A cleaning device for a valve seat of a semiconductor diaphragm valve and a cleaning method thereof

Abstract

The application discloses a cleaning device for a valve seat of a semiconductor diaphragm valve and a cleaning method thereof. The cleaning device comprises a base, an inlet pipe, an outlet pipe, a movable joint, an end cover, a waste pipe and a driving assembly. The inlet pipe is installed on the base and connected with an inlet of the valve seat. The outlet pipe is installed on the base and has a waste hole formed thereon. The movable joint is installed on the outlet pipe and has a moving freedom of moving along an axis direction of the outlet pipe. The outlet pipe is connected with an outlet of the valve seat through the movable joint. The movable joint has a through hole formed thereon. The end cover has a moving freedom of moving along an axis direction of a valve cavity. The waste pipe is installed on the through hole and has a moving freedom of moving parallel to the axis direction of the valve cavity. The end cover and the waste pipe are simultaneously driven to move by the driving assembly, so that the valve seat is quickly assembled and disassembled with the cleaning device, the replacement efficiency of the valve seat is improved, and the cleaning efficiency of the valve seat is improved.

Description

Technical Field

[0001] This application relates to the field of cleaning device technology, and in particular to a cleaning device and cleaning method for a semiconductor diaphragm valve seat. Background Technology

[0002] Semiconductor diaphragm valves are precision fluid control components used in semiconductor manufacturing for high-purity / corrosive media. During the production process, it is necessary to clean all parts of the semiconductor diaphragm valve to remove dirt and burrs from the surface of the parts.

[0003] Currently, the common practice in the market is to remove dirt from the surface of parts by manual rinsing or soaking, and then clean the burrs on the surface of parts by manual scraping. The cleaning efficiency is relatively low, which affects the production efficiency of semiconductor diaphragm valves. Summary of the Invention

[0004] This application provides a cleaning device and method for a semiconductor diaphragm valve seat, which improves the cleaning efficiency of the cleaning device.

[0005] To achieve the above objectives, the main technical solutions adopted in this application include:

[0006] In a first aspect, this application provides a cleaning device for a semiconductor diaphragm valve seat. The cleaning device is used to clean the valve seat of the semiconductor diaphragm valve. The valve seat includes a valve seat inlet, a valve seat outlet, and a valve cavity. The cleaning device includes: a base, an inlet pipe, an outlet pipe, a movable joint, an end cap, a waste discharge pipe, and a drive assembly. The inlet pipe is installed on the base and connected to the valve seat inlet. The outlet pipe is installed on the base and has a waste discharge hole. The movable joint is installed on the outlet pipe and has a degree of freedom of movement along the axis of the outlet pipe. The outlet pipe is connected to the valve seat outlet through the movable joint, and a through hole is formed on the movable joint. The end cap has a degree of freedom of movement along the axis of the valve cavity, so that the end cap is detachably connected to the valve cavity. The waste discharge pipe is installed in the through hole and has a degree of freedom of movement parallel to the axis of the valve cavity, so that the waste discharge pipe is detachably connected to the waste discharge hole. The drive assembly is connected to the end cap and the waste discharge pipe and drives the end cap and the waste discharge pipe to move along the axis of the valve cavity.

[0007] Furthermore, the drive assembly has a first slope, and a second slope is formed outside the waste discharge pipe, with the first slope abutting against the second slope; when the second slope moves relative to the first slope, the waste discharge pipe moves along the axis of the outlet pipe, and the movable joint moves with the waste discharge pipe.

[0008] Furthermore, the drive assembly is formed with a chute, and a first slope is located inside the chute; a fixing block is provided on the outer sleeve of the waste discharge pipe, the fixing block is installed in the chute, and a second slope is located at the end of the fixing block facing the first slope.

[0009] Furthermore, the drive assembly includes a drive block and a lifting block, with the end cap and waste discharge pipe both connected to the lifting block; the drive block is located below the lifting block and connected to it, and under the action of the drive block, the lifting block moves along the axial direction of the valve cavity.

[0010] Furthermore, a guide groove is formed on the drive block, and a guide post is connected to the lifting block. The guide post is inserted into the guide groove and has the freedom of movement to move along the guide groove. The guide groove has a first groove segment, a second groove segment, and a connecting groove segment for connecting the first groove segment and the second groove segment. The first groove segment and the second groove segment are both perpendicular to the axial direction of the valve cavity, and the first groove segment and the second groove segment have a height difference.

[0011] Furthermore, a connecting post is formed on the movable joint, and a connecting cavity is formed inside the connecting post; the cleaning device also includes a first spring, which is installed in the connecting cavity, and the two ends of the first spring are respectively connected to the inner wall of the connecting cavity and the waste discharge pipe, and a first spring force is applied to the waste discharge pipe toward the outlet pipe through the first spring.

[0012] Furthermore, the cleaning device includes a second spring, a spring groove is formed in the movable joint, the second spring is installed in the spring groove, and the two ends of the second spring are respectively connected to the inner wall of the spring groove and the outlet pipe, and a second spring force towards the outlet pipe is applied to the movable joint by the second spring.

[0013] Furthermore, the cleaning device includes a filter screen installed inside the outlet pipe, and the filter screen is inclined relative to the axial direction of the outlet pipe; the waste discharge hole is located at the front end of the filter screen.

[0014] Furthermore, the cleaning device also includes a valve plate installed inside the outlet pipe, with a waste discharge hole located between the valve plate and the filter screen; a retaining ring is formed inside the outlet pipe, located on the side of the valve plate away from the filter screen, and the outlet pipe is closed when the valve plate abuts against the retaining ring.

[0015] Secondly, this application provides a cleaning method for a semiconductor diaphragm valve seat cleaning device, comprising the following steps: Step S1: Drive the movable joint to move away from the inlet pipe direction via the drive component; Step S2: Place the valve seat between the inlet pipe and the outlet pipe, and drive the movable joint to move towards the inlet pipe through the drive assembly, so that the inlet pipe and the movable joint are connected to the valve seat inlet and the valve seat outlet respectively, and the end cover closes the valve chamber. Step S3: The cleaning fluid enters the valve seat through the inlet pipe, and then is transported to the outlet pipe through the valve seat. It is filtered through the filter screen to clean impurities. The cleaning fluid containing impurities is discharged through the waste discharge pipe, and the filtered cleaning fluid is output from the cleaning device through the outlet pipe. Step S4: After cleaning the valve seat, the cleaning fluid in the outlet pipe flows in reverse to clean the filter screen.

[0016] By simultaneously driving the end cap and the waste discharge pipe with the drive component, the valve seat and the cleaning device can be quickly installed and removed, improving the replacement efficiency of the valve seat and thus improving the cleaning efficiency of the valve seat. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the cleaning device provided in this application.

[0019] Figure 2 yes Figure 1 A cross-sectional view of the cleaning device shown.

[0020] Figure 3 yes Figure 1 The diagram shows the structure of the valve seat used for cleaning in the cleaning device.

[0021] Figure 4 yes Figure 1 A schematic diagram of the base of the cleaning device shown.

[0022] Figure 5 yes Figure 1 A schematic diagram of the drive block of the cleaning device shown.

[0023] Figure 6 yes Figure 1 A schematic diagram of the lifting block of the cleaning device shown.

[0024] Figure 7 yes Figure 2 A partial enlarged view of section A of the cross-sectional view of the cleaning device shown.

[0025] Figure 8 yes Figure 2 A partial enlarged view of section B in the cross-sectional view of the cleaning device shown.

[0026] Explanation of reference numerals in the attached drawings: Valve seat 1, Valve seat inlet 101, Valve seat outlet 102, Valve cavity port 103, Base 2, First slide groove 201, Second slide groove 202, Through groove 203, Inlet pipe 3, Outlet pipe 4, Waste discharge hole 401, First hole section 4011, Second hole section 4012, Retaining ring 402, Second limiting ring 403, Sealing ring 404, Sealing slope 4041, Movable joint 5, Through hole 501, Connecting column 502, Connecting cavity 5021, Spring groove 503, Sealing groove 504, End cap 6, Sealing gasket 601, extension column 6011, waste discharge pipe 7, second slope 701, fixing block 702, first limiting ring 703, drive assembly 8, first slope 801, sliding groove 803, drive block 805, guide groove 8051, first groove segment 80511, second groove segment 80512, connecting groove segment 80513, lifting block 806, guide column 8061, connecting groove 8062, first spring 9, second spring 10, filter screen 11, valve plate 12, first mounting seat 13, second mounting seat 14, sealing ring 15. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0028] like Figure 1 , Figure 2 and Figure 3 As shown, as one implementation, this application provides a cleaning device for a semiconductor diaphragm valve seat, used to clean the valve seat 1 of the semiconductor diaphragm valve, removing dirt attached to the inner surface of the valve seat 1 and burrs not removed during processing.

[0029] The valve seat 1 includes a valve seat inlet 101, a valve seat outlet 102, and a valve cavity 103. The valve seat inlet 101 is the liquid inlet of the valve seat 1, the valve seat outlet 102 is the liquid outlet of the valve seat 1, and the valve cavity 103 is used to install the diaphragm of the semiconductor diaphragm valve and the components used to drive the diaphragm to move.

[0030] Specifically, the cleaning device includes a base 2, an inlet pipe 3, an outlet pipe 4, a movable joint 5, an end cap 6, a waste discharge pipe 7, and a drive assembly 8. The base 2 is used to install other components of the cleaning device. The inlet pipe 3 is used to connect to an external delivery pump, through which the cleaning fluid is input into the cleaning device. The outlet pipe 4 is used to recover the cleaning fluid after cleaning. The movable joint 5 is used to connect the outlet pipe 4 and the valve seat outlet 102 of the valve seat 1. The end cap 6 is used to close the valve cavity 103 of the valve seat 1. The waste discharge pipe 7 is used to discharge the cleaning fluid containing impurities to the outside of the cleaning device. The drive assembly 8 is used to drive the end cap 6 and the waste discharge pipe 7 to move simultaneously, so that the end cap 6 closes the valve cavity 103 and the waste discharge pipe 7 locks the movable joint 5 and the outlet pipe 4.

[0031] The inlet pipe 3 is installed on the base 2 through the first mounting seat 13, so that there is a certain distance between the inlet pipe 3 and the base 2 to prevent the base 2 from interfering with the valve seat 1.

[0032] The inlet pipe 3 is connected to the valve seat inlet 101 to facilitate the delivery of cleaning fluid into the valve seat 1.

[0033] The outlet pipe 4 is mounted on the base 2 via the second mounting seat 14, so that there is a certain distance between the outlet pipe 4 and the base 2 to prevent the base 2 from interfering with the valve seat 1.

[0034] A waste discharge hole 401 is formed on the outlet pipe 4. Along the axial direction of the outlet pipe 4, the outlet pipe 4 has an inlet end and an outlet end. The waste discharge hole 401 is located between the inlet end and the outlet end and is connected to the internal channel of the inlet pipe 3. The waste discharge hole 401 is used to discharge the cleaning fluid containing impurities (burrs, large particles) to the outside of the cleaning device to prevent the recovered cleaning fluid from containing impurities.

[0035] The movable joint 5 is installed on the outlet pipe 4, and the movable joint 5 has the freedom of movement to move along the axis of the outlet pipe 4.

[0036] The movable joint 5 moves toward the valve seat 1, so that the outlet pipe 4 is connected to the valve seat outlet 102 through the movable joint 5, thereby connecting the valve seat 1 to the cleaning device.

[0037] The movable joint 5 moves away from the valve seat 1, and the movable joint 5 separates from the valve seat outlet 102, thereby facilitating the removal of the valve seat 1 from the cleaning device.

[0038] A through hole 501 is formed on the movable joint 5. The axis of the through hole 501 is in the same plane as the axis of the movable joint 5 and is perpendicular to each other.

[0039] Under the action of the drive assembly 8, the end cover 6 has a degree of freedom of movement along the axis of the valve port 103, so that the end cover 6 is detachably connected to the valve port 103.

[0040] When the end cap 6 moves toward the valve cavity 103, the end cap 6 closes the valve cavity 103, making it easier to clean the valve seat 1.

[0041] When the end cap 6 moves away from the valve cavity 103, the end cap 6 separates from the valve cavity 103, making it easier to remove the valve seat 1 from the cleaning device.

[0042] Waste discharge pipe 7 is installed in through hole 501, and waste discharge pipe 7 has a degree of freedom of movement that moves in the direction parallel to the axis of valve cavity 103. That is, waste discharge pipe 7 can slide relative to through hole 501. By moving waste discharge pipe 7 relative to through hole 501, waste discharge pipe 7 is detachably connected to waste discharge hole 401.

[0043] When the waste discharge pipe 7 moves toward the waste discharge hole 401, the waste discharge pipe 7 connects with the waste discharge hole 401 so that the cleaning fluid containing impurities can be discharged through the waste discharge pipe 7, while the movable joint 5 is locked to the outlet pipe 4.

[0044] When the waste discharge pipe 7 moves away from the waste discharge hole 401, the waste discharge pipe 7 separates from the waste discharge hole 401, allowing the movable joint 5 to slide relative to the outlet pipe 4.

[0045] The drive assembly 8 is installed on the base 2 and is connected to the end cover 6 and the waste discharge pipe 7. The drive assembly 8 drives the end cover 6 and the waste discharge pipe 7 to move along the axis of the valve cavity 103.

[0046] Drive component 8 has a lifting state and a pressing state; When the drive assembly 8 is in the lifted state, under the action of the drive assembly 8, the end cover 6 closes the valve cavity 103, and the waste discharge pipe 7 is at least partially inserted into the waste discharge hole 401 to lock the movable joint 5 and the outlet pipe 4. The movable joint 5 is connected to the valve seat outlet 102, and at the same time the waste discharge pipe 7 is connected to the outlet pipe 4, so that the cleaning device can clean the valve seat 1.

[0047] When the drive assembly 8 is in the depressed state, under the action of the drive assembly 8, the end cover 6 separates from the valve cavity 103, the waste discharge pipe 7 separates from the waste discharge hole 401, and the movable joint 5 separates from the valve seat outlet 102. The operator can then replace the valve seat 1 installed on the cleaning device.

[0048] By simultaneously driving the end cover 6 and the waste discharge pipe 7 with the drive component 8, the valve seat 1 and the cleaning device can be quickly installed and removed, thereby improving the replacement efficiency of the valve seat 1 and thus improving the cleaning efficiency of the valve seat 1.

[0049] To more clearly illustrate the technical solution of this application, the following definitions are provided: Figure 1 The directions shown are up, down, left, right, front, and back. The axial direction of valve cavity 103 is... Figure 1 The vertical direction is shown. The axial direction of outlet pipe 4 is... Figure 1 The left and right directions are shown. The first direction is... Figure 1 The front and back directions are shown.

[0050] like Figure 2 and Figure 4 As shown, in one implementation, a first groove 201 and a second groove 202 are formed on the base 2. The first groove 201 extends along the axial direction of the valve cavity 103, and the second groove 202 extends along the first direction.

[0051] Both the first slide 201 and the second slide 202 are used to install the drive assembly 8.

[0052] like Figure 2 , Figure 5 and Figure 6 As shown, in one implementation, the drive assembly 8 includes a drive block 805 and a lifting block 806. The lifting block 806 is installed in the first slide groove 201 and can move in the up and down direction. The end cover 6 and the waste discharge pipe 7 are both connected to the lifting block 806. The lifting block 806 drives the end cover 6 and the waste discharge pipe 7 to rise and fall.

[0053] The drive block 805 is installed in the second slide groove 202. The drive block 805 can move in the front and back direction. The drive block 805 is located below the lifting block 806 and is connected to the lifting block 806. The drive block 805 moves relative to the second slide groove 202, so that the lifting block 806 moves along the axis of the valve cavity 103.

[0054] It should be noted that the first slide 201 is used to guide the lifting of the lifting block 806, and the second slide 202 is used to guide the drive block 805 to move in the front-back direction.

[0055] The lifting block 806 is raised and lowered by the driving block 805, so that the end cover 6 and the movable joint 5 can be connected or separated from the valve seat 1, thereby improving the replacement efficiency of the valve seat 1 on the cleaning device and thus improving the cleaning efficiency of the valve seat 1.

[0056] like Figure 5 and Figure 6 As shown, in one implementation, a guide groove 8051 is formed on the drive block 805, and a guide post 8061 is connected to the lifting block 806. The guide post 8061 is inserted into the guide groove 8051 and has the degree of freedom to move along the guide groove 8051. Under the guidance of the guide groove 8051 and the first slide groove 201, the drive block 805 moves up and down in the vertical direction.

[0057] It should be noted that the guide groove 8051 is located on the side wall of the drive block 805, and a connecting groove 8062 is formed at the bottom of the lifting block 806. The drive block 805 is at least partially located in the connecting groove 8062, and the guide post 8061 is connected to the inner wall of the connecting groove 8062 so that the guide post 8061 can be connected to the guide groove 8051.

[0058] Specifically, the guide groove 8051 has a first groove segment 80511, a second groove segment 80512, and a connecting groove segment 80513. The connecting groove segment 80513 is used to connect the first groove segment 80511 and the second groove segment 80512. The first groove segment 80511 and the second groove segment 80512 are both perpendicular to the axial direction of the valve cavity port 103, and the first groove segment 80511 and the second groove segment 80512 have a height difference.

[0059] The first groove segment 80511 is higher than the second groove segment 80512. When the guide post 8061 is located in the first groove segment 80511, the drive assembly 8 is in the lifted state, so that the valve seat 1 is connected to the cleaning device. When the guide post 8061 is located in the second groove segment 80512, the drive assembly 8 is in the lowered state, which facilitates the replacement of the valve seat 1 installed on the cleaning device.

[0060] In one implementation, the end cap 6 is installed on the top of the lifting block 806 with screws, so that the end cap 6 moves up and down with the lifting block 806.

[0061] like Figure 2 , Figure 6 and Figure 7 As shown, in one implementation, the drive component 8 has a first slope 801, and a second slope 701 is formed outside the waste pipe 7. The first slope 801 and the second slope 701 abut against each other. The first slope 801 and the second slope 701 are parallel to each other and are both inclined relative to the axial direction of the valve port 103.

[0062] Specifically, the lifting block 806 of the drive assembly 8 has a groove 803, the first slope 801 is located in the groove 803, the first slope 801 moves up and down with the lifting block 806, and the first slope 801 is located above the second slope 701.

[0063] The waste discharge pipe 7 is fitted with a fixing block 702, which is installed on the slide 803. The second slope 701 is located at the end of the fixing block 702 facing the first slope 801.

[0064] The lowering of the lifting block 806 includes a first stroke and a second stroke, with the first stroke located at the front end of the second stroke.

[0065] When the lifting block 806 is in the first stroke, the first slope 801 and the second slope 701 abut against each other, and there is static friction between the first slope 801 and the second slope 701, which causes the second slope 701 to descend simultaneously with the first slope 801, driving the waste discharge pipe 7 to descend, so that the waste discharge pipe 7 separates from the waste discharge hole 401.

[0066] When the lifting block 806 is in the second stroke, the waste discharge pipe 7 and the fixed block 702 are vertically limited, preventing them from descending further. The lifting block 806 descends further, at which point the second slope 701 moves relative to the first slope 801, causing the fixed block 702 to move along the axis of the outlet pipe 4, which in turn moves the waste discharge pipe 7 along the axis of the outlet pipe 4. At the same time, the movable joint 5 moves with the waste discharge pipe 7 in the direction away from the valve seat 1, causing the movable joint 5 to separate from the valve seat outlet 102. The operator can then replace the valve seat 1 installed on the cleaning device.

[0067] The first slope 801 and the second slope 701 facilitate the separation of the waste discharge pipe 7 from the waste discharge hole 401. At the same time, the movable joint 5 can be separated from the valve seat 1, thereby facilitating the replacement of the valve seat 1 installed on the cleaning device.

[0068] like Figure 4 As shown, as one implementation, a through groove 203 is formed on the base 2, and the waste pipe 7 extends to the bottom of the base 2 through the through groove 203.

[0069] It should be noted that the through groove 203 is an oblong hole to prevent the waste discharge pipe 7 from interfering with the base 2 when it moves.

[0070] like Figure 8 As shown, in one implementation, a connecting post 502 is formed on the movable joint 5, a connecting cavity 5021 is formed inside the connecting post 502, a through hole 501 communicates with the connecting cavity 5021, and the waste discharge pipe 7 passes through the connecting cavity 5021 and the through hole 501 in sequence and is detachably connected to the waste discharge hole 401.

[0071] A first limiting ring 703 is formed on the outer wall of the waste discharge pipe 7, and the first limiting ring 703 is located in the connecting cavity 5021.

[0072] The cleaning device also includes a first spring 9, which is installed in the connecting cavity 5021 and sleeved on the outside of the waste discharge pipe 7. The two ends of the first spring 9 are respectively connected to the inner wall of the connecting cavity 5021 and the first limiting ring 703 of the waste discharge pipe 7. The first spring 9 applies a first spring force toward the outlet pipe 4 to the waste discharge pipe 7.

[0073] The first spring 9 facilitates the insertion of the waste discharge pipe 7 into the waste discharge hole 401 and improves the sealing performance of the connection between the waste discharge pipe 7 and the waste discharge hole 401.

[0074] When the lifting block 806 is in the first stroke, the first spring 9 is compressed, the waste discharge pipe 7 descends, and the waste discharge pipe 7 separates from the waste discharge hole 401.

[0075] When the lifting block 806 is in the second stroke, the first spring 9 cannot be compressed further, so that the position of the first limiting ring 703 in the connecting cavity 5021 remains unchanged, so that the waste discharge pipe 7 cannot descend further, and so that the first slope 801 and the second slope 701 move relative to each other.

[0076] When the lifting block 806 rises, under the action of the first spring force, the second slope 701 abuts against the bottom of the first slope 801, causing the waste discharge pipe 7 to rise along with the lifting block 806 until the waste discharge pipe 7 is at least partially inserted into the waste discharge hole 401.

[0077] like Figure 8 As shown, in one implementation, the waste discharge hole 401 includes two interconnected first hole segments 4011 and second hole segments 4012. The second hole segment 4012 is located at the lower end of the first hole segment 4011, and the diameter of the second hole segment 4012 is larger than the diameter of the first hole segment 4011.

[0078] When the lifting block 806 rises and the waste discharge pipe 7 is inserted into the second hole section 4012, the movable joint 5 locks with the outlet pipe 4, and the waste discharge pipe 7 is connected to the outlet pipe 4 through the first hole section 4011.

[0079] It should be noted that, under the action of the first spring force, the waste discharge pipe 7 abuts against the connection between the first hole section 4011 and the second hole section 4012, ensuring the sealing of the connection between the waste discharge pipe 7 and the outlet pipe 4.

[0080] A sealing ring is installed on the end face of the waste discharge pipe 7 facing the outlet pipe 4 to ensure the sealing of the connection between the waste discharge pipe 7 and the outlet pipe 4.

[0081] like Figure 8 As shown, in one implementation, a spring groove 503 is formed inside the movable joint 5, and a second limiting ring 403 is formed on the outer side wall of the outlet pipe 4, with the second limiting ring 403 located inside the spring groove 503.

[0082] The cleaning device also includes a second spring 10, which is installed in the spring groove 503 and sleeved on the outside of the outlet pipe 4. The two ends of the second spring 10 are respectively connected to the inner wall of the spring groove 503 and the second limiting ring 403 of the outlet pipe 4. The second spring 10 applies a second spring force toward the outlet pipe 4 to the movable joint 5.

[0083] The second spring 10 facilitates the movement of the movable joint 5 toward the valve seat 1, thereby facilitating the movable joint to abut against the valve seat outlet 102. At the same time, it facilitates the alignment of the waste discharge pipe 7 with the waste discharge hole 401, thereby locking the movable joint 5 with the outlet pipe 4.

[0084] When the lifting block 806 is in the first stroke, the movable joint 5 does not move, and the deformation of the second spring 10 (maintaining its original compressed state) does not change.

[0085] When the lifting block 806 is in the second stroke, the movable joint 5 moves away from the valve seat 1, causing the second spring 10 to deform further (compress further).

[0086] When the lifting block 806 rises, under the action of the second spring force, the movable joint 5 moves toward the valve seat 1, further ensuring that the second slope 701 abuts against the bottom of the first slope 801, so that the waste discharge pipe 7 rises with the lifting block 806 until the waste discharge pipe 7 is at least partially inserted into the waste discharge hole 401.

[0087] As one implementation, a sealing groove 504 is formed on the inner peripheral wall of the movable joint 5, and a sealing ring 404 is formed on the outer peripheral wall of the outlet pipe 4. The sealing ring 404 is slidably installed in the sealing groove 504, and a sealing ring 15 is installed at the end of the sealing ring 404 away from the valve seat 1.

[0088] When the movable joint 5 is connected to the valve seat outlet 102, the sealing ring 15 abuts against the side wall of the sealing groove 504, so that the movable joint 5 is sealed to the outlet pipe 4.

[0089] Specifically, a sealing slope 4041 is formed on the end face of the sealing ring 404 away from the valve seat 1. When the movable joint 5 is connected to the valve seat outlet 102, the sealing slope 4041 and the side wall of the sealing groove 504 together form a sealing cavity, and the sealing ring 15 abuts against the inner wall of the sealing cavity, thereby improving the sealing performance between the movable joint 5 and the outlet pipe 4.

[0090] like Figure 8 As shown, in one implementation, the cleaning device includes a filter screen 11, which is installed inside the outlet pipe 4 and is inclined relative to the axial direction of the outlet pipe 4. The waste discharge hole 401 is located at the front end of the filter screen 11.

[0091] Specifically, from top to bottom, the distance between the filter screen 11 and the valve seat 1 gradually increases, and the waste discharge hole 401 is located near the position of the maximum distance between the filter screen 11 and the valve seat 1.

[0092] The inclined filter screen 11 facilitates the filtration of impurities, making it easier to recycle the cleaning solution. At the same time, the inclined filter screen 11 allows impurities to be discharged to the outlet pipe 4 through the waste discharge pipe 7.

[0093] like Figure 8 As shown, in one implementation, the cleaning device also includes a valve plate 12, which is installed inside the outlet pipe 4, and the waste discharge hole 401 is located between the valve plate 12 and the filter screen 11.

[0094] A retaining ring 402 is formed inside the outlet pipe 4. The retaining ring 402 is located on the side of the valve plate 12 away from the filter screen 11. When the valve plate 12 abuts against the retaining ring 402, the outlet pipe 4 is closed. The cleaning liquid enters the outlet pipe 4 through the liquid outlet end of the outlet pipe 4 and washes the filter screen 11. The valve plate 12 is designed to prevent the cleaning liquid from flowing into the valve seat 1, thereby improving the cleanliness of the filter screen 11 and preventing the cleaning device from becoming clogged.

[0095] The valve plate 12 includes two unit plates, each of which is semi-circular, and the outlet pipe 4 is closed by the two unit plates.

[0096] It should be noted that the spacing between the two unit pieces is smaller than the filter aperture of filter screen 11.

[0097] As one implementation, a sealing gasket 601 is detachably installed inside the end cap 6.

[0098] The end cap 6 is sealed to the valve cavity 103 by the sealing gasket 601. After the semiconductor diaphragm valve seat is cleaned, the sealing gasket 601 is replaced to prevent cleaning residue from remaining on the sealing gasket 601.

[0099] To facilitate the replacement of the gasket 601, an extension post 6011 is formed in the middle of the gasket 601. When disassembling the gasket 601, the operator can directly apply the extension post 6011 to remove the gasket 601 from the end cover 6.

[0100] It should be noted that the height of the extension column 6011 is less than the depth of the valve cavity 103.

[0101] Secondly, this application also provides a cleaning method for a semiconductor diaphragm valve seat cleaning device, comprising the following steps: In step S1, the movable joint 5 is moved away from the inlet pipe 3 by the drive component 8, increasing the distance between the movable joint 5 and the inlet pipe 3, so as to facilitate the installation of the valve seat 1 onto the cleaning device.

[0102] Specifically, the lifting block 806 is driven to descend by the driving block 805. The lifting block 806 first enters the first stroke, and the lifting block 806 drives the waste discharge pipe 7 to descend, so that the waste discharge pipe 7 is separated from the waste discharge hole 401, and the movable joint 5 is unlocked from the outlet pipe 4.

[0103] The lifting block 806 descends further and enters the second stroke. At this time, the second slope 701 moves relative to the first slope 801, causing the fixed block 702 to move along the axis of the outlet pipe 4, which in turn drives the waste discharge pipe 7 to move along the axis of the outlet pipe 4. At the same time, the movable joint 5 moves with the waste discharge pipe 7 in the direction away from the valve seat 1, increasing the distance between the movable joint 5 and the inlet pipe 3, which makes it easier to install the valve seat 1 onto the cleaning device.

[0104] In step S2, the valve seat 1 is placed between the inlet pipe 3 and the outlet pipe 4. The drive assembly 8 drives the movable joint 5 to move toward the inlet pipe 3, so that the inlet pipe 3 and the movable joint 5 are connected to the valve seat inlet 101 and the valve seat outlet 102 respectively. At the same time, the end cover 6 closes the valve cavity port 103, thereby connecting the valve seat 1 to the cleaning device.

[0105] Specifically, after the valve seat 1 is placed in the inlet pipe 3 and the outlet pipe 4, the lifting block 806 is driven to rise by the drive block 805. Under the action of the first spring force, the second slope 701 abuts against the bottom of the first slope 801, so that the waste discharge pipe 7 rises along with the lifting block 806.

[0106] Simultaneously, under the action of the second spring force, the movable joint 5 moves toward the valve seat 1 until the movable joint 5 is connected to the outlet pipe 4. As the movable joint 5 moves toward the valve seat 1, the waste discharge pipe 7 aligns with the waste discharge hole 401. Under the action of the first spring force, the end of the waste discharge pipe 7 is inserted into the waste discharge hole 401, thereby locking the movable joint 5 and the outlet pipe 4. As the lifting block 806 rises, the end cover 6 seals the valve cavity 103.

[0107] In step S3, the cleaning fluid enters the valve seat 1 through the inlet pipe 3, and is then transported to the outlet pipe 4 through the valve seat 1. It is filtered through the filter screen 11 to clean impurities. The cleaning fluid containing impurities is discharged through the waste discharge pipe 7, and the filtered cleaning fluid is output from the cleaning device through the outlet pipe 4.

[0108] It should be noted that in this step, the discharge volume of the cleaning fluid is controlled by controlling the flow rate of the waste discharge pipe 7, thereby reducing waste of the cleaning fluid.

[0109] It should be further noted that this cleaning device uses pure water for cleaning, and a detection device is installed at the end of the outlet pipe 4 to detect ions and solid particles in the cleaned liquid. When the anions and cations in the liquid output from the outlet pipe 4 do not exceed 1 μg / ml and no particles ≥0.014μm appear within 5 minutes, the valve seat cleaning is considered complete.

[0110] Furthermore, the cleaning fluid output from outlet pipe 4 needs to be treated by a water treatment device before being circulated back to inlet pipe 3.

[0111] Step S4: After the valve seat 1 is cleaned, the cleaning fluid in the outlet pipe 4 flows in reverse to clean the filter screen 11.

[0112] It should be noted that a torsion spring is installed on the rotating shaft of the valve plate 12. The torsion spring applies a spring force to the valve plate 12, so that the valve plate 12 is normally in the closed state. When cleaning the valve seat 1, the cleaning fluid overcomes the spring force of the torsion spring to open the valve plate 12, thereby facilitating the cleaning of the valve seat 1.

[0113] The above description is merely an embodiment of this application and is not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A cleaning device for a semiconductor diaphragm valve seat, the cleaning device being used to clean the valve seat of a semiconductor diaphragm valve, the valve seat comprising a valve seat inlet, a valve seat outlet, and a valve cavity port, characterized in that, include: Base; An inlet pipe is installed on the base and connected to the valve seat inlet. An outlet pipe is installed on the base, and a waste discharge hole is formed on the outlet pipe; A movable joint is installed on the outlet pipe and has a degree of freedom of movement along the axis of the outlet pipe. The outlet pipe is connected to the valve seat outlet through the movable joint, and a through hole is formed on the movable joint. An end cap having a degree of freedom of movement along the axis of the valve cavity, such that the end cap is detachably connected to the valve cavity. Waste discharge pipe, which is installed in the through hole and has a degree of freedom of movement that moves in the direction parallel to the axis of the valve cavity, so that the waste discharge pipe is detachably connected to the waste discharge hole; A drive assembly is connected to the end cap and the waste discharge pipe, and drives the end cap and the waste discharge pipe to move along the axial direction of the valve cavity. The drive assembly has a first slope, and a second slope is formed outside the waste discharge pipe, with the first slope abutting against the second slope; When the second slope moves relative to the first slope, the waste discharge pipe moves along the axis of the outlet pipe, and the movable joint moves with the waste discharge pipe; The drive assembly is formed with a groove, and the first slope is located within the groove; The waste discharge pipe is fitted with a fixing block, which is installed in the chute. The second slope is located at the end of the fixing block facing the first slope. The drive assembly includes a drive block and a lifting block, and the end cap and the waste discharge pipe are both connected to the lifting block; The drive block is located below the lifting block and is connected to the lifting block. Under the action of the drive block, the lifting block moves along the axial direction of the valve cavity. The drive block has a guide groove, the lifting block is connected to a guide post, the guide post is inserted into the guide groove and has a degree of freedom of movement along the guide groove; The guide groove has a first groove segment, a second groove segment, and a connecting groove segment for connecting the first groove segment and the second groove segment. The first groove segment and the second groove segment are both perpendicular to the axial direction of the valve cavity, and the first groove segment and the second groove segment have a height difference. The cleaning device includes a filter screen, which is installed inside the outlet pipe and is inclined relative to the axial direction of the outlet pipe. The waste discharge hole is located at the front end of the filter screen.

2. The cleaning device for the semiconductor diaphragm valve seat according to claim 1, characterized in that, A connecting post is formed on the movable joint, and a connecting cavity is formed inside the connecting post.

3. The cleaning device for the semiconductor diaphragm valve seat according to claim 1, characterized in that, The cleaning device includes a second spring, and a spring groove is formed in the movable joint. The second spring is installed in the spring groove, and the two ends of the second spring are respectively connected to the inner wall of the spring groove and the outlet pipe. The second spring applies a second spring force toward the outlet pipe to the movable joint.

4. The cleaning device for the semiconductor diaphragm valve seat according to claim 3, characterized in that, The cleaning device also includes a valve plate, which is installed inside the outlet pipe, and the waste discharge hole is located between the valve plate and the filter screen; A retaining ring is formed inside the outlet pipe. The retaining ring is located on the side of the valve plate away from the filter screen. When the valve plate abuts against the retaining ring, the outlet pipe is closed.

5. A cleaning method for the semiconductor diaphragm valve seat cleaning apparatus according to any one of claims 1-4, characterized in that, Includes the following steps: Step S1: The driving component drives the movable joint to move away from the inlet pipe. Step S2: Place the valve seat between the inlet pipe and the outlet pipe, and drive the movable joint to move toward the inlet pipe through the drive assembly, so that the inlet pipe and the movable joint are respectively connected to the valve seat inlet and the valve seat outlet, while the end cap closes the valve cavity. Step S3: The cleaning fluid enters the valve seat through the inlet pipe and is then transported to the outlet pipe through the valve seat. Impurities are filtered through the filter screen, and the cleaning fluid containing impurities is discharged through the waste discharge pipe. The filtered cleaning fluid is output from the cleaning device through the outlet pipe. In step S4, after the valve seat is cleaned, the cleaning fluid in the outlet pipe flows in reverse to clean the filter screen.

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