A sub-micron pitch and yaw adjustment mechanical sample stage

Abstract

The application discloses a sub-micron pitch adjustment mechanical sample stage and belongs to the technical field of precision instruments. The sub-micron pitch adjustment mechanical sample stage comprises a sample holder fixing base and a sample holder floating panel, a sample bearing platform and a sample fixer which are sequentially arranged on the sample holder fixing base. The sample holder floating panel is elastically connected with the sample holder fixing base through four tension springs. Three steel balls are clamped between the sample holder floating panel and the sample holder fixing base. One of the three steel balls is a rotating fulcrum, and the other two steel balls respectively adjust positions through a precision differential micro head, so that the sample holder floating panel deflects around the X axis or the Y axis. The sample stage adopts a pure mechanical manual adjustment mechanism, is compact in structure, convenient to operate, has the characteristics of modular design and high compatibility, realizes sub-micron high-precision manual adjustment, can be seamlessly integrated into an optical microscope, a semiconductor detection device and a micro-nano machining system, and significantly improves sample positioning precision and operation efficiency.

Description

Technical Field

[0001] This invention relates to the field of precision instrument technology, specifically to a submicron pitch-adjustable mechanical sample stage for use in optical microscopes, semiconductor testing equipment, or micro / nano fabrication systems. Background Technology

[0002] In high-precision fields such as optical microscopy, semiconductor manufacturing, micro / nano fabrication, and biomedical imaging, the sample stage is a core component for supporting and precisely positioning samples. Its positioning accuracy and adjustment flexibility directly affect imaging quality, detection efficiency, and processing precision. With technological advancements, modern precision instruments place significantly higher demands on the performance of sample stages, especially in high-resolution microscopy, semiconductor defect detection, and micro / nano fabrication. Sample stages need to achieve sub-micron level positioning accuracy and support flexible attitude adjustments. Pitch adjustment (i.e., the adjustment of the sample stage's tilt angle around the horizontal axis) is particularly important in specific applications. For example, in oblique microscopy, pitch adjustment is used to optimize the angle between the sample and the optical path; in semiconductor wafer inspection, pitch adjustment corrects sample tilt to ensure detection consistency; and in micro / nano fabrication, pitch adjustment precisely controls the processing angle.

[0003] Traditional sample stage pitch adjustment is mostly achieved through manual mechanical structures, such as screws, cams, or gear mechanisms, to adjust the sample angle. However, the positioning accuracy of existing manually adjustable sample stages is low, typically only reaching the micrometer level (1-10 micrometers), which is insufficient to meet the requirements of sub-micrometer precision, leading to significant errors in high-resolution imaging or micro / nano fabrication. Furthermore, traditional manual mechanisms have a limited adjustment range; the pitch angle is usually confined to a small range, and the adjustment process is complex and cumbersome, making it difficult to achieve high-precision fine-tuning. Traditional mechanical structures are also susceptible to friction, wear, or mechanical clearance, resulting in poor adjustment stability and decreased accuracy over long-term use, failing to meet the reliability requirements of high-precision applications.

[0004] In recent years, some high-precision sample stages have employed piezoelectric drive or micro-motor technology to achieve pitch adjustment accuracy of 10-50 nanometers through electronic control. However, these solutions rely on complex control systems and power supplies, resulting in high manufacturing and maintenance costs, and limited applicability in environments without power or requiring simple operation. While existing manually adjustable sample stages are simple in structure and low in cost, they face technical bottlenecks in achieving sub-micron level accuracy, wide angle range, and ease of operation, making it difficult to meet the needs of modern precision instruments.

[0005] Therefore, there is an urgent need for a mechanical sample stage that allows for submicron-level pitch adjustment through manual operation, in order to balance high precision, ease of operation, and cost-effectiveness. Summary of the Invention

[0006] To address the aforementioned issues, the main objective of this invention is to provide a mechanical sample stage capable of submicron-level pitch adjustment, achieving a pitch adjustment accuracy of approximately 150 nanometers, a wide range of angle adjustments, and stable operating performance. This stage can be seamlessly integrated into optical microscopes, semiconductor detection equipment, and micro / nano fabrication systems, significantly improving sample positioning accuracy and operational efficiency.

[0007] To achieve the above-mentioned technical objectives, the present invention adopts the following technical solution:

[0008] A submicron-level pitch-adjustable mechanical sample stage includes a sample holder fixed base, a sample holder floating panel, a sample carrying platform, and a sample holder. The sample holder fixed base is used to fix the mechanical sample stage to a target mounting surface. The sample holder floating panel, sample carrying platform, and sample holder are sequentially mounted on the sample holder fixed base. The sample holder fixed base has a rectangular groove, within which the sample holder floating panel is located and elastically connected to the sample holder fixed base via four tension springs. Two tension springs are located on one edge of the sample holder floating panel, forming the X-axis, and the other two are located on the opposite edge perpendicular to it, forming the Y-axis. Three steel balls—steel ball X, steel ball Y, and steel ball O—are sandwiched between the sample holder floating panel and the sample holder fixed base. Steel ball O is located in a hole at the intersection of the X and Y axes, forming a rotation fulcrum. Steel ball X is located at the other end of the X-axis in a track between the sample holder floating panel and the sample holder fixed base. Movement of steel ball X causes… The sample holder floating panel rotates around the Y-axis; a steel ball Y is located at the other end of the Y-axis in a track between the sample holder floating panel and the sample holder fixed base. The movement of the steel ball Y causes the sample holder floating panel to rotate around the X-axis; the sample holder fixed base has an adjuster mounting seat A and an adjuster mounting seat B respectively on the outer side of the tracks where the steel ball X and steel ball Y are located. A precision differential head A is installed in the adjuster mounting seat A and is connected to the steel ball X through a transmission shaft X; a precision differential head B is installed in the adjuster mounting seat B and is connected to the steel ball Y through a transmission shaft Y; the sample carrying platform is fixedly installed on the sample holder floating panel. The sample carrying platform has a downwardly concave structure suitable for carrying sample vessels. The middle part of both the sample holder fixed base and the sample holder floating panel is a hollow structure used to accommodate the sample carrying platform and sample vessels; the sample holder is placed on the sample vessel and fixedly connected to the sample carrying platform.

[0009] In the submicron pitch-adjustable mechanical sample stage of the present invention, the sample holder fixing base, as a mounting component of the device, can be fixed to the target mounting surface by bolts or other connecting parts; the two sides of the sample holder fixing base are respectively mounted with adjuster mounting seat A and adjuster mounting seat B, providing mounting interfaces for precision differential head A and precision differential head B.

[0010] The submicron-level pitch-adjustable mechanical sample stage of this invention is designed with different models of sample-carrying platforms to accommodate sample vessels of different shapes and sizes (e.g., commonly used circular glass bottom dishes of various sizes). The sample-carrying platform is fixedly mounted to the floating panel of the sample holder using screws or other connectors, and rotates along with the sample vessel placed inside it as the floating panel of the sample holder rotates. When it is necessary to replace the sample vessel, the corresponding model of sample-carrying platform can be installed.

[0011] Furthermore, the sample holder mainly consists of a sample holder pressure plate and a sample holder housing. The sample holder pressure plate is installed in the sample holder housing by multiple screws. The ends of the screws are threaded to the sample holder pressure plate, and the optical axis in the middle section passes through a through hole at the top of the sample holder housing. The diameter of the top nut is slightly larger than that of the through hole. A compression spring is installed on the optical axis in the middle section of the screw. The compression spring is located between the sample holder housing and the sample holder pressure plate, and continuously provides elastic force to the sample holder housing and the sample holder pressure plate, causing the sample holder housing and the sample holder pressure plate to tend to move away from each other.

[0012] Furthermore, the top surface of the sample holder housing is provided with a light-transmitting hole, and the side surface is provided with a groove for easy gripping. In some specific embodiments of the present invention, the sample vessel used is a glass bottom vessel, and a circular light-transmitting hole is provided in the center of the top surface of the sample holder housing to ensure that the top of the sample is unobstructed to reduce reflection of the laser below.

[0013] Furthermore, the sample holder housing can be fixedly installed onto the sample support platform using screws, thus achieving a fixed connection between the sample holder and the sample support platform. After the sample holder housing is installed on the sample support platform, it can be considered that the compression spring only provides elastic force to the sample holder pressure plate, causing the sample holder pressure plate to tend to move downwards. After the sample vessel is placed on the sample support platform, the sample holder housing is also fixedly installed onto the sample support platform. The sample holder pressure plate inside will be pushed upwards by the sample vessel, which is opposite to the direction of the elastic force of the compression spring. This causes the sample holder pressure plate to provide downward pressure on the sample vessel in the opposite direction, thereby fixing the sample vessel.

[0014] The sample vessel will be fixed to the sample support platform by the downward pressure of the sample holder plate. The downward pressure of the sample holder plate is essentially an elastic force, so it ensures that neither the lower objective lens nor the sample vessel will be damaged if the lower objective lens accidentally lifts the sample vessel.

[0015] In the submicron-level pitch-adjustable mechanical sample stage of the present invention, the floating panel of the sample holder determines the pitch angle of the sample. The floating panel of the sample holder and the fixed base of the sample holder are elastically connected by tension springs. The upper end of each tension spring is fixed by a tension spring limiting rod set in the floating panel of the sample holder, and the lower end is fixed by another tension spring limiting rod set in the fixed base of the sample holder. Thus, the four tension springs are fixed by eight tension spring limiting rods.

[0016] In the submicron-level pitch-adjustable mechanical sample stage of the present invention, steel balls X, Y, and O are sandwiched between the sample holder floating panel and the sample holder fixed base. In some specific embodiments of the present invention, the sample holder floating panel and the sample holder fixed base are rectangular, and steel ball O is installed in the hole at the lower right corner of the sample holder floating panel and the sample holder fixed base, forming a rotation fulcrum; steel ball X is installed in the track at the lower left corner of the sample holder floating panel and the sample holder fixed base, and steel ball Y is installed in the track at the upper right corner of the sample holder floating panel and the sample holder fixed base; two of the four tension springs are arranged on the line connecting steel ball X and steel ball O, and the other two are arranged on the line connecting steel ball Y and steel ball O; the movement of steel ball X in the track will cause the sample holder floating panel to rotate about the axis formed by steel ball Y and steel ball O, and the movement of steel ball Y in the track will cause the sample holder floating panel to rotate about the axis formed by steel ball X and steel ball O.

[0017] In the submicron-level pitch-adjustable mechanical sample stage of the present invention, the movement of steel ball X and steel ball Y is controlled by precision differential head A and precision differential head B, respectively; precision differential head A and precision differential head B are connected to steel ball X and steel ball Y via transmission shaft X and transmission shaft Y, respectively. Preferably, transmission shaft X and transmission shaft Y are respectively installed in linear bearing X and linear bearing Y, which greatly reduces the sliding friction force of the transmission shaft movement.

[0018] Furthermore, the precision differential head A and precision differential head B have two modes: coarse adjustment and fine adjustment. The coarse adjustment resolution is 500-1000 micrometers, and the fine adjustment resolution is 500-1000 nanometers. In some specific embodiments of the present invention, the coarse adjustment resolution is 500 micrometers, and the fine adjustment resolution is 500 nanometers. When using the fine adjustment mode, the linear motion of the differential head is converted into the motion of steel ball X or steel ball Y, resulting in a deflection resolution of approximately 288 nanometers for the floating panel of the sample holder. Based on the distance ratio between the position of steel ball X or steel ball Y and the center position of the sample, the pitch angle deflection resolution of the sample can be calculated, i.e., the pitch angle adjustment resolution of this device, reaching the sub-micrometer level and approaching the nanometer level.

[0019] This invention also provides a method for using the submicron pitch-adjustable mechanical sample stage, comprising: before using the device, first fixing the sample holder base SFB to the target mounting surface with bolts or other connectors; after installing the sample stage, selecting a sample vessel, generally a glass bottom dish GBD, and selecting a matching sample support platform according to the sample vessel; placing the sample vessel in the sample support platform, and then fixing the sample holder on the sample support platform so that the sample vessel is pressed down by the sample holder; according to requirements, coarsely adjusting the precision differential head A and precision differential head B to bring the pitch angle of the sample to a near-perfect position; finely adjusting the precision differential head A and precision differential head B to bring the pitch angle of the sample to a perfect position.

[0020] Compared with the prior art, the submicron pitch-adjustable mechanical sample stage of the present invention has the following advantages:

[0021] 1. Submicron-level high-precision manual adjustment: This invention achieves a pitch adjustment accuracy of approximately 150 nanometers through innovative mechanical structure design and precision manufacturing processes, significantly outperforming the micron-level accuracy (1-10 micrometers) of traditional manually adjustable sample stages. Without requiring an electronic control system, it meets the submicron-level precision requirements of applications such as high-resolution microscopic imaging, semiconductor detection, and micro / nano fabrication, filling a technological gap in the high-precision field of manually adjustable sample stages.

[0022] 2. Simple operation and wide applicability: This invention adopts a purely mechanical manual adjustment mechanism, which is simple and intuitive to operate. It does not require a complex control system or power supply support, making it suitable for environments without power supply, field experiments, or cost-sensitive scenarios. Compared with electronically controlled sample stages that rely on piezoelectric drives or micro-motors, this invention reduces operational complexity and maintenance requirements, and improves ease of use and versatility.

[0023] 3. Compact Structure and Modular Design: The sample stage of this invention has a compact structure, occupies little space, and is easily integrated into optical microscopes, semiconductor inspection equipment, and micro / nano fabrication systems. Its modular design enhances compatibility with different devices, facilitates disassembly and upgrades, reduces system modification costs, and improves application flexibility.

[0024] 4. High stability and durability: The invention adopts a high-precision mechanical structure, combined with low friction and wear-resistant design, which effectively reduces mechanical clearance and wear effects, ensuring that the adjustment accuracy of about 150 nanometers can still be maintained after long-term use.

[0025] 5. Significant cost-effectiveness: Compared with high-precision sample stages using piezoelectric drives or micro motors, this invention does not require electronic control systems and power supply support, significantly reducing manufacturing, maintenance and usage costs, while maintaining sub-micron level accuracy. It provides a cost-effective solution for cost-sensitive users such as laboratories, industrial testing and educational institutions. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the overall assembly of the submicron pitch-adjustable mechanical sample stage according to an embodiment of the present invention.

[0027] Figure 2 The above diagram shows the structure of the sample holder in an embodiment of the present invention, wherein the upper diagram is the overall structure diagram and the lower diagram is the cross-sectional view.

[0028] Figure 3 This is a cross-sectional view of the overall structure of the submicron pitch-adjustable mechanical sample stage according to an embodiment of the present invention. The middle view is a top view, the top view is a cross-sectional view along the AA' direction, the bottom view is a cross-sectional view along the BB' direction, and the right view is a cross-sectional view along the CC' direction.

[0029] In the picture:

[0030] 101—Sample rack floating panel, 102—Precision differential micrometer head A, 103—Adjuster mounting base A, 104—Sample rack fixed base, 105—Tension spring, 106—Adjuster mounting base B, 107—Precision differential micrometer head B, 108—Steel ball, 109—Sample carrying platform, 110—Glass bottom dish, 111—Sample carrying platform mounting screw, 112—Sample holder pressure plate, 113—Sample holder outer shell, 114—Sample holder mounting screw;

[0031] 201—Compression spring, 202—Plug screw;

[0032] 301—Second tension spring limit rod, 302—Tension spring YA, 303—First tension spring limit rod, 304—Transmission shaft Y, 305—Linear bearing Y, 306—Steel ball Y, 307—Transmission shaft X, 308—Linear bearing X, 309—Steel ball X, 310—Fifth tension spring limit rod, 311—Sixth tension spring limit rod, 312—Tension spring XA, 313—Tension spring XB, 314—Eighth tension spring limit rod, 315—Seventh tension spring limit rod, 316—Steel ball O, 317—Third tension spring limit rod, 318—Tension spring YB, 319—Fourth tension spring limit rod. Detailed Implementation

[0033] The technical solution of the present invention will be further described below with reference to the accompanying drawings and embodiments, but the scope of the present invention is not limited in any way.

[0034] Reference Figure 1The submicron pitch-adjustable mechanical sample stage in this embodiment consists of a sample holder floating panel 101, a precision differential micrometer head A 102, an adjuster mounting base A 103, a sample holder fixed base 104, a tension spring 105, an adjuster mounting base B 106, a precision differential micrometer head B 107, a steel ball 108, a sample support platform 109, a glass dish 110, sample support platform mounting screws 111, a sample holder pressure plate 112, a sample holder housing 113, and a sample holder mounting screws 114. Wherein: the sample holder fixing base 104, as a mounting component of this device, can be fixed to the target mounting surface by bolts; the sample holder fixing base 104 is elastically connected to the sample holder floating panel 101 by four tension springs TS105; three steel balls 108 are sandwiched between the sample holder fixing base 104 and the sample holder floating panel 101; adjuster mounting seats A 103 and B 106 are installed on the left and right sides of the sample holder fixing base 104; the adjuster mounting seat A 103 provides a mounting interface for the precision differential head A102; the adjuster mounting seat B 106 provides a mounting interface for the precision differential head B102. 107 provides an installation interface; a sample support platform 109 is installed above the sample rack floating panel 101; the sample support platform 109 is fixedly installed on the sample rack floating panel 101 by screwing in four sample support platform mounting screws 111; the sample support platform 109 can hold a glass dish 110; the glass dish 110 can be fixed on the sample support platform 109 by the downward elastic force provided by the sample holder pressure plate 112; the sample holder pressure plate 112 is encapsulated inside the sample holder housing 113; the sample holder housing 113 can be fixedly installed on the sample support platform 109 by four sample holder mounting screws 114.

[0035] Reference Figure 1 , Figure 2 The sample holder plate 112 is installed in the sample holder housing 113 by four screws 202. The end of each screw 202 is threaded to the sample holder plate 112, and the optical axis of the middle section passes through four through holes at the top of the sample holder housing 113. The diameter of the top nut is slightly larger than the diameter of the through hole. Four compression springs 201 are installed on the optical axis of the middle section of each screw 202. The compression springs 201 are located between the sample holder housing 113 and the sample holder plate 112, and will continuously provide elastic force to the sample holder housing 113 and the sample holder plate 112, causing the sample holder housing 113 and the sample holder plate 112 to tend to move away from each other.

[0036] Reference Figure 1 , Figure 2The sample holder housing 113 is fixedly installed on the sample support platform 109 by four sample holder mounting screws 114. After the sample holder housing 113 is installed on the sample support platform 109, it can be considered that the compression spring 201 only provides elastic force to the sample holder pressure plate 112, so that the sample holder pressure plate 112 tends to move downward. After the glass dish 110 is placed on the sample support platform 109, the sample holder housing 113 is also fixedly installed on the sample support platform 109. The sample holder pressure plate 112 inside will be pushed upward by the glass dish 110, which is opposite to the elastic force of the compression spring 201, so that the sample holder pressure plate 112 provides downward pressure to the glass dish 110 in the opposite direction, thereby fixing the glass dish 110.

[0037] Reference Figure 1 The glass dish 110 will be fixed on the sample support platform 109 due to the downward pressure of the sample holder plate 112. The downward pressure of the sample holder plate 112 is essentially an elastic force, so when the lower objective lens accidentally lifts the glass dish 110, it can ensure that neither the lower objective lens nor the glass dish 110 is damaged.

[0038] Reference Figure 1 The sample carrying platform 109 is fixedly installed on the sample rack floating panel 101 by four sample carrying platform mounting screws 111; the sample carrying platform 109 can hold a glass bottom dish 110; the sample carrying platform 109 has various models, and when the model of the glass bottom dish 110 needs to be changed, the corresponding model of the sample carrying platform 109 can be installed.

[0039] Reference Figure 1 , Figure 3 The sample holder floating panel 101 determines the pitch angle of the sample; the sample holder floating panel 101 and the sample holder fixed base 104 are elastically connected by tension springs XA 312, XB 313, YA 302, and YB 318; tension spring XA 312 is fixed on the sample holder floating panel 101 side by a fifth tension spring limiting rod 310 and on the sample holder fixed base 104 side by a sixth tension spring limiting rod 311; tension spring XB 313 is fixed on the sample holder floating panel 101 side by a seventh tension spring limiting rod 315 and on the sample holder fixed base 104 side by an eighth tension spring limiting rod 314; tension spring YA 302 is fixed on the sample holder floating panel 101 side by a first tension spring limiting rod 303 and on the sample holder fixed base 104 side by a second tension spring limiting rod 301; tension spring YB ... fifth tension spring limiting rod 310 and on the sample holder fixed base 104 side by a sixth tension spring limiting rod 311; tension spring XA 312 is fixed on the sample holder floating panel 101 side by a fifth tension spring limiting rod 310 and on the sample holder fixed base 104 side by a sixth tension spring limiting rod 311; tension spring XB 312 is fixed on the sample holder floating panel 101 side by a fifth tension spring limiting rod 310 and on the sample holder fixed base 104 side by a sixth tension spring limiting rod 311 and on the sample holder fixed base 104 side by a sixth tension spring limiting rod 311 and on the sample holder fixed base 104 side by a sixth tension spring limiting rod 311 and 318 is fixed on the sample holder floating panel 101 side by the third tension spring limiting rod 317, and on the sample holder fixed base 104 side by the fourth tension spring limiting rod 319.

[0040] Reference Figure 1, Figure 3 Steel balls X309, Y306, and O316 are sandwiched between the sample holder floating panel 101 and the sample holder fixed base 104. Steel ball O316 is installed in a hole on the lower right side of the sample holder floating panel 101 and the sample holder fixed base 104, forming a rotation fulcrum. Steel ball X309 is installed in a track on the lower left side of the sample holder floating panel 101 and the sample holder fixed base 104. The left and right movement of steel ball X309 will cause the sample holder floating panel 101 to rotate around the axis formed by steel balls Y306 and O316. Steel ball Y306 is installed in a track on the upper right side of the sample holder floating panel 101 and the sample holder fixed base 104. The left and right movement of steel ball Y306 will cause the sample holder floating panel 101 to rotate around the axis formed by steel balls X309 and O316.

[0041] Reference Figure 1 , Figure 3 The movement of the steel ball X 309 is controlled by a precision differential head A 102; the precision differential head A 102 is mounted on the adjuster mounting base A 103 and connected to the steel ball X 309 through the transmission shaft X 307; the transmission shaft X 307 is mounted inside the linear bearing X 308, which greatly reduces the sliding friction force of the transmission shaft movement.

[0042] Reference Figure 1 , Figure 3 The movement of the steel ball Y 306 is controlled by a precision differential head B107; the precision differential head B 107 is mounted on the adjuster mounting base B 106 and connected to the steel ball Y 306 through the transmission shaft Y 304; the transmission shaft Y 304 is mounted inside the linear bearing Y 305, which greatly reduces the sliding friction force of the transmission shaft movement.

[0043] Reference Figure 1 , Figure 3 The precision differential head A 102 and precision differential head B 107 have two modes: coarse adjustment and fine adjustment. The coarse adjustment resolution is 500 micrometers, and the fine adjustment resolution is 500 nanometers. When using the fine adjustment mode, the linear motion of the differential head is converted into the motion of steel balls X 309 and Y 306, resulting in a deflection resolution of approximately 288 nanometers for the sample holder floating panel 101. Based on the distance ratio between the positions of steel balls X 309 and Y 306 and the center position of the sample, which is 2:1, the pitch angle deflection resolution of the sample can be calculated to be approximately 144 nanometers. That is, the pitch angle adjustment resolution of this device is approximately 144 nanometers, which is at the submicrometer level and close to the nanometer level.

[0044] The specific usage process of the above-mentioned submicron pitch-adjustable mechanical sample stage:

[0045] Before using this device, the sample holder base 104 must first be fixed to the target mounting surface with bolts. After installing the sample stage, select a sample vessel, generally a glass dish 110, and a matching sample support platform 109. Place the glass dish 110 on top of the sample support platform 109 and tighten the sample support platform mounting screws 111 to fix the sample holder housing 113 on the sample support platform 109. At this time, the glass dish 110 is pressed by the elastic force of the sample holder pressure plate 112. According to the requirements, coarsely adjust the precision differential head A 102 and coarsely adjust the precision differential head B 107 to bring the pitch angle of the sample to a near-perfect position. Finely adjust the precision differential head A 102 and coarsely adjust the precision differential head B 107 to bring the pitch angle of the sample to a perfect position.

[0046] The above embodiments are used to explain and illustrate the present invention, but not to limit the present invention. Any modifications and changes made to the present invention within the spirit and scope of the claims shall fall within the protection scope of the present invention.

Claims

1. A sub-micron pitch and yaw adjustment mechanical sample stage comprising a sample holder fixed base, a sample holder floating faceplate, a sample bearing platform, and a sample holder, wherein, The sample holder fixing base is used to fix the mechanical sample stage to the target mounting surface. A sample holder floating panel, a sample carrying platform, and a sample holder are sequentially installed on the sample holder fixing base. The sample holder fixing base has a rectangular groove, and the sample holder floating panel is located within this groove, forming an elastic connection with the sample holder fixing base via four tension springs. Two tension springs are located on one edge of the sample holder floating panel, forming the X-axis, and the other two tension springs are located on the other edge perpendicularly intersecting it, forming the Y-axis. Three steel balls are sandwiched between the sample holder floating panel and the sample holder fixing base: steel ball X, steel ball Y, and steel ball O. Steel ball O is located in a hole at the intersection of the X-axis and Y-axis, forming a rotation fulcrum. Steel ball X is located at the other end of the X-axis in a track between the sample holder floating panel and the sample holder fixing base. Movement of steel ball X causes the sample holder floating panel to rotate around the Y-axis. Steel ball Y is located at the other end of the Y-axis in a track between the sample holder floating panel and the sample holder fixing base. In the track between the sample holder floating panel and the sample holder fixed base, the movement of steel ball Y causes the sample holder floating panel to rotate around the X-axis. The sample holder fixed base has an adjuster mounting seat A and an adjuster mounting seat B respectively located outside the tracks containing steel balls X and Y. A precision differential head A is installed in adjuster mounting seat A and is connected to steel ball X via a transmission shaft X. A precision differential head B is installed in adjuster mounting seat B and is connected to steel ball Y via a transmission shaft Y. The sample carrying platform is fixedly installed on the sample holder floating panel. The sample carrying platform has a downwardly concave structure suitable for carrying sample vessels. The middle parts of both the sample holder fixed base and the sample holder floating panel are hollow structures used to accommodate the sample carrying platform and sample vessels. The sample holder is placed on the sample vessel and fixedly connected to the sample carrying platform.

2. The sub-micrometric pitch adjustment mechanical sample stage of claim 1, wherein, The sample holder mainly consists of a sample holder pressure plate and a sample holder housing. The sample holder pressure plate is installed in the sample holder housing by multiple screws. The ends of the screws are threaded to the sample holder pressure plate, and the optical axis in the middle section passes through a through hole at the top of the sample holder housing. The diameter of the top nut is slightly larger than that of the through hole. A compression spring is installed on the optical axis in the middle section of the screw. The compression spring is located between the sample holder housing and the sample holder pressure plate, and continuously provides elastic force to the sample holder housing and the sample holder pressure plate, causing the sample holder housing and the sample holder pressure plate to tend to move away from each other.

3. The sub-micrometre pitch adjustment mechanical sample stage of claim 2, wherein, The sample holder housing has a light-transmitting hole on the top surface and a groove on the side for easy gripping.

4. The sub-micromachined pitch adjustment mechanical sample stage of claim 1, wherein, The upper end of each tension spring is fixed by a tension spring limiting rod located in the sample holder floating panel, and the lower end is fixed by another tension spring limiting rod located in the sample holder fixed base.

5. The sub-micromachined pitch adjustment mechanical sample stage of claim 1, wherein, The sample holder floating panel and sample holder fixed base are rectangular. Steel ball O is installed in the hole at the lower right corner of the sample holder floating panel and sample holder fixed base, forming a rotation fulcrum. Steel ball X is installed in the track at the lower left corner of the sample holder floating panel and sample holder fixed base, and steel ball Y is installed in the track at the upper right corner of the sample holder floating panel and sample holder fixed base. Two of the four tension springs are set on the line connecting steel ball X and steel ball O, and the other two are set on the line connecting steel ball Y and steel ball O. The movement of steel ball X in the track will cause the sample holder floating panel to rotate around the axis formed by steel ball Y and steel ball O, and the movement of steel ball Y in the track will cause the sample holder floating panel to rotate around the axis formed by steel ball X and steel ball O.

6. The sub-micromachined pitch adjustment mechanical sample stage of claim 1, wherein, The transmission shaft X and transmission shaft Y are respectively installed inside the linear bearing X and linear bearing Y.

7. The sub-micromachined pitch adjustment mechanical sample stage of claim 1, wherein, The precision differential head A and precision differential head B have two modes: coarse adjustment and fine adjustment. The coarse adjustment resolution is 500~1000 micrometers, and the fine adjustment resolution is 500~1000 nanometers.

8. The sub-micromachined pitch adjustment mechanical sample stage of claim 1, wherein, The sample holder base is fixed to the target mounting surface by bolts; the sample carrying platform is fixed to the sample holder floating panel by screws; and the sample holder is fixed to the sample carrying platform by screws.

9. A method of using a sub-micrometric pitch adjustment mechanical sample stage according to any one of claims 1 to 8, comprising: Before use, fix the sample holder base to the target mounting surface; Select a matching sample carrier platform according to the sample vessel, and fix the sample carrier platform to the floating panel of the sample rack; Place the sample container in the sample carrying platform, and then fix the sample holder on the sample carrying platform so that the sample container is pressed tightly by the sample holder; Depending on the requirements, coarse adjustment of precision differential head A and precision differential head B brings the pitch angle of the sample to a near-perfect position; fine adjustment of precision differential head A and precision differential head B brings the pitch angle of the sample to a perfect position.

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