A quick-release injection structure for an ERC ion source and method of use

Abstract

This invention relates to a quick-release injection structure and application method for an ERC ion source. The injection assembly has a cylindrical structure with a corrugated, expandable bellows in the middle. The end of the injection assembly connects to an ion source assembly. The injection assembly passes through multiple supply tubes required by the ion source assembly along the cylindrical axis, connecting to the interior of the ion source assembly. A quick-release flange, located between the injection assembly and the ion source assembly, includes a first flange and a second flange. The first flange is fixedly connected to the injection assembly, and the second flange is fixedly connected to the ion source assembly. The first and second flanges are detachably connected. A gate valve, installed on the second flange, can be movably inserted between the first and second flanges. Based on the expandable bellows, the end of the supply tube is directly stretched into the injection assembly, requiring only the removal of the quick-release flange, simplifying the disassembly process. The gate valve significantly improves the sealing effect.

Description

Technical Field

[0001] This invention relates to the technical field of small accelerators, and more particularly to a quick-release injection structure and application method for ERC ion sources. Background Technology

[0002] An ion source mainly consists of an implantation assembly, a magnet, an arc cavity, and an extraction assembly. The implantation assembly, which includes functions such as sample input, vacuum maintenance, and microwave feed, is one of the key components for the operation of the ion source. Its design directly affects the performance of the ion source by influencing factors such as the effectiveness of microwave feed and the maintenance of vacuum pressure.

[0003] Current injection components generally have relatively simple mechanical designs, using only conventional flange connections. Microwave feed components include coaxial feed, direct waveguide feed, and circular waveguide feed. Ion sources for gas samples generally use a direct connection to the arc cavity. Methods for obtaining metallic elements and compound vapors from solid samples mainly include furnace methods, MIVOC (Metallic Ion From Volatile Compounds), plasma heating methods, plasma sputtering methods, and laser ablation methods.

[0004] When using solid samples, the inside of the arc cavity will gradually become contaminated by the sample over time, requiring frequent disassembly and cleaning. Since the microwave feed components connected to the injection assembly are all flanged, the microwave feed components on the injection assembly must be disassembled before the outer shell of the injection assembly can be disassembled when opening the arc cavity. This operation is very complicated, requires the removal of many parts, and is time-consuming each time. Moreover, it is easy to cause vacuum to be difficult to maintain due to various oversights, which greatly hinders the operation of the ion source.

[0005] The above problems urgently need to be addressed. Summary of the Invention

[0006] This invention discloses a quick-release implantation structure and application method for ERC ion sources, aiming to solve the technical problems existing in the prior art.

[0007] The present invention adopts the following technical solution: On one hand, the present invention provides a quick-release injection structure for an ERC ion source, comprising: an injection assembly, which is cylindrical in shape and has a corrugated, retractable bellows in the middle; the end of the injection assembly is connected to an ion source assembly; the injection assembly passes through multiple supply tubes required by the ion source assembly along the cylindrical axis and communicates with the interior of the ion source assembly; a quick-release flange, disposed between the injection assembly and the ion source assembly, including a first flange and a second flange; the first flange is fixedly connected to the injection assembly, and the second flange is fixedly connected to the ion source assembly; the first flange and the second flange are detachably connected; and a slide valve, installed on the second flange and movably inserted between the first flange and the second flange.

[0008] Optionally, the injection component has an opening at one end away from the ion source component, and the supply tube extends from the opening side into the ion source component to contact the ion source; the opening of the injection component is fixedly connected to the contact position of the supply tube.

[0009] Optionally, the supply tube includes: a gas inlet tube for inputting a gas sample into the ion source assembly; a feed waveguide for inputting microwave energy into the ion source assembly; and a solid sample furnace inlet tube for inputting a solid sample into the ion source assembly; the gas inlet tube, the feed waveguide, and the solid sample furnace inlet tube are parallel to the central axis of the injection assembly.

[0010] Optionally, when the corrugated tube is extended to its maximum length, the length of the injection component is greater than the length of the supply tube from the opening to one end of the ion source component; when the corrugated tube is shortened to its minimum length, the length of the injection component is less than the length of the supply tube from the opening to one end of the ion source component.

[0011] Optionally, the bellows is made of metal.

[0012] Optionally, it also includes: a pivot, mounted on the quick-release flange, connecting the first flange and the second flange, for opening and closing between the first flange and the second flange.

[0013] Optionally, a sealing ring is provided on the surface of the second flange, and the sealing ring is disposed between the first flange and the second flange.

[0014] Optionally, it also includes: multiple positioning rods that pass through the first flange along the axial direction of the injection assembly; positioning holes that are disposed on the second flange and face the first flange; the positioning rods are inserted into the positioning holes to align the first flange and the second flange.

[0015] Optionally, the positioning rod extends into the injection assembly, and the length of the positioning rod is greater than half the length of the injection assembly.

[0016] According to another aspect of the present invention, a method for applying a quick-release injection structure for an ERC ion source is also provided, comprising: elongating a bellows, moving the end of the long supply tube from the ion source assembly to the injection assembly; inserting a gate valve between a first flange and a second flange, close to the second flange; separating the first flange and the second flange, and rotating the injection assembly 90 degrees along a pivot axis using the first flange; replacing the contaminated end of the long supply tube in the injection assembly; rotating the first flange along the pivot axis so that the positioning rod on the first flange aligns with the positioning hole on the second flange, fitting the first flange and the second flange together, and pulling out the gate valve; compressing the bellows along the extension direction of the positioning rod, pushing the end of the long supply tube into the ion source assembly, and completing the replacement.

[0017] The technical solution adopted in this invention can achieve at least one of the following beneficial effects: In this embodiment of the invention, the injection component has a cylindrical structure with a corrugated, expandable bellows in the middle. The end of the injection component is connected to the ion source component. The injection component passes through multiple supply pipes required by the ion source component along the cylindrical axis, connecting to the interior of the ion source component. A quick-release flange, located between the injection component and the ion source component, includes a first flange and a second flange. The first flange is fixedly connected to the injection component, and the second flange is fixedly connected to the ion source component. The first flange and the second flange are detachably connected. A slide valve is installed on the second flange and can be movably inserted between the first flange and the second flange. Based on the expandable bellows, the end of the supply pipe is directly stretched into the injection component. While the injection component is not disassembled, the space formed between the injection component and the ion source component remains sealed, ensuring internal airtightness. When it is necessary to open the arc cavity, only the quick-release flange needs to be opened, making disassembly convenient. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below, forming part of the present invention. The illustrative embodiments of the present invention and their descriptions explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings: Figure 1 This is a front-view overall view of a quick-release implantation structure for an ERC ion source in Embodiment 1 of the present invention; Figure 2 This is a right rear-side view of an overall structure for a quick-release implantation structure for an ERC ion source in Embodiment 1 of the present invention. Figure 3 This is an internal structural diagram of the implantation assembly of a quick-release implantation structure for an ERC ion source according to Embodiment 1 of the present invention; Figure 4 This is a flowchart of an application method for a quick-release implantation structure for an ERC ion source in Embodiment 2 of the present invention.

[0019] Explanation of reference numerals in the attached figures: 1. Injection assembly; 2. Gas inlet tube; 3. Feed waveguide; 4. Solid sample furnace inlet tube; 5. Rotary shaft; 6. Quick-release flange; 7. Bellows; 8. Positioning rod; 9. Quick-release buckle. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. In the description of this invention, it should be noted that the term "or" is generally used to include the meaning of "and / or," unless otherwise expressly indicated.

[0021] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or a magnetic connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances. Furthermore, in the description of this application, the terms "first," "second," etc., are used only for distinguishing descriptions and should not be construed as indicating or implying relative importance. In the description of this invention, "a plurality of" means at least two, such as two, three, or more, unless otherwise explicitly specified.

[0022] Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0023] To address the problems existing in related technologies, this application provides a quick-release implantation structure and application method for an ERC ion source.

[0024] Example 1 This embodiment provides a quick-release implantation structure for an ERC ion source, such as... Figure 1 and Figure 2 As shown, the structure includes: The injection component 1 has a cylindrical structure with a corrugated, expandable bellows 7 in the middle. The end of the injection component 1 is connected to the ion source component. The injection component 1 passes through multiple supply pipes required by the ion source component along the axis of the cylinder, connecting to the inside of the ion source component. A quick-release flange 6 is set between the injection component 1 and the ion source component, including a first flange and a second flange. The first flange is fixedly connected to the injection component 1, and the second flange is fixedly connected to the ion source component. The first flange and the second flange are detachably connected. A slide valve is installed on the second flange and can be movably inserted between the first flange and the second flange.

[0025] Optionally, the injection component 1 body uses a separate chamber from the ion source component and is connected to the ion source component body via a quick-release flange 6. The second flange is fixed to the magnet housing of the ion source component by bolting or welding. When disassembling the component for cleaning or replacing the arc cavity, the rubber ring ensures sufficient airtightness.

[0026] An opening is made at the end of the injection component 1 furthest from the ion source component to facilitate the connection of the waveguide and the introduction of gas. Solid samples are introduced in the form of a miniature furnace, i.e., a long supply tube is inserted and fixed to one side of the opening in the injection component 1, meaning the position of the supply tube and the opening in the injection component 1 is fixed and cannot be moved. Furthermore, the long supply tube is quite long, penetrating the entire injection component 1 and extending into the interior of the ion source component, contacting the ion source inside.

[0027] The injection assembly 1 is divided into three sections by the bellows 7: one section is the end through which the long supply tube enters, one section is the retractable position of the bellows 7, and the other section is the end close to the ion source assembly. When it is necessary to replace the A end of the long supply tube, simply stretch the bellows 7 so that the A end of the long supply tube enters the injection assembly 1 from inside the ion source assembly. At this time, close the slide valve to form an independent sealed space inside the ion source assembly, and then open the quick-release flange 6 to replace the A end of the long supply tube inside the injection assembly 1. It should be noted that the A end of the long supply tube is the end that is inserted into the ion source assembly.

[0028] Optionally, by stretching and contracting the bellows 7, the long supply tube can be removed from the ion source assembly when stretched. During replacement and maintenance, only the quick-release flange 6 needs to be disassembled, without disassembling the entire long supply tube, effectively simplifying the disassembly process. Furthermore, during disassembly, the slide gate valve creates an independent sealed space for the ion source assembly, effectively improving sealing and vacuum performance.

[0029] Optionally, a quick-release buckle 9 is provided on the quick-release flange 6. When changing solid samples, simply pause the vacuum, extend the bellows 7 to open the quick-release flange 6, and change the furnace or sample inside the furnace through the remote replacement port. Similarly, when changing or cleaning the internal arc cavity, simply retract the supply tube, open the entire assembly using the quick-release flange 6, and remove the arc cavity. This significantly reduces the difficulty and workload when changing sample feeds and changing / cleaning the arc cavity. The simplified structure also reduces vacuum leakage and lowers the difficulty of maintenance and repair. Maintenance time is reduced by about half compared to similar ion sources, and sample change time is reduced by about two-thirds.

[0030] In some preferred embodiments, the injection component 1 has an opening at one end away from the ion source component, and the supply tube extends from the opening side into the interior of the ion source component to contact the ion source; the opening of the injection component 1 and the contact position of the supply tube are fixedly connected.

[0031] Optionally, the supply tube is internally connected to the ion source assembly based on the injection component 1. The injection component 1 and the supply tube are fixedly connected by a flange. The injection component 1 and the ion source assembly are detachably connected. The injection component 1 forms a sealed state, and the ion source assembly is also sealed. Under normal use, the ion source assembly is in a sealed vacuum state and can work normally. When replacing end A of the supply tube, the injection component 1 is stretched to pull out the supply tube. At this time, the injection component 1 is still in a sealed state, ensuring the vacuum sealing of the ion source assembly.

[0032] Optionally, since the injection component 1 and the supply tube are fixed, in order to ensure that the supply tube can be pulled out from inside the ion source component, it is necessary to use a corrugated tube 7. The corrugated tube 7 extends the lateral length of the injection component 1, which can effectively pull out the A end of the supply tube.

[0033] In some preferred embodiments, the supply tube includes: a gas inlet tube 2 for inputting a gas sample into the ion source assembly; a feed waveguide 3 for inputting microwave energy into the ion source assembly; and a solid sample furnace inlet tube 4 for inputting a solid sample into the ion source assembly; the gas inlet tube 2, the feed waveguide 3, and the solid sample furnace inlet tube 4 are parallel to the central axis of the injection assembly 1.

[0034] Optionally, the solid sample furnace inlet pipe 4 has a larger diameter and is positioned at the center of the injection assembly 1. At the same time, the gas injection pipe 2 and the feed waveguide 3 are placed around the solid sample furnace inlet pipe 4 and close to the solid sample furnace inlet pipe 4, so that the multiple pipelines supplying the long pipe are concentrated together, making it easier to align with the ion source in the ion source assembly during installation.

[0035] In some preferred embodiments, when the corrugated tube 7 is extended to its maximum length, the length of the injection component 1 is greater than the length of the supply tube from the opening to one end of the ion source component; when the corrugated tube 7 is shortened to its minimum length, the length of the injection component 1 is less than the length of the supply tube from the opening to one end of the ion source component.

[0036] Optionally, to ensure the stretching of the bellows 7, the supply tube can be pulled out from inside the ion source assembly. The length of the bellows 7 after stretching needs to be set to exceed the length of the supply tube inside the ion source assembly, so as to effectively ensure the stretching effect of the bellows 7.

[0037] Optionally, to ensure that the supply tube can extend to the ion source of the ion source assembly after the bellows 7 is compressed, the length of the bellows 7 after compression needs to be reduced as much as possible. At the same time, before the supply tube is installed in the injection assembly 1, the length of the supply tube needs to be adjusted to ensure that the supply tube is long enough.

[0038] In some preferred embodiments, the bellows 7 is made of metal.

[0039] Optionally, the main body of injection component 1 is made of stainless steel, which has good mechanical strength and a large opening for easy replacement of the arc cavity. The bellows 7 is made of metal to prevent breakage after repeated stretching. In addition, it has good flexibility and structural strength, which can accommodate fine-tuning of the position between the supply tube and the ion source component while ensuring vacuum sealing.

[0040] In some preferred embodiments, it further includes: a rotating shaft 5, mounted on a quick-release flange 6, connecting the first flange and the second flange, for opening and closing between the first flange and the second flange.

[0041] Optionally, a pivot 5 is provided on the quick-release flange 6, located on the opposite side of the quick-release buckle 9, so that the first flange can rotate relative to the second flange. After the quick-release buckle 9 of the quick-release flange 6 is opened, the first flange drives the injection assembly 1 to rotate 90 degrees relative to the ion source assembly, thereby allowing the end of the supply tube to be replaced without completely disassembling the injection assembly 1.

[0042] In some preferred embodiments, a sealing ring is provided on the surface of the second flange, and the sealing ring is disposed between the first flange and the second flange.

[0043] Optionally, the sealing ring can fill the gap between the first flange and the second flange to ensure a sealed state between the injection assembly 1 and the ion source assembly.

[0044] In some preferred embodiments, the assembly further includes: multiple positioning rods 8 that pass through the first flange along the axial direction of the injection assembly 1; positioning holes that are disposed on the second flange and face the first flange; and positioning rods 8 that are inserted into the positioning holes to align the first flange and the second flange.

[0045] Reference Figure 3 Optionally, after opening the quick-release flange 6 and replacing the A end of the supply tube, the quick-release flange 6 needs to be closed again. To ensure that the A end of the supply tube extends into the ion source assembly and is aligned with the ion source, several positioning holes can be set on the second flange and corresponding positioning rods 8 can be set on the first flange. The positioning rods 8 are inserted into the positioning holes to complete the docking state. At this time, the quick-release buckle 9 of the quick-release flange 6 is closed to effectively achieve the installation alignment.

[0046] In some preferred embodiments, the positioning rod 8 extends into the injection assembly 1, and the length of the positioning rod 8 is greater than half the length of the injection assembly 1.

[0047] Optionally, a positioning rod 8 is provided, extending into the injection assembly 1. The extension line of the positioning rod 8 can be used to determine whether the supply tube is parallel to the positioning rod 8, thereby judging whether the supply tube is deviated during the initial installation process, effectively ensuring that the subsequent supply tube is accurately positioned at the ion source location.

[0048] Example 2 Based on the above embodiments and optional embodiments, the present invention also proposes a method implementation method, such as... Figure 4 As shown, the method includes: Step S1: The bellows 7 is stretched out, and the end of the long tube is moved from inside the ion source assembly to inside the injection assembly 1. Step S2: Insert a slide gate valve between the first flange and the second flange, and place it close to the second flange; Step S3: Separate the first flange and the second flange, and rotate the first flange along the shaft 5 by 90 degrees. Step S4: Replace the contaminated end of the supply tube inside injection assembly 1; Step S5: Rotate the first flange along the shaft 5 so that the positioning rod 8 on the first flange is aligned with the positioning hole on the second flange, fit the first flange and the second flange together, and pull out the slide valve. Step S6: Along the extension direction of the positioning rod 8, compress the bellows 7 and push the end of the supply tube into the ion source assembly to complete the replacement.

[0049] Through steps S1 to S6 above, a high-efficiency, easy-to-maintain injection component 1 system applicable to small and medium-sized ECR ion sources can be developed, greatly simplifying the operation process in daily maintenance and reducing the impact on daily operation. At the same time, the simplified structure also reduces the occurrence of vacuum leaks and lowers the difficulty of maintenance and repair.

[0050] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A quick-release implantation structure for an ERC ion source, characterized in that, include: The injection component (1) has a cylindrical structure and a corrugated retractable bellows (7) is provided in the middle part. The end of the injection component (1) is connected to the ion source component. The injection component (1) passes through multiple supply tubes required by the ion source component along the cylindrical axis and is connected to the inside of the ion source component. A quick-release flange (6) is provided between the injection assembly (1) and the ion source assembly, including a first flange and a second flange. The first flange is fixedly connected to the injection assembly (1), and the second flange is fixedly connected to the ion source assembly. The first flange and the second flange are detachably connected. A slide gate valve is installed on the second flange and can be movably inserted between the first flange and the second flange.

2. The quick-release implantation structure for an ERC ion source according to claim 1, characterized in that, The injection component (1) has an opening at one end away from the ion source component, and the supply tube extends from the opening side into the interior of the ion source component and contacts the ion source. The opening of the injection component (1) is fixedly connected to the contact position of the supply tube.

3. The quick-release implantation structure for an ERC ion source according to claim 1, characterized in that, The supply tube includes: Gas inlet tube (2) is used to input gas samples into the ion source assembly; Feed waveguide (3) is used to input microwave energy into the ion source assembly; The solid sample furnace inlet pipe (4) is used to input solid samples into the ion source assembly; The gas injection tube (2), the feed waveguide (3), and the solid sample furnace inlet tube (4) are parallel to the central axis of the injection assembly (1).

4. The quick-release implantation structure for an ERC ion source according to claim 1, characterized in that, When the corrugated tube (7) is extended to its maximum length, the length of the injection component (1) is greater than the length of the supply tube from the opening to one end of the ion source component; When the corrugated tube (7) is shortened to its shortest length, the length of the injection component (1) is less than the length of the supply tube from the opening to one end of the ion source component.

5. A quick-release implantation structure for an ERC ion source according to claim 1, characterized in that, The corrugated pipe (7) is made of metal.

6. A quick-release implantation structure for an ERC ion source according to claim 1, characterized in that, Also includes: A rotating shaft (5) is installed on the quick-release flange (6) to connect the first flange and the second flange, and is used for opening and closing between the first flange and the second flange.

7. A quick-release implantation structure for an ERC ion source according to claim 1, characterized in that, A sealing ring is provided on the surface of the second flange, and the sealing ring is disposed between the first flange and the second flange.

8. A quick-release implantation structure for an ERC ion source according to claim 1, characterized in that, Also includes: Multiple positioning rods (8) pass through the first flange along the axial direction of the injection assembly (1); A positioning hole is provided on the second flange and faces the first flange; The positioning rod (8) is inserted into the positioning hole to align the first flange and the second flange.

9. A quick-release implantation structure for an ERC ion source according to claim 8, characterized in that, The positioning rod (8) extends into the injection assembly (1), and the length of the positioning rod (8) is greater than half the length of the injection assembly (1).

10. An application method for a quick-release implantation structure for an ERC ion source, characterized in that, A quick-release implantation structure for an ERC ion source, applicable to any one of claims 1 to 9, comprising: The bellows (7) is stretched out, and the end of the supply tube is moved from inside the ion source assembly to inside the injection assembly (1); Insert a slide gate valve between the first flange and the second flange, close to the second flange; Separate the first flange and the second flange, and rotate the injection assembly (1) 90 degrees along the shaft (5) by the first flange; Replace the contaminated end of the supply tube within the injection assembly (1); Rotate the first flange along the shaft (5) so that the positioning rod (8) on the first flange is aligned with the positioning hole on the second flange, fit the first flange and the second flange together, and pull out the slide valve; Along the extension direction of the positioning rod (8), the bellows (7) is compressed, and the end of the supply tube is pushed into the ion source assembly to complete the replacement.

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