Quartz crystal double-end fixed support tuning fork type force sensitive resonator
Patent Information
- Application Number
- CN201218008007.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2012-12-26
- Publication Date
- 2014-08-27
- Estimated Expiration
- 2032-12-26
AI Technical Summary
该结构存在两方面的问题：一是没有充分考虑音叉式谐振梁的振动衰减问题，即在谐振梁与力学连接结构之间没有设计振动衰减结构，导致能量的损耗以及品质因子(Q值)的降低和系统的不稳定；二是没有充分考虑使外部作用力均布地作用于音叉谐振梁上，即在谐振梁与力学连接结构之间没有设计应力均布结构，导致音叉的两个谐振梁的振动频率发生偏移，致使音叉谐振梁无法工作于正常的谐振模态，导致系统功能失效
[0006]1)本发明的力敏谐振器具有轴对称的谐振梁和振动衰减结构，利用谐振梁振动的差分特性，有效地减小谐振能量的损耗，获得极高Q值，极大地提高力敏测量分辨率和精度。
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Figure CN122664104B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a force-sensitive resonator, and more particularly to a quartz crystal double-ended tuning fork type force-sensitive resonator. Background Technology
[0002] High-precision, digitally output force-sensitive measuring elements are urgently needed in numerous fields such as pressure measurement, inertial measurement, engine control, industrial process control, meteorology, and marine science research. Currently, the widely used force-sensitive element is the quartz crystal double-ended tuning fork force-sensitive resonator, whose resonant frequency changes linearly with the applied load force. This type of force-sensitive resonator uses quartz crystal, which has piezoelectric effect and good temperature characteristics, as the main material. It has the advantages of high resolution, high precision, and digital output, and can be directly applied to digital control systems. However, the current quartz crystal force-sensitive resonator mainly consists of a tuning fork resonant beam directly connected to a mechanical connection structure. The structure has two main problems: First, it does not adequately consider the vibration damping of the tuning fork resonant beam, meaning there is no vibration damping structure designed between the resonant beam and the mechanical connection structure, leading to energy loss, a decrease in the quality factor (Q value), and system instability. Second, it does not adequately consider ensuring that external forces are evenly distributed on the tuning fork resonant beam, meaning there is no stress distribution structure designed between the resonant beam and the mechanical connection structure, causing a shift in the vibration frequencies of the two resonant beams of the tuning fork, preventing the tuning fork resonant beam from operating in its normal resonant mode and resulting in system failure. Summary of the Invention
[0003] The technical problem solved by this invention is to overcome the shortcomings of the prior art and provide a novel quartz crystal double-ended tuning fork force-sensitive resonator, which greatly improves the accuracy, stability and reliability of force-sensitive measurement.
[0004] The technical solution of this invention is: a quartz crystal double-ended tuning fork force-sensitive resonator, wherein the quartz crystal double-ended tuning fork force-sensitive resonator uses quartz crystal material with a cut shape of (ZYw)θ, and has an integrated rectangular parallelepiped structure design, including a mechanical connection structure, a stress distribution structure, a vibration damping structure, a resonant beam, and metal electrodes distributed on the surface of the resonant beam; the resonant beam adopts a tuning fork structure; the outer side of the resonant beam is the vibration damping structure; the outer side of the vibration damping structure is the stress distribution structure; the outer side of the stress distribution structure is the mechanical connection structure; the width of the stress distribution structure is not greater than the overall width of the resonant beam, and the width of the vibration damping structure is... The width of the mechanical connection structure is greater than the width of the stress-distribution structure and the overall width of the resonant beam, forming a protruding structure; the width of the mechanical connection structure is greater than the width of the stress-distribution structure; the thickness of the mechanical connection structure, the stress-distribution structure, the vibration damping structure, and the resonant beam are all the same; the upper surface of the mechanical connection structure on one side of the quartz crystal double-ended fixed-support tuning fork force-sensitive resonator is evenly distributed with first and second pads for connecting AC drive voltage; metal electrodes are distributed on the upper surface of the resonant beam, with the first, second, and third electrodes evenly distributed from left to right on the first tuning fork arm of the resonant beam; the left end of the first electrode is flush with the left fork of the tuning fork structure, and the right end of the first electrode... The third electrode extends to the left node of the resonant beam; the right end of the third electrode is flush with the right fork of the tuning fork structure, and the left end of the third electrode extends to the right node of the resonant beam; the fourth, fifth, and sixth electrodes are symmetrically distributed on the second tuning fork arm of the resonant beam relative to the first tuning fork arm, wherein the fourth electrode corresponds to the position of the first electrode, the fifth electrode corresponds to the position of the second electrode, and the sixth electrode corresponds to the position of the third electrode; the seventh, eighth, ninth, tenth, eleventh, and twelfth electrodes are mirror-distributed on the lower surface of the resonant beam, corresponding to the positions of the first, second, third, fourth, fifth, and sixth electrodes, respectively. The thirteenth, fourteenth, and fifteenth electrodes are distributed on the outer side of the first tuning fork arm of the resonant beam. The left end of the thirteenth electrode is flush with the left fork of the tuning fork structure, and the right end of the thirteenth electrode reaches the left node of the resonant beam. The right end of the fifteenth electrode is flush with the right fork of the tuning fork structure, and the left end of the fifteenth electrode reaches the right node of the resonant beam. The fourteenth electrode is located between the left and right nodes. The sixteenth, seventeenth, and eighteenth electrodes are symmetrically distributed on the inner side of the first tuning fork arm. The sixteenth electrode corresponds to the position of the thirteenth electrode, the seventeenth electrode corresponds to the position of the fourteenth electrode, and the eighteenth electrode corresponds to the position of the fifteenth electrode.The inner side of the second tuning fork arm of the resonant beam has the nineteenth, twentieth, and twenty-first electrodes. The left end of the nineteenth electrode is flush with the left fork of the tuning fork structure, and the right end of the nineteenth electrode extends to the left node of the resonant beam. The right end of the twenty-first electrode is flush with the right fork of the tuning fork structure, and the left end of the twenty-first electrode extends to the right node of the resonant beam. The twentieth electrode is located between the left and right nodes. The outer side of the second tuning fork arm has the twenty-second, twenty-third, and twenty-fourth electrodes symmetrically distributed, with the twenty-second electrode corresponding to the position of the nineteenth electrode, the twenty-third electrode corresponding to the position of the twenty-second electrode, and the twenty-fourth electrode corresponding to the position of the twenty-first electrode. The first pad is connected to the thirteenth electrode via an interconnect line, and the thirteenth electrode is connected to the tenth electrode via an interconnect line. The thirteenth electrode is connected to the second electrode via an interconnect line. The electrode is connected in a series of interconnects: the second electrode is connected to the eighteenth electrode via an interconnect, the eighteenth electrode is connected to the sixth electrode via an interconnect, the sixth electrode is connected to the twentieth electrode via an interconnect; the tenth electrode is connected to the twentieth electrode via an interconnect, the twentieth electrode is connected to the twelfth electrode via an interconnect, the twelfth electrode is connected to the fifteenth electrode via an interconnect, the fifteenth electrode is connected to the eighth electrode via an interconnect, the eighth electrode is connected to the sixteenth electrode via an interconnect, the sixteenth electrode is connected to the fourth electrode via an interconnect, and the fourth electrode is connected to the twenty-third electrode via an interconnect; the second pad is connected to the twenty-second electrode via an interconnect, the second pad is also connected to the first electrode via an interconnect, the first electrode is connected to the seventeenth electrode via an interconnect, the seventeenth electrode is connected to the ninth electrode via an interconnect; the ninth electrode is connected to the twenty-first electrode via an interconnect; the twenty-second electrode is connected to the eleventh electrode via an interconnect, the eleventh electrode is connected to the twenty-fourth electrode via an interconnect, the twenty-fourth electrode is connected to the fifth electrode via an interconnect, and the fifth electrode is connected to the nineteenth electrode via an interconnect. The nineteenth electrode is connected to the seventh electrode via an interconnecting line. The seventh electrode is connected to the fourteenth electrode via an interconnecting line. The fourteenth electrode is connected to the third electrode via an interconnecting line. The third electrode is connected to the twenty-fourth electrode via an interconnecting line.
[0005] The advantages of this invention compared to the prior art are:
[0006] 1) The force-sensitive resonator of the present invention has an axisymmetric resonant beam and a vibration attenuation structure. By utilizing the differential characteristics of the resonant beam vibration, the loss of resonant energy is effectively reduced, and an extremely high Q value is obtained, which greatly improves the resolution and accuracy of force-sensitive measurement.
[0007] 2) The force-sensitive resonator of the present invention has a stress-distributed structure, which makes the external force evenly distributed on the tuning fork resonator beam, maintains the vibration symmetry characteristics of the resonator beam under stress, thereby improving the reliability of mechanical measurement.
[0008] 3) The driving electrodes of the force-sensitive resonator of the present invention are located on the upper surface, lower surface and side surface of the tuning fork resonator to form a three-dimensional driving electrode, which has extremely high driving efficiency and effectively maintains the fundamental frequency resonance stability of the tuning fork resonator, thereby ensuring the stability of mechanical measurement. Attached Figure Description
[0009] Figure 1 This is a top view of the quartz crystal double-ended tuning fork force-sensitive resonator structure of the present invention.
[0010] Figure 2 This is a schematic diagram of the resonant beam and the electrode distribution on its upper surface;
[0011] Figure 3 This is a schematic diagram of the resonant beam and the electrode distribution on its lower surface;
[0012] Figure 4 For the resonant beam along Figure 2 A cross-sectional view of the A-A' axis. Detailed Implementation
[0013] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments:
[0014] This invention discloses a quartz crystal double-ended tuning fork force-sensitive resonator, comprising a mechanical connection structure on both sides, a stress-distributing structure, a vibration damping structure, a resonant beam at the center, and metal electrodes distributed on the surface of the resonant beam. The metal electrodes on the resonant beam surface are used to apply an alternating voltage, thereby driving the tuning fork resonant beam into a resonant operating state. The axial force-sensitive characteristic is measured by utilizing the principle that the resonant frequency of the resonant beam changes linearly with the axial load applied to the mechanical connection structure. The vibration damping structure and stress-distributing structure of this force-sensitive resonator effectively reduce the loss of resonant energy, achieving an extremely high Q value, while ensuring that the axial load is evenly distributed on the tuning fork resonant beam, maintaining the vibration symmetry of the resonant beam, and greatly improving the accuracy and stability of force-sensitive measurements.
[0015] The quartz crystal material used to fabricate this double-ended fixed-support tuning fork force-sensitive resonator is shaped as (ZYw)θ, where θ ranges from ±20°. For a tuning fork resonator beam of length L, when in fundamental frequency resonance, there are two nodes 0.224L away from each end of the resonator beam. The calculation method for these nodes is described in the section on piezoelectric quartz crystals (Qin Zikai, National Defense Industry Press, 1980). Electrodes distributed on the upper, lower, and side surfaces of the tuning fork resonator beam change polarity at the nodes, thereby enabling the tuning fork force-sensitive resonator to be driven to fundamental frequency resonance using AC voltage. This allows the fundamental frequency of the tuning fork resonator beam to sense the load force applied to it.
[0016] like Figure 1The diagram shows the main structure of the quartz crystal double-ended tuning fork force-sensitive resonator of this invention. This force-sensitive resonator is an integrated structure, consisting of mechanical connection structures 11 on both sides, a stress distribution structure 14, a vibration damping structure 13, and a resonant beam 12 at the center. The mechanical connection structures 11 on both sides are connected to the stress distribution structures 14 on both sides, the stress distribution structures 14 on both sides are connected to the vibration damping structures 13 on both sides, and the vibration damping structures 13 on both sides are connected to the resonant beam 12 at the center. The vibration damping structure 13 attenuates the vibration of the tuning fork resonant beam 12, preventing the vibration from being transmitted to the stress distribution structure 14 and the mechanical connection structures 11. The stress distribution structure 14 distributes the force applied to the mechanical connection structures 11 evenly onto the resonant beam 12. This structural design effectively reduces the loss of resonant energy, improves the Q value of the force-sensitive resonator, and simultaneously distributes the force evenly onto the resonant beam 12, maintaining the vibration symmetry and frequency consistency of the resonant beam 12, greatly improving the accuracy and stability of force-sensitive measurements.
[0017] To achieve optimal electromechanical coupling, the distribution design of the metal driving electrodes of the resonant beam needs to be determined based on the beam's geometry and crystal orientation. In this invention, the quartz crystal cut of the double-ended fixed-end tuning fork force-sensitive resonator is chosen to be (ZYw)θ, where θ ranges from ±20°. The length of the tuning fork resonant beam is along the Y-direction, and its width is along the X-direction; therefore, the electric field distribution along the X-direction plays a major role in the piezoelectric effect.
[0018] like Figures 2 to 4 The diagram shows the electrode distribution of a double-ended fixed-support tuning fork force-sensitive resonator operating at the fundamental frequency. The driving electrodes, distributed along the length L of the resonant beam, change polarity at two stress-free nodes located 0.224L from the two ends, thereby driving the resonant beam to the fundamental frequency resonance state.
[0019] like Figures 2 to 4 The force-sensitive resonator shown consists of mechanical connection structures 11 on both sides, a stress distribution structure 14, a vibration damping structure 13, and a resonant beam 12 located in the center. The mechanical connection structures 11 on both sides are connected to the stress distribution structures 14 on both sides, the stress distribution structures 14 on both sides are connected to the vibration damping structures 13 on both sides, and the vibration damping structures 13 on both sides are connected to the resonant beam 12 located in the center. The length of the resonant beam 12 is the distance from the left bifurcation point to the right bifurcation point of the tuning fork resonant beam.
[0020] The interconnecting lines between the metal electrodes distributed on the surface of the resonant beam are deposited on the surface of the resonant beam by evaporation or sputtering using microelectronic processes, and then patterned using MEMS (microelectromechanical systems) technology.
[0021] The specific electrode distribution and interconnection are described below:
[0022] The first electrode 43, the second electrode 44, the third electrode 45, the fourth electrode 46, the fifth electrode 47, and the sixth electrode 48 are distributed on the upper surface of the resonant beam 12. The edges of the first electrode 43 and the fourth electrode 46 adjacent to the vibration damping structure 13 are flush with the left bifurcation of the tuning fork resonant beam, and the edges of the third electrode 45 and the sixth electrode 48 adjacent to the vibration damping structure 13 are flush with the right bifurcation of the tuning fork resonant beam. The seventh electrode 30, the eighth electrode 31, the ninth electrode 32, the tenth electrode 33, the eleventh electrode 34, and the twelfth electrode 35 are distributed on the lower surface of the resonant beam 12. The edges of the seventh electrode 30 and the tenth electrode 33 adjacent to the vibration damping structure 13 are flush with the left bifurcation of the tuning fork resonant beam, and the edges of the ninth electrode 32 and the twelfth electrode 35 adjacent to the vibration damping structure 14 are flush with the right bifurcation of the tuning fork resonant beam. The thirteenth electrode 49, the fourteenth electrode 50, the fifteenth electrode 51, the sixteenth electrode 52, the seventeenth electrode 53, the eighteenth electrode 54, the nineteenth electrode 55, the twentieth electrode 56, the twenty-first electrode 57, the twenty-second electrode 58, the twenty-third electrode 59, and the twenty-fourth electrode 60 are respectively distributed on the side of the tuning fork resonant beam 12.
[0023] First pad 73 and second pad 74, used for connecting AC drive voltage, are distributed on the upper surface of the mechanical connection structure area. First pad 73 is connected to the thirteenth electrode 49 via an interconnect, and the thirteenth electrode 49 is connected to the tenth electrode 33 via an interconnect. The thirteenth electrode 49 is connected to the second electrode 44 via an interconnect, and the second electrode 44 is connected to the eighteenth electrode 54 via an interconnect. The eighteenth electrode 54 is connected to the sixth electrode 48 via an interconnect, and the sixth electrode 48 is connected to the twentieth electrode 56 via an interconnect. The tenth electrode 33 is connected to the twentieth electrode 56 via an interconnect, the twentieth electrode 56 is connected to the twelfth electrode 35 via an interconnect, the twelfth electrode 35 is connected to the fifteenth electrode 51 via an interconnect, the fifteenth electrode 51 is connected to the eighth electrode 31 via an interconnect, the eighth electrode 31 is connected to the sixteenth electrode 52 via an interconnect, the sixteenth electrode 52 is connected to the fourth electrode 46 via an interconnect, and the fourth electrode 46 is connected to the twenty-third electrode 59 via an interconnect. This establishes an electrical connection between pad 73 and the thirteenth electrode 49, tenth electrode 33, second electrode 44, eighteenth electrode 54, sixth electrode 48, twentieth electrode 56, twelfth electrode 35, fifteenth electrode 51, eighth electrode 31, sixteenth electrode 52, fourth electrode 46, and twenty-third electrode 59.
[0024] The second pad 74 is connected to the twenty-second electrode 58 via an interconnect line, and the second pad 74 is also connected to the first electrode 43 via an interconnect line. The first electrode 43 is connected to the seventeenth electrode 53 via an interconnect line, and the seventeenth electrode 53 is connected to the ninth electrode 32 via an interconnect line. The ninth electrode 32 is connected to the twenty-first electrode 57 via an interconnect line. The twenty-second electrode 58 is connected to the eleventh electrode 34 via an interconnect line, and the eleventh electrode 34 is connected to the twenty-fourth electrode 60 via an interconnect line. The twenty-fourth electrode 60 is connected to the fifth electrode 47 via an interconnect line, and the fifth electrode 47 is connected to the nineteenth electrode 55 via an interconnect line. The nineteenth electrode 55 is connected to the seventh electrode 30 via an interconnect line, and the seventh electrode 30 is connected to the fourteenth electrode 50 via an interconnect line. The fourteenth electrode 50 is connected to the third electrode 45 via an interconnect line, and the third electrode 45 is connected to the twenty-fourth electrode 60 via an interconnect line. This achieves the electrical connection between pad 74 and the twenty-second electrode 58, the first electrode 43, the seventeenth electrode 53, the ninth electrode 32, the twenty-first electrode 57, the eleventh electrode 34, the twenty-fourth electrode 60, the fifth electrode 47, the nineteenth electrode 55, the seventh electrode 30, the fourteenth electrode 50, and the third electrode 45.
[0025] An alternating voltage applied between the first pad 73 and the second pad 74 causes the polarity of the electrode connected to the first pad 73 to be opposite to that of the electrode connected to the second pad 74, thereby driving the tuning fork resonant beam to the fundamental frequency resonance state.
[0026] The above description is only the best specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the protection scope of the present invention.
[0027] The contents not described in detail in this specification are common knowledge to those skilled in the art.
Claims
1. A quartz crystal double-ended fixed-end tuning fork force-sensitive resonator, characterized in that: The quartz crystal double-ended tuning fork type force-sensitive resonator uses quartz crystal material with a cut shape of (ZYw)θ and has an integrated rectangular structure design, including a mechanical connection structure (11), a stress distribution structure (14), a vibration damping structure (13), a resonant beam (12), and metal electrodes distributed on the surface of the resonant beam; the resonant beam (12) adopts a tuning fork structure; the outer side of the resonant beam (12) is the vibration damping structure (13); the outer side of the vibration damping structure (13) is the stress distribution structure (14); the outer side of the stress distribution structure (14) is the mechanical connection structure (11); the width of the stress distribution structure (14) is not large. The width of the vibration damping structure (13) is greater than the width of the stress distribution structure (14) and the overall width of the resonant beam (12), forming a protruding structure (39); the width of the mechanical connection structure (11) is greater than the width of the stress distribution structure (14); the thicknesses of the mechanical connection structure (11), the stress distribution structure (14), the vibration damping structure (13), and the resonant beam (12) are all the same; the upper surface of the mechanical connection structure (11) on one side of the quartz crystal double-ended fixed tuning fork force-sensitive resonator is uniformly distributed with a first pad (73) and a second pad (74) for connecting the AC drive voltage. Metal electrodes are distributed on the upper surface of the resonant beam (12). The first electrode (43), the second electrode (44), and the third electrode (45) are evenly distributed from left to right on the first tuning fork arm of the resonant beam (12). The left end of the first electrode (43) is flush with the left fork of the tuning fork structure, and the right end of the first electrode (43) reaches the left node of the resonant beam (12). The right end of the third electrode (45) is flush with the right fork of the tuning fork structure, and the left end of the third electrode (45) reaches the right node of the resonant beam (12). The fourth electrode (46) and the fifth electrode (47) are symmetrically distributed on the second tuning fork arm of the resonant beam (12) relative to the first tuning fork arm. The sixth electrode (48) is located where the fourth electrode (46) corresponds to the position of the first electrode (43), the fifth electrode (47) corresponds to the position of the second electrode (44), and the sixth electrode (48) corresponds to the position of the third electrode (45). The seventh electrode (30), the eighth electrode (31), the ninth electrode (32), the tenth electrode (33), the eleventh electrode (34), and the twelfth electrode (35) are mirror-distributed on the lower surface of the resonant beam (12), corresponding to the positions of the first electrode (43), the second electrode (44), the third electrode (45), the fourth electrode (46), the fifth electrode (47), and the sixth electrode (48), respectively.The thirteenth electrode (49), the fourteenth electrode (50), and the fifteenth electrode (51) are distributed on the outer side of the first tuning fork arm of the resonant beam (12). The left end of the thirteenth electrode (49) is flush with the left fork of the tuning fork structure, and the right end of the thirteenth electrode (49) extends to the left node of the resonant beam (12). The right end of the fifteenth electrode (51) is flush with the right fork of the tuning fork structure, and the left end of the fifteenth electrode (51) extends to the right node of the resonant beam (12). The fourteenth electrode (50) is located between the left and right nodes. The sixteenth electrode (52), the seventeenth electrode (53), and the eighteenth electrode (54) are symmetrically distributed on the inner side of the first tuning fork arm, wherein the sixteenth electrode (52) corresponds to the thirteenth electrode. (49) The position of the seventeenth electrode (53) corresponds to the position of the fourteenth electrode (50), and the position of the eighteenth electrode (54) corresponds to the position of the fifteenth electrode (51); the inner side of the second tuning fork arm of the resonant beam (12) is distributed with the nineteenth electrode (55), the twentieth electrode (56), and the twenty-first electrode (57). The left end of the nineteenth electrode (55) is flush with the left fork of the tuning fork structure, and the right end of the nineteenth electrode (55) reaches the left node of the resonant beam (12). The right end of the twenty-first electrode (57) is flush with the right fork of the tuning fork structure, and the left end of the twenty-first electrode (57) reaches the right node of the resonant beam (12). The twentieth electrode (56) is located between the left and right nodes. The outer sides of the two tuning fork arms are symmetrically distributed with the 22nd electrode (58), 23rd electrode (59), and 24th electrode (60), where the 22nd electrode (58) corresponds to the position of the 19th electrode (55), the 23rd electrode (59) corresponds to the position of the 20th electrode (56), and the 24th electrode (60) corresponds to the position of the 21st electrode (57). The first pad (73) is connected to the 13th electrode (49) via an interconnect line, and the 13th electrode (49) is connected to the 10th electrode (33) via an interconnect line. The 13th electrode (49) is connected to the second electrode (44) via an interconnect line, and the second electrode (44) is connected to the 18th electrode (54) via an interconnect line. The 18th electrode (54)... The 10th electrode (33) is connected to the 20th electrode (56) via an interconnection line. The 20th electrode (56) is connected to the 12th electrode (35) via an interconnection line. The 12th electrode (35) is connected to the 15th electrode (51) via an interconnection line. The 15th electrode (51) is connected to the 8th electrode (31) via an interconnection line. The 8th electrode (31) is connected to the 16th electrode (52) via an interconnection line. The 16th electrode (52) is connected to the 4th electrode (46) via an interconnection line. The 4th electrode (46) is connected to the 23rd electrode (59) via an interconnection line.The second pad (74) is connected to the twenty-second electrode (58) via an interconnect line. The second pad (74) is also connected to the first electrode (43) via an interconnect line. The first electrode (43) is connected to the seventeenth electrode (53) via an interconnect line. The seventeenth electrode (53) is connected to the ninth electrode (32) via an interconnect line. The ninth electrode (32) is connected to the twenty-first electrode (57) via an interconnect line. The twenty-second electrode (58) is connected to the eleventh electrode (34) via an interconnect line. The eleventh electrode (34) is connected to the eleventh electrode (34) via an interconnect line. The wire is connected to the twenty-fourth electrode (60), the twenty-fourth electrode (60) is connected to the fifth electrode (47) via an interconnecting wire, the fifth electrode (47) is connected to the nineteenth electrode (55) via an interconnecting wire; the nineteenth electrode (55) is connected to the seventh electrode (30) via an interconnecting wire, the seventh electrode (30) is connected to the fourteenth electrode (50) via an interconnecting wire, the fourteenth electrode (50) is connected to the third electrode (45) via an interconnecting wire, and the third electrode (45) is connected to the twenty-fourth electrode (60) via an interconnecting wire.