Image chip AOI dust sticking integrated equipment

Abstract

The application relates to the chip processing technical field and discloses an image chip AOI dust sticking integrated equipment, which comprises a rotating disc, a back-and-forth material taking and placing assembly is arranged on one side of the rotating disc, an image detection assembly for collecting chip images is arranged on the other side of the rotating disc, and a back-and-forth moving assembly for back-and-forth conveying dust sticking adhesive tape is arranged on one side of the image detection assembly. The image chip AOI dust sticking integrated equipment can realize the following steps: after the chip is detected by the image detection assembly, the flat adhesive tape is scooped up by the adhesive tape clamping assembly and fixed at both ends, then the flat adhesive tape is conveyed to above the chip by the back-and-forth moving assembly, then the fixed-point dust sticking assembly which can be moved to any position is accurately lowered at the stain position of the chip, impurities are adhered by the adhesive tape, compared with a dust sticking rod, the adhesive area of the flat adhesive tape is larger, the flat adhesive tape does not need to be frequently replaced, the stain overlapping adhesion can be avoided, the secondary pollution of the chip caused by the stain falling is effectively reduced, and the efficiency and effect of the chip dust sticking are obviously improved.

Description

Technical Field

[0001] This invention relates to the field of chip processing technology, specifically to an integrated AOI (Automated Optical Inspection) dust removal device for image chips. Background Technology

[0002] With the widespread application of image chips in consumer electronics, automotive electronics, industrial vision and other fields, the market has put forward higher requirements for the precision, cleanliness and production efficiency of chips. As a core sensing component, the surface cleanliness of image chips directly affects optical performance and operational stability, while appearance defects may lead to abnormal signal transmission or functional failure. Therefore, quality inspection and cleanliness control in the production process have become key links.

[0003] Automated Optical Inspection (AOI) technology, with its advantages of non-contact operation, high precision, and high efficiency, has become the mainstream solution for detecting chip surface defects. It can quickly identify problems such as tiny scratches, color differences, and breakage. At the same time, dust removal technology can effectively remove micron-sized dust, particles, and other impurities from the chip surface through physical adsorption, avoiding the negative impact of contaminants on chip performance. To adapt to the pace of modern mass production and meet the process requirements of integrated "inspection-cleaning," integrated equipment that combines AOI inspection and dust removal functions has emerged. Relying on the linkage of mechanical structures and the coordinated control of vision systems and cleaning modules, it achieves seamless connection between the two core processes, which not only conforms to the automation development trend of precision electronic manufacturing but also provides technical support for the high-quality production of image chips.

[0004] The prior art, disclosed in CN220479616U, provides a chip dirt and dust removal device. It includes a base plate, a side plate disposed on the side of the base plate, a servo drive module disposed on the side plate, a servo clamping module driven by the servo drive module, an ESD dust removal stick picking unit disposed on the base plate, and a dust removal stick positioning CCD unit disposed next to the ESD dust removal stick picking unit. A height ranging sensor is also disposed next to the servo clamping module. The dust removal stick positioning CCD unit includes a side CCD detection camera, a bottom CCD detection camera, and a CCD light source. Its advantages include: automatic positioning of dirt and dust spots on the chip through coordination between upstream and downstream processes, automatic replacement of the dust removal stick, automatic dust removal function, high yield, high degree of automation, guaranteed quality, greatly improved production efficiency, and ensured chip cleanliness.

[0005] The aforementioned existing technology, although it can clean the chip surface with a dust stick, is limited by the small dust-sticking area. In one cleaning process, the chip needs to be repeatedly dusted. During this process, the dust that has been adhering to the surface of the dust stick may become loose due to repeated contact and fall back onto the chip surface. As a result, dust residue will still exist when the chip is re-inspected, and multiple cleaning operations are required to achieve the expected cleaning effect.

[0006] It is evident that an integrated image chip AOI dust removal device is needed to solve the problem mentioned in the background technology, where the dust removal stick has a small dust removal area, and repeated operation can easily cause the dust that has been adhered to to loosen and fall back onto the chip, resulting in residues still remaining during re-inspection and requiring repeated cleaning. Summary of the Invention

[0007] The purpose of this invention is to provide an integrated image chip AOI dust removal device to solve the problems mentioned in the background art.

[0008] To solve the above-mentioned technical problems, the present invention provides the following technical solution: an integrated image chip AOI dust removal device, including a turntable, a reciprocating material loading and unloading component is provided on one side of the turntable, and an image detection component for chip image acquisition is installed on the other side of the turntable. A reciprocating moving component for reciprocating transport of dust removal tape is installed on one side of the image detection component, and a tape clamping component for extracting and holding the tape is installed below the reciprocating moving component. A fixed-point dust removal component is installed on one side inside the tape clamping component, and the fixed-point dust removal component is used to drive the lowering cylinder to move and descend to drive the tape to contact the dust removal position on the chip. A waste adhesive removal component is installed on one side of the tape clamping component. The tape clamping assembly includes a fixed shell, and both sides of the fixed shell are provided with rotatable hinged side plates. A fixed clamping claw is connected below the hinged side plate. A rotatable flipping clamping claw is provided inside the fixed clamping claw. The fixed clamping claw and the flipping clamping claw can clamp the tape. The fixed-point dust-adhesion assembly includes a lateral limiting rod and a longitudinal limiting rod, with the longitudinal limiting rod passing through multiple sets of connecting blocks for connecting the toothed plate and the mounting plate. The top of the toothed plate is equipped with a first gear and a second gear that mesh with it, and the bottom of the mounting plate is equipped with a pressing cylinder.

[0009] Preferably, a transport component is installed at one end of the reciprocating pick-up and drop-off assembly, and the transport component includes a first belt conveyor, a second belt conveyor and a third belt conveyor. The first belt conveyor is located below the reciprocating pick-up and drop-off assembly, and a feeding and receiving assembly is installed between the first belt conveyor and the second and third belt conveyors. The feeding and receiving assembly is used to transfer the chips between the first belt conveyor and the second and third belt conveyors.

[0010] Preferably, the feeding and receiving assembly includes a housing, and a motor is installed inside the housing. The motor is connected to a central gear via a pulley, and a central toothed plate is provided at the top of the central gear. Side toothed plates are meshed on both sides of the central gear, and a side gear that meshes with the central toothed plate is installed at the top of the side toothed plate. A clamp is connected to one side of the side gear.

[0011] Preferably, the reciprocating motion assembly includes a drive cylinder, and the output end of the drive cylinder is connected to an output rack, and a transmission gear is engaged on one side of the output rack. One end of the transmission gear is connected to a toothed belt, and one end of the toothed belt is connected to a rotating shaft. One side of the rotating shaft is connected to a rotating extension rod via a connecting rod, and the rotating extension rod is located at the top of the tape clamping assembly.

[0012] Preferably, one end of each of the two sets of hinged side plates is hinged to the lower part of the fixed shell, and the fixed gripper is integrally formed with the hinged side plate. The fixed gripper is located at one end of the hinged side plate. An electric cylinder is installed inside the lower part of the fixed shell, and a connecting block is installed at the output end of the electric cylinder. Each end of the connecting block is hinged to a set of hinge rods, and the other end of the hinge rods is hinged to the inner side of the hinged side plate. The top end of the fixed gripper is connected to a fixed shaft, and the fixed shaft passes through the flip gripper. The outer side of the flip gripper is connected to teeth, and a drive gear that meshes with the teeth is provided on one side of the teeth.

[0013] Preferably, a sleeve is provided on the outer side of the lateral limiting rod, and the end of the longitudinal limiting rod is connected to the sleeve. The lateral limiting rod is located at the bottom inside the fixed shell. A drive motor is installed at one end of the first gear and the second gear, and a retainer is provided on the outer side of both the first gear and the second gear.

[0014] Preferably, the waste adhesive removal component includes a back plate, and an inner triangular plate is installed on one side of the back plate. A first pin is connected to each of the three ends of the inner triangular plate, and a central component is connected through the first pin. The central component includes a connecting part, a middle part, and an adhesive part. The connecting part is located at one end of the middle part, and the adhesive part is located at the other end of the middle part. The connecting part is connected to the first pin. An outer triangular plate is provided on one side of the central component, and the outer triangular plate is penetrated by a second pin.

[0015] Compared with the prior art, the beneficial effects achieved by the present invention are: First, this invention, through the configuration of a reciprocating moving component, a tape clamping component, and a fixed-point dust-adhesion component, enables the following: after the chip is detected by the image detection component, the tape clamping component picks up the flat tape and fixes it from both ends, and then the reciprocating moving component transports it above the chip. Subsequently, the fixed-point dust-adhesion component, which can be moved to any position, precisely descends to the chip stains, using the tape to adhere the impurities. Compared to dust sticks, the flat tape has a larger adhesion area, does not require frequent replacement, and can avoid overlapping adhesion of stains, effectively reducing secondary contamination of the chip caused by stain detachment, and significantly improving the efficiency and effect of chip dust adhesion.

[0016] Secondly, the present invention achieves coordinated cooperation among various components through the setting of a turntable, a reciprocating material loading and unloading component, a transport component, and a feeding and receiving component. The chip can be loaded and unloaded from the loading point, which effectively reduces the space required for repeated installation of loading and unloading equipment on the outside of the turntable and helps to make reasonable layout of necessary workstations on the outside of the turntable. At the same time, the precise cooperation between the transport component and the feeding and receiving component can clearly distinguish between the loading line and the unloading line, so that loading, inspection, dust removal, re-inspection, and unloading form a complete processing flow with each link interlocking.

[0017] Third, the waste adhesive removal component of this invention can automatically and quickly remove waste adhesive tape after dust removal, providing reliable support for timely and efficient replacement of new adhesive tape with the tape clamping component, and effectively ensuring the continuous and stable progress of equipment cleaning operations. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the feeding and receiving assembly structure of the present invention; Figure 3 This is a partial structural diagram of the feeding and receiving assembly of the present invention; Figure 4 This is a schematic diagram of the reciprocating material handling assembly of the present invention; Figure 5 This is a schematic diagram of the reciprocating moving component, tape clamping component, and fixed-point dust adhesion component of the present invention; Figure 6 This is a structural breakdown diagram of the reciprocating motion component of the present invention; Figure 7 This is a schematic diagram of the reciprocating motion component structure of the present invention; Figure 8 This is an exploded view of the tape clamping assembly structure of the present invention; Figure 9 This is a partial structural diagram of the tape clamping assembly of the present invention; Figure 10 This is a schematic diagram of the tape clamping assembly structure of the present invention; Figure 11 This is an exploded view of the fixed-point dust-adhesion component structure of the present invention; Figure 12 This is a schematic diagram of the fixed-point dust-adhesion component structure of the present invention; Figure 13 This is a structural exploded view of the waste adhesive removal component of the present invention; Figure 14 This is a schematic diagram of the waste adhesive removal component of the present invention.

[0019] The components include: 1. Turntable; 2. Reciprocating material handling assembly; 3. Transport assembly; 301. First belt conveyor; 302. Second belt conveyor; 303. Third belt conveyor; 4. Feeding and receiving assembly; 401. Housing; 402. Motor; 403. Central gear; 404. Central toothed plate; 405. Side toothed plate; 406. Side gear; 407. Fixture; 5. Image detection assembly; 6. Reciprocating movement assembly; 601. Drive cylinder; 602. Output rack; 603. Transmission gear; 604. Toothed belt; 605. Rotating shaft; 606. Connecting rod; 607. Rotating extension rod; 7. Belt clamping assembly; 701. Fixed housing; 702. Hinge. Side plate; 703, fixed gripper; 704, electric cylinder; 705, hinge rod; 706, fixed shaft; 707, flip gripper; 708, teeth; 709, drive gear; 8, fixed-point dust-adhesion assembly; 801, lateral limit rod; 802, longitudinal limit rod; 803, toothed plate; 804, first gear; 805, second gear; 806, connecting block; 807, mounting plate; 808, pressing cylinder; 9, waste adhesive removal assembly; 901, back plate; 902, inner triangular plate; 903, first pin; 904, center piece; 9041, connecting part; 9042, middle part; 9043, adhesive part; 905, outer triangular plate; 906, second pin. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Please see Figures 1-4 An integrated image chip AOI dust collection device includes a turntable 1, a reciprocating material handling component 2 is provided on one side of the turntable 1, and an image detection component 5 for chip image acquisition is installed on the other side of the turntable 1.

[0022] In this embodiment, the turntable 1 is a rotatable disc structure. The turntable 1 drives the chip to rotate, thereby passing through inspection, dust removal, and re-inspection processes. A controller is installed in the device, which is electrically connected to the electronic components in the device. The rotation interval and rotation angle of the turntable 1 can be controlled by the controller. A feeding station is set at the edge of the turntable 1. This station matches the shape and size of the chip. A negative pressure suction hole can be set on the station. The chip is positioned on the turntable 1 by negative pressure and will not be displaced due to inspection and dust removal. Different equipment can be set on the outside of the turntable 1 to meet the chip inspection, dust removal, and re-inspection processes. For example, a re-inspection device, which is also an image acquisition and inspection device, can be installed on the outside of the turntable 1, opposite to the image inspection component 5, to inspect the chip after dust removal to ensure that the chip is properly inspected. The chip is indeed free of stains. The reciprocating pick-and-place assembly 2, located between turntable 1 and transport assembly 3, is used for loading and unloading chips. The reciprocating pick-and-place assembly 2 includes a vertical plate, a motor located on the rear side of the vertical plate, rotating rollers located at the upper and lower ends of the front side of the vertical plate, belts wound around the outside of the two sets of rotating rollers, connecting rods connected to the front side of the two sets of rotating rollers, a transport rod hinged at one end of the two sets of connecting rods, and a loading clamp located at the bottom of the transport rod. When the motor starts, it drives the two sets of rotating rollers to rotate synchronously. The rotating rollers drive the transport rod and the loading clamp to swing back and forth between turntable 1 and the first belt conveyor 301 through the connecting rod. The chip contacts the loading clamp and moves back and forth between turntable 1 and the first belt conveyor 301 to complete the loading and unloading work. The loading clamp can be an electric clamp or a high-cleanliness negative pressure suction cup.

[0023] Specifically, a transport component 3 is installed at one end of the reciprocating pick-and-place assembly 2, and the transport component 3 includes a first belt conveyor 301, a second belt conveyor 302 and a third belt conveyor 303. The first belt conveyor 301 is located below the reciprocating pick-and-place assembly 2, and a feeding and receiving assembly 4 is installed between the first belt conveyor 301 and the second belt conveyor 302 and the third belt conveyor 303. The feeding and receiving assembly 4 is used to transfer the chips between the first belt conveyor 301 and the second belt conveyor 302 and the third belt conveyor 303.

[0024] In this embodiment, the first belt conveyor 301 is close to the turntable 1, while the second belt conveyor 302 and the third belt conveyor 303 are located at one end of the first belt conveyor 301. The first belt conveyor 301 is not closely connected to the second belt conveyor 302 and the third belt conveyor 303. A feeding and receiving assembly 4 is also provided between the first belt conveyor 301 and the second belt conveyor 302 and the third belt conveyor 303. The purpose of the conveying assembly 3 is to transport chips. The transport purposes of the second belt conveyor 302 and the third belt conveyor 303 are not the same. If the second belt conveyor 302 is responsible for loading chips, then the third belt conveyor 303 is responsible for unloading chips. The working process is that the second belt conveyor 302 transports and loads chips, which are then clamped by the clamp 407 close to the second belt conveyor 302 and transported to the first belt conveyor 301. The first belt conveyor 301 transports the chip from the end near the feeding and receiving component 4 to the end near the reciprocating pick-and-place component 2. The reciprocating pick-and-place component 2 then moves the chip onto the turntable 1. As the turntable 1 rotates, the chip passes through the image detection component 5 and the reciprocating movement component 6, and then reaches the re-inspection station opposite the image detection component 5. After the re-inspection is completed, the turntable 1 continues to rotate, bringing the chip back to its initial position. At this time, the reciprocating pick-and-place component 2 moves the chip back from the turntable 1 to the first belt conveyor 301. The first belt conveyor 301 then reverses the transport, moving the chip from the end near the reciprocating pick-and-place component 2 to the end near the feeding and receiving component 4. The chip is then clamped by the clamp 407, which is away from the second belt conveyor 302, and transported to the third belt conveyor 303. The chip, having completed the detection, dust collection, and re-inspection processes, is moved from the third belt conveyor 303 to prepare for unloading, collection, or to the next process.

[0025] Specifically, the feeding and receiving assembly 4 includes a housing 401, and a motor 402 is installed inside the housing 401. The motor 402 is connected to a central gear 403 via a pulley. A central toothed plate 404 is provided at the top of the central gear 403. Side toothed plates 405 are meshed on both sides of the central gear 403. A side gear 406 that meshes with the central toothed plate 404 is installed at the top of the side toothed plate 405. A clamp 407 is connected to one side of the side gear 406.

[0026] In this embodiment, the feeding and receiving assembly 4 and other parts are integrated inside the housing 401. Two sets of sliding grooves are provided at the top of the housing 401. The side gear 406 passes through the sliding grooves and reciprocates within them. The housing 401 is positioned and installed with the central gear plate 404. The central gear plate 404 and the central gear 403 are rotatably mounted via bearings. When the central gear 403 rotates, the central gear plate 404, being fixed to the housing 401, does not rotate accordingly. Two sets of clamps 407 move above their respective sliding grooves. A pulley is provided between the motor 402 and the central gear 403. Therefore, when the motor 402 starts, it synchronously drives the central gear 403 to rotate via the pulley. The central gear 403 rotates inside the housing 401, and due to meshing, it drives the side gear plates 405 on both sides to move in opposite directions. Limit blocks are provided at the bottom of both sets of side gear plates 405. The internal part has a limiting groove that matches the limiting block. When the two sets of side toothed plates 405 move inside the housing 401, they move smoothly and will not deviate due to the limiting block and the limiting groove. When the side toothed plates 405 drive the side gears 406 and the clamps 407 to move, the side gears 406 will rotate because they mesh with the center toothed plate 404. The top of the side gears 406 is connected to the clamps 407 through a connecting piece. When the side gears 406 rotate, they also drive the clamps 407 to rotate, so that the two sets of clamps 407 will rotate while moving back and forth. The clamps 407 can be electric clamps that contact the chip. One set of clamps 407 moves back and forth between the ends of the first belt conveyor 301 and the third belt conveyor 303, and the other set moves back and forth between the ends of the first belt conveyor 301 and the second belt conveyor 302, which is responsible for the loading and unloading of the chip.

[0027] Please see Figures 5-12An integrated image chip AOI dust collection device includes an image detection component 5 with a reciprocating moving component 6 for transporting dust collection tape on one side. Below the reciprocating moving component 6 is a tape clamping component 7 for extracting and holding the tape. Inside the tape clamping component 7, a fixed-point dust collection component 8 is installed. This fixed-point dust collection component 8 drives a lowering cylinder 808 to move and descend, bringing the tape into contact with the dust collection point on the chip. The tape clamping component 7 includes a fixed housing 701, with rotatable hinged side plates 702 on both sides of the fixed housing 701. A fixed gripper 703 is connected below 702. A rotatable flip gripper 707 is provided on the inner side of the fixed gripper 703. The fixed gripper 703 and the flip gripper 707 can hold the tape. The fixed-point dust-adhesive assembly 8 includes a transverse limiting rod 801 and a longitudinal limiting rod 802. The longitudinal limiting rod 802 passes through multiple sets of connecting blocks 806 used to connect the toothed plate 803 and the mounting plate 807. The top of the toothed plate 803 is equipped with a first gear 804 and a second gear 805 that mesh with it. The bottom of the mounting plate 807 is equipped with a pressing cylinder 808.

[0028] In this embodiment, the reciprocating moving component 6 is used to transport the tape clamping component 7 back and forth between the tape loading point and the turntable 1. When the chip passes the image detection component 5 and the stain location is displayed under the system software associated with the image detection component 5, the reciprocating moving component 6, the tape clamping component 7, and the fixed-point dust adhesion component 8, all connected to the controller, move. The fixed-point dust adhesion component 8 moves downward, bringing tape from different positions down onto the chip to adhere the stains on the chip. During this process, the chip is fixed to the turntable 1 by negative pressure, so there is no displacement. During the time the turntable stays, the fixed-point dust adhesion component 8 adheres and cleans the stains until all stains are removed. The turntable then brings the chip to the re-inspection station. After re-inspection, the chip continues to be rotated by the turntable 1 to the area below the reciprocating pick-and-place component 2, ready for unloading. This completes one cleaning process. In this embodiment, the chip does not have to be a single chip; multiple chips can be placed together in the mold tray for simultaneous detection and cleaning.

[0029] Specifically, the reciprocating moving component 6 includes a drive cylinder 601, and the output end of the drive cylinder 601 is connected to an output rack 602. A transmission gear 603 is meshed on one side of the output rack 602. One end of the transmission gear 603 is connected to a toothed belt 604, and one end of the toothed belt 604 is connected to a rotating shaft 605. A rotating extension rod 607 is connected to one side of the rotating shaft 605 through a connecting rod 606, and the rotating extension rod 607 is located at the top of the tape clamping component 7.

[0030] In this embodiment, the reciprocating moving assembly 6 also includes a support frame. A transmission gear 603 is mounted on the back of the support frame, and a drive cylinder 601 is located below the support frame. One end of the transmission gear 603 is provided with a shaft that passes through the support frame and is connected to a toothed belt 604. The toothed belt 604 is located on the front side of the support frame. A limit sleeve is also provided at the top of the drive cylinder 601. The output rack 602 moves inside the limit sleeve. The limit sleeve ensures that the movement trajectory of the output rack 602 remains correct. The limit sleeve is mounted on one side of the support frame by bolts and washers. The drive cylinder 601 can be a pneumatic cylinder, a hydraulic cylinder, or... The electric cylinder, which can be selected according to the on-site construction, is used to drive the output rack 602 to rise and fall, thereby driving the transmission gear 603 to rotate back and forth. The toothed belt 604 includes a toothed wheel and an internal toothed belt. There are two sets of toothed wheels, and the internal toothed belt is wrapped around its outer side. Through tooth meshing, when one set of toothed wheels rotates, the other set of toothed wheels will rotate synchronously. The distance between the two sets of toothed wheels matches the length of the connecting rod 606. The connecting rod 606 can be made of metal, with strong pressure resistance, and will not easily deform or bend when driving the tape clamping component 7 and the fixed-point dust sticking component 8 to rotate.

[0031] Specifically, one end of each of the two sets of hinged side plates 702 is hinged to the lower part of the fixed shell 701, and the fixed gripper 703 is integrally formed with the hinged side plate 702. The fixed gripper 703 is located at one end of the hinged side plate 702. An electric cylinder 704 is installed inside the lower part of the fixed shell 701, and a connecting block is installed at the output end of the electric cylinder 704. A set of hinge rods 705 are hinged to each end of the connecting block, and the other end of the hinge rods 705 is hinged to the inner side of the hinged side plate 702. A fixed shaft 706 is connected to the top of the fixed gripper 703, and the fixed shaft 706 passes through the flip gripper 707. A tooth 708 is connected to the outer side of the flip gripper 707, and a drive gear 709 that meshes with the tooth 708 is provided on one side of the tooth 708.

[0032] In this embodiment, the fixing shell 701 is located below the rotating extension rod 607. The distance between the two sets of fixing jaws 703 matches the width of the tape. When the electric cylinder 704 is in the retracted state, the two sets of hinged side plates 702 open, but not in a straight line; instead, they open at an angle. When the electric cylinder 704 extends, the two sets of fixing jaws 703 close at an angle, corresponding to both ends of the tape. The fixing jaws 703 lift the two ends of the tape at an angle, making it easier to peel the tape off the tape reel or tape paper. This process is the first clamping of the tape. Then, the motor located behind the drive gear 709 starts, which drives the flipping jaws 702. 7. Flipping: The flipping jaw 707 flips on the fixed jaw 703 until its end approaches the end of the fixed jaw 703, firmly clamping the tape on the fixed jaw 703. This process is the second clamping of the tape. After complete fixation, it can move upward with the reciprocating moving component 6. The clamped tape unfolds below the fixed-point adhesive component 8, with the adhesive side facing down, which will later contact the chip, and the non-adhesive side facing up, which will later contact the pressing cylinder 808. The tape is a flexible material with a certain degree of extensibility. For example, the material can be PE polyethylene or PP polypropylene as the base material, combined with low-viscosity, residue-free silicone or acrylic pressure. The adhesive, with a viscosity grade ranging from slightly viscous to low viscous, can adsorb micron-sized dust and particles on the chip surface without leaving adhesive residue that contaminates the chip, nor will it damage the chip surface coating due to excessive adhesion. In this embodiment, the fixed shaft 706 is mounted on the fixed gripper 703, and the flip gripper 707 is provided with a collar sleeved on the outside of the fixed shaft 706. The flip gripper 707 can flip on the outside of the fixed shaft 706. A drive motor is mounted on the rear side of the drive gear 709. An installation groove can be opened on the lower side of the hinged side plate 702 to facilitate the drive gear 709 passing through the hinged side plate 702 and driving the flip gripper 707 to flip. The flip gripper 707 has an arc-shaped structure. There is no need to keep the tape in an open state when clamping it. When the fixed jaw 703 tilts and lifts the tape, the flipping jaw 707 will not affect this action. Only when the drive motor starts will the flipping jaw 707 flip and contact the tape to clamp it. The flipping jaw 707 and the fixed jaw 703 form a set of clamps. However, the fixed jaw 703 remains relatively fixed in this clamp. Only the flipping jaw 707 flips and moves to adjust the clamping distance. A mobile power supply can be installed on the tape clamping assembly 7 to power the drive motor and the fixed-point dust-adhesive assembly 8. The fixed jaw 703 has an angled end and is relatively thin, which makes it easy to lift the side of the tape.

[0033] Specifically, a sleeve is provided on the outer side of the lateral limiting rod 801, and the end of the longitudinal limiting rod 802 is connected to the sleeve. The lateral limiting rod 801 is located at the lower part of the fixed shell 701. A drive motor is installed at one end of the first gear 804 and the second gear 805, and a retainer is provided on the outer side of both the first gear 804 and the second gear 805.

[0034] In this embodiment, the longitudinal limiting rod 802 can move laterally outside the transverse limiting rod 801 through a sleeve. The transverse limiting rod 801 and the longitudinal limiting rod 802 are used to assist the movement of the mounting plate 807. With the assistance of the transverse limiting rod 801 and the longitudinal limiting rod 802, the mounting plate 807 moves more smoothly and steadily, and will move along a predetermined trajectory. The toothed plate 803 is connected to the mounting plate 807 through the connecting block 806. The longitudinal limiting rod 802 passes through the connecting block 806. The teeth at the top of the toothed plate 803 mesh with both the first gear 804 and the second gear. When the first gear 804 is engaged (805), and the drive motor behind it starts and rotates the first gear 804, the first gear 804 causes the tooth plate 803 to move laterally. At this time, due to the presence of the connecting block 806, the longitudinal limiting rod 802 also moves on the lateral limiting rod 801. When the drive motor behind the second gear 805 starts, it rotates the second gear 805, which in turn causes the tooth plate 803 to move longitudinally. Because the longitudinal limiting rod 802 passes longitudinally through the connecting block 806, the tooth plate 803 will move longitudinally. The longitudinal limit lever 802 moves longitudinally, while the longitudinal limit lever 802 does not move on the transverse limit lever 801. When tilting is required, the drive motors on the rear sides of the first gear 804 and the second gear 805 are activated simultaneously. This allows the toothed plate 803 to drive the mounting plate 807 to move in multiple directions. In conjunction with the image detection component 5, the pressing cylinder 808 is controlled to move to the stain position displayed by the image detection component 5. Then, the pressing cylinder 808 descends, driving the tape below to descend as well, adhering to the stain. Since the tape is in an unfolded state, and no stains are found in the same place... There are two stain points, so the stains will not overlap at the adhesion point of the tape. This prevents the stains from being covered and unable to adhere, or the already adhered stains from falling off due to the covering. This greatly improves the cleaning effect and efficiency. It has a large adhesion area, is flexible in movement, and adheres completely. The movable range of the pressure cylinder 808 can cover the chip. No matter where the stain is on the chip, the pressure cylinder 808 can move to that position to drive the tape to press down and adhere. The output end of the pressure cylinder 808 has a detachable mounting tab. The tab contacts the tape, and the area of ​​the tab is adapted to the size of the possible stain.

[0035] Please see Figures 13-14 An integrated image chip AOI dust removal device, wherein a waste adhesive removal component 9 is installed on one side of the tape clamping component 7.

[0036] In this embodiment, a set of belt conveyors is provided below the tape clamping assembly 7 for tape transportation. Tape of a specific shape is adhered to release film or silicone paper. The release film or silicone paper can be placed on a carrier tray for fixation and moved below the tape clamping assembly 7 by the belt conveyor. A carrier tray receiving mechanism can be installed at one end of the belt conveyor. After a set of tapes is clamped, the empty carrier tray is collected, and the belt conveyor transports new tapes to below the tape clamping assembly 7 again, waiting to be clamped and used. The waste adhesive removal assembly 9 is located on the path of the tape clamping assembly 7 descending towards the belt conveyor. The tape clamping assembly 7 returns to the belt conveyor with the used tape, and then the activated waste adhesive removal assembly 9 collects the used tape. The tape clamping assembly 7 with no tape at the clamping end descends again to scoop up, clamp, and transport the new tape. During this process, the adhesive part 9043 in the waste adhesive removal assembly 9 revolves and does not interfere with the tape clamping assembly 7.

[0037] Specifically, the waste adhesive removal component 9 includes a back plate 901, and an inner triangular plate 902 is installed on one side of the back plate 901. A first pin 903 is connected to each of the three ends of the inner triangular plate 902, and a central component 904 is connected through the first pin 903. The central component 904 includes a connecting part 9041, a middle part 9042, and an adhesive part 9043. The connecting part 9041 is located at one end of the middle part 9042, and the adhesive part 9043 is located at the other end of the middle part 9042. The connecting part 9041 is connected to the first pin 903. An outer triangular plate 905 is provided on one side of the central component 904, and the outer triangular plate 905 is penetrated by a second pin 906.

[0038] In this embodiment, a drive motor is installed on the rear side of the back plate 901. The drive motor can drive the inner triangular plate 902 to rotate on one side of the back plate 901. The first pins 903 located at the three ends of the inner triangular plate 902 each pass through a set of connecting parts 9041. The upper and lower sides of the connecting parts 9041 each have a set of round holes, one set for the first pins 903 to pass through, and the other set for the second pins 906 to pass through. The second pins 906 are used to connect the connecting parts 9041 and the outer triangular plate 905. The inner triangular plate 902 is rotatably connected to one side of the center member 904 through the first pins 903, and the outer triangular plate 905 is connected through... The second pin 906 is rotatably connected to the other side of the center component 904. There are three sets of center components 904. The three sets of center components 904 maintain balance during revolution. The three sets of adhesive parts 9043 advance in turn to the inside of the tape clamping assembly 7 and below the tape. When the fixed clamp 703 and the flipping clamp 707 are released, the advancing adhesive parts 9043 will contact the tape, thereby removing the used tape from the tape clamping assembly 7, making it convenient for the tape clamping assembly 7 to clamp new tape. The waste tape after being removed can be removed manually or by a robot from the end of the center component 904 without delaying the next cleaning work.

[0039] In use, an external power supply needs to be connected, and the external power supply provides electric energy for the device so that the device can operate normally. First, place the chip on the second belt conveyor 302, use the second belt conveyor 302 to transport the chip to the end close to the feeding and discharging assembly 4, start the motor 402, the motor 402 drives the central gear 403 to rotate, the rotation of the central gear 403 drives the side tooth plates 405 meshed with it on both sides to move in opposite directions, and during the movement of the side tooth plates 405, the side gears 406 perform a flipping action. In this way, the clamp 407 close to the second belt conveyor 302 will reciprocate between the second belt conveyor 302 and the first belt conveyor 301, clamp the chip and transport it to the first belt conveyor 301. The first belt conveyor 301 drives the chip to transport to the position below the reciprocating feeding and discharging assembly 2, the started reciprocating feeding and discharging assembly 2 swings reciprocally to transport the chip to the turntable 1. The chip is positioned on the turntable 1 and then rotated to the position below the station of the image detection assembly 5, and the image detection assembly 5 scans and detects the surface of the chip, so that the stain position on the chip surface is displayed on the computer software matched with the image detection assembly 5. Then the turntable 1 drives the chip to rotate to the station close to the reciprocating moving assembly 6, start the reciprocating moving assembly 6 and the tape clamping assembly 7. After the electric cylinder 704 is started, it drives two sets of hinged rods 705 to move, and then pulls the hinged side plates 702 on both sides to tilt and close. Two sets of fixed clamping jaws 703 shovel the adhesive tape from both sides thereof, then the rotating driving gear 709 drives the flipping clamping jaws 707 to rotate, so that the flipping clamping jaws 707 approach the position of the fixed clamping jaws 703, and the flipping clamping jaws 707 clamp the adhesive tape to keep it fixed. The driving cylinder 601 drives the output rack 602 to extend, so that the transmission gear 603 meshed with the output rack 602 rotates, the rotation of the transmission gear 603 drives the toothed belt 604 and the rotating shaft 605 to rotate. The rotating shaft 605 drives the rotating extension rod 607 to rotate around the rotating shaft 605 through the connecting rod 606, and then drives the tape clamping assembly 7 to move from the tape feeding point to the turntable 1. When the adhesive tape reaches above the chip, the fixed-point dust sticking assembly 8 can be started. The driving motors at the rear sides of the first gear 804 and the second gear 805 can respectively drive the first gear 804 and the second gear 805 to rotate, and then drive the toothed plate 803 to move through the meshing relationship. The toothed plate 803 drives the mounting plate 807 to move through the connecting block 806, and then drives the lower pressing cylinder 808 to move to above the stain on the chip. The started lower pressing cylinder 808 descends and applies pressure from above the adhesive tape to deform the adhesive tape, the position of the adhesive tape in contact with the lower pressing cylinder 808 descends and contacts the stain, the adhesive tape adheres the stain, completing one cleaning. For chips with more stains, the lower pressing cylinder 808 can move to multiple positions and descend to clean the chip. After cleaning, the chip can be unloaded after re-inspection at the re-inspection station. Meanwhile, the reciprocating moving assembly 6 drives the adhesive tape clamping assembly 7 back to the adhesive tape feeding point, the started inner triangular plate 902 rotates, and drives three sets of central members 904 to revolve through three sets of first pin shafts 903,The three sets of adhesive sections 9043 advance sequentially towards the tape clamping assembly 7. The control flipping jaws 707 release their grip, allowing the advancing adhesive sections 9043 to contact the tape and remove it from the tape clamping assembly 7, thus completing the replacement of the dirty tape.

[0040] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions, and alterations can be made to these embodiments without departing from the principles and spirit of this application. The scope of this application is defined by the appended claims and their equivalents.

Claims

1. An integrated image chip AOI dust collection device, comprising a turntable (1), characterized in that: A reciprocating material handling assembly (2) is provided on one side of the turntable (1), and an image detection assembly (5) for chip image acquisition is installed on the other side of the turntable (1). A reciprocating moving assembly (6) for reciprocating transport of adhesive tape is installed on one side of the image detection assembly (5), and a tape clamping assembly (7) for extracting and holding the tape is installed below the reciprocating moving assembly (6). A fixed-point adhesive assembly (8) is installed on one side inside the tape clamping assembly (7), and the fixed-point adhesive assembly (8) is used to drive the lower cylinder (808) to move and descend to drive the tape to contact the chip adhesive position. A waste adhesive removal assembly (9) is installed on one side of the tape clamping assembly (7). The tape clamping assembly (7) includes a fixed shell (701), and both sides of the fixed shell (701) are provided with rotatable hinged side plates (702), and a fixed clamping claw (703) is connected below the hinged side plate (702). A rotatable flipping clamping claw (707) is provided inside the fixed clamping claw (703), and the fixed clamping claw (703) and the flipping clamping claw (707) can clamp the tape. The fixed-point dust-adhesive assembly (8) includes a lateral limiting rod (801) and a longitudinal limiting rod (802), and the longitudinal limiting rod (802) passes through multiple sets of connecting blocks (806) for connecting the toothed plate (803) and the mounting plate (807). The toothed plate (803) is equipped with a first gear (804) and a second gear (805) that mesh with it, and the mounting plate (807) is equipped with a pressing cylinder (808) at the bottom end.

2. The integrated image chip AOI dust collection device according to claim 1, characterized in that: One end of the reciprocating pick-up and drop-off assembly (2) is equipped with a transport assembly (3), and the transport assembly (3) includes a first belt conveyor (301), a second belt conveyor (302) and a third belt conveyor (303). The first belt conveyor (301) is located below the reciprocating pick-up and drop-off assembly (2), and a feeding and receiving assembly (4) is installed between the first belt conveyor (301) and the second belt conveyor (302) and the third belt conveyor (303). The feeding and receiving assembly (4) is used to transfer the chips between the first belt conveyor (301) and the second belt conveyor (302) and the third belt conveyor (303).

3. The integrated image chip AOI dust collection device according to claim 2, characterized in that: The feeding and receiving assembly (4) includes a housing (401), and a motor (402) is installed inside the housing (401). The motor (402) is connected to a central gear (403) via a pulley. A central gear plate (404) is provided at the top of the central gear (403). Side gear plates (405) mesh with both sides of the central gear (403). A side gear (406) meshes with the central gear plate (404) at the top of the side gear plate (405). A clamp (407) is connected to one side of the side gear (406).

4. The integrated image chip AOI dust collection device according to claim 1, characterized in that: The reciprocating moving assembly (6) includes a drive cylinder (601), and the output end of the drive cylinder (601) is connected to an output rack (602), and a transmission gear (603) meshes on one side of the output rack (602). One end of the transmission gear (603) is connected to a toothed belt (604), and one end of the toothed belt (604) is connected to a rotating shaft (605). One side of the rotating shaft (605) is connected to a rotating extension rod (607) via a connecting rod (606), and the rotating extension rod (607) is located at the top of the tape clamping assembly (7).

5. The integrated image chip AOI dust collection device according to claim 1, characterized in that: One end of each of the two sets of hinged side plates (702) is hinged to the bottom of the fixed shell (701), and the fixed gripper (703) is integrally formed with the hinged side plate (702). The fixed gripper (703) is located at one end of the hinged side plate (702). An electric cylinder (704) is installed in the lower part of the interior of the fixed shell (701), and a connecting block is installed at the output end of the electric cylinder (704). A set of hinge rods (705) are hinged to each end of the connecting block, and the other end of the hinge rods (705) is hinged to the inner side of the hinged side plate (702). A fixed shaft (706) is connected to the top of the fixed gripper (703), and the fixed shaft (706) passes through the flip gripper (707). A tooth (708) is connected to the outer side of the flip gripper (707), and a drive gear (709) meshing with the tooth (708) is provided on one side of the tooth (708).

6. The integrated image chip AOI dust collection device according to claim 1, characterized in that: A sleeve is provided on the outer side of the lateral limiting rod (801), and the end of the longitudinal limiting rod (802) is connected to the sleeve. The lateral limiting rod (801) is located below the inside of the fixed shell (701). A drive motor is installed at one end of the first gear (804) and the second gear (805), and a retainer is provided on the outer side of both the first gear (804) and the second gear (805).

7. The integrated image chip AOI dust collection device according to claim 1, characterized in that: The waste adhesive removal component (9) includes a back plate (901), and an inner triangular plate (902) is installed on one side of the back plate (901). The three ends of the inner triangular plate (902) are all connected to a first pin (903), and the first pin (903) is connected through a central component (904). The central component (904) includes a connecting part (9041), a middle part (9042), and an adhesive part (9043). The connecting part (9041) is located at one end of the middle part (9042), and the adhesive part (9043) is located at the other end of the middle part (9042). The connecting part (9041) is connected to the first pin (903). An outer triangular plate (905) is provided on one side of the central component (904), and the outer triangular plate (905) is penetrated by a second pin (906).

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