Elliptic cylindrical mirror intelligent automatic splicing detection device and method

Abstract

The application provides an elliptic cylindrical mirror intelligent automatic splicing detection device and method, and belongs to the technical field of optical detection. In the device, a laser in an interferometer emits incident light of a fixed wavelength, part of the light returns to the interferometer to form reference light after passing through a reference mirror, and the other part of the light transmits through the reference mirror to reach the surface of an elliptic cylindrical mirror to form measured light after being reflected back to the interferometer; a high-precision one-dimensional displacement adjustment table and a high-precision six-degree-of-freedom displacement adjustment system make the reference light and the measured light coincide to form interference fringes; an intelligent automatic splicing interference detection software system calibrates the system and calculates the adjustment displacement by calling an intelligent algorithm, and automatically controls the high-precision one-dimensional displacement adjustment table and the high-precision six-degree-of-freedom displacement adjustment system to automatically measure multiple sub-aperture surface shapes on the elliptic cylindrical mirror, and finally obtains the overall surface shape information of the elliptic cylindrical mirror through splicing. The application realizes full-size, high-precision and automatic splicing interference detection of the elliptic cylindrical mirror.

Description

Technical Field

[0001] This invention belongs to the field of optical inspection technology, and specifically relates to an intelligent automatic splicing inspection device and method for elliptical cylindrical mirrors. Background Technology

[0002] Synchrotron radiation sources, as indispensable large-scale scientific facilities in cutting-edge multidisciplinary research, generate high-brightness, highly coherent synchrotron radiation light, which is widely used in materials science, life sciences, energy science, and nanotechnology. Synchrotron radiation light is transmitted to experimental terminals via beamline systems, providing researchers with high-quality light source conditions. The key optical component for achieving high-precision focusing of synchrotron radiation light at the nanoscale is the Kirkpatrick–Baez (K–B) mirror system. The K–B mirror consists of two orthogonally arranged curved mirrors, each typically approximating an ellipsoidal or parabolic shape, which can be obtained through precise bending or off-axis cutting. Under high reflectivity grazing incidence conditions, this system can achieve focusing performance close to the diffraction limit, and is therefore widely used in high-end optical equipment such as coherent X-ray diffraction imaging (CDI), extreme ultraviolet (EUV) lithography, and X-ray microscopy. Depending on the application band, the length of a single K-B mirror typically ranges from 50mm to 1200mm, and it has a typical elongated structure.

[0003] With the increasing demands on focusing performance from synchrotron radiation devices and laser systems, the surface accuracy requirements of K-B mirrors are no longer limited to a specific frequency band, but need to maintain high-precision surface control across the entire spatial frequency range. Therefore, high-precision, full-size three-dimensional surface inspection of K-B mirrors and similar reflectors has become a key technical aspect. Although traditional interferometry methods have the advantages of high precision and high spatial resolution, their measurement aperture is limited, making it difficult to cover the entire surface of long-sized K-B mirrors. To address this, stitching interferometry is usually introduced to expand the effective measurement range and achieve overall inspection of large-aperture optical elements. However, in the current high-precision stitching interferometry inspection of elliptical cylindrical mirrors, several problems significantly affect the measurement accuracy and stability: (1) Spatial alignment errors between sub-regions lead to discontinuities in the stitching boundaries; (2) Human operation and environmental disturbances during the measurement process can easily introduce systematic errors; (3) Error terms such as sub-region tilt and defocus terms reduce the accuracy of the algorithm solution.

[0004] Therefore, developing a device and method that can achieve full-size, high-precision, and automated splicing and inspection of elliptical cylindrical mirrors is of great significance for improving the overall performance of synchrotron radiation sources and related high-end optical systems. Summary of the Invention

[0005] The purpose of this invention is to provide an intelligent automatic splicing and inspection device and method for elliptical cylindrical mirrors, which solves the problems of limited aperture in interferometry methods, which make it difficult to cover long-sized components, as well as the problems of discontinuous splicing boundaries, low measurement accuracy and stability caused by spatial alignment errors, human and environmental disturbances, and sub-region error terms in existing splicing interferometry.

[0006] To achieve the above objectives, this invention provides an intelligent automatic stitching and testing device for an elliptical cylindrical mirror. The device includes: an interferometer, a reference mirror, an elliptical cylindrical mirror, a high-precision one-dimensional displacement adjustment stage, a high-precision six-degree-of-freedom displacement adjustment system, and an intelligent automatic stitching interferometric testing software system. Specifically, the interferometer emits incident light of a fixed wavelength from a laser. After passing through the reference mirror, a portion of the light returns to the interferometer and is received by the detector to form reference light; the other portion passes through the reference mirror to the surface of the elliptical cylindrical mirror, is reflected back by the elliptical cylindrical mirror, and returns to the interferometer to be received by the detector to form the measured light. The high-precision one-dimensional displacement adjustment stage and high-precision... The six-degree-of-freedom displacement adjustment system is used to support and adjust the position of the elliptical cylindrical mirror so that the reference light and the measured light coincide to form interference fringes. The intelligent automatic stitching interferometric detection software system is connected to the interferometer, the high-precision one-dimensional displacement adjustment stage, and the high-precision six-degree-of-freedom displacement adjustment system. It performs system calibration and calculates the adjustment displacement by calling intelligent algorithms, and automatically links and controls the high-precision one-dimensional displacement adjustment stage and the high-precision six-degree-of-freedom displacement adjustment system to automatically measure the surface shape of multiple sub-apertures on the elliptical cylindrical mirror. By stitching together the surface shapes of multiple sub-apertures, the overall surface shape information of the elliptical cylindrical mirror is finally obtained.

[0007] Accordingly, the present invention also provides an intelligent automatic stitching detection method for elliptical cylindrical mirrors, used in the intelligent automatic stitching detection device for elliptical cylindrical mirrors described above. This method is implemented through an intelligent automatic stitching interferometric detection software system and includes: Step S1, controlling a high-precision one-dimensional displacement adjustment stage and a high-precision six-degree-of-freedom displacement adjustment system to move to their initial positions; Step S2, calling an intelligent calibration algorithm to automatically control the high-precision six-degree-of-freedom displacement adjustment system for system calibration; Step S3, calling an intelligent automatic measurement algorithm to automatically control the high-precision one-dimensional displacement adjustment stage and the high-precision six-degree-of-freedom displacement adjustment system to automatically measure the surface shapes of multiple sub-apertures on the elliptical cylindrical mirror, and obtaining the overall surface shape information of the elliptical cylindrical mirror by stitching together the surface shapes of the multiple sub-apertures.

[0008] The beneficial effects of this invention are as follows:

[0009] Through the technical solution provided by this invention, full-size, high-precision, and automated splicing inspection of elliptical cylindrical mirrors is realized. The device provided by this invention has the advantages of simple and efficient operation, and the method provided by this invention has the advantages of high measurement accuracy, strong anti-interference ability, and fully automatic intelligent measurement. It is applicable to the use of full-size, high-precision, and automated splicing inspection of elliptical cylindrical mirrors, specifically including: (1) developing an intelligent automatic splicing interferometric inspection software system, integrating the linkage control of all hardware and algorithms to ensure simple and efficient operation of the device; (2) using intelligent calibration algorithm to realize automatic control inspection system calibration, avoiding small positional offsets that introduce alignment errors and cause discontinuity in the splicing boundaries between sub-regions; (3) using intelligent automatic measurement algorithm to realize fully automatic measurement, avoiding human operation and environmental disturbances that easily introduce system errors during the measurement process; sub-region tilt terms and defocus terms and other error terms reduce the accuracy of algorithm calculation. Attached Figure Description

[0010] The accompanying drawings are provided to further illustrate embodiments of the present invention and form part of the specification. They are used together with the following detailed description to explain the embodiments of the present invention, but do not constitute a limitation thereof. In the drawings:

[0011] Figure 1 This is a schematic diagram of the intelligent automatic splicing and detection device for elliptical cylindrical mirrors provided by the present invention;

[0012] Figure 2 This is a flowchart of the intelligent automatic splicing and detection method for elliptical cylindrical mirrors provided in the embodiments of the present invention;

[0013] Figure 3 This is a system calibration flowchart of the intelligent automatic stitching interferometry detection software system provided in the embodiments of the present invention;

[0014] Figure 4 This is an automatic measurement flowchart of the intelligent automatic stitching interferometry detection software system provided in the embodiments of the present invention;

[0015] Figure 5 The interference fringe pattern at the initial position is acquired by the interference detection software provided in the embodiments of the present invention;

[0016] Figure 6 This is the final measurement result of the elliptical cylindrical mirror shape provided by the embodiments of the present invention.

[0017] Explanation of reference numerals in the attached figures:

[0018] 1. Interferometer; 2. Reference mirror; 3. Elliptical cylindrical mirror; 4. High-precision one-dimensional displacement stage; 5. High-precision six-degree-of-freedom displacement adjustment system; 6. Intelligent automatic splicing interferometric detection software system. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention. Furthermore, the technical features involved in the various embodiments of this invention described below can be combined with each other as long as they do not conflict with each other. To achieve the above objectives, this invention adopts the following technical solution.

[0020] Figure 1 This is a schematic diagram of the intelligent automatic splicing and detection device for elliptical cylindrical mirrors provided by the present invention, as shown below. Figure 1 As shown, the intelligent automatic stitching and inspection device for elliptical cylindrical mirrors includes an interferometer 1, a reference mirror 2, an elliptical cylindrical mirror 3, a high-precision one-dimensional displacement adjustment stage 4, a high-precision six-degree-of-freedom displacement adjustment system 5, and an intelligent automatic stitching interferometric inspection software system 6, wherein:

[0021] The laser inside the interferometer 1 emits incident light of a fixed wavelength. After passing through the reference mirror 2, part of the light returns to the interferometer 1 and is received by the detector to form the reference light. The other part of the light passes through the reference mirror 2 and reaches the surface of the elliptical cylindrical mirror 3. After being reflected by the elliptical cylindrical mirror 3, it returns to the interferometer 1 and is received by the detector to form the measured light.

[0022] The high-precision one-dimensional displacement adjustment stage 4 and the high-precision six-degree-of-freedom displacement adjustment system 5 are used to support and adjust the position of the elliptical cylindrical mirror 3 so that the reference light and the measured light coincide to form interference fringes; wherein, when the high-precision one-dimensional displacement adjustment stage 4 and the high-precision six-degree-of-freedom displacement adjustment system 5 are moved to a suitable position (e.g., the position where the reference light and the measured light coincide), the interference fringes formed when the reference light and the measured light coincide are displayed on the intelligent automatic stitching interference detection software system 6.

[0023] The intelligent automatic stitching interferometric detection software system 6 is connected to the interferometer 1, the high-precision one-dimensional displacement adjustment stage 4, and the high-precision six-degree-of-freedom displacement adjustment system 5. It performs system calibration and calculates the adjustment displacement by calling intelligent algorithms, and automatically controls the high-precision one-dimensional displacement adjustment stage 4 and the high-precision six-degree-of-freedom displacement adjustment system 5 to automatically measure the surface shape of multiple sub-apertures on the elliptical cylindrical mirror 3. Finally, it obtains the overall surface shape information of the elliptical cylindrical mirror 3 by stitching together the surface shapes of multiple sub-apertures.

[0024] The intelligent automatic stitching interferometry detection software system 6 includes:

[0025] The displacement stage control module is used to control the high-precision one-dimensional displacement adjustment stage 4 and the high-precision six-degree-of-freedom displacement adjustment system 5 to move to the initial position;

[0026] The system calibration module calls the intelligent calibration algorithm and automatically controls the high-precision six-degree-of-freedom displacement adjustment system 5 to perform system calibration.

[0027] The automatic measurement module calls the intelligent automatic measurement algorithm to automatically control the high-precision one-dimensional displacement adjustment stage 4 and the high-precision six-degree-of-freedom displacement adjustment system 5 to automatically measure the surface shape of multiple sub-apertures on the elliptical cylindrical mirror 3. The overall surface shape information of the elliptical cylindrical mirror 3 is obtained by splicing the surface shapes of multiple sub-apertures.

[0028] The sub-aperture division rules for the elliptical cylindrical mirror 3 are as follows: the displacement of the sub-aperture and the overlapping area between adjacent sub-apertures satisfy the following relationship. ,in Where is the sub-aperture length, N is the number of sub-apertures, T% is the percentage of overlap between adjacent sub-apertures, and L is the total length of the elliptical cylindrical mirror.

[0029] The high-precision one-dimensional displacement adjustment stage 4 is used to drive the elliptical cylindrical mirror 3 to move along the length direction to switch to different sub-apertures, and the high-precision six-degree-of-freedom displacement adjustment system 5 is used to perform six-degree-of-freedom alignment within a single sub-aperture.

[0030] Figure 2 This is a flowchart of the intelligent automatic stitching and detection method for elliptical cylindrical mirrors provided by the present invention. The intelligent automatic stitching and detection method for elliptical cylindrical mirrors provided by the present invention is used in the intelligent automatic stitching and detection device for elliptical cylindrical mirrors in the present invention, such as... Figure 2 As shown, the intelligent automatic stitching and inspection device for elliptical cylindrical mirrors of this invention is used to realize the intelligent automatic stitching and inspection method for elliptical cylindrical mirrors. This method is implemented through the intelligent automatic stitching interferometry inspection software system 6, and includes:

[0031] Step S1: Control the high-precision one-dimensional displacement adjustment stage 4 and the high-precision six-degree-of-freedom displacement adjustment system 5 to move to the initial position. Step S1 is the process of manually finding the initial position, which is determined by the displacement stage control module.

[0032] Step S2: Call the intelligent calibration algorithm to automatically control the high-precision six-degree-of-freedom displacement adjustment system 5 to perform system calibration. Step S2 is the system calibration process, which is completed through the system calibration module.

[0033] Step S3 involves calling an intelligent automatic measurement algorithm to automatically control the high-precision one-dimensional displacement adjustment stage 4 and the high-precision six-degree-of-freedom displacement adjustment system 5 to automatically measure the surface shapes of multiple sub-apertures on the elliptical cylindrical mirror 3. The overall surface shape information of the elliptical cylindrical mirror 3 is obtained by stitching together the surface shapes of multiple sub-apertures. Step S3 is the automatic measurement process, which is completed by the automatic measurement module.

[0034] Step S2 includes: using the initial position and two randomly generated six-axis displacements as input parameters, calling the intelligent calibration algorithm to automatically control the high-precision six-degree-of-freedom displacement adjustment system 5 to move, acquiring measurement data at three different positions, and using the measurement data at the three different positions to calculate the influence factor matrix between the adjustment displacement of each axis in the high-precision six-degree-of-freedom displacement adjustment system 5 and the Zernike coefficient of the surface shape, thus completing the system calibration.

[0035] In step S2, the process of obtaining the influence factor matrix includes: obtaining the Zernike coefficients of the surface at three different locations; establishing a linear relationship model between the adjustment displacement of each axis in the high-precision six-degree-of-freedom displacement adjustment system 5 and a specific term in the Zernike coefficient through a linear regression fitting method, thereby solving for the influence factor matrix; wherein, the influence factor matrix is ​​used to characterize the degree of influence of the unit displacement of the high-precision six-degree-of-freedom displacement adjustment system 5 in each degree-of-freedom direction on the specific term in the Zernike coefficient.

[0036] Figure 3 This is a system calibration flowchart of the intelligent automatic stitching interferometry detection software system provided in the embodiments of the present invention, as shown below. Figure 3 As shown, the intelligent calibration algorithm steps are as follows: Based on the initial position PIpos_1(1,6) and two randomly generated six-axis displacements move1(1,6) and move2(1,6) as input parameters, the high-precision six-degree-of-freedom displacement adjustment system 5 is automatically controlled to move, obtaining three different positions: PIpos_1(1,6), PIpos_2(1,6), and PIpos_3(1,6), where PIpos_i(1,6) (i takes values ​​of 1, 2, and 3, and PIpos_i(1,6) represents PIpos_1(1,6), PIpos_i(1,6) and PIpos_i(1,6) represent PIpos_1(1,6), PIpos_i(1,6) and PIpos_i(1,6) respectively. 2(1,6) and PIpos_3(1,6) represent the x, y, z, u (x-axis rotation), v (y-axis rotation), and w (z-axis rotation) coordinates at three different positions in the coordinate system. move1(1,6) and move2(1,6) represent the x, y, z, u (x-axis rotation), v (y-axis rotation), and w (z-axis rotation) displacements of two six-axis displacements in the coordinate system, respectively. Based on the Zernike coefficients Z16_1(1,16), Z16_2(1,16), and Z16_3(1,16) of the surface shape at three different positions, the LAR (Least) is used to determine the coordinates. Angle Regression (minimum angular regression) is used to fit the displacement of each axis in PIpos_i(1,6) and match the influence factor matrix of each coefficient in Z16_i(1,16) (where i takes values ​​of 1, 2, and 3, and Z16_i(1,16) represents Z16_1(1,16), Z16_2(1,16), and Z16_3(1,16)) according to the following formula:

[0037] ΔPIpos_i(1,1)= conf(1,1)·Z16_i(1,1)+ conf(1,2)·Z16_i(1,2);

[0038] ΔPIpos_i(1,2)= conf(1,3)·Z16_i(1,1)+ conf(1,4)·Z16_i(1,2);

[0039] ΔPIpos_i(1,3)= conf(1,5)·Z16_i(1,3);

[0040] ΔPIpos_i(1,4)= conf(1,6)·Z16_i(1,4)+ conf(1,7)·Z16_i(1,5);

[0041] ΔPIpos_i(1,5)= conf(1,8)·Z16_i(1,4)+ conf(1,9)·Z16_i(1,6);

[0042] ΔPIpos_i(1,6)= conf(1,10)·Z16_i(1,6);

[0043] Where ΔPIpos_i(1,1) to ΔPIpos_i(1,6) represent the changes in the position coordinates of the six axes of the coordinate system, respectively; Z16_i(1,1) to Z16_i(1,6) are the Zernike coefficients of the i-th position surface (i takes values ​​of 1, 2, 3), thereby obtaining the influence factors conf(1,1) to conf(1,10) assigned to each axis and completing the system calibration.

[0044] Step S3 includes: calling the intelligent automatic measurement algorithm, and automatically controlling the high-precision one-dimensional displacement adjustment stage 4 and the high-precision six-degree-of-freedom displacement adjustment system 5 to automatically measure the surface shape of multiple sub-apertures on the elliptical cylindrical mirror 3 according to the Zernike coefficient and the influence factor matrix, and obtaining the overall surface shape information of the elliptical cylindrical mirror 3 by splicing the surface shapes of multiple sub-apertures.

[0045] The process of the intelligent automatic measurement algorithm is as follows: The position after system calibration is set as the first sub-aperture. The Zernike coefficient of the surface shape of the first sub-aperture is obtained by measuring with an interferometer and a threshold judgment is performed. If the Zernike coefficients of all the first sub-apertures are lower than the preset threshold, it is determined that the first sub-aperture has been aligned and the surface shape information of the first sub-aperture is measured and recorded. If the threshold judgment is not met, the displacement is calculated and adjusted according to the Zernike coefficients obtained by the current measurement and the influence factor matrix obtained by system calibration. The Zernike coefficients of the adjusted first sub-aperture surface shape are measured again until the threshold judgment is met. The high-precision one-dimensional displacement adjustment stage 4 is automatically linked and controlled to move to the next sub-aperture. The alignment and measurement process is repeated until the measurement of all sub-apertures is completed. Then, the overall surface shape information of the elliptical cylindrical mirror 3 is obtained by stitching together the surface shapes of multiple sub-apertures.

[0046] Figure 4 This is an automatic measurement flowchart of the intelligent automatic stitching interferometry detection software system provided in the embodiments of the present invention. The following is in conjunction with... Figure 4 The automatic measurement process of this invention will be described, such as... Figure 4 As shown, the automatic measurement process is as follows: First, the position after system calibration is set as the first sub-aperture. The Zernike coefficient Z16(1,16) of the first sub-aperture surface is obtained by measuring with an interferometer. Threshold judgment is performed. If the Zernike coefficients of all first sub-aperture surfaces are lower than the preset threshold, the judgment is satisfied. If not, the intelligent alignment algorithm is called again to obtain the adjustment displacement PImove(1,6) based on Z16(1,16) and conf(1,10). It represents the adjustment amount of x, y, z, u (x-axis rotation), v (y-axis rotation), and w (z-axis rotation) in the coordinate system, respectively. Fine adjustment is performed. The Zernike coefficients under the corresponding surface are measured again until the threshold judgment is satisfied. Then, it is determined that the corresponding sub-aperture has been aligned. The surface data is measured by the interferometer, and the high-precision one-dimensional displacement adjustment stage 4 and the high-precision six-degree-of-freedom displacement adjustment system 5 are automatically linked and moved to the first sub-aperture ( Figure 4 The image shows the first sub-aperture (①) and the second sub-aperture ( ). Figure 4 The image shown is of sub-aperture ②) ... Nth sub-aperture ( Figure 4 The image shows the sub-aperture N). The first sub-aperture surface shape, the second sub-aperture surface shape, ... the Nth sub-aperture surface shape are obtained and saved according to the above process. The overall surface shape information of the elliptical cylindrical mirror 3 is finally obtained by splicing the N sub-aperture surface shapes.

[0047] The invention will be further illustrated below with specific examples.

[0048] This example illustrates an intelligent automatic stitching and inspection device for an elliptical cylindrical mirror. A laser inside the interferometer 1 emits incident light with a fixed wavelength of 633nm. After passing through a 6-inch (152.4mm) diameter reference mirror 2, a portion of the light returns to the interferometer 1 and is received by the detector to form reference light. The other portion passes through the reference mirror 2 and is reflected back to the surface of a 300mm long elliptical cylindrical mirror 3, where it is received by the detector to form the measured light. The high-precision one-dimensional displacement stage 4 and the high-precision six-degree-of-freedom displacement adjustment system 5 are moved to their initial positions. When the reference light and the measured light coincide, interference fringes are formed and displayed on the intelligent automatic stitching interferometric inspection software system 6.

[0049] Figure 5 The interference fringe pattern at the initial position is acquired by the interference detection software provided in the embodiments of the present invention, such as... Figure 5 As shown in the figure, the red square area represents the region where the first sub-aperture is located. Figure 5 As can be seen from this, the first term of the Zernike coefficient z16(1,16) of the first sub-aperture (corresponding to...) Figure 5 The ZFR 1 value is -449.083 nm, and the second term of the Zernike coefficient z16(1,16) of the first sub-aperture (corresponding to...) Figure 5 The ZFR 2 value is 1212.468 nm, and the third term of the Zernike coefficient z16(1,16) of the first sub-aperture (corresponding to...) Figure 5 The ZFR 3 value is 945.307 nm, and the fourth term of the Zernike coefficient z16(1,16) of the first sub-aperture (corresponding to...) Figure 5 The ZFR 4 value is -998.178 nm, and the 6th term of the Zernike coefficient z16(1,16) of the first sub-aperture (corresponding to...) Figure 5 The ZFR 5 value is 73.373 nm, and the 6th term of the Zernike coefficient z16(1,16) of the first sub-aperture (corresponding to...) Figure 5 The ZFR 6 value is 2.458nm.

[0050] Figure 6 The final elliptical cylindrical mirror shape measurement result provided by the embodiments of the present invention is in Figure 6 In the embodiment shown, each sub-aperture is measured repeatedly 5 times for automatic measurement, and the final measurements are stitched together to obtain the overall surface shape information of the measured elliptical cylindrical mirror, such as... Figure 6As shown, the root mean square (rms) error of the overall surface shape information is 44.883 nm, the peak to valley (PV) value is 586.452 nm, and the defocus component power value is 1155.998 nm. Here, "pix" refers to a pixel, and "wave" refers to the number of wavelengths; in this example, the wavelength is 633 nm. The repeatability error of the root mean square (rms) error for a single sub-aperture is less than 2 nm, which is a significant advantage compared to the 5-10 nm error of existing technologies. This enables fully automated, high-precision, and interference-resistant intelligent measurement of elliptical cylindrical mirrors.

[0051] Numerous specific details are set forth in the specification provided herein. However, it will be understood that embodiments of the invention may be practiced without these specific details. In some instances, well-known methods, structures, and techniques have not been shown in detail so as not to obscure the understanding of this specification.

[0052] The optional embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the embodiments of the present invention are not limited to the specific details in the above embodiments. Within the scope of the technical concept of the embodiments of the present invention, various simple modifications can be made to the technical solutions of the embodiments of the present invention, and these simple modifications all fall within the protection scope of the embodiments of the present invention.

[0053] It should also be noted that the various specific technical features described in the above embodiments can be combined in any suitable manner without contradiction. To avoid unnecessary repetition, the embodiments of the present invention will not describe the various possible combinations separately.

[0054] Furthermore, various different implementations of the present invention can be combined arbitrarily, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed in the present invention.

Claims

1. An intelligent automatic splicing and detection device for elliptical cylindrical mirrors, characterized in that, The device includes: an interferometer (1), a reference mirror (2), an elliptical cylindrical mirror (3), a high-precision one-dimensional displacement adjustment stage (4), a high-precision six-degree-of-freedom displacement adjustment system (5), and an intelligent automatic stitching interferometric detection software system (6), wherein: The laser inside the interferometer (1) emits incident light of a fixed wavelength. After passing through the reference mirror (2), part of the light returns to the interferometer (1) and is received by the detector to form reference light. The other part of the light passes through the reference mirror (2) and reaches the surface of the elliptical cylindrical mirror (3). After being reflected by the elliptical cylindrical mirror (3), it returns to the interferometer (1) and is received by the detector to form the measured light. The high-precision one-dimensional displacement adjustment stage (4) and the high-precision six-degree-of-freedom displacement adjustment system (5) are used to support and adjust the position of the elliptical cylindrical mirror (3) so that the reference light and the measured light coincide to form interference fringes. The intelligent automatic splicing interferometric detection software system (6) is connected to the interferometer (1), the high-precision one-dimensional displacement adjustment stage (4) and the high-precision six-degree-of-freedom displacement adjustment system (5) respectively. It performs system calibration and calculates the adjustment displacement by calling the intelligent algorithm, and automatically controls the high-precision one-dimensional displacement adjustment stage (4) and the high-precision six-degree-of-freedom displacement adjustment system (5) to automatically measure the surface shape of multiple sub-apertures on the elliptical cylindrical mirror (3), and finally obtains the overall surface shape information of the elliptical cylindrical mirror (3) by splicing the surface shapes of multiple sub-apertures.

2. The intelligent automatic splicing and detection device for elliptical cylindrical mirrors according to claim 1, characterized in that, The intelligent automatic stitching interferometry detection software system (6) includes: The displacement stage control module is used to control the high-precision one-dimensional displacement adjustment stage (4) and the high-precision six-degree-of-freedom displacement adjustment system (5) to move to the initial position; The system calibration module calls the intelligent calibration algorithm and automatically controls the high-precision six-degree-of-freedom displacement adjustment system (5) to perform system calibration; The automatic measurement module calls the intelligent automatic measurement algorithm to automatically control the high-precision one-dimensional displacement adjustment stage (4) and the high-precision six-degree-of-freedom displacement adjustment system (5) to automatically measure the surface shape of multiple sub-apertures on the elliptical cylindrical mirror (3) and obtain the overall surface shape information of the elliptical cylindrical mirror (3) by splicing.

3. The intelligent automatic splicing and detection device for elliptical cylindrical mirrors according to claim 2, characterized in that, The sub-aperture division rules for the elliptical cylindrical mirror (3) are as follows: the displacement of the sub-aperture and the overlapping area between adjacent sub-apertures satisfy the following relationship. ,in Where is the sub-aperture length, N is the number of sub-apertures, T% is the percentage of overlap between adjacent sub-apertures, and L is the total length of the elliptical cylindrical mirror.

4. The intelligent automatic splicing and detection device for elliptical cylindrical mirrors according to claim 3, characterized in that, The high-precision one-dimensional displacement adjustment stage (4) is used to drive the elliptical cylindrical mirror (3) to move along the length direction to switch to different sub-apertures, and the high-precision six-degree-of-freedom displacement adjustment system (5) is used to perform six-degree-of-freedom alignment within a single sub-aperture.

5. A method for intelligent automatic splicing and inspection of elliptical cylindrical mirrors, used in the intelligent automatic splicing and inspection device for elliptical cylindrical mirrors as described in any one of claims 1-4, characterized in that, This method is implemented through an intelligent automatic stitching interferometry detection software system (6), and includes: Step S1: Control the high-precision one-dimensional displacement adjustment stage (4) and the high-precision six-degree-of-freedom displacement adjustment system (5) to move to the initial position; Step S2: Call the intelligent calibration algorithm to automatically control the high-precision six-degree-of-freedom displacement adjustment system (5) to perform system calibration; Step S3: Call the intelligent automatic measurement algorithm to automatically control the high-precision one-dimensional displacement adjustment stage (4) and the high-precision six-degree-of-freedom displacement adjustment system (5) to automatically measure the surface shape of multiple sub-apertures on the elliptical cylindrical mirror (3). By splicing the surface shapes of multiple sub-apertures, the overall surface shape information of the elliptical cylindrical mirror (3) is obtained.

6. The intelligent automatic splicing and detection method for elliptical cylindrical mirrors according to claim 5, characterized in that, Step S2 includes: Using the initial position and two randomly generated six-axis displacements as input parameters, the intelligent calibration algorithm is called to automatically control the high-precision six-degree-of-freedom displacement adjustment system (5) to move, and obtain measurement data at three different positions. Based on the measurement data at the three different positions, the influence factor matrix between the adjustment displacement of each axis and the Zernike coefficient of the surface shape in the high-precision six-degree-of-freedom displacement adjustment system (5) is obtained by fitting calculation, and the system calibration is completed.

7. The intelligent automatic splicing and detection method for elliptical cylindrical mirrors according to claim 6, characterized in that, In step S2, the process of obtaining the influence factor matrix includes: Obtain the Zernike coefficients of the surface at three different locations; By using the linear regression fitting method, a linear relationship model between the adjustment displacement of each axis in the high-precision six-degree-of-freedom displacement adjustment system (5) and a specific term in the Zernike coefficient is established, thereby solving the influence factor matrix; Among them, the influence factor matrix is ​​used to characterize the degree of influence of the unit displacement of the high-precision six-degree-of-freedom displacement adjustment system (5) on specific terms in the Zernike coefficient in each degree of freedom direction.

8. The intelligent automatic splicing and detection method for elliptical cylindrical mirrors according to claim 7, characterized in that, Step S3 includes: The intelligent automatic measurement algorithm is invoked, and based on the Zernike coefficient and the influence factor matrix, the high-precision one-dimensional displacement adjustment stage (4) and the high-precision six-degree-of-freedom displacement adjustment system (5) are automatically linked to measure the surface shape of multiple sub-apertures on the elliptical cylindrical mirror (3). The overall surface shape information of the elliptical cylindrical mirror (3) is obtained by splicing.

9. The intelligent automatic splicing and detection method for elliptical cylindrical mirrors according to claim 8, characterized in that, The process of the intelligent automatic measurement algorithm is as follows: The calibrated position of the system is set as the first sub-aperture. The Zernike coefficient of the surface shape of the first sub-aperture is obtained by measuring with an interferometer, and a threshold judgment is performed. If the Zernike coefficients of all first sub-aperture surfaces are lower than the preset threshold, it is determined that the first sub-aperture has been aligned, and the surface shape information of the first sub-aperture is measured and recorded. If the threshold judgment is not met, the displacement is calculated and adjusted based on the Zernike coefficient obtained from the current measurement and the influence factor matrix obtained from the system calibration. The Zernike coefficient of the adjusted first sub-aperture surface is measured again until the threshold judgment is met. The automatic linkage control high-precision one-dimensional displacement adjustment stage (4) moves to the next sub-aperture, repeats the alignment and measurement process until all sub-apertures are measured, and then the overall surface shape information of the elliptical cylindrical mirror (3) is obtained by splicing.

10. The intelligent automatic splicing and detection method for elliptical cylindrical mirrors according to claim 9, characterized in that, The process of obtaining the adjustment displacement in step S2 includes: substituting the measured Zernike coefficients into the linear relationship model characterized by the influence factor matrix, calculating the required displacement correction amount for each axis of the high-precision six-degree-of-freedom displacement adjustment system (5), and taking the opposite sign of the displacement correction amount as the adjustment displacement amount.

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