A multi-dimensionally adjustable refrigeration probe photoetching exposure angle control structure

Abstract

The application relates to the technical field of photoetching processes, and discloses a multi-dimensionally adjustable refrigeration detector photoetching exposure angle control structure which comprises a bearing plate used for placing a chip, a control groove used for multidimensional rotation is arranged in the inner wall of the bearing plate, a first speed reducer motor is fixedly connected to the inner wall of the control groove, a bearing seat is fixedly connected to the inner wall of the control groove, a universal shaft is arranged at the top end of the bearing seat, and an adjusting mechanism used for multidimensional adjustment is arranged on the universal shaft; the adjusting mechanism is used for realizing random adjustment in three dimension directions, the light can irradiate the side surface of the chip during exposure, the exposure effect is improved, the groove wheel body is arranged, intermittent continuous driving of the chip rotation is facilitated, full-circle exposure operation of the chip is realized, and the detachable horizontal driving bin and the groove wheel body are arranged, different types of groove wheels can be replaced according to the chip model on a production line.

Description

Technical Field

[0001] This invention relates to the field of photolithography technology, and in particular to a multi-dimensional adjustable cooled detector photolithography exposure angle control structure. Background Technology

[0002] Cooled detectors, such as infrared focal plane detectors and superconducting detectors, are core components of high-end optoelectronic detection systems. Their chip surfaces require the fabrication of high-precision microstructures through photolithography. The precise control of the exposure angle directly determines the geometric morphology, dimensional accuracy, and final performance of the microstructure.

[0003] In the use of existing equipment, traditional lithography stages mostly adopt a single-axis tilt and unidirectional rotation design, which can only achieve pitch or tilt of the wafer in a single direction. It is difficult to meet the requirements of bidirectional uncoupled tilting in the left and right and front and back at the same time. Moreover, for chips of different shapes, it is not convenient to achieve full-circumference exposure at a constant speed during the lithography process. The fixed mode of rotation mechanism is difficult to adapt to the diverse lithography process scenarios. Summary of the Invention

[0004] Purpose of the invention: The purpose of this invention is to provide a multi-dimensional adjustable cooling detector photolithography exposure angle control structure to overcome the above-mentioned shortcomings in the prior art.

[0005] Technical solution: A multi-dimensional adjustable cooled detector photolithography exposure angle control structure, including a carrier plate for placing a chip, a control groove for multi-dimensional rotation is formed in the inner wall of the carrier plate, a first reduction motor is fixedly connected in the inner wall of the control groove, a carrier base is fixedly connected in the inner wall of the control groove, a universal joint is provided at the top of the carrier base, and an adjustment mechanism for multi-dimensional adjustment is provided on the universal joint.

[0006] As a further description of the above technical solution: the adjustment mechanism includes a central rod fixedly connected to the top of the universal joint, and an annular slide rail fixedly connected to the outer wall of the central rod. The annular slide rail is used to guide the circumferential rotation of the chip, and a replacement component for matching the chip rotation speed is provided on the annular slide rail.

[0007] One end of the annular slide rail has an opening, through which a first reduction motor passes. An L-shaped actuating rod is fixedly connected to the main shaft of the first reduction motor, and one end of the actuating rod is sleeved and connected to the outer peripheral wall of the central rod.

[0008] As a further description of the above technical solution: a second reduction motor is fixedly connected to the outer wall of the toggle lever, a drive gear is fixedly connected to the main shaft end of the second reduction motor, and a driven gear is meshed with the front end of the drive gear.

[0009] As a further description of the above technical solution: the driven gear is fixedly sleeved on the central rod, and the driven gear and the actuating rod are symmetrically arranged about the universal axis to avoid motion interference.

[0010] As a further description of the above technical solution: the adjustment mechanism also includes a sliding plate slidably connected inside the annular slide rail, a mounting frame is fixedly connected to the front end of the sliding plate, the front view cross section of the mounting frame is a U-shaped structure, a placement plate is fixedly connected to the top end of the mounting frame, and an adsorption plate is fixedly connected to the top end of the placement plate.

[0011] As a further description of the above technical solution: the replacement component includes a horizontal drive chamber connected to the mounting bracket via a spline, the top of the horizontal drive chamber is rotatably connected to a drive gear, and a number of tooth blocks are fixedly arranged in an equally spaced annular array on the outer peripheral wall of the annular slide rail, and the drive gear and the number of tooth blocks form a gear transmission structure.

[0012] As a further description of the above technical solution: the horizontal drive compartment includes a mounting block that slides with the mounting frame, a connecting block is inserted into the front end of the mounting block, a rotating cavity is opened on the outer wall of the mounting block, a rotating shaft is inserted into the cavity wall of the rotating cavity, the top end of the rotating shaft is fixedly connected to the drive gear, and a grooved wheel body is fixedly connected to the bottom end of the rotating shaft.

[0013] A spring telescopic rod is rotatably connected to the bottom wall of the rotating cavity, and the top end of the spring telescopic rod is inserted into the bottom end of the grooved wheel body.

[0014] A third reduction motor is fixedly connected to the inner wall of the connecting block, and a dial wheel is fixedly connected to the main shaft end of the third reduction motor. A dial pin is fixedly connected to the top of the dial wheel, and the dial pin is slidably connected to the sliding groove in the groove wheel body.

[0015] As a further description of the above technical solution: the horizontal drive compartment also includes a locking compartment and a trigger compartment respectively opened in the inner wall of the mounting block. A guide rod is fixedly connected to the inner wall of the locking compartment, and a trigger plate is slidably connected to the outer wall of the guide rod. The trigger plate is used to trigger the locking connection block.

[0016] A push plate is fixedly connected to the outer wall of the trigger plate, and a sliding groove is provided on the outer wall of the push plate. A sliding rod is slidably connected in the inner wall of the sliding groove, and an inclined push block is fixedly connected to the top of the sliding rod. An inclined groove is provided below the inclined push block in the bottom wall of the locking chamber, and the inclined groove and the inclined push block are slidably engaged.

[0017] A return spring is fitted onto the guide rod.

[0018] As a further description of the above technical solution: a trigger rod is slidably connected to the inner wall of the trigger chamber, one end of the trigger rod extends into the locking chamber, and the trigger rod is in close contact with the push plate;

[0019] The trigger rod has a trigger groove in its inner wall, and the groove wall has a bevel. A locking screw passes through the trigger groove and is used to fasten the mounting bracket to the mounting block.

[0020] Beneficial effects:

[0021] 1. The adjustment mechanism allows for free adjustment in three dimensions, facilitating light to illuminate the sides of the chip during exposure and improving the exposure effect.

[0022] 2. The design of the grooved wheel body facilitates the intermittent and continuous driving of the chip rotation, enabling full-circle exposure of the chip.

[0023] 3. With the detachable horizontal drive chamber and the grooved wheel body, different types of grooved wheels can be replaced according to the chip model on the production line to achieve speed matching and adapt to the shape of the current chip. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural schematic diagram of a multi-dimensional adjustable cooling detector photolithography exposure angle control structure proposed in this invention.

[0025] Figure 2 This is a three-dimensional structural schematic diagram of the adjustment mechanism of the present invention;

[0026] Figure 3 This is a three-dimensional structural schematic diagram of the annular slide rail of the present invention;

[0027] Figure 4 This is a three-dimensional structural schematic diagram of the horizontal drive compartment of the present invention;

[0028] Figure 5 This is a three-dimensional cross-sectional view of the horizontal drive compartment of the present invention.

[0029] Figure 6 This is a schematic diagram of the connection structure between the grooved wheel body and the spring telescopic rod of the present invention;

[0030] Figure 7 This is a three-dimensional cross-sectional view of the replacement component of the present invention.

[0031] Legend:

[0032] 1. Support plate; 2. Control groove; 3. Support base; 4. Universal joint;

[0033] 5. Adjustment mechanism; 51. Center rod; 52. Circular slide rail;

[0034] 53. Replacement components; 531. Horizontal drive compartment; 5311. Mounting block; 5312. Connecting block; 5313. Rotating cavity; 5314. Rotating shaft; 5315. Grooved wheel body; 5316. Spring telescopic rod; 5317. Actuating wheel; 5318. Actuating pin; 5319. Locking compartment; 5320. Trigger compartment; 5321. Guide rod; 5322. Trigger plate; 5323. Push plate; 5324. Slide groove; 5325. Sliding rod; 5326. Angled push block; 5327. Angled groove; 5328. Trigger rod; 5329. Trigger groove; 5330. Locking screw;

[0035] 532. Drive gear; 533. Gear block;

[0036] 54. Opening; 55. Actuating lever; 56. Drive gear; 57. Driven gear; 58. Sliding plate; 59. Mounting bracket; 510. Placement plate; 511. Adsorption plate. Detailed Implementation

[0037] To make the technical solution of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0038] Reference Figure 1-7 A multi-dimensional adjustable photolithography exposure angle control structure for a cooled detector includes a carrier plate 1 for placing a chip. A control groove 2 for multi-dimensional rotation is formed in the inner wall of the carrier plate 1. A first geared motor is fixedly connected to the inner wall of the control groove 2. A carrier seat 3 is fixedly connected to the inner wall of the control groove 2. A universal joint 4 is provided at the top of the carrier seat 3, and an adjustment mechanism 5 for multi-dimensional adjustment is provided on the universal joint 4. The carrier plate 1 is used to place the workpiece. By utilizing the multi-directional deflection characteristics of the universal joint 4 in conjunction with the adjustment mechanism 5, the chip's multi-dimensional angle can be freely adjusted. This solves the problem that existing equipment cannot perform bidirectional, uncoupled skew adjustment, and can adapt to the multi-angle exposure requirements during the photolithography of cooled detector chips, effectively improving the precision of chip microstructure fabrication and overall exposure uniformity.

[0039] As a preferred technical solution in this embodiment, the adjustment mechanism 5 includes a central rod 51 fixedly connected to the top of the universal joint 4. An annular slide rail 52 is fixedly connected to the outer wall of the central rod 51. The annular slide rail 52 is used to guide the circumferential rotation of the chip. A replacement component 53 for matching the chip rotation speed is provided on the annular slide rail 52. One end of the annular slide rail 52 has an opening 54, and a first geared motor passes through the opening 54. An L-shaped actuating rod 55 is fixedly connected to the main shaft end of the first geared motor. One end of the actuating rod 55 is sleeved and connected to the outer peripheral wall of the central rod 51. The first geared motor drives the L-shaped actuating rod 55 to perform reciprocating rotation. By pulling the central rod 51 through the actuating rod 55, and cooperating with the deflection performance of the universal joint 4, the annular slide rail 52 and the chip above it can be driven to complete the precise adjustment of the front and rear angles. At the same time, the annular slide rail 52, combined with the structure design of the replaceable component 53, can match the corresponding rotational operating parameters according to the different specifications and shapes of the cooled detector chips, thereby improving the flexibility of exposure adjustment.

[0040] As a preferred technical solution in this embodiment, a second geared motor is fixedly connected to the outer wall of the lever 55, and a drive gear 56 is fixedly connected to the main shaft end of the second geared motor. The front end of the drive gear 56 meshes with a driven gear 57. The second geared motor outputs power to drive the drive gear 56 to rotate, thereby driving the center rod 51 to drive the overall structure to achieve left and right angle adjustment, which cooperates with the front and rear angle adjustment driven by the first geared motor to achieve bidirectional tilt adjustment of the chip.

[0041] As a preferred technical solution in this embodiment, the driven gear 57 is fixedly sleeved on the central rod 51, and the driven gear 57 and the actuating rod 55 are symmetrically arranged about the universal joint 4 to avoid motion interference. By adopting a symmetrical layout of the driven gear 57 and the actuating rod 55 with the universal joint 4, the problem of overlapping positions and motion interference of each moving part during the two-way angle adjustment process in the front-back and left-right directions is avoided from the structural layout.

[0042] As a preferred technical solution of this embodiment, the adjustment mechanism 5 further includes a sliding plate 58 slidably connected inside the annular slide rail 52. A mounting frame 59 is fixedly connected to the front end of the sliding plate 58. The front view cross section of the mounting frame 59 is a U-shaped structure. A placement plate 510 is fixedly connected to the top end of the mounting frame 59. An adsorption plate 511 is fixedly connected to the top end of the placement plate 510. The sliding fit structure between the sliding plate 58 and the annular slide rail 52 can drive the mounting frame 59 and the upper supporting structure to make circumferential sliding motion along the annular slide rail 52. The chip is fixed by negative pressure adsorption of the adsorption plate 511, which can avoid chip displacement and shaking during photolithography. At the same time, the circumferential sliding motion can achieve full-circumference exposure of the chip without dead angles.

[0043] As a preferred technical solution in this embodiment, the replacement component 53 includes a horizontal drive chamber 531 splinedly connected to the mounting bracket 59. The top of the horizontal drive chamber 531 is rotatably connected to a drive gear 532. A plurality of tooth blocks 533 are fixedly arranged in an evenly spaced annular array on the outer peripheral wall of the annular slide rail 52, and the drive gear 532 and the plurality of tooth blocks 533 form a gear transmission structure. The horizontal drive chamber 531 and the mounting bracket 59 are detachably assembled through the spline connection, which facilitates the quick replacement and maintenance of subsequent components. At the same time, relying on the gear transmission structure formed by the drive gear 532 and the annular array tooth blocks 533, the rotational power is converted into circumferential travel power, driving the horizontal drive chamber 531 to drive the chip to make uniform circumferential motion along the annular slide rail 52.

[0044] As a preferred embodiment, the horizontal drive chamber 531 includes a mounting block 5311 that slides with the mounting frame 59. A connecting block 5312 is inserted into the front end of the mounting block 5311. A rotating cavity 5313 is formed on the outer wall of the mounting block 5311, and a rotating shaft 5314 is inserted into the cavity wall of the rotating cavity 5313. The top end of the rotating shaft 5314 is fixedly connected to the drive gear 532, and a grooved wheel body 5315 is fixedly connected to the bottom end of the rotating shaft 5314. A spring telescopic rod 5316 is rotatably connected to the bottom wall of the rotating cavity 5313, and the top end of the spring telescopic rod 5316 is inserted into the bottom end of the grooved wheel body 5315. A third reduction motor is fixedly connected to the inner wall of the connecting block 5312, and a turn wheel 5317 is fixedly connected to the main shaft end of the third reduction motor. A pin 5318 is fixedly connected to the top of 17, and the pin 5318 is slidably connected to the sliding groove in the grooved wheel body 5315. The third geared motor drives the actuating wheel 5317 to rotate, which drives the pin 5318 to slide back and forth along the sliding groove of the grooved wheel body 5315. By utilizing the intermittent transmission principle of the grooved wheel mechanism, the grooved wheel body 5315 is rotated intermittently. Then, the rotating shaft 5314 drives the drive gear 532 to rotate intermittently, so that the chip can achieve intermittent circumferential exposure, which meets the exposure rhythm requirements of the photolithography process. At the same time, the spring telescopic rod 5316 elastically abuts against the grooved wheel body 5315, which can realize the quick installation and removal of the grooved wheel. With the plug-in structure of the mounting block 5311 and the connecting block 5312, the grooved wheel body 5315 of the appropriate specifications can be quickly replaced according to the detector chip of different shapes and sizes.

[0045] As a preferred embodiment, the horizontal drive chamber 531 further includes a locking chamber 5319 and a trigger chamber 5320 respectively formed in the inner wall of the mounting block 5311. A guide rod 5321 is fixedly connected to the inner wall of the locking chamber 5319, and a trigger plate 5322 is slidably connected to the outer wall of the guide rod 5321. The trigger plate 5322 is used to trigger the locking connecting block 5312. A push plate 5323 is fixedly connected to the outer wall of the trigger plate 5322, and a groove 5324 is formed on the outer wall of the push plate 5323. A sliding rod 5325 is slidably connected to the inner wall of the groove 5324, and an inclined push block 5326 is fixedly connected to the top end of the sliding rod 5325. Below the push block 5326, there is an inclined groove 5327 formed on the bottom wall of the locking chamber 5319, and the inclined groove 5327 slides with the inclined push block 5326. A return spring is sleeved on the guide rod 5321. Utilizing the sliding engagement of the sliding groove 5324 and the sliding rod 5325, and the inclined plane transmission principle of the inclined push block 5326 and the inclined groove 5327, the horizontal thrust of the push plate 5323 is converted into the vertical clamping force of the inclined push block 5326. With the help of the return spring, the structure can be automatically reset, and the locking and unlocking operations of the mounting block 5311 and the connecting block 5312 can be completed quickly without complicated disassembly and assembly tools, simplifying the replacement process of the groove wheel body 5315 and the horizontal drive chamber 531.

[0046] As a preferred technical solution in this embodiment, a trigger rod 5328 is slidably connected to the inner wall of the trigger chamber 5320. One end of the trigger rod 5328 extends into the locking chamber 5319, and the trigger rod 5328 is in close contact with the push plate 5323. A trigger groove 5329 is provided in the inner wall of the trigger rod 5328, and a bevel is provided on the groove wall of the trigger groove 5329. A locking screw 5330 passes through the trigger groove 5329. The locking screw 5330 is used to fasten the mounting bracket 59 and the mounting block 5311. The locking screw 5330 and the bevel of the trigger groove 5329 are pressed together. Tightening the locking screw 5330 can push the trigger rod 5328 to move, thereby pressing the push plate 5323 to complete the fastening and limiting of the locking structure. Twisting it out in the opposite direction can release the lock, realizing the quick assembly and disassembly of the mounting bracket 59 and the mounting block 5311.

[0047] Working principle: First, the first geared motor drives the actuating lever 55, which pulls the central lever 51 to rotate radially back and forth along the shaft end of the first geared motor. This causes the annular slide rail 52 to drive the adsorption disk 511 on the mounting bracket 59 to adjust the angle in the front and back directions. The second geared motor drives the driven gear 57 to rotate through the drive gear 56. The driven gear 57 drives the annular slide rail 52 and the adsorption disk 511 through the central lever 51 to achieve the angle adjustment in the left and right directions. The third geared motor drives the actuating wheel 5317 to rotate, and the pin 531 on the actuating wheel 5317... 8 passes continuously through the sliding groove in the groove body 5315. The pin 5318 can push the inner wall of the sliding groove, causing the groove body 5315 to rotate. After the actuating wheel 5317 rotates once, it pushes the groove body 5315 to rotate again, thereby driving the drive gear 532 to rotate intermittently through the rotating shaft 5314. At this time, the drive gear 532 moves in a circle along the annular slide rail 52 through several tooth blocks 533. The adsorption disk 511 is driven to rotate through the placement plate 510, so that the chip after the angle is adjusted can rotate, and its edges and corners can be exposed, improving the exposure effect.

[0048] When the chip type in the production line changes, the operator can manually remove the locking screw 5330. The locking screw 5330 is screwed outward and no longer presses against the trigger groove 5329. At this time, the reset spring drives the trigger plate 5322 to reset, and the sliding groove 5324 on the push plate 5323 pulls the inclined push block 5326 away from the connecting block 5312 through the sliding rod 5325. At this time, the connecting block 5312 separates from the mounting block 5311, exposing the rotating cavity 5313. At this time, the operator can manually pull the spring telescopic rod 5316 downward so that the spring telescopic rod 5316 no longer abuts against the grooved wheel body 5315. At this time, the operator can manually remove the grooved wheel body 5315, replace it with the corresponding grooved wheel body 5315, and release the spring telescopic rod 5316. The spring telescopic rod 5316 is inserted upward and abuts against the grooved wheel body 5315.

[0049] Following the same procedure, the connecting block 5312 is fitted and installed with the mounting block 5311, and the locking screw 5330 is screwed in. The locking screw 5330 pushes the push plate 5323 forward by pressing the trigger groove 5329. The push plate 5323 pushes the two inclined push blocks 5326 to mate with the connecting block 5312. The inclined push blocks 5326 are inserted into the connecting block 5312 and lock the connecting block 5312, thus realizing the replacement operation.

[0050] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of this patent should be determined by the appended claims.

Claims

1. A multi-dimensional adjustable cooled detector photolithography exposure angle control structure, comprising a carrier plate (1) for placing a chip, characterized in that, The inner wall of the support plate (1) is provided with a control groove (2) for multi-dimensional rotation. A first reduction motor is fixedly connected to the inner wall of the control groove (2). A support seat (3) is fixedly connected to the inner wall of the control groove (2). A universal joint (4) is provided at the top of the support seat (3). An adjustment mechanism (5) for multi-dimensional adjustment is provided on the universal joint (4).

2. The multi-dimensional adjustable cooled detector photolithography exposure angle control structure according to claim 1, characterized in that, The adjustment mechanism (5) includes a central rod (51) fixedly connected to the top of the universal joint (4). An annular slide rail (52) is fixedly connected to the outer wall of the central rod (51). The annular slide rail (52) is used to guide the circumferential rotation of the chip. A replacement component (53) for matching the chip rotation speed is provided on the annular slide rail (52). An opening (54) is opened at one end of the annular slide rail (52), and a first reduction motor passes through the opening (54). An L-shaped actuating rod (55) is fixedly connected to the main shaft end of the first reduction motor. One end of the actuating rod (55) is sleeved and connected to the outer peripheral wall of the central rod (51).

3. The multi-dimensional adjustable cooled detector photolithography exposure angle control structure according to claim 2, characterized in that, A second geared motor is fixedly connected to the outer wall of the lever (55), and a drive gear (56) is fixedly connected to the main shaft end of the second geared motor. The front end of the drive gear (56) meshes with a driven gear (57).

4. The multi-dimensional adjustable cooled detector photolithography exposure angle control structure according to claim 3, characterized in that, The driven gear (57) is fixedly sleeved on the central rod (51), and the driven gear (57) and the actuating rod (55) are symmetrically arranged about the universal joint (4) to avoid motion interference.

5. The multi-dimensional adjustable cooled detector photolithography exposure angle control structure according to claim 1, characterized in that, The adjustment mechanism (5) further includes a sliding plate (58) slidably connected inside the annular slide rail (52). The front end of the sliding plate (58) is fixedly connected to a mounting bracket (59). The front view cross section of the mounting bracket (59) is a U-shaped structure. The top end of the mounting bracket (59) is fixedly connected to a placement plate (510). The top end of the placement plate (510) is fixedly connected to an adsorption plate (511).

6. The multi-dimensional adjustable cooled detector photolithography exposure angle control structure according to claim 2, characterized in that, The replacement component (53) includes a horizontal drive chamber (531) splinedly connected to the mounting bracket (59). The top of the horizontal drive chamber (531) is rotatably connected to a drive gear (532). A number of tooth blocks (533) are fixedly arranged in an evenly spaced annular array on the outer peripheral wall of the annular slide rail (52), and the drive gear (532) and the number of tooth blocks (533) form a gear transmission structure.

7. The multi-dimensional adjustable cooled detector photolithography exposure angle control structure according to claim 6, characterized in that, The horizontal drive compartment (531) includes a mounting block (5311) that slides with the mounting frame (59). A connecting block (5312) is inserted into the front end of the mounting block (5311). A rotating cavity (5313) is formed on the outer wall of the mounting block (5311), and a rotating shaft (5314) is inserted into the cavity wall of the rotating cavity (5313). The top end of the rotating shaft (5314) is fixedly connected to the drive gear (532), and the bottom end of the rotating shaft (5314) is fixedly connected to the Geneva wheel body (5315). A spring telescopic rod (5316) is rotatably connected to the bottom wall of the rotating cavity (5313), and the top end of the spring telescopic rod (5316) is inserted into the bottom end of the grooved wheel body (5315). A third reduction motor is fixedly connected to the inner wall of the connecting block (5312), and a deflector wheel (5317) is fixedly connected to the main shaft end of the third reduction motor. A deflector pin (5318) is fixedly connected to the top end of the deflector wheel (5317), and the deflector pin (5318) is slidably connected to the sliding groove in the grooved wheel body (5315).

8. The multi-dimensional adjustable cooled detector photolithography exposure angle control structure according to claim 7, characterized in that, The horizontal drive chamber (531) further includes a locking chamber (5319) and a trigger chamber (5320) respectively formed in the inner wall of the mounting block (5311). A guide rod (5321) is fixedly connected to the inner wall of the locking chamber (5319), and a trigger plate (5322) is slidably connected to the outer wall of the guide rod (5321). The trigger plate (5322) is used to trigger the locking connecting block (5312), and a push plate (5323) is fixedly connected to the outer wall of the trigger plate (5322). Furthermore, a sliding groove (5324) is provided on the outer wall of the push plate (5323), and a sliding rod (5325) is slidably connected in the inner wall of the sliding groove (5324). A slanted push block (5326) is fixedly connected to the top of the sliding rod (5325). A slanted groove (5327) is provided below the slanted push block (5326) on the bottom wall of the locking chamber (5319), and the slanted groove (5327) and the slanted push block (5326) are slidably engaged. A return spring is sleeved on the guide rod (5321).

9. The multi-dimensional adjustable cooled detector photolithography exposure angle control structure according to claim 8, characterized in that, A trigger rod (5328) is slidably connected to the inner wall of the trigger chamber (5320). One end of the trigger rod (5328) extends into the locking chamber (5319), and the trigger rod (5328) is in close contact with the push plate (5323). A trigger groove (5329) is provided in the inner wall of the trigger rod (5328), and a bevel is provided on the groove wall of the trigger groove (5329). A locking screw (5330) passes through the trigger groove (5329), and the locking screw (5330) is used to fasten the mounting bracket (59) and the mounting block (5311).

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