used to switch the first displacement reduction mechanism 200, the second displacement reduction mechanism 300, or the third displacement reduction mechanism 400 to the working position. The third displacement reduction mechanism 400 includes a bridge-bridge differential mechanism 410 and a lever-bridge differential mechanism 420 arranged in series.

[0074] Understandably, by integrating three different displacement reduction mechanisms, a single displacement actuator can switch between three levels of precision, further expanding the adaptability range of micro-positioning accuracy and stroke. Among them, the third displacement reduction mechanism 400 adopts a composite superimposed transmission structure, which uses two sets of differential mechanisms to cooperate and superimpose transmission in stages, forming a new displacement reduction transmission form that is different from the lever type and Scott-Russell type, and outputs precise micro-displacement with a dedicated magnification.

[0075] In one embodiment, the third displacement reduction mechanism 400 includes a third input end 430, a third output end 440, a third fixed structure 450, and a second bridge mechanism 411, a third bridge mechanism 412, a fourth bridge mechanism 422, a lever mechanism 421, a second connecting rod 413, and a fourth fixed structure 423 symmetrically arranged with respect to the third input end 430, the third output end 440, and the third fixed structure 450. The third input end 430 has a first connecting end 431 and a second connecting end 432 spaced apart. One end of the second bridge mechanism 411 is connected to the third fixed structure 450 via a flexible hinge, and the other end of the second bridge mechanism 411 is connected to the third fixed structure 450 via a flexible hinge. One end of the chain is connected to one end of the second connecting rod 413; the other end of the second connecting rod 413 is connected to one end of the third bridge mechanism 412 via a flexible hinge to form a bridge-bridge differential mechanism 410, and the other end of the third bridge mechanism 412 is connected to the first connecting end 431; the lever mechanism 421 is mounted on the fourth fixed structure 423 via a flexible hinge, one end of the lever mechanism 421 is connected to the second connecting end 432 via a flexible hinge, and the other end of the lever mechanism 421 is connected to one end of the fourth bridge mechanism 422 via a flexible hinge to form a lever-bridge differential mechanism 420, and the other end of the fourth bridge mechanism 422 is connected to the third output end 440 via a flexible hinge.

[0076] Through the above structure, the differential mechanisms are synchronously and symmetrically linked to complete the bridge-bridge differential scaling and lever-bridge composite scaling respectively, and finally output to the third output terminal 440. Relying on the series superimposed double differential composite structure, a higher precision and more delicate micro-displacement reduction effect is achieved.

[0077] It should be understood that the solution in this embodiment is not a simple redundant superposition of displacement reduction mechanisms, but rather a systematic breakthrough of the inherent bottleneck of single reduction technology by using differential displacement reduction unitization and two-level modular series connection. It fundamentally solves the technical bias in the prior art that ultra-high reduction ratio and structural stability and manufacturing precision cannot be achieved simultaneously.

[0078] Understandably, in existing technologies, the stacking of reduction units makes it difficult to achieve the target reduction ratio. This method is inefficient, and higher reduction ratios require more layers of reduction units. Arranging more than three layers of reduction units in space becomes extremely difficult and leads to decreased mechanism stability. Parasitic motion reduction achieves higher reduction ratios by sacrificing mechanical efficiency, but its maximum achievable reduction ratio is limited, making a reduction ratio of 1000 difficult to reach. Furthermore, differential displacement reduction is severely affected by manufacturing precision. To achieve a 1000 reduction ratio using a differential mechanism, the displacement accuracy of both the forward and reverse mechanisms must be at least one ten-thousandth, which is difficult to achieve with ordinary processes and is a major limitation of differential displacement reduction mechanisms.

[0079] Based on this, this application designs two differential reduction modules connected in series via rigid blocks. The total reduction ratio is the product of the reduction ratios of the first and second modules. For example, if the first module achieves a 10-fold reduction and the second module achieves a 100-fold reduction, the total reduction ratio is 10 × 100 = 1000 times. The overall structure is extremely compact, and the spatial arrangement is simple, requiring only arrangement along the axial direction.

[0080] Specifically, the first module is a bridge-to-bridge differential reduction mechanism.

[0081] Structural composition: It consists of two identical bridge mechanisms connected in parallel, which is the basis for achieving ultra-high scaling ratio.

[0082] Working principle: Two bridge mechanisms operating in the same direction will output displacements in different directions. By adjusting the angle difference between the two, a high reduction ratio can be achieved.

[0083] Core function: Utilizing the differential displacement principle to achieve a first-stage high-magnification reduction while maintaining axisymmetric structural characteristics, ensuring that the input and output points are located on the same axis, thus creating conditions for the linear series arrangement of subsequent modules.

[0084] Specifically, the second module is a lever-bridge differential reduction mechanism.

[0085] Structural composition: It consists of a lever mechanism and a bridge mechanism connected in series, and is rigidly connected to the output end of the first module through a rigid block.

[0086] Working principle: The lever reduces the displacement and changes its direction, and by forming a certain angle with the bridge mechanism, it reduces the output displacement.

[0087] Core function: Receives the output displacement from the first module, completes the second-stage reduction, and achieves a product amplification of the total reduction ratio. Because this module itself has a displacement reversal characteristic, the output displacement of the first module is pre-set to be opposite to the final output direction to ensure that the input and output directions of the overall mechanism are consistent.

[0088] In some specific embodiments, the supporting mechanism 100 includes a switching turntable 110 and a locking assembly 120; a first displacement reduction mechanism 200, a second displacement reduction mechanism 300, and a third displacement reduction mechanism 400 are disposed on the switching turntable 110, and a switching mechanism 500 is used to drive the switching turntable 110 to rotate; the locking assembly 120 is used to lock the position of the switching turntable 110 when the first displacement reduction mechanism 200, the second displacement reduction mechanism 300, or the third displacement reduction mechanism 400 is switched to the working position. It can be understood that by integrating the three different magnifications of the first displacement reduction mechanism 200, the second displacement reduction mechanism 300, and the third displacement reduction mechanism 400 on the switching turntable 110, the integrated installation of multiple sets of precision transmission mechanisms is achieved. The switching mechanism 500 drives the switching turntable 110 to rotate, and uses the rotation of the turntable to precisely switch the required displacement reduction mechanism to the working position. When any displacement reduction mechanism is in place, the locking component 120 immediately locks and fixes the position of the switching turntable 110, restricting the rotation and offset of the turntable, and ensuring that the current working mechanism has a constant position and stable state.

[0089] In some embodiments, the locking assembly 120 may be configured to include, but is not limited to, a threaded locking assembly 120, an eccentric locking assembly 120, a snap-locking assembly 120, or a pin locking assembly 120.

[0090] In one embodiment, the locking assembly 120 is configured in a one-to-one correspondence with the first displacement reduction mechanism 200, the second displacement reduction mechanism 300, and the third displacement reduction mechanism 400; the displacement driver also includes a housing 600, on which a positioning recess 610 is formed; the locking assembly 120 includes a spherical plunger 121 and an elastic member 122, the spherical plunger 121 moves synchronously with the switching turntable 110 and slides against the housing 600, the elastic member 122 acts on the spherical plunger 121 so that when the first displacement reduction mechanism 200, the second displacement reduction mechanism 300, or the third displacement reduction mechanism 400 is switched to the working position, the spherical plunger 121 is engaged and maintained in the positioning recess 610 by the elastic force.

[0091] Understandably, the three sets of locking components 120 are installed in a one-to-one correspondence with the three sets of displacement reduction mechanisms. The spherical plunger 121 rotates synchronously with the switching turntable 110, sliding against the inner wall of the housing 600 throughout the entire process. When the switching turntable 110 rotates and the corresponding displacement reduction mechanism is turned to the working position, the spring force component 122 continuously outputs a pressing spring force, which can push the spherical plunger 121 into the positioning socket 610 of the housing 600. The automatic alignment and position locking of the switching turntable 110 are achieved by relying on the spring locking structure, thus completing the precise positioning and locking of each precision level.

[0092] Through the above structure, the elastic locking setting of the elastic component 122 and the spherical plunger 121 can realize automatic alignment and automatic locking, effectively suppressing the micro-shaking and axial deviation during the operation of the turntable, and further ensuring the accuracy and stability of the micro-positioning of each gear of the displacement driver.

[0093] In one embodiment, the switching mechanism 500 includes a drive component 510, a worm gear 520, and a worm 530. The drive component 510 drives the worm 530 to rotate. The worm 530 is connected to the worm gear 520, and the worm gear 520 is connected to the switching turntable 110. It is understood that the switching mechanism 500 uses the worm gear 520 and worm 530 for driving switching, resulting in smooth movement, no impact, small return error, and self-locking capability. Combined with the spherical plunger 121 and the positioning socket 610, it achieves elastic centering, resulting in high positioning accuracy and reliable locking.

[0094] In some embodiments, the flexible hinge mentioned in this application may be a semi-circular flexible hinge, or other commonly used flexible hinge types may be used to meet the flexible connection requirements between components. It should be understood that the above-mentioned connection by flexible hinge does not specifically refer to the use of the same type or the same flexible hinge, and the selection and use can be adaptively adjusted according to actual usage requirements to meet the flexible connection requirements.

[0095] The displacement driver of this application embodiment is described in detail below with a specific example. It should be noted that the following embodiment is merely an exemplary description and should not be construed as limiting the embodiments of this application.

[0096] See Figures 1 to 9 As shown, the displacement actuator of this embodiment is designed with three reduction mechanisms with different magnifications and a switching mechanism 500. The switching mechanism 500 enables the displacement actuator of this application to integrate three different magnification reduction mechanisms of 10x, 100x and 1000x. The switching is achieved by using worm gear 520 and worm 530 for transmission and by using a double locking mechanism of elastic positioning of spherical plunger 121 and mechanical self-locking of worm gear 520 and worm 530.

[0097] It is understood that in the displacement reduction mechanism of this application, the station switching is achieved by the worm gear 520 and worm 530 transmission mechanism within the switching mechanism 500 driving the rotating switching turntable 110. The self-locking characteristic of the worm gear 520 and worm 530 ensures that the station does not move after switching to the correct position. Figure 1 , Figure 2 and Figure 9As shown, the station fixing adopts a spherical plunger 121 positioning mechanism. The spherical plunger 121 is installed on the rotary switching turntable 110. A positioning socket 610 is set on the top of the switching mechanism 500 to correspond to the three equally divided station positions. Under the action of spring force, the spherical plunger 121 is locked into the positioning socket 610 to achieve precise positioning and reliable fixing. The switching mechanism 500 and the rotating switching turntable 110 cooperate to achieve indexing positioning. The entire mechanism only allows station switching when the machine is stopped and the power is off. After switching to the correct position, the spherical plunger 121 and the worm gear 520 and worm 530 are double self-locking, maintaining a completely rigid and fixed working state. Each displacement reduction mechanism is equipped with an independent piezoelectric actuator, which converts the drive displacement into a high-precision micro-displacement output in the vertical direction through a flexible hinge.

[0098] Specifically, such as Figure 1 As shown, the displacement actuator in this embodiment mainly includes a switching mechanism 500 and three sets of flexible displacement reduction mechanisms with different magnifications. A rotating switching turntable 110 is mounted on the switching mechanism 500, with the turntable plane inclined at a 15° angle to the horizontal plane; the turntable is divided into three equal parts along the circumference, and three flexible displacement reduction mechanisms with magnifications of 10x, 100x, and 1000x are installed respectively.

[0099] In some embodiments, a 10x displacement reduction mechanism is proposed:

[0100] Its pseudo-rigid body model is as follows Figure 4 As shown, this structure utilizes a two-stage lever system to reduce the input displacement and adjust the output direction. A connecting rod serves as a transition between the two stages of levers and is designed as an axisymmetric structure to eliminate parasitic horizontal motion at the output displacement end. The pseudo-rigid body model is transformed into a flexible mechanism, the structure of which is as follows: Figure 3 As shown.

[0101] In some embodiments, a 100x displacement reduction mechanism is proposed:

[0102] The pseudo-rigid body model is shown in the figure. Figure 6 As shown, the structure comprises two Scott-Russell mechanisms and one bridge mechanism. The two Scott-Russell mechanisms initially reduce the input displacement and change its direction, outputting the reduced displacement sequentially. The bridge mechanism then receives the reduced displacement output by the Scott-Russell mechanisms after the direction change. The direction of the input displacement and the output displacement direction of the bridge mechanism form an approximately perpendicular angle, ultimately outputting the reduced displacement. This structure also employs an axisymmetric design to ensure the output displacement is vertical. The rigid body model is then converted into a flexible mechanism, the structure of which is shown below. Figure 5 As shown.

[0103] In some embodiments, a 1000x displacement reduction mechanism is proposed:

[0104] Pseudo-rigid body model such as Figure 8 As shown, the structure consists of a first module (bridge-bridge mechanism) and a second module (lever-bridge mechanism) connected in series. In the first module, the two bridge mechanisms, operating in the same direction, output displacements in different directions. A high reduction ratio can be achieved by adjusting the angle difference. In the second module, the lever reduces the displacement and changes its direction, reducing the output displacement by forming a certain angle difference with the bridge mechanisms. Due to its mechanism characteristics, it will output the input displacement in the opposite direction, so the output displacement of the bridge-bridge mechanism is set to be opposite to the final output. These two mechanisms are connected by a rigid block, and the lever-bridge mechanism receives the output displacement of the bridge-bridge mechanism, forming two series-connected reduction units. The rigid body model is then transformed into a flexible mechanism, the structure of which is shown below. Figure 7 As shown.

[0105] It should be noted that this application designs displacement reduction mechanisms with reduction ratios of 10, 100, and 1000, which can achieve um, nm, and subnm precision respectively. Combined with the setting of the switching mechanism 500, the switching between um-nm-subnm precision can be realized, thereby adapting to multiple application scenarios.

[0106] The second aspect of this application discloses an apparatus, which may be a micro-nano operating system, a precision positioning platform, a semiconductor testing equipment, or a high-precision execution device, etc. The apparatus includes: a displacement driver according to the first aspect of this application.

[0107] It is easy to understand that the apparatus in the second aspect embodiment of this application has the same technical effects as the displacement actuator in the first aspect embodiment, and therefore will not be described again.

[0108] In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0109] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "multiple" means two or more. It should be noted that the term "and / or" used herein is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. Similarly, at least one of A or B can also represent: A alone, A and B simultaneously, or B alone.

[0110] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0111] In the foregoing description of this specification, references to terms such as "one embodiment," "another embodiment," or "some embodiments" indicate that a specific feature, structure, material, or characteristic described in connection with an embodiment or example is included in at least one embodiment or example of this application. In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

Claims

1. A displacement actuator, characterized in that, include: The load-bearing mechanism is provided with at least a first displacement reduction mechanism and a second displacement reduction mechanism with different reduction ratios; A switching mechanism is used to drive the carrier mechanism to switch the first displacement reduction mechanism or the second displacement reduction mechanism to the working position.

2. The displacement actuator according to claim 1, characterized in that: The first displacement reduction mechanism includes a first input end, a first output end, and two secondary lever-type flexible displacement mechanisms. The two secondary lever-type flexible displacement mechanisms are respectively connected to the first input end and the first output end, and are symmetrically arranged with the first input end and the first output end as a reference.

3. The displacement actuator according to claim 2, characterized in that: The two-stage lever-type flexible displacement mechanism includes a first fixed structure, a first lever, a second lever, and a first connecting rod; The first fixing structure is fixedly installed and has a first fixing end and a second fixing end that are spaced apart; The first lever is mounted on the first fixed end via a flexible hinge, and one end of the first lever is connected to the first input end via a flexible hinge. One end of the first connecting rod is connected to the other end of the first lever via a flexible hinge, and the other end of the first connecting rod is connected to one end of the second lever via a flexible hinge; The second lever is mounted on the second fixed end via a flexible hinge, and the other end of the second lever is connected to the first output end via a flexible hinge.

4. The displacement actuator according to claim 1, characterized in that: The second displacement reduction mechanism includes a second input end, a second output end, and a second fixed structure, a first Scott-Russell mechanism, a second Scott-Russell mechanism, and a first bridge mechanism symmetrically arranged with the second input end and the second output end as a reference. The second fixing structure is fixedly installed and has a third fixing end and a fourth fixing end that are spaced apart; The first Scott-Russell mechanism is mounted on the third fixed end via a flexible hinge, and the second Scott-Russell mechanism is mounted on the fourth fixed end via a flexible hinge. One end of the first Scott-Russell mechanism is connected to the second input end via a flexible hinge, and the other end of the first Scott-Russell mechanism is connected to one end of the second Scott-Russell mechanism via a flexible hinge. One end of the first bridge mechanism is connected to the other end of the second Scott-Russell mechanism via a flexible hinge, and the other end of the first bridge mechanism is connected to the second output end via a flexible hinge.

5. The displacement actuator according to claim 1, characterized in that: The bearing mechanism is also provided with a third displacement reduction mechanism. The reduction ratios of the first displacement reduction mechanism, the second displacement reduction mechanism and the third displacement reduction mechanism are different from each other. The switching mechanism is used to switch the first displacement reduction mechanism, the second displacement reduction mechanism or the third displacement reduction mechanism to the working position. The third displacement reduction mechanism includes a bridge-bridge differential mechanism and a lever-bridge differential mechanism arranged in series.

6. The displacement actuator according to claim 5, characterized in that: The third displacement reduction mechanism includes a third input end, a third output end, a third fixed structure, and a second bridge mechanism, a third bridge mechanism, a fourth bridge mechanism, a lever mechanism, a second connecting rod, and a fourth fixed structure symmetrically arranged with the third input end, the third output end, and the third fixed structure as a reference. The third input terminal has a first connection terminal and a second connection terminal that are spaced apart. One end of the second bridge mechanism is connected to the third fixed structure via a flexible hinge, and the other end of the second bridge mechanism is connected to one end of the second connecting rod via a flexible hinge; the other end of the second connecting rod is connected to one end of the third bridge mechanism via a flexible hinge to form the bridge-bridge differential mechanism, and the other end of the third bridge mechanism is connected to the first connecting end; The lever mechanism is mounted on the fourth fixed structure via a flexible hinge. One end of the lever mechanism is connected to the second connecting end via a flexible hinge, and the other end of the lever mechanism is connected to one end of the fourth bridge mechanism via a flexible hinge to form the lever-bridge differential mechanism. The other end of the fourth bridge mechanism is connected to the third output end via a flexible hinge.

7. The displacement actuator according to claim 5, characterized in that: The load-bearing mechanism includes a switching turntable and a locking assembly; The first displacement reduction mechanism, the second displacement reduction mechanism, and the third displacement reduction mechanism are disposed on the switching turntable, and the switching mechanism is used to drive the switching turntable to rotate; The locking assembly is used to lock the position of the switching turntable when the first displacement reduction mechanism, the second displacement reduction mechanism, or the third displacement reduction mechanism is switched to the working position.

8. The displacement actuator according to claim 7, characterized in that: The locking components are configured in a one-to-one correspondence with the first displacement reduction mechanism, the second displacement reduction mechanism, and the third displacement reduction mechanism; The displacement actuator further includes a housing on which positioning recesses are formed; The locking assembly includes a spherical plunger and an elastic component. The spherical plunger moves synchronously with the switching turntable and slides against the housing. The elastic component acts on the spherical plunger so that when the first displacement reduction mechanism, the second displacement reduction mechanism, or the third displacement reduction mechanism is switched to the working position, the elastic force causes the spherical plunger to be engaged and maintained in the positioning socket.

9. The displacement actuator according to claim 7, characterized in that: The switching mechanism includes a driving component, a worm gear, and a worm. The driving component drives the worm to rotate. The worm is connected to the worm gear, and the worm gear is connected to the switching turntable.

10. An apparatus, characterized in that, include: The displacement actuator as described in any one of claims 1 to 9.

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