An acid pickling apparatus applied to optical elements in a semiconductor

Abstract

The application relates to the technical field of cleaning equipment, and discloses an acid pickling device applied to optical elements in semiconductors, which comprises a rack, a plurality of cleaning modules, a transfer mechanism and an ultrasonic support frame. The plurality of cleaning modules are arranged at intervals along an x-axis direction, and the cleaning modules are slidably arranged on the rack and can be interchanged in position. The transfer mechanism is movably arranged on the rack and comprises a driving device and the ultrasonic support frame. The driving device is used for driving the ultrasonic support frame to move to different cleaning modules for cleaning. The acid pickling device has improved cleaning flexibility and working efficiency, the cleaning sequence can be flexibly adjusted to adapt to different cleaning scheme operations, and the overall operation adaptability of the device is optimized.

Description

Technical Field

[0001] This invention relates to the field of cleaning equipment technology, and in particular to an acid washing device for optical components in semiconductors. Background Technology

[0002] Surface treatment of workpieces often requires processes such as alkaline washing for degreasing, acid pickling for rust removal, ultrasonic rinsing with pure water, and drying to remove surface contaminants, repair minor damage, release processing stress, and ensure the accuracy and performance of subsequent processing. While existing integrated acid pickling equipment incorporates these multi-process functions, it still has significant technical shortcomings in practical applications: Switching between multiple cleaning tanks relies on manual labor or simple transfer mechanisms. The efficiency of changing and switching between different cleaning tanks is low, the positioning accuracy is poor, and it is easy to cause poor process connection and cross-contamination of chemical solutions, making it difficult to adapt to the needs of continuous production.

[0003] During the cleaning process, parameters such as acid and alkali concentration, treatment time, and ultrasonic power lack precise control methods and mainly rely on manual experience. It is difficult to stably control the amount of surface material removed, and problems such as over-corrosion or incomplete cleaning are prone to occur.

[0004] The fixed posture of the workpiece in the cleaning tank, the uneven distribution of the chemical solution and ultrasonic field, result in inconsistent cleaning levels in different areas of the workpiece surface, which can easily create cleaning dead zones and affect the uniformity and consistency of surface treatment.

[0005] The aforementioned problems directly restrict the stability of workpiece surface treatment quality and production efficiency, making it difficult to meet the stringent requirements of precision workpieces for surface cleanliness and uniformity of removal amount. Summary of the Invention

[0006] The present invention aims to improve at least one technical problem in the prior art.

[0007] This invention provides an acid washing apparatus for optical components in semiconductors, comprising: frame; The cleaning module is a plurality of cleaning modules, which are arranged at intervals along the x-axis. The cleaning modules are slidably mounted on the frame, and the positions of the individual cleaning modules can be interchanged. A transfer mechanism is movably mounted on the frame. The transfer mechanism includes a drive device and an ultrasonic support frame. The drive device is used to move the ultrasonic support frame to different cleaning modules for cleaning.

[0008] The beneficial effects of this invention are as follows: By setting up a frame and multiple cleaning modules that are spaced apart along the x-axis and can be slidably mounted on the frame and interchangeable in position, the problems of low cleaning efficiency, poor adaptability, and inflexible adjustment of cleaning sequence of a single cleaning module are improved. This enhances the cleaning flexibility and working efficiency of the pickling equipment, allowing workpieces of different specifications or with different cleaning requirements to be cleaned by interchanged cleaning module positions and moved ultrasonic support frames. The cleaning sequence can be flexibly adjusted to adapt to different cleaning schemes, thus optimizing the overall operational adaptability of the equipment.

[0009] As some sub-solutions of the above technical solution, the cleaning module includes a sliding plate, a lifting structure and a cleaning tank. The sliding plate is slidably connected to the frame, the lifting structure is disposed on the sliding plate, and the lifting structure drives the cleaning tank to rise and fall.

[0010] As a sub-solution of the above technical solution, the cleaning module also includes a side support plate, which is L-shaped and consists of two side support plates, forming a displacement channel between the two side support plates.

[0011] As some sub-solutions of the above technical solution, the transfer mechanism includes a first sliding column, a guide rail and a slide frame. The first sliding column and the guide rail are both mounted on the frame and extend along the x-axis. The slide frame is slidably connected to the first sliding column and the guide rail. The bottom side of the slide frame is provided with a hook, and the top side of the ultrasonic support frame overlaps the hook.

[0012] As some sub-solutions of the above technical solution, the transfer mechanism further includes a swing shaft, which is fixedly connected to the ultrasonic support frame; The cleaning module also includes a swing motor, a support frame transmission disk, and a support shaft support. The swing motor is fixedly connected to the cleaning tank. The output shaft of the swing motor passes through the cleaning tank and is driven by the support frame transmission disk. The support shaft support is disposed in the cleaning tank. The support shaft support and the support frame transmission disk are respectively disposed on both sides of the cleaning tank. The support shaft support is used to support one end of the swing shaft, and the support frame transmission disk is used to drive the other end of the swing shaft.

[0013] As a sub-solution of the above technical solution, the cleaning module includes an ultrasonic generator, which is disposed on the side wall of the ultrasonic support frame.

[0014] As some sub-solutions of the above technical solution, the cleaning module includes a stirring unit and a unit partition frame. The unit partition frame is located inside the cleaning tank and is disposed at the bottom of the cleaning tank. The unit partition frame includes multiple mutually spaced stirring tanks. The stirring unit includes a magnetic stir bar and a magnetic field generator. The magnetic stir bar is disposed inside the stirring tank, and the magnetic field generator is disposed outside the bottom wall of the cleaning tank. Each of the magnetic field generators is connected together by a wire.

[0015] As some sub-solutions of the above technical solution, the cleaning module further includes a density monitor, and the cleaning tank further includes a density monitoring chamber. The density monitor is installed in the density monitoring chamber and is used to detect the density in the cleaning tank.

[0016] As a sub-solution of the above technical solution, the output shaft of the swing motor is equipped with a torque sensor or a pressure sensor.

[0017] As some sub-solutions of the above technical solutions, the driving device includes a drive motor, which is mounted on the frame and slidably connected to the first slide column. The outer wall of the first slide column is provided with threads. The slide frame includes a guide sleeve and a threaded sleeve. The guide sleeve is slidably connected to the guide rail, and the threaded sleeve is threadedly connected to the first slide column. Attached Figure Description

[0018] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the structure of an acid washing device for optical components in semiconductors according to the present invention. Figure 1 ; Figure 2 This is a schematic diagram of the structure of a cleaning module according to the present invention. Figure 1 And a magnified view of a portion of point A; Figure 3 Schematic diagram of the cleaning module Figure 2 ; Figure 4 This is a schematic diagram of the ultrasonic support frame. Figure 5 Schematic diagram of the cleaning module Figure 3 .

[0019] In the attached diagram: 10-slide carriage; 11-hook; 12-swing shaft; 13-swing motor; 14-support frame transmission plate; 15-support shaft support; 17-unit partition frame; 171-stirrer tank; 18-magnetic stir bar; 2-Ultrasonic support frame; 20-Magnetic field generator; 21-Density monitoring chamber; 27-Guide sleeve; 28-Threaded sleeve; 5-Cleaning tank; 6-Side support plate; 7-Shift Channel; 8-First sliding column; 9-Guide rail. Detailed Implementation

[0020] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0021] The following is combined Figures 1 to 5 Embodiments of the present invention will be described.

[0022] Existing pickling equipment typically only has a single cleaning module, resulting in low cleaning efficiency. Furthermore, the fixed positions of these modules prevent flexible adjustment of the cleaning sequence based on workpiece cleaning requirements. Additionally, the transfer mechanism cannot flexibly move the ultrasonic cleaning structure between different cleaning modules, leading to poor docking and low ultrasonic cleaning efficiency. This results in poor equipment adaptability and difficulty in meeting diverse pickling needs. This embodiment provides a pickling device for optical components in semiconductors, specifically as follows: A pickling device for optical components in semiconductors includes a frame; multiple cleaning modules arranged at intervals along the x-axis, slidably mounted on the frame, with interchangeable positions; and a transfer mechanism movably mounted on the frame, comprising a drive device and an ultrasonic support frame 2. The drive device moves the ultrasonic support frame 2 to different cleaning modules for cleaning. The transfer mechanism is placed on the guide rail 9, allowing access to different cleaning tanks 5. The cleaning tanks 5 are mounted on the lifting structure, forming a shifting channel 7 with the side support plate 6. When the lifting structure is lowered, the cleaning tanks 5 fall into the shifting channel 7, allowing for positional movement between the cleaning tanks 5 by moving them back and forth, thus changing the cleaning sequence. The ultrasonic support frame 2 contains an ultrasonic generator, used to generate ultrasonic-induced vapor bubbles that impact the workpiece surface, removing material. Compared to the traditional ultrasonic generator position (bottom), it is closer to the workpiece, resulting in higher vapor bubble bombardment efficiency. Through this setup, multiple interchangeable cleaning modules can flexibly adjust their position and cleaning sequence according to workpiece specifications and cleaning requirements. The transfer mechanism drives the ultrasonic support frame 2 to move and precisely connect between different cleaning modules, enabling simultaneous cleaning of multiple workpieces or multi-step cleaning of the same workpiece. Ultrasonic cleaning efficiency is higher, improving upon the problems of low cleaning efficiency, poor adaptability, inflexible cleaning sequence adjustment, and low ultrasonic cleaning efficiency of single cleaning modules. This enhances the cleaning flexibility, work efficiency, and material removal efficiency of the pickling equipment, allowing it to better adapt to diverse pickling needs.

[0023] In existing cleaning modules, the cleaning tank 5 has a fixed height. When the workpiece is large or small, it is inconvenient to pick up and put down the workpiece, and the relative position of the cleaning tank 5 and the ultrasonic cleaning structure cannot be adjusted, making it impossible to flexibly switch the cleaning sequence, resulting in poor cleaning effect. Further, in one embodiment of the present invention, the cleaning module includes a sliding plate, a lifting structure, and a cleaning tank 5. The sliding plate is slidably connected to the frame, and the lifting structure is disposed on the sliding plate, driving the cleaning tank 5 to rise and fall. The cleaning tank 5 is placed on the lifting structure and, together with the side support plate 6, forms a displacement channel 7. When the lifting structure is lowered, the cleaning tank 5 falls into the displacement channel 7, and its position can be moved back and forth to change the cleaning sequence. During operation, when workpieces need to be picked up or placed, the lifting structure lowers the cleaning tank 5, reducing the workpiece height for easier handling. During cleaning, the height of the cleaning tank 5 is adjusted according to the workpiece size using the lifting structure, ensuring the workpiece is fully immersed in the cleaning medium and positioned appropriately relative to the ultrasonic generator on the ultrasonic support frame 2. When the cleaning sequence needs adjustment, the lifting structure is lowered, placing the cleaning tank 5 in the shifting channel 7, which then moves the cleaning tank 5 back and forth along the channel, allowing for positional interchange between cleaning tanks and thus changing the cleaning sequence. This design improves upon the problems of inconvenient workpiece handling, inability to adjust cleaning depth, and lack of flexibility in adjusting the cleaning sequence caused by the fixed height of the cleaning tank 5. It enhances the flexibility of the cleaning tank 5 and the adaptability of cleaning solutions, while optimizing the relative position of the workpiece and the ultrasonic cleaning structure, further improving cleaning effectiveness and ease of operation.

[0024] Existing cleaning modules lack effective guiding structures when interchanged, leading to easy displacement during relocation, inaccurate positioning after relocation, and an inability to flexibly adjust the cleaning sequence in conjunction with the hydraulic base, affecting the normal operation of subsequent cleaning work. Furthermore, in one embodiment of the present invention, the cleaning module further includes side support plates 6, which are L-shaped and consist of two plates forming a displacement channel 7. The cleaning tank 5 is mounted on the lifting structure, forming a complete displacement channel 7 with the side support plates 6. When the lifting structure is lowered, the cleaning tank 5 falls into the displacement channel 7, which guides the forward and backward movement of the cleaning tank 5, facilitating the interchange of positions and adjustment of the cleaning sequence. When it is necessary to interchange the cleaning module positions or adjust the cleaning sequence, the cleaning module is pushed, causing the sliding plate to slide along the frame, while simultaneously controlling the lifting structure to lower, so that the cleaning tank 5 falls into the displacement channel 7. At this time, the displacement channel 7 formed by the two side support plates 6 guides the direction of the cleaning module's movement, preventing displacement during the relocation process. The above settings improve the problems of poor guidance, easy displacement, and inflexible adjustment of cleaning sequence when the cleaning modules are interchanged. They enhance the stability and smoothness of the cleaning module relocation process, provide guidance support for the rapid interchange of cleaning modules and adjustment of cleaning sequence, ensure the accurate position of the cleaning modules after relocation, guarantee the normal operation of subsequent cleaning work, and facilitate the operation of different cleaning schemes.

[0025] The existing transfer mechanism suffers from poor stability and wobbling when moving the ultrasonic support frame 2. Furthermore, the installation and disassembly of the ultrasonic support frame 2 are inconvenient, and the docking between the transfer mechanism and the cleaning tank 5 is not smooth, affecting the operating efficiency of the equipment and subsequent cleaning operations. In a further embodiment of the present invention, the acid washing equipment includes a first sliding column 8, a guide rail 9, and a slide 10. The first sliding column 8 and the guide rail 9 are both mounted on the frame and extend along the x-axis. The slide 10 is slidably connected to both the first sliding column 8 and the guide rail 9. A hook 11 is provided on the bottom side of the slide 10, and the top side of the ultrasonic support frame 2 rests on the hook 11. The transfer mechanism is connected to the guide rail 9 via the hook 11. When the transfer mechanism moves above the cleaning tank 5, the hook 11 slowly descends and relaxes, facilitating the swing shaft 12 to fall into the support shaft holder 15, achieving precise docking between the transfer mechanism and the cleaning tank 5. During operation, the drive unit drives the slide 10 to slide along the first slide column 8 and the guide rail 9. The slide 10 drives the ultrasonic support frame 2 on the hook 11 to move synchronously, realizing the movement of the ultrasonic support frame 2 between different cleaning modules. When it is necessary to disassemble the ultrasonic support frame 2, it can be directly removed from the hook 11. During installation, the ultrasonic support frame 2 can be fixed by simply attaching it to the hook 11. When the transfer mechanism moves above the designated cleaning tank 5, the hook 11 is controlled to slowly descend and relax, preparing for the swing shaft 12 to fall into the support shaft holder 15. Through the above settings, the problems of poor stability when the transfer mechanism moves, inconvenient installation and disassembly of the ultrasonic support frame 2, and poor docking between the transfer mechanism and the cleaning tank 5 are improved. The stability and accuracy of the transfer mechanism movement are improved, while the rapid installation and disassembly of the ultrasonic support frame 2 and its precise docking with the cleaning tank 5 are facilitated. The ease of operation of the equipment is optimized, ensuring the smooth progress of subsequent swing cleaning operations.

[0026] The existing ultrasonic support frame 2 remains fixed during the cleaning process, unable to move the workpiece, making docking with the cleaning tank 5 inconvenient. This results in uneven cleaning of the workpiece surfaces, with some areas failing to fully contact the cleaning medium, thus affecting the cleaning effect. Further, in one embodiment of the present invention, the transfer mechanism further includes a swing shaft 12, which is fixedly connected to the ultrasonic support frame 2. The cleaning module also includes a swing motor 13, a support frame transmission disk 14, and a support shaft support 15. The swing motor 13 is fixedly connected to the cleaning tank 5, and its output shaft passes through the cleaning tank 5 and is driven by the support frame transmission disk 14. The support shaft support 15 is disposed within the cleaning tank 5, with the support shaft support 15 and the support frame transmission disk 14 respectively disposed on opposite sides of the cleaning tank 5. The support shaft support 15 supports one end of the swing shaft 12, and the support frame transmission disk 14 is driven by the other end of the swing shaft 12. During operation, when the ultrasonic support frame 2 moves above the cleaning tank 5 of the designated cleaning module, the hook 11 slowly descends and relaxes, and the swing shaft 12 falls into the support shaft support 15. Then, the support frame transmission disc 14 moves forward, locking the hook 11 and completing the precise fixation of the transfer mechanism to the cleaning tank 5. The swing motor 13 is then activated, and its output shaft drives the support frame transmission disc 14 to rotate. The support frame transmission disc 14 drives the swing shaft 12 to swing, which in turn drives the ultrasonic support frame 2 to swing synchronously, thereby causing the workpiece on the ultrasonic support frame 2 to swing, increasing the contact between the water flow and the workpiece. This setup improves the problem of uneven workpiece cleaning caused by the ultrasonic support frame 2's inability to swing and its inconvenient docking with the cleaning tank 5. It enhances the uniformity of workpiece pickling, ensuring that all surfaces of the workpiece can fully contact the cleaning medium. Simultaneously, the stable support and transmission structure of the swing shaft 12 ensures smooth swinging, and the stirring structure helps to dislodge cleaning impurities, further optimizing the cleaning effect.

[0027] Existing ultrasonic cleaning structures suffer from insufficient ultrasonic intensity, poor vibration effect of the cleaning medium, and the ultrasonic generator being too far from the workpiece, resulting in low steam bubble bombardment efficiency and difficulty in effectively removing stubborn stains and oxide layers from the workpiece surface, thus affecting cleaning quality and material removal efficiency. Further, in one embodiment of the present invention, the cleaning module includes an ultrasonic generator, which is disposed on the side wall of the ultrasonic support frame 2. The ultrasonic support frame 2 contains an ultrasonic generator used to generate ultrasonic waves that induce steam bubbles to impact the workpiece surface, effectively removing material. Compared to the traditional ultrasonic generator position (bottom), it is closer to the workpiece, resulting in higher steam bubble bombardment efficiency and effectively improving material removal cleaning efficiency. During operation, when the ultrasonic support frame 2 moves to the designated cleaning module, the ultrasonic generator is activated, producing ultrasonic vibrations. These vibrations are transmitted to the cleaning medium in the cleaning tank 5, causing the cleaning medium to vibrate at high frequency, thereby ultrasonically cleaning the workpiece surface. The steam bubbles bombard the workpiece surface at close range, enhancing the material removal effect. The above settings improve the problems of insufficient ultrasonic cleaning intensity, poor cleaning effect, and low material removal efficiency, and enhance the power, coverage, and material removal efficiency of ultrasonic cleaning. This allows the cleaning medium to generate more uniform and stronger ultrasonic vibrations, effectively removing stains and oxide layers from the workpiece surface, and further improving the cleaning quality and efficiency of the pickling equipment.

[0028] The existing cleaning medium in the cleaning tank 5 is unevenly mixed, with varying concentrations in different areas, making it difficult to remove impurities. This results in inconsistent cleaning effects across different areas of the workpiece, affecting the overall cleaning quality, and preventing the cleaning fluid from flowing in and out in an orderly manner. Further, in one embodiment of the present invention, the cleaning module includes a stirring unit and a unit partition frame 17. The unit partition frame 17 is located within the cleaning tank 5 and is positioned at the bottom of the cleaning tank 5. The unit partition frame 17 includes multiple spaced-apart stirring tanks 171. The stirring unit includes a magnetic stir bar 18 and a magnetic field generator 20. The magnetic stir bar 18 is positioned within the stirring tank 171, and the magnetic field generator 20 is positioned outside the bottom wall of the cleaning tank 5 and distributed at the bottom of the cleaning tank 5. All the magnetic field generators 20 are connected together by wires. The side wall of the cleaning tank 5 has an inlet and an outlet. The cleaning liquid enters the cleaning tank 5 through the inlet and can be discharged through the outlet of the cleaning tank 5. The magnetic stir bar 18 is made of polytetrafluoroethylene-coated permanent magnet or FFKM-coated permanent magnet. Several of them are placed in the unit partition frame 17. By controlling the strength of the current in different sections, the rotation speed difference at different positions can be caused, thereby changing the flow of the cleaning liquid in the tank. Its functions are: (1) to flush away cleaning impurities and make the surface of the parts clean, and (2) to make the density distribution of the cleaning liquid uniform. During operation, the cleaning solution is injected through the inlet of the cleaning tank 5 and discharged through the outlet after cleaning. The magnetic field generators 20 are started synchronously by controlling the wires. The magnetic field generators 20 cause changes in the magnetic field through the current, which drives the magnetic stir bar 18 in the stirrer tank 171 to rotate, thereby driving the cleaning solution to flow in the tank. By controlling the strength of the current in different sections, the rotation speed of the magnetic stir bar 18 at different positions is adjusted to change the flow state of the cleaning solution in the tank, washing away the cleaning impurities on the surface of the workpiece, and at the same time making the density distribution of the cleaning solution uniform. Since the unit partition frame 17 separates the multiple magnetic stir bars 18 in different stirrer tanks 171, it can avoid mutual interference between the magnetic stir bars 18 and ensure the stability of the stirring process. The above settings improve the problems of uneven mixing and inconsistent concentration of cleaning media in cleaning tank 5, difficulty in removing cleaning impurities, and inability of cleaning liquid to enter and exit in an orderly manner, which lead to differences in cleaning effect. They also improve the uniformity of cleaning media mixing, ensure that the concentration of cleaning media in contact with different areas of the workpiece is consistent, and wash away cleaning impurities. At the same time, the separate stirring tank 171 can avoid mutual interference between magnetic stir bar 18, improve stirring stability, and the magnetic field generator 20 connected by wires can be easily controlled in a unified manner, optimizing the ease of operation of the equipment.

[0029] Existing pickling equipment cannot monitor the density changes of the cleaning medium in real time, nor can it provide real-time feedback on the working section density of the cleaning fluid. When the cleaning medium density is too high or too low, it cannot be detected and adjusted in time, leading to unstable cleaning effects, affecting the cleaning quality of the workpiece, and failing to provide data support for the detection of cleaning removal volume. Furthermore, in one embodiment of the present invention, the cleaning module further includes a density monitor, and the cleaning tank 5 includes a density monitoring chamber 21. The density monitor is located in the density monitoring chamber 21 and is used to detect the density within the cleaning tank 5. The density monitoring chamber 21 is distributed in the middle section of the tank, at the same depth as the parts being cleaned, and provides real-time feedback on the working section density P of the cleaning fluid. During operation, part of the cleaning medium in the cleaning tank 5 flows into the density monitoring chamber 21. The density monitor detects the density of the cleaning medium in the density monitoring chamber 21 in real time, thereby reflecting the overall working section density P of the cleaning medium in the cleaning tank 5. When the detected density exceeds a preset range, the operator can add new cleaning medium or adjust the cleaning medium concentration in time. Simultaneously, the data on the working section density P provides support for subsequent cleaning removal volume detection. The above settings improve the problems of not being able to monitor the density of the cleaning medium in real time, resulting in unstable cleaning effects and the inability to provide real-time feedback on the density of the cleaning fluid in the working section. This enhances the intelligence of the pickling equipment, enabling real-time monitoring of changes in the density of the cleaning medium and feedback of the working section density P. This facilitates timely adjustment of the cleaning medium concentration, ensuring the consistency and stability of the cleaning effect. At the same time, it provides data support for the detection of the amount of cleaning removed, preventing the removal of waste parts.

[0030] In one embodiment of the present invention, the output shaft of the swing motor 13 is equipped with a torque sensor or a pressure sensor. The torque sensor or pressure sensor is fixedly connected to the output shaft of the swing motor 13 and is used to detect the torque or pressure value of the output shaft of the swing motor 13 in real time, and transmit the detected torque or pressure signal to the equipment control system. During operation, when the swing motor 13 starts and drives the swing shaft 12, the ultrasonic support frame 2, and the workpiece to swing, the torque sensor detects the torque change of the output shaft in real time, or the pressure sensor detects the pressure change of the output shaft in real time. If the detected torque value exceeds the preset torque range, or the pressure value exceeds the preset pressure range, the control system immediately issues a warning signal, and can simultaneously control the swing motor 13 to decelerate or stop, avoiding damage to the swing motor 13 due to torque overload or abnormal pressure. At the same time, by monitoring the torque or pressure data in real time, the stability of the swing amplitude and force of the swing shaft 12 can be indirectly judged, which facilitates the operator to adjust the operating parameters of the swing motor 13 in a timely manner, ensuring that the swing shaft 12 drives the workpiece to swing smoothly, ensuring the uniformity of workpiece cleaning, reducing cleaning defects caused by abnormal swing, and improving the stability and reliability of pickling operations. When a torque sensor is used, the torsional torque of the output shaft can be accurately monitored to adapt to the swing requirements under different loads; when a pressure sensor is used, the force changes of the output shaft can be captured in real time, and abnormalities such as jamming of the swing shaft 12 can be detected in time, thus ensuring the stable operation of the equipment.

[0031] The existing drive device suffers from unstable power transmission and insufficient precision when moving the slide 10. This results in the ultrasonic support frame 2 being unable to move precisely to the designated cleaning module or smoothly enter different cleaning tanks 5, affecting the orderly conduct of cleaning work and the flexible adjustment of the cleaning sequence. Further, in one embodiment of the present invention, the drive device includes a drive motor mounted on the frame. The drive motor is slidably connected to the first slide column 8, which has threads on its outer wall. The slide 10 includes a guide sleeve 27 and a threaded sleeve 28. The guide sleeve 27 is slidably connected to the guide rail 9, and the threaded sleeve 28 is threadedly connected to the first slide column 8. The transfer mechanism is connected to the guide rail 9 via a hook 11. The drive motor, through the threaded engagement of the threaded sleeve 28 with the first slide column 8, drives the slide 10 to move smoothly, thereby driving the transfer mechanism to move along the guide rail 9 and enter different cleaning tanks 5. This, combined with the position adjustment of the cleaning tanks 5, enables flexible switching of the cleaning sequence. During operation, the drive motor is started, which drives the screw sleeve 28 to rotate. Since the screw sleeve 28 is threadedly connected to the first sliding column 8 and the guide sleeve 27 is slidably connected to the guide rail 9, the rotation of the screw sleeve 28 drives the slide 10 to slide smoothly along the first sliding column 8 and the guide rail 9. The slide 10 drives the ultrasonic support frame 2 to move synchronously until the ultrasonic support frame 2 moves above the designated cleaning module. The transfer mechanism then smoothly enters the corresponding cleaning tank 5 through the guide rail 9, completing the docking. Through the above settings, the problems of insufficient movement accuracy, unstable power transmission, and inability to accurately enter different cleaning tanks 5 of the transfer mechanism are improved. The accuracy and stability of the transfer mechanism's movement are enhanced, ensuring that the transfer mechanism can accurately move to the designated cleaning tank 5 and complete the docking, ensuring the orderly conduct of the cleaning work. At the same time, in conjunction with the adjustment of the position of the cleaning tank 5, the cleaning sequence can be flexibly switched.

[0032] The overall operating principle of this pickling equipment is as follows: The frame provides the installation support foundation for the entire equipment. Multiple cleaning modules are slidably connected to the frame via sliding plates and are arranged at intervals along the x-axis. Two side support plates 6 and the cleaning tank 5 on the lifting structure combine to form a displacement channel 7. When the lifting structure is lowered, the cleaning tank 5 falls into the displacement channel 7. The operator can push the cleaning tank 5 back and forth along the displacement channel 7 according to the workpiece cleaning requirements, thereby realizing the interchange of the positions of each cleaning module, thus changing the cleaning sequence and facilitating different cleaning schemes. In the transfer mechanism, the drive motor drives the screw sleeve 28 to rotate, and the screw sleeve 28 and the first sliding column 8 are threaded together. The movable slide 10 slides along the first sliding column 8 and the guide rail 9. The transfer mechanism is connected to the guide rail 9 via the hook 11. The slide 10 drives the ultrasonic support frame 2 to move via the hook 11, realizing the precise movement of the ultrasonic support frame 2 between different cleaning modules and entering the corresponding cleaning tank 5. After the ultrasonic support frame 2 moves to the designated cleaning module, the hook 11 slowly descends and relaxes, the swing shaft 12 falls into the support shaft support 15, and the support frame transmission disc 14 pushes forward to lock the hook 11, completing the precise fixation of the transfer mechanism and the cleaning tank 5. At the same time, the lifting structure drives the cleaning tank 5 to rise and fall, adjusting the height of the cleaning tank 5 so that the workpiece can be smoothly placed into the cleaning tank 5 and aligned with the workpiece. The ultrasonic generator is positioned strategically, bringing it closer to the workpiece and resulting in more efficient steam bubble bombardment, thus achieving highly efficient material removal and cleaning. The oscillating motor 13, activated, drives the swing shaft 12 via the support frame transmission disc 14. The swing shaft 12 then drives the ultrasonic support frame 2 and the workpiece to swing synchronously, increasing the contact between the water flow and the workpiece and improving cleaning uniformity. During the cleaning process, the cleaning solution is injected through the inlet and discharged through the outlet of the cleaning tank 5. The magnetic field generator 20 induces a change in the magnetic field through current, causing the magnetic stir bar 18 in the stirrer tank 171 to rotate. The magnetic stir bar 18 is made of polytetrafluoroethylene-coated permanent magnets or F... The FKM-encapsulated permanent magnet adjusts the rotation speed by controlling the current strength in different sections, driving the cleaning fluid to flow, flushing away impurities and ensuring uniform density distribution of the cleaning fluid. The density monitor monitors the density P of the cleaning fluid in the working section in real time through the density monitoring chamber 21, while the torque sensor monitors the pressure F on the output shaft of the swing motor 13 in real time. By observing the changes in pressure F and density P, the change in the amount of workpiece removed during cleaning is obtained, ultimately determining whether cleaning should be stopped to prevent the removal of defective parts. All these structures work together to achieve efficient and uniform cleaning of the workpiece, improving the cleaning quality, efficiency, and ease of operation of the equipment. At the same time, the cleaning sequence can be flexibly adjusted to adapt to different cleaning schemes.

[0033] The preferred embodiments of the present invention have been described in detail above, but the present disclosure is not limited to the embodiments described. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and these equivalent modifications or substitutions are all included within the scope defined by the claims of the present disclosure.

[0034] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0035] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

Claims

1. A pickling apparatus for optical components in semiconductors, characterized in that: include: frame; The cleaning module is a plurality of cleaning modules, which are arranged at intervals along the x-axis. The cleaning modules are slidably mounted on the frame, and the positions of the individual cleaning modules can be interchanged. The transfer mechanism is movably mounted on the frame. The transfer mechanism includes a drive device and an ultrasonic support frame (2). The drive device is used to move the ultrasonic support frame (2) to different cleaning modules for cleaning. The cleaning module includes a sliding plate, a lifting structure and a cleaning tank (5). The sliding plate is slidably connected to the frame. The lifting structure is set on the sliding plate and drives the cleaning tank (5) to rise and fall. The transfer mechanism also includes a swing shaft (12), which is fixedly connected to the ultrasonic support frame (2); The cleaning module also includes a swing motor (13), a support frame transmission disk (14), and a support shaft support (15). The swing motor (13) is fixedly connected to the cleaning tank (5). The output shaft of the swing motor (13) passes through the cleaning tank (5) and is connected to the support frame transmission disk (14) in a transmission manner. The support shaft support (15) is set in the cleaning tank (5). The support shaft support (15) and the support frame transmission disk (14) are respectively set on both sides of the cleaning tank (5). The support shaft support (15) is used to support one end of the swing shaft (12), and the support frame transmission disk (14) is used to be connected to the other end of the swing shaft (12) in a transmission manner. The cleaning module also includes an ultrasonic generator, which is disposed on the side wall of the ultrasonic support frame (2); The cleaning module also includes a stirring unit and a unit partition frame (17). The unit partition frame (17) is located inside the cleaning tank (5) and is set at the bottom of the cleaning tank (5). The unit partition frame (17) includes multiple mutually separated stirring tanks (171). The stirring unit includes a magnetic stir bar (18) and a magnetic field generator (20). The magnetic stir bar (18) is set inside the stirring tank (171), and the magnetic field generator (20) is set outside the bottom wall of the cleaning tank (5). Each of the magnetic field generators (20) is connected together by wires.

2. The acid washing equipment for optical components in semiconductors according to claim 1, characterized in that: The cleaning module also includes a side support plate (6), which is L-shaped. There are two side support plates (6), and a displacement channel (7) is formed between the two side support plates (6).

3. The acid washing equipment for optical components in semiconductors according to claim 2, characterized in that: The pickling equipment also includes a first slide column (8), a guide rail (9) and a slide frame (10). The first slide column (8) and the guide rail (9) are both mounted on the frame. The first slide column (8) and the guide rail (9) both extend along the x-axis. The slide frame (10) is slidably connected to the first slide column (8) and the guide rail (9). The bottom side of the slide frame (10) is provided with a hook (11). The top side of the ultrasonic support frame (2) overlaps on the hook (11).

4. The acid washing equipment for optical components in semiconductors according to claim 1, characterized in that: The cleaning module also includes a density monitor, and the cleaning tank (5) also includes a density monitoring chamber (21). The density monitor is located in the density monitoring chamber (21) and is used to detect the density in the cleaning tank (5).

5. The acid washing equipment for optical components in semiconductors according to claim 1, characterized in that: The output shaft of the swing motor (13) is equipped with a torque sensor or a pressure sensor.

6. The acid washing equipment for optical components in semiconductors according to claim 3, characterized in that: The driving device includes a drive motor, which is mounted on the frame and is slidably connected to the first slide column (8). The outer wall of the first slide column (8) is provided with threads. The slide frame (10) includes a guide sleeve (27) and a threaded sleeve (28). The guide sleeve (27) is slidably connected to the guide rail (9), and the threaded sleeve (28) is threadedly connected to the first slide column (8).

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