A target material for a high-hardness wear-resistant and corrosion-resistant compound coating and a method for preparing the same

Abstract

The application discloses a target material for high-hardness wear-resistant and corrosion-resistant compound coating and a preparation method thereof, and belongs to the field of compound preparation. The method adopts mechanical alloying, discharge plasma sintering and hot extrusion fusion processes to prepare high-hardness wear-resistant and corrosion-resistant compound target material Al x Ce y CoCrNiTi m Zr (0.10≤x≤1.00; 0.01≤y≤0.15; 0.10≤m≤1.00; 0.01

Description

Technical Field

[0001] This invention belongs to the field of compound preparation, specifically relating to a target material for high-hardness, wear-resistant, and corrosion-resistant compound coatings and its preparation method. Background Technology

[0002] Surface wear is one of the main failure modes of metal parts, and surface strengthening technology has become one of the main means to improve equipment service life and reduce maintenance costs. Physical vapor deposition (PVD) technology, as a green surface modification technology, has advantages such as low deposition temperature, wide range of coating material systems, precise controllable film thickness, and small thermal impact on the substrate, and is widely used in CNC cutting tools, wear-resistant molds, and other fields. Binary nitride PVD coatings are widely used for surface strengthening of wear-resistant parts due to their mature technology and low cost. However, due to their insufficient high-temperature oxidation resistance and difficulty in adapting to complex working environments, ternary nitride coating technology was developed. Although the oxidation resistance is improved, problems such as insufficient toughness and easy detachment failure limit its application. Multi-principal element alloys have attracted much attention because they break through the traditional alloy design concept and generally have high hardness, high wear resistance, oxidation resistance, corrosion resistance, and high-temperature softening resistance. There are two main methods for preparing multi-principal element PVD coatings: one is multi-target co-sputtering. One method involves simultaneously mounting pure metal targets of various principal alloy elements at different positions within a vacuum chamber. Precise control of the coating composition is achieved by adjusting the sputtering power of each target. This method offers the advantage of flexible composition adjustment but also suffers from low target utilization, poor compositional uniformity, and slow deposition rates. Another method is single-alloy target sputtering. This method first prepares a multi-principal alloy target and then uses a single target for sputtering to obtain a high-entropy alloy coating with uniform composition. This method offers high deposition rates, stable film composition, and good process repeatability, making it the preferred option for industrial production. However, it places high demands on the density and compositional uniformity of the target material. The main technical challenges in preparing existing multi-principal alloy targets include: the diverse composition of the multi-principal alloy elements makes uniform target mixing difficult due to density differences, particle size differences, and oxidation of active metals; the large differences in melting points lead to complex multi-component synergistic diffusion paths, and while the delayed diffusion effect is beneficial for nanocrystal formation, it also hinders rapid densification at high temperatures. Therefore, developing novel high-hardness and wear-resistant multi-principal compound coatings will help enrich the alloy system of vapor deposition targets and is of great significance for surface strengthening of metal parts. Summary of the Invention

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide an Al target material for high-hardness, wear-resistant, and corrosion-resistant compound coatings. x Ce y CoCrNiTi m Zr and its preparation method.

[0004] The present invention provides a high-hardness wear-resistant and corrosion-resistant compound coating target Al x Ce y CoCrNiTi m Zr and a preparation method thereof. The high-hardness wear-resistant and corrosion-resistant compound target is prepared by combining mechanical alloying, spark plasma sintering and hot extrusion processes, and the chemical formula of the compound is Al x Ce y CoCrNiTi m Zr. The compound has a two-phase structure composed of P1 (close-packed hexagonal structure, space group P63 / mmc(194), lattice constants a=b=0.500487nm, c=0.810140nm) and P2 (close-packed hexagonal structure, space group P63 / mmc(194), lattice constants a=b=0.763214nm, c=0.754078nm); the prepared Al x Ce y CoCrNiTi m Zr coating not only has high hardness and good wear resistance, but also has good oxidation resistance.

[0005] The technical solution for implementing the present invention is: a preparation method of a target for high-hardness wear-resistant and corrosion-resistant compound coating, characterized in that the specific steps are as follows:

[0006] (1) According to the chemical formula Al of the target for compound coating x Ce y CoCrNiTi m Zr, wherein 0.10≤x≤1.00; 0.01≤y≤0.15; 0.10≤m ≤1.00; 0.01<x / (x+y+m+4)<0.20; 0.001<y / (x+y+m+4)<0.030; 0.01<m / (x+y+m+4) <0.20; weighing pure metal powder of each required metal element respectively;

[0007] (2) Placing the above raw material pure metal powder in a ball milling tank under a protective gas atmosphere for mechanical alloying at a rotation speed of 200 rpm for 1.5 h; then taking it out under a protective gas atmosphere and placing it in a graphite mold;

[0008] (3) Placing the above graphite mold into a spark plasma sintering furnace for sintering; after cooling to room temperature, taking out the sintered bar and placing it in a vacuum hot extrusion furnace, firstly performing induction heating to 800°C, then placing it into a hot extrusion mold for hot extrusion; thereby obtaining the high-hardness wear-resistant and corrosion-resistant compound coating target Al x Ce y CoCrNiTi m Zr.

[0009] In step (1), the purity of the pure metal powder is higher than 99.5%.

[0010] The protective gas in step (2) is argon or nitrogen.

[0011] The sintering process in step (3) is as follows: heat treatment at 1100℃ for 10 min, pressure of 50 MPa.

[0012] The hot extrusion process in step (3) is as follows: the extrusion ratio is 16:1 and the extrusion speed is 8 mm / s.

[0013] The beneficial effects of the present invention are: (1) The present invention uses mechanical alloying, spark plasma sintering and hot extrusion fusion process to prepare high hardness wear-resistant and corrosion-resistant compound target material. The mechanical alloying process is used to pre-alloy the alloy powder, and then the spark plasma sintering process is used to significantly improve the density and composition uniformity; and the hot extrusion process is used to further improve the density of the target material; (2) The target material Al prepared by the present invention has a two-phase structure consisting of P1 (close-packed hexagonal structure, space group P63 / mmc(194), lattice constant a=b=0.500487nm, c=0.810140nm) and P2 (close-packed hexagonal structure, space group P63 / mmc(194), lattice constant a=b=0.763214nm, c=0.754078nm) for high hardness wear-resistant and corrosion-resistant compound coating Al x Ce y CoCrNiTi m Zr, the proportion of the two phases can be adjusted by composition and process according to specific working conditions and performance requirements; (3) The alloy elements of the compound target material prepared by this invention are diverse, and the gradient self-adjustment of the internal composition of the coating can be carried out based on factors such as matrix composition, mixing enthalpy and mixing entropy between elements. It can form a good bonding interface with various matrices, and the hardness can reach 1095HV. The self-corrosion current density is 1.36μA·cm. -2 The annual corrosion rate is 0.013650 mm / year. Attached Figure Description

[0014] Figure 1 This is the X-ray diffraction pattern of the target material for the high-hardness, wear-resistant, and corrosion-resistant compound coating prepared in Example 1;

[0015] Figure 2 These are metallographic photographs of the target material for the high-hardness, wear-resistant, and corrosion-resistant compound coating prepared in Example 1;

[0016] Figure 3 The polarization curve of the target material for the high-hardness, wear-resistant, and corrosion-resistant compound coating prepared in Example 1 in 3.5% NaCl solution;

[0017] Figure 4The impedance spectrum of the target material for the high-hardness, wear-resistant, and corrosion-resistant compound coating prepared in Example 1 in 3.5% NaCl solution. Detailed Implementation

[0018] The technical solution of the present invention is not limited to the specific embodiments listed below, but also includes any combination of the specific embodiments. Example 1

[0019] According to the chemical formula of the target material used for compound coating, AlCe 0.01 0.40 mol of aluminum powder, cobalt powder, chromium powder, nickel powder, titanium powder, zirconium powder, and 0.004 mol of cerium powder were weighed out, respectively, with the purity of all powders exceeding 99.5%. The pure metal powders were mechanically alloyed in a ball mill jar under argon gas at 200 rpm for 1.5 hours. The mixture was then removed under argon gas and placed in a graphite mold. The graphite mold was then sintered in a spark plasma sintering furnace at 1100℃ for 10 minutes under a pressure of 50 MPa. After cooling to room temperature, the sintered rod was removed and placed in a vacuum hot extrusion furnace. It was first induction heated to 800℃ and then hot extruded into a hot extrusion mold at an extrusion ratio of 16:1 and an extrusion speed of 8 mm / s. This yielded AlCe target material for high-hardness, wear-resistant, and corrosion-resistant compound coatings. 0.01 CoCrNiTiZr. Example 2

[0020] According to the chemical formula Al of the target material used for compound coating 0.1 Ce 0.1 0.04 mol of aluminum powder, 0.40 mol of cerium powder, and 0.40 mol of cobalt powder, chromium powder, nickel powder, titanium powder, and zirconium powder were weighed out from CoCrNiTiZr, respectively. The purity of the powders was higher than 99.5%. The pure metal powders were mechanically alloyed in a ball mill jar under an argon atmosphere at a speed of 200 rpm for 1.5 h. The mixture was then removed under an argon atmosphere and placed in a graphite mold. The graphite mold was then placed in a spark plasma sintering furnace for sintering at 1100℃ for 10 min at a pressure of 50 MPa. After cooling to room temperature, the sintered rod was removed and placed in a vacuum hot extrusion furnace. It was first induction heated to 800℃ and then placed in a hot extrusion mold for hot extrusion at an extrusion ratio of 16:1 and an extrusion speed of 8 mm / s. The resulting Al target material for high-hardness, wear-resistant, and corrosion-resistant compound coatings was obtained. 0.1 Ce 0.1 CoCrNiTiZr. Example 3

[0021] According to the chemical formula of the target material used for compound coating, AlCe 0.1 CoCrNiTi0.1 Zr was weighed out in batches of 0.40 mol aluminum powder, cobalt powder, chromium powder, nickel powder, zirconium powder, and 0.04 mol cerium powder and titanium powder, with the purity of all powders exceeding 99.5%. The pure metal powders were mechanically alloyed in a ball mill jar under argon gas at 200 rpm for 1.5 h. The mixture was then removed under argon gas and placed in a graphite mold. The graphite mold was then placed in a spark plasma sintering furnace for sintering at 1100℃ for 10 min at a pressure of 50 MPa. After cooling to room temperature, the sintered rod was removed and placed in a vacuum hot extrusion furnace. It was first induction heated to 800℃ and then hot extruded into a hot extrusion mold at an extrusion ratio of 16:1 and an extrusion speed of 8 mm / s. This yielded AlCe target material for high-hardness, wear-resistant, and corrosion-resistant compound coatings. 0.1 CoCrNiTi 0.1 Zr. Example 4

[0022] According to the chemical formula Al of the target material used for compound coating 0.5 Ce 0.15 CoCrNiTi 0.5 Zr was weighed out as follows: 0.20 mol of aluminum powder, 0.06 mol of titanium powder, 0.40 mol of cobalt powder, chromium powder, nickel powder, and zirconium powder, all with a purity higher than 99.5%. The pure metal powders were mechanically alloyed in a ball mill jar under nitrogen atmosphere at 200 rpm for 1.5 hours. The mixture was then removed under nitrogen atmosphere and placed in a graphite mold. The graphite mold was then placed in a spark plasma sintering furnace for sintering at 1100℃ for 10 minutes at a pressure of 50 MPa. After cooling to room temperature, the sintered rod was removed and placed in a vacuum hot extrusion furnace. It was first induction heated to 800℃ and then hot extruded into a hot extrusion mold at an extrusion ratio of 16:1 and an extrusion speed of 8 mm / s. This yielded Al, a high-hardness, wear-resistant, and corrosion-resistant target material for compound coatings. 0.5 Ce 0.15 CoCrNiTi 0.5 Zr. Example 5

[0023] According to the chemical formula of the target material used for compound coating, AlCe 0.01 CoCrNiTi 0.5Zr was weighed out as follows: 0.40 mmol of aluminum powder, cobalt powder, chromium powder, nickel powder, zirconium powder, 0.004 mol of cerium powder, and 0.20 mol of titanium powder, all with a purity higher than 99.5%. The pure metal powders were mechanically alloyed in a ball mill jar under nitrogen atmosphere at 200 rpm for 1.5 h. The mixture was then removed under nitrogen atmosphere and placed in a graphite mold. The graphite mold was then placed in a spark plasma sintering furnace for sintering at 1100℃ for 10 min at a pressure of 50 MPa. After cooling to room temperature, the sintered rod was removed and placed in a vacuum hot extrusion furnace. It was first induction heated to 800℃ and then hot extruded into a hot extrusion mold at an extrusion ratio of 16:1 and an extrusion speed of 8 mm / s. This yielded AlCe target material for high-hardness, wear-resistant, and corrosion-resistant compound coatings. 0.01 CoCrNiTi 0.5 Zr. Example 6

[0024] According to the chemical formula Al of the target material used for compound coating 0.5 Ce 0.01 0.20 mol of aluminum powder, 0.004 mol of cerium powder, and 0.40 mol of cobalt powder, chromium powder, nickel powder, titanium powder, and zirconium powder were weighed out from CoCrNiTiZr, respectively. The purity of the powders was higher than 99.5%. The pure metal powders were mechanically alloyed in a ball mill jar under nitrogen atmosphere at a speed of 200 rpm for 1.5 h. The mixture was then removed under nitrogen atmosphere and placed in a graphite mold. The graphite mold was then placed in a spark plasma sintering furnace for sintering at 1100℃ for 10 min at a pressure of 50 MPa. After cooling to room temperature, the sintered rod was removed and placed in a vacuum hot extrusion furnace. It was first induction heated to 800℃ and then placed in a hot extrusion mold for hot extrusion at an extrusion ratio of 16:1 and an extrusion speed of 8 mm / s. The resulting Al target material for high-hardness, wear-resistant, and corrosion-resistant compound coatings was obtained. 0.5 Ce 0.01 CoCrNiTiZr.

Claims

1. A method for preparing a target material for a high-hardness, wear-resistant, and corrosion-resistant compound coating, characterized in that... The chemical formula of the compound is Al x Ce y CoCrNiTi m Zr, wherein 0.10≤x≤1.00; 0.01≤y≤0.15; 0.10≤m ≤1.00; 0.01<x / (x+y+m+4)<0.20; 0.001<y / (x+y+m+4)<0.030; 0.01<m / (x+y+m+4) <0.20; and the compound of the target material is Al which is a two-phase structure composed of P1 (close-packed hexagonal structure, space group P63 / mmc(194), lattice constants a=b=0.500487nm, c=0.810140nm) and P2 (close-packed hexagonal structure, space group P63 / mmc(194), lattice constants a=b=0.763214nm, c=0.754078nm) x Ce y CoCrNiTi m Zr compound, and the preparation method of the target material for the compound coating comprises the following steps: (1) According to the chemical formula of the target material for compound coating Al x Ce y CoCrNiTi m Zr, wherein 0.10≤x≤1.00; 0.01≤y≤0.15; 0.10≤m ≤1.00; 0.01<x / (x+y+m+4)<0.20; 0.001<y / (x+y+m+4)<0.030; 0.01<m / (x+y+m+4)<0.20; weigh the required pure metal powder of each metal element respectively; (2) The above-mentioned raw material pure metal powder was placed in a ball mill jar under a protective gas environment for mechanical alloying at a speed of 200 rpm for 1.5 h; then it was taken out under a protective gas environment and placed in a graphite mold. (3) The graphite mold is placed in a spark plasma sintering furnace for sintering; after cooling to room temperature, the sintered rod is taken out and placed in a vacuum hot extrusion furnace, first induction heated to 800°C, and then placed in a hot extrusion mold for hot extrusion; thus, Al is obtained as a target material for high hardness, wear resistance and corrosion resistance compound coating. x Ce y CoCrNiTi m Zr.

2. The method for preparing a target material for a high-hardness, wear-resistant, and corrosion-resistant compound coating as described in claim 1, characterized in that: In step (1), the purity of the pure metal powder is higher than 99.5%.

3. The method for preparing a target material for a high-hardness, wear-resistant, and corrosion-resistant compound coating as described in claim 1, characterized in that: The protective gas in step (2) is argon or nitrogen.

4. The method for preparing a target material for a high-hardness, wear-resistant, and corrosion-resistant compound coating as described in claim 1, characterized in that: The sintering process in step (3) is as follows: heat treatment at 1100℃ for 10 min, pressure of 50 MPa.

5. The method for preparing a target material for a high-hardness, wear-resistant, and corrosion-resistant compound coating as described in claim 1, characterized in that: The hot extrusion process in step (3) is as follows: the extrusion ratio is 16:1 and the extrusion speed is 8 mm / s.

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