Multi-channel high voltage wall bushing for high voltage radio frequency pulsed power transmission and method of use

Abstract

This invention discloses a multi-channel high-voltage through-wall component for high-voltage radio frequency pulse power transmission and its usage method. The through-wall component includes a flange and multiple channel units. Each channel unit is fixed to the flange and forms an independent high-voltage transmission channel. It includes an outer shell, an inner conductor assembly, a composite insulation assembly, and a sealing and welding assembly. The inner conductor assembly has signal input terminals and equipment signal input terminals at both ends. A composite insulation assembly is disposed around its outer periphery, and the outer shell and sealing and welding assembly are disposed around the outer periphery of the composite insulation assembly. The usage method involves fixing the high-voltage through-wall component to a vacuum chamber. The two ends of each channel unit are connected to a high-voltage radio frequency cable and a high-voltage device inside the vacuum chamber, respectively. Depending on the actual operating conditions, the user can choose to use a single channel unit or multiple channel units. This invention can significantly reduce the vacuum sealing interface, lower the risk of vacuum leakage, and simultaneously possess advantages such as high sealing, high withstand voltage, wide bandwidth low-loss transmission, high isolation between channels, and radiation resistance.

Description

Technical Field

[0001] This invention relates to the field of electrovacuum and high-voltage radio frequency pulse power transmission technology, and particularly to a multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission and its usage method. Background Technology

[0002] In scientific and industrial fields such as high-power pulse technology, accelerator physics, and plasma physics, it is often necessary to feed multiple high-voltage radio frequency pulse signals from the atmospheric environment into the interior of a high-vacuum cavity to achieve cross-interface power transmission. High-voltage through-wall components, as core devices in this operating scenario, must simultaneously meet multiple core requirements, including high vacuum sealing, high insulation withstand voltage, low pulse transmission loss, and impedance matching. Furthermore, under strong radiation conditions, through-wall components must also possess excellent radiation resistance.

[0003] Most commonly used high-voltage through-wall devices are single-channel designs. In work scenarios requiring simultaneous feeding of multiple high-voltage radio frequency pulse signals, multiple independent single-channel through-wall devices need to be installed, which can easily lead to the following significant drawbacks:

[0004] (i) The installation space occupies a large area and the assembly process is complicated. The independent installation of multiple through-wall components requires multiple flange interfaces to be opened on the vacuum chamber, which greatly increases the processing cost and assembly difficulty of the vacuum chamber.

[0005] (ii) After installing multiple through-wall components on the vacuum chamber, the number of vacuum sealing interfaces increases significantly, which can lead to a significant increase in the overall leakage risk of the vacuum system and is not conducive to maintaining a high vacuum environment.

[0006] (iii) Existing through-wall fittings generally use a single insulating medium and a single metal welded sealing structure, which makes it difficult to simultaneously meet the requirements of impedance matching, high voltage resistance, radiation resistance, and heat deformation resistance. Furthermore, due to the difference in thermal expansion coefficients between the insulating medium and the metal, weld cracking can easily occur under high-temperature conditions, leading to vacuum performance failure.

[0007] Therefore, developing a vacuum through-wall component that integrates multiple channels, high isolation, high vacuum, high pressure resistance, low transmission loss, and high reliability has become an urgent technical problem to be solved in this field. Summary of the Invention

[0008] The purpose of this invention is to overcome the shortcomings of the prior art and provide a multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission. This through-wall device adopts a multi-channel integrated design, which can significantly reduce the vacuum sealing interface of the high vacuum cavity and reduce the risk of vacuum leakage. At the same time, it has the advantages of high vacuum sealing, high pressure resistance, wide bandwidth low loss transmission, high isolation between channels, and radiation resistance.

[0009] Another object of the present invention is to provide a method of using the above-mentioned multi-channel high-voltage wall-penetrating device for high-voltage radio frequency pulse power transmission.

[0010] The technical solution of this invention is as follows: a multi-channel high-voltage through-wall component for high-voltage radio frequency pulse power transmission, comprising a flange and multiple channel units. Each channel unit is fixedly installed on the flange, forming an independent high-voltage transmission channel within each channel unit. Each channel unit is independent but structurally identical, comprising an outer shell, an inner conductor assembly, a composite insulation assembly, and a sealing welding assembly. The inner conductor assembly has a signal input terminal and a device signal inlet terminal at its two ends, respectively. The flange has a mounting through hole, through which the device signal inlet terminal of the inner conductor assembly passes into the vacuum chamber. The signal input terminal of the inner conductor is located in the atmospheric environment. A composite insulation assembly is disposed around the outer periphery of the inner conductor assembly, and an outer shell and a sealing welding assembly are disposed around the outer periphery of the composite insulation assembly. The sealing welding assembly is located at the lower end of the composite insulation assembly, at the connection between the outer shell and the flange. In this structure, each channel unit is a coaxial high-voltage transmission channel with identical structure. Each channel unit is independent and electrically isolated from each other. Users can choose to use a single channel unit or multiple channel units simultaneously according to the requirements of the on-site working conditions. Among them, the flange serves as the installation base for the entire through-wall component and is also used to achieve physical shielding between the vacuum chamber and the atmospheric environment. In each channel unit, the material selection and structural coordination of composite insulation components and sealing welding components are used to reduce broadband transmission loss and lower the risk of vacuum leakage to a large extent.

[0011] The inner conductor assembly includes a first inner conductor, a second inner conductor, and a third inner conductor connected coaxially in sequence. The upper end of the first inner conductor is a signal input terminal, and the lower end of the third inner conductor is a device signal input terminal. The signal input terminal serves as the connection end on the atmospheric side, and its outer casing has external threads for connecting to a high-voltage radio frequency cable located in the atmospheric environment to input a high-voltage pulse signal. The device signal input terminal serves as the connection end on the vacuum side, and its internal threads are used to connect to high-voltage equipment within the vacuum chamber to introduce the signal into the high-voltage equipment.

[0012] The mating surfaces between the first inner conductor and the second inner conductor, and between the second inner conductor and the third inner conductor, are all provided with coaxial matching threaded connection structures. After the first inner conductor, the second inner conductor, and the third inner conductor are mated in sequence, a continuous coaxial inner conductor is formed, and the outer diameter at each mating point transitions smoothly without impedance abrupt changes, thus forming a continuous signal transmission path.

[0013] The composite insulation assembly includes a first insulating component and a second insulating component coaxially sleeved around the outer periphery of the inner conductor assembly. The second insulating component is located around the outer periphery of the third inner conductor, and the first insulating component is located around the outer periphery of the first inner conductor, the second inner conductor, and the second insulating component. The first insulating component is made of polytetrafluoroethylene (PTFE), and the second insulating component is made of alumina ceramic, specifically high-purity alumina ceramic with an alumina content ≥99wt%. The first insulating component is located on the atmospheric side, and the second insulating component is located on the vacuum side. The mating surfaces of the first and second insulating components employ a matching stepped bonding structure. The dimensions are precisely designed based on the relative permittivity of the two materials to ensure continuous matching of the 50Ω coaxial characteristic impedance, avoiding pulse signal reflection and loss caused by impedance abrupt changes.

[0014] In the composite insulation assembly, the first insulating component adopts a multi-stage stepped structure, while the second insulating component has a flat-bottomed conical structure. The outer side of the second insulating component is adapted to fit the stepped structure on the inner side of the first insulating component. In this stepped structure, the conical design of the second insulating component improves the reliability of the vacuum seal. Furthermore, by using a matching stepped bonding structure on the mating surfaces of the first and second insulating components, the radio frequency transmission performance, i.e., the continuous matching of the 50Ω coaxial characteristic impedance, is guaranteed. The first insulating component has a multi-level stepped protrusion on its vacuum side end, and the second insulating component has a multi-level stepped groove on its atmospheric side end that is perfectly matched with the multi-level stepped protrusion on the first insulating component. When the two are fitted together, they form a continuous insulating medium interface, eliminating impedance abrupt changes at the interface of the insulating medium, and improving the fit between the two insulating components, thus avoiding local electric field concentration. The second insulating component has a flat-bottomed conical structure, and a coaxial through hole matching the third inner conductor is opened at the center of the bottom of its vacuum side. The outer wall of the second insulating component and the inner wall of the copper ring are sealed and fixed by vacuum brazing, ensuring the airtightness of the vacuum interface.

[0015] The sealing and welding assembly includes a copper ring and a molybdenum ring connected together. The copper ring and molybdenum ring are sealed and welded together to form an integral structure. The copper ring is located on the lower outer periphery of the second insulating component, and is sealed and welded to the second insulating component. The inner side of the copper ring is pressed against the outer wall of the first and second insulating components. The outer side of the copper ring is coaxially fitted with a molybdenum ring, and the inner side of the molybdenum ring is pressed against the copper ring and the outer shell. The outer side of the molybdenum ring is sealed and welded to the flange. The copper ring has excellent welding performance, enabling a high-strength seal with the second insulating component. The molybdenum ring, coaxially fitted with the outer side of the copper ring, has a thermal expansion coefficient that closely matches that of 99% alumina ceramic, which can offset thermal deformation stress under high-temperature conditions and prevent weld cracking. The molybdenum ring is sealed and welded to the flange, achieving a vacuum seal between each high-pressure transmission channel and the flange.

[0016] The inner wall of the outer shell is axially pressed against the outer wall of the first insulating component. The upper end of the outer shell is provided with an external thread, and the lower end of the outer shell is locked and fixed to the flange by fasteners. That is, the vacuum side end of the outer shell is fixedly connected to the flange by fasteners, and the inner wall of the outer shell is axially pressed against the outer side of the first insulating component to realize the axial positioning and fixing of the composite insulation component.

[0017] The flange has multiple parallel mounting holes, each corresponding to a channel unit. Each mounting hole is stepped, with an annular groove at each step, into which the sealing welded assembly is embedded. The mounting holes are symmetrically distributed around the flange's central axis, ensuring coaxiality and installation consistency of each high-voltage transmission channel. The center-to-center distance between any two adjacent transmission channels is no less than 20mm. Physical shielding between the high-voltage transmission channels is achieved through grounded metal flanges. Combined with the high insulation performance of the alumina ceramic used in the second insulating component, high insulation withstand voltage and low electromagnetic crosstalk are achieved between the high-voltage transmission channels.

[0018] The inner conductor assembly is made of oxygen-free copper, while the outer casing and flange are made of 316 stainless steel.

[0019] The method of using the multi-channel high-voltage through-wall component for high-voltage radio frequency pulse power transmission of the present invention is as follows: the high-voltage through-wall component is fixedly installed on the vacuum chamber through a flange. The two ends of each channel unit are respectively a signal input terminal and a device signal input terminal. The signal input terminal is located in the atmospheric environment and connected to a high-voltage radio frequency cable. The device signal input terminal is located in the vacuum chamber and connected to the high-voltage equipment in the vacuum chamber. Each channel unit is independent of each other, and the high-voltage radio frequency pulse power in each channel unit is transmitted synchronously. According to the actual working conditions, the user can choose to use a single channel unit or multiple channel units.

[0020] The aforementioned multi-channel high-voltage through-wall component for high-voltage radio frequency pulse power transmission and its application method are based on the following principle: by integrating multiple independent and electrically isolated coaxial high-voltage transmission channels on the same flange, the number of flange interfaces required on the vacuum chamber is reduced, thereby lowering the leakage risk of the overall vacuum system. This also simplifies the structure of the vacuum chamber and reduces installation costs and difficulty. In each channel unit, a three-section coaxially connected inner conductor assembly, a PTFE-alumina ceramic composite insulation assembly, and a copper ring-molybdenum ring sealing welding assembly are installed within the outer casing. The composite insulation assembly uses… The combination of PTFE and 99% alumina ceramic, along with a stepped butt joint structure, achieves continuous matching of the 50Ω coaxial characteristic impedance, avoiding pulse signal reflection and loss caused by impedance abrupt changes. In the coaxially arranged copper-molybdenum ring sealed welding assembly, the second insulating component is sealed and welded to the copper ring, which can effectively ensure the airtightness of the vacuum interface. The thermal expansion coefficient of the molybdenum ring is highly matched with that of the 99% alumina ceramic used as the second insulating component, which can offset the thermal deformation stress under high temperature conditions and avoid weld cracking. Thus, the goals of high vacuum sealing, high pressure resistance, wide bandwidth low loss transmission, and radiation resistance are achieved.

[0021] Compared with the prior art, the present invention has the following advantages:

[0022] This multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission and its usage method not only achieve synchronous vacuum through-wall transmission of multiple high-voltage pulse signals, but also solve core technical problems such as space occupation, vacuum sealing, electromagnetic isolation between channels, impedance matching, temperature resistance and radiation resistance after multi-channel integration. The main aspects are as follows:

[0023] (i) Multi-channel integrated design: Multiple independent coaxial transmission channels (i.e. multiple channel units) are integrated on a single metal flange. Compared with traditional single-channel through-wall components, the installation space can be greatly reduced on the same vacuum chamber, and the processing and assembly costs can be reduced. At the same time, the vacuum sealing interface is reduced, which significantly reduces the risk of overall system leakage and is more conducive to the long-term maintenance of high vacuum environment.

[0024] (ii) High isolation design between channels: Each transmission channel is arranged symmetrically, and physical shielding is achieved through grounded metal flanges. Combined with the high insulation performance of alumina ceramic, insulation withstand voltage of more than 25kV between channels can be achieved.

[0025] (III) Composite insulation and precise impedance matching: The composite insulation structure of PTFE + 99% alumina ceramic is adopted, which takes into account both the ease of assembly on the atmospheric side and the high withstand voltage and radiation resistance requirements on the vacuum side; the stepped structure of the mating surface between the two insulation components is based on the precise design of the dielectric constant to achieve continuous matching of the 50Ω coaxial characteristic impedance. In the wide frequency band below 3GHz, the standing wave ratio is less than 1.5 and the insertion loss is less than 0.8dB, which can realize low loss and low reflection transmission of nanosecond fast pulses.

[0026] (iv) High-reliability vacuum sealing structure: A copper ring-molybdenum ring composite welded sealing structure is adopted. The thermal expansion coefficients of molybdenum and alumina ceramics are matched to offset the thermal stress under high-temperature conditions, avoid weld cracking, and make the overall vacuum leakage rate better than 1×10 -13 Pa·m 3 / s, which can meet the requirements of use in ultra-high vacuum environments. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the cross-sectional structure of this multi-channel high-voltage through-wall component.

[0028] Figure 2 This is a schematic diagram of the overall structure of this multi-channel high-voltage through-wall component.

[0029] Figure 3 for Figure 2 The front view of the multi-channel high-voltage through-wall component is shown.

[0030] Figure 4 for Figure 2 The top view of the multi-channel high-voltage through-wall component is shown.

[0031] Figure 5 for Figure 2 The side view of the multi-channel high-voltage through-wall component is shown.

[0032] Figure 6 This is a schematic diagram of the structure of the second insulating component.

[0033] Figure 7 for Figure 6 The second insulating element is shown in section AA.

[0034] Figure 8 This is a cross-sectional view of the flange.

[0035] The components indicated by the reference numerals in the above figures are as follows:

[0036] 1 is a flange, 1-1 is a mounting through hole, 1-2 is an annular groove, 2 is a channel unit, 3 is a housing, 4 is a signal input terminal, 5 is a device signal inlet terminal, 6 is a first inner conductor, 7 is a second inner conductor, 8 is a third inner conductor, 9 is a first insulating component, 10 is a second insulating component, 11 is a copper ring, 12 is a molybdenum ring, and 13 is a fastener. Detailed Implementation

[0037] The present invention will be further described in detail below with reference to the embodiments, but the implementation of the present invention is not limited thereto.

[0038] Example

[0039] This embodiment describes a multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission, such as... Figures 1 to 5 As shown, taking a dual-channel high-voltage through-wall component as an example, it includes a flange 1 and two channel units 2. Each channel unit is fixedly installed on the flange, forming an independent high-voltage transmission channel within each channel unit. Each channel unit is independent but structurally identical, such as... Figure 1 As shown, the structure includes an outer shell 3, an inner conductor assembly, a composite insulation assembly, and a sealing and welding assembly. The inner conductor assembly has a signal input terminal 4 and a device signal inlet terminal 5 at its two ends. A mounting through-hole 1-1 is provided on the flange. The device signal inlet terminal of the inner conductor assembly passes through the mounting through-hole into the vacuum chamber. The signal input terminal of the inner conductor is located in the atmospheric environment. A composite insulation assembly is installed around the outer periphery of the inner conductor assembly. The outer shell and sealing and welding assembly are installed around the outer periphery of the composite insulation assembly. The sealing and welding assembly is located at the lower end of the composite insulation assembly, at the connection between the outer shell and the flange. In this structure, each channel unit is a coaxial high-voltage transmission channel with identical structure. Each channel unit is independent and electrically isolated. Users can choose to use a single channel unit or multiple channel units simultaneously according to the site conditions. The flange serves as the mounting base for the entire through-wall component and also provides physical shielding between the vacuum chamber and the atmospheric environment. In each channel unit, the material selection and structural coordination of the composite insulation assembly and the sealing and welding assembly significantly reduce broadband transmission loss and lower the risk of vacuum leakage.

[0040] like Figure 1As shown, the inner conductor assembly includes a first inner conductor 6, a second inner conductor 7, and a third inner conductor 8 connected coaxially in sequence. The upper end of the first inner conductor is the signal input terminal 4, and the lower end of the third inner conductor is the device signal inlet terminal 5. The signal input terminal serves as the connection end on the atmospheric side, and its outer casing has external threads for connecting to a high-voltage radio frequency cable located in the atmospheric environment to input high-voltage pulse signals. The device signal inlet terminal serves as the connection end on the vacuum side, and its internal threads are used to connect to high-voltage equipment within the vacuum chamber to introduce signals into the high-voltage equipment. The mating surfaces between the first and second inner conductors, and between the second and third inner conductors, both have coaxially matched threaded connection structures. After the first, second, and third inner conductors are sequentially mated, they form a continuous coaxial inner conductor with a smooth transition in outer diameter at each mating point, without impedance abrupt changes, thus forming a continuous signal transmission path.

[0041] like Figure 1 As shown, the composite insulation assembly includes a first insulating component 9 and a second insulating component 10 coaxially sleeved around the outer periphery of the inner conductor assembly. The second insulating component is located around the outer periphery of the third inner conductor, and the first insulating component is located around the outer periphery of the first inner conductor, the second inner conductor, and the second insulating component. The first insulating component is made of polytetrafluoroethylene (PTFE), and the second insulating component is made of alumina ceramic, specifically high-purity alumina ceramic with an alumina content ≥99wt%. The first insulating component is located on the atmospheric side, and the second insulating component is located on the vacuum side. The mating surfaces of the first and second insulating components adopt a matching stepped bonding structure. The dimensions are precisely designed based on the relative permittivity of the two materials to ensure continuous matching of the 50Ω coaxial characteristic impedance, avoiding pulse signal reflection and loss caused by impedance abrupt changes. In the composite insulation assembly, the first insulating component adopts a multi-level stepped structure (e.g., Figure 1 As shown), the second insulating component has a flat-bottomed conical structure (as shown). Figure 6 or Figure 7As shown in the diagram, the outer side of the second insulating component is fitted with the inner side of the first insulating component using a stepped structure. In this stepped structure, the second insulating component adopts a conical design. This improves the reliability of the vacuum seal and, by using a matching stepped fitting structure at the mating surfaces of the first and second insulating components, ensures the transmission performance of the radio frequency, i.e., the continuous matching of the 50Ω coaxial characteristic impedance. Specifically, the vacuum side end of the first insulating component has multiple stepped protrusions, and the atmospheric side end of the second insulating component has multiple stepped grooves that perfectly match the stepped protrusions on the first insulating component. After fitting, a continuous insulating medium interface is formed, eliminating impedance abrupt changes at the interface and improving the fit between the two insulating components, thus avoiding local electric field concentration. The second insulating component has a flat-bottomed conical structure, with a coaxial through-hole matching the third inner conductor at the center of its vacuum side bottom. The outer wall of the second insulating component and the inner wall of the copper ring are sealed and fixed by vacuum brazing, ensuring the airtightness of the vacuum interface.

[0042] like Figure 1 As shown, the sealing and welding assembly includes a copper ring 11 and a molybdenum ring 12 connected together. The copper ring and the molybdenum ring are sealed and welded together to form an integral structure. The copper ring is located on the lower outer periphery of the second insulating component, and the copper ring is sealed and welded to the second insulating component. The inner side of the copper ring is pressed against the outer wall of the first and second insulating components. The outer side of the copper ring is coaxially fitted with a molybdenum ring, and the inner side of the molybdenum ring is pressed against the copper ring and the outer shell. The outer side of the molybdenum ring is sealed and welded to the flange. The copper ring has excellent welding performance, enabling a high-strength seal with the second insulating component. The molybdenum ring, with its coefficient of thermal expansion highly compatible with 99% alumina ceramic, can offset the thermal deformation stress under high-temperature conditions and prevent weld cracking. The molybdenum ring is sealed and welded to the flange, achieving a vacuum seal between each high-pressure transmission channel and the flange.

[0043] like Figure 1 or Figure 2 As shown, the inner wall of the outer casing is axially pressed against the outer wall of the first insulating component. The upper end of the outer casing is provided with an external thread, and the lower end of the outer casing is locked and fixed to the flange by fastener 13. That is, the vacuum side end of the outer casing is fixedly connected to the flange by fasteners, and the inner wall of the outer casing is axially pressed against the outer surface of the first insulating component, thereby achieving axial limiting and fixing of the composite insulation assembly. Figure 8As shown, the flange has two parallel mounting holes 1-1, each corresponding to a channel unit. Each mounting hole is stepped, with an annular groove 1-2 at the step, into which the sealing welded assembly is embedded. The mounting holes are symmetrically distributed around the flange's central axis, ensuring coaxiality and installation consistency of each high-voltage transmission channel. The center-to-center distance between the two transmission channels (i.e., the center-to-center distance between the two mounting holes) is not less than 20mm. Physical shielding between the high-voltage transmission channels is achieved through grounded metal flanges. Combined with the high insulation performance of the alumina ceramic used in the second insulating component, high insulation withstand voltage and low electromagnetic crosstalk are achieved between the high-voltage transmission channels.

[0044] Preferably, the inner conductor assembly is made of oxygen-free copper, and the outer casing and flange are both made of 316 stainless steel.

[0045] The method of using the above-mentioned multi-channel high-voltage through-wall component for high-voltage radio frequency pulse power transmission is as follows: the high-voltage through-wall component is fixedly installed on the vacuum chamber through a flange. The two ends of each channel unit are the signal input terminal and the equipment signal input terminal, respectively. The signal input terminal is located in the atmospheric environment and connected to the high-voltage radio frequency cable, while the equipment signal input terminal is located in the vacuum chamber and connected to the high-voltage equipment in the vacuum chamber. Each channel unit is independent of each other, and the high-voltage radio frequency pulse power in each channel unit is transmitted synchronously. According to the actual working conditions, the user can choose to use a single channel unit or multiple channel units.

[0046] The aforementioned multi-channel high-voltage through-wall component for high-voltage radio frequency pulse power transmission and its application method are based on the following principle: by integrating multiple independent and electrically isolated coaxial high-voltage transmission channels on the same flange, the number of flange interfaces required on the vacuum chamber is reduced, thereby lowering the leakage risk of the overall vacuum system. This also simplifies the structure of the vacuum chamber and reduces installation costs and difficulty. In each channel unit, a three-section coaxially connected inner conductor assembly, a PTFE-alumina ceramic composite insulation assembly, and a copper ring-molybdenum ring sealing welding assembly are installed within the outer casing. The composite insulation assembly uses… The combination of PTFE and 99% alumina ceramic, along with a stepped butt joint structure, achieves continuous matching of the 50Ω coaxial characteristic impedance, avoiding pulse signal reflection and loss caused by impedance abrupt changes. In the coaxially arranged copper-molybdenum ring sealed welding assembly, the second insulating component is sealed and welded to the copper ring, which can effectively ensure the airtightness of the vacuum interface. The thermal expansion coefficient of the molybdenum ring is highly matched with that of the 99% alumina ceramic used as the second insulating component, which can offset the thermal deformation stress under high temperature conditions and avoid weld cracking. Thus, the goals of high vacuum sealing, high pressure resistance, wide bandwidth low loss transmission, and radiation resistance are achieved.

[0047] As described above, the present invention can be well implemented. The above embodiments are only preferred embodiments of the present invention and are not intended to limit the scope of implementation of the present invention; that is, all equivalent changes and modifications made in accordance with the content of the present invention are covered by the scope of protection claimed in the claims of the present invention.

Claims

1. A multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission, characterized in that, It includes a flange and multiple channel units, each channel unit being fixedly installed on the flange, and each channel unit forming an independent high-pressure transmission channel; Each channel unit is independent but structurally identical, comprising an outer shell, an inner conductor assembly, a composite insulation assembly, and a sealing and welding assembly. The inner conductor assembly has a signal input terminal and a device signal inlet terminal at its two ends, respectively. The flange has a mounting through hole, through which the device signal inlet terminal of the inner conductor assembly passes into the vacuum chamber. The signal input terminal of the inner conductor is located in the atmospheric environment. A composite insulation assembly is installed around the outer periphery of the inner conductor assembly, and an outer shell and a sealing and welding assembly are installed around the outer periphery of the composite insulation assembly. The sealing and welding assembly is located at the lower end of the composite insulation assembly and at the connection between the outer shell and the flange.

2. The multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission according to claim 1, characterized in that, The inner conductor assembly includes a first inner conductor, a second inner conductor, and a third inner conductor connected coaxially in sequence. The upper end of the first inner conductor is a signal input terminal, and the lower end of the third inner conductor is a device signal input terminal.

3. The multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission according to claim 2, characterized in that, The mating surfaces between the first inner conductor and the second inner conductor, and between the second inner conductor and the third inner conductor, are provided with coaxial matching threaded connection structures. After the first inner conductor, the second inner conductor, and the third inner conductor are mated in sequence, a continuous coaxial inner conductor is formed, and the outer diameter of each mating point transitions smoothly.

4. The multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission according to claim 2, characterized in that, The composite insulation component includes a first insulating component and a second insulating component coaxially sleeved on the outer periphery of the inner conductor component. The second insulating component is located on the outer periphery of the third inner conductor, and the first insulating component is located on the outer periphery of the first inner conductor, the second inner conductor, and the second insulating component. The first insulating component is made of polytetrafluoroethylene, and the second insulating component is made of alumina ceramic.

5. The multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission according to claim 4, characterized in that, In the composite insulation assembly, the first insulation component adopts a multi-level stepped structure, and the second insulation component has a flat-bottomed conical structure. The outer side of the second insulation component is adapted to fit the stepped structure of the inner side of the first insulation component.

6. The multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission according to claim 4, characterized in that, The sealing and welding assembly includes a copper ring and a molybdenum ring connected together. The copper ring and the molybdenum ring are sealed and welded to form an integral structure. The copper ring is located on the lower outer periphery of the second insulating component, and the copper ring is sealed and welded to the second insulating component. The inner side of the copper ring is pressed against the outer wall of the first insulating component and the second insulating component. The outer side of the copper ring is coaxially sleeved with a molybdenum ring. The inner side of the molybdenum ring is pressed against the copper ring and the outer shell. The outer side of the molybdenum ring is sealed and welded to the flange.

7. The multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission according to claim 4, characterized in that, The inner wall of the outer casing is pressed axially against the outer wall of the first insulating component. The upper end of the outer casing is provided with an external thread, and the lower end of the outer casing is locked and fixed to the flange by fasteners.

8. The multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission according to claim 1, characterized in that, The flange has multiple parallel mounting holes, and each mounting hole corresponds to a channel unit. Each mounting hole is stepped, with an annular groove at the step, and the sealing welding assembly is embedded in the annular groove.

9. A multi-channel high-voltage through-wall device for high-voltage radio frequency pulse power transmission according to claim 1, characterized in that, The inner conductor assembly is made of oxygen-free copper, while the outer casing and flange are made of 316 stainless steel.

10. The method of using the multi-channel high-voltage wall-penetrating device for high-voltage radio frequency pulse power transmission according to any one of claims 1 to 9, characterized in that, The high-voltage through-wall component is fixedly installed on the vacuum chamber via a flange. Each channel unit has a signal input terminal and a device signal input terminal at both ends. The signal input terminal is located in the atmospheric environment and connected to a high-voltage radio frequency cable, while the device signal input terminal is located inside the vacuum chamber and connected to the high-voltage equipment inside the vacuum chamber. Each channel unit is independent of each other, and the high-voltage radio frequency pulse power in each channel unit is transmitted synchronously. Depending on the actual working conditions, the user can choose to use a single channel unit or multiple channel units.

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