Actuator unit, drive device and drive system

Abstract

The present application relates to an actuator unit (1) comprising a first actuator (A1) and a second actuator (A2); wherein the first actuator (A1) comprises: a first deformable body (30) which is deformed by a voltage; a first excitation electrode assembly comprising at least one excitation electrode (E111, E112) on a first main surface (31) of the first deformable body (30) and a common electrode on a second main surface of the first deformable body; the second actuator (A2) comprises: a second deformable body (60) which is deformed by a voltage; a second excitation electrode assembly comprising at least one excitation electrode (E211, E212) on a first main surface of the second deformable body and a common electrode (E22) on a second main surface (81) of the second deformable body; wherein the first actuator and the second actuator are arranged overlapping each other such that the thickness directions (RT1, RT2) of both extend into each other, and wherein the first excitation electrode assembly and the second excitation electrode assembly are arranged opposite to each other.

Description

Technical Field

[0001] This application relates to actuator units, drive devices, and drive systems. Background Technology

[0002] WO2017067544A1 discloses a method for controlling at least a portion of an electromechanical component, the component comprising a polycrystalline material and a ferroelectric or ferroelectric piezoelectric material having multiple domains. In this method, a portion of the domains in the material having different polarization directions is transformed into a state of uniform polarization direction by applying a voltage in the form of at least one voltage pulse between electrodes in contact with the material. Summary of the Invention

[0003] The purpose of this application is to provide an actuator unit and a drive device that enable the driven element to be positioned with a predetermined accuracy, and this represents an alternative solution to existing actuator units or drive devices.

[0004] The purpose of this application is to achieve this through the technical features of the independent claim. Other embodiments are described in the dependent claims that reference the independent claim.

[0005] The actuator unit and drive system provided in this application include, specifically: A first actuator includes: a first deformable body, which is deformed by voltage and comprises an electromechanical material and is preferably made of the material, and the deformable body has a thickness extending along its thickness direction and is defined by: a first main surface and a second main surface, which are oriented opposite to each other with respect to a first thickness direction; and a first excitation electrode assembly, which includes: at least one excitation electrode located on the first main surface of the first deformable body, and a common electrode located on the second main surface of the first deformable body. The second actuator includes: a second deformable body, which is deformed by voltage and comprises an electromechanical material and is preferably made of the material, and the deformable body has a thickness extending along its thickness direction and is defined by: a first main surface and a second main surface, which are oriented opposite to each other with respect to a second thickness direction; and a second excitation electrode assembly, which includes: at least one excitation electrode located on the first main surface of the second deformable body, and a common electrode located on the second main surface of the second deformable body. The first actuator and the second actuator are arranged to overlap each other, such that they extend towards each other in the thickness direction, and the first excitation electrode assembly and the second excitation electrode assembly are arranged opposite each other.

[0006] The actuator unit provided herein includes at least two actuators, each actuator comprising at least one deformable body having an electromechanical material; wherein the electromechanical material is preferably a polycrystalline material and a ferroelectric material or a ferroelectric-poleelectric material, and particularly preferably a soft PZT ceramic. In this document, PZT material should be understood to refer to an electromechanical ceramic material based on lead zirconate titanate, and specifically based on a mixed crystal of lead zirconate and lead titanate. The electromechanical material is specifically characterized in that, when or only when electrical energy (specifically voltage) is applied to it, an object made therefrom will change at least one of its geometric dimensions.

[0007] According to this application, the term "deformation" has the following meanings herein, unless otherwise expressly specified: In each embodiment of this application, the deformable body is an electromechanical element comprising at least one variation block made of a polycrystalline material and a ferroelectric or ferro-poleelectric material having multiple domains, i.e., a unit cell region having a uniform dipole orientation; wherein each deformable body is located between two actuating electrodes, and the two actuating electrodes are spaced apart from each other in the thickness direction of the respective actuator segment. Specifically, in the context of this document, the term "domain" refers to a tiny region among a plurality of tiny regions in which the polarization directions are the same or substantially the same. The deformable body, specifically its variation block, may be completely unreceived, only partially receiving, or fully receiving the polarization process, and it is substantially in an unpolarized, partially polarized, or substantially fully polarized state. In the unpolarized region, the polarization directions of the domains are randomly and disorderly different from each other, i.e., irregularly different from each other. Since the deformable body or its corresponding variation block has not yet undergone the polarization process, this substantially unpolarized state is also understood below as the "initial state" of the deformable body, specifically its variation block.

[0008] The variation block can be a sub-region of the deformable body, or it can be the same as the deformable body. Viewed in the thickness direction, the variation block is located inside the excitation electrode that contacts the deformable body, or covers at least 25%, preferably at least 50%, of the surface area of ​​the excitation electrode. By appropriately driving the excitation electrode that contacts the corresponding first contact surface of the deformable body, and applying a reference voltage to a reference electrode (which contacts a corresponding second contact surface of the deformable body in the opposite direction to the first contact surface), an electric field extending along the thickness direction of the deformable body is generated, and a voltage pulse is applied.

[0009] According to this application, the deformable body of the actuator unit is implemented according to one of the following two definitions: (P1) A deformable body or at least one variation block within a deformable body, each variation block specifically referring to its domain, which, due to a polarization process, is fully or substantially fully polarized along a corresponding thickness direction and having a corresponding polarity in order to operate the deformable body, actuator unit, or drive device. According to the definition of (P1), a deformable body or actuator segment can only achieve a non-permanent and reversible expansion change (typically an increase in expansion) during the application of a voltage or electric field, which substantially subsides or disappears upon removal of the voltage or electric field, causing the initial length of the deformable body in the expansion direction (specifically, a deviation of 20%) to spontaneously recover to or substantially recover to its original state.

[0010] (P2) A deformable body or at least one variable block in at least one deformable body, each variable block specifically referring to its domain, wherein, in the initial state of the trial operation of the deformable body, actuator unit or drive device, the domain is polarized from the initial polarization state along the corresponding thickness direction to a proportion of >0% and <100%, preferably 10% to 90%, through a polarization process; thereby, a voltage pulse applied to the corresponding electrode in the thickness direction induces, through a polarization or depolarization process, a permanent or irreversible change in the length of the deformable body or actuator segment in the thickness direction without energy, which continues during the period when no voltage is applied to the same actuator electrode.

[0011] Materials according to definition (P1) are also called "hard PZT materials," while materials realized according to definition (P2) are called "soft PZT materials." Modifications of actuator units according to definition (P1) are also referred to herein as "hard" or "active," while modifications of actuator units prepared according to definition (P2) are referred to herein as "soft" or "semi-active."

[0012] In the modified body or actuator segment of the actuator unit according to this application, for the modified body or actuator segment according to (P1) and for the modified body or actuator segment according to (P2), the expansion direction extends substantially along the longitudinal direction of the respective modified body.

[0013] In order to achieve state (P1), before the trial operation of at least one change block of the deformable body or actuator segment, residual polarization is established in at least one change block of the deformable body under the influence of a DC electric field.

[0014] In this paper, deformable bodies or actuator segments as defined in (P1) are also understood to be deformable bodies made of fully polarized materials.

[0015] According to (P1), after a voltage or voltage pulse is applied to the actuator electrode in contact with the corresponding actuator segment or deformable, expansion occurs along the longitudinal direction of the corresponding actuator segment or deformable; wherein such expansion occurs only during the continuous application of a large amount of voltage or voltage pulse, and once the voltage is removed, the expansion completely or substantially completely disappears, and is therefore reversible.

[0016] Conversely, for deformable bodies as defined in (P2), changes in their dimensions can be achieved through appropriate control of the deformable body (on which the actuating electrodes are mounted), i.e., by applying a single voltage pulse or multiple voltage pulses to the actuating electrodes attached to the respective deformable body. This change persists even without the applied voltage (i.e., persists after the voltage is removed), and is therefore residual or irreversible, and is thus also referred to herein as “permanent.” Thus, the electromechanical material of the deformable body according to definition (P2), with actuating electrodes arranged opposite each other in its deformation or expansion direction, is adapted to induce a polarization or depolarization process by applying at least one voltage pulse to the actuating electrodes, and to initiate a permanent length change requiring no energy input. In this document, “permanent length change without energy input” should be understood as: after the application of at least one voltage pulse, the length change persists as long as no voltage or voltage pulse is applied to the same actuating electrode.

[0017] In the context of this paper, the term "domain" refers to a tiny region among a plurality of tiny regions in which the polarization directions are the same or substantially the same; in a substantially unpolarized (i.e., unpolarized) deformable, the polarization directions of the domains are disorderly and irregularly different from each other.

[0018] For the deformable according to definition (P2), it is also conceivable that the domains in the change block exhibit 0% polarizability (completely unpolarized) or 100% polarizability (completely polarized), although in this case, limitations must be imposed regarding the direction of expansion or the corresponding expansion magnitude. Therefore, for the case of 0% or substantially 0% polarizability, at least initially, the increase in the remaining expansion amount can only be achieved by applying a corresponding voltage pulse; while for the case of 100% or substantially 100% polarizability, the decrease or reduction in the remaining expansion amount can only be achieved initially by applying a corresponding voltage pulse. Specifically, the deformable according to definition (P2) can be configured such that a proportion of domains in the actuator segment or its deformable form that is greater than 0% and less than 100% (specifically between 1% and 99%, most preferably between 10% and 90%) is polarized by a polarization process to activate the deformable form, the polarization process starting from an initial polarization state and proceeding in a polarization direction extending along its respective longitudinal direction. Generally, the meaning of "the proportion greater than 0% and less than 100%" in this article can be specifically understood as the proportion greater than 1% and less than 99%, and more specifically as the proportion greater than 0.1% and less than 99.9%.

[0019] In this document, a deformable body according to definition (P2) is also understood to be a deformable body made of a non-fully polarized material, which is adapted to undergo a permanent or residual length change only due to at least one voltage pulse of a magnitude relevant to the specific case. This means that even if no stress is applied to the deformable body after at least one voltage pulse, a permanent relative change in length still exists. In the context of this document, the relative change in length is preferably defined as the change in length of the deformable body in the corresponding longitudinal direction when a voltage is applied to the deformable body, with an amplitude of 0.1% of the longitudinal length of the actuator segment or deformable body, said voltage amplitude being, for example, less than 200 V. Alternatively or additionally, a change in length of the actuator segment or deformable body in the corresponding longitudinal direction may be provided, preferably with an amplitude greater than 0.1 nm. This material is also referred to below as a polarized material adapted to undergo a permanent change in length due to a voltage pulse.

[0020] According to the deformable body (P2), it is driven by applying at least one voltage pulse in the form of a voltage pulse with a specific amplitude and a specific duration. Thus, depending on the amplitude and duration of the voltage pulse, the polarization of the deformable block is permanently changed, thereby enabling a controllable and permanent change in the expansion of the deformable block even in the absence of voltage (even after the previously applied voltage has dropped to zero).

[0021] It may be advantageous to dimension the amplitude of the voltage pulse so that, when the expansion of the changing block of the electromechanical component along the expansion direction V increases by a certain amount, the electric field strength generated between adjacent electrodes is assumed to be positive and between 0 and 300% of the coercive field strength, preferably 50% to 240% of the coercive field strength. In this context, the longer the duration and / or the larger the value of the applied voltage pulse, the smaller its corresponding amplitude may be; conversely, the shorter the duration and / or the smaller the value of the applied voltage pulse, the larger its corresponding amplitude may be. The coercive field strength is the field strength sufficient to align the dipole moments of most or all domains of a ferroelectric material along the electric field direction (i.e., saturate polarization). It is divided into positive and negative coercive fields, and in most soft piezoelectric ceramics, their amplitudes are equal. If the magnitude of the electric field in the initially polarized ferroelectric deformable body in the positive thickness direction decreases in the direction of the negative coercive electric field strength (the negative voltage relative to the initial polarization direction), the dipole moments of each domain (or at least most of them) of the ferroelectric material will align in the opposite direction to the original polarization direction, and thus also opposite to the original orientation of the ferroelectric domains.

[0022] Furthermore, it may be advantageous to dimension the amplitude of the voltage pulse such that: when the extension of the variable block of the electromechanical component along the extension direction V decreases by a certain amount, the electric field strength generated between adjacent electrodes is assumed to be negative, and its absolute value is greater than 0% of the coercive field strength and less than or equal to 200% or 240% of the coercive field strength, preferably greater than 0% of the coercive field strength and less than or equal to 120% of the coercive field strength. Similarly, the longer the duration and / or the larger the value of the applied voltage pulse, the smaller the corresponding amplitude can be; conversely, the shorter the pulse duration and / or the smaller the value, the larger the corresponding amplitude can be.

[0023] According to the embodiments of the method of this application, the following effects occur due to the application of a voltage pulse to a deformable body according to definition (P2) to achieve a permanent change in the length of the actuator segment or deformable body: when a voltage pulse is applied to a deformable body conforming to definition (P2), the change in the length of the deformable body initially exceeds the length that exists as the permanent length, residual length, or remaining length of the deformable body after the application of the voltage pulse. The voltage pulse induces two components of the change in the length of the deformable body, which together constitute the total change in the length of the deformable body.

[0024] (F1) The first component is the piezoelectric length change component, which is a short-term, energy-free, reversible length change component with a significantly greater amplitude than the length change caused by (F2). The amplitude of the length change or the increase in length depends on the amplitude and duration of the applied voltage pulse. Furthermore, the amplitude of the length change or the increase in length also depends on the current polarization of the electromechanical material according to (P2). The higher the polarization, i.e., the more oriented domains, the greater the extent to which the length change of the deformable body exceeds or surpasses the aforementioned permanent length according to (F2).

[0025] (F2) The second component, immediately following the piezoelectric length change component (F1), is the ferroelectric length change component, which is a continuous length change component that requires no energy; that is, it causes a permanent or residual length change in the deformable body. The ferroelectric component leads to an increase in the length of the deformable body, which in each case is caused by a change in domain orientation induced by the applied voltage pulse. In this process, the change in length is substantially proportional to the number of domains that are repolarized and thus reoriented due to the voltage pulse. The direction of the length change in this component (F2) is the same as that in component (F1). Component (F1) occurs before and exceeds the energy-free continuous length change component (F2); in other words, the magnitude of component (F1) exceeds the magnitude of the length change component (F2). During the time interval between the formation of the length variation component (F1) and the formation of the deformable body to the expected permanent length change, a creep process occurs in the deformable body during or in the process of the formation of the length variation component (F2). This process begins with a relatively significant initial length change (length increase in this context), followed shortly by a partially reverse length change (length decrease in this context) relative to its indication, and further length changes in the deformable body in the reverse direction due to the length variation component (F1). During creep, this further length change of the deformable body is relatively small relative to the length variation component (F1). The creep process, or the formation of the length variation component (F2), takes longer than that of the length variation component (F1), specifically at least twice as long, and at least three times as long. The relatively short-term piezoelectric strain component (F1) may exceed twice that of the ferroelectric strain component (F2).

[0026] Because the total length change of the deformable body caused by the length change component (F1) is significantly greater than that caused by the length change component (F2), and for example, the former may be more than twice that of the latter, the length change component (F1) is also referred to herein as "overshoot". The length change caused by component (F2) is a sustained length change of the deformable body achieved or desired by applying a voltage pulse. Component (F1) increases with increasing applied voltage and with increasing polarization of the material according to (P2). The actuator unit and drive device of this application can be particularly advantageously used to drive movement of the device in the nanoscale range.

[0027] To induce movement or shape changes in the drive device of this application, or to set the state of the drive device, corresponding setpoint specifications need to be generated. To generate these setpoint specifications, an advanced control function, such as a control device, can be provided. This control device can generate or determine control commands for devices that take precedence over the setpoint device, and can be functionally connected to the setpoint device to transmit the control commands to it. The setpoint device, based on the control commands, determines the drive signals for each drive device in the drive device or group of drive devices, and provides the drive signals to the corresponding one or more drive devices. Alternatively, the setpoint device can also be functionally integrated into the advanced control function.

[0028] In this context, "movement of the drive mechanism" or "control state of the drive mechanism" refers to the movement or resulting position of the uppermost or last actuator (in the height direction RH relative to the corresponding drive mechanism 1) relative to the lowermost or first actuator. For example, in Figure 23 In the drive unit 1 shown, reference numeral "B1" is assigned to the lowest or first actuator, while in this... Figure 23 In the attached diagram, the reference numeral "B2" is assigned to either the highest or last actuator. Figure 23 The control state shown is illustrated by demonstrating the bending of the drive unit 1 about the Y-axis and the partial extension along the Z-axis, i.e., the extension achieved only by a portion of the actuator units.

[0029] As used herein, the term “control command” should be understood as a setpoint specification by which the desired or required movement of the drive unit, or the desired or required operating state of the drive unit, is achieved.

[0030] As used herein, the term "along" relates to the directional descriptions mentioned herein, which may specifically refer to the orientation of a contour line or surface or component or structural component (e.g., an axis, axial line, or its central axis) relative to a reference direction or a reference axis, a section of path or tangent to the corresponding contour line or surface or direction, at an angle of up to 45 degrees, specifically up to 30 degrees, locally or segmentally, in the explicitly or implicitly specified direction of observation, in the corresponding reference direction or reference axis associated with the corresponding direction specification.

[0031] As used herein, the term "lateral" relates to the directional descriptions mentioned herein, which may specifically refer to the orientation of a contour line or surface or component or structural element (e.g., a shaft, axis, or its central axis) relative to a reference direction or a reference axis, a range of paths or tangents to the corresponding contour line or surface or direction, locally or segmentally deviating from the direction of observation, in an explicitly or implicitly specified direction, on a corresponding reference direction or reference axis associated with the corresponding directional specification, by 45 to 135 degrees, and preferably in the range of 67 to 113 degrees.

[0032] As used herein, “distance” specifically between two objects, two surfaces, or two reference points should be understood as the shortest distance or shortest span between these two objects, surfaces, or reference points, wherein the value of the shortest distance or shortest span is not zero, unless otherwise explicitly stated herein.

[0033] As used herein, the term “fixed” in relation to two component parts, and specifically to two contact points, contact surfaces, or reference sides of each component part, means that even if an external force is applied to at least one component, or if there is internal stress within at least one component, or if at least one component is moving, the two component parts, and specifically to the two contact points, contact surfaces, or reference sides, remain in a predetermined position relative to each other.

[0034] The "longitudinal direction" of a reference line, or another reference direction, such as specifically a central axis, a line passing through the center or centerline of at least one structural member or part, and specifically a guide rail, is particularly defined herein as: a connecting line along a defined or prescribed direction between the centroids of the respective minimum cross-sectional areas of the various structural members, or between two defined or prescribed ends. If the reference line may be curved or at least segmentally curved, the reference direction can generally be understood as a local longitudinal direction. However, the reference direction herein can also be understood as the direction of a straight reference line, wherein the position of the straight line used to determine the straight reference line relative to the curve results in the minimum total deviation or the minimum deviation area between these lines. The same principle applies when it is necessary to derive a straight reference line from a curve.

[0035] A “curved path” of a line, edge, or surface means that when viewed along a reference direction, the surface does not include any corners across its entire width perpendicular to that reference direction; that is, its path is differentiable.

[0036] For a plane, and specifically the “orientation” of a surface, it should be understood in this paper as the direction of the normal to the corresponding surface. If the surface in question is not a plane but, for example, a curved surface, the normal to the curved surface can be determined by the normal to a plane of the same area, provided that the position of the plane minimizes its total deviation relative to the curved surface.

[0037] Unless otherwise expressly defined, the values ​​mentioned in the embodiments of the methods according to this application are in each case understood as a range of values, the limits of which are defined by a deviation of + / - 10% relative to the respective values ​​mentioned.

[0038] The term “essentially” regarding a feature or value shall, in this document, be specifically understood to mean that the feature or value includes a deviation of 20% relative to the corresponding specified feature or its geometric property, or relative to the corresponding specified value, and, specifically, a deviation of 10%. Attached Figure Description

[0039] The present application is described below with reference to the accompanying drawings, wherein: Figure 1 A perspective view of one embodiment of the actuator unit of this application in an assembled state is shown. Figure 2 Showing according to Figure 1 A perspective view of one embodiment of the actuator unit described in this application, wherein the two actuators of the actuator unit are in the open state, to illustrate the arrangement and orientation of the excitation sub-electrodes. Figure 3 Showing Figure 1 Different perspective views of the first actuator in the actuator unit shown: one view facing the side of its first main actuator, and another view facing the side of its second main actuator. Figure 4 This is a perspective view of one embodiment of the drive device of this application, which consists of four actuator units, each employing... Figure 1 and Figure 2 The implementation scheme shown, Figure 5 According to Figure 4 The top view of the drive device implementation scheme shown. Figure 6 According to Figure 4 An exploded perspective view of the proposed drive device implementation scheme. Figure 7 This is a perspective view of another embodiment of the actuator unit according to this application. Figure 8 According to Figure 7 The top view of the actuator unit implementation shown. Figure 9 for Figure 7 and Figure 8 The diagram shows a top view of two actuators in the actuator unit, illustrating one side of each actuator with two excitation sub-electrodes, which are opposite each other in the assembled state of the actuator unit. Figure 10 for Figure 7 and Figure 8 The diagram shows a top view of one of the actuators in the actuator unit, illustrating the side of the actuator with the collecting electrode. Figure 11 An exploded perspective view of another embodiment of the drive device of this application is shown, which consists of four actuator units. Figure 12 for Figure 11 The image shows a top view of two actuators in one of the actuator units. Each actuator unit has two excitation sub-electrodes on its side, which are opposite each other in the assembled state. Figure 13 for Figure 11 The diagram shows a top view of two actuators in another actuator unit, where two excitation sub-electrodes are provided on each side of the actuator unit, and these electrodes are opposite each other in the assembled state. Figure 14 According to Figure 11 Top view of the drive unit Figure 15 This is a perspective view of another embodiment of the drive device of this application, which can be regarded as Figure 11 A variant of the drive unit.

[0040] Figure 16 This is a perspective view of another embodiment of the drive device of this application. Figure 17 It is based on Figure 16 Top view of the drive unit Figure 18 This is a perspective view of another embodiment of the driving unit of this application. Figure 19 yes Figure 18 The image shows a top view of the two actuators of the actuator unit, with four excitation sub-electrodes shown on the side of the actuator unit. These electrodes are positioned opposite each other in the assembled state of the actuator unit. Figure 20 This is a perspective view of another embodiment of the drive device of this application. Figure 21 It is by Figure 20A perspective view of another embodiment of the drive device of this application, formed by two drive devices. Figure 22 It is by Figure 20 A perspective view of another embodiment of the drive device of this application, formed by the four drive units. Figure 23 yes Figure 22 A schematic side view of the drive unit in a deformed state. Figure 24 It consists of nine Figure 22 The diagram shows a perspective view of an embodiment of the drive unit assembly of this application formed by the drive unit. Figure 25 An implementation scheme of the drive system of this application is shown, including Figure 4 The present application shows a drive device and an electrical control device for controlling the drive device. Figure 26 An implementation scheme of the drive system of this application is shown, including Figure 4 The present application shows a drive device and another electrical control device for controlling the drive device. Figure 27 An implementation scheme of the drive system of this application is shown, including Figure 4 The present application shows a drive device and another electrical control device for controlling the drive device. Figure 28 An implementation scheme of the drive system of this application is shown, including Figure 4 The present application shows a drive device and another electrical control device for controlling the drive device. Figure 29 An implementation scheme of the drive system of this application is shown, including Figure 4 The present application shows a drive device and another electrical control device for controlling the drive device. Figure 30 This application is for activation Figure 4 The diagram shows the instruction allocation for the actuator unit of the drive device. Figure 31 This application is for activation Figure 4 The diagram shows another instruction assignment for the actuator unit of the drive device. Figure 32 This application is for activation based on Figure 4 A schematic diagram of another instruction assignment for the actuator unit of the drive device shown.

[0041] Detailed Implementation Plan The actuator unit 1 of this application is intended for use in a drive device A, and includes a first actuator A1 and a second actuator A2.

[0042] Figure 1 and Figure 2 The embodiments of the actuator unit 1 of this application and their variations shown below will be described in detail.

[0043] The first actuator A1 is generally plate-shaped and, due to its design configuration, defines a first main side surface S11 and a second main side surface S12, which define two sides facing each other relative to the first actuator A1. The first actuator A1 includes a first deformable body 30 that can be deformed by voltage, defined by a first main surface 31 and a second main surface 51 disposed opposite to the first main surface 31, wherein the two main surfaces 31, 51 are spaced apart by a thickness T1 extending along the thickness direction or reference direction RT1 of the first deformable body 30. The main surfaces 31, 51 of the first actuator A1 are oriented along the thickness direction RT1 and connected to each other by a circumferential surface 34 extending along the thickness direction RT1 and surrounding the outer contour. The direction of the thickness direction or reference direction RT1 is defined herein as such that it has the orientation of the first actuator main side surface S11, or the orientation of an intermediate plane defined by the first main surface 31 and the second main surface 51; or such that it extends along the orientation of that intermediate plane.

[0044] The first excitation electrode assembly E11 includes a first excitation electrode E111 and a second excitation electrode E112, disposed on the first actuator main side surface S11 of the first actuator A1 and the first main surface 31 of the first deformable body 30. The first main surface 31 includes: a first contact surface 31b on which the first excitation electrode E111 is located; and a second contact surface 31c on which the second excitation electrode E112 is located. The first excitation electrode E111 and the second excitation electrode E112 are generally arranged laterally and are opposite to each other relative to the first axis A11. Generally, i.e., any embodiment of the actuator unit 1 or drive device according to this application, in addition to all other features provided according to this application in the corresponding feature combination described herein, may include the first excitation electrode E111 and the second excitation electrode E112, which have different shapes and / or surface areas relative to each other. Figure 1 and Figure 2 As shown, the embodiment of the actuator unit 1 of this application is designed such that the first excitation electrode E111 and the second excitation electrode E112 have the same geometry, and the first axis A11 is the first axis of symmetry, such that the excitation electrodes E111 and E112 are symmetrically arranged with respect to the first axis of symmetry A11. Figure 2 In the diagram, excitation electrodes E111 and E112 are both indicated by shaded lines. The excitation electrodes E111 and E112 are spaced apart by a distance D11 along the first axis of symmetry A11, such that the excitation electrodes E111 and E112 are electrically isolated from each other. According to this application... Figure 1 and Figure 2The embodiment of the actuator unit 1 shown is designed such that the first main surface 31 of the first deformable 30 includes a circumferential or substantially circumferential edge region 33, which specifically serves as an insulating surface, defined by a circumferential edge line 39 and a circumferential surface 34, and defines the inner surface 31i of the first main surface 31. The circumferential edge line 39, in the illustrated embodiment, may be formed as a single edge line, or it may be considered a virtual line if the circumferential surface 34 and the circumferential edge region 33 are merged together by curved surfaces. The circumferential edge region 33 may be implemented as part of the first main surface 31 of the first deformable 30, and this region may be specifically constructed as a plane or a curved surface. Alternatively, the circumferential edge region 33 may be separated from a planar extension of a region including support surfaces 31b, 31c (on which excitation electrodes E111, E112 are located), such that the circumferential edge region 33 is formed as a protrusion or platform relative to these contact surfaces 31b, 31c. The first main surface 31, and specifically, the support surfaces 31b, 31c, may be flat or curved, such that the edge region 33 is configured to be offset in the thickness direction RT1 relative to the center height of the first main surface 31 or the support surfaces 31b, 31c. Alternatively, or with respect to the circumference of the first main surface 31, the edge region 33 may be formed only in at least one block.

[0045] Typically, the excitation electrodes E111 and E112 can be implemented as flat plates or sheets, or applied as coatings to the respective support surfaces 31b and 31c.

[0046] Figure 1 and Figure 2 The illustrated embodiment of the actuator unit 1 of this application depicts a first actuator A1 having a first axis of symmetry A11 and a spacer region 32 of a first main surface 31 defined by the axis, and specifically, for example, an isolation surface defined by the spacer region, in each case extending parallel to or, optionally, generally along two surface blocks 35, 36 of a circumferential surface 34, which are parallel to each other and generally extend along each other. The surface blocks 35, 36 are connected at their aligned ends by corresponding surface blocks 37, 38 of the circumferential surface 34, which, in the illustrated embodiment, are parallel to each other and generally extend along each other.

[0047] Optionally, each of the excitation electrodes E111 and E112 may include: a deformation region 41 or 42, in which the first deformable body 30 on the corresponding excitation electrode E111 or E112 will deform when the corresponding electrical excitation is performed; and a connection region 43 or 44 for forming an electrical contact with the corresponding excitation electrode, through which the corresponding excitation electrode E111 or E112 extends from its respective deformation region 41 and 42 to the circumferential edge line 39, or extends to a certain distance from the circumferential edge line 39.

[0048] like Figure 1 and Figure 2 The variant 30 of the actuator unit 1 embodiment shown in this application includes two connecting regions 43 and 44, which extend from their respective deformable regions 41 and 42, and terminate at the edge of the first deformable 30 extending laterally to the first axis of symmetry A11, specifically at the edge line 39. Alternatively, the connecting regions 43 and 44 may be designed such that they terminate at a distance from the circumferential edge line 39 or at a distance from the surface block 37.

[0049] When the excitation electrodes E111 and E112 on the side S11 of the first main actuator have connection regions 43 and 44, as follows: Figures 1 to 3 As shown, the edge region 33, which is specifically used for electrical insulation, may be interrupted only within the small interval between the connecting regions 43 and 44, wherein the remainder of the edge region 33 is implemented as a substantially circumferential edge region 33.

[0050] The second main side surface S12 of the first actuator A1 is provided with a reference electrode E12 or a common electrode, which is located on the second main surface 51 of the first deformable body 30 of the first actuator 1.

[0051] The reference electrode E12 of the first actuator A1 is located on the support region of the first deformable body 30 and includes a deformable region 52, specifically in the thickness direction RT1, which can be a surface extending centrally on the main side surface S12 of the second actuator. The support region of the reference electrode E12, at least within a block, is defined by an outer circumferential or substantially circumferential edge region 53 of the second main surface 51, which specifically serves as an insulating surface. The edge region 53 is defined by a circumferential edge line 59 and a circumferential surface 34; in the illustrated embodiment, this circumferential edge line can be formed as a single edge line, or it can be considered as a virtual line if the circumferential surface 34 and the circumferential edge region 53 are merged together by a curved surface. The circumferential edge region 53 can be implemented as part of the second main surface 51 of the first deformable body 30, specifically, the surface is flat or curved. Alternatively, the circumferential edge region 53 can be offset from the plane of the region of the support surface where the reference electrode E12 is located, such that the circumferential edge region 33 is formed as a protrusion or step relative to the support surface.

[0052] Optionally, the reference electrode E12 of the first actuator A1 may include: a deformation region 52 in which, as expected, a first deformable body 30 on which the corresponding reference electrode E12 is located deforms when a corresponding electrical excitation is performed; and at least one connection region through which the reference electrode E12 extends from its deformation region 52 to a circumferential edge line 59, or to a distance from the circumferential edge line 39. Figure 1 and Figure 2 The embodiment of the actuator unit 1 according to this application shown includes four connection regions 55, 56, 57, and 58. Each of these connection regions 55, 56, 57, and 58 extends from the deformable region 52 to one of the surface blocks 35, 36, 37, and 38 of the circumferential surface 34, and / or reaches the edge line 59, and / or reaches a certain distance from the corresponding surface block 35, 36, 37, and 38, and / or extends beyond the edge line 59. Figure 1 and Figure 2 The connection regions 55, 56, 57 and 58 in the embodiment of the actuator unit 1 according to this application shown extend to the corresponding surface blocks 35, 36, 37 or 38 and extend to the edge line 59.

[0053] When the reference electrode E12 on the main side S12 of the second actuator includes at least one of the connection regions 55, 56, 57, and 58, as Figures 1 to 3 As shown, the edge region 53 may be interrupted only in the regions of each connecting region, such that the edge region 53 is implemented as a substantially circumferential edge region 53.

[0054] Typically, the reference electrode E12 can be configured such that it includes only one connection region or more than one connection region. Preferably, the number of connection regions of the reference electrode E12 is equal to the total number of all excitation electrodes of the actuator unit 1, or at least equal to the total number of all excitation electrodes of the actuator unit 1.

[0055] Figure 1 and Figure 2 The second actuator A2 of the embodiment of actuator unit 1 shown in this application, and Figure 1 and Figure 2 The first actuator A1 of the illustrated embodiment is the same and is described below in a similar manner to the description of the first actuator A1: The second actuator A2 is generally plate-shaped and, due to its design configuration, defines a first main side surface S21 and a second main side surface S22, which define two sides facing each other relative to the second actuator A2. The second actuator A2 includes a second deformable body 60 that can be deformed by voltage, defined by a first main surface 61 and a second main surface 81 opposite to the second main surface 81, wherein the two main surfaces 61, 81 are spaced apart by a thickness T2 extending along a second thickness direction or a second reference direction RT2 of the second deformable body 60. The main surfaces 61, 81 of the second actuator A2 are oriented along the thickness direction RT2 and connected to each other by a circumferential surface 64 extending along the thickness direction RT2 and surrounding the outer contour. The direction of the reference direction RT2 is defined herein as such that it has the orientation of the second actuator main side surface S11, or the orientation of an intermediate plane defined by the first main surface 61 and the second main surface 81; or it extends along the orientation of that intermediate plane.

[0056] The first excitation electrode assembly E21 includes a first excitation electrode E211 and a second excitation electrode E212, disposed on the second actuator main side surface S21 of the second actuator A2 and on the first main surface 61 of the second deformable body 60. The first main surface 61 of the second deformable body 60 includes: a first contact surface 61b on which the first excitation electrode E211 is located; and a second contact surface 61c on which the second excitation electrode E212 is located. The first excitation electrode E211 and the second excitation electrode E212 are generally arranged laterally and are opposite to each other relative to the second axis A21. Generally, i.e., any embodiment of the actuator unit 1 or drive device according to this application, in addition to all other features provided according to this application in the corresponding feature combination described herein, may include the first excitation electrode E211 and the second excitation electrode E212, which have different shapes and / or surface areas relative to each other. Figure 1 and Figure 2As shown, the embodiment of actuator unit 1 in this application is designed such that the first excitation electrode E211 and the second excitation electrode E212 have the same geometry, and the second axis A21 is the first axis of symmetry, such that the excitation electrodes E211 and E212 are symmetrically arranged with respect to the first axis of symmetry A21. Figure 2 In the diagram, excitation electrodes E211 and E212 are both represented by shaded lines. The excitation electrodes E211 and E212 are separated by a distance D21 along the first axis of symmetry A21, thereby electrically isolating the excitation electrodes E211 and E212 from each other.

[0057] According to this application Figure 1 and Figure 2 The embodiment of the actuator unit 1 shown is designed such that the first main surface 61 of the second deformable 60 includes a circumferential or substantially circumferential edge region 63, which specifically serves as an insulating surface, defined by a circumferential edge line 69 and a circumferential surface 64, and which defines the inner surface 61i of the first main surface 61. The circumferential edge line 69, in the illustrated embodiment, may be formed as a single edge line, or it may be considered a virtual line if the circumferential surface 64 and the circumferential edge region 63 are merged together by curved surfaces. The circumferential edge region 63 may be implemented as part of the first main surface 61 of the first deformable 60, specifically configured as a plane or a curved surface. Alternatively, the circumferential edge region 63 may be separated from a planar extension of the region including the support surfaces 61b, 61c where the excitation electrodes E211, E212 are located, such that the circumferential edge region 63 is formed as a protrusion or platform relative to these contact surfaces 61b, 61c. The first main surface 61, and specifically, the support surfaces 61b, 61c, may be flat or curved, such that the edge region 63 is configured to be offset in the thickness direction RT2 relative to the center height of the first main surface 61 or the support surfaces 61b, 61c. Alternatively, or with respect to the circumference of the first main surface 61, the edge region 63 may be formed only within at least one block.

[0058] Typically, the excitation electrodes E211 and E212 can be implemented as plates or sheets, or applied as coatings to the respective support surfaces 61b and 61c.

[0059] Figure 1 and Figure 2An embodiment of the actuator unit 1 according to this application is shown. A second actuator A2 is described, having a second axis of symmetry A21 and a spacer region 62 of a first main surface 61 defined by this axis, and specifically, for example, a groove defined by the spacer region, in each case extending parallel to or, optionally, generally along two surface blocks 65, 66 of a circumferential surface 64, which are parallel to each other and generally extend along each other. The surface blocks 65, 66 are connected at their aligned ends by corresponding surface blocks 67, 68 of the circumferential surface 64, which, in the illustrated embodiment, are parallel to each other and generally extend along each other. Figure 1 and Figure 2 The embodiment of actuator unit 1 according to this application shown illustrates actuators A1 and A2 with deformable bodies 30 and 60, which are rectangular or cubic in shape when viewed from reference directions RT1 and RT2. Their axes of symmetry A11 and A12 extend centrally through opposing surface blocks 37 and 38 and 67 and 68, respectively; that is, when viewed from the height direction RH, they extend centrally through opposing side edges. Optionally, each of the excitation electrodes E211 and E212 may include: a deformation region 71 or 72, wherein, as intended, when the corresponding electrical excitation is applied, a second deformable body 60 on which the corresponding excitation electrode E211 or E212 rests may deform; and a connecting region 73 or 74 through which the corresponding excitation electrodes E211 and E212 extend from their respective deformation regions 71 and 72 to the circumferential edge line 69, or to a distance from the circumferential edge line 69, respectively.

[0060] like Figure 1 and Figure 2 The variant 60 of the actuator unit 1 embodiment shown in this application includes two connecting regions 73 and 74, which extend parallel to each other from their respective variant regions 71 and 72, and terminate at the edge of the second variant 60 extending laterally to the second axis of symmetry A21, specifically at the edge line 69. Alternatively, the connecting regions 73 and 74 may be designed such that they terminate at a distance from the circumferential edge line 69, or at a distance from the surface block 67.

[0061] When the excitation electrodes E211 and E212 on the main side surface S21 of the second actuator include connection regions 73 and 74, the edge region 63, as... Figures 1 to 3 As shown, the edge region 63 can be interrupted only within the area of ​​the connecting regions 73 and 74, such that the edge region 63 is implemented as a substantially circumferential edge region 63.

[0062] A reference electrode E22 or a common electrode is provided on the second main side surface S22 of the second actuator A2, which is located on the second main surface 81 of the second deformable body 60 of the second actuator 2.

[0063] The reference electrode E22 of the second actuator A1 is located on the support region of the second deformable body 60 and includes a deformable region 82, specifically in the thickness direction RT1, which can be a surface extending centrally on the main side surface S22 of the second actuator. The support region of the reference electrode E22, at least within a block, is defined by an outer circumferential or substantially circumferential edge region 83 of the main surface 81 of the second actuator, which specifically serves as an insulating surface. The edge region 83 is defined by a circumferential edge line 89 and a circumferential surface 64; in the illustrated embodiment, the circumferential edge line can be formed as a real edge line, or it can be formed as a virtual line if the circumferential surface 64 and the circumferential edge region 83 are merged together by a curved surface. The circumferential edge region 83 can be implemented as part of the second main surface 81 of the second deformable body 60, specifically as a flat or curved surface. Alternatively, the circumferential edge region 83 may be offset from the plane of the support surface where the reference electrode E22 is located, such that the circumferential edge region 63 is formed as a protrusion or step relative to the support surface.

[0064] Optionally, the reference electrode E22 of the second actuator A2 may include: a deformation region 82 in which, as expected, a second deformable body 60 on which the corresponding reference electrode E22 rests deforms when a corresponding electrical excitation is performed; and at least one connection region through which the reference electrode E22 extends from its deformation region 82 to a circumferential edge line 89, or to a distance from the circumferential edge line 69. Figure 1 and Figure 2 The embodiment of the actuator unit 1 according to this application shown includes four connecting regions 85, 86, 87 and 88, which extend from the deformable region 82 to one of the surface blocks 65, 66, 67, 68 of the circumferential surface 64, and / or reach the edge line 89, and / or reach a certain distance from the corresponding surface block 65, 66, 67, 68, and / or extend beyond the edge line 89. Figure 1 and Figure 2 The connection regions 85, 86, 87 and 88 in the embodiment of the actuator unit 1 according to this application shown extend to the corresponding surface blocks 65, 66, 67 or 68 and extend to the edge line 59.

[0065] When the reference electrode E22 on the main side surface S22 of the second actuator includes at least one of the connection regions 85, 86, 87, and 88, such as Figures 1 to 3As shown, the edge region 83 may be interrupted only in the regions of each connecting region, such that the edge region 83 is implemented as a substantially circumferential edge region 83.

[0066] Typically, the reference electrode E22 can be configured such that it includes only one or more connection regions. Preferably, the number of connection regions of the reference electrode E22 is equal to the total number of all excitation electrodes of the actuator unit 1, or at least equal to the total number of all excitation electrodes of the actuator unit 1.

[0067] According to this application, the actuator unit 1 can be configured to have any combination of the features described herein, such that the first actuator A1 and the second actuator A2 are arranged to overlap each other, in such a way that the first excitation electrode assembly E11 and the second excitation electrode assembly E21 are substantially identical and overlap each other when viewed in the thickness directions RT1, RT2.

[0068] According to this application, the actuator unit 1 can be configured to have any combination of the features described herein, such that the respective excitation electrodes of the excitation electrode assemblies E11 and E21 are arranged symmetrically with respect to the axes of symmetry A11 and A21.

[0069] In this context, 1 can be configured according to any combination of features described herein, specifically such that the first deformable 30 and the second deformable 60 are each substantially rectangular in shape; wherein the first excitation electrode assembly E11 and the second excitation electrode assembly E21 each include at least two excitation electrodes E111, E112, E211, E212, wherein in each case, the two excitation electrodes E111, E112, E211, E212 are respectively arranged symmetrically with respect to an axis of symmetry A11, A21, and wherein the axes of symmetry A11, A21 of the corresponding first main surfaces 31, 51, 61, 81 are their centerlines.

[0070] Optionally, 1 may be configured with, in addition to each combination of features described herein, specifically, a first deformable 30 and a second deformable 60, both of which are substantially rectangular in shape, wherein the first excitation electrode assembly E11 and the second excitation electrode assembly E21 each include at least two excitation electrodes E111, E112, E211, E212, wherein in each case, the two excitation electrodes E111, E112, E211, E212 are respectively arranged symmetrically with respect to an axis of symmetry A11, A21, and wherein the axes of symmetry A11, A21 are respectively the diagonals of their respective first main surfaces 31, 51, 61, 81.

[0071] According to this application, the actuator unit 1 can be configured with any combination of features described herein, such that the first excitation electrode assembly E11 and the second excitation electrode assembly E21 are arranged symmetrically with respect to a straight plane that is transverse to the thickness direction RT1 of the first deformable body D1 and transverse to the thickness direction RT2 of the second deformable body D2.

[0072] According to this application, the actuator unit 1 can be configured with any combination of features described herein, such that the first actuator A1 and the second actuator A2 are disposed relative to each other, such that their thickness directions RT1 and RT2 extend along each other, such that the first excitation electrode assembly E11 and the second excitation electrode assembly E21 are disposed facing each other; and such that at least two of the respective opposing excitation electrodes E111, E112, E211, and E212 in the first excitation electrode assembly E11 and the second excitation electrode assembly E21 are in contact with each other. In this case, the blocks or the entire surfaces of the respective opposing excitation electrodes E111, E112, E211, and E212 can be in contact. Specifically, each of the respective opposing excitation electrodes E111, E112, E211, and E212 in the first excitation electrode assembly E11 and the second excitation electrode assembly E21 can be configured to be in contact with each other.

[0073] Alternatively, according to this application, the actuator unit 1 may be configured as each of the feature combinations described herein, such that the first excitation electrode assembly E11 and the second excitation electrode assembly E21 are arranged spaced apart from each other in their thickness directions RT1, RT2.

[0074] Figure 1 and Figure 2 The embodiment of the actuator unit 1 shown includes a first deformable body 30 and a second deformable body 60, each of which is cubic in shape. Alternatively, however, it may have other shapes depending on the specific intended application, for example, a circular or elliptical base when viewed along the respective reference directions RT1, RT2, or a polyhedral shape.

[0075] According to this application, specifically, in the actuator unit (1): (a) the material of the first deformable body 30 and (b) the material of the second deformable body (60) are defined such that one of the materials (a) and (b) is implemented according to one of the following definitions (P1) and (P2); or both materials (a) and (b) are implemented according to one of the following definitions (P1) and (P2); or material (a) is implemented according to one of the following definitions (P1) and (P2), while material (b) is implemented according to another of the following definitions (P1) and (P2).

[0076] According to this application, specifically, an actuator unit 1 may be provided, wherein all variations 30, 60 of the actuator unit 1 are implemented according to the definition (P1) mentioned herein, or all are implemented according to the definition (P2) mentioned herein. Preferably, however, an actuator unit 1 is provided in which one variation is implemented according to the definition (P1) mentioned herein, and another variation is implemented according to the definition (P2) mentioned herein. It is also conceivable that an actuator unit 1 is provided in which one variation is implemented according to the definition (P1) mentioned herein, and another variation is wholly or substantially wholly unpolarized.

[0077] According to this application, the actuator unit 1 is defined as an assembly consisting of the first actuator A1 and the second actuator A2. This arrangement is defined such that the first actuator A1 and the second actuator A2 are arranged to overlap each other. (K1) such that the first axis of symmetry A11 and the second axis of symmetry A21 extend along each other, and (K2) such that the first thickness direction or reference direction RT1 of the first actuator A1 and the second thickness direction or reference direction RT2 of the second actuator A2 are opposite to each other, and specifically, they can extend parallel to each other, and thus may overlap each other.

[0078] Preferably, one or more of the following criteria should be met: (K3) When viewed from reference direction RT1 or reference direction RT2, the first excitation electrode assembly E11 of the first actuator A1 and the second excitation electrode assembly E21 of the second actuator A2 are identical in size and shape. (K4) The excitation electrodes of the first actuator 1 and the second actuator 2, i.e., according to Figures 1 to 3 In the embodiment, the excitation electrodes E111, E112, E211, and E212 are formed symmetrically to each other. (K5) When viewed from reference direction RT1 or reference direction RT2, the excitation electrode E111 of the first actuator 1 and the excitation electrode E211 of the second actuator 2 are superimposed on each other in a manner that they completely overlap each other. (K6) When viewed in reference direction RT1 or reference direction RT2, the excitation electrode E112 of the first actuator 1 and the excitation electrode E212 of the second actuator 2 are configured such that they completely overlap each other.

[0079] To construct a drive device A including at least one actuator unit 1, the actuator unit 1 includes: an excitation electrode connection portion CE, through which excitation electrodes can be electrically connected to corresponding excitation electrode control lines (not shown in the figure); and a reference electrode connection portion CR, through which reference electrodes can be electrically connected to at least one reference electrode bus (not shown in the figure). The connection portions CR are arranged such that, when viewed along the thickness direction or reference direction, they at least partially overlap with the corresponding electrodes, and thus overlap with or contact the deformed regions and / or connection regions of the corresponding electrodes by mating joints, and protrude beyond the actuator unit 1, so that they can be electrically connected to their respective control lines extending outside their respective actuator units (not shown in the figure).

[0080] For the drive device described herein, a height direction RH is typically defined, which extends along or in the thickness direction RT1 and along the thickness direction RT2. The orientation of the height direction RH is defined such that, in the corresponding drive device 1, for example in Figure 1 , Figure 4 , Figure 23 and Figure 24 In the description, the direction extends from the lowest or first actuator to the highest or last actuator, wherein the term "first actuator" specifically refers to an actuator fixed to the bearing assembly, while the term "last actuator" refers to an actuator coupled or connected to a component to be moved by the operation of the corresponding drive device 1, such that during operation, the "last actuator" performs controlled or desired movement, i.e., output movement. Figure 24 An exemplary bearing assembly is schematically illustrated, denoted by reference numeral L in the figure. Therefore, the “first actuator” is also referred to herein as a “base actuator.” Similarly, the “last actuator” is also referred to herein as an output actuator, relative to the controlled movement or controlled state of the drive device according to this application.

[0081] The movement of the component to be moved, caused by the output movement of the output actuator of the corresponding drive device, is also referred to herein as the output control movement of the component to be moved, and the result is the output control state. The component to be moved can be a wheel or a rotor.

[0082] For the drive device A described herein, a coordinate system is defined whose X and Y axes span the central plane of the drive unit including the base actuator, wherein the central plane is the plane of symmetry of each actuator in the drive unit. Specifically, the origin of this coordinate system can be the center point of the actuator unit to which the base actuator belongs, wherein the center point lies on the central plane. The Z-axis of the coordinate system of drive device A extends along direction RT1, or along its height direction RH when the corresponding drive device 1 is in a neutral state, i.e., an unactuated state. In this context, the height direction RH can also be a centerline in the actuated state. Typically, the X-axis can coincide with the centerline of the base actuator. When the base actuator includes two excitation electrodes arranged opposite each other, the X-axis preferably coincides with the axis of symmetry A11 of the two excitation electrodes. When the base actuator includes two pairs of excitation electrodes arranged symmetrically opposite each other, the X-axis preferably coincides with the axis of symmetry A11 of each of the two pairs of excitation electrodes.

[0083] according to Figure 1 and Figure 2 The embodiment of the drive device A of this application shown, denoted by reference numeral "200", has the following features in this respect: (L1) The excitation electrode connection portion CE1 is located between the connection region 43 of the first excitation electrode E111 of the first actuator A1 and the connection region 73 of the first excitation electrode E211 of the second actuator A2, and is in contact with these two connection regions. (L2) The excitation electrode connection portion CE2 is located between the connection region 44 of the second excitation electrode E112 of the first actuator A1 and the connection region 74 of the second excitation electrode E212 of the second actuator A2, and is in contact with these two connection regions. (L3) The reference electrode connection portion CR is in contact with the connection areas 55, 56, 57, and 58 of the reference electrode E12 of the first actuator A1. (L4) The reference electrode connection portion CR is in contact with the connection areas 55, 56, 57, and 58 of the reference electrode E22 of the second actuator A2.

[0084] Each connection portion may be attached to at least one variant of the actuator unit, or to between two variants of the actuator unit. Alternatively or additionally, each connection portion may also be attached to a corresponding electrode. Each connection portion may be implemented as a separate part or component, specifically separate from the corresponding excitation electrode or reference electrode; the connection portion is arranged on the corresponding electrode such that, when viewed in the height direction RH, the connection portion partially covers the connection area of ​​the corresponding electrode, or the connection portion forms a mating joint with the connection area of ​​the corresponding electrode. Alternatively, the connection portion may also be implemented as an end block of the connection area of ​​the corresponding electrode.

[0085] Specifically, each connecting component of the drive device A can be provided with an outer end block that, when viewed in the height direction RH, extends beyond the outer peripheral surfaces 34, 64 of the deformable bodies 30, 60. Thus, when the connecting portions associated with different electrodes are placed overlapping each other when viewed in the height direction RH, the different electrodes can be electrically connected via connecting lines extending along the height direction RH and driven by the same signal. This allows for relatively simple electrical connections even for drive devices with a large number of actuator units.

[0086] Typically, the drive device A according to this application includes an actuator unit 1, which includes a first actuator A1 and a second actuator A2. This drive device performs the following movements or shape changes of the drive device A: (D1) Movement or shape change in the height direction RH (i.e., along the Z-axis of each drive unit A), i.e., expansion and contraction of actuator unit 1. (D2) The first actuator A1 and the second actuator A2 are tilted relative to each other about a first tilting axis, and thus cause the drive device A to bend about a first bending axis, wherein the tilt or bending occurs about a first axis of symmetry A11 and a second axis of symmetry A21, i.e., for example, about the X-axis of the respective drive device A.

[0087] By arranging a second actuator unit 2 in the height direction RH of the first actuator unit 1 to form a drive device A, such that the axes of symmetry A11 and A12 of the first actuator unit 1 extend laterally or vertically relative to the axes of symmetry A21 and A22 of the second actuator unit 2, the following shape changes of the drive device A can be achieved in the following ways: (D1) The movement or shape change of the corresponding drive device A on the Z-axis. (D3) The first actuator A1 and the second actuator A2 are tilted relative to each other about a second tilting axis, and thus cause the drive device A to bend about a second bending axis, wherein the tilt or bending occurs about the first axis of symmetry A11 and the second axis of symmetry A21 of the second actuator unit 1, wherein these axes of symmetry A11, A12 are transverse to or perpendicular to the axes of symmetry A11, A12 of the first actuator unit 1 according to (D2), for example, about the Y-axis of the respective drive device A.

[0088] According to the arrangement of the two actuator units 1, under the corresponding drive, movement or shape change along the Z-axis can be realized according to (D1), (D2), and (D3), as well as other tilting movements; that is, in general, the corresponding drive device A can bend around the X-axis and Y-axis.

[0089] When the drive device A is actuated accordingly according to the arrangement described above, these movements or shape changes according to (D1), (D2), and (D3) can be achieved by deformable bodies 30 and 60 according to the definition of (P1) herein, i.e., by deformable bodies 30 and 60 each including a polarization change block, and by deformable bodies 30 and 60 according to the definition of (P2) herein, i.e., by deformable bodies 30 and 60 each including a partial polarization change block.

[0090] In the accompanying drawings, according to the definition given herein (P1), the connection portion CE connected to the excitation electrode attached to the deformable bodies 30 and 60 is designated as "active"; according to the definition given herein (P2), the connection portion CE connected to the excitation electrode attached to the deformable bodies 30 and 60 is designated as "semi-active". According to these designations, the suffixes "X1", "X2", "Y1", and "Y2" indicate the initial movement of the corresponding actuator unit when the corresponding excitation electrode is excited individually and independently. The following designations are defined in detail herein: The designation “active X1” or “semi-active X1” means that the excitation of the relevant excitation electrode causes the output actuator to tilt about the X-axis and, by definition, move in a first rotational direction (i.e., clockwise).

[0091] The designation "active X2" or "semi-active X2" means that the excitation of the relevant excitation electrode causes the output actuator to tilt around the X-axis. Specifically, its rotation direction is opposite to the rotation direction described in the definition of "X1" above, that is, in this example, it is in the counterclockwise direction.

[0092] For example, Figure 23 The drive unit A, in a set state, is shown, and its form is according to... Figures 1 to 3 A stack of 16 drive units 1, each drive unit including two actuators, all drive units forming a bend around the Y-axis, thereby drive unit A as a whole forming a bend around the Y-axis.

[0093] Another embodiment of the drive device A in this application is indicated by the reference numeral "200", as shown in the attached drawing. Figures 4 to 6 As shown. Figure 4 and Figure 6 As shown, the drive unit 200 consists of four drive units A, each configured to... Figures 1 to 3 This is achieved as shown. A separate actuator unit is located in... Figure 4 and Figure 6 The figures are also marked with reference numerals 201, 202, 203 and 204.

[0094] Specifically, the drive unit 200 may be implemented such that one or more of the following definitions are satisfied: (M1) In actuator units 201, 202, 203, and 204, at least one actuator unit includes only the deformable bodies 30 and 60 implemented according to definition (P1), while all other actuator units in actuator units 201, 202, 203, and 204 include only the deformable bodies 30 and 60 implemented according to definition (P2). (M2) In actuator units 201, 202, 203, 204, at least one actuator unit includes only the deformable bodies 30, 60 implemented according to definition (P2), while all other actuator units in actuator units 201, 202, 203, 204 have only the deformable bodies 30, 60 implemented according to definition (P1).

[0095] Preferably, Figures 4 to 6 The drive unit 200 shown is implemented according to one of the following definitions: (M3) Two actuator units, for example, two external actuator units 201, 204, comprising only deformable bodies 30, 60 implemented according to definition (P1), while all other actuator units in actuator units 201, 202, 203, 204 comprise only deformable bodies 30, 60 implemented according to definition (P2). (M4) Two actuator units, for example, two external actuator units 201, 204, include only deformable bodies 30, 60 implemented according to definition (P2), while all other actuator units 201, 202, 203, 204 have only deformable bodies 30, 60 implemented according to definition (P1). (M5) All actuator units include only the deformable bodies implemented according to definition (P2).

[0096] According to the embodiment of the drive device 200 of this application described herein, it includes a plurality of actuator units, such as Figures 4 to 6 The actuator units 201, 202, 203, and 204 shown, in addition to conforming to each of the aforementioned definitions (M1), (M2), (M3), and (M4), can also be implemented according to any of the following definitions: (M6) Actuator units 201, 202, 203 and 204 are arranged sequentially along the height direction RH. These units are rotated 90 degrees relative to each other about an axis extending along the height direction RH. The arrangement of each pair of actuator units is such that, when viewed in the height direction RH, the excitation electrodes of the first actuator 30 and the second actuator 60 substantially overlap each other and are arranged in a rotational manner.

[0097] In the drive unit 200 arranged according to definitions (M3), (M4), (M5) and (M6), by corresponding actuation, it is possible to achieve movement or shape change along the Z-axis that conforms to the definitions (D1), (D2) and (D3) of this document, as well as additional tilting movement, so that each drive unit A bends about the X-axis and Y-axis.

[0098] In this context, the actuator unit of the drive device 200 can be actuated in such a way that when the drive device A is actuated accordingly, (E1) such that, according to definition (P1), the deformable bodies 30 and 60, i.e., each deformable body 30 and 60, have a polarization change block, thereby performing the main deformation of the drive device 200. The purpose of this main deformation is to transmit it to the component to be moved, so that it moves according to controlled or required movement, i.e., movement or shape change such as length change or curvature change according to (D1), (D2), and (D3); and (E2) The excitation electrodes set on the deformable bodies 30, 60 with partially polarized change blocks according to definition (P2) are excited, so that the deformable bodies 30, 60 according to (P2) perform the movement or shape change according to (D1), (D2), (D3), such as length change or curvature change, for example, to suppress vibration and thus reduce noise in the output actuated movement of the movable part; or to correct the error of the output actuated movement or output actuation state in the movable part relative to the actuation command.

[0099] In accordance with (E2), it should be noted that the error correction of such output actuation movement or output actuation state can also be performed by appropriately controlling the deformable bodies 30 and 60 with polarized change blocks, as defined in (P1).

[0100] According to this application, the various types of drive devices described herein, such as Figures 4 to 6 The embodiments of the drive device 200 described herein, or more generally, the drive device comprising four actuator units and defined by at least one of (M1), (M2), (M3), (M4), (M5), may be arranged in a row along the Z direction, either front-to-back or overlapping each other, to form a stack of drive devices. Therefore, when these devices are driven accordingly, if in each case multiple actuator units are driven in the same direction to cause the drive device as a whole to perform a predetermined shape change, the effects described in (E1) and (E2) may be multiplied.

[0101] For example, Figure 20 A drive unit A is shown, consisting of two drive units 200, each drive unit being configured according to reference. Figures 4 to 6The described implementation scheme is implemented in which two drive units 200 are arranged one after the other in the Z direction, i.e. they overlap each other vertically, forming a stacked drive unit A consisting of eight actuator units 1.

[0102] Figure 21 A drive unit A is shown, consisting of four drive units 200, each drive unit being configured according to... Figures 4 to 6 The described implementation scheme is implemented in which two drive units 200 are arranged one after the other or overlapped one above the other in the Z direction, thereby forming a stack of 16 actuator units 1.

[0103] Figure 22 A drive unit A is shown, consisting of 10 drive units 200, each drive unit being configured according to... Figures 4 to 6 The described implementation scheme is implemented in which 10 drive units 200 are arranged in front of and behind or overlapped vertically in the Z direction to form a stack of 40 actuator units 1.

[0104] Figure 23 The diagram shows a drive unit A in the form of a stack of 16 drive units 1, the drive units being arranged according to... Figures 1 to 3 It is in the set state defined by bending around the Y-axis.

[0105] Figure 24 An embodiment of a drive device assembly according to this application is illustrated. Typically, the drive device assembly according to this application includes a plurality of drive devices A mounted on a support device L. Specifically, the base actuator of each drive device A may be fixed to the support device L. In this configuration, when each drive device A is in a neutral control state, i.e., not actuated or driven, the vertical directions RH of each drive device A extend along each other and, specifically, are substantially parallel to each other.

[0106] Figures 7 to 10 Another embodiment of the drive device A of this application is shown, which is indicated by reference numeral "300". The drive device 300 is composed of an actuator unit indicated by reference numeral 301.

[0107] This implementation of actuator unit 301 is similar to Figures 1 to 3 The embodiment of actuator unit 1 shown differs in that each actuator has a central through-hole. This embodiment is based on... Figures 1 to 3 The embodiment of actuator unit 1 shown is illustrated, and therefore the corresponding features are referred to by the same reference numerals.

[0108] In the actuator unit 301, the first deformable body 30 includes a first through hole 40, and the second deformable body 60 includes a second through hole 70; wherein the first through hole 40 and the second through hole 70 are coaxial.

[0109] According to this application Figures 7 to 10 The embodiment of the actuator unit 301 shown illustrates actuators A1 and A2 with rectangular deformable bodies 30 and 60. Because this embodiment demonstrates... Figures 1 to 3 The actuator unit 1 shown is characterized by the same reference numerals for the corresponding features. Their axes of symmetry A11 and A12 pass through the opposite surface blocks 37, 38 and 67, 68 at their centers, respectively; that is, when viewed from the height direction RH, they pass through the opposite side edges at their centers.

[0110] Figure 11 Another embodiment of the drive device A of this application is shown and is indicated by reference numeral "400". The drive device 400 consists of four drive devices 100, each drive device being configured according to... Figures 1 to 3 The implementation is shown. In Figure 11 In the figure, each individual actuator unit is specifically labeled with reference numerals 401, 402, 403, and 404. This embodiment of actuator units 401, 402, 403, and 404 is based on... Figures 1 to 3 The embodiment of actuator unit 1 shown is illustrated, and therefore corresponding features are referred to by the same reference numerals. This embodiment of actuator units 401, 402, 403, and 404 is similar to... Figures 1 to 3 The difference in the embodiment of actuator unit 1 shown is that each actuator has a central through-hole. Furthermore, this embodiment of actuator units 401, 402, 403, and 404 differs from... Figures 7 to 10 The difference between the embodiment of the actuator unit 301 shown is that the spacing regions 32 and 62 (in) Figures 7 to 10 The two surfaces, denoted as 432 and 462 respectively, extend diagonally through the first main surface 31 and 61 of the rectangular shape. Figure 12 Exemplary demonstration Figure 11 The actuator unit 402 in the middle, and Figure 13 Exemplary demonstration Figure 11 The actuator unit 404 is described above. Therefore, the excitation electrodes E111, E112 and E211, E212 are each substantially triangular in shape. These features may appear together with any other features provided herein according to this application in a corresponding combination of features in any embodiment of the actuator unit 1 or drive device of this application.

[0111] The actuator units 401, 402, 403, and 404 are designed such that the first excitation electrodes E111 and E211, and the second electrodes E112 and E212, each have the same geometric shape; simultaneously, the first axis A11 and the second axis A21 are both axes of symmetry, such that the excitation electrodes E111, E112 and E211, E212 are symmetrically arranged with respect to their respective axes of symmetry A11 and A21. Figure 12 and Figure 13 In the diagram, excitation electrodes E111, E112, E211, and E212 are all shown in shaded areas.

[0112] Since axes A11 and A12 are diagonal, the X-axis and Y-axis of the coordinate system are also diagonal.

[0113] The actuator units 401, 402, 403, and 404 of the drive device 400 are arranged according to definitions (M4) and (M5). Figure 11 middle: The designation "X1" indicates that the excitation electrode of each actuator unit can cause the drive device 400 to rotate around the X-axis in the first rotation direction, thus driving the deformation of the drive device 400. The designation "X2" indicates that the excitation electrodes of the respective actuator units used to deform the drive device 400 can cause the drive device 400 to rotate about the X coordinate in a second rotation direction opposite to the first rotation direction about the X coordinate. The designation "Y1" indicates that the excitation electrodes of the respective actuator units used to deform the drive device 400 can cause the drive device 400 to rotate about the Y-axis in a first rotational direction. The designation "Y2" indicates that the excitation electrodes of the respective actuator units used to deform the drive device 400 can cause the drive device 400 to rotate about the Y-axis in a second rotational direction opposite to the first rotational direction about the Y-axis. Typically, specifically, the drive device 400 can be implemented such that one or more of the following definitions (M1), (M2), (M3), (M4), (M5), (M6) are satisfied.

[0114] Figure 15 Another embodiment of the drive device A according to this application is shown, designated by reference numeral "500". The drive device 500 comprises four drive units. Each individual actuator unit... Figure 15 The actuator units 501, 502, 503, and 504 are respectively labeled 501, 502, 503, and 504 in the accompanying drawings. The implementation schemes for actuator units 501, 502, 503, and 504 are based on... Figures 11 to 14The implementation schemes of actuator units 401, 402, 403, and 404 shown differ in the arrangement and position of the connecting portions from those of the connecting portions of the drive device 500.

[0115] Figure 16 and Figure 17 Another embodiment of the drive device A of this application is shown, designated by reference numeral "600". The drive device 600 includes two drive units. Separate actuator units are located in... Figure 15 The actuator units 601 and 602 are respectively designated by reference numerals 601 and 602 in the accompanying drawings. The implementation schemes of actuator units 601 and 602 are based on... Figures 11 to 14 The implementation schemes of actuator units 401, 402, 403, and 404 shown differ in the arrangement and position of the connecting portions from those of the connecting portions of the drive device 500.

[0116] Figure 18 and Figure 19 Another embodiment of the drive device A according to this application is shown, designated by reference numeral "700", and it includes yet another embodiment of the actuator unit according to this application, designated by reference numeral 701. Figures 18 to 19 In the description, the features in actuator unit 701 are similar to Figures 1 to 3 The actuator unit 1 shown has similar or identical functions and uses the same reference numerals.

[0117] A first excitation electrode assembly E71 is provided on the first actuator main side surface S11 of the first actuator A1 and the first main surface 31 of the first deformable body 30. This assembly includes a first excitation electrode E711, a second excitation electrode E712, a third excitation electrode E713, and a fourth excitation electrode E714. On one hand, the first excitation electrode E711 and the second excitation electrode E712 are located on opposite sides of the first axis A11. On the other hand, the third excitation electrode E713 and the fourth excitation electrode E714 are located on opposite sides of the first axis A11. Furthermore, on one hand, the first excitation electrode E711 and the third excitation electrode E713 are located on opposite sides of the second axis A12. Similarly, the second excitation electrode E712 and the fourth electrode E714 are also located on opposite sides of the second axis A12.

[0118] The first excitation electrode assembly E81 includes a first excitation electrode E811, a second excitation electrode E812, a third excitation electrode E813, and a fourth excitation electrode E814. On one hand, the first excitation electrode E811 and the second excitation electrode E812 are located on opposite sides of a first axis A21, and on the other hand, the third excitation electrode E813 and the fourth excitation electrode E814 are located on opposite sides of the first axis A21. Furthermore, on one hand, the first excitation electrode E811 and the third electrode E813 are located on opposite sides of a second axis A22, and the second excitation electrode E812 and the fourth excitation electrode E814 are also located on opposite sides of the second axis A22.

[0119] Preferably, the first axis A11 and the second axis A12 located on the first main surface 31 of the first deformable body 30 are both axes of symmetry, and the first axis A21 and the second axis A22 located on the first main surface 61 of the second deformable body 60 are also axes of symmetry. Generally, that is, for each embodiment of the actuator unit 1 or drive device according to this application, if all other features provided according to this application in the feature combination described herein are simultaneously possessed, the excitation electrode on the first main surface 31 of the first deformable body 30 and the excitation electrode on the first main surface 61 of the second deformable body 60 may have different shapes and / or surface areas from each other.

[0120] The reference electrode or common electrode E12 of the first actuator A1, and the reference electrode or common electrode E22 of the second actuator A2, as follows: Figures 1 to 17 As shown in the implementation scheme, they are respectively disposed on the second main surface 51 of the first deformable body 30 and the second main surface 81 of the second deformable body 60, such as Figures 1 to 17 The implementation plan is shown in the document.

[0121] According to various embodiments of the actuator unit 1 or drive device of this application, the actuators 1 and 2 may typically have multiple reference electrodes or common electrodes on their respective sides S11, S22. In this case, the shape of these reference electrodes may be the same as the excitation electrodes of the respective actuators 1, 2. Furthermore, these embodiments may possess any other features separately described herein in combination of features.

[0122] This application also provides a "drive system AS", which includes: the drive device 1 of this application, and a control device G for controlling the drive device 1.

[0123] Figures 25 to 29 An implementation scheme of a drive system according to this application is shown, in order to Figure 4The driving device 1 shown is used as an example for explanation. The control device G includes a setpoint device G10 and an amplifier device G20. The setpoint device G10 calculates the drive signal for each excitation electrode of all actuators in each driving device 1 based on a setpoint specification regarding a predetermined target movement or target shape change of the driving device 1, and optionally also calculates the drive signal for at least one reference electrode of all actuators or at least one actuator in the corresponding driving device 1. The drive signal is transmitted to the amplifier device G20 through at least one drive signal line G10a. The at least one drive signal line G10a is electrically connected to the setpoint device G10 and the amplifier device G20.

[0124] An amplifier device G20 is functionally connected to the excitation electrode of the respective driving device 1 and, optionally, to at least one reference electrode, and converts driving signals into electrical excitation signals, which are transmitted to the respective excitation electrodes via at least one excitation signal line G20a. The amplifier device G20 includes at least one amplifier G21 and is electrically connected to the respective excitation electrode via the respective excitation signal line G20a. The electrical excitation signals are adapted to excite the excitation electrodes connected to the respective excitation signal lines G20a and to contribute accordingly to the realization of the respective target movements of the driving device 1.

[0125] To generate setpoint specifications, a higher-level control function can be provided for generating or determining control commands for a device superior to the setpoint device G10 (e.g., a control device), and functionally connected to the setpoint device G10 to transmit control commands to it. The setpoint device G10, based on the control commands, determines drive signals for corresponding electrodes of each drive device or drive device assembly and provides these drive signals to the corresponding one or more drive devices. Alternatively, the setpoint device G10 can also be functionally integrated into the higher-level control function.

[0126] like Figure 25 The exemplary control device G10 shown includes an amplifier G21 for each excitation electrode. Each amplifier G21 is electrically and functionally connected to both the control device G10 and the excitation electrode. Furthermore, as... Figure 25 As shown, it can also be configured such that each reference electrode of each actuator unit is connected to the control device G10 via an amplifier G21.

[0127] like Figure 26 The exemplary control device G shown is Figure 25The difference in the control device G10 is that the reference electrode of each actuator unit is not controlled by the control device G, but is kept at a constant reference voltage of 0 volts (GND). Any other positive or negative reference voltage may also be used.

[0128] like Figure 27 The exemplary control device G shown is Figure 26 The difference in the control device G is that the connection portion of the excitation electrode located on the deformable bodies 30 and 60 (which is labeled “semi-active” according to the definition in this document (P2)) is driven by a single amplifier G21, which is followed by a distribution circuit.

[0129] like Figure 28 The exemplary drive device G shown is with Figure 27 The difference in the driving device G is that the connection point of the reference electrode is driven by an amplifier G21, and a switch for selectively connecting the predetermined device G10 is provided after the amplifier.

[0130] like Figure 29 The exemplary control device G shown is Figure 28 The difference in the control device G is that a resistor R is provided on each excitation signal line G20a in order to promote faster discharge of the deformable bodies 30 and 60 according to the definition (P2) in this paper.

[0131] and Figure 27 , Figure 28 and Figure 29 Compared to the control device G shown, in each case, using fewer than four amplifiers to drive the variants 30 and 60 (labeled "active") conforming to the definition (P1) of this document may be advantageous by providing a switch or distribution circuit also connected to one or more amplifiers. This approach is particularly feasible when not all drive shafts need to be driven with different voltages simultaneously. For example, a different approach can be envisioned. Figure 27 The configuration shown involves one amplifier and four downstream distribution circuits or switches driving the semi-active deformable body, and another amplifier and four downstream distribution circuits or switches driving the active deformable body. Alternatively, it is conceivable to use more than one but fewer than four amplifiers and a corresponding number of switches to control the semi-active deformable body; while the active deformable body is controlled using four amplifiers without switches. Furthermore, it is conceivable to simultaneously use more than one but fewer than four amplifiers and a corresponding number of switches to control both the active and semi-active deformable bodies, thus allowing the number of amplifiers used in the semi-active and active regions to be different.

[0132] The various configurations of the control device G described above offer numerous control options. If, for example, no switches are provided, the electrodes of all active or semi-active deformables will be controlled simultaneously or sequentially. On the other hand, if, for example, only switches are provided and only one amplifier is equipped, the electrodes of the active or semi-active deformables will be driven sequentially when different voltages are applied to the electrodes; while when the same voltage is applied, the electrodes of the active or semi-active deformables will be driven simultaneously, i.e., the switches connected to the amplifiers will close simultaneously. If multiple amplifiers and multiple switches exist (and the amplifiers are connected to different switches), the electrodes of the semi-active or active deformables can be driven sequentially or simultaneously. If switches are provided but no resistors are provided, it may be advantageous to control the electrodes of the semi-active or active deformables sequentially or simultaneously during voltage application and to disconnect (i.e., interrupt contact) the selected switch. In this case, it is conceivable to set the amplifier voltage to 0 V before the switch is disconnected. With the above control methods, the corresponding deformable will remain energized and maintain its position for a short period.

[0133] When using a switch or distribution circuit, it is conceivable to even provide a resistor for the active deformable (i.e., the deformable as defined herein (P1)) for the rapid discharge of the deformable.

[0134] Amplifier G21 can be unipolar or bipolar. The potential difference (i.e., voltage) between the reference electrode and the semi-active or active electrode can be achieved through so-called single-ended drive or differential drive. Here, single-ended drive refers to a drive where the potential of the reference electrode is always at GND, while the potential of the semi-active or active electrode is greater than or less than 0 V. Conversely, differential drive refers to a configuration where the potential of the reference electrode can be less than or equal to 0 V, or greater than or equal to 0 V, while the potential of the semi-active or active electrode can also be less than or equal to 0 V, or greater than or equal to 0 V. For example, by applying a -50 V voltage to the reference electrode and a +50 V voltage to the active electrode (i.e., the electrode of the variant as defined herein (P1)), a potential difference of 100 V can be achieved, thereby reducing the voltage swing required by the amplifier.

[0135] When using a unipolar amplifier, a potential difference of -50V can also be achieved by setting the potential of the reference electrode to 50V and setting the potential of the semi-active or active deformable body to be driven to the GND level, i.e., 0V.

[0136] Figures 30 to 32 Several examples of the actuation concept are shown, each presenting a control signal as a function of the setpoint device G10, i.e., the specification of the target movement or target shape change of the actuator of each drive device A. Specifically, Figure 30An example of an actuation concept is shown in which a bipolar piezoelectric amplifier G21 is used in the control device G. Figure 31 An example of an actuation concept is shown in which a single-pole piezoelectric amplifier G21 is used in the control device G. Figure 32 An example of an actuation concept is shown in which a bipolar piezoelectric amplifier G21 is used in the control device G and the reference electrodes on the deformable bodies 30 and 60, as defined herein (P2), can also be controlled by a predetermined device G10.

[0137] List of reference numerals 1 Actuator Unit 30 First deformable body of the first actuator A1 31 First main surface of the first deformable body 30 31a, 31b Contact surfaces of the first primary surface 31 31i The inner surface of the first main surface 31 of the first deformable body 30 32. Distance range between excitation electrodes E111 and E112 33 The basic circumferential edge region of the first primary surface 31 34 Circumferential surface of the first deformable body 30 35, 36, 37, 38 Surface blocks of the first deformable body 30 39 The basic circumferential edge line of the first deformed body 30 40 Through hole of the first deformed body 30 41 Deformation region of the first excitation electrode E111 42 Deformation region of the second excitation electrode E112 43 Connection area of ​​the first excitation electrode E111 of the first actuator A1 44 Connection area of ​​the second excitation electrode E112 of the first actuator A1 51 The second main surface of the first deformable body 30 52 Deformation region of reference electrode E12 of the first actuator A1 53 The basic circumferential edge region of the first deformed body 30 Connecting areas 55, 56, 57, and 58 59 The basic circumferential edge line of the first deformed body 30 60 Second deformable body of second actuator A2 61 The first main surface of the second deformed body 60 Contact surfaces of inner surfaces 61i (61a, 61b) 61i The inner surface of the first main surface 61 of the second deformable body 60 62. Distance range between the excitation electrodes E211 and E212 of the second actuator A2 63 The basic circumferential edge region of the first primary surface 61 64 Circumferential surface of the second deformable body 60 65, 66, 67, 68 Surface blocks of the second deformable body 60 69 The basic circumferential edge line of the second deformed body 60 71 Deformation region of the first excitation electrode E211 of the second actuator A2 72 Deformation region of the second excitation electrode E212 of the second actuator A2 73 Connection area of ​​the first excitation electrode E211 of the second actuator A2 74 Connection area of ​​the second excitation electrode E212 of the second actuator A2 81 The second main surface of the second deformed body 60 82 Deformation region of reference electrode E22 of second actuator A2 83 The basic circumferential edge region of the second deformed body 60 Connecting areas 85, 86, 87, and 88 89 The basic circumferential edge line of the first deformed body 30 100, 200, 300, 400 drive units Actuator units 201, 202, 203, and 204 301 Actuator Unit Actuator units 401, 402, 403, and 404 500, 600, 700 drive units Actuator units 501, 601, 602, and 701 A drive unit AS drive system A1 Actuator Unit 1 First Actuator A2 Actuator Unit 1 Second Actuator A11, A12 First Axis A21, A22 Second Axis C electrode (excitation electrode or reference electrode) Cable connector on CE stimulation electrode Wire connector on CR reference electrode D11 Continuous gap between the two excitation electrodes E111 and E112 D21 Continuous Distance E11 First excitation electrode assembly of first actuator A1 E111 First excitation electrode E112 Second Excitation Electrode E12 Reference electrode or common electrode of first actuator A1 E21 Second actuator A2 second excitation electrode assembly E211 First excitation electrode of second actuator A2 E212 Second excitation electrode of second actuator A2 E22 Reference electrode or common electrode of the second actuator A2 The first excitation electrode on the first deformable body 30 of E711 and E811 The second excitation electrode on the first deformable body 30 of E712 and E812 The third excitation electrode on the first deformable body 30 of E713 and E813 The fourth excitation electrode on the first deformable body 30 of E714 and E814 G control device G10 Setpoint Device G10a control signal line G20 Amplification Device G20a Excitation Signal Line G21 amplifier L bearing assembly R resistor Vertical direction of RH drive unit RT1 Thickness direction or reference direction RT2 Thickness direction or reference direction S11 First actuator A1 first actuator main side surface S12 First actuator A1 Second main side S21 Second Actuator A2 First Actuator Main Side S22 Second Actuator A2 Second Actuator Main Side T1 thickness T2 thickness

Claims

1. An actuator unit (1), comprising: A first actuator (A1) includes: a first deformable body (30) deformed by voltage and comprising an electromechanical material, the deformable body having a thickness (T1) extending along its thickness direction (RT1) and defined by: a first main surface (31) and a second main surface (51) facing each other relative to the first thickness direction (RT1); and a first excitation electrode assembly (E11) including: at least one excitation electrode (E111, E112) located on the first main surface (31) of the first deformable body (30), and a common electrode (E12) located on the second main surface (51) of the first deformable body (30); A second actuator (A2) includes: a second deformable body (60) deformed by voltage and comprising an electromechanical material, the deformable body having a thickness (T2) extending along its thickness direction (RT2) and defined by: a first main surface (61) and a second main surface (81) facing each other relative to the second thickness direction (RT2); and a second excitation electrode assembly (E21) including: at least one excitation electrode (E211, E212) located on the first main surface (61) of the second deformable body (60), and a common electrode (E22) located on the second main surface (81) of the second deformable body (60); The first actuator (A1) and the second actuator (A2) are arranged to overlap each other, such that their thickness directions (RT1, RT2) extend towards each other, and the first excitation electrode assembly (E11) and the second excitation electrode assembly (E21) are arranged opposite to each other.

2. The actuator unit (1) according to claim 1, wherein the first excitation electrode assembly (E11) and the second excitation electrode assembly (E21) are spaced apart from each other and extend in their thickness directions (RT1, RT2).

3. The actuator unit (1) according to claim 1 or 2, wherein the first excitation electrode assembly (E11) includes at least two excitation electrodes (E111, E112) arranged side by side, and the second excitation electrode assembly (E21) includes at least two excitation electrodes (E211, E212) arranged side by side.

4. An actuator unit (1), comprising: A first actuator (A1) includes: a first deformable body (30) which can be deformed by voltage and comprises an electromechanical material, and the deformable body has a thickness (T1) extending along its thickness direction (RT1) and is defined by: a first main surface (31) and a second main surface (51) which are oriented relative to each other with respect to the first thickness direction (RT1); and a first excitation electrode assembly (E11) including: at least one excitation electrode (E111, E112) located on the first main surface (31) of the first deformable body (30), and a common electrode (E12) located on the second main surface (51) of the first deformable body (30); A second actuator (A2) includes: a second deformable body (60) which can be deformed by voltage and comprises an electromechanical material, and the deformable body has a thickness (T2) extending along its thickness direction (RT2) and is defined by: a first main surface (61) and a second main surface (81) which are oriented relative to each other with respect to the second thickness direction (RT2); and a second excitation electrode assembly (E21) including: at least one excitation electrode (E211, E212) located on the first main surface (61) of the second deformable body (60), and a common electrode (E22) located on the second main surface (81) of the second deformable body (60); The first actuator (A1) and the second actuator (A2) are arranged overlapping each other, such that their thickness directions (RT1, RT2) extend towards each other, and The first excitation electrode assembly (E11) and the second excitation electrode assembly (E21) are arranged opposite to each other. In the first excitation electrode assembly (E11) and the second excitation electrode assembly (E21), at least two corresponding opposite excitation electrodes (E111, E112, E211, E212) are in contact with each other.

5. The actuator unit (1) according to claim 4, wherein the first excitation electrode assembly (E11) includes at least two excitation electrodes (E111, E112) arranged side by side, and the second excitation electrode assembly (E21) includes at least two excitation electrodes (E211, E212) arranged side by side.

6. Actuator unit (1), comprising: A first actuator (A1) includes: a first deformable body (30) deformed by voltage and comprising an electromechanical material, the deformable body having a thickness (T1) extending along its thickness direction (RT1) and defined by: a first main surface (31) and a second main surface (51) facing each other relative to the first thickness direction (RT1); and a first excitation electrode assembly (E11) including: at least one excitation electrode (E111, E112) located on the first main surface (31) of the first deformable body (30), and a common electrode (E12) located on the second main surface (51) of the first deformable body (30); A second actuator (A2) includes: a second deformable body (60) deformed by voltage and comprising an electromechanical material, the deformable body having a thickness (T2) extending along its thickness direction (RT2) and defined by: a first main surface (61) and a second main surface (81) facing each other relative to the second thickness direction (RT2); and a second excitation electrode assembly (E21) including: at least one excitation electrode (E211, E212) located on the first main surface (61) of the second deformable body (60), and a common electrode (E22) located on the second main surface (81) of the second deformable body (60); The first actuator (A1) and the second actuator (A2) are arranged overlapping each other, such that their thickness directions (RT1, RT2) extend towards each other, and the first excitation electrode assembly (E11) and the second excitation electrode assembly (E21) are arranged opposite each other. The material (a) of the first deformable body (30) and the material (b) of the second deformable body (60) are defined such that one of the materials (a) and (b) is realized according to one of the following definitions (P1) and (P2); or both materials (a) and (b) are realized according to one of the following definitions (P1) and (P2); or material (a) is realized according to one of the following definitions (P1) and (P2), and material (b) is realized according to the other of the following definitions (P1) and (P2): (P1) An electromechanical material that is adapted to recover its original length without energy input once the voltage pulse applied to its actuating electrode stops. (P2) An electromechanical material suitable for achieving a permanent, energy-free length change of the actuator segment of the actuating electrode to which the voltage pulse is applied, due to the application of a voltage pulse to the actuating electrode, the change being caused by a polarization or depolarization process and persisting even when no voltage is applied to the actuating electrode.

7. The actuator unit (1) according to claim 6, wherein the material defined according to (P2) is further defined by the fact that, due to the polarization process occurring from the initial polarization state in the polarization direction extending along the respective thickness directions (RT1, RT2), a proportion of domains of the deformable body (60) greater than 0% and less than 100% is polarized for the trial operation of the actuator unit.

8. The actuator unit (1) according to claim 6, wherein the material as defined in (P2) is further defined by the fact that, as a result of a polarization process occurring from an initial polarization state in the polarization direction extending along the respective thickness directions (RT1, RT2), 10% to 90% of the domains of the deformable body (60) are polarized for trial operation of the actuator unit.

9. The actuator unit (1) according to any one of claims 6 to 8, wherein the first excitation electrode assembly (E11) includes at least two excitation electrodes (E11, E12) arranged side by side, and the second excitation electrode assembly (E21) includes at least two excitation electrodes (E21, E22) arranged side by side.

10. The actuator unit (1) according to any one of claims 6 to 9, wherein at least two correspondingly oppositely disposed excitation electrodes (E111, E112, E211, E212) in the first excitation electrode assembly (E11) and the second excitation electrode assembly (E21) are in contact with each other.

11. The actuator unit (1) according to any one of claims 6 to 10, wherein the first excitation electrode assembly (E11) and the second excitation electrode assembly (E21) are spaced apart from each other in their thickness directions (RT1, RT2).

12. The actuator unit (1) according to any one of the preceding claims, wherein the first deformable body (30) and the second deformable body (60) are both generally rectangular in shape; wherein the first excitation electrode assembly (E11) and the second excitation electrode assembly (E21) each include at least two excitation electrodes (E111, E112, E211, E212), wherein the two excitation electrodes (E111, E112, E211, E212) are symmetrical about each other with respect to the axis of symmetry (A11, A21), and the axis of symmetry (A11, A21) of the corresponding first main surface (31, 51, 61, 81) is the centerline of the surface.

13. The actuator unit (1) according to any one of claims 1 to 11, wherein the first deformable body (30) and the second deformable body (60) are both generally rectangular in shape; wherein the first excitation electrode assembly (E11) and the second excitation electrode assembly (E21) each include at least two excitation electrodes (E111, E112, E211, E212), wherein the two excitation electrodes (E111, E112, E211, E212) are symmetrical about each other with respect to the axis of symmetry (A11, A21), and the axis of symmetry (A11, A21) of the corresponding first main surface (31, 51, 61, 81) is the diagonal of the surface.

14. The actuator unit (1) according to any one of the preceding claims, wherein the first deformable body (30) includes a first through hole (40) and the second deformable body (60) includes a second through hole (70), wherein the first through hole (40) and the second through hole (70) are coaxial with respect to each other.

15. A driving device (A), comprising: The actuator unit (1) according to any one of the preceding claims, The excitation electrode connection portion (CE) allows the excitation electrodes to be electrically connected to corresponding excitation electrode control lines. A reference electrode connection (CR) is provided, through which the reference electrode can be electrically connected to at least one reference electrode bus.

16. A driving device (A), the driving device (A) comprising: At least one group consisting of four actuator units (1, 201, 202, 203, 204), each actuator unit being implemented according to any one of claims 1 to 14 and arranged sequentially along the height direction (RH), wherein the actuator units (1, 201, 202, 203, 204) extend from each other in the thickness direction; In the group of four actuator units (1), two of the actuator units include deformable bodies (30, 60) made of electromechanical material conforming to definition (P1), the electromechanical material being adapted to restore its length to its original state without energy once the voltage pulse applied to its actuation electrode is removed. In the group of four actuator units (1), the other two actuator units include deformable bodies (30, 60) made of electromechanical material conforming to definition (P2), which is adapted to enable, by applying a voltage pulse to its actuation electrode, a permanent length change of the actuator segment of the actuation electrode to which the voltage pulse is applied without energy, caused by a polarization or depolarization process, and which persists even when no voltage is applied to the actuation electrode.

17. A driving device (A), the driving device (A) comprising: At least one group consisting of four actuator units (1, 201, 202, 203, 204), each actuator unit being implemented according to any one of claims 1 to 14 and arranged sequentially along the height direction (RH), wherein the actuator units (1, 201, 202, 203, 204) extend from each other in the thickness direction; Starting with the group of four actuator units (1), each actuator unit (1, 201, 202, 203, 204) is arranged sequentially along the height direction (RH) and rotated 90 degrees relative to each other about an axis extending along the height direction (RH).

18. A drive system comprising: The drive device (A) according to any one of claims 15 to 17; A control device (G) includes: a setpoint device (G10) that determines a drive signal for at least one excitation electrode of at least one actuator of the drive device (A) based on a setpoint specification for a predetermined target movement or target shape change of the drive device (1); and an amplifier device (G20) that converts the drive signal into an excitation signal, wherein the amplifier device (G20) is connected to the excitation electrode of the corresponding actuator via an excitation signal line (G20a) to transmit the excitation signal to the excitation electrode.

Images