Dust blocking device and gas conveying pipeline and vacuum coating machine

Abstract

The embodiment of the present specification provides a dust blocking device, which comprises: a first pipe body, one end of the first pipe body is provided with a first fluid inlet, and the other end is provided with a first blocking component; a first fluid outlet is arranged on the side wall of the first pipe body; a second pipe body is arranged outside the first pipe body; the first end of the second pipe body is sealed, and the second end is communicated with a second fluid outlet; and a second blocking component is arranged on the inner wall of the second pipe body.

Description

Technical Field

[0001] This specification relates to the field of vacuum coating machines, and in particular to a dust blocking device, a gas delivery pipeline, and a vacuum coating machine. Background Technology

[0002] In industrial production, high levels of fluid cleanliness are required. Insufficient fluid cleanliness can not only directly weaken product quality and cause adverse production consequences, but also damage production equipment, leading to problems such as malfunctions and shortened equipment lifespan. Taking vacuum coating equipment as an example, the cleanliness of the coating environment plays a decisive role in the coating quality. During the process of airflow entering the vacuum coating chamber through the gas delivery pipe, tiny dust particles are often entrained. Once these particles enter the coating chamber, they will seriously interfere with the coating process, thereby affecting the final coating quality.

[0003] Therefore, there is a need to provide a dust blocking device, an air supply pipeline, and a vacuum coating machine to reduce dust particles that travel through the air supply pipeline with the airflow and improve coating quality. Summary of the Invention

[0004] This specification provides one or more embodiments of a dust blocking device, the device comprising: a first tube having a first fluid inlet at one end and a first blocking component at the other end; a first fluid outlet on the side wall of the first tube; a second tube surrounding the outside of the first tube; a first end of the second tube being sealed and a second end communicating with the second fluid outlet; and a second blocking component on the inner wall of the second tube.

[0005] In some embodiments, a baffle plate is provided between the outer wall of the first tube and the inner wall of the second tube, and the baffle plate is provided with a through hole; the first fluid outlet is directly opposite the second blocking component, and the through hole is directly opposite the first fluid outlet; the opening of the through hole is greater than the opening of the first fluid outlet.

[0006] In some embodiments, the first fluid outlet includes a plurality of outlets, which are arranged circumferentially along the first tube; the baffle is annular, and the through holes include a plurality of holes, which are spaced apart circumferentially along the baffle; the second blocking member is arranged around the inner wall of the second tube.

[0007] In some embodiments, an opening adjustment device is provided at the first fluid outlet and / or the through hole; the opening adjustment device is used to adjust the opening of the first fluid outlet and / or the through hole.

[0008] In some embodiments, the apparatus further includes a first detection mechanism and a second detection mechanism; the first detection mechanism is used to detect the cleanliness of the fluid; the second detection mechanism is used to detect the flow rate of the fluid; the first detection mechanism and the second detection mechanism are disposed at the first fluid inlet and / or the second fluid outlet; the opening of the first fluid outlet and / or the through hole is adjusted based on the detection results of the first detection mechanism and / or the second detection mechanism.

[0009] In some embodiments, the first tube body is further provided with a guide tube, one end of which is connected to the first fluid inlet, and the other end of which is closer to the first blocking component than the first fluid outlet.

[0010] In some embodiments, the device further includes a third tube, one end of which is connected to the second end of the second tube, and the other end of which is provided with a third blocking component; the second fluid outlet is located on the side wall of the third tube.

[0011] In some embodiments, the first blocking component, the second blocking component, and / or the third blocking component are composed of any one or more of ceramic foam, porous ceramic, metal fiber, graphite fiber, activated carbon fiber, and polymer fiber.

[0012] This specification provides one or more embodiments of a gas delivery pipe for a vacuum coating machine, the gas delivery pipe including a dust blocking device as described in any of the above embodiments.

[0013] This specification provides one or more embodiments of a vacuum coating machine, the vacuum coating machine including the gas supply pipe as described in the above embodiments. Attached Figure Description

[0014] This specification will be further described by way of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. These embodiments are not limiting; in these embodiments, the same reference numerals denote the same structures, wherein:

[0015] Figure 1 This is a schematic diagram of a dust blocking device according to some embodiments of this specification;

[0016] Figure 2 This is a cross-sectional schematic diagram of a dust blocking device according to some embodiments of this specification;

[0017] Figure 3 This is a schematic cross-sectional view of the first and second tube bodies shown in some embodiments according to this specification;

[0018] Figure 4This is a cross-sectional schematic diagram of a dust blocking device according to other embodiments of this specification.

[0019] Explanation of reference numerals in the attached drawings: First tube: 10; Second tube: 20; Third tube: 30; First fluid inlet: 11; First blocking component: 12; First fluid outlet: 13; Guide tube: 15; First end of the second tube: 21; Second end of the second tube: 22; Second blocking component: 23; First cavity: 24; Second cavity: 25; Second fluid inlet: 31; Third blocking component: 32; Second fluid outlet: 33; Baffle: 40; Through hole: 41. Detailed Implementation

[0020] To more clearly illustrate the technical solutions of the embodiments in this specification, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are merely some examples or embodiments of this specification. For those skilled in the art, these drawings can be applied to other similar scenarios without creative effort. Unless obvious from the context or otherwise specified, the same reference numerals in the drawings represent the same structures or operations.

[0021] It should be understood that the terms “system,” “device,” “unit,” and / or “module” used herein are one way to distinguish different components, elements, parts, sections, or assemblies at different levels. However, if other terms can achieve the same purpose, they may be replaced by other expressions.

[0022] Unless the context explicitly indicates an exception, spatial descriptive terms such as "upper," "lower," "bottom," "side," "front," and "rear" used in this specification and claims are based on the exemplary positional relationships shown in the accompanying drawings and do not constitute an absolute limitation on the components or structures in actual use. In actual use, the relative positions and orientations of the components can be adjusted according to specific needs and application scenarios. Therefore, the spatial descriptive terms in this specification are only used to assist in understanding the structural features and functional effects of the embodiments in this specification and do not constitute a limitation.

[0023] In industrial production, fluid filtration is often necessary to ensure process stability and product quality. For example, in vacuum coating equipment, a highly clean working environment is essential to achieve high-quality thin film deposition. In vacuum coating equipment, gas is transported to the reaction chamber via pipelines, and particulate matter in the gas must be effectively filtered during transport to prevent impurities from affecting the coating quality. In some embodiments, structures such as pipeline filters can be used to intercept larger particles, but filtration methods are often ineffective for finer dust particles. Using excessively fine filter structures to improve filtration efficiency can easily obstruct airflow or even clog pipelines, thus affecting the normal operation of the equipment and production efficiency.

[0024] Therefore, some embodiments of this specification provide a dust blocking device, which is provided with multiple dust blocking tubes. The multiple loose and porous blocking components in the tubes block and collect particulate matter, resulting in better particulate matter blocking effect and less clogging. In addition, due to the presence of multiple fluid outlets, the fluid flow is smoother.

[0025] Figure 1 This is a schematic diagram of a dust blocking device according to some embodiments of this specification. Figure 2 This is a cross-sectional schematic diagram of a dust blocking device according to some embodiments of this specification. Figure 2 The cross-section is parallel to the axis a of the dust blocking device 100 and extends radially along the dust blocking device 100.

[0026] In some embodiments, such as Figure 1 , Figure 2 As shown, the dust blocking device 100 includes a first tube 10 and a second tube 20. One end of the first tube 10 has a first fluid inlet 11, and the other end is provided with a first blocking component 12; a first fluid outlet 13 is provided on the side wall of the first tube 10; the second tube 20 is arranged around the first tube 10; the first end 21 of the second tube 20 is sealed, and the second end 22 is connected to the second fluid outlet 33; and a second blocking component 23 is provided on the inner wall of the second tube.

[0027] like Figure 1 , Figure 2 As shown, one end of the first tube 10 has a first fluid inlet 11, and the other end has a first blocking member 12. In some embodiments, the side wall of the first tube 10 has a first fluid outlet 13.

[0028] Fluid enters the dust blocking device 100 through the first fluid inlet 11. In some embodiments, the fluid can be either a gas or a liquid, depending on the industrial production scenario. For example, in a vacuum coating process, the fluid is a gas; as another example, in a water purification process, the fluid is a liquid. Dust can refer to particulate matter in a gaseous fluid or particulate matter in a liquid fluid. In some embodiments, dust can also be referred to as particulate matter.

[0029] In some embodiments, the first fluid inlet 11 can be connected to other components that transport fluid to receive fluid. Taking a vacuum coating apparatus as an example, the first fluid inlet 11 can be connected to the gas delivery pipe of the vacuum coating machine to receive gaseous fluid.

[0030] The first blocking member 12 is used to block dust particles in the fluid. In some embodiments, such as Figure 1 , Figure 2 As shown, the first blocking component 12 can be disposed in the first tube 10 at the other end opposite to the first fluid inlet 11.

[0031] The first blocking component 12 is made of a high-temperature resistant and fire-resistant fibrous material. In some embodiments, the first blocking component 12 has a dense, loose, porous structure, which can more efficiently block and adsorb dust particles. In some embodiments, the first blocking component 12 may be composed of any one or more of ceramic foam, porous ceramics, metal fibers, graphite fibers, activated carbon fibers, and polymer fibers.

[0032] The first fluid outlet 13 is used to allow fluid to flow out of the first pipe body 10. For example... Figure 1 , Figure 2 As shown, the first fluid outlet 13 is located on the side wall of the first pipe body 10.

[0033] Taking a gaseous fluid as an example, after the fluid containing dust particles enters the first pipe body 10 through the first fluid inlet 11, due to the difference in mass between the fluid and the dust particles, the dust particles impact the first blocking component 12 due to inertia. The loose and porous structure of the first blocking component 12 can better adsorb and block the dust particles. The remaining fluid can flow out of the first pipe body 10 through the first fluid outlet 13 and enter the second pipe body 20.

[0034] Figure 3 This is a schematic cross-sectional view of the first and second tubes according to some embodiments of this specification. Figure 3 The cross-section shown is perpendicular to axis a of the dust blocking device 100. For example... Figures 1-3 As shown, the second tube 20 is arranged around the first tube 10; the first end 21 of the second tube 20 is blocked, and the second end 22 is connected to the second fluid outlet 33; and the inner wall of the second tube 20 is provided with a second blocking member 23.

[0035] The first end 21 refers to the end of the second pipe body 20 that is close to the first fluid inlet 11. The second end 22 refers to the end of the second pipe body 20 that is connected to the second fluid outlet 33.

[0036] In some embodiments of this specification, sealing the first end 21 can prevent backflow of fluid into the second pipe 20.

[0037] The second blocking member 23 is used to further block dust particles in the fluid. In some embodiments, such as Figures 2-4 As shown, the second blocking member 23 may be an annular structure. In some embodiments, the second blocking member 23 may be disposed around the inner wall of the second tube 20.

[0038] Similar to the first blocking component 12, the second blocking component 23 can be made of a high-temperature resistant and fire-resistant fiber material. In some embodiments, the second blocking component 23 has a loose and porous structure, which can better block and adsorb dust particles. In some embodiments, the second blocking component 23 can be made of any one or more of ceramic foam, porous ceramics, metal fibers, graphite fibers, activated carbon fibers, and polymer fibers.

[0039] Fluid exits the dust blocking device 100 through the second fluid outlet 33. In some embodiments, the second fluid outlet 33 may be disposed on the second end 22 of the second tube 20. In some embodiments, the second fluid outlet 33 may also be disposed in other ways. For example, the dust blocking device 100 may also include a third tube 30, and the second fluid outlet 33 may be disposed within the third tube 30.

[0040] In some embodiments, the second fluid outlet 33 can be connected to other components that transport fluid to deliver fluid. Taking a vacuum coating equipment as an example, the second fluid outlet 33 can be connected to the gas supply pipe of the vacuum coating machine to deliver fluid to the gas supply pipe.

[0041] Continuing with the gas-fluid example, after the fluid enters the second pipe 20 through the first fluid outlet 13, dust particles impact the second blocking component 12 due to inertia. The loosely structured, porous second blocking component 23 can better adsorb and block the dust particles. The sealed first end 21 can prevent backflow of the fluid entering the second pipe 20. The fluid can also leave the dust blocking device 100 through the second fluid outlet 33, which is connected to the second end 22, and enter other components (such as the gas supply pipeline of a vacuum coating machine).

[0042] In some embodiments, a baffle plate 40 is provided between the outer wall of the first tube 10 and the inner wall of the second tube 20, and a through hole 41 is provided on the baffle plate 40; the first fluid outlet 13 is directly opposite the second blocking component 23, and the through hole 41 is directly opposite the first fluid outlet 13; the opening of the through hole 41 is greater than the opening of the first fluid outlet 13.

[0043] The baffle 40 is used to block the fluid, preventing it from leaving the second pipe 20 too quickly and reducing the dust trapping effect. Figure 2 As shown, the baffle 40 divides the second tube 20 into a first cavity 24 and a second cavity 25. The first cavity 24 is a chamber closer to the inner wall of the second tube 20; the second cavity 25 is a chamber closer to the outer wall of the first tube 20. The first cavity 24 and the second cavity 25 can be connected through the through hole 41.

[0044] In some embodiments, the baffle 40 can also block dust. For example, it can prevent dust entering the first chamber 24 from returning to the second chamber 25. In some embodiments, the baffle 40 may also be provided with a dust-blocking component on one side of the first chamber 24 to improve the dust-blocking effect.

[0045] The through hole 41 is used to allow fluid to pass through the baffle 40. Taking gaseous fluid as an example, after the fluid enters the second tube 20 from the first fluid outlet 13, due to the difference in mass between the fluid and the dust, the dust enters the first chamber 24 through the through hole 41 opposite to the first fluid outlet 13 due to inertia, and impacts the second blocking component 23 opposite to the through hole 41, thus separating from the fluid; the fluid in the first chamber 24 can also return to the second chamber 25 through the through hole 41; the fluid in the second chamber 25 can leave the dust blocking device (or enter the third tube 30) through the second fluid outlet 33.

[0046] The first fluid outlet 13 being directly opposite the second blocking member 23 means that the distance between the centerline of the first fluid outlet 13 and the centerline of the second blocking member 23 is within a first preset range. The through hole 41 being directly opposite the first fluid outlet 13 means that the distance between the centerline of the through hole 41 and the centerline of the first fluid outlet 13 is within a second preset range. The first and second preset ranges can be the same or different. For example, the first preset range (and / or the second preset range) can be 0–0.5 mm, 0–1 mm, 0–1.5 mm, etc.

[0047] The opening refers to the size of the through-hole 41 and / or the first fluid outlet 13. The opening can be expressed by the diameter or cross-sectional area of ​​the through-hole 41 and / or the first fluid outlet 13. The larger the diameter or cross-sectional area, the larger the opening.

[0048] In some embodiments of this specification, the first fluid outlet 13, the baffle 40, and the through hole 41 configured in the manner described above can allow more dust particles to pass through the through hole 41 and be blocked and collected by the second blocking component 23, thereby further improving the dust blocking effect.

[0049] In some embodiments, such as Figure 1 , Figure 2 As shown, the first fluid outlet 13 includes multiple outlets, which are arranged circumferentially along the first pipe body 10.

[0050] In some embodiments of this specification, a plurality of first fluid outlets 13 are provided circumferentially on the side wall of the first tube 10, which enables the fluid to pass through the first tube quickly and smoothly, thereby improving the dust blocking efficiency and avoiding the impact of slow fluid flow on the subsequent vacuum coating process.

[0051] In some embodiments, such as Figures 2-4 As shown, the baffle 40 is annular, and multiple through holes 41 are provided, spaced apart circumferentially along the baffle 40. In some embodiments, there is a correspondence between the multiple first fluid outlets 13 and the multiple through holes 41. For example, one first fluid outlet 13 may correspond to one through hole 41. In some embodiments, the second blocking member 23 is disposed around the inner wall of the second tube body 20. For example, refer to... Figure 2 and Figure 3 The second blocking component 23 can surround the inner wall of the second tube 20 and be disposed in the first cavity 24.

[0052] In some embodiments of this specification, by providing multiple first fluid outlets 13 and multiple through holes 41, the fluid throughput efficiency can be improved, achieving a better dust blocking effect while making the fluid flow more unobstructed. In addition, the first and second pipes provided in the manner described in the above embodiments can maximize the blocking and collection of dust particles in the fluid into the blocking components, thereby improving the effect of subsequent operations (such as vacuum coating).

[0053] In some embodiments, an opening adjustment device is provided at the first fluid outlet and / or through-hole; the opening adjustment device is used to adjust the opening of the first fluid outlet and / or through-hole. For example, when the fluid flow rate is too large, the opening of the first fluid outlet 13 and / or the through-hole 41 can be increased to improve the fluid flow. As another example, when the concentration of dust particles in the fluid is high, the opening of the first fluid outlet 13 and / or the through-hole 41 can be decreased to improve the dust trapping effect.

[0054] The opening adjustment device can regulate the fluid flow rate by changing the diameter or cross-sectional area of ​​the orifice (such as the first fluid outlet 13 and / or the through hole 41). In some embodiments, the opening adjustment device can be one or more of a mechanical adjustment device, a hydraulic / pneumatic adjustment device, and an electric adjustment device. As an example only, a movable baffle or valve may be provided at the first fluid outlet 13 and / or the through hole 41, and the opening adjustment device can adjust the opening degree of the first fluid outlet 13 and / or the through hole 41 through the movable baffle or valve.

[0055] In some embodiments, the dust blocking device 100 further includes a first detection mechanism and a second detection mechanism (not shown in the figure), and the opening degree of the first fluid outlet and / or through hole can be adjusted based on the detection results of the first detection mechanism and / or the second detection mechanism.

[0056] The first testing unit is used to test the cleanliness of the fluid. For example, the first testing unit may include one or more of the following: a suspended solids detector, a laser dust meter, an electrostatic suspended particle counter, etc. The cleanliness of the fluid refers to the cleanliness per unit volume (e.g., 1 mL or 1 cm³). 3 The cleanliness of a fluid is determined by the amount of other particles (such as dust particles) present in it. The higher the amount of other particles in a unit volume of fluid, the lower the cleanliness of the fluid.

[0057] The second detection mechanism is used to detect the flow rate of the fluid. For example, the second detection mechanism may include one or more of the following: mechanical flow meter, electromagnetic flow meter, mass flow meter, ultrasonic flow meter, turbine flow meter, vortex flow meter, etc.

[0058] In some embodiments, the first detection mechanism and the second detection mechanism may be disposed at the first fluid inlet 11 and / or the second fluid outlet 33. Taking the first detection mechanism disposed at the second fluid outlet 33 as an example, when the first detection mechanism detects that the cleanliness of the fluid is lower than a preset threshold, it indicates that the dust blocking device 100 has a poor dust particle blocking effect, and it is necessary to reduce the opening of the first fluid outlet 13 and / or increase the opening of the through hole 41 to improve the dust blocking effect.

[0059] In some embodiments, the cleanliness and flow rate of the fluid can also be input into the opening control model, and the opening control model outputs the opening of the first fluid outlet 13 and the through hole 41.

[0060] Opening degree control models are machine learning models. For example, opening degree control models can be neural network models, deep neural network models, etc.

[0061] The opening control model can be obtained through training. The training samples include a large number of sample fluid cleanliness and flow rates, and the training labels include the sample's first fluid outlet opening and the sample's through-hole opening. The training samples and labels can be obtained manually through collection and annotation based on historical vacuum coating production processes.

[0062] In some embodiments of this specification, adjusting the opening of the first fluid outlet and / or through hole based on the cleanliness and flow rate of the fluid can achieve a better dust blocking effect while ensuring smooth fluid flow. Users can also flexibly adjust the opening of the through hole according to their needs to meet production requirements. In addition, determining the opening of the first fluid outlet and through hole through a machine learning model can further improve the dust blocking effect, making the dust blocking process more automated and intelligent.

[0063] In some embodiments, a guide tube is provided inside the first tube body 10. Figure 4 This is a cross-sectional schematic diagram of a dust blocking device according to other embodiments of this specification. Figure 4 The cross-section is parallel to the axis a of the dust blocking device 100 and extends radially along the dust blocking device 100. One end of the guide pipe 15 is connected to the first fluid inlet 11, and the other end extends into the interior of the first pipe body 10 and is closer to the first blocking component 12 than the first fluid outlet 13.

[0064] In some embodiments of this specification, a guide tube is provided in the first tube body to prevent the fluid from flowing directly out of the first fluid outlet before contacting the first blocking component, so that the dust particles in the fluid are better blocked and collected by the first blocking component, thereby improving the dust particle blocking effect.

[0065] In some embodiments, the dust blocking device 100 further includes a third tube 30, one end of which is connected to the second end 22 of the second tube 20, and the other end of which is provided with a third blocking component 32; the second fluid outlet 33 is provided on the side wall of the third tube 30.

[0066] The third tube 30 is used to block dust particles from the fluid leaving the second tube 20. The structure and function of the components of the third tube 30 are similar to those of the first tube 10.

[0067] In some embodiments, such as Figure 1 , Figure 2 As shown, there are multiple second fluid outlets 33, which are arranged circumferentially along the third pipe body 30.

[0068] In some embodiments, the third blocking component 32 has a loose porous structure to block and adsorb dust particles. In some embodiments, the third blocking component 32 is composed of any one or more of ceramic foam, porous ceramic, metal fiber, graphite fiber, activated carbon fiber, and polymer fiber.

[0069] In some embodiments, after the fluid leaves the second pipe 20, it enters the third pipe 30 through the second fluid inlet 31. Dust particles in the fluid collide with the third blocking member 32 and are collected and blocked, separating from the fluid. The separated fluid can then quickly flow out of the third pipe 30 through multiple second fluid outlets 33 and enter the gas supply pipeline of the vacuum coating machine.

[0070] In some embodiments, the dust blocking device 100 may be part of the gas supply duct of a vacuum coating machine.

[0071] In some embodiments, the dust blocking device 100 is detachable. In some embodiments, at least one of the first blocking component, the second blocking component, and the third blocking component is detachable. In some embodiments of this specification, the dust blocking device 100 (or some components thereof) is detachable, easy to maintain and replace, and can extend its service life and improve the dust blocking effect.

[0072] Some embodiments of this specification also provide a gas delivery pipe for a vacuum coating machine, the gas delivery pipe including a dust blocking device 100 as shown in any of the above embodiments.

[0073] Some embodiments of this specification also provide a vacuum coating machine, which includes the pipes described in the above embodiments.

[0074] The vacuum coating machine and gas pipeline described in the embodiments of this specification can block dust in the gas fluid when it is transporting gas fluid. It has a good blocking effect on dust particles of different sizes, which can reduce the impact of dust on coating quality and obtain better coating effect. In addition, the gas flow is high and it is not easy to clog, which has good practicality and ease of use.

[0075] The basic concepts have been described above. Obviously, for those skilled in the art, the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this specification. Such modifications, improvements, and corrections are suggested in this specification and therefore remain within the spirit and scope of the exemplary embodiments described herein.

[0076] It should be understood that the embodiments described in this specification are merely illustrative of the principles of the embodiments described herein. Other variations may also fall within the scope of this specification. Therefore, alternative configurations of the embodiments described herein are intended to be consistent with the teachings of this specification, rather than as examples or limitations. Accordingly, the embodiments described herein are not limited to those explicitly introduced and described herein.

Claims

1. A dust blocking device, characterized in that, The device includes: A first tube body, having a first fluid inlet at one end and a first blocking component at the other end; and a first fluid outlet on the side wall of the first tube body. The second tube is arranged around the outside of the first tube; the first end of the second tube is sealed, and the second end is connected to the second fluid outlet; and the inner wall of the second tube is provided with a second blocking component.

2. The dust blocking device as described in claim 1, characterized in that, A baffle plate is provided between the outer wall of the first tube and the inner wall of the second tube, and the baffle plate is provided with a through hole; the first fluid outlet is directly opposite the second blocking component, and the through hole is directly opposite the first fluid outlet; the opening of the through hole is greater than the opening of the first fluid outlet.

3. The dust blocking device as described in claim 2, characterized in that, The first fluid outlet includes multiple outlets, which are arranged circumferentially along the first pipe body; the baffle is annular, and the through holes include multiple holes, which are spaced apart circumferentially along the baffle; the second blocking member is arranged around the inner wall of the second pipe body.

4. The dust blocking device as described in claim 2, characterized in that, An opening adjustment device is provided at the first fluid outlet and / or the through hole; the opening adjustment device is used to adjust the opening of the first fluid outlet and / or the through hole.

5. The dust blocking device as described in claim 4, characterized in that, The device further includes a first detection mechanism and a second detection mechanism; the first detection mechanism is used to detect the cleanliness of the fluid; the second detection mechanism is used to detect the flow rate of the fluid; the first detection mechanism and the second detection mechanism are disposed at the first fluid inlet and / or the second fluid outlet; the opening of the first fluid outlet and / or the through hole is adjusted based on the detection results of the first detection mechanism and / or the second detection mechanism.

6. The dust blocking device as described in claim 1, characterized in that, The first tube body is also provided with a guide tube, one end of which is connected to the first fluid inlet, and the other end of which is closer to the first blocking component than the first fluid outlet.

7. The dust blocking device as described in claim 2, characterized in that, The device further includes a third tube, one end of which is connected to the second end of the second tube, and the other end of which is provided with a third blocking component; the second fluid outlet is located on the side wall of the third tube.

8. The dust blocking device as described in claim 7, characterized in that, The first blocking component, the second blocking component, and / or the third blocking component are composed of any one or more of ceramic foam, porous ceramic, metal fiber, graphite fiber, activated carbon fiber, and polymer fiber.

9. A gas supply pipe for a vacuum coating machine, characterized in that, The gas pipeline includes a dust blocking device as described in any one of claims 1-8.

10. A vacuum coating machine, characterized in that, The vacuum coating machine includes the gas supply pipeline as described in claim 9.

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