A double-layer faraday cage with adjustable opening overlap degree and semiconductor equipment

Abstract

The application relates to the technical field of wafer processing equipment, in particular to a double-layer Faraday cage with adjustable opening overlap and semiconductor equipment, which comprises an outer Faraday cage, an inner Faraday cage, an angle detection piece and a plurality of shielding pieces. The outer Faraday cage and the inner Faraday cage can rotate relatively, so that the inner ignition window and each outer ignition window overlap to form a conducting channel through which an alternating magnetic field passes in the radial direction. The detection end of the angle detection piece faces the outer Faraday cage and / or the inner Faraday cage. Each shielding piece is arranged in each receiving groove in one-to-one correspondence and moves along the circumferential direction between each receiving groove and each inner ignition window or each outer ignition window. The application adjusts the overlapping area of the ignition window by adopting the relative rotation structure of the inner and outer double-layer Faraday cages, can increase the conducting channel area in the plasma ignition stage, and thus can significantly improve the effective magnetic flux penetrating into the reaction cavity, and effectively overcome the ignition difficulty problem caused by the narrow slit design.

Description

Technical Field

[0001] This invention relates to the field of wafer processing equipment technology, and more particularly to a double-layer Faraday cage with adjustable aperture overlap and semiconductor equipment. Background Technology

[0002] In ICP-type plasma resist removal or etching equipment used in high-hydrogen processes, although the high-frequency electromagnetic field generated by the induction coil can effectively excite the plasma, the unavoidable capacitive coupling between the induction coil and the gas in the reaction chamber causes the plasma to bombard and erode the inner wall of the quartz dielectric window. To alleviate this problem, the industry typically introduces a Faraday shield between the induction coil and the quartz tube, and designs its slit width to be extremely narrow in order to block the direct bombardment of ions on the inner wall of the quartz tube to the greatest extent.

[0003] However, while this "narrow slit" design suppresses erosion, it significantly exacerbates the "ignition difficulty" phenomenon in the process. From a physical perspective, although narrowing the slit effectively blocks the displacement current path from the induction coil to the plasma and greatly weakens the high-voltage capacitive electric field that accelerates ions, it inevitably increases the attenuation effect on the alternating magnetic field and reduces the effective magnetic flux penetrating into the reaction chamber. This causes the overall electric field strength generated by electromagnetic induction within the chamber to decrease. Given that hydrogen molecules have high dissociation energy and ionization threshold, their requirements for the initial discharge electric field strength are extremely stringent; when the narrow slit design causes the penetration field strength to be lower than the critical value for gas breakdown, electron avalanche is difficult to establish, thus causing problems such as increased ignition voltage, ignition delay, or even ignition failure. Summary of the Invention

[0004] This invention relates to a double-layer Faraday cage with adjustable aperture overlap and a semiconductor device. The purpose is to adjust the overlap area of ​​the ignition window by rotating the inner and outer Faraday cages relative to each other, and to further fine-tune the size of the conduction channel by setting a circumferentially movable shielding member inside the window. This increases the magnetic field penetration area during the plasma ignition stage to solve the ignition difficulty problem in the high-hydrogen process, and reduces the overlap area during the maintenance stage to effectively shield capacitive coupling and reduce the bombardment and erosion of the inner wall of the quartz tube by ions, thereby meeting the dual process requirements of easy ignition and long life.

[0005] To achieve the above objectives, the present invention provides a double-layer Faraday cage with adjustable opening overlap, comprising: An outer Faraday cage is arranged around the quartz tube and between the quartz tube and the induction coil. The outer Faraday cage has several external ignition windows that penetrate its sidewalls and extend axially. An inner Faraday cage is arranged in a ring between the quartz tube and the outer Faraday cage. The inner Faraday cage has several internal ignition windows that penetrate its sidewalls. The internal ignition windows extend axially and are arranged one-to-one with the external ignition windows. The outer Faraday cage and the inner Faraday cage can rotate relative to each other so that the internal ignition windows and each of the external ignition windows overlap to form a conductive channel through which the alternating magnetic field passes radially. An angle detection element, with its detection end facing the outer Faraday cage and / or the inner Faraday cage, is used to detect the relative rotation angle between the outer Faraday cage and the inner Faraday cage, thereby determining the overlap area between the outer ignition window and the inner ignition window. Several blocking components are provided, and the inner sidewalls of each inner ignition window and each outer ignition window are recessed with a circumferentially extending receiving groove. Each blocking component is correspondingly disposed in each receiving groove and moves circumferentially between each receiving groove and each inner ignition window or each outer ignition window to increase or decrease the area of ​​the conduction channel.

[0006] Optionally, the double-layer Faraday cage with adjustable opening overlap also includes several circumferential driving components fixed to the inner sidewall of the storage groove. The driving end of each of the circumferential driving members is connected to each of the blocking members to drive each of the blocking members to move between each of the receiving slots and each of the inner ignition windows or each of the outer ignition windows.

[0007] Optionally, the double-layer Faraday cage with adjustable opening overlap also includes a cooling base; The cooling base extends circumferentially in a ring structure and is located at the top of the processing chamber. The inner Faraday cage and the outer Faraday cage are both located at the top of the cooling base so as to cool the inner Faraday cage and the outer Faraday cage to the target temperature range through the cooling base.

[0008] Optionally, the angle detection element includes a laser receiver and at least two laser emitters; The inner Faraday cage or the outer Faraday cage has a support ring on its outer wall fixing ring. At least two laser emitters are circumferentially spaced on the top of the support ring. The laser receiver is located outside the support ring and on the emission path of the laser beam emitted by the laser emitter. During the plasma ignition stage and the plasma maintenance stage, the laser receiver receives the beams emitted by two adjacent laser emitters, respectively. After receiving the beam, the inner Faraday cage and the outer Faraday cage stop rotating relative to each other.

[0009] Optionally, the double-layer Faraday cage with adjustable aperture overlap further includes several first magnetic elements and several second magnetic elements; The top of the support ring is recessed with a sliding groove extending circumferentially, and a portion of each laser emitting element is slidably disposed within the sliding groove. Each of the first magnetic components is correspondingly disposed on the laser emitting component; a plurality of second magnetic components are arranged at intervals along the circumference in the sliding groove. The plurality of first magnetic components and the plurality of second magnetic components are respectively connected to an independent power supply. By controlling the on and off of the power supply of each second magnetic component, each first magnetic component is attracted to rotate the laser emitting component in the circumference, so as to adjust the circumferential distance between two adjacent laser emitting components.

[0010] Optionally, the double-layer Faraday cage with adjustable opening overlap further includes a drive body, a first gear, and a second gear; The second gear is fixed to the outer wall of the inner Faraday cage or the outer Faraday cage. The second gear meshes with the first gear. The driving body is located on the top of the cooling base, and its driving end is connected to the first gear to drive the first gear and the second gear to rotate, thereby driving the inner Faraday cage or the outer Faraday cage to rotate.

[0011] Optionally, the double-layer Faraday cage with adjustable opening overlap also includes a guide ring. The end face of the inner Faraday cage or the outer Faraday cage opposite to the cooling base is the first docking part and the second docking part; The first docking portion has a recessed guide ring groove that extends circumferentially in a ring-shaped structure; the guide ring is fixed to the second docking portion and is movably disposed within the guide ring groove circumferentially.

[0012] Optionally, the double-layer Faraday cage with adjustable opening overlap also includes several mechanical blocking mechanisms arranged circumferentially and disposed between the inner Faraday cage and the outer Faraday cage, each of the mechanical blocking mechanisms including a connector, a blocking member and a blocking groove. The opposing end faces of the inner Faraday cage and the outer Faraday cage are the third and fourth docking portions. The fourth docking portion is provided with an arc-shaped blocking groove extending in the circumferential direction. The blocking member is slidably disposed in the blocking groove. The two ends of the connector are respectively fixed to the third docking portion and the blocking member, so as to force the inner Faraday cage and the outer Faraday cage to stop relative rotation under the resistance of the blocking member and the inner sidewall of the blocking groove.

[0013] Optionally, the mechanical blocking mechanism may further include several elastic buffers; Each of the aforementioned blocking grooves is provided with at least one of the aforementioned elastic buffer members. One end of each of the aforementioned elastic buffer members is fixed to the inner sidewall of the blocking groove, and the other end extends circumferentially and is fixed to the blocking member, so that it extends or shortens accordingly when the blocking member rotates circumferentially relative to the blocking groove.

[0014] To achieve the above objectives, the present invention also provides a semiconductor device, including a processing chamber, a quartz tube, a top cover, an induction coil, and a double-layer Faraday cage with adjustable aperture overlap. The quartz tube is disposed on the top of the processing chamber, the top cover is disposed on the top of the quartz tube, and the induction coil is arranged around the outer layer of the double-layer Faraday cage with adjustable aperture overlap.

[0015] The beneficial effects of this invention are as follows: This invention adjusts the overlap area of ​​the ignition window by employing a relative rotation structure of inner and outer double-layer Faraday cages. This increases the conductive channel area during the plasma ignition stage, significantly improving the effective magnetic flux penetrating into the reaction chamber. This effectively overcomes the ignition difficulties caused by the narrow slit design, ensuring smooth plasma ignition in high-hydrogen processes. Simultaneously, during the plasma maintenance stage, the conductive channel can be narrowed by reducing the overlap area, restoring the shielding effect on capacitive coupling, suppressing ion bombardment and erosion of the quartz tube's inner wall, and extending the quartz tube's service life. Furthermore, by setting a circumferentially movable shielding component on the inner wall of the window, the conductive channel area can be further fine-tuned, achieving continuous and precise control of magnetic field penetration. In addition, the relative rotation angle is monitored in real time by an angle detection component to determine the overlap area, ensuring the accuracy of the opening overlap adjustment and process stability. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a semiconductor device in some embodiments of the present invention; Figure 2 for Figure 1 The diagram shows the structure of the inner and outer Faraday cages. Figure 3 for Figure 1 An enlarged schematic diagram of the structure at position A in the diagram; Figure 4 for Figure 2 An enlarged schematic diagram of the structure at position B in the diagram is shown. Figure 5 for Figure 2 An enlarged schematic diagram of the structure at position C in the diagram.

[0017] Explanation of reference numerals in the attached figures: 1. Processing chamber; 2. Quartz tube; 3. Top cover; 4. Inner Faraday cage; 41. Inner ignition window; 42. Storage slot; 5. Outer Faraday cage; 51. Outer ignition window; 6. Induction coil; 7. Cooling base; 81. Drive body; 82. First gear; 83. Second gear; 9. Guide ring; 10. Guide ring groove; 11. Support ring; 111. Sliding groove; 12. Laser emitter; 13. Laser receiver; 14. First magnetic component; 15. Second magnetic component; 16. Connector; 17. Blocking component; 18. Blocking groove; 19. Elastic buffer; 20. Shielding component; 21. Circumferential drive component. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0019] This invention relates to a double-layer Faraday cage with adjustable aperture overlap and a semiconductor device. The purpose is to adjust the overlap area of ​​the ignition window by rotating the inner and outer Faraday cages relative to each other, and to further fine-tune the size of the conduction channel by setting a circumferentially movable shielding member inside the window. This increases the magnetic field penetration area during the plasma ignition stage to solve the ignition difficulty problem in the high-hydrogen process, and reduces the overlap area during the maintenance stage to effectively shield capacitive coupling and reduce the bombardment and erosion of the inner wall of the quartz tube by ions, thereby meeting the dual process requirements of easy ignition and long life.

[0020] To address the problems existing in the prior art, embodiments of the present invention provide a double-layer Faraday cage with adjustable opening overlap, such as... Figure 1 As shown, the double-layer Faraday cage with adjustable opening overlap includes an outer Faraday cage 5, an inner Faraday cage 4, an angle detection element, and several shielding elements 20.

[0021] In one embodiment, such as Figure 1As shown, the outer Faraday cage 5 is arranged around the quartz tube 2 and between the quartz tube 2 and the induction coil 6. The outer Faraday cage 5 has several external ignition windows 51 penetrating its sidewalls, and these external ignition windows 51 extend axially. Preferably, the external ignition windows 51 are arranged at equal intervals. The number of external ignition windows 51 can be three, four, or more.

[0022] In one embodiment, such as Figure 1 and Figure 2 As shown, the inner Faraday cage 4 is arranged in a ring between the quartz tube 2 and the outer Faraday cage 5. The inner Faraday cage 4 has several inner ignition windows 41 penetrating its sidewalls. These inner ignition windows 41 extend axially and correspond one-to-one with the outer ignition windows 51. Preferably, the number and size of the inner ignition windows 41 and the outer ignition windows 51 are the same; further details are omitted here.

[0023] In one embodiment, such as Figure 1 and Figure 2 As shown, the outer Faraday cage 5 and the inner Faraday cage 4 can rotate relative to each other. It should be understood that the relative rotation of the outer Faraday cage 5 and the inner Faraday cage 4 can mean that both the outer Faraday cage 5 and the inner Faraday cage 4 can rotate, or one of them can remain stationary while the other rotates.

[0024] In one embodiment, such as Figure 1 As shown, the inner ignition window 41 and each of the outer ignition windows 51 overlap to form a conductive channel through which the alternating magnetic field passes radially; the inner ignition window 41 and the outer ignition window 51 overlap to form a conductive channel by the relative rotation of the inner Faraday cage 4 and the outer Faraday cage 5. From the perspective of electromagnetic principles, the essence of the Faraday cage is to use the eddy current effect of the metal wall to shield the alternating electromagnetic field, and its shielding strength is closely related to the opening ratio and opening size of the metal wall.

[0025] When the inner ignition window 41 and the outer ignition window 51 are completely offset, the metal solid part accounts for the largest proportion, which has a strong blocking and attenuation effect on the capacitive electric field and alternating magnetic field generated by the induction coil 6. This can significantly weaken the displacement current path that causes ion acceleration, thereby protecting the quartz tube 2 from ion bombardment. When the inner ignition window 41 and the outer ignition window 51 are circumferentially aligned and overlapped, it is equivalent to instantly "opening" a low-impedance radial magnetic circuit on the metal shielding layer. The magnetic flux that was originally short-circuited or reflected by the metal wall can pass through the overlapping area and directly enter the interior of the quartz tube 2. According to Faraday's law of electromagnetic induction, the increase in penetrating magnetic flux will significantly increase the intensity of the induced electric field in the reaction cavity, making it easier for high dissociation energy hydrogen molecules to obtain enough energy to generate initial electron avalanche, thereby effectively reducing the ignition voltage and solving the ignition difficulty problem caused by the narrow slit design.

[0026] In one embodiment, such as Figure 1 As shown, the detection end of the angle detection device faces the outer Faraday cage 5 and / or the inner Faraday cage 4 to detect the relative rotation angle between the outer Faraday cage 5 and the inner Faraday cage 4, thereby determining the overlap area between the outer ignition window 51 and the inner ignition window 41.

[0027] The relative rotation angle between the outer Faraday cage 5 and the inner Faraday cage 4 is directly monitored in real time using an angle detection device and converted into the overlap area data of the outer ignition window 51 and the inner ignition window 41. From the perspective of control principle, this provides a precise feedback benchmark for the dynamic adjustment of the conduction channel area. Since the magnetic field penetration required during the ignition stage and the shielding strength required during the maintenance stage are strictly dependent on the actual overlap of the outer ignition window 51 and the inner ignition window 41, this setting enables the system to accurately determine the current opening status, thereby ensuring that the stopping position of the relative rotation is precisely matched with the target process parameters. This avoids the overlap area deviation caused by mechanical transmission errors or inertia, ensuring the reliability of ignition success rate and shielding effect.

[0028] In one embodiment, such as Figure 1 , Figure 2 and Figure 5 As shown, the double-layer Faraday cage with adjustable opening overlap also includes several blocking members 20, the number of which is the same as the total number of the outer ignition window 51 and the inner ignition window 41. The shape of the blocking member 20 can be a rectangular or arc-shaped thin plate adapted to the contours of the outer ignition window 51 and the inner ignition window 41, and its width is less than or equal to the circumferential width of the receiving groove 42.

[0029] In one embodiment, such as Figure 1 , Figure 2 and Figure 5 As shown, the inner sidewalls of each inner ignition window 41 and each outer ignition window 51 are recessed with a circumferentially extending storage groove 42. Each shielding member 20 is correspondingly disposed in each storage groove 42 and moves circumferentially between each storage groove 42 and each inner ignition window 41 or each outer ignition window 51 to increase or decrease the area of ​​the conduction channel.

[0030] When the inner ignition window 41 and the outer ignition window 51 overlap to form a conductive channel, their effective current-passing area directly determines the magnitude of the alternating magnetic flux that can pass through the Faraday cage. By adding a circumferentially extending storage groove 42 to the inner sidewall of the inner ignition window 41 and the outer ignition window 51 and hiding the shielding member 20 therein, the shielding member 20 can slide from the storage groove 42 into the inner ignition window 41 or the outer ignition window 51 (hereinafter collectively referred to as the window) area or retreat from the window to its original position without changing the relative angle of the double-layer Faraday cage body, thereby achieving a secondary fine adjustment of the conductive channel area.

[0031] Specifically, when the shielding component 20 moves into the window, it is equivalent to increasing the local metal cross-sectional area on the magnetic path. According to the principle of electromagnetic induction, this will increase the cross-sectional area of ​​the eddy current loop, enhance the short-circuit attenuation effect on the alternating magnetic field, thereby reducing the effective magnetic flux of actual penetration. Conversely, it will increase the penetration amount. This fine-tuning mechanism breaks through the limitation of relying solely on the relative rotation of the inner Faraday cage 4 and the outer Faraday cage 5 for coarse adjustment. It enables continuous and precise control of the magnetic field penetration amount within a large dynamic range, which not only meets the stringent requirements for strong magnetic field penetration during the ignition stage, but also allows for flexible optimization of shielding effectiveness during the process maintenance stage. At the same time, since the shielding component 20 can be completely housed in the slot, it will not additionally hinder magnetic field penetration in the non-working state, ensuring the freedom and flexibility of device adjustment.

[0032] Specifically, the application scenarios for adjusting the conduction channel using the shielding member 20 include: when the magnetic flux needs to be further increased to assist ignition during the plasma ignition stage, the conduction channel area is increased by partially retracting the shielding member 20 from the receiving groove 42; when the shielding effect needs to be enhanced to protect the quartz tube 2 during the plasma maintenance stage, the conduction channel area is reduced by sliding the shielding member 20 into the window; and when the magnetic field penetration needs to be finely adjusted due to changes in gas composition or drift in the characteristics of the quartz tube 2 during the process, the shielding member 20 is used to perform small incremental compensation to maintain the stability of the plasma state.

[0033] In some embodiments, such as Figure 5 As shown, the double-layer Faraday cage with adjustable opening overlap also includes several circumferential driving components 21 fixedly disposed on the inner sidewall of the storage groove 42.

[0034] In some embodiments, such as Figure 5 As shown, the driving end of each of the circumferential driving members 21 is connected to each of the blocking members 20 to drive each of the blocking members 20 to move between each of the receiving slots 42 and each of the inner ignition windows 41 or each of the outer ignition windows 51.

[0035] By connecting the circumferential drive component 21 to each shielding component 20 in a one-to-one correspondence, an independent driving force can be provided to each shielding component 20, enabling it to move precisely along the circumferential direction between the receiving slot 42 and the inner ignition window 41 or the outer ignition window 51. From the perspective of control principle, this one-to-one driving method eliminates the motion interference between multiple shielding components 20, allowing the conduction area of ​​each window to be adjusted individually. This enables targeted local fine-tuning based on the differences in plasma density distribution at different circumferential positions within the reaction chamber, ensuring uniform magnetic field penetration throughout the entire annular region and avoiding plasma inhomogeneity caused by local flow area deviations.

[0036] In some embodiments, the circumferential drive member 21 can be a micro linear motor, a pneumatic push rod, or a piezoelectric ceramic actuator. One end of the drive member 21 is fixed to the inner wall of the receiving groove 42, and the other end is connected to the shielding member 20. Through telescopic movement, the shielding member 20 is driven to slide into or out of the window area in the circumferential direction, thereby realizing the electronic control adjustment of the conduction channel area.

[0037] In some embodiments, such as Figure 3 As shown, the double-layer Faraday cage with adjustable opening overlap also includes a cooling base 7; the cooling base 7 is preferably in the form of a ring; the structure of the cooling base 7 can be a metal base with cooling water pipes coiled inside, and the cooling medium circulates in the pipes to continuously remove the heat absorbed by the Faraday cage during operation, or the cooling base 7 can be designed as an aluminum or copper ring component with a hollow cooling channel, and efficient heat exchange can be achieved by introducing coolant into the channel.

[0038] In some embodiments, such as Figure 3 As shown, the cooling base 7 extends circumferentially in a ring structure and is located on the top of the processing chamber 1. The inner Faraday cage 4 and the outer Faraday cage 5 are both located on the top of the cooling base 7, so that the inner Faraday cage 4 and the outer Faraday cage 5 can be cooled to the target temperature range by the cooling base 7.

[0039] By mounting the inner Faraday cage 4 and the outer Faraday cage 5 together on a ring-shaped cooling base 7 located at the top of the processing chamber 1, the cooling channels (such as circulating coolant or cooling air pipes) inside the cooling base 7 continuously absorb and remove the heat generated by the inner Faraday cage 4 and the outer Faraday cage 5 in the alternating magnetic field due to the eddy current effect. From a thermodynamic perspective, this bottom-concentrated heat dissipation method can not only effectively prevent the inner Faraday cage 4 and the outer Faraday cage 5 from thermal deformation or material softening due to long-term operation, ensuring the stability of their mechanical structure precision and shielding performance, but also block the transfer of heat to the top of the processing chamber 1.

[0040] In some embodiments, such as Figure 3 and Figure 4 As shown, the angle detection device includes a laser receiver 13 and at least two laser emitters 12. Of course, in other embodiments, the number of laser emitters 12 is not limited to two, but can also be three or more.

[0041] In some embodiments, such as Figure 3 and Figure 4 As shown, the outer wall fixing ring of the inner Faraday cage 4 or the outer Faraday cage 5 is provided with a support ring 11. The support ring 11 is preferably a ring structure, but is not limited to a ring structure.

[0042] In some embodiments, such as Figure 3 and Figure 4 As shown, at least two laser emitters 12 are circumferentially spaced on the top of the support ring 11, and the laser receiver 13 is disposed outside the support ring 11 and located on the emission path of the light beam emitted by the laser emitters 12, so that the laser receiver 13 receives the light beams emitted by two adjacent laser emitters 12 respectively during the plasma ignition stage and the plasma maintenance stage, and the inner Faraday cage 4 and the outer Faraday cage 5 stop rotating relative to each other after receiving the light beam.

[0043] By circumferentially spacing at least two laser emitters 12 on the top of the support ring 11 and arranging laser receivers 13 along their beam emission paths, when the inner Faraday cage 4 and the outer Faraday cage 5 rotate relative to each other, the support ring 11 and its laser emitters 12 rotate synchronously, causing laser beams at different circumferential positions to sequentially sweep across the laser receivers 13. During the plasma ignition stage, the system controls the relative rotation until the laser receivers 13 receive the beam from the first laser emitter 12. At this point, the corresponding window overlap area reaches the preset maximum ignition opening, triggering a stop signal to lock the state and ensuring that the penetrating magnetic flux is large enough to satisfy the hydrogen... The critical electric field strength for breakdown; after entering the maintenance phase, the relative rotation is driven again until the laser receiver 13 receives the beam of the adjacent second laser emitter 12. At this time, the window overlap area is reduced to the preset shielding opening, effectively blocking the capacitive coupling path and protecting the quartz tube 2 from ion bombardment. This non-contact photoelectric angle feedback mechanism utilizes the high directionality and fast response characteristics of laser to accurately convert the mechanical angle into a digital switching signal, avoiding the physical wear and signal drift problems of traditional potentiometers or encoders. It realizes the rapid and accurate switching of the conduction channel area under the two working conditions of ignition and maintenance, which greatly improves the stability of the process and the service life of the equipment.

[0044] In some embodiments, such as Figure 4As shown, the double-layer Faraday cage with adjustable aperture overlap also includes several first magnetic elements 14 and several second magnetic elements 15, the number of first magnetic elements 14 being consistent with the number of laser emitting elements 12. The structures of the first magnetic elements 14 and the second magnetic elements 15 can be electromagnets or permanent magnets.

[0045] In some embodiments, such as Figure 3 and Figure 4 As shown, the top of the support ring 11 has a circumferentially extending sliding groove 111 recessed therein, and a portion of each laser emitting element 12 is slidably disposed within the sliding groove 111. The shape of the groove cavity of the sliding groove 111 can be annular.

[0046] In some embodiments, such as Figure 4 As shown, each of the first magnetic elements 14 is correspondingly disposed on the laser emitting element 12; a plurality of second magnetic elements 15 are arranged at intervals along the circumference in the sliding groove 111. The plurality of first magnetic elements 14 and the plurality of second magnetic elements 15 are respectively connected to an independent power supply. By controlling the on and off of the power supply of each second magnetic element 15, each of the first magnetic elements 14 is attracted to rotate the laser emitting element 12 in the circumference, so as to adjust the circumferential spacing between two adjacent laser emitting elements 12.

[0047] By fixing the first magnetic component 14 to the laser emitter 12 in a one-to-one correspondence, and arranging multiple second magnetic components 15 connected to independent power supplies at circumferential intervals within the sliding groove 111, the electromagnetic attraction generated by selective energization can drive the first magnetic component 14 to carry the laser emitter 12 to make a slight circumferential translation within the sliding groove 111, thereby flexibly changing the circumferential spacing between adjacent laser emitters 12. This non-contact magnetic fine-tuning mechanism essentially allows for programmable reconfiguration of the "photoelectric trigger position" of the angle detection component without altering the mechanical rotation structure of the double-layer Faraday cage. When it is necessary to adapt to the differentiated requirements of different process gases (such as hydrogen, helium, etc.) for the intensity of the ignition magnetic field, only the relative spacing of the laser emitters 12 needs to be adjusted to recalibrate the window overlap area corresponding to the inner Faraday cage 4 and the outer Faraday cage 5 when they stop rotating. This allows the same hardware to quickly match multiple process formulations within a wide range without mechanical disassembly or replacement of parts, significantly improving the versatility of the device.

[0048] In some embodiments, such as Figure 3 As shown, the double-layer Faraday cage with adjustable aperture overlap also includes a drive body 81, a first gear 82, and a second gear 83. The drive body 81 can be a servo motor or a stepper motor.

[0049] In some embodiments, such as Figure 3As shown, the second gear 83 is fixed to the outer wall of the inner Faraday cage 4 or the outer Faraday cage 5.

[0050] In some embodiments, such as Figure 3 As shown, the second gear 83 is meshed with the first gear 82. The drive body 81 is located on the top of the cooling base 7, and its drive end is connected to the first gear 82 to drive the first gear 82 and the second gear 83 to rotate, thereby driving the inner Faraday cage 4 or the outer Faraday cage 5 to rotate.

[0051] In this embodiment, the drive body 81 drives the first gear 82 and the second gear 83 to mesh and transmit the rotational motion of the motor into the circumferential rotation of a certain layer in the double-layer Faraday cage. From the perspective of mechanical transmission principle, the meshing of the first gear 82 and the second gear 83 has the characteristics of stable transmission ratio, large torque output and high positioning accuracy. It can ensure that the inner Faraday cage 4 and the outer Faraday cage 5 maintain a uniform speed and stability during relative rotation, and avoid the continuity of magnetic field penetration caused by sudden changes in window overlap area due to speed fluctuations.

[0052] In some embodiments, such as Figure 3 As shown, the double-layer Faraday cage with adjustable opening overlap also includes a guide ring 9; the guide ring 9 is preferably in the form of a circular ring structure.

[0053] In some embodiments, such as Figure 3 As shown, the end face of the inner Faraday cage 4 or the outer Faraday cage 5 opposite to the cooling base 7 is the first docking part and the second docking part; the first docking part is recessed with a guide ring groove 10 extending in a ring shape along the circumferential direction; the guide ring 9 is fixed to the second docking part and is movably disposed in the guide ring groove 10 along the circumferential direction.

[0054] The end faces of the inner Faraday cage 4 or the outer Faraday cage 5 opposite to the cooling base 7 are divided into a first docking portion and a second docking portion. An annular guide groove 10 extending circumferentially is formed on the first docking portion. Simultaneously, a guide ring 9 is fixed to the second docking portion and movably engaged within the guide groove 10, thus forming a circumferential guide constraint structure similar to a flange and groove. Figure 3 In this embodiment, the guide ring groove 10 is formed on the cooling base 7; the guide ring 9 is fixed to the inner Faraday cage 4 or the outer Faraday cage 5.

[0055] In some embodiments, such as Figure 2 and Figure 5As shown, the double-layer Faraday cage with adjustable opening overlap also includes several mechanical blocking mechanisms arranged circumferentially between the inner Faraday cage 4 and the outer Faraday cage 5. By arranging several mechanical blocking mechanisms circumferentially between the inner Faraday cage 4 and the outer Faraday cage 5, when the inner Faraday cage 4 and the outer Faraday cage 5 rotate relative to each other, the mechanical blocking mechanisms will mechanically terminate the relative rotation, preventing the windows from being completely misaligned or excessively overlapping due to control system failure or gear inertia. This ensures that the area of ​​the conduction channel is always limited within the preset safe adjustment range, avoiding ignition failure or shielding failure caused by uncontrolled opening, and providing reliable mechanical overload protection for the equipment.

[0056] In some embodiments, such as Figure 2 and Figure 5 As shown, each of the mechanical blocking mechanisms includes a connector 16, a blocking member 17, and a blocking groove 18; the connector 16 is preferably a connecting rod. The blocking member 17 is preferably an arc-shaped slider or cylindrical pin that matches the arc-shaped blocking groove 18, and its outer diameter is slightly smaller than the groove width of the blocking groove 18.

[0057] In some embodiments, such as Figure 2 and Figure 5 As shown, the opposite end faces of the inner Faraday cage 4 and the outer Faraday cage 5 are the third docking portion and the fourth docking portion. The fourth docking portion is provided with a blocking groove 18 with an arc-shaped structure extending in the circumferential direction. The blocking member 17 is slidably disposed in the blocking groove 18. The two ends of the connecting member 16 are respectively fixed to the third docking portion and the blocking member 17, so that the inner Faraday cage 4 and the outer Faraday cage 5 are forced to stop relative rotation under the abutment of the blocking member 17 and the inner sidewall of the blocking groove 18.

[0058] The blocking member 17 is slidably disposed in the blocking groove 18 of the fourth docking part, and is fixedly connected to the third docking part by the connecting member 16, forming a flexible linkage limiting structure spanning the inner and outer Faraday cages 5; when the inner Faraday cage 4 and the outer Faraday cage 5 rotate relative to each other, the blocking member 17 slides together in the blocking groove 18. Once the preset limit angle is reached, the blocking member 17 will be rigidly resisted by the inner wall of the blocking groove 18, which will mechanically terminate the relative rotation and prevent the window from being completely closed or excessively overlapped due to control failure or inertia exceeding the limit.

[0059] In some embodiments, such as Figure 5 As shown, the mechanical blocking mechanism also includes several elastic buffers 19. The structure of the elastic buffers 19 is preferably a compression spring or an elastic rubber pad.

[0060] In some embodiments, such as Figure 5As shown, at least one elastic buffer member 19 is provided in each of the blocking grooves 18. One end of each elastic buffer member 19 is fixed to the inner sidewall of the blocking groove 18, and the other end extends circumferentially and is fixed to the blocking member 17, so that it extends or shortens when the blocking member 17 rotates circumferentially relative to the blocking groove 18.

[0061] By setting an elastic buffer 19 extending circumferentially in the blocking groove 18 and fixing its two ends to the inner wall of the blocking groove 18 and the blocking member 17 respectively, when the blocking member 17 slides in the blocking groove 18 with the relative rotation of the inner Faraday cage 4 and the outer Faraday cage 5, the elastic buffer 19 will extend or shorten accordingly. From the perspective of mechanical principles, this is equivalent to introducing an elastic energy storage element into the mechanical limiting structure. When the blocking member 17 slides to the limit position and is about to make hard contact with the inner wall of the blocking groove 18, the elastic buffer 19 can absorb and dissipate the impact kinetic energy brought by the rotational inertia through its own elastic deformation, transforming the instantaneous rigid collision into a flexible gradual deceleration, effectively reducing the peak impact force and avoiding damage to the connecting member 16, the blocking member 17 and the gear transmission system from the hard impact.

[0062] To address the problems existing in the prior art, embodiments of the present invention also provide a semiconductor device, such as... Figure 1 As shown, the semiconductor device includes a processing chamber 1, a quartz tube 2, a top cover 3, an induction coil 6, and a double-layer Faraday cage with adjustable aperture overlap. The quartz tube 2 is located on the top of the processing chamber 1, the top cover 3 is located on the top of the quartz tube 2, and the induction coil 6 is arranged around the outer layer of the double-layer Faraday cage 5 in the double-layer Faraday cage with adjustable aperture overlap.

[0063] In some embodiments, the structure of the semiconductor device may be, but is not limited to, an ICP-type plasma etching device, a resist stripping device, or a deposition device; in these devices, the outer Faraday cage 5 and the inner Faraday cage 4 are arranged in a ring between the quartz tube 2 and the induction coil 6. By dynamically adjusting the overlap of their openings, the problem of ignition difficulties in high-hydrogen processes can be solved, and the bombardment and erosion of the inner wall of the quartz tube 2 by plasma can be effectively suppressed, thereby improving the stability of various semiconductor processes and the service life of the equipment.

[0064] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the present invention. Furthermore, the present invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A double-layer Faraday cage with adjustable aperture overlap, characterized in that, include: An outer Faraday cage is arranged around the quartz tube and between the quartz tube and the induction coil. The outer Faraday cage has several external ignition windows that penetrate its sidewalls and extend axially. An inner Faraday cage is arranged in a ring between the quartz tube and the outer Faraday cage. The inner Faraday cage has several internal ignition windows that penetrate its sidewalls. The internal ignition windows extend axially and are arranged one-to-one with the external ignition windows. The outer Faraday cage and the inner Faraday cage can rotate relative to each other so that the internal ignition windows and each of the external ignition windows overlap to form a conductive channel through which the alternating magnetic field passes radially. An angle detection element, with its detection end facing the outer Faraday cage and / or the inner Faraday cage, is used to detect the relative rotation angle between the outer Faraday cage and the inner Faraday cage, thereby determining the overlap area between the outer ignition window and the inner ignition window. Several blocking components are provided, and the inner sidewalls of each inner ignition window and each outer ignition window are recessed with a circumferentially extending receiving groove. Each blocking component is correspondingly disposed in each receiving groove and moves circumferentially between each receiving groove and each inner ignition window or each outer ignition window to increase or decrease the area of ​​the conduction channel.

2. The double-layer Faraday cage with adjustable opening overlap according to claim 1, characterized in that, It also includes several circumferential driving components fixedly disposed on the inner sidewall of the storage slot; The driving end of each of the circumferential driving members is connected to each of the blocking members to drive each of the blocking members to move between each of the receiving slots and each of the inner ignition windows or each of the outer ignition windows.

3. The double-layer Faraday cage with adjustable opening overlap according to claim 1, characterized in that, It also includes a cooling base; The cooling base extends circumferentially in a ring structure and is located at the top of the processing chamber. The inner Faraday cage and the outer Faraday cage are both located at the top of the cooling base so as to cool the inner Faraday cage and the outer Faraday cage to the target temperature range through the cooling base.

4. The double-layer Faraday cage with adjustable opening overlap according to claim 3, characterized in that, The angle detection device includes a laser receiver and at least two laser emitters; The inner Faraday cage or the outer Faraday cage has a support ring on its outer wall fixing ring. At least two laser emitters are circumferentially spaced on the top of the support ring. The laser receiver is located outside the support ring and on the emission path of the laser beam emitted by the laser emitter. During the plasma ignition stage and the plasma maintenance stage, the laser receiver receives the beams emitted by two adjacent laser emitters, respectively. After receiving the beam, the inner Faraday cage and the outer Faraday cage stop rotating relative to each other.

5. The double-layer Faraday cage with adjustable opening overlap according to claim 4, characterized in that, It also includes several first magnetic components and several second magnetic components; The top of the support ring is recessed with a sliding groove extending circumferentially, and a portion of each laser emitting element is slidably disposed within the sliding groove. Each of the first magnetic components is correspondingly disposed on the laser emitting component; a plurality of second magnetic components are arranged at intervals along the circumference in the sliding groove. The plurality of first magnetic components and the plurality of second magnetic components are respectively connected to an independent power supply. By controlling the on and off of the power supply of each second magnetic component, each first magnetic component is attracted to rotate the laser emitting component in the circumference, so as to adjust the circumferential distance between two adjacent laser emitting components.

6. The double-layer Faraday cage with adjustable opening overlap according to claim 3, characterized in that, It also includes a drive body, a first gear, and a second gear; The second gear is fixed to the outer wall of the inner Faraday cage or the outer Faraday cage. The second gear meshes with the first gear. The driving body is located on the top of the cooling base, and its driving end is connected to the first gear to drive the first gear and the second gear to rotate, thereby driving the inner Faraday cage or the outer Faraday cage to rotate.

7. The double-layer Faraday cage with adjustable opening overlap according to claim 6, characterized in that, It also includes guide ring components; The end face of the inner Faraday cage or the outer Faraday cage opposite to the cooling base is the first docking part and the second docking part; The first docking portion has a recessed guide ring groove that extends circumferentially in a ring-shaped structure; the guide ring is fixed to the second docking portion and is movably disposed within the guide ring groove circumferentially.

8. The double-layer Faraday cage with adjustable opening overlap according to claim 6, characterized in that, It also includes several mechanical blocking mechanisms arranged circumferentially and disposed between the inner Faraday cage and the outer Faraday cage, each of the mechanical blocking mechanisms including a connector, a blocking member and a blocking groove; The opposing end faces of the inner Faraday cage and the outer Faraday cage are the third and fourth docking portions. The fourth docking portion is provided with an arc-shaped blocking groove extending in the circumferential direction. The blocking member is slidably disposed in the blocking groove. The two ends of the connector are respectively fixed to the third docking portion and the blocking member, so as to force the inner Faraday cage and the outer Faraday cage to stop relative rotation under the resistance of the blocking member and the inner sidewall of the blocking groove.

9. The double-layer Faraday cage with adjustable opening overlap according to claim 8, characterized in that, The mechanical blocking mechanism also includes several elastic buffer components; Each of the aforementioned blocking grooves is provided with at least one of the aforementioned elastic buffer members. One end of each of the aforementioned elastic buffer members is fixed to the inner sidewall of the blocking groove, and the other end extends circumferentially and is fixed to the blocking member, so that it extends or shortens accordingly when the blocking member rotates circumferentially relative to the blocking groove.

10. A semiconductor device, characterized in that, The device includes a processing chamber, a quartz tube, a top cover, an induction coil, and a double-layer Faraday cage with adjustable aperture overlap as described in any one of claims 1 to 9. The quartz tube is disposed on the top of the processing chamber, the top cover is disposed on the top of the quartz tube, and the induction coil is arranged around the outer layer of the double-layer Faraday cage with adjustable aperture overlap.

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