A re-dissolvable hydrogen functional water preparation device

Abstract

The application relates to the technical field of functional water treatment, in particular to a hydrogen-dissolving functional water preparation device. A degassing module in the device is communicated with an outlet of an ultrapure water supply system, the degassing module degasses ultrapure water supplied by the ultrapure water supply system, an inlet of a hydrogen-dissolving module is communicated with an outlet of the degassing module, hydrogen is dissolved into the degassed ultrapure water, the hydrogen-dissolving module is communicated with a hydrogen-dissolved water tank; a hydrogen-dissolved water terminal ultrafiltration module is communicated with a first outlet of the hydrogen-dissolved water tank and divides the hydrogen-dissolved water into produced water and concentrated water; the produced water of the hydrogen-dissolved water terminal ultrafiltration module is supplied to a hydrogen-dissolved water water module, the hydrogen-dissolved water water module is communicated with the hydrogen-dissolving module; a hydrogen-dissolved water terminal ultrafiltration concentrated water filtration module and a full-amount filtration ultrafiltration module are arranged between the concentrated water outlet of the hydrogen-dissolved water terminal ultrafiltration module and the hydrogen-dissolved water tank. The device disclosed by the application has the advantages of small occupied space, high water utilization rate, low investment and low operation cost.

Description

Technical Field

[0001] This application relates to the field of functional water treatment technology, and more particularly to a device for preparing resoluble hydrogen functional water. Background Technology

[0002] In the panel and semiconductor industries, the cleanliness requirements for the surfaces of panels and semiconductor components are becoming increasingly stringent. Current technologies typically use hydrogen-dissolved water to clean these components. The hydrogen-dissolved water generates numerous micro-hydrogen bubbles on the surface of the panels and components, which then adhere to contaminants. The interface between these micro-hydrogen bubbles and the liquid phase on the contaminants forms a thin layer, also called the surface layer. The distance between molecules in the surface layer is larger than that within the liquid itself, and the intermolecular forces are primarily intermolecular attraction. This allows contaminants to be more easily detached, thus improving cleaning efficiency. Furthermore, the hydrogen in the hydrogen-dissolved water readily escapes from the water, and no impurities are adsorbed onto the semiconductor substrate and panel materials. Since this method does not rely on chemical reagents, it completely avoids the potential dissolving damage to the semiconductor substrate and panel materials caused by chemical reagents. Therefore, hydrogen-dissolved water is a relatively ideal cleaning solution. The advantages of using hydrogen-dissolved water for cleaning include the use of a single additive and minimal environmental impact.

[0003] Generally, hydrogen-dissolved water systems in the panel and semiconductor industries typically have high requirements for the particle size of the end-use water. Currently, the common practice is to use terminal ultrafiltration (UF) as the final filtration method to control the particle size of the end-use water. Terminal ultrafiltration usually operates using cross-flow filtration, which results in a portion of the concentrate being discharged or recycled. In most cases, the concentrate discharge from terminal ultrafiltration is about 5% of the total influent. The current industry practice is to remove the dissolved hydrogen from this terminal ultrafiltration concentrate using a dehydrogenation tower before returning it to the intermediate water tank of the pure water system.

[0004] In hydrogen-dissolving water systems, the loopback operation (LOOP) always considers a certain circulation rate. Typically, the circulation rate in the panel industry is 20%-30%, while in the semiconductor industry it's around 50%. Unused water at the point of use flows back to the hydrogen-dissolving water tank through the LOOP return water pipeline. The supply and return water in the hydrogen-dissolving water system generally require constant pressure control to ensure stable water usage. Constant pressure control for the LOOP supply water is achieved by interlocking the operating frequency of the hydrogen-dissolving water supply pump with the pressure transmitter on the LOOP supply pipeline. Constant pressure control for the LOOP return water is achieved by interlocking the opening of the constant pressure control proportional valve with the pressure transmitter on the LOOP return water pipeline. When the hydrogen-dissolving water returning from the LOOP passes through the constant pressure control proportional valve, the pressure release causes the dissolved hydrogen in the water to be released again due to reduced solubility. This lowers the dissolved hydrogen concentration returning to the hydrogen-dissolving water tank. When the low-concentration LOOP return water enters the hydrogen-dissolving water tank, it reduces the overall dissolved hydrogen concentration in the tank. Especially when the end-user water point is not using water or the water consumption is very low, all or most of the dissolved hydrogen water circulates in the dissolved hydrogen water supply system and the LOOP supply and return water pipelines. Since the half-life of dissolved hydrogen concentration is typically tens of minutes, the dissolved hydrogen concentration in the LOOP return water pipeline will continuously decrease due to the aforementioned reasons. With continuous dilution from the low-concentration LOOP return water, the dissolved hydrogen concentration in the dissolved hydrogen water tank will become increasingly lower. When the end-user water point is not using water or the water consumption is very low, the dissolved hydrogen water tank will remain at a high level or the level will drop very slowly, making it impossible to produce high-concentration dissolved hydrogen water through the dissolved hydrogen membrane to promptly compensate for the continuously decreasing dissolved hydrogen water concentration in the tank, thus failing to maintain a stable dissolved hydrogen concentration in the end-user water supply. Low-concentration dissolved hydrogen water cannot meet the dissolved hydrogen concentration requirements for cleaning panels and semiconductor components. To maintain a stable dissolved hydrogen concentration in the end-user water supply, the current industry practice is to dehydrogenate the low-concentration dissolved hydrogen water returned from the LOOP and the end-user ultrafiltration concentrate through a dehydrogenation tower before returning it to the intermediate water tank of the pre-pure water preparation system. This lowers the liquid level in the hydrogen dissolving water tank, and then a high concentration of hydrogen-dissolving water is produced through the hydrogen dissolving membrane to maintain the hydrogen concentration.

[0005] The current practice of dehydrogenating LOOP return water and terminal ultrafiltration concentrate before returning them to the intermediate water tank of the pre-pure water system will cause the following problems: 1. The dissolved hydrogen water returned to the intermediate water tank of the pre-pure water system needs to be dehydrogenated. This requires the addition of a dehydrogenation tower, explosion-proof fan, and corresponding online monitoring instruments. This increases the floor space required. In addition, the height of the dehydrogenation tower is relatively high, which is inconvenient to install. Furthermore, it has high requirements for the safety of the installation space and installation site, which also increases the investment and operating costs.

[0006] 2. The LOOP return water and the concentrated water from the terminal ultrafiltration are dehydrogenated and returned to the intermediate water tank of the pre-pure water system. They will be repeatedly circulated in the subsequent pure water preparation system, polishing system, degassing membrane, and hydrogen dissolving membrane. That is, the dehydrogenation-pure water preparation-ultrapure water polishing-degassing-hydrogen dissolving-dehydrogenation steps are repeated. This results in problems such as low overall utilization rate of the hydrogen dissolving water system, high energy consumption, high investment, and high operating costs.

[0007] 3. Expensive high-purity hydrogen is directly released into the atmosphere after being dehydrogenated in a dehydrogenation tower, which increases energy consumption and pollutes the environment, and is inconsistent with the current social concepts of low-carbon, energy-saving and emission-reduction, green and scientific development.

[0008] Therefore, how to solve the above problems has become an urgent issue. Summary of the Invention

[0009] In view of this, embodiments of this application provide an apparatus for preparing resoluble hydrogen functional water. This apparatus can solve the aforementioned technical problems.

[0010] This invention provides a device for preparing resoluble hydrogen-functional water. The device mainly includes: an ultrapure water supply system, a degassing module, a hydrogen dissolving module, a hydrogen-dissolving water tank, and a hydrogen-dissolving water terminal ultrafiltration module. The inlet of the degassing module is connected to the outlet of the ultrapure water supply system, which supplies ultrapure water. The degassing module degasses the ultrapure water supplied by the ultrapure water supply system. The inlet of the hydrogen dissolving module is connected to the outlet of the degassing module, and hydrogen is dissolved into the degassed ultrapure water to form hydrogen-dissolving water. The hydrogen-dissolving water tank has a first inlet, a second inlet, and a first outlet. The first inlet is connected to the hydrogen dissolving module. The process involves dissolving hydrogen water into a hydrogen water tank via a first inlet; the first outlet of the hydrogen water tank is connected to a hydrogen water terminal ultrafiltration module, which filters the hydrogen water to separate it into product water and concentrate; the product water outlet of the hydrogen water terminal ultrafiltration module is connected to a hydrogen water user module, the concentrate outlet of the hydrogen water terminal ultrafiltration module is connected to a hydrogen water terminal ultrafiltration concentrate filtration module, the hydrogen water terminal ultrafiltration concentrate filtration module is connected to a full-volume filtration ultrafiltration module, and the full-volume filtration ultrafiltration module is connected to the second inlet of the hydrogen water tank, or the full-volume filtration ultrafiltration module is connected to the inlet of the hydrogen water module.

[0011] In this embodiment, ultrapure water is degassed and dissolved in hydrogen to form dissolved hydrogen water. The dissolved hydrogen water enters the dissolved hydrogen water tank and then enters the dissolved hydrogen water terminal ultrafiltration module through the first outlet. The dissolved hydrogen water terminal ultrafiltration module filters the dissolved hydrogen water to ensure that the particle size index of the dissolved hydrogen water meets the requirements and separates the dissolved hydrogen water into product water and concentrated water. The product water outlet of the dissolved hydrogen water terminal ultrafiltration module is connected to the dissolved hydrogen water use module. When the dissolved hydrogen water use module uses less water or no water, more low-concentration dissolved hydrogen water returned from the LOOP enters the dissolved hydrogen module. The dissolved hydrogen module can hydrogenate the ultrapure water supplied by the ultrapure water supply system and the low-concentration dissolved hydrogen water returned from the LOOP to re-form high-concentration dissolved hydrogen water before it enters the dissolved hydrogen water tank. The concentrated water from the hydrogen-dissolving water terminal ultrafiltration module enters the hydrogen-dissolving water tank or the hydrogen-dissolving module after passing through the concentrated water filtration module and the full-volume filtration module. The concentrated water from the terminal ultrafiltration module then passes through the concentrated water filtration module to filter out larger diameter particles, and then through the full-volume filtration module to prevent particle accumulation and exceeding standards after prolonged circulation. This portion of concentrated water does not require re-dehydrogenation treatment via a dehydrogenation tower. Thus, unused return water from the hydrogen-dissolving water module and concentrated water from the terminal ultrafiltration module do not need to be repeatedly treated through the ultrapure water supply system, thereby improving the utilization rate of hydrogen-dissolving water. The elimination of dehydrogenation towers and corresponding explosion-proof fans and online monitoring instruments reduces footprint, energy consumption, investment, and operating costs.

[0012] In one embodiment, the resolvable hydrogen functional water preparation device further includes a check valve disposed between the degassing module and the hydrogen dissolving module, and connected to the outlet of the degassing module and the inlet of the hydrogen dissolving module. The check valve prevents the dissolved hydrogen water from flowing back into the polishing module of the ultrapure water supply system, thereby improving production safety.

[0013] In one embodiment, the ultrapure water supply system includes a pretreatment module, an intermediate water tank, a pure water preparation module, an ultrapure water tank, and a polishing module connected in sequence, with the outlet of the polishing module connected to the inlet of the degassing module.

[0014] In one embodiment, the resolvable hydrogen functional water preparation device further includes a proportional regulating three-way valve, a level transmitter, and a control module. The level transmitter is located on the lower side of the hydrogen dissolving water tank. The control module is connected to the proportional regulating three-way valve and the level transmitter. The inlet of the proportional regulating three-way valve is connected to the outlet of the polishing module, one outlet of the proportional regulating three-way valve is connected to the inlet of the degassing module, and the other outlet of the proportional regulating three-way valve is connected to the ultrapure water tank.

[0015] In one embodiment, the hydrogen dissolving module includes a hydrogen dissolving membrane, a hydrogen supply bottle, a hydrogen filter pressure reducing valve, an automatic hydrogen shut-off valve, and a thermogravimetric hydrogen addition proportioning valve. The inlet of the hydrogen dissolving membrane is connected to the outlet of the degassing module, and the outlet of the hydrogen dissolving membrane is connected to the first inlet of the hydrogen dissolving water tank. The hydrogen supply bottle, hydrogen filter pressure reducing valve, automatic hydrogen shut-off valve and thermogravimetric hydrogenation proportioning valve are connected in sequence. The outlet of the thermogravimetric hydrogenation proportioning valve is connected to the hydrogen dissolving membrane to dissolve hydrogen into the degassed ultrapure water.

[0016] In one embodiment, the resolvable hydrogen functional water preparation device further includes a first hydrogen dissolving meter, which is installed on the pipeline connecting the outlet of the hydrogen dissolving membrane to the first inlet of the hydrogen dissolving water tank. The first hydrogen dissolving meter, the automatic hydrogen shut-off valve, and the thermogravimetric hydrogenation proportional regulating valve are all connected to the control module.

[0017] In one embodiment, the resolvable hydrogen functional water preparation device further includes a condensate collection module and a discharge pipe. The discharge pipe is used to collect the condensate precipitated from the hydrogen-dissolving membrane and guide the condensate to the condensate collection module.

[0018] In one embodiment, the hydrogen dissolving module further includes a hydrogen filling compartment, an explosion-proof fan, and a first hydrogen gas concentration monitor; To prevent hydrogen leakage, the first hydrogen gas concentration monitor, hydrogen dissolving membrane, hydrogen supply bottle, hydrogen filter pressure reducing valve, automatic hydrogen shut-off valve and thermo-hydrogen proportional control valve are all placed in the hydrogen filling compartment. An air inlet is also provided at the bottom of the hydrogen refueling compartment, and an explosion-proof fan is located at the top of the hydrogen refueling compartment to extract the gas inside the compartment.

[0019] In one embodiment, the resolvable hydrogen functional water preparation device further includes a nitrogen supply bottle, a nitrogen supply pipe, a self-operated nitrogen sealing valve, a nitrogen sealing barrel, a breather valve, a hydrogen release valve, a micro pressure transmitter, and a second hydrogen gas concentration monitor. One end of the nitrogen supply pipe is connected to the nitrogen supply port of the hydrogen dissolving water tank, and the other end of the nitrogen supply pipe is connected to the nitrogen supply bottle. The hydrogen dissolving water tank has a nitrogen connection port. The nitrogen sealing tank is connected to the hydrogen dissolving water tank through the nitrogen connection port. The self-operated nitrogen sealing valve, the breather valve, the hydrogen release valve, and the micro-pressure transmitter are all located on the top of the hydrogen dissolving water tank. The hydrogen release valve is connected to the hydrogen dissolving water tank through a hydrogen release pipe. The second hydrogen gas concentration monitor is located on the hydrogen release pipe and is located between the hydrogen release valve and the hydrogen dissolving water tank.

[0020] In one embodiment, the resolvable hydrogen functional water preparation device further includes a first pressure transmitter, a first resistivity meter, a first flow meter, and a second hydrogen dissolving meter, as well as a hydrogen dissolving water supply pump, a hydrogen dissolving water heat exchange module, and a hydrogen dissolving water sterilization module connected in sequence. The first pressure transmitter, the first resistivity meter, the first flow meter, and the second hydrogen dissolving meter are spaced apart between the hydrogen dissolving water terminal ultrafiltration module and the hydrogen dissolving water use module. The first pressure transmitter is connected to the hydrogen dissolving water supply pump and the control module. The hydrogen-dissolving water supply pump is connected to the first outlet of the hydrogen-dissolving water tank, and the hydrogen-dissolving water sterilization module is connected to the hydrogen-dissolving water terminal ultrafiltration module.

[0021] The sterilization module is an ultraviolet sterilization module.

[0022] In one embodiment, the resolvable hydrogen functional water preparation device further includes a second flow meter, a second resistivity meter, a second pressure transmitter, and a constant pressure control proportional regulating valve. The second flow meter, the second resistivity meter, the second pressure transmitter, and the constant pressure control proportional regulating valve are installed on the pipeline between the hydrogen-dissolving water module and the inlet of the hydrogen-dissolving module, wherein: The constant pressure control proportional regulating valve is connected to the second pressure transmitter and control module.

[0023] In one embodiment, the resoluble hydrogen functional water preparation device further includes a third flow meter, which is located between the hydrogen-dissolving water terminal ultrafiltration concentrate filtration module and the hydrogen-dissolving water terminal ultrafiltration module.

[0024] In one embodiment, the degassing module includes a degassing membrane and a vacuum pumping device. The vacuum pumping device is connected to the degassing membrane, and the degassing membrane is connected to both an ultrapure water supply system and a hydrogen dissolving module. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of a resoluble hydrogen functional water preparation device provided in an embodiment of the present invention; Figure 2 This is another structural schematic diagram of a resolvable hydrogen functional water preparation device provided in an embodiment of the present invention.

[0026] Icons: 10-Ultrapure water supply system; 11-Pretreatment module; 12-Intermediate water tank; 13-Pure water preparation module; 14-Ultrapure water tank; 15-Polishing module; 20-Degassing module; 21-Degassing membrane; 22-Vacuum equipment; 30-Hydrogen dissolution module; 31-Hydrogen dissolution membrane; 32-Hydrogen supply bottle; 33-Hydrogen filter pressure reducing valve; 34-Automatic hydrogen addition shut-off valve; 35-Thermochemical hydrogen addition proportioning valve; 36-Hydrogen addition compartment; 37-Explosion-proof fan; 38-First hydrogen gas concentration monitor; 40-Hydrogen dissolution water tank; 41-Nitrogen supply bottle; 42-Self-operated nitrogen sealing valve; 43-Nitrogen sealing tank; 44-Breathing valve; 45-Hydrogen release valve; 46-Micro pressure transmitter; 47-Second hydrogen gas concentration monitor; 50-Hydrogen dissolution water terminal ultrapure water tank. Filter module; 60a, 60b - Piping; 61 - First pressure transmitter; 62 - First resistivity meter; 63 - First flow meter; 64 - Second hydrogen dissolving meter; 65 - Hydrogen dissolving water module; 66 - Second flow meter; 67 - Second resistivity meter; 68 - Second pressure transmitter; 69 - Constant pressure control proportional regulating valve; 70 - Hydrogen dissolving water terminal ultrafiltration concentrate pipeline; 71 - Hydrogen dissolving water terminal ultrafiltration concentrate filtration module; 72 - Full-volume filtration ultrafiltration module; 73 - Third flow meter; 80 - Hydrogen dissolving water supply pump; 90 - Hydrogen dissolving water heat exchange module; 100 - Hydrogen dissolving water sterilization module; 110 - First hydrogen dissolving meter; 120 - Check valve; 130 - Proportional regulating three-way valve; 140 - Level transmitter; 150 - Condensate collection module; 160 - Fourth flow meter. Detailed Implementation

[0027] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] The following description, in conjunction with the accompanying drawings, details an embodiment of the present invention that provides a resoluble hydrogen functional water preparation apparatus.

[0029] Figure 1 This is a schematic diagram of a resoluble hydrogen functional water preparation device provided in an embodiment of the present invention. Figure 2 This is another structural schematic diagram of a resoluble hydrogen-functional water preparation device provided in an embodiment of the present invention. (Refer to...) Figure 1 and Figure 2The resolvable hydrogen functional water preparation device includes an ultrapure water supply system 10, a degassing module 20, a hydrogen dissolving module 30, a hydrogen dissolving water tank 40, and a hydrogen dissolving water terminal ultrafiltration module 50. The ultrapure water supply system 10 is used to supply ultrapure water. The inlet of the degassing module 20 is connected to the outlet of the ultrapure water supply system 10, and the degassing module 20 can degas the ultrapure water supplied by the ultrapure water supply system 10. The inlet of the hydrogen dissolving module 30 is connected to the outlet of the degassing module 20, and dissolves hydrogen into the degassed ultrapure water to form hydrogen dissolving water. The hydrogen dissolving water tank 40 has a first inlet, a second inlet, and a first outlet. The first inlet is connected to the hydrogen dissolving module 30, and hydrogen dissolving water enters the hydrogen dissolving water tank 40 through the first inlet. The first outlet of the hydrogen dissolving water tank is connected to the hydrogen dissolving water terminal ultrafiltration module 50, which is used to filter the hydrogen dissolving water to separate it into product water and concentrate. The product water outlet of the hydrogen dissolving water terminal ultrafiltration module 50 is connected to the hydrogen dissolving water user module 65, and the concentrate outlet of the hydrogen dissolving water terminal ultrafiltration module 50 is connected to the hydrogen dissolving water terminal ultrafiltration concentrate filtration module 71. The hydrogen dissolving water terminal ultrafiltration concentrate filtration module 71 is connected to the full-volume filtration ultrafiltration module 72. The full-volume filtration ultrafiltration module 72 is connected to the second inlet of the hydrogen dissolving water tank, or, as needed, the full-volume filtration ultrafiltration module 72 can be connected to the inlet of the hydrogen dissolving module 30.

[0030] The degassing module 20 includes a degassing membrane 21 and a vacuum pumping device 22. The vacuum pumping device 22 includes a vacuum pump, a plate heat exchanger, a gas-liquid separator, a vacuum transmitter, vacuum piping, a flow switch, a vacuum gauge, supply and return water piping for the cooling water system, a working fluid circulation piping, an exhaust piping, and valves to work in conjunction with the vacuum pump for vacuuming. The vacuum pumping device 22 serves as an auxiliary device for the vacuuming of the degassing membrane 21. The connection relationships between the various components and the specific working process are not described in this application. The vacuum pumping device 22 only needs to ensure that the degassing membrane 21 can degas the ultrapure water supplied by the ultrapure water supply system 10 to the appropriate degree. The function of the degassing module 20 is to remove most of the dissolved nitrogen, the vast majority of dissolved oxygen, dissolved carbon dioxide, and trace amounts of other dissolved gases from the ultrapure water, thereby reducing the base concentration of dissolved gases in the ultrapure water to facilitate the subsequent injection of hydrogen into the ultrapure water.

[0031] In this embodiment, ultrapure water passes through the degassing module 20 and the hydrogen dissolving module 30 to form hydrogen-dissolved water. This hydrogen-dissolved water enters the hydrogen-dissolved water tank 40. The hydrogen-dissolved water in the tank 40 can then enter the hydrogen-dissolved water terminal ultrafiltration module 50 through the first outlet. The terminal ultrafiltration module 50 filters the hydrogen-dissolved water to ensure that the particle count meets the water usage requirements, and separates the hydrogen-dissolved water into product water and concentrated water. The product water outlet is connected to the hydrogen-dissolved water user module 65. When the hydrogen-dissolved water user module 65 uses less water or no water, the unused return water from the module enters the hydrogen dissolving module 30. The hydrogen dissolving module 30 hydrogenates both the ultrapure water and the return water, reforming the hydrogen-dissolved water to meet the user's required concentration before entering the hydrogen-dissolved water tank 40. The concentrated water then enters the hydrogen-dissolved water terminal ultrafiltration concentrated water filtration module 71 to first filter out larger particles, and then passes through the full-volume filtration ultrafiltration module 72 to further filter out smaller particles to prevent particle accumulation caused by concentrated water circulation, which could lead to excessive particle levels. Alternatively, this concentrated water can be transported to the inlet of the hydrogen dissolving module 30 for further hydrogen dissolution. In this way, the unused return water from the hydrogen dissolving water module 65 and the concentrated water from the hydrogen dissolving water terminal ultrafiltration module 50 do not need to undergo dehydrogenation in a dehydrogenation tower or require corresponding explosion-proof fans and online monitoring instruments, thereby reducing the footprint, lowering investment and operating costs, and improving the utilization rate of hydrogen dissolving water.

[0032] The ultrapure water supply system 10 may include a pretreatment module 11, an intermediate water tank 12, a pure water preparation module 13, an ultrapure water tank 14, and a polishing module 15 connected in sequence. The outlet of the polishing module 15 is connected to the inlet of the degassing module 20. The pretreatment module 11 can sterilize, heat, or cool the raw water, as well as filter and soften it. The pretreated raw water enters the intermediate water tank 12. Depending on the needs of different pure water preparation processes, the intermediate water tank 12 can be a filtration tank, a softening tank, or a transition tank in other pure water preparation processes. The water effluent from the intermediate water tank 12 is processed into pure water by the pure water preparation module 13. The pure water preparation module 13 generally includes a primary desalination unit and a deep desalination unit. In some embodiments, the pure water preparation module 13 may also include a primary deoxygenation membrane. The primary deoxygenation membrane is connected to the outlet of the deep desalination unit, and the outlet of the primary deoxygenation membrane is connected to the ultrapure water tank 14. Ultrapure water in ultrapure water tank 14 is transported to polishing module 15. Polishing module 15 can further purify residual ions in the ultrapure water and control organic matter in the ultrapure water, thereby improving the water quality to obtain the desired ultrapure water. Polishing module 15 may include a transfer pump, plate heat exchanger, TOC-reducing UV filter, polishing mixed bed, booster pump, and filter, etc. This application does not provide a more detailed description of the connection and position relationships of the various components in pretreatment module 11, pure water preparation module 13, and polishing module 15. Furthermore, these modules can also be composed of other components, as long as they can achieve the above functions.

[0033] In the above embodiments, the resolvable hydrogen functional water preparation device further includes a check valve 120, which is disposed between the degassing module 20 and the hydrogen dissolving module 30. The check valve 120 is connected to the outlet of the degassing module 20 and the inlet of the hydrogen dissolving module 30 to prevent the hydrogen-dissolving water in the hydrogen dissolving module 30 from flowing back into the degassing module 20, the polishing module 15 and the ultrapure water tank 14, thereby improving the safety of production.

[0034] In the above embodiments, the resolvable hydrogen functional water preparation device further includes a proportional regulating three-way valve 130, a level transmitter 140, and a control module. The control module is connected to the proportional regulating three-way valve 130 and the level transmitter 140. The level transmitter 140 is located on the lower side of the hydrogen-dissolving water tank 40 and can detect the liquid level in the hydrogen-dissolving water tank 40, sending the liquid level signal to the control module. The inlet of the proportional regulating three-way valve 130 is connected to the outlet of the polishing module 15, one outlet of the proportional regulating three-way valve 130 is connected to the inlet of the degassing module 20, and the other outlet of the proportional regulating three-way valve 130 is connected to the ultrapure water tank 14. Based on the liquid level signal in the hydrogen-dissolving water tank 40, the controller controls the opening of the proportional regulating three-way valve 130 to regulate the amount of ultrapure water entering the degassing module 20, thereby maintaining a constant liquid level in the hydrogen-dissolving water tank 40. This avoids large fluctuations in the liquid level of the hydrogen dissolving water tank 40, which would otherwise consume excessive amounts of the high-purity nitrogen needed to maintain the quality of the hydrogen-dissolving water in the tank 40, thus reducing operating costs. When the hydrogen dissolving water module 65 is not using water or uses very little water, the amount of ultrapure water produced by the polishing module 15 will exceed the required amount. The proportional regulating three-way valve 130 allows the ultrapure water flowing out of the polishing module 15 to flow back into the ultrapure water tank 14 to prevent the polishing module 15 from becoming pressurized.

[0035] The hydrogen dissolving module 30 includes a hydrogen dissolving membrane 31, a hydrogen supply bottle 32, a hydrogen filter pressure reducing valve 33, an automatic hydrogen shut-off valve 34, and a thermogravimetric hydrogenation proportioning valve 35. The inlet of the hydrogen dissolving membrane 31 is connected to the outlet of the degassing membrane 21, and the outlet of the hydrogen dissolving membrane 31 is connected to the first inlet of the hydrogen dissolving water tank 40. The hydrogen supply bottle 32, the hydrogen filter pressure reducing valve 33, the automatic hydrogen shut-off valve 34, and the thermogravimetric hydrogenation proportioning valve 35 are connected in sequence. The outlet of the thermogravimetric hydrogenation proportioning valve 35 is connected to the hydrogen dissolving membrane 31, so that hydrogen is dissolved into the degassed ultrapure water through the hydrogen dissolving membrane 31. The hydrogen supply cylinder 32 is connected to the hydrogen dissolving membrane 31 via a hydrogen injection pipeline. A hydrogen filter pressure reducing valve 33, an automatic hydrogen shut-off valve 34, and a thermogravimetric hydrogenation proportioning valve 35 are sequentially installed in the hydrogen injection pipeline. The hydrogen filter pressure reducing valve 33 not only filters impurities in the hydrogen supply pipeline but also reduces the pressure of the hydrogen injected into the hydrogen dissolving membrane 31 to the pressure required for hydrogen dissolution. The automatic hydrogen shut-off valve can immediately cut off the hydrogen supply in the event of a malfunction in the resolvable hydrogen functional water preparation device, preventing a safety accident caused by a continuous hydrogen supply.

[0036] A first hydrogen dissolving meter 110 is installed on the pipeline connecting the outlet of the hydrogen dissolving membrane 31 and the first inlet of the hydrogen dissolving water tank 40. The first hydrogen dissolving meter 110, the automatic hydrogen shut-off valve 34, and the thermogravimetric hydrogenation proportional control valve 35 are all connected to the control module. The first hydrogen dissolving meter 110 can monitor the dissolved hydrogen concentration of the hydrogen water flowing out of the hydrogen dissolving membrane 31 and send the dissolved hydrogen concentration to the control module. The control module can control the opening of the thermogravimetric hydrogenation proportional control valve 35 according to the dissolved hydrogen concentration in the hydrogen water to ensure the stability of the dissolved hydrogen concentration of the hydrogen water flowing out of the hydrogen dissolving membrane 31. The use of the thermogravimetric hydrogenation proportional control valve 35 can make the hydrogen injected into the hydrogen dissolving membrane 31 unaffected by changes in gas supply pressure and temperature, making the amount of hydrogen injected into the hydrogen dissolving membrane 31 more accurate, thereby improving the accuracy of the dissolved hydrogen concentration of the water effluent from the hydrogen dissolving membrane 31.

[0037] The hydrogen dissolving module 30 also includes a hydrogen refueling compartment 36, an explosion-proof fan 37, and a first hydrogen gas concentration monitor 38. The first hydrogen gas concentration monitor 38, hydrogen dissolving membrane 31, hydrogen supply cylinder 32, hydrogen filter pressure reducing valve 33, automatic hydrogen refueling shut-off valve 34, and thermogravimetric hydrogen refueling proportioning valve 35 are installed inside the hydrogen refueling compartment. An air inlet is located at the bottom of the hydrogen refueling compartment 36 to allow air to enter. The explosion-proof fan 37 is located at the top of the hydrogen refueling compartment to extract gas from the compartment, preventing hydrogen leakage and accumulation that could cause safety hazards. The first hydrogen gas concentration monitor 38 is located at the top of the hydrogen refueling compartment 36 to monitor the hydrogen concentration and issue an alarm signal. The hydrogen refueling compartment 36 can also be understood as a separate room or other isolated space. Alternatively, the hydrogen refueling compartment 36 can be located in a separate room, and a hydrogen gas concentration monitoring instrument can be installed on the ceiling of the room to further improve the safety of the hydrogen refueling process.

[0038] To ensure that the hydrogen in the hydrogen supply cylinder 32 can stably dissolve into the hydrogen-dissolving membrane 31, a re-dissolving hydrogen functional water preparation device further includes a condensate collection module 150 and a discharge pipe. The discharge pipe is used to collect the condensate precipitated from the hydrogen-dissolving membrane 31 and guide the condensate to the condensate collection module 150. The discharge pipe can be made of transparent material and can be U-shaped, with the outlet of the U-shaped discharge pipe higher than the inlet of the condensate collection module 150 to ensure that the condensate enters the condensate collection module 150 by gravity. The condensate collection module 150 can also be combined with a nitrogen-sealed tank 43.

[0039] The resolvable hydrogen functional water preparation device also includes a nitrogen supply bottle 41, a nitrogen supply pipe, a self-regulating nitrogen sealing valve 42, a nitrogen sealing tank 43, a breather valve 44, a hydrogen release valve 45, a micro-pressure transmitter 46, and a second hydrogen gas concentration monitor 47. One end of the nitrogen supply pipe is connected to the hydrogen-dissolving water tank 40, and the other end is connected to the nitrogen supply bottle 41. The hydrogen-dissolving water tank 40 has a nitrogen inlet, and the nitrogen sealing tank 43 is connected to the hydrogen-dissolving water tank 40 through the nitrogen inlet. The breather valve 44, the hydrogen release valve 45, and the micro-pressure transmitter 46 are all located on the top of the hydrogen-dissolving water tank 40. The hydrogen release valve 45 is connected to the hydrogen-dissolving water tank 40 through the hydrogen release pipe. The second hydrogen gas concentration monitor 47 is located on the hydrogen release pipe and is situated between the hydrogen release valve 45 and the hydrogen-dissolving water tank 40. When the nitrogen pressure at the top of the hydrogen dissolving tank 40 exceeds the set value, the breather valve 44 and the nitrogen sealing tank 43 can successively release the nitrogen from the top of the hydrogen dissolving tank 40 to reduce the gas pressure at the top of the hydrogen dissolving tank 40. When the nitrogen pressure at the top of the hydrogen dissolving tank 40 falls below the set value or a negative pressure is applied, the self-regulating nitrogen sealing valve 42 will automatically replenish nitrogen to adjust the nitrogen pressure at the top of the hydrogen dissolving tank 40 to the set value. In special circumstances, if the self-regulating nitrogen sealing valve 42 malfunctions and cannot replenish nitrogen in time or the nitrogen supply stops, and the hydrogen dissolving tank 40 is under negative pressure, the breather valve 44 and the nitrogen sealing tank 43 can successively draw in air by breaking the vacuum to ensure that the hydrogen dissolving tank 40 does not rupture due to the negative pressure, thus preventing a safety accident. The hydrogen release valve 45 can mix the trace amount of hydrogen and most of the high-purity nitrogen that accumulates at the top of the hydrogen dissolving tank 40 and release it in a timely manner to prevent hydrogen from accumulating at the top of the hydrogen dissolving tank 40 and causing danger. The micro-pressure transmitter 46 can monitor the pressure of the nitrogen sealing gas at the top of the hydrogen dissolving water tank 40 in real time, and can provide an alarm function when the pressure of the nitrogen sealing gas is too high or too low. A second hydrogen gas concentration monitor 47 is installed on the hydrogen release pipe, which can monitor the hydrogen concentration in a timely manner and provide an alarm function.

[0040] It is worth mentioning that the hydrogen dissolving water tank 40, nitrogen supply bottle 41, nitrogen supply pipe, self-regulating nitrogen sealing valve 42, nitrogen sealing barrel 43, breathing valve 44, hydrogen release valve 45, micro pressure transmitter 46, and second hydrogen gas concentration monitor 47 can also be independently installed in a separate room or compartment. A hydrogen gas concentration monitoring instrument can also be installed on the top of the room or compartment to further improve the safety of the hydrogen dissolving module 30 and the hydrogen dissolving water tank 40.

[0041] In the above embodiments, a resoluble hydrogen functional water preparation device further includes a hydrogen-dissolving water supply pump 80, a hydrogen-dissolving water heat exchange module 90, and a hydrogen-dissolving water sterilization module 100 connected in sequence. The device also includes a first pressure transmitter 61, a first resistivity meter 62, a first flow meter 63, and a second hydrogen dissolving meter 64, which can be arranged sequentially at intervals. Specifically, the first pressure transmitter 61, the first resistivity meter 62, the first flow meter 63, and the second hydrogen dissolving meter 64 are installed on pipeline 60a between the hydrogen-dissolving water terminal ultrafiltration module 50 and the hydrogen-dissolving water usage module 65. Both the first pressure transmitter 61 and the hydrogen-dissolving water supply pump 80 are connected to a control module. The hydrogen-dissolving water supply pump 80 is connected to the first outlet of the hydrogen-dissolving water tank, and the hydrogen-dissolving water sterilization module 100 is connected to the hydrogen-dissolving water terminal ultrafiltration module 50. The hydrogen-dissolving water heat exchange module 90 can be a plate heat exchanger for hydrogen-dissolving water. The hydrogen-dissolving water supply pump 80 adopts frequency conversion regulation to ensure that the water supply pressure monitored by the first pressure transmitter 61 is within the range required by the user. The hydrogen-dissolving water heat exchange module 90 can ensure the temperature required by the hydrogen-dissolving water use module 65. The hydrogen-dissolving water sterilization module 100 can kill bacteria in the hydrogen-dissolving water. The hydrogen-dissolving water terminal ultrafiltration module 50 can perform cross-flow filtration of the hydrogen-dissolving water, making the hydrogen-dissolving water into terminal ultrafiltration permeate and terminal ultrafiltration concentrate. The permeate of the terminal ultrafiltration passes through the hydrogen-dissolving water use module 65 and then flows back to the inlet of the hydrogen-dissolving membrane 31 through pipeline 60b. The concentrate of the hydrogen-dissolving water terminal ultrafiltration module 50, after being filtered by the hydrogen-dissolving water terminal ultrafiltration concentrate filtration module 71 and the full-volume filtration ultrafiltration module 72, flows back to the hydrogen-dissolving water tank 40. Alternatively, it can be combined through pipeline 60b and then flowed back to the inlet of the hydrogen-dissolving membrane 31 as needed. The concentration of the hydrogen-dissolved water terminal ultrafiltration is about 5% of the influent volume entering the hydrogen-dissolved water terminal ultrafiltration module 50. Given that the concentration of the hydrogen-dissolved water terminal ultrafiltration is small, much smaller than the circulation and return percentage in panel projects and the semiconductor industry, direct return to the hydrogen-dissolved water tank 40 will not have a significant impact on the hydrogen concentration in the hydrogen-dissolved water tank and can reduce the treatment capacity of the hydrogen-dissolved membrane to save investment and operating costs.

[0042] It is worth mentioning that a third flow meter 73 is installed on the ultrafiltration concentrate pipeline 70 of the hydrogen-dissolving water terminal. The third flow meter 73 is located between the ultrafiltration concentrate filtration module 71 of the hydrogen-dissolving water terminal and the ultrafiltration module 50 of the hydrogen-dissolving water terminal. The third flow meter 73 is used to monitor the concentrate flow rate of the ultrafiltration module 50 of the hydrogen-dissolving water terminal.

[0043] It should be noted that the hydrogen-dissolved water terminal ultrafiltration concentrate filtration module 71 may include a hydrogen-dissolved water terminal ultrafiltration concentrate filter and a backup filter. The backup filter facilitates replacement of the hydrogen-dissolved water terminal ultrafiltration concentrate filter cartridge. The filter cartridge typically uses a nylon, PES, or PTFE membrane to ensure the filtration accuracy of the hydrogen-dissolved water terminal ultrafiltration concentrate filter cartridge. The hydrogen-dissolved water terminal ultrafiltration concentrate filter cartridge is replaced with a new one when the specified operating pressure differential is reached. The full-volume filtration ultrafiltration module 72 does not discharge concentrate. The full-volume filtration ultrafiltration module 72 includes an ultrafiltration membrane, which undergoes offline cleaning to restore production capacity when the specified operating pressure differential is reached. The full-volume filtration ultrafiltration membrane is also generally provided as a backup for replacement, cleaning, and maintenance.

[0044] In some embodiments, a second flow meter 66, a second resistivity meter 67, a second pressure transmitter 68, and a constant pressure control proportional regulating valve 69 are sequentially installed on the pipeline 60b. The second flow meter 66, second resistivity meter 67, second pressure transmitter 68, and constant pressure control proportional regulating valve 69 are positioned between the inlet of the hydrogen-dissolving water module 65 and the inlet of the hydrogen-dissolving module 30. The constant pressure control proportional regulating valve 69 and the second pressure transmitter 68 are connected to the control module to ensure stable return water pressure in the hydrogen-dissolving water module 65. The second resistivity meter 67 can monitor the resistivity value of the return water in the pipeline 60b in real time. The second flow meter can monitor the flow rate of the return water in the pipeline 60b in real time.

[0045] A fourth flow meter 160 can be installed between the proportional regulating three-way valve 130 and the degassing module 20. The fourth flow meter 160 can monitor the flow rate of ultrapure water entering the degassing module 20 in real time. Since the liquid level in the hydrogen dissolving water tank 40 is constant, the amount of ultrapure water entering the degassing module 20 is approximately equal to the amount of water used in the hydrogen dissolving water module 65.

[0046] Obviously, those skilled in the art can make various modifications and variations to the embodiments of the present invention without departing from the spirit and scope of the invention. Therefore, if these modifications and variations fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include these modifications and variations.

Claims

1. A device for preparing resoluble hydrogen-functional water, characterized in that, include: An ultrapure water supply system, wherein the ultrapure water supply system is used to supply ultrapure water; A degassing module, the inlet of which is connected to the outlet of the ultrapure water supply system, and degassing the ultrapure water supplied by the ultrapure water supply system; The hydrogen dissolving module has its inlet connected to the outlet of the degassing module, and dissolves hydrogen gas into the degassed ultrapure water through the hydrogen dissolving module to form hydrogen-dissolved water. A hydrogen dissolving water tank, which has a first inlet, a second inlet and a first outlet, wherein the first inlet is connected to the hydrogen dissolving module and hydrogen-dissolving water enters the hydrogen dissolving water tank through the first inlet; A hydrogen-dissolving water terminal ultrafiltration module is provided, wherein the hydrogen-dissolving water terminal ultrafiltration module is connected to the first outlet of the hydrogen-dissolving water tank, and the hydrogen-dissolving water terminal ultrafiltration module is used to filter the hydrogen-dissolving water to separate the hydrogen-dissolving water into product water and concentrated water; the product water outlet of the hydrogen-dissolving water terminal ultrafiltration module is connected to the hydrogen-dissolving water water use module, the concentrated water outlet of the hydrogen-dissolving water terminal ultrafiltration module is connected to the hydrogen-dissolving water terminal ultrafiltration concentrated water filtration module, the hydrogen-dissolving water terminal ultrafiltration concentrated water filtration module is connected to the full-volume filtration ultrafiltration module, and the full-volume filtration ultrafiltration module is connected to the second inlet of the hydrogen-dissolving water tank, or the full-volume filtration ultrafiltration module is connected to the inlet of the hydrogen-dissolving module.

2. The apparatus for preparing resoluble hydrogen-functional water as described in claim 1, characterized in that, The resolvable hydrogen functional water preparation device also includes a check valve, which is disposed between the degassing module and the hydrogen dissolving module, and the check valve is connected to the outlet of the degassing module and the inlet of the hydrogen dissolving module.

3. The apparatus for preparing resoluble hydrogen-functional water as described in claim 1, characterized in that, The ultrapure water supply system includes a pretreatment module, an intermediate water tank, a pure water preparation module, an ultrapure water tank, and a polishing module connected in sequence. The outlet of the polishing module is connected to the inlet of the degassing module.

4. The apparatus for preparing resoluble hydrogen-functional water as described in claim 3, characterized in that, The resoluble hydrogen functional water preparation device also includes a proportional regulating three-way valve, a level transmitter, and a control module. The level transmitter is located on the lower side of the hydrogen-dissolving water tank. The control module is connected to the proportional regulating three-way valve and the level transmitter. The inlet of the proportional regulating three-way valve is connected to the outlet of the polishing module. One outlet of the proportional regulating three-way valve is connected to the inlet of the degassing module. The other outlet of the proportional regulating three-way valve is connected to the ultrapure water tank.

5. The apparatus for preparing resoluble hydrogen-functional water according to any one of claims 1 to 4, characterized in that, The hydrogen dissolving module includes a hydrogen dissolving membrane, a hydrogen supply bottle, a hydrogen filter pressure reducing valve, an automatic hydrogen shut-off valve, and a thermogravimetric hydrogen addition proportioning valve. The inlet of the hydrogen dissolving membrane is connected to the outlet of the degassing module, and the outlet of the hydrogen dissolving membrane is connected to the first inlet of the hydrogen dissolving water tank. The hydrogen supply bottle, hydrogen filter pressure reducing valve, hydrogen automatic shut-off valve and thermogravimetric hydrogenation proportioning valve are connected in sequence. The outlet of the thermogravimetric hydrogenation proportioning valve is connected to the hydrogen dissolving membrane to dissolve hydrogen into the degassed ultrapure water.

6. The apparatus for preparing resoluble hydrogen-functional water as described in claim 5, characterized in that, The resoluble hydrogen functional water preparation device further includes a first hydrogen dissolving meter, which is installed on the pipeline from the hydrogen dissolving membrane to the first inlet of the hydrogen dissolving water tank. The first hydrogen dissolving meter, the automatic hydrogen shut-off valve, and the thermogravimetric hydrogenation proportioning valve are all connected to the control module.

7. The apparatus for preparing resoluble hydrogen-functional water as described in claim 5, characterized in that, The hydrogen dissolving module also includes a hydrogen filling compartment, an explosion-proof fan, and a first hydrogen gas concentration monitor; The hydrogenation compartment is equipped with the first hydrogen gas concentration monitor, a hydrogen dissolving membrane, a hydrogen supply bottle, a hydrogen filter pressure reducing valve, an automatic hydrogenation shut-off valve, and a calorific hydrogenation proportioning valve. An air inlet is provided at the bottom of the hydrogen refueling compartment, and an explosion-proof fan is provided at the top of the hydrogen refueling compartment to extract the gas inside the hydrogen refueling compartment.

8. The apparatus for preparing resoluble hydrogen-functional water according to any one of claims 1 to 4, characterized in that, The resoluble hydrogen functional water preparation device also includes a nitrogen supply bottle, a nitrogen supply pipe, a self-operated nitrogen sealing valve, a nitrogen sealing barrel, a breathing valve, a hydrogen release valve, a micro-pressure transmitter, and a second hydrogen gas concentration monitor. One end of the nitrogen supply pipe is connected to the nitrogen supply port of the hydrogen dissolving water tank, and the other end of the nitrogen supply pipe is connected to the nitrogen supply bottle; the hydrogen dissolving water tank has a nitrogen inlet, and the nitrogen sealing tank is connected to the hydrogen dissolving water tank through the nitrogen inlet; the breathing valve, hydrogen release valve, and micro-pressure transmitter are all located on the top of the hydrogen dissolving water tank; the hydrogen release valve is connected to the hydrogen dissolving water tank through a hydrogen release pipe; the second hydrogen gas concentration monitor is located on the hydrogen release pipe, and the second hydrogen gas concentration monitor is located between the hydrogen release valve and the hydrogen dissolving water tank.

9. The apparatus for preparing resoluble hydrogen-functional water according to any one of claims 1 to 4, characterized in that, The resoluble hydrogen functional water preparation device further includes a first pressure transmitter, a first resistivity meter, a first flow meter, and a second hydrogen dissolving meter, as well as a hydrogen dissolving water supply pump, a hydrogen dissolving water heat exchange module, and a hydrogen dissolving water sterilization module connected in sequence. The first pressure transmitter, the first resistivity meter, the first flow meter, and the second hydrogen dissolving meter are spaced apart between the hydrogen dissolving water terminal ultrafiltration module and the hydrogen dissolving water use module. Both the first pressure transmitter and the hydrogen dissolving water supply pump are connected to the control module. The hydrogen-dissolving water supply pump is connected to the first outlet of the hydrogen-dissolving water tank, and the hydrogen-dissolving water sterilization module is connected to the hydrogen-dissolving water terminal ultrafiltration module.

10. The apparatus for preparing resoluble hydrogen-functional water according to any one of claims 1 to 4, characterized in that, The resoluble hydrogen functional water preparation device also includes a second flow meter, a second resistivity meter, a second pressure transmitter, and a constant pressure control proportional regulating valve. The second flow meter, the second resistivity meter, the second pressure transmitter, and the constant pressure control proportional regulating valve are installed on the pipeline between the hydrogen-dissolving water module and the inlet of the hydrogen-dissolving module, wherein: The constant pressure control proportional regulating valve is connected to the second pressure transmitter and control module.

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