Gantry photographing device and method for flying shot thereof

Abstract

The application discloses a gantry photographing device and a flying photographing method thereof, and belongs to the technical field of FPD defect detection equipment. The gantry photographing device comprises a gantry frame and a microscope assembly. The gantry frame is provided with a panel detection area, an X-axis movement mechanism and a Y-axis movement mechanism. The microscope assembly comprises a microscope, an X-axis interpolation movement mechanism and a Y-axis interpolation movement mechanism. The X-axis interpolation movement mechanism and the Y-axis interpolation movement mechanism drive the microscope to perform reverse interpolation movement in corresponding directions respectively, so that the microscope and the panel to be photographed remain relatively stationary. The flying photographing method comprises controlling the X-axis movement mechanism and the Y-axis movement mechanism to move, controlling the X-axis interpolation movement mechanism and the Y-axis interpolation movement mechanism to perform reverse interpolation movement according to real-time position vectors, and keeping the microscope and the panel to be photographed relatively stationary. The application can realize clear flying photographing during gantry movement, improve detection efficiency, reduce vibration and positioning deviation, and improve positioning accuracy and image clarity.

Description

Technical Field

[0001] This application belongs to the technical field of FPD defect detection equipment, specifically relating to a gantry camera and its aerial photography method. Background Technology

[0002] With the rapid development of the display panel industry, the precision of FPD defect detection has improved from the early millimeter level to the micrometer level (1-5μm) and even the submicrometer level (0.1-1μm). Traditional fixed microscopes cannot achieve full-area coverage inspection of large-size panels such as OLED panels. Due to its wide coverage and high positioning accuracy, the gantry structure has become the mainstream solution for modern FPD defect detection.

[0003] Currently, most gantry camera devices use a fixed-point shooting mode, where the gantry axis moves to the target position and comes to a complete stop before taking a picture. However, this mode has significant drawbacks: the gantry structure has a large overall inertia, making it unable to stop quickly after high-speed operation. This not only prolongs the equipment cycle time but also generates significant positional errors. Furthermore, the gantry's mechanical structure has inherent play, which easily causes vibration and positional deviations when stopping at high speed, severely affecting the accuracy of image positioning and image clarity, making it difficult to meet the high-efficiency and high-precision requirements of FPD defect detection. Summary of the Invention

[0004] The purpose of this application is to at least solve one of the technical problems existing in the prior art, and to provide a gantry photography device and its flying photography method, which keeps the microscope and the panel to be photographed relatively stationary by reverse interpolation, thereby achieving high-speed, clear and stable flying photography detection.

[0005] The technical solution adopted by this application to solve its technical problem is: Firstly, a gantry-type photography device includes: A gantry frame is provided with a panel detection area, an X-axis motion mechanism and a Y-axis motion mechanism. The X-axis motion mechanism is used to drive the Y-axis motion mechanism to move along the X-axis direction above the panel detection area. The microscope assembly includes a Y-axis motion mechanism for driving the microscope assembly to move along the Y-axis. The microscope assembly includes a microscope, an X-axis interpolation motion mechanism, and a Y-axis interpolation motion mechanism. The X-axis interpolation motion mechanism drives the microscope to perform reverse interpolation motion along the X-axis direction, and the Y-axis interpolation motion mechanism drives the microscope to perform reverse interpolation motion along the Y-axis direction, so that the microscope and the panel to be photographed located in the panel detection area remain relatively stationary.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the gantry frame further includes a Y-axis reference beam, the X-axis motion mechanism is used to drive the Y-axis reference beam to move synchronously with the Y-axis motion mechanism, and the microscope assembly further includes a distance measuring device, which is mounted on the microscope to collect the distance between the microscope and the Y-axis reference beam along the X-axis direction.

[0007] In combination with the first aspect and the above-described implementations, in some implementations of the first aspect, the X-axis motion mechanism includes an X-axis drive assembly, a first X-axis guide rail and a second X-axis guide rail spaced apart along the Y-axis direction, the gantry frame forming the panel detection area between the first X-axis guide rail and the second X-axis guide rail, the X-axis drive assembly driving the Y-axis motion mechanism to move along the first X-axis guide rail and the second X-axis guide rail, the Y-axis motion mechanism including a Y-axis drive assembly and a Y-axis guide rail, the Y-axis drive assembly driving the microscope assembly to move along the Y-axis guide rail, the Y-axis guide rail being mounted above the first X-axis guide rail and the second X-axis guide rail via columns, and the Y-axis reference beam being mounted between the two columns.

[0008] In combination with the first aspect and the above-described implementations, in some implementations of the first aspect, the weight of the Y-axis reference beam is lighter than the weight of the Y-axis guide rail.

[0009] In combination with the first aspect and the above-described implementations, in some implementations of the first aspect, the X-axis interpolation motion mechanism includes an X-axis interpolation guide rail and an X-axis interpolation drive assembly, the X-axis interpolation drive assembly being used to drive the microscope to move on the X-axis interpolation guide rail; the Y-axis interpolation motion mechanism includes a Y-axis interpolation guide rail and a Y-axis interpolation drive assembly, the Y-axis interpolation drive assembly being used to drive the microscope to move on the Y-axis interpolation guide rail.

[0010] In conjunction with the first aspect and the above-described implementations, some implementations of the first aspect further include a controller, which is used to be electrically connected to the X-axis drive assembly, the Y-axis drive assembly, the X-axis interpolation drive assembly, the Y-axis interpolation drive assembly, and the ranging device.

[0011] Secondly, a method for taking photos using a gantry camera includes the following steps: The X-axis motion mechanism is controlled to drive the Y-axis motion mechanism to move along the X-axis direction, and the Y-axis motion mechanism drives the microscope assembly to move along the Y-axis direction; Based on the position vectors of the X-axis motion mechanism and the Y-axis motion mechanism, the X-axis interpolation motion mechanism and the Y-axis interpolation motion mechanism are controlled to perform reverse interpolation motion, so that the microscope and the panel to be photographed remain relatively stationary; The microscope is used to take pictures of the panel to be photographed.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the distance L between the microscope and the Y-axis reference beam along the X-axis is acquired in real time by the ranging device. MS_NOW ; The real-time distance L MS_NOW The preset static standard distance L MS_STD By comparison, the X-axis compensation amount is calculated: L MOVE =L MS_NOW -L MS_STD ; According to the X-axis compensation amount L MOVE The X-axis interpolation motion mechanism is controlled to perform X-axis fixed-distance compensation motion, so that the microscope and the Y-axis reference beam remain relatively stationary in the X-axis direction.

[0013] Combining the first aspect and the above implementation methods, in some implementation methods of the first aspect, when entering the capture position, the X-axis interpolation amount ΔX(t)=X(t)−X(t0) and the Y-axis interpolation amount ΔY(t)=Y(t)−Y(t0) are calculated in real time based on the real-time position vectors (X(t),Y(t)) of the X-axis motion mechanism and the Y-axis motion mechanism, and the position correction is completed by the X-axis interpolation motion mechanism moving ΔX(t) in the opposite direction and the Y-axis interpolation motion mechanism moving ΔY in the opposite direction; Wherein, t0 is the starting time when entering the capture position.

[0014] Combining the first aspect and the above-mentioned implementation methods, in some implementation methods of the first aspect, in the multi-layer structure process, the X-axis interpolation motion mechanism and the Y-axis interpolation motion mechanism perform reverse interpolation motion to maintain the position, so that the microscope can repeatedly capture images at the same position of the panel to be photographed.

[0015] One of the above technical solutions has at least one of the following advantages or beneficial effects: This application uses an X-axis and Y-axis interpolation motion mechanism to drive the microscope to perform reverse interpolation motion, keeping the microscope and the panel to be photographed relatively stationary. Clear aerial photography can be completed during the movement of the gantry frame, significantly improving detection efficiency. The aerial photography process eliminates the impact of starting and stopping the gantry frame, reducing vibration and positioning deviation, and significantly improving the photographic positioning accuracy and image clarity. The gantry imaging device of this application has a simple overall structure, and the aerial photography method is efficient and reliable. It can still ensure the stability of detection under high-speed movement, achieving high-speed, clear, and stable aerial photography detection, meeting the requirements of high-precision FPD defect detection. Attached Figure Description

[0016] The following description, in conjunction with the accompanying drawings, further illustrates this application: Figure 1This is a schematic diagram of the structure of one embodiment of the gantry camera device of this application; Figure 2 yes Figure 1 An enlarged view of point A shown; Figure 3 yes Figure 1 A top view schematic diagram of one embodiment is shown; Figure 4 This is a schematic diagram of the X-axis fixed-distance compensation principle of the aerial photography method of this application; Figure 5 This is an example diagram of the flight path of the flight photography method of this application; Figure 6 This is a schematic diagram of the reverse interpolation analysis of the capture point of the aerial photography method in this application; Figure 7 yes Figure 6 A schematic diagram of the reverse interpolation displacement relationship at different capture points at point B.

[0017] Explanation of icon numbers: 1-Gantry frame; 11-Panel inspection area; 12-X-axis motion mechanism; 121-First X-axis guide rail; 122-Second X-axis guide rail; 13-Y-axis motion mechanism; 131-Y-axis guide rail; 132-Column; 14-Y-axis reference beam; 15-Panel to be photographed; 2-Microscope assembly; 21-Support frame; 22-Microscope; 23-Interpolation motion mechanism; 24-Distance measuring device. Detailed Implementation

[0018] This section will describe in detail the specific embodiments of this application. Preferred embodiments of this application are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of this application, but they should not be construed as limiting the scope of protection of this application.

[0019] In this application, when directions (up, down, left, right, front, and back) are described, it is only for the purpose of describing the technical solution of this application, and does not indicate or imply that the technical features referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on this application.

[0020] In this application, "several" means one or more, "multiple" means two or more, "greater than," "less than," "exceeding," etc. are understood to exclude the stated number; "above," "below," "within," etc. are understood to include the stated number. In the description of this application, the terms "first" and "second" are used only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the order of the indicated technical features.

[0021] In this application, unless otherwise explicitly defined, the terms "setup," "installation," and "connection" should be interpreted broadly. For example, they can refer to direct connection or indirect connection through an intermediate medium; they can refer to fixed connection, detachable connection, or integral molding; they can refer to mechanical connection, electrical connection, or connection capable of mutual communication; they can refer to the internal connection of two components or the interaction between two components. Those skilled in the art can reasonably determine the specific meaning of the above terms in this application based on the specific content of the technical solution.

[0022] See Figures 1 to 3 This application provides a gantry imaging device, including a gantry frame 1 and a microscope assembly 2. The gantry frame 1 is provided with a panel detection area 11, an X-axis motion mechanism 12, and a Y-axis motion mechanism 13. The X-axis motion mechanism 12 is used to drive the Y-axis motion mechanism 13 to move along the X-axis direction above the panel detection area 11, so as to achieve a large-area coverage of the panel 15 (such as an OLED panel) to be photographed.

[0023] Y-axis motion mechanism 13 is used to drive microscope assembly 2 to move along the Y-axis direction, so that microscope assembly 2 can reach any target position within panel detection area 11.

[0024] The microscope assembly 2 includes a microscope 22 and an interpolation motion mechanism 23, wherein the interpolation motion mechanism 23 includes an X-axis interpolation motion mechanism and a Y-axis interpolation motion mechanism. The X-axis interpolation motion mechanism is used to drive the microscope 22 to perform reverse interpolation movement along the X-axis direction; the Y-axis interpolation motion mechanism is used to drive the microscope 22 to perform reverse interpolation movement along the Y-axis direction; through the above reverse interpolation movement, the microscope 22 and the panel 15 to be photographed located in the panel detection area 11 remain relatively stationary, thereby achieving clear aerial photography while the gantry frame 1 is in continuous motion.

[0025] The microscope assembly 2 also includes a support frame 21. Both the X-axis interpolation motion mechanism and the Y-axis interpolation motion mechanism are mounted on the support frame 21. The support frame 21 is slidably mounted on the Y-axis motion mechanism 13 to achieve stable guidance and load-bearing.

[0026] The gantry imaging device of this application drives the microscope 22 to perform reverse interpolation motion through the X-axis interpolation motion mechanism and the Y-axis interpolation motion mechanism, keeping the microscope 22 and the panel 15 to be photographed relatively stationary. Clear aerial photography can be completed during the movement of the gantry frame, significantly improving inspection efficiency. The aerial photography process eliminates the impact of starting and stopping the gantry frame 1, reducing vibration and positioning deviation, and significantly improving the imaging positioning accuracy and image clarity. The gantry imaging device of this application has a simple overall structure and a highly efficient and reliable aerial photography method. It can maintain the stability of inspection even under high-speed movement, achieving high-speed, clear, and stable aerial photography inspection, meeting the requirements of high-precision FPD defect detection.

[0027] See Figure 1 and Figure 2 In this embodiment, the gantry frame 1 also includes a Y-axis reference beam 14. The X-axis motion mechanism 12 is used to drive the Y-axis reference beam 14 and the Y-axis motion mechanism 13 to move synchronously, so that the Y-axis reference beam 14 and the Y-axis motion mechanism 13 maintain a relatively static positional relationship.

[0028] The microscope assembly 2 also includes a ranging device 24, which is fixedly installed on the microscope 22 and is used to collect the distance between the microscope 22 and the Y-axis reference beam 14 along the X-axis in real time, providing a detection basis for subsequent compensation.

[0029] Further, see Figures 1 to 3 The X-axis motion mechanism 12 includes a first X-axis guide rail 121 and a second X-axis guide rail 122 spaced apart along the Y-axis direction, and the panel detection area 11 is formed between the first X-axis guide rail 121 and the second X-axis guide rail 122.

[0030] The Y-axis motion mechanism 13 includes a Y-axis guide rail 131, which is mounted above the first X-axis guide rail 121 and the second X-axis guide rail 122 via a column 132.

[0031] The Y-axis reference beam 14 is fixedly installed between the two columns 132. The fixed installation structure can improve the accuracy of vibration reduction compensation, and the installation is simple and helps to reduce costs.

[0032] Furthermore, the Y-axis reference beam 14 is lighter than the Y-axis guide rail 131. This lightweight design reduces the inertia of the Y-axis reference beam 14 during movement, reduces motion vibration, and improves positioning stability and compensation accuracy.

[0033] Furthermore, see Figures 1 to 3 The X-axis interpolation motion mechanism includes an X-axis interpolation guide rail and an X-axis interpolation drive assembly. The X-axis interpolation drive assembly is used to drive the microscope 22 to move along the X-axis interpolation guide rail.

[0034] The Y-axis interpolation motion mechanism includes a Y-axis interpolation guide rail and a Y-axis interpolation drive assembly. The Y-axis interpolation drive assembly is used to drive the microscope 22 to move along the Y-axis interpolation guide rail. The two interpolation motion mechanisms are independent of each other, and respectively realize the reverse interpolation actions in the X and Y directions.

[0035] Specifically, the microscope 22 can be directly driven by the X-axis interpolation drive assembly to move along the X-axis interpolation guide rail, and the X-axis interpolation motion mechanism can be driven by the Y-axis interpolation motion mechanism to achieve reverse interpolation in the X and Y directions. Alternatively, the microscope 22 can be directly driven by the Y-axis interpolation drive assembly to move along the Y-axis interpolation guide rail, and the Y-axis interpolation motion mechanism can be driven by the X-axis interpolation motion mechanism to achieve reverse interpolation in the X and Y directions.

[0036] In some embodiments, the gantry camera device further includes a controller, which is electrically connected to the X-axis motion mechanism, the Y-axis motion mechanism, the X-axis interpolation motion mechanism, the Y-axis interpolation motion mechanism and the ranging device 24 to realize signal acquisition, logic operation and motion control.

[0037] See Figures 1 to 3 This application also provides a method for taking photos using a gantry camera, comprising the following steps: Step 1: Control the X-axis motion mechanism 12 to drive the Y-axis motion mechanism 13 to move along the X-axis direction, while the Y-axis motion mechanism 13 drives the microscope assembly 2 to move along the Y-axis direction; Step 2: Based on the real-time position vectors of the X-axis motion mechanism 12 and the Y-axis motion mechanism 13, control the X-axis interpolation motion mechanism and the Y-axis interpolation motion mechanism to perform reverse interpolation motion, so that the microscope 22 and the panel to be photographed 15 remain relatively stationary, and then use the microscope 22 to take pictures of the panel to be photographed 15 to complete the flying photography operation.

[0038] This flying image method uses the X-axis interpolation motion mechanism and the Y-axis interpolation motion mechanism to drive the microscope 22 to perform reverse interpolation motion, so that the microscope 22 and the panel 15 to be photographed remain relatively stationary. Clear flying images can be completed during the movement of the gantry frame. The flying image method is efficient and reliable, and can still ensure the stability of the detection under high-speed movement, so as to achieve high-speed, clear and stable flying image detection.

[0039] See Figure 4 In this embodiment of the aerial photography method, an X-axis distance compensation step is also included: The distance L between the microscope 22 and the Y-axis reference beam 14 along the X-axis is collected in real time by the ranging device 24. MS_NOW ; will real-time distance L MS_NOW The preset static standard distance L MS_STD By comparison, the X-axis compensation amount is calculated as: L MOVE =L MS_NOW -L MS_STD Among them, the preset static standard distance L MS_STD The reference distance between the ranging device 25 and the Y-axis reference beam 14 is obtained after calibration when the equipment is stationary.

[0040] Based on the X-axis compensation amount L MOV The X-axis interpolation motion mechanism is controlled to perform X-axis fixed-distance compensation motion, so that the microscope 22 and the Y-axis reference beam 14 remain relatively stationary in the X-axis direction, thus counteracting the position drift caused by the gantry vibration.

[0041] Further, see Figures 5 to 7 In this embodiment of the aerial photography method, real-time calculation of interpolation and position correction are also included: Based on the difference between the real-time position vectors of the X-axis motion mechanism 12 and the Y-axis motion mechanism 13 and the capture point, the X-axis interpolation amount and Y-axis interpolation amount, that is, the displacement of the X-compensation axis and the Y-compensation axis, are calculated in real time.

[0042] Specifically, relative stillness can only be achieved when the displacement vectors of the compensation axes (i.e., the X and Y compensation axes) are equal in magnitude and opposite in direction to the displacement vectors of the main motion axes (i.e., the X and Y axes), and their superposition equals zero. Figure 6 and Figure 7 As shown.

[0043] Specifically, during the capture time, that is, when entering the preset capture position, the X-axis interpolation motion mechanism and the Y-axis interpolation motion mechanism are in a continuous linkage interpolation motion state. The combined motion trajectory of the two is a smooth curve (with arc-shaped turning), rather than a broken line directly connected by discrete points. In this embodiment, the control logic of the compensation axis is to perform reverse following interpolation on the main motion trajectory: Using the initial time t0 of the capture window as a reference, the coordinates X(t) and Y(t) of the X-axis motion mechanism 12 and the Y-axis motion mechanism 13 at time t are acquired in real time to obtain the real-time position vector (X(t), Y(t)); by calculating the synchronous difference between the trajectories of the X-axis motion mechanism 12 and the Y-axis motion mechanism 13, the displacement command of the compensation axis is generated. ΔX(t) = X(t) − X(t0), ΔY(t) = Y(t) − Y(t0), Here, ΔX(t) and ΔY(t) represent the displacements of the X-axis and Y-axis at time t, respectively. These displacements are updated in real time with the changes in the main motion trajectory, rather than being calculated solely based on the coordinate difference between two discrete points, thus achieving precise reverse compensation for the curved turning trajectory. When the microscope 22 enters the capture position, the controller controls the X-axis interpolation motion mechanism and the Y-axis interpolation motion mechanism to perform reverse interpolation motion based on ΔX(t) and ΔY(t), completing the position correction and ensuring precise alignment at the capture moment.

[0044] Furthermore, in the flying image method, for the detection scenario of multi-layer structure process: the X-axis interpolation motion mechanism and the Y-axis interpolation motion mechanism continuously perform reverse interpolation motion to maintain the position, so that the microscope 22 can stably stay at the same position of the panel 15 to be photographed, realize repeated capture at the same position, and meet the layer detection requirements of multi-layer panels.

[0045] In the description of this specification, references to terms such as "example," "embodiment," or "some embodiments" indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0046] Of course, the present invention is not limited to the above-described embodiments. Those skilled in the art can make equivalent modifications or substitutions without departing from the spirit of this application, and these equivalent modifications or substitutions are all included within the scope defined by the claims of this application.

Claims

1. A gantry photographing apparatus, characterized by comprising: include: A gantry frame is provided with a panel detection area, an X-axis motion mechanism and a Y-axis motion mechanism. The X-axis motion mechanism is used to drive the Y-axis motion mechanism to move along the X-axis direction above the panel detection area. The microscope assembly includes a Y-axis motion mechanism for driving the microscope assembly to move along the Y-axis. The microscope assembly includes a microscope, an X-axis interpolation motion mechanism, and a Y-axis interpolation motion mechanism. The X-axis interpolation motion mechanism drives the microscope to perform reverse interpolation motion along the X-axis direction, and the Y-axis interpolation motion mechanism drives the microscope to perform reverse interpolation motion along the Y-axis direction, so that the microscope and the panel to be photographed located in the panel detection area remain relatively stationary.

2. The gantry camera device according to claim 1, characterized in that, The gantry frame also includes a Y-axis reference beam, and the X-axis motion mechanism is used to drive the Y-axis reference beam to move synchronously with the Y-axis motion mechanism. The microscope assembly also includes a distance measuring device, which is installed on the microscope to collect the distance between the microscope and the Y-axis reference beam along the X-axis direction.

3. The gantry camera device according to claim 2, characterized in that, The X-axis motion mechanism includes an X-axis drive assembly, a first X-axis guide rail and a second X-axis guide rail spaced apart along the Y-axis direction, and the gantry frame forms the panel detection area between the first X-axis guide rail and the second X-axis guide rail. The X-axis drive assembly is used to drive the Y-axis motion mechanism to move along the first X-axis guide rail and the second X-axis guide rail. The Y-axis motion mechanism includes a Y-axis drive assembly and a Y-axis guide rail. The Y-axis drive assembly is used to drive the microscope assembly to move along the Y-axis guide rail. The Y-axis guide rail is mounted above the first X-axis guide rail and the second X-axis guide rail via columns, and the Y-axis reference beam is mounted between the two columns.

4. The gantry camera device according to claim 3, characterized in that, The weight of the Y-axis reference beam is lighter than the weight of the Y-axis guide rail.

5. The gantry camera device according to claim 3, characterized in that, The X-axis interpolation motion mechanism includes an X-axis interpolation guide rail and an X-axis interpolation drive assembly. The X-axis interpolation drive assembly is used to drive the microscope to move on the X-axis interpolation guide rail. The Y-axis interpolation motion mechanism includes a Y-axis interpolation guide rail and a Y-axis interpolation drive assembly. The Y-axis interpolation drive assembly is used to drive the microscope to move on the Y-axis interpolation guide rail.

6. The gantry camera device according to claim 5, characterized in that, It also includes a controller for electrically connecting to the X-axis drive assembly, Y-axis drive assembly, X-axis interpolation drive assembly, Y-axis interpolation drive assembly and the ranging device.

7. A method for taking photos using a gantry camera, characterized in that, Includes the following steps: The X-axis motion mechanism is controlled to drive the Y-axis motion mechanism to move along the X-axis direction, and the Y-axis motion mechanism drives the microscope assembly to move along the Y-axis direction. Based on the position vectors of the X-axis motion mechanism and the Y-axis motion mechanism, the X-axis interpolation motion mechanism and the Y-axis interpolation motion mechanism are controlled to perform reverse interpolation motion, so that the microscope and the panel to be photographed remain relatively stationary. The microscope is used to take pictures of the panel to be photographed.

8. The flying photography method of the gantry photography device according to claim 7, characterized in that, Real-time distance L between the microscope and the Y-axis reference beam along the X-axis direction is collected by the distance measuring device MS_NOW ; The real-time distance L MS_NOW The preset static standard distance L MS_STD By comparison, the X-axis compensation amount is calculated: L MOVE =L MS_NOW -L MS_STD ; According to the X-axis compensation amount L MOVE The X-axis interpolation motion mechanism is controlled to perform X-direction constant-distance compensation motion, so that the microscope and the Y-axis reference beam remain relatively static in the X-axis direction.

9. The flying photography method of the gantry photography device according to claim 7, characterized in that, When entering the capture position, the X-axis interpolation amount ΔX(t) = X(t) − X(t0) and the Y-axis interpolation amount ΔY(t) = Y(t) − Y(t0) are calculated in real time based on the real-time position vectors (X(t), Y(t)) of the X-axis motion mechanism and the Y-axis motion mechanism. The position is corrected by moving the X-axis interpolation motion mechanism in the opposite direction by ΔX(t) and the Y-axis interpolation motion mechanism in the opposite direction by ΔY. Wherein, t0 is the starting time when entering the capture position.

10. The flying photography method of the gantry photography device according to claim 7, characterized in that, In the multi-layer structure process, the X-axis interpolation motion mechanism and the Y-axis interpolation motion mechanism perform reverse interpolation motion to maintain the position, so that the microscope can repeatedly capture images at the same position on the panel to be photographed.

Images