A material delivery apparatus suitable for low temperature plasma processing

Abstract

The application belongs to the technical field of low-temperature plasma processing, and specifically discloses a material conveying device suitable for low-temperature plasma processing, which comprises a controller, a mounting plate, a fixing unit and a moving unit, a lower electrode is fixed on the lower side of the mounting plate, and an upper electrode is fixedly arranged, the upper electrode is located above the mounting plate and faces the lower electrode; the fixing unit is installed on the mounting plate, and the fixing unit is used for fixing a material box, the material box is located between the upper electrode and the lower electrode; the moving unit comprises a first moving mechanism and a second moving mechanism, the mounting plate is fixed on the first moving mechanism, and the first moving mechanism is used for driving the mounting plate to move up and down; the first moving mechanism is installed on the second moving mechanism, the second moving mechanism is installed on an outer shell, and the second moving mechanism is used for driving the first moving mechanism to move left and right. The lower electrode and the material box can be simultaneously adjusted to move up and down and left and right in four directions under the premise that the upper electrode is kept fixed and the risk of movement of high-voltage components is avoided.

Description

Technical Field

[0001] This invention belongs to the field of low-temperature plasma treatment technology, and particularly relates to a material conveying device suitable for low-temperature plasma treatment. Background Technology

[0002] Low-temperature plasma surface treatment technology, with its advantages of being solvent-free, environmentally friendly, and capable of activating, cleaning, etching, and modifying material surfaces, is widely used in the pre-treatment processes of precision workpieces such as electronic components, plastic parts, optical devices, and new energy components. Low-temperature plasma treatment equipment typically employs an electrode structure with electrodes arranged vertically opposite each other. A process gas is introduced between the two electrodes, and a high-frequency, high-voltage current is applied, ionizing the gas to form plasma. Active electrodes within the plasma bombard the workpiece surface, completing the surface modification treatment. The discharge gap between the two electrodes and the relative coverage area between the workpiece and the electrodes directly determine the stability of the plasma discharge, the uniformity of workpiece processing, and the yield of the finished product; these are core control elements in equipment design.

[0003] Currently, the material and electrode relative adjustment methods in plasma treatment equipment in the industry are mainly divided into two categories: The first approach involves fixing the material and moving the upper electrode: the workpiece is placed in the material box of the fixed lower electrode, and the upper electrode, which integrates a high-voltage power supply line, is driven by a drive mechanism to adjust its lifting and translation. This approach has significant drawbacks: the upper electrode carries precision high-voltage components such as radio frequency high-voltage cables, insulating connectors, and cooling pipes. During the reciprocating motion of the electrode, the high-voltage cables are continuously pulled and bent, which can easily lead to safety faults such as cable insulation wear, loose joints, high-voltage leakage, and arcing during long-term operation. At the same time, frequent displacement of high-voltage components can cause electric field shift, reduce the uniformity of plasma discharge, result in poor consistency in the processing of precision workpieces, and lead to high equipment maintenance costs.

[0004] The second type is a single-axis lifting and lowering scheme for the lower electrode, without lateral translation: the lower electrode and the material box can only be adjusted vertically up and down, and cannot move horizontally. This structure can only adapt to workpieces of a single size and a single placement specification, and has significant process limitations: when the width of the workpiece is greater than the effective discharge width of the electrode, the lateral area of ​​the workpiece cannot be completely covered by plasma, which easily leads to local incomplete treatment and uneven activation effect; the mold positioning error caused by material box clamping and equipment assembly cannot be compensated, and the processing dispersion of batch products is large; when changing to workpieces of different width specifications, the tooling and electrode module must be replaced as a whole, which is time-consuming and difficult to adapt to the needs of flexible production of multiple specifications.

[0005] In summary, existing plasma processing equipment conveying devices cannot simultaneously meet the three core requirements of safe operation of high-voltage components, compatibility with multiple workpiece specifications, and uniformity of plasma processing. Moving the upper electrode poses risks such as damage to high-voltage lines, significant safety hazards, and unstable electric fields. If the lower electrode can only move up and down without lateral translation, it only accommodates a limited range of workpiece specifications, cannot compensate for positioning deviations, and results in incomplete surface treatment coverage. The market urgently needs a material conveying device that can simultaneously achieve four-way (up / down, left / right) translation of the lower electrode and material box while keeping the upper electrode stationary and avoiding the risks of high-voltage component movement. This would address the shortcomings of existing technologies, such as safety hazards, poor process adaptability, and insufficient product processing uniformity. Summary of the Invention

[0006] The purpose of this invention is to provide a material conveying device suitable for low-temperature plasma processing, which can simultaneously achieve four-way translational adjustment of the lower electrode and the material box in four directions (up, down, left, and right) while keeping the upper electrode fixed and avoiding the risk of movement of high-pressure components.

[0007] To achieve the above objectives, the technical solution of the present invention is as follows: a material conveying device suitable for low-temperature plasma processing, comprising a controller, a mounting plate, and a fixing unit and a moving unit connected to the controller; a lower electrode is fixed to the lower side of the mounting plate, and an upper electrode is fixed to the outer shell, the upper electrode being located above the mounting plate and directly opposite the lower electrode; the fixing unit is mounted on the mounting plate and is used to fix a material box, the material box being located between the upper and lower electrodes; the moving unit is used to drive the mounting plate to move up, down, left, and right. The moving unit includes a first moving mechanism and a second moving mechanism. The mounting plate is fixed on the first moving mechanism, and the first moving mechanism is used to drive the mounting plate to move up and down. The first moving mechanism is mounted on the second moving mechanism, and the second moving mechanism is mounted on the outer shell. The second moving mechanism is used to drive the first moving mechanism to move left and right.

[0008] Furthermore, the second moving mechanism is provided in two sets, with the two sets of the second moving mechanism respectively installed on the upper and lower sides of the first moving mechanism.

[0009] Furthermore, the fixing unit includes a fixing drive component, a gear, and two sets of clamping assemblies. The fixing drive component is fixed to the mounting plate, and the driving end of the fixing drive component is connected to the gear and drives the gear to rotate. The two sets of clamping assemblies are respectively used to clamp the two sides of the material box. Each set of clamping assemblies includes a rack, a clamping plate, and a connecting plate. The racks of the two sets of clamping assemblies mesh with the upper and lower sides of the gear, respectively. The rack is fixed to the connecting plate, the connecting plate is horizontally slidably connected to the mounting plate, the clamping plate is fixed to the connecting plate, and the clamping blocks of the two sets of clamping assemblies are arranged facing each other to clamp the two sides of the material box.

[0010] Furthermore, sliding guide rails are fixed on the upper and lower sides of the mounting plate, and the connecting plate is mounted on the slider of the sliding guide rail.

[0011] Furthermore, a rubber layer is fixed on the clamping surface of the clamping plate.

[0012] Furthermore, a limiting mechanism is provided below the lower sliding guide rail. The limiting mechanism includes a fixed plate, a first limiting sensing component, a second limiting sensing component, and a sensing block. The fixed plate is fixed to the mounting plate. The first and second limiting sensing components are connected to the controller and are respectively fixed on both sides of the fixed plate. The first and second limiting sensing components include a limiting seat, a sensing signal transmitting end, and a sensing signal receiving end. The sensing signal transmitting end and the sensing signal receiving end are respectively fixed on the upper and lower sides of the limiting seat. The sensing block is L-shaped, with its vertical side fixed to the connecting plate and its horizontal side inserted between the sensing signal transmitting end and the sensing signal receiving end, thus blocking signal transmission. The sensing signal transmitting end and the sensing signal receiving end are connected to the controller.

[0013] The working principle of this technical solution is as follows: the material box is placed between two sets of clamping plates, and then the fixed drive component is activated. The fixed drive component drives the gear to rotate, and the gear drives the racks on the upper and lower sides to move in a direction that brings them closer together, thereby clamping the two sides of the material box. Then, the position of the lower electrode and the material box can be adjusted by activating the first and second moving mechanisms through the controller.

[0014] The beneficial effects of this technical solution are as follows: ① This technical solution uses a first moving mechanism and a second moving mechanism to drive the material box and the lower electrode to move synchronously up, down, left, and right. Left and right translation allows the material box and lower electrode to sweep laterally across the discharge area, achieving full plasma coverage for workpieces wider than the effective processing area of ​​the electrode, eliminating localized missed treatments, uneven activation, and cleaning residue defects. It also compensates for lateral positioning deviations caused by material clamping and equipment assembly, ensuring uniform plasma treatment time for workpieces in the same batch and significantly reducing the dispersion of processing results. Up and down translation precisely controls the discharge gap between the upper and lower electrodes, adapting to workpieces of different thicknesses and maintaining a stable standard ignition spacing, avoiding problems such as insufficient ignition due to excessively large gaps or electrode arcing and damage due to excessively small gaps. With the lower electrode and material box moving synchronously, there is no workpiece offset relative to the lower electrode, no distortion in the discharge electric field, and stable plasma bombardment. This results in better surface treatment consistency for precision electronic and optical workpieces and a significant reduction in the defect rate.

[0015] ② The limiting mechanism can restrict the left and right movement of the clamping plate, preventing it from sliding off the sliding guide rail and also preventing the two clamping blocks from contacting each other directly. Attached Figure Description

[0016] Figure 1 This is a front structural diagram of a material conveying device suitable for low-temperature plasma processing according to the present invention; Figure 2 This is a schematic diagram of the rear structure of a material conveying device suitable for low-temperature plasma processing according to the present invention; Figure 3 for Figure 1 This is a schematic diagram of the structure of a fixed unit in a material conveying device suitable for low-temperature plasma processing according to the present invention. Detailed Implementation

[0017] The following detailed description illustrates the specific implementation method: The reference numerals in the accompanying drawings include: upper electrode 1, lower electrode 2, material box 3, mounting plate 4, first moving mechanism 5, second moving mechanism 6, fixing unit 7, fixing drive component 8, gear 9, rack 10, connecting plate 11, clamping plate 12, sliding guide rail 13, fixing plate 14, sensing block 15, sensing signal transmitting end 16, and sensing signal receiving end 17.

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] The basic implementation examples are as follows: Figure 1-3 The figure shows a material conveying device suitable for low-temperature plasma processing, comprising a controller, a mounting plate 4, and a fixing unit 7 and a moving unit connected to the controller. The device has an external outer casing (not shown). The lower electrode 2 is fixed to the lower side of the mounting plate 4, and the upper electrode 1 is fixed to the outer casing, positioned above the mounting plate 4 and directly opposite the lower electrode 2. The fixing unit 7 is mounted on the mounting plate 4 and is used to fix a material box 3, which is located between the upper electrode 1 and the lower electrode 2. The moving unit is used to move the mounting plate 4 up, down, left, and right.

[0020] The moving unit includes a first moving mechanism 5 and a second moving mechanism 6. A mounting plate 4 is fixed to the first moving mechanism 5, which drives the mounting plate 4 to move up and down. The first moving mechanism 5 is mounted on the second moving mechanism 6, which is mounted on the outer casing. The second moving mechanism 6 drives the first moving mechanism 5 to move left and right. Two sets of the second moving mechanism 6 are provided, respectively mounted on the upper and lower sides of the first moving mechanism 5. In this embodiment, the first moving mechanism 5 and the second moving mechanism 6 adopt a linear motion structure, such as a lead screw linear module, an electric push rod, or a cylinder. Two protective plates are fixed inside the outer casing for mounting the second moving mechanism 6.

[0021] The fixing unit 7 includes a fixing drive component 8 (specifically a motor), a gear 9, and two sets of clamping assemblies. The fixing drive component 8 is fixed on the mounting plate 4 and is connected to the controller. The drive end of the fixing drive component 8 is connected to the gear 9 and drives the gear 9 to rotate. The drive end of the fixing drive component 8 is connected to the central shaft of the gear 9 through a coupling. The central shaft of the gear 9 is rotatably connected to the mounting plate. The two sets of clamping assemblies are used to clamp the two sides of the material box 3 respectively. Each set of clamping assemblies includes a rack 10, a clamping plate 12, and a connecting plate 11. The racks 10 of the two sets of clamping assemblies mesh with the upper and lower sides of the gear 9 respectively. The racks 10 are fixed on the connecting plate 11, and the connecting plate 11 is horizontally slidably connected to the mounting plate 4. The clamping plates 12 are fixed on the connecting plate 11. The clamping blocks of the two sets of clamping assemblies are arranged facing each other and are used to clamp the two sides of the material box 3. A rubber layer is fixed on the clamping surface of the clamping plate 12. Sliding guide rails 13 are fixed on the upper and lower sides of the mounting plate 4, and the connecting plate 11 is mounted on the slider of the sliding guide rails 13.

[0022] A limiting mechanism is provided below the lower sliding guide rail 13. The limiting mechanism includes a fixed plate 14, a first limiting sensing component, a second limiting sensing component, and a sensing block 15. The fixed plate 14 is fixed to the mounting plate 4. The first and second limiting sensing components are connected to the controller and are respectively fixed on both sides of the fixed plate 14. The first and second limiting sensing components include a limiting seat, a sensing signal transmitting end 16, and a sensing signal receiving end 17. The sensing signal transmitting end 16 and the sensing signal receiving end 17 are respectively fixed on the upper and lower sides of the limiting seat. The sensing block 15 is L-shaped. The vertical side of the sensing block 15 is fixed to the connecting plate 11, and the horizontal side is inserted between the sensing signal transmitting end 16 and the sensing signal receiving end 17, which can block the transmission of signals. The sensing signal transmitting end 16 and the sensing signal receiving end 17 are connected to the controller. The controller is used to control the sensing signal transmitting end 16 to transmit signals and to receive the signals received by the sensing signal receiving end 17.

[0023] The specific implementation process is as follows: Place the material box 3 between the two sets of clamping plates 12, then activate the fixing drive 8. The fixing drive 8 drives the gear 9 to rotate, and the gear 9 drives the racks 10 on the upper and lower sides to move in a direction that brings them closer together, thereby clamping the two sides of the material box 3. Then, the position of the lower electrode 2 and the material box 3 can be adjusted by activating the first moving mechanism 5 and the second moving mechanism 6 through the controller.

[0024] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0025] The above descriptions are merely embodiments of the present invention. Commonly known structures and characteristics are not described in detail here. Those skilled in the art are aware of all common technical knowledge in the field prior to the application date or priority date, are aware of all existing technologies in that field, and have the ability to apply conventional experimental methods prior to that date. Those skilled in the art can, under the guidance of this application, improve and implement this solution in combination with their own capabilities. Some typical known structures or methods should not be obstacles for those skilled in the art to implement this application. It should be noted that those skilled in the art can make several modifications and improvements without departing from the structure of the present invention. These should also be considered within the scope of protection of the present invention, and will not affect the effectiveness of the implementation of the present invention or the practicality of the patent. The scope of protection claimed in this application should be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. A material conveying device suitable for low-temperature plasma processing, characterized in that: The system includes a controller, a mounting plate (4), a fixing unit (7) connected to the controller, and a moving unit. The lower electrode (2) is fixed to the lower side of the mounting plate (4), and the upper electrode (1) is fixed to the outer shell. The upper electrode (1) is located above the mounting plate (4) and directly opposite the lower electrode (2). The fixing unit (7) is installed on the mounting plate (4) and is used to fix the material box (3). The material box (3) is located between the upper electrode (1) and the lower electrode (2). The moving unit is used to move the mounting plate (4) up, down, left, and right. The moving unit includes a first moving mechanism (5) and a second moving mechanism (6). The mounting plate (4) is fixed on the first moving mechanism (5). The first moving mechanism (5) is used to drive the mounting plate (4) to move up and down. The first moving mechanism (5) is mounted on the second moving mechanism (6). The second moving mechanism (6) is mounted on the outer shell. The second moving mechanism (6) is used to drive the first moving mechanism (5) to move left and right.

2. A material conveying device suitable for low-temperature plasma processing according to claim 1, characterized in that: The second moving mechanism (6) is provided in two sets, and the two sets of the second moving mechanism (6) are respectively installed on the upper and lower sides of the first moving mechanism (5).

3. A material conveying device suitable for low-temperature plasma processing according to claim 1, characterized in that: The fixing unit (7) includes a fixing drive (8), a gear (9) and two sets of clamping assemblies. The fixing drive (8) is fixed on the mounting plate (4). The driving end of the fixing drive (8) is connected to the gear (9) and drives the gear (9) to rotate. The two sets of clamping assemblies are used to clamp the two sides of the material box (3). Each set of clamping assemblies includes a rack (10), a clamping plate (12) and a connecting plate (11). The racks (10) of the two sets of clamping assemblies mesh with the upper and lower sides of the gear (9) respectively. The rack (10) is fixed on the connecting plate (11). The connecting plate (11) is horizontally slidably connected to the mounting plate (4). The clamping plate (12) is fixed on the connecting plate (11). The clamping blocks of the two sets of clamping assemblies are arranged opposite each other and are used to clamp the two sides of the material box (3).

4. A material conveying device suitable for low-temperature plasma processing according to claim 3, characterized in that: The mounting plate (4) has sliding guide rails (13) fixed on its upper and lower sides respectively, and the connecting plate (11) is mounted on the slider of the sliding guide rail (13).

5. A material conveying device suitable for low-temperature plasma processing according to claim 3, characterized in that: A rubber layer is fixed on the clamping surface of the clamping plate (12).

6. A material conveying device suitable for low-temperature plasma processing according to claim 3, characterized in that: A limiting mechanism is provided below the lower sliding guide rail (13). The limiting mechanism includes a fixed plate (14), a first limiting sensing component, a second limiting sensing component, and a sensing block (15). The fixed plate (14) is fixed on the mounting plate (4). The first and second limiting sensing components are connected to the controller and are respectively fixed on both sides of the fixed plate (14). The first and second limiting sensing components include a limiting seat, a sensing signal transmitting end (16), and a sensing block (15). The sensing signal receiving end (17) is fixed on the upper and lower sides of the limiting seat, respectively. The sensing block (15) is L-shaped. The vertical side of the sensing block (15) is fixed on the connecting plate (11), and the horizontal side is inserted between the sensing signal transmitting end (16) and the sensing signal receiving end (17) to block the transmission of signals. The sensing signal transmitting end (16) and the sensing signal receiving end (17) are connected to the controller.

Images