Anti-fluorine composition

Abstract

This disclosure generally provides a fluoride-resistant ceramic composition. The fluoride-resistant ceramic composition comprises about 80 mol% to about 99.9 mol% of a first metal composition, the first metal composition comprising an aluminum-based composition selected from the group consisting of nitrides, oxynitrides, oxides, and oxyfluorides. The fluoride-resistant ceramic composition comprises about 0.1 mol% to about 20 mol% of a second metal composition, the second metal composition comprising an alkaline earth metal-based composition selected from the group consisting of nitrides, oxynitrides, oxides, oxyfluorides, and fluorides.

Description

background Technical Field

[0001] The embodiments of this disclosure generally relate to semiconductor processing. More specifically, the embodiments relate to fluorine-resistant substrate supports. Background Technology

[0002] Various semiconductor processing technologies incorporate one or more ceramic components that undergo rigorous chemical conduction during high-temperature NF3 plasma processing. Conventional ceramic components used in high-temperature NF3 plasma processing are formed from a bulk material comprising doped and / or undoped aluminum nitride or aluminum oxide. Unfortunately, each of the doped and / or undoped aluminum nitride or aluminum oxide can deteriorate due to fluorination and / or thermal shock.

[0003] Conventional methods for preventing the degradation of ceramic components in processing chambers focus on coating the body material with an anti-fluorine coating. Unfortunately, the anti-fluorine coating may crack and / or delaminate during processing, which can lead to particulate contamination during substrate processing. Furthermore, cracking and / or delamination of the anti-fluorine coating requires complex regeneration processes to correct the cracks, thereby increasing downtime and manufacturing costs.

[0004] Therefore, improved ceramic compositions are needed. Summary of the Invention

[0005] In some embodiments, this disclosure provides a fluoride-resistant ceramic composition. The fluoride-resistant ceramic composition comprises about 80 mol% to about 99.9 mol% of a first metal composition, which comprises an aluminum-based composition selected from the group consisting of nitrides, oxynitrides, oxides, and oxyfluorides. The fluoride-resistant ceramic composition comprises about 0.1 mol% to about 20 mol% of a second metal composition, which comprises an alkaline earth metal-based composition selected from the group consisting of nitrides, oxynitrides, oxides, oxyfluorides, and fluorides.

[0006] In other embodiments, this disclosure provides a fluoride-resistant ceramic composition. The fluoride-resistant ceramic composition comprises about 0.1 mol% to about 40 mol% of a first metal composition, the first metal composition comprising an aluminum-based composition selected from the group consisting of nitrides, oxynitrides, oxides, and oxyfluorides. The fluoride-resistant ceramic composition comprises about 55 mol% to about 99.9 mol% of a second metal composition, the second metal composition comprising an alkaline earth metal-based composition selected from the group consisting of nitrides, oxynitrides, oxides, oxyfluorides, and fluorides. The fluoride-resistant ceramic composition comprises about 0 mol% to about 40 mol% of a third metal composition, the third metal composition comprising a rare earth metal-based composition selected from the group consisting of nitrides, oxynitrides, oxides, oxyfluorides, and fluorides. When the composition comprises about 15 mol% to about 40 mol% of the first metal composition, the composition comprises about 0.1 mol% to about 40 mol% of the third metal composition. The total amount of the first, second, and third metal components does not exceed 100 mol.

[0007] In other embodiments, this disclosure provides a ceramic component comprising a ceramic composition. The ceramic composition comprises about 0.1 mol% to about 40 mol% of a first metal composition, the first metal composition comprising an aluminum-based composition selected from the group consisting of nitrides, oxynitrides, oxides, and oxyfluorides. The ceramic composition comprises about 55 mol% to about 99.9 mol% of a second metal composition, the second metal composition comprising an alkaline earth metal-based composition selected from the group consisting of nitrides, oxynitrides, oxides, oxyfluorides, and fluorides. The ceramic composition comprises about 0 mol% to about 40 mol% of a third metal composition, the third metal composition comprising a rare earth metal-based composition selected from the group consisting of nitrides, oxynitrides, oxides, oxyfluorides, and fluorides. When the ceramic composition comprises about 15 mol% to about 40 mol% of the first metal composition, the composition comprises about 0.1 mol% to about 40 mol% of the third metal composition. The total amount of the first, second, and third metal components does not exceed 100 mol. Attached Figure Description

[0008] To gain a more detailed understanding of the features described above, a more specific description of the present disclosure, which has been briefly summarized above, can be obtained by referring to embodiments, some of which are illustrated in the accompanying drawings. However, it should be noted that the drawings illustrate only exemplary embodiments and should not be construed as limiting their scope, and other equally effective embodiments may be permitted.

[0009] Figure 1This is a schematic side view of the processing chamber according to an embodiment of the present disclosure.

[0010] Figure 2 This is a schematic diagram of a ceramic composition according to an embodiment of the present disclosure.

[0011] To facilitate understanding, the same reference numerals are used to denote common elements in the figures where possible. Elements and features of one embodiment are contemplated to be advantageously incorporated into other embodiments without further description. Detailed Implementation

[0012] Embodiments of this disclosure generally relate to ceramic compositions and methods of producing the same, which are used as body materials for ceramic components in high-temperature NF3 plasma processing chambers. In some embodiments, the ceramic composition may comprise binary and / or ternary oxide compositions. In some embodiments, the binary and / or ternary oxide compositions may comprise one or more of nitrides, oxynitrides, oxides, fluorides, and / or oxyfluorides. In some embodiments, the binary and / or ternary oxide compositions may provide enhanced fluoride resistance compared to conventional body material compositions (e.g., aluminum nitride and / or alumina), thereby providing an extended lifespan for the ceramic composition.

[0013] Figure 1 A schematic diagram of a processing chamber 100 according to some embodiments of the present disclosure is shown. The processing chamber 100 includes a chamber body 102 and a cover 104, thereby defining a processing volume 114 within the processing chamber. The bottom 124 of the chamber body 102 is opposite to the cover 104. A port 106 is formed through the cover 104. A gas source 108 is in fluid communication with the port 106. A nozzle 110 is coupled to the cover 104. A plurality of openings 112 are formed through the nozzle 110. The gas source 108 is in fluid communication with the processing volume 114 through the port 106 and the openings 112.

[0014] A substrate support 116 is movably disposed within the processing volume 114, opposite to the cover 104. The substrate support 116 includes a support body 130 disposed on a rod 118. The support body 130 includes a support surface 132 configured to face the nozzle 110 opposite to the rod 118. In some embodiments, the processing chamber 100 may include one or more ceramic components, including a lifting rod, an edge ring, an isolator, a heater, an electrostatic chuck, a nozzle, a capping wafer, and / or a baffle, wherein each of these components is a ceramic composition of this disclosure. For example, the support body 130 may include a heater 136 or an electrostatic chuck. The heater 136 or electrostatic chuck is formed of a body material. In some embodiments, the heater 136 or electrostatic chuck may be a ceramic composition of this disclosure.

[0015] The support surface 132 may include a plurality of platforms 134. An opening 120 is formed through the chamber body 102 between the cover 104 and the bottom 124. During operation, a substrate 101 is loaded onto the support surface 132 through the opening 120. An actuator 126 is coupled to a substrate support 116 to move the substrate support 116 toward and away from the nozzle 110 to load and process the substrate 101 on the substrate support.

[0016] An RF mesh 122 is disposed within the support body 130. One or more portions of the RF mesh 122 are disposed in a plane substantially perpendicular to the support surface 132. The RF mesh 122 can be used to heat the substrate 101 or electrostatically clamp the substrate 101. The RF mesh 122 is positioned at a predetermined distance from the support surface 132. The RF mesh 122 is connected to one or more RF leads 127. The RF leads 127 are coupled to an RF power supply 128. The RF power supply 128 provides RF power to the RF mesh 122. Although in Figure 1 The heater 136 is illustrated above the RF mesh 122, but the heater 136 and the RF mesh can be oriented in any suitable orientation to heat the substrate 101, for example, the heater 136 is located below the RF mesh 122.

[0017] In some embodiments, the ceramic composition may comprise at least a first metal composition and a second metal composition. The first metal composition may comprise a Group 13 metal, such as aluminum, gallium, or indium. For example, the first metal composition may comprise an aluminum-based composition. For example, the first metal composition may comprise aluminum oxide, aluminum nitride, aluminum oxynitride, aluminum fluoride, and / or aluminum oxyfluoride. For example, the first metal composition may comprise aluminum oxide. As another example, the first metal composition may comprise aluminum nitride. Without being bound by theory, an aluminum oxide first metal composition may provide increased hardness, while an aluminum nitride first metal composition may provide increased resistivity. Furthermore, and without being bound by theory, a first metal composition comprising fluorine oxides may enhance fluorine etching resistance, thereby improving the etching resistance of the ceramic composition.

[0018] The first metallic composition may be present in the ceramic composition at about 0.1 mol% to about 99.9 mol%, for example, about 0.1 mol% to about 90 mol%, about 20 mol% to about 80 mol%, about 0.1 mol% to about 40 mol%, about 80 mol% to about 99.9 mol%, or about 85 mol% to about 99.9 mol%. For example, the first metallic composition may be present in the ceramic composition at about 85 mol% to about 99.9 mol%. As another example, the metallic composition may be present in the ceramic composition at about 0.1 mol% to about 40 mol%.

[0019] The second metal composition may comprise a composition based on an alkaline earth metal (e.g., Group 2 metals such as beryllium, magnesium, calcium, strontium, barium, or radium). In some embodiments, the second metal composition may comprise a magnesium-based composition. For example, the first metal composition may comprise magnesium oxide, magnesium nitride, magnesium oxynitride, magnesium fluoride, and / or magnesium oxyfluoride. For example, the second metal composition may comprise magnesium oxide. In some embodiments, the second metal composition may comprise calcium oxide. In some embodiments, the second metal composition may comprise strontium oxide. In some embodiments, the second metal composition may comprise barium oxide. Without being bound by theory, a magnesium oxide second metal composition may provide a ceramic composition with reduced vapor pressure and low wear rate for NF3 plasma treatment technologies operating at temperatures below 600°C. Furthermore, and without being bound by theory, a calcium oxide, barium oxide, or strontium oxide second metal composition may provide a ceramic composition with reduced vapor pressure and low wear rate for NF3 plasma treatment technologies operating at temperatures above 600°C. Furthermore, and without being bound by theory, the second metal composition containing fluorine oxides can enhance fluorine etching resistance, thereby improving the etching resistance of the ceramic composition.

[0020] The second metallic composition may be present in the ceramic composition at a concentration of about 0.1 mol% to about 99.9 mol%, for example, about 0.1 mol% to about 90 mol%, about 20 mol% to about 80 mol%, about 0.1 mol% to about 20 mol%, about 50 mol% to about 99.9 mol%, about 50 mol% to about 80 mol%, or about 55 mol% to about 99.9 mol%. For example, the first metallic composition may be present in the ceramic composition at a concentration of about 55 mol% to about 99.9 mol%. As another example, the metallic composition may be present in the ceramic composition at a concentration of about 0.1 mol% to about 20 mol%.

[0021] The ceramic composition may include a third metal composition. The third metal composition may include metals from Group 3 to Group 12. In some embodiments, the third metal composition may include rare earth metals, such as erbium, lanthanum, samarium, yttrium, scandium, or combinations thereof. In some embodiments, the third metal composition may include a yttrium-based composition. For example, the third metal composition may include yttrium oxide, yttrium nitride, yttrium oxynitride, yttrium fluoride, and / or yttrium oxyfluoride. In some embodiments, the third metal composition may include a lanthanum-based composition. For example, the third metal composition may include lanthanum oxide, lanthanum nitride, lanthanum oxynitride, lanthanum fluoride, and / or lanthanum oxyfluoride. In some embodiments, the third metal composition may include an erbium-based composition. For example, the third metal composition may include erbium oxide, erbium nitride, erbium oxynitride, erbium fluoride, and / or erbium oxyfluoride. In some embodiments, the third metal composition may include a samarium-based composition. For example, the third metal composition may include samarium oxide, samarium nitride, samarium oxynitride, samarium fluoride, and / or samarium oxyfluoride. In some embodiments, the third metal composition may include a scandium-based composition. For example, the third metal composition may include scandium oxide, scandium nitride, scandium oxynitride, scandium fluoride, and / or scandium oxyfluoride. Without being bound by theory, ceramic compositions containing a third metal composition may include reduced vapor pressure, reduced leakage current, enhanced resistivity, reduced dielectric loss to prevent RF self-heating, reduced wear rate, and enhanced dielectric breakdown voltage compared to conventional ceramic compositions. Without being bound by theory, third metal compositions containing fluorine oxides may enhance fluorine etch resistance, thereby improving the etch resistance of the ceramic composition.

[0022] The third metal composition may be present in the ceramic composition at about 0 mol% to about 40 mol%, for example, about 0.1 mol% to about 40 mol%, about 0.1 mol% to about 30 mol%, about 0.1 mol% to about 25 mol%, about 0.1 mol% to about 20 mol%, or about 0.1 mol% to about 10 mol%. For example, the third metal composition may be present in the ceramic composition at about 0 mol% to about 40 mol%. As another example, the third metal composition may be present in the ceramic composition at about 0 mol% to about 20 mol%. Without being bound by theory, ceramic compositions containing a third metal composition of about 0 mol% to about 40 mol% yttrium oxide may include enhanced durability compared to conventional ceramic compositions, allowing operation at higher temperatures (e.g., greater than 600 °C) without degradation. Unbound by theory, ceramic compositions containing a third metal composition of about 0 mol% to about 20 mol% yttrium oxide can include lower vapor pressures to operate at lower temperatures (e.g., below 600 °C) without degradation, compared to conventional ceramic compositions.

[0023] In some embodiments, the ceramic composition of this disclosure may comprise a first metal composition of about 80 mol% to about 99.9 mol% alumina, a second metal composition of about 0.1 mol% to about 20 mol% magnesium oxide, and a third metal composition of about 0.1 mol% to about 20 mol% yttrium oxide, wherein the combination of the first metal composition, the second metal composition, and the third metal composition does not exceed 100 mol%. Figure 2As shown. In some embodiments, the ceramic composition of this disclosure may comprise about 85 mol% to about 99.9 mol% of a first metal composition of aluminum nitride, about 0.1 mol% to about 20 mol% of a second metal composition of magnesium oxide, and about 0 mol% to about 20 mol% of a third metal composition of yttrium oxide. In some embodiments, the ceramic composition of this disclosure may comprise about 85 mol% to about 99.9 mol% of a first metal composition of aluminum oxyfluoride, about 0.1 mol% to about 20 mol% of a second metal composition of magnesium oxide, and about 0 mol% to about 20 mol% of a third metal composition of yttrium oxide. In some embodiments, the ceramic composition of this disclosure may comprise about 85 mol% to about 99.9 mol% of a first metal composition of aluminum oxyfluoride, about 0.1 mol% to about 20 mol% of a second metal composition of magnesium oxide, and about 0 mol% to about 20 mol% of a third metal composition of yttrium oxide. Unbound by theory, the combination of alumina, yttrium oxide, and magnesium oxide can provide enhanced fluorine resistance compared to conventional bulk material compositions (such as aluminum nitride and / or alumina), thus offering extended lifespan for ceramic compositions. Furthermore, and unbound by theory, the combination of alumina, yttrium oxide, and magnesium oxide can provide a variety of chemical and physical properties, such as hardness, resistivity, leakage current, or breakdown voltage, by varying the mol% ratio of the metal oxides.

[0024] When the ceramic composition contains about 15 mol% to about 40 mol% of a first metal composition, a third metal composition is present in the composition at about 0.1 mol% to about 40 mol%.

[0025] In some embodiments, the ceramic composition of this disclosure may comprise a first metal composition of about 0.1 mol% to about 40 mol% of alumina, a second metal composition of about 55 mol% to about 99.9 mol% of magnesium oxide, and a third metal composition of about 0 mol% to about 40 mol% of yttrium oxide, wherein when the ceramic composition comprises about 15 mol% to about 40 mol% of the first metal composition, the third metal composition is present in the composition at about 0.1 mol% to about 40 mol%. Without being bound by theory, as the first metal component increases to above 15 mol%, the increase of the third metal composition can reduce and / or eliminate the formation of byproducts such as aluminum fluoride.

[0026] In some embodiments, the ceramic composition of this disclosure may comprise a first metal composition of about 0.1 mol% to about 40 mol% of aluminum nitride, a second metal composition of about 55 mol% to about 99.9 mol% of magnesium oxide, and a third metal composition of about 0 mol% to about 40 mol% of yttrium oxide, wherein when the ceramic composition comprises about 15 mol% to about 40 mol% of the first metal composition, the third metal composition is present in the composition at about 0.1 mol% to about 40 mol%. In some embodiments, the ceramic composition of this disclosure may comprise a first metal composition of about 0.1 mol% to about 40 mol% of aluminum oxynitride, a second metal composition of about 55 mol% to about 99.9 mol% of magnesium oxide, and a third metal composition of about 0 mol% to about 40 mol% of yttrium oxide, wherein when the ceramic composition comprises about 15 mol% to about 40 mol% of the first metal composition, the third metal composition is present in the composition at about 0.1 mol% to about 40 mol%.

[0027] In some embodiments, the ceramic composition of this disclosure may comprise a first metal composition of about 0.1 mol% to about 40 mol% aluminum oxyfluoride, a second metal composition of about 55 mol% to about 99.9 mol% magnesium oxide, and a third metal composition of about 0 mol% to about 40 mol% yttrium oxide, wherein when the ceramic composition comprises about 15 mol% to about 40 mol% of the first metal composition, the third metal composition is present in the composition at about 0.1 mol% to about 40 mol%. Without being bound by theory, the combination of alumina, yttrium oxide, and magnesium oxide can provide enhanced fluoride resistance compared to conventional bulk material compositions (e.g., aluminum nitride and / or alumina), thereby providing an extended lifespan for the ceramic composition. Furthermore, and without being bound by theory, the combination of alumina, yttrium oxide, and magnesium oxide can provide various chemical and physical properties, such as hardness, resistivity, leakage current, or breakdown voltage, by varying the mol% ratio of the metal oxides.

[0028] In general, embodiments of this disclosure relate to ceramic compositions and methods of their production. These ceramic compositions can be used as body materials for various components in high-temperature NF3 plasma processing chambers. Compared to conventional body material compositions (e.g., aluminum nitride and / or alumina), these ceramic compositions offer increased fluorine resistance, thereby providing extended lifespan for substrate supports. Furthermore, the ceramic compositions allow for reduced manufacturing costs by minimizing fouling complexity during manufacturing. Additionally, the ceramic compositions can produce homogeneity among two or more oxides while maintaining low porosity. By varying the metal ratio in the ceramic composition, ceramic compositions with controllable chemical and physical properties (e.g., hardness, resistivity, vapor pressure, leakage current, and / or breakdown voltage) can be produced.

[0029] Although the foregoing embodiments of this disclosure are described, other and further embodiments of this disclosure may be designed without departing from the basic scope of this disclosure, and the scope of this disclosure is defined by the appended claims.

Claims

1. A fluorine-resistant ceramic composition, said composition comprising: A first metal composition comprising approximately 80 mol% to approximately 99.9 mol% of an aluminum-based composition selected from the group consisting of nitrides, oxynitrides, oxides, and oxyfluorides; and A second metal composition of about 0.1 mol% to about 20 mol%, the second metal composition comprising an alkaline earth metal-based composition selected from the group consisting of nitrides, oxynitrides, oxides, oxyfluorides and fluorides.

2. The composition of claim 1, wherein the composition further comprises a third metal composition, the third metal composition comprising metal compositions of groups 3-12.

3. The composition of claim 2, wherein the group 3-12 metal composition comprises a rare earth metal, the rare earth metal including one or more of erbium, lanthanum or samarium.

4. The composition of claim 2, wherein the group 3-12 metal composition comprises a transition metal, the transition metal comprising one or more of yttrium or scandium.

5. The composition of claim 2, wherein the composition comprises: The first metal composition comprises approximately 80 mol% to approximately 99.8 mol%. The second metal composition comprising approximately 0.1 mol% to approximately 19.9 mol%; and The third metal composition, comprising approximately 0.1 mol% to approximately 19.9 mol%, The combination of the first metal composition, the second metal composition and the third metal composition does not exceed 100 mol.

6. The composition of claim 5, wherein: The first metallic component is aluminum oxide; The second metallic component is selected from the group consisting of magnesium oxide, calcium oxide, strontium oxide, and barium oxide; and The third metal composition is selected from the group consisting of yttrium oxide, erbium oxide, lanthanum oxide, samarium oxide, and scandium oxide.

7. The composition of claim 6, wherein: The first metallic component is aluminum oxide; The second metallic component is magnesium oxide; and The third metallic component is yttrium oxide.

8. The composition of claim 2, wherein at least one of the first metal composition, the second metal composition, or the third metal composition comprises one or more of a fluorine oxide or a fluoride.

9. A fluorine-resistant ceramic composition, said composition comprising: A first metal composition comprising about 0.1 mol% to about 40 mol% of an aluminum-based composition selected from the group consisting of nitrides, oxynitrides, oxides and oxyfluorides; A second metal composition comprising approximately 55 mol% to approximately 99.9 mol% of an alkaline earth metal-based composition selected from the group consisting of nitrides, oxynitrides, oxides, oxyfluorides, and fluorides; and A third metal composition of about 0 mol% to about 40 mol%, the third metal composition comprising rare earth metal-based compositions selected from the group consisting of nitrides, oxynitrides, oxides, oxyfluorides and fluorides; Wherein, when the composition comprises about 15 mol% to about 40 mol% of the first metal composition, the composition comprises about 0.1 mol% to about 40 mol% of the third metal composition, and wherein the combination of the first metal composition, the second metal composition and the third metal composition does not exceed 100 mol.

10. The composition of claim 9, wherein the third metal composition comprises metal compositions of groups 3-12.

11. The composition of claim 10, wherein the group 3-12 metal composition comprises a rare earth metal, the rare earth metal including one or more of erbium, lanthanum or samarium.

12. The composition of claim 10, wherein the group 3-12 metal composition comprises a transition metal, the transition metal comprising one or more of yttrium or scandium.

13. The composition of claim 10, wherein the composition comprises: The first metal composition comprises approximately 15 mol% to approximately 40 mol%; The second metal composition, approximately 55 mol% to approximately 84.9 mol%; and The third metal composition comprises about 0.1 mol% to about 30 mol%, wherein the combination of the first metal composition, the second metal composition and the third metal composition does not exceed 100 mol%.

14. The composition of claim 10, wherein: The first metallic component is aluminum oxide; The second metallic component is selected from the group consisting of magnesium oxide, calcium oxide, strontium oxide, and barium oxide; and The third metal composition is selected from the group consisting of yttrium oxide, erbium oxide, lanthanum oxide, samarium oxide, and scandium oxide.

15. The composition of claim 14, wherein: The first metallic component is aluminum oxide; The second metallic component is magnesium oxide; and The third metallic component is yttrium oxide.

16. The composition of claim 10, wherein at least one of the first metal composition, the second metal composition, or the third metal composition comprises a fluorine oxide or a fluoride.

17. A ceramic component comprising a ceramic composition, the ceramic composition comprising: A first metal composition comprising about 0.1 mol% to about 40 mol% of an aluminum-based composition selected from the group consisting of nitrides, oxynitrides, oxides and oxyfluorides; A second metal composition comprising approximately 55 mol% to approximately 99.9 mol% of an alkaline earth metal-based composition selected from the group consisting of nitrides, oxynitrides, oxides, oxyfluorides, and fluorides; and A third metal composition of about 0 mol% to about 40 mol%, said third metal composition comprising an alkali metal-based composition selected from the group consisting of nitrides, oxynitrides, oxides, oxyfluorides and fluorides; Wherein, when the composition comprises about 15 mol% to about 40 mol% of the first metal composition, the composition comprises about 0.1 mol% to about 40 mol% of the third metal composition, and wherein the combination of the first metal composition, the second metal composition and the third metal composition does not exceed 100 mol.

18. The ceramic component of claim 17, wherein the ceramic component includes a lifting rod, a ring, an isolator, a heater, an electrostatic chuck, a baffle, a nozzle, a cap, a sealing wafer, or others.

19. The ceramic component of claim 18, wherein the ceramic component includes the heater.

20. The ceramic component of claim 19, wherein the ceramic component includes the electrostatic chuck.

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