A micro-nano processed piezoelectric inflation device

Abstract

The application relates to the field of piezoelectric pumps, in particular to a micro-nano processed piezoelectric inflating device which comprises a rack mechanism, an air inlet mechanism, an upper metal plate, an air inlet flow path plate arranged at the bottom of the upper metal plate, an upper valve film layer arranged between the upper metal plate and the air inlet flow path plate, air inlet holes arranged on the upper metal plate and the air inlet flow path plate, and an upper cavity layer arranged at the bottom of the air inlet flow path plate; and a vibration mechanism arranged below the air inlet mechanism and comprising a metal base material and a piezoelectric ceramic installed at the center of the surface of the metal base material. The piezoelectric inflating device adopts laser welding instead of traditional adhesive to assemble layers, fundamentally eliminates the decrease of bonding force and the change of key gaps caused by the aging of the adhesive under the environment of high temperature, high humidity and mechanical impact, and significantly improves the long-term reliability and environmental adaptability of the product in harsh scenes such as medical monitoring.

Description

Technical Field

[0001] This invention relates to the field of piezoelectric pumps, and in particular to a micro-nano fabricated piezoelectric gas filling device. Background Technology

[0002] Currently, piezoelectric pumps for blood pressure monitoring are mainly used in scenarios such as human blood pressure and heart rate detection and smart wearables. Piezoelectric pumps make portable health monitoring possible, and have a large market demand and promising industry prospects.

[0003] Existing technologies suffer from a core flaw: unstable flow rate and back pressure. This directly leads to errors in blood pressure detection and results in extremely high requirements for material properties and process assembly consistency, leading to low yield and production efficiency. Specifically, the vibration gaps between the upper and lower flow paths and valve gaps often require subsequent adjustments for control, making it difficult to guarantee consistency. Existing structures rely heavily on different types of adhesives for pressure-holding and curing. Under harsh environments such as high temperature, low temperature, and high humidity, the adhesives are prone to significant decreases in bonding strength, causing uncontrollable changes in critical gaps and resulting in drastic fluctuations in back pressure and flow rate. Furthermore, existing technologies cannot meet the reliability requirements of vibration and mechanical shock tests. Uncontrollable changes in gaps can also cause backflow and crosstalk of incoming and outgoing gases, generating howling noise and severely affecting the user experience and measurement accuracy. To address this, a micro-nano fabricated piezoelectric gas filling device is proposed. Summary of the Invention

[0004] In view of the problems existing in the above or prior art, the present invention is proposed.

[0005] Therefore, the object of the present invention is to provide a micro / nano-fabricated piezoelectric gas charging device.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution: including, The air intake mechanism includes an upper metal plate, an air intake passage plate located at the bottom of the upper metal plate, an upper valve diaphragm layer disposed between the upper metal plate and the air intake passage plate, an air intake hole opened on the upper metal plate and the air intake passage plate, and an upper cavity layer located at the bottom of the air intake passage plate. A vibration mechanism, located below the air intake mechanism, includes a metal substrate, a piezoelectric ceramic mounted at the center of the surface of the metal substrate; and... An air outlet mechanism, located below the vibration mechanism, includes a lower metal plate. An air outlet path plate is provided on the upper part of the lower metal plate. A lower valve diaphragm layer is provided between the lower metal plate and the air outlet path plate. Air outlet holes are provided on both the air outlet path plate and the lower metal plate. A vent hole is also provided on the lower metal plate. A lower cavity layer is also provided between the air outlet path plate and the metal substrate.

[0007] As a preferred embodiment of the piezoelectric inflation device fabricated by the present invention, the air inlet is arranged in a circular array of multiple holes.

[0008] As a preferred embodiment of the piezoelectric inflation device fabricated by the present invention, wherein: an upper valve hole is provided on the surface of the upper valve membrane layer, and the upper valve hole and the air inlet hole are offset from each other.

[0009] As a preferred embodiment of the piezoelectric gas-filling device for micro-nano fabrication of the present invention, wherein: the lower valve membrane layer has a lower valve hole, and the lower valve hole and the gas outlet are staggered.

[0010] As a preferred embodiment of the piezoelectric inflation device fabricated by the present invention, both the upper valve membrane layer and the lower valve membrane layer are supported by flexible materials, which have a certain degree of extensibility.

[0011] As a preferred embodiment of the piezoelectric gas-filling device fabricated by the present invention, the piezoelectric ceramic can achieve its own displacement through the inverse piezoelectric effect.

[0012] As a preferred embodiment of the piezoelectric gas-filling device fabricated by the present invention, the air inlet mechanism, the vibration mechanism and the air outlet mechanism are all assembled between each layer by laser welding to ensure structural sealing.

[0013] As a preferred embodiment of the piezoelectric gas-filling device for micro-nano fabrication of the present invention, wherein: a cavity is provided on the inner side of both the upper cavity layer and the lower cavity layer.

[0014] As a preferred embodiment of the piezoelectric inflation device fabricated by the present invention, wherein the cavities of the upper cavity layer and the lower cavity layer are respectively connected to the air inlet and the air outlet.

[0015] As a preferred embodiment of the piezoelectric gas-filling device for micro-nano fabrication of the present invention, the two cavities are connected to each other, and the airflow can move unidirectionally from the inlet to the outlet through the deformation of the valve diaphragm layer.

[0016] The beneficial effects of the micro-nano fabricated piezoelectric gas filling device of the present invention are as follows: by using laser welding to replace traditional adhesives for interlayer assembly, the decrease in bonding strength and changes in critical gaps caused by adhesive aging under high temperature, high humidity and mechanical impact environments are fundamentally eliminated, and the long-term reliability and environmental adaptability of the product in harsh scenarios such as medical monitoring are significantly improved. The precise misalignment design of the upper valve hole and the air inlet hole, and the lower valve hole and the air outlet hole in the air inlet and air outlet mechanisms, combined with the elastic deformation of the flexible valve diaphragm layer, enables the one-way valve to open and close spontaneously and reliably, completely avoiding gas backflow, crosstalk and whistling problems caused by improper gap control, and ensuring excellent stability of airflow output. Piezoelectric ceramics prepared using micro-nano processes exhibit superior grain uniformity, low dielectric loss, and high displacement response accuracy, providing a stable core driving force for high back pressure and high flow output. By flexibly adjusting parameters such as valve diaphragm material, thickness, Young's modulus, and orifice and cavity dimensions, back pressure and flow characteristics can be easily adjusted, perfectly adapting to the high stability, miniaturization, and mass production consistency requirements of portable blood pressure detection, heart rate monitoring, and smart wearable devices for micro gas sources. This effectively solves the problem of blood pressure determination error caused by unstable flow and back pressure in existing technologies. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the overall structure of the piezoelectric gas-filling device for micro-nano fabrication.

[0019] Figure 2 A schematic diagram of the exploded structure of a piezoelectric gas-filling device for micro-nano fabrication.

[0020] Figure 3 A cross-sectional schematic diagram of a piezoelectric gas-filling device for micro-nano fabrication.

[0021] In the diagram: 100, intake mechanism; 101, upper metal plate; 102, intake airflow path plate; 103, upper valve diaphragm layer; 104, intake port; 105, upper valve port; 106, upper cavity layer; 200, vibration mechanism; 201, metal substrate; 202, piezoelectric ceramic; 300, exhaust mechanism; 301, lower metal plate; 302, exhaust airflow path plate; 303, lower valve diaphragm layer; 304, exhaust port; 305, venting port; 306, lower valve port; 307, lower cavity layer. Detailed Implementation

[0022] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0023] Example Reference Figures 1-3 This is one embodiment of the present invention, which provides a micro-nano fabricated piezoelectric gas charging device, which includes an air inlet mechanism 100, a vibration mechanism 200 and an air outlet mechanism 300.

[0024] Specifically, the air intake mechanism 100, vibration mechanism 200 and air outlet mechanism 300 are all assembled by laser welding between each layer, replacing the traditional adhesive curing process. This fundamentally avoids the decrease in bonding strength and changes in critical gaps caused by adhesive aging under high temperature, high humidity and mechanical impact environments, thereby significantly improving the long-term reliability and consistency of the product in harsh medical monitoring environments.

[0025] The intake mechanism 100 includes an upper metal plate 101, an intake air passage plate 102 located at the bottom of the upper metal plate 101, an upper valve diaphragm layer 103 disposed between the upper metal plate 101 and the intake air passage plate 102, an intake hole 104 opened on the upper metal plate 101 and the intake air passage plate 102, and an upper cavity layer 106 located at the bottom of the intake air passage plate 102.

[0026] The vibration mechanism 200 is located below the air intake mechanism 100 and includes a metal substrate 201 and a piezoelectric ceramic 202 mounted at the center of the surface of the metal substrate 201. The piezoelectric ceramic 202 is fabricated using micro-nano processing technology. By precisely controlling the grain size of the ceramic material and the microstructure of the electrode layer, higher consistency, lower dielectric loss, and better displacement response characteristics are achieved. Based on the inverse piezoelectric effect, the piezoelectric ceramic 202 generates precise and controllable alternating up and down displacements under the drive of an alternating electric field. Working in conjunction with the metal substrate 201, it periodically changes the cavity volume, thereby generating a stable internal pressure difference, providing the core driving force for achieving high back pressure and high flow output.

[0027] The air outlet mechanism 300 is located below the vibration mechanism 200 and includes a lower metal plate 301. An air outlet path plate 302 is provided on the upper part of the lower metal plate 301. A lower valve diaphragm layer 303 is provided between the lower metal plate 301 and the air outlet path plate 302. Air outlet holes 304 are provided on both the air outlet path plate 302 and the lower metal plate 301. A vent hole 305 is also provided on the lower metal plate 301. A lower cavity layer 307 is also provided between the air outlet path plate 302 and the metal substrate 201.

[0028] Furthermore, an upper valve diaphragm 103 has an upper valve hole 105 on its surface. This upper valve hole 105 is staggered with the air inlet 104, forming an interlaced opening structure. When the piezoelectric ceramic 202 moves downward, the flexible upper valve diaphragm 103 undergoes downward elastic deformation, allowing airflow to smoothly enter the upper cavity layer 106 through the air inlet 104 of the upper metal plate 101 and the upper valve hole 105. When the piezoelectric ceramic 202 moves upward, the upper valve diaphragm 103, under the action of pressure difference and its own rebound force, tightly adheres to the bottom surface of the upper metal plate 101, instantly closing the air inlet channel and effectively preventing gas backflow. This solves the problems of backflow, crosstalk, and whistling caused by improper clearance control in traditional one-way valves.

[0029] The lower valve diaphragm layer 303 has a lower valve hole 306, which is offset from the outlet hole 304. When the piezoelectric ceramic 202 moves upward, the airflow is pushed from the upper cavity layer 106 to the lower cavity layer 307. Under pressure, the lower valve diaphragm layer 303 is displaced upward, and the lower valve hole 306 connects with the outlet hole 304, allowing the airflow to flow out stably through the outlet hole 304. When the piezoelectric ceramic 202 moves downward, the lower valve diaphragm layer 303 closes to prevent backflow of airflow during the intake phase. Through the precise offset cooperation between the inlet hole 104, the upper valve hole 105, the outlet hole 304, and the lower valve hole 306, combined with the interconnected cavities on the inner sides of the upper cavity layer 106 and the lower cavity layer 307, a unidirectional, stable, and whistling-free airflow from the inlet to the outlet is achieved. At the same time, the vent hole 305 can quickly open to release pressure under instantaneous reverse pressure impact, protecting the device's safety.

[0030] Preferably, both the upper valve diaphragm layer 103 and the lower valve diaphragm layer 303 are supported by flexible materials with a certain degree of extensibility. By adjusting the material type, thickness, Young's modulus, and orifice diameter, number, and distribution of the valve diaphragm, and by combining the synergistic optimization of parameters such as the thickness of the metal substrate 201 and the cavity size, the back pressure and flow output characteristics of the pump body can be flexibly adjusted, making it perfectly suited to the stringent requirements of portable blood pressure monitoring, heart rate monitoring, and smart wearable devices for gas source volume and stability.

[0031] In use, when an alternating electric field is applied to the piezoelectric ceramic 202, which is fabricated using micro-nano technology, in the vibration mechanism 200, the piezoelectric ceramic 202 generates alternating upward and downward displacements based on the inverse piezoelectric effect, driving the metal substrate 201 to vibrate synchronously. During the downward movement of the piezoelectric ceramic 202, the volume of the upper cavity layer 106 expands to form a negative pressure. The flexible upper valve diaphragm layer 103 in the air intake mechanism 100 undergoes downward extensible deformation under the pressure difference, causing the upper valve hole 105 to change from a misaligned state to a connected state with the air intake hole 104 on the upper metal plate 101 and the air intake path plate 102. External gas is drawn into the upper cavity layer 106 through the air intake hole 104 and the upper valve hole 105. At the same time, the lower valve diaphragm layer 303 in the air outlet mechanism 300 remains closed to prevent gas from flowing back from the air outlet. During the upward movement of the piezoelectric ceramic 202, the volume of the upper cavity layer 106 decreases and the pressure increases. Under positive pressure, the upper valve diaphragm layer 103 tightly adheres to the bottom surface of the upper metal plate 101, causing the upper valve hole 105 and the air inlet 104 to return to their misaligned closure, preventing gas from flowing back to the upper metal plate 101. Simultaneously, the pressurized gas enters the lower cavity layer 307, pushing the lower valve diaphragm layer 303 to deform upward, connecting the lower valve hole 306 with the air outlet 304, allowing the gas to be stably output outward through the air outlet 304. During this process, the vent hole 305 can quickly open to release pressure during instantaneous reverse pressure impact. Through the periodic high-frequency vibration of the piezoelectric ceramic 202, combined with the misaligned opening and closing sequence of the upper and lower valve diaphragm layers 303 and their corresponding channels, continuous, unidirectional, and whistling-free stable pumping of gas from the air inlet to the air outlet is achieved.

[0032] In summary, by using laser welding instead of traditional adhesives for interlayer assembly, the decrease in bonding strength and changes in critical gaps caused by adhesive aging under high temperature, high humidity, and mechanical impact environments are fundamentally eliminated, significantly improving the long-term reliability and environmental adaptability of the product in harsh scenarios such as medical monitoring. The precisely misaligned opening design of the upper valve hole 105 and the air inlet hole 104, and the lower valve hole 306 and the air outlet hole 304 in the air inlet mechanism 100 and the air outlet mechanism 300, combined with the elastic deformation of the flexible valve diaphragm layer, enables the spontaneous and reliable opening and closing of the one-way valve, completely avoiding gas backflow, crosstalk, and whistling problems caused by improper gap control, ensuring excellent airflow output stability. The piezoelectric ceramic 202, prepared using micro-nano technology, has superior grain uniformity, low dielectric loss, and high displacement response accuracy, providing a stable core driving force for high back pressure and high flow output. By flexibly adjusting parameters such as valve diaphragm material, thickness, Young's modulus, and orifice and cavity dimensions, back pressure and flow characteristics can be easily adjusted, perfectly adapting to the high stability, miniaturization, and mass production consistency requirements of portable blood pressure detection, heart rate monitoring, and smart wearable devices for micro gas sources. This effectively solves the problem of blood pressure determination error caused by unstable flow and back pressure in existing technologies.

[0033] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A micro / nano-fabricated piezoelectric inflation device, characterized in that: include, The air intake mechanism (100) includes an upper metal plate (101), an air intake passage plate (102) located at the bottom of the upper metal plate (101), an upper valve diaphragm layer (103) disposed between the upper metal plate (101) and the air intake passage plate (102), an air intake hole (104) opened on the upper metal plate (101) and the air intake passage plate (102), and an upper cavity layer (106) located at the bottom of the air intake passage plate (102). A vibration mechanism (200), located below the air intake mechanism (100), includes a metal substrate (201), a piezoelectric ceramic (202) mounted at the center of the surface of the metal substrate (201); and, An air outlet mechanism (300), located below the vibration mechanism (200), includes a lower metal plate (301), an air outlet path plate (302) is provided on the upper part of the lower metal plate (301), a lower valve diaphragm layer (303) is provided between the lower metal plate (301) and the air outlet path plate (302), air outlet holes (304) are provided on both the air outlet path plate (302) and the lower metal plate (301), an air vent hole (305) is also provided on the lower metal plate (301), and a lower cavity layer (307) is also provided between the air outlet path plate (302) and the metal substrate (201).

2. The micro / nano-fabricated piezoelectric gas filling device as described in claim 1, characterized in that: The air inlets (104) are arranged in a circular array of multiple holes.

3. The micro / nano-fabricated piezoelectric gas filling device as described in claim 2, characterized in that: The upper valve diaphragm layer (103) has an upper valve hole (105) on its surface, and the upper valve hole (105) is offset from the air inlet hole (104).

4. The micro / nano-fabricated piezoelectric gas filling device as described in claim 3, characterized in that: The lower valve membrane layer (303) has a lower valve hole (306), which is offset from the air outlet (304).

5. The micro / nano-fabricated piezoelectric gas filling device as described in claim 4, characterized in that: Both the upper valve membrane layer (103) and the lower valve membrane layer (303) are supported by flexible materials, which have a certain degree of extensibility.

6. The micro / nano-fabricated piezoelectric gas filling device as described in claim 5, characterized in that: The piezoelectric ceramic (202) can achieve its own displacement through the inverse piezoelectric effect.

7. The micro / nano-fabricated piezoelectric gas filling device as described in claim 6, characterized in that: The air intake mechanism (100), vibration mechanism (200) and air outlet mechanism (300) are all assembled between each layer by laser welding to ensure structural sealing.

8. The micro / nano-fabricated piezoelectric gas filling device as described in claim 7, characterized in that: Both the upper cavity layer (106) and the lower cavity layer (307) have cavities on their inner sides.

9. The micro / nano-fabricated piezoelectric gas filling device as described in claim 8, characterized in that: The cavities of the upper cavity layer (106) and the lower cavity layer (307) are respectively connected to the air inlet (104) and the air outlet (304).

10. The micro / nano-fabricated piezoelectric gas filling device as described in claim 9, characterized in that: The two cavities are connected, and the airflow can move unidirectionally from the inlet to the outlet by the deformation of the valve diaphragm layer.

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