Ultra-low organic laboratory electronic grade ultra-pure water device

Abstract

The application provides an ultra-low organic laboratory electronic-grade ultrapure water device, and belongs to the field of laboratory water treatment, and specifically comprises a shell, a first water tank and a second water tank in pipeline communication with the shell respectively, and a first-stage circulation module, a second-stage circulation module, a cooling module and a control module arranged in the shell; the total organic carbon content of the inlet water is lower than 2 ppm; the first-stage circulation module is used for purifying first ultrapure water with a total organic carbon content lower than 3 ppb through cyclic degradation for a predetermined period; and the second-stage circulation module is used for cyclically degrading the first ultrapure water until second ultrapure water with a total organic carbon content lower than 1 ppb is obtained. Through the processing scheme, the electronic-grade water preparation process of the ultra-low organic type is optimized, the organic matter in the water is deeply degraded, the electronic-grade water of the ultra-low organic type is stably produced, and the water demand of high-end industries such as schools and laboratories is met.

Description

Technical Field

[0001] This application relates to the field of laboratory water treatment, and in particular to an ultra-low organic matter type laboratory electronic-grade ultrapure water device. Background Technology

[0002] In recent years, with the advancement of scientific research, extremely low organic content electronic-grade ultrapure water is required in scientific research, chemical analysis, and various scientific experiments. Therefore, stricter requirements have been placed on the organic content, ion purity, and cleanliness of ultrapure water. Laboratory pure water systems need to thoroughly remove organic matter, trace ions, and particulate matter from the water and provide a stable supply of ultrapure water. This is essential to minimize the interference of impurities in the water on experiments, ensure stable test results, and thus guarantee the accurate and stable operation of various semiconductor detection, scientific research, and chemical analysis processes in the laboratory.

[0003] Laboratory pure water equipment is generally manufactured according to the GB / T 6682 classification standard. Through multi-stage precision purification processes, it strictly controls various trace impurities in the water, rigorously managing precise water quality indicators such as resistivity, total organic carbon, and endotoxins. However, most ultrapure water devices on the market focus on removing inorganic salt ions, particulate matter, suspended solids, and microorganisms from the water, neglecting small-molecule organic matter, humic substances, and total organic carbon (TOC). These organic impurities can easily cause surface contamination and circuit corrosion of semiconductor devices during testing, and even affect the performance and production yield of test semiconductor devices produced in the laboratory. Furthermore, when this type of ultrapure water is used for pharmaceutical and biochemical experiments, it introduces interfering impurities, compromising the accuracy of experimental results. Moreover, these impurities can cause membrane module blockage and performance degradation of ion exchange resins, leading to secondary pollution of the system.

[0004] Furthermore, existing electronic-grade ultrapure water systems are all installed within semiconductor factories, requiring significant factory space to produce ultrapure water. Consequently, these systems generally suffer from large size, high cost, and poor adaptability. Applying industrial-grade ultrapure water systems to schools or testing companies would not only incur exorbitant construction costs but also result in excessive ultrapure water production and waste. Therefore, industrial-grade ultrapure water systems are unsuitable for smaller-scale environments like laboratories and testing facilities, failing to meet the demand for miniaturized and efficient water for precise laboratory testing and analysis. Thus, there is an urgent need for a miniaturized electronic-grade ultrapure water device that can meet the requirements of precise laboratory testing and analysis. Summary of the Invention

[0005] Therefore, in order to overcome the shortcomings of the prior art, the present invention provides a low-cost, high-precision, and miniaturized ultra-low organic matter laboratory electronic-grade ultrapure water device. This device optimizes the preparation process of ultra-low organic matter electronic-grade water, realizes the deep degradation of organic matter in water, and stably produces ultra-low organic matter electronic-grade water to meet the water needs of high-end industries such as schools and laboratories.

[0006] To achieve the above objectives, the present invention provides a miniaturized ultra-low organic matter (UOC) laboratory electronic-grade ultrapure water device for stably purifying raw water into ultrapure water in a laboratory setting. The device includes a housing, a first water tank and a second water tank connected to the housing via pipelines, and a first-stage circulation module, a second-stage circulation module, a cooling module, and a control module disposed within the housing. The first-stage circulation module includes a first internal circulation pipeline connected to the first water tank for storing ultrapure water, and a first disinfection and degradation unit and a first purification unit disposed on the first internal circulation pipeline. The raw water has a total organic carbon (TOC) content of less than 2 ppm. After purification by the purification unit, the raw water is entered into the first water tank for storage. The water stored in the first water tank has a TOC content of less than 50 ppb. The ultrapure water in the first water tank is purified by ultraviolet light through the first disinfection and degradation unit. The water undergoes organic degradation. The first purification unit purifies the degraded pure water and, after a predetermined degradation cycle, purifies it to obtain first ultrapure water with a total organic carbon content of less than 3 ppb. The second-stage circulation module includes a second internal circulation pipeline connected to the second water tank and a first-stage ultrapure purification unit and a second-stage ultrapure purification unit installed on the second internal circulation pipeline. The second water tank stores the first ultrapure water. The first-stage ultrapure purification unit and the second-stage ultrapure purification unit are connected in series to remove impurities and organic matter from the first ultrapure water and circulate the first ultrapure water for degradation until it is purified to second ultrapure water with a total organic carbon content of less than 1 ppb. The control module controls the water inlet of the first water tank and the second water tank respectively, and the control module controls the cooling module to assist the first-stage circulation module and the second-stage circulation module in heat dissipation.

[0007] In one embodiment, the first internal circulation pipeline includes a first main pipeline and a first branch pipeline. The first main pipeline is connected in series with a first water tank, a three-way valve, a first flow meter, a first disinfection and degradation unit, a first purification unit, and a second flow meter to form a circulation pipeline. The first branch pipeline is connected in series with the three-way valve, the first flow meter, the first disinfection and degradation unit, the first purification unit, and a disinfection valve to form a circulation pipeline.

[0008] In one embodiment, the first purification unit includes a first ultrapure purification column and a second ultrapure purification column connected in series. The first-stage ultrapure purification unit includes a second disinfection and degradation unit, an activated carbon adsorption unit, and a third ultrapure purification column. The second-stage ultrapure purification unit includes a third disinfection and degradation unit, a fourth ultrapure purification column, and a fifth ultrapure purification column. The ultrapure purification column is an ion exchange column capable of stably achieving 18.2 MΩ. Purification indicators include cm and TOC < 5 ppb.

[0009] In one embodiment, the first disinfection and degradation unit, the second disinfection and degradation unit, and the third disinfection and degradation unit are all dual-wavelength ultraviolet components. The dual-wavelength ultraviolet component includes a mounting shell and an ultraviolet lamp sealed in a quartz sleeve. The quartz sleeve is fixedly disposed with the mounting shell, and a fluid flow channel is provided between the mounting shell and the quartz sleeve. The dual-wavelength ultraviolet component includes a 185 nm ultraviolet lamp and a 254 nm ultraviolet lamp.

[0010] In one embodiment, the raw water is purified into pure water that can be stored in the first water tank by a purification unit. The control module controls the pure water to pass through a booster pump and then split into two streams after a three-way valve. One stream passes through a deionized water flow meter and a deionized water outlet solenoid valve to provide deionized water. The other stream of deionized water passes through a first disinfection and degradation unit to sterilize and degrade the total organic carbon content of the deionized water. After the temperature of the deionized water is adjusted by a first temperature controller, it is further purified by a first ultrapure purification column and a second ultrapure purification column. After the water quality of the deionized water is monitored in real time by an online resistivity meter, it is split into two streams again. One stream passes through... After passing through the disinfection valve, the water mixes with pure water at the three-way valve to form a circulation pipeline. Another path returns to the first water tank to form a circulation pipeline, resulting in first ultrapure water with a total organic carbon content of less than 3 ppb. The control module controls the first ultrapure water to flow into the second water tank, and then controls the first ultrapure water to pass through the circulation pump, online conductivity meter, first-stage ultrapure purification unit and second-stage ultrapure purification unit in sequence before being divided into two paths. One path returns to the second water tank to form a circulation pipeline, and the other path passes through an ultrapure water flow meter and an ultrapure water outlet solenoid valve to provide second ultrapure water with a total organic carbon content of less than 1 ppb.

[0011] In one embodiment, within the housing, a second internal circulation module is disposed above the first internal circulation module. The second disinfection and degradation unit and the third disinfection and degradation unit are arranged in one side space of the upper part of the shell, and the activated carbon adsorption unit, the third ultrapure column, the fourth ultrapure column and the fifth ultrapure column are arranged in parallel in the other side space, thereby shortening the pipeline for water flow. The first disinfection and degradation unit, the first ultrapure column, and the second ultrapure column are arranged side by side at the bottom of the housing.

[0012] In one embodiment, the degradation rate per unit volume in the first-stage circulation module and the second-stage circulation module is determined according to the formula... Q=v A is used for calculation, where the negative sign represents degradation, Q is the volumetric flow rate, and C is the volumetric flow rate. in Where η is the inlet concentration, η is the TOC degradation efficiency, and V is the inlet concentration. bed V represents the effective volume of the activated carbon bed, UV lamp, and terminal filter; v represents the fluid velocity; and A represents the cross-sectional area of ​​the pipeline.

[0013] In one embodiment, when the water level in the first water tank drops to the first liquid level, the control module controls the purification unit to purify the raw water and replenish the water in the first water tank. When the water level in the second water tank drops to the second liquid level, the control module controls the first water tank to replenish the water in the second water tank.

[0014] In one embodiment, the fittings constituting the first internal circulation pipeline and the second internal circulation pipeline are all PFA fittings that have undergone acid and alkali cleaning.

[0015] Compared with existing technologies, the advantages of this invention are as follows: By optimizing and improving the process and structure of electronic-grade water purification, the entire device adopts a two-stage water tank combined with a two-stage ultrapure circulation and multiple sterilization and degradation units to effectively reduce the total organic carbon content of the water. The materials are stable and not prone to leaching and polluting the water. The packing material is evenly distributed and the water flow is smooth, resulting in stable operation and a longer service life. Secondly, by adopting a reasonable and compact structural layout, the overall size of the equipment can be reduced, enabling miniaturized deployment, reducing energy consumption and manufacturing costs, while balancing the convenience of equipment operation and maintenance with the stability of the effluent water quality. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the process of an ultra-low organic matter type laboratory electronic-grade ultrapure water device in an embodiment of the present invention; Figure 2 This is a schematic diagram of the water tank structure of the ultra-low organic matter type laboratory electronic-grade ultrapure water device in an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of an ultra-low organic matter type laboratory electronic-grade ultrapure water device in an embodiment of the present invention; Figure 4This is an exploded view of the structure of an ultra-low organic matter type laboratory electronic-grade ultrapure water device in an embodiment of the present invention; Figure 5 These are TOC test data from the first-stage circulation of the ultra-low organic matter type laboratory electronic-grade ultrapure water device in the embodiments of the present invention at different time periods; Figure 6 These are TOC test data from the second-stage circulation of the ultra-low organic matter type laboratory electronic-grade ultrapure water device in the embodiments of the present invention at different time periods; Figure 7 These are TOC test data of the second-stage circulation of the ultra-low organic matter type laboratory electronic-grade ultrapure water device in the embodiments of the present invention at different flow rates; Figure 8 These are continuous TOC test data from an ultra-low organic matter laboratory electronic-grade ultrapure water device at different flow rates, as described in the embodiments of the present invention. Detailed Implementation

[0018] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0019] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] It should be noted that the following description covers various aspects of embodiments within the scope of protection of this invention. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0021] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0022] Furthermore, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the described aspects can be practiced without these specific details.

[0023] like Figure 1 As shown in the illustration, this application provides a miniaturized, ultra-low organic matter laboratory-grade ultrapure water device for stably purifying raw water into ultrapure water in a laboratory setting. The raw water can be tap water or water that has undergone purification pretreatment. This purification pretreatment can employ a conventional filter column to filter the tap water. In one embodiment, the electronic-grade ultrapure water device further includes a purification unit that pretreatment the tap water. The pretreated water flows to a first water tank for storage, and the water stored in the first tank serves as the inlet water source for the electronic-grade ultrapure water device.

[0024] The electronic-grade ultrapure water device includes a shell, a first water tank and a second water tank connected to the shell by pipelines, and a first-stage circulation module, a second-stage circulation module, a cooling module and a control module installed in the shell.

[0025] like Figure 3 As shown, the first-stage circulation module 3 includes a first internal circulation pipeline connected to a first water tank for storing pure water, a first disinfection and degradation unit 31 and a first purification unit disposed on the first internal circulation pipeline.

[0026] The raw water has a total organic carbon content of less than 2 ppm. After being purified by the purification unit, the raw water is stored in the first water tank. At this time, the total organic carbon content of the water stored in the first water tank is less than 50 ppb. The pure water in the first water tank is subjected to organic degradation by ultraviolet light in the first disinfection and degradation unit. The first purification unit purifies the degraded pure water. After a predetermined degradation cycle, the purified water has a total organic carbon content of less than 3 ppb.

[0027] The second-stage circulation module includes a second internal circulation pipeline connected to the second water tank, and a first-stage ultrapureization unit and a second-stage ultrapureization unit installed on the second internal circulation pipeline.

[0028] The second water tank stores the first ultrapure water. The first-stage ultrapure water unit and the second-stage ultrapure water unit are connected in series to remove impurities and organic matter from the first ultrapure water. The first ultrapure water is circulated and degraded until it is purified into second ultrapure water with a total organic carbon content of less than 1 ppb. The balancing water pump is set between the first water tank and the second water tank. By balancing the flow rate and pressure, the first ultrapure water flows into the second water tank. The control module controls the cooling module to assist the first-stage circulation module and the second-stage circulation module in heat dissipation.

[0029] Raw water enters the first water tank 1, is stored in the first water tank 1, and then returns to the pre-ultrapure water tank for further purification; this is called the first-stage circulation. The first-stage circulation lasts for 10-12 hours. Then, the second-stage circulation begins. In the second-stage circulation, the water prepared in the first water tank 1 is pumped into the second water tank 2 for storage. The water in the second water tank 2 is then pumped through the first and second-stage ultrapure water tanks, purified in these tanks, and then returned to the second water tank 2. The water returning to the second water tank 2 repeats the second-stage circulation process, continuously circulating for approximately 10-12 hours. After this dual-stage purification, a portion of the water returns to the second water tank 2, while the remaining portion is sent to a TOC analyzer for analysis. By adjusting the flow rate, a dynamic balance is maintained between the water entering the TOC analyzer and the water entering the second water tank 2, gradually reducing the TOC level to below 1 ppb. Simultaneously, a cooling unit connects to the dual-stage circulation loop, using a heat exchange device to assist in heat dissipation, effectively preventing equipment overheating. Furthermore, a constant temperature control mechanism is used to reduce the TOC content in the water and stabilize water quality indicators.

[0030] In this electronic-grade pure water device, total organic carbon (TOC) refers to the total carbon content of all organic compounds in the water treated by the electronic-grade pure water device. It is one of the core indicators for measuring the purity and cleanliness of the water output from the electronic-grade pure water device.

[0031] The ultra-low organic matter (UOC) laboratory electronic-grade water system utilizes a special process to achieve continuous degradation of organic matter in water, with the efficient removal and degradation of total organic carbon (TOC) supported by fluid dynamics principles. This calculation method is used in water treatment, porous media systems, and numerical simulations of pure water system pipelines, employing a widely adopted standard CFD-simplified calculation approach. Specifically, in each analysis test, the electronic-grade pure water system is subjected to ultraviolet radiation for 10-12 hours. A TOC analyzer (Veolia's Sievers*M9e Total Organic Carbon TOC Analyzer) is used to monitor and analyze the TOC value in the water sample online. The percentage of TOC removal (Y) is expressed as Y (%) = 100 (C0 - C... f The result is calculated as ) / C0.

[0032] Where C0 represents the initial total organic carbon concentration (unit: ppb), C fIt is the final concentration of total organic carbon after a certain period of time (unit: ppb).

[0033] The control module controls the water inlet of the first and second water tanks respectively, and controls the cooling module (chiller) to assist the first and second circulation modules in heat dissipation.

[0034] like Figure 2 As shown, the first water tank 1 and the second water tank 2 can be stacked to form a water bucket, reducing the floor space occupied by the water tanks themselves.

[0035] The upper end of the first water tank 1 is provided with a first water inlet 11 for raw water to flow in and a second water inlet 12 for receiving pure water returned from the first internal circulation pipeline, and a first water outlet connected to the first main pipeline is provided on the side.

[0036] The second water tank 2 is provided with an inlet for the first ultrapure water to flow into. This inlet is located between the two water tanks and is equipped with a one-way valve controlled by the control module. The second water tank 2 is also provided with a return port for receiving the return water from the second internal circulation pipeline, and has a second outlet 21 at its front end that is connected to the first main pipeline.

[0037] like Figure 3 and Figure 4 As shown, in one embodiment, the second internal circulation module 4 is disposed above the first internal circulation module 3 within the housing.

[0038] In one embodiment, the first purification unit includes a first ultrapure purification column 32 and a second ultrapure purification column 33 connected in series. The primary ultrapure purification unit includes a second disinfection and degradation unit 41, an activated carbon adsorption unit 42, and a third ultrapure purification column 43. The secondary ultrapure purification unit includes a third disinfection and degradation unit 44, a third ultrapure purification column 45, and a fourth ultrapure purification column 46. The ultrapure purification column is an ion exchange column, capable of stably achieving 18.2 MΩ. The purification indicators are cm⁻² and TOC < 5 ppb. In one embodiment, the ultrapure column is a commercially available purification column such as the 602 ultrapure column, Merck Millipore purification column, or Sartorius DI column. In one embodiment, the activated carbon in the activated carbon adsorption unit is spherical activated carbon with a particle size range of 0.4-0.6 mm ± 0.05 mm, exhibiting a normal distribution. The spherical activated carbon has a high specific surface area of ​​1150-1250 m² / g and an average pore size of 3.3-3.5 nm. 85% of the pores are micropores (<2 nm), providing ample adsorption sites for small molecule organic matter; approximately 15% are mesopores (2-10 nm), serving as excellent mass transfer channels and significantly improving the adsorption rate.

[0039] The activated carbon adsorption unit can be an activated carbon column filled with spherical activated carbon of similar size to each purification column, or it can be an adsorption unit of other shapes filled with spherical activated carbon. The excellent retention and inhibition of microbial growth by the ultrapure column reduces biofilm growth on the inner wall of the pipeline. Spherical activated carbon, as a high-end adsorption and separation material, is a spherical activated carbon material prepared by a block copolymerization process using precursor resins. The pores of spherical activated carbon possess both adsorption capacity and precise selection through different sizes of micropores, mesopores, and macropores. Therefore, when in contact with a mixture of water, it can adsorb specific target substances while not adsorbing others, or it can exhibit different adsorption forces for different substances, thus performing a special selective adsorption function. In this embodiment, spherical activated carbon can effectively remove TOC and metal ions from water. Spherical activated carbon has outstanding advantages such as uniform particle size, good flowability, high mechanical strength, no residual impurities, and excellent chemical stability, enabling selective adsorption of various impurities and harmful trace elements in water. A second and a third disinfection and degradation unit are installed in one side of the upper part of the shell, while an activated carbon adsorption unit, a third ultrapure column, a fourth ultrapure column, and a fifth ultrapure column are arranged side by side in the other side of the shell, thereby shortening the pipeline for water flow.

[0040] A first disinfection and degradation unit, a first ultrapure column, and a second ultrapure column are arranged side by side at the bottom of the shell.

[0041] The interior of the shell adopts a left-right structure layout, and is equipped with a UV lamp, a spherical carbon column and an ultrapure column. The functional components are arranged in left-right zones, with the UV lamp located in the right space of the shell and the ultrapure column module arranged in the left space of the shell. This layout is conducive to the orderly arrangement of pipelines, reduces the arrangement space, shortens the pipeline length, optimizes the structural layout, and avoids cross-contamination.

[0042] The aforementioned device, through optimization and improvement of the electronic-grade water purification process and structure, employs a two-stage water tank combined with a two-stage ultrapure circulation system and multiple sterilization and degradation units to effectively reduce the total organic carbon content of the water. The materials are stable, making them less prone to leaching and polluting the water. The uniformly distributed packing ensures smooth water flow, stable operation, and a longer service life. Furthermore, the rational and compact structural layout reduces the overall size of the equipment, enabling miniaturized deployment, lowering energy consumption and manufacturing costs, while balancing ease of maintenance and stable effluent quality.

[0043] In one embodiment, the first internal circulation pipeline forms a pre-ultra-purification of raw water. The first internal circulation pipeline includes a first main pipeline and a first branch pipeline. The first main pipeline is connected in series with a first water tank 1, a three-way valve, a first flow meter F1, a first disinfection and degradation unit UV1, a first purification unit, and a second flow meter F2 to form a circulation pipeline. The first branch pipeline is connected in series with a three-way valve, a first flow meter F1, a first disinfection and degradation unit UV1, a first purification unit, and a disinfection valve to form a circulation pipeline.

[0044] In the first internal circulation pipeline, the flow rate of the fluid in the first branch pipeline and the first main pipeline needs to be regulated. This regulation is based on factors including influent water quality parameters, the flow rate of the main pipeline, and the processing load of the UV and purification components installed in the branch pipeline. Simultaneously, the fluid flow rate inside the pipeline is also affected by ambient temperature and humidity. Operators can use regulating valves and reducing pipe diameters to ensure that the diversion flow rate of the branch pipeline is adapted to the bypass pretreatment conditions. This avoids significant fluctuations in the water transported in the main pipeline while ensuring that the branch pipeline completes its targeted TOC degradation and impurity retention tasks. This balances the main pipeline's water transport efficiency with the purification effect of the branch pipeline.

[0045] In the aforementioned device, the first internal circulation pipeline forms two pure water circulation loops, further improving the pre-ultrapurification rate.

[0046] In one embodiment, the first, second, and third disinfection and degradation units are all dual-wavelength ultraviolet (UV) components. Each dual-wavelength UV component includes a mounting housing and a UV lamp tube sealed within a quartz sleeve. The quartz sleeve is fixedly mounted to the mounting housing, and a fluid flow channel is provided between the mounting housing and the quartz sleeve. The dual-wavelength UV component comprises a 185 nm UV lamp and a 254 nm UV lamp. The UV transmittance in the system can be optimized from two dimensions: power configuration and transparent substrate. Firstly, increase the total ultraviolet emission power. For example, by increasing the number of ultraviolet lamps deployed, the overall ultraviolet transmission flux can be increased; Secondly, high-transmittance synthetic quartz glass is selected as the light-transmitting medium. Under the premise of consistent input power, the transmittance of this material can reach the theoretical limit (the quartz sleeve is made of high-transmittance synthetic JGS1 quartz glass, which has a transmittance of not less than 87% for 185nm ultraviolet light and not less than 90% for 254nm ultraviolet light). This can improve the light flux transmission efficiency in the 185nm ultraviolet band, reduce the absorption and scattering loss of 185nm ultraviolet photons by the medium from the source, and thus reduce the light energy transmission loss of ultraviolet light at this wavelength throughout the entire optical path, ensuring that the downstream ultraviolet degradation unit receives sufficient and effective irradiation dose.

[0047] In one embodiment, the main chemical component of the quartz glass is silicon dioxide (SiO2). The quartz raw material is first purified to a purity ≥99.9999%, and then prepared through high-temperature melting and molding processes. The transmittance of the quartz glass is confirmed to meet the aforementioned standard using ultraviolet-visible spectrophotometry. Simultaneously, the ultraviolet lamp assembly has a compact overall structure, reducing the internal assembly space required and adapting to the assembly process and internal space layout design requirements of miniaturized ultrapure water equipment. Total organic carbon (TOC) degradation in water is achieved through the photolysis of free radicals using 185nm ultraviolet light; the 254nm ultraviolet light has excellent water penetration capabilities, eliminating microorganisms within the system and assisting in the decomposition of macromolecular organic matter. The synergistic effect of the dual-band wavelengths ensures balanced TOC degradation and stable operation.

[0048] The device uses a pre-ultrapurification unit as the core TOC degradation stage, employing a dual-band ultraviolet light source of 185 nm and 254 nm to photolyze organic pollutants in the water. By varying the ratio of ultraviolet lamps, efficient degradation and removal of total organic matter are achieved. In one embodiment, increasing the total emission power of the ultraviolet lamps to 70W-75W enhances the photochemical degradation effect of ultraviolet light, further improving the degradation efficiency of organic matter and microorganisms in the water, ultimately improving the overall purification effect of the system and obtaining higher purity electronic-grade water. The degraded water then undergoes further purification via a downstream ion exchange unit.

[0049] The aforementioned device uses a dual-band ultraviolet light source of 185 nm and 254 nm to photolyze organic pollutants in water. By varying the ratio of different ultraviolet lamps, it achieves efficient degradation and removal of total organic matter.

[0050] In one embodiment, raw water is purified into pure water that can be stored in a first water tank by a purification unit. The control module controls the pure water to pass sequentially through a booster pump and then split into two streams after a three-way valve. One stream passes sequentially through a deionized water flow meter and a deionized water outlet solenoid valve to provide deionized water. The other stream of deionized water passes through a first disinfection and degradation unit to sterilize and degrade the total organic carbon content of the deionized water. After the temperature of the deionized water is adjusted by a first temperature controller, it is further purified by passing through a first ultrapure purification column and a second ultrapure purification column. After the water quality of the deionized water is monitored in real time by an online resistivity meter, it is split again. The system consists of two paths. One path passes through a disinfection valve and mixes with pure water at a three-way valve to form a circulation pipeline. The other path returns to the first water tank to form a circulation pipeline, resulting in first ultrapure water with a total organic carbon content of less than 3 ppb. The control module controls the first ultrapure water to flow into the second water tank. Then, the first ultrapure water is controlled to pass through a circulation pump, an online conductivity meter, a first-stage ultrapure purification unit, and a second-stage ultrapure purification unit in sequence before being divided into two paths. One path returns to the second water tank to form a circulation pipeline, while the other path passes through an ultrapure water flow meter and an ultrapure water outlet solenoid valve to provide second ultrapure water with a total organic carbon content of less than 1 ppb.

[0051] The control module pressurizes the water in the tank through the one-way valve CV1 and the RO booster pump BP1, and then delivers the water to the three-way valve. One path passes through the DI water (deionized water) flow meter F1 and the DI outlet solenoid valve V1, and provides DI water; In the other path, DI water flows through the UV1 component for sterilization and TOC degradation. The HED temperature control GF1 component regulates the water temperature through heat exchange. After TOC degradation, the water flows into the first ultrapure column UP1 and the second ultrapure column UP2. It then flows through the UP water resistor RS1 for purification and, together with water flowing through the disinfection box, undergoes sterilization. Finally, it passes through the one-way valve CV3, the UP water flow meter F2, and the UP outlet solenoid valve V3, and exits through the terminal filter FT1 as UP water (UP water is essentially first-level ultrapure water with a total organic carbon content below 3 ppb; this UP water can be directly supplied to the laboratory for basic experiments). A portion of the water is discharged as wastewater through the disinfection outlet solenoid valve V4. The water in the pipeline undergoes circulation purification through the internal circulation solenoid valve. After continuously circulating the above steps for 10-12 hours, the TOC value in the water is around 3 ppb.

[0052] The control module can also control the water in the first water tank 1 to automatically balance the flow and pressure through the inlet solenoid valve V5 and the proportional valve PV1. The water then flows into the second water tank 2 for storage, and subsequently enters the first-stage ultrapure water purification stage. The control module circulates and purifies the RO water through the circulation pump CP1 and the RO water conductivity CS1. The RO water then enters the UV2 component for sterilization, disinfection, and degradation of organic matter. After passing through the HED temperature control GF2 to complete the heat exchange component to regulate the water temperature and degrade TOC, the water flows into the spherical activated carbon, where it adsorbs small molecule organic matter and metal impurities. It then flows into the ultrapure water column UP3 for further degradation of trace ions and organic matter. The purified water enters the second-stage ultrapure water purification stage, which involves entering the UV3 component for sterilization, disinfection, and degradation of organic matter. The purity of the ultrapure water is monitored by the UP water resistance RS2. Then, the water undergoes deep purification via UP3 and UP4 ultrapure water columns to remove trace ions and organic matter. After passing through UP water resistor RS3, a portion of the water is monitored by UP water flow meter F3 to measure the pipeline flow rate. The system flow flows to UP outlet solenoid valve V10, where it passes through terminal filter FT2 to intercept tiny particles, resulting in the output of clean and qualified UP ultrapure water after sterilization and antibacterial treatment. One stream returns to the second water tank 2 via internal circulation solenoid valve for further purification. A portion of the water returning to the second water tank 2 is then used for TOC testing. The water in the second water tank 2 is circulated in the primary and secondary ultrapure water processes for 10-12 hours before testing. The TOC values ​​at both the front and rear outlets gradually decrease to less than 1 ppb.

[0053] Water from the chiller enters the first heat exchange unit (GF1 HED temperature controller), completes the heat exchange, flows into the second heat exchange unit (GF2 HED temperature controller), completes the heat exchange, and returns to the chiller. The chiller is not connected in series with the circulation pipeline to prevent pipe and water contamination, ensuring the quality of the electronic-grade water. The closed-loop circulation system facilitates the continuous degradation of organic matter in the water.

[0054] like Figure 5 As shown, in the first-stage cycle, after pre-ultrapurification treatment, the TOC in water tank 1 was continuously tested for three days, gradually decreasing to below 3 ppb, and remained stably below 3 ppb on the third day. Figure 6 As shown, when entering the second-stage cycle, after three days of continuous cycling tests involving the first-stage ultrapure purification, the second-stage ultrapure purification, and water tank 2, the TOC value dropped below 1 ppb. Figure 7 As shown, when the flow rate was maintained below 31.5 L / h, the TOC remained <1 ppb for two consecutive hours of testing; when the flow rate was controlled at 22.5 L / h, the TOC remained stably <1 ppb for seven consecutive hours of testing. Meanwhile, as... Figure 8 As shown, by testing the maximum flow rate with TOC < 1ppb, it was found that a flow rate of 44.4 L / h can be continuously tested for 50 minutes, and a flow rate of 39 L / h can be continuously tested for 2 hours, which can meet the user's need for large-scale water use in a short period of time.

[0055] As shown in Figure 5, under the condition that the initial TOC concentration C0 of the influent is 2 ppm, the water sample is subjected to the first stage of cyclic degradation treatment and continuous cyclic testing for three days; after the pre-ultrapurification treatment, the TOC concentration C1 of the effluent is 2.46 ppb, and the organic matter removal rate Y reaches 99.8%.

[0056] As shown in Figure 7, after the water sample underwent a second-stage cyclic degradation treatment and continuous cyclic testing for three days, the TOC concentration C2 in the effluent from the secondary ultrapure water terminal decreased to 0.42 ppb, and the organic matter removal rate Y increased to 99.9%. The experimental results indicate that the two-stage cyclic degradation mode adopted in this application can further optimize the pure water purification process, achieving a total organic carbon removal rate of 99.9% in tap water, increasing the TOC removal rate from 99.8% to 99.9%, and halving the pollutant residue. This demonstrates that the system degrades organic pollutants more thoroughly and significantly improves degradation efficiency, proving that the above-mentioned device provides reliable technical support for parameter optimization of the TOC removal process in pure water machines.

[0057] The aforementioned device employs a dual-stage water tank combined with a dual-stage ultrapure circulation system and a multi-stage TOC degradation and adsorption process. It utilizes low-organic-content pipe fittings and valves, is equipped with high-efficiency adsorption resin, and features a precise and rational structural layout. Through dual-stage circulation and step-by-step degradation, it effectively removes organic pollutants from the water, significantly improving water purification. The components in the entire system work synergistically and organically to stably produce electronic-grade ultrapure water that meets the requirements of semiconductor process testing. This achieves highly efficient removal of organic matter from the water, preparing ultrapure water that meets the needs of high-precision analytical experiments, avoiding interference from organic impurities in experimental results, and ensuring the stability and reliability of chip manufacturing and testing processes in the laboratory. It effectively solves the technical challenge of existing pure water machines failing to achieve deep degradation of organic matter in water, ensuring the stable production of ultrapure water with ultra-low organic content, and meeting the stringent water requirements of high-end industries.

[0058] In one embodiment, the lengths of the first and second internal circulation pipelines are rationally planned based on the overall structure of the machine. By placing the UV lamp on the right and the purification column on the left, the pipeline is simplified, its length shortened, and the pipeline layout optimized. This effectively reduces the adsorption and precipitation of organic carbon, laying a core foundation for ensuring TOC degradation efficiency and optimizing process parameters. With the optimized short pipeline layout, the equipment operates stably, better meeting the experimental testing requirements.

[0059] In one embodiment, the solution properties are not expected to change significantly as the organic matter content in the water decreases. A volumetric source term is applied to the porous region where the organic matter degradation process will proceed according to the property transport formula in Ansys Fluent. The degradation rate per unit volume in the first and second stage circulation modules is based on the formula... Q=v A is used for calculation, where the negative sign represents degradation, and C... in Where η is the inlet concentration, η is the TOC degradation efficiency, and V is the inlet concentration. bed V represents the effective volume of the activated carbon bed, UV lamp, and terminal filter; v represents the fluid velocity; Q represents the volumetric flow rate; and A represents the cross-sectional area of ​​the pipe.

[0060] The aforementioned device maintains system flow balance through a precise and rational structural layout and accurately controls fluid velocity, ensuring that the fluid kinetic energy matches the requirements of the TOC degradation reaction. This guarantees sufficient kinetic energy for complete degradation while avoiding incomplete degradation and material waste caused by excessive flow velocity. By rationally adjusting the system water flow velocity, this device extends the duration of ultraviolet light irradiation in the water, reduces the amount of organic matter released from the pipeline, effectively improves TOC degradation efficiency, and further enhances the overall purification effect of the system.

[0061] In one embodiment, when the water level in the first water tank drops to the first liquid level, the control module controls the purification unit to purify the raw water and replenish the water in the first water tank; when the water level in the second water tank drops to the second liquid level, the control module controls the first water tank to replenish the water in the second water tank.

[0062] For example, in the ultra-low organic matter electronic-grade water device, the water flow rate is 2L / min. When the liquid level in the first water tank 1 drops to about 40L, the control module activates the water production mode to ensure that the water tank and the main unit are always in a state of circulating degradation. When the liquid level in the second water tank 2 drops to about 25L, the control module automatically replenishes water from the first water tank 1 to ensure that the second water tank 2, the primary purification, and the secondary purification are always in a state of degradation.

[0063] In one embodiment, the fittings constituting the first and second internal circulation pipelines are both PFA fittings that have undergone acid and alkali cleaning. Compared to traditional PVC, PP, ordinary stainless steel, and conventional PTFE fittings and valves, PFA fittings possess comprehensive advantages such as high cleanliness, low precipitation, low adsorption, corrosion resistance, excellent sealing, and stable operation. This solves the problems of ordinary pipeline fittings easily dissolving impurities, adsorbing pollutants, aging and leaking, and causing secondary water pollution. Therefore, it meets the requirements for the preparation and transportation of electronic-grade ultrapure water with ultra-low organic matter and ultra-high cleanliness, and is suitable for the long-term stable operation of high-precision laboratory ultrapure water systems. In some embodiments, the PFA fittings and valves are dried after acid washing, which helps reduce organic matter on the surface of the PFA pipes.

[0064] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

Claims

1. A miniaturized ultra-low organic laboratory electronic grade ultrapure water device for stably purifying raw water into electronic grade ultrapure water in a laboratory, characterized by, It includes a housing, a first water tank and a second water tank respectively connected to the housing by pipelines, and a first-stage circulation module, a second-stage circulation module, a cooling module and a control module disposed within the housing. The first-stage circulation module includes a first internal circulation pipeline connected to the first water tank for storing pure water, a first disinfection and degradation unit and a first purification unit disposed on the first internal circulation pipeline, wherein the total organic carbon content of the raw water is less than 2 ppm, the raw water is purified by the purification unit and then input into the first water tank for storage, the total organic carbon content of the water stored in the first water tank is less than 50 ppb, the pure water in the first water tank is subjected to organic degradation by the first disinfection and degradation unit using ultraviolet light, the first purification unit purifies the degraded pure water, and after a predetermined cycle of circulation degradation, the purified water is purified to obtain first ultrapure water with a total organic carbon content of less than 3 ppb. The second-stage circulation module includes a second internal circulation pipeline connected to the second water tank, and a first-stage ultrapure water unit and a second-stage ultrapure water unit installed on the second internal circulation pipeline. The second water tank stores the first ultrapure water. The first-stage and second-stage ultrapure water units are connected in series to remove impurities and organic matter from the first ultrapure water, circulating and degrading it until it is purified into second ultrapure water with a total organic carbon content of less than 1 ppb. The control module controls the water intake of the first water tank and the second water tank respectively. The control module controls the cooling module to assist the first-stage circulation module and the second-stage circulation module in dissipating heat.

2. The ultra-low organic matter type laboratory electronic-grade ultrapure water device according to claim 1, characterized in that, The first internal circulation pipeline includes a first main pipeline and a first branch pipeline. The first main pipeline connects to the first water tank, a three-way valve, a first flow meter, a first disinfection and degradation unit, a first purification unit, and a second flow meter to form a circulation pipeline. The first branch pipeline connects the three-way valve, the first flow meter, the first disinfection and degradation unit, the first purification unit, and the disinfection valve in series to form a circulation pipeline.

3. The ultra-low organic laboratory electronic grade pure water unit of claim 1, wherein, The first purification unit comprises a first ultrapureization column and a second ultrapureization column connected in series. The primary ultrapurification unit comprises a second disinfection and degradation unit, an activated carbon adsorption unit, and a third ultrapurification column; the secondary ultrapurification unit comprises a third disinfection and degradation unit, a fourth ultrapurification column, and a fifth ultrapurification column. The ultra-purification column is an ion exchange column, which can stably achieve the purification indexes of 18.2 MΩ cm, and TOC < 5 ppb.

4. The ultra-low organic laboratory electronic grade pure water unit according to claim 3, wherein The first disinfection and degradation unit, the second disinfection and degradation unit, and the third disinfection and degradation unit are all dual-wavelength ultraviolet components. The dual-wavelength ultraviolet component includes a mounting shell and an ultraviolet lamp sealed in a quartz sleeve. The quartz sleeve is fixedly disposed with the mounting shell, and a fluid flow channel is provided between the mounting shell and the quartz sleeve. The dual-wavelength ultraviolet component includes a 185 nm ultraviolet lamp and a 254 nm ultraviolet lamp.

5. The ultra-low organic laboratory electronic grade pure water unit of claim 4, wherein, The quartz sleeve is made of high-transmittance synthetic quartz glass, with a transmittance of not less than 87% for ultraviolet light in the 185nm band and not less than 90% for ultraviolet light in the 254nm band.

6. The ultra-low organic matter type laboratory electronic-grade ultrapure water device according to claim 3, characterized in that, Raw water is purified into pure water that can be stored in the first water tank through a purification unit. The control module controls the pure water to pass sequentially through a booster pump and then split into two streams after a three-way valve. One stream passes sequentially through a deionized water flow meter and a deionized water outlet solenoid valve to provide deionized water. The other stream of deionized water passes through a first disinfection and degradation unit to sterilize and reduce the total organic carbon content of the deionized water. After the temperature of the deionized water is adjusted by a first temperature controller, it is further purified through a first ultrapure purification column and a second ultrapure purification column. After the water quality of the deionized water is monitored in real time by an online resistivity meter, it is split into two streams again. One stream passes through a disinfection valve and then mixes with pure water at the three-way valve to form a circulation pipeline. The other stream returns to the first water tank to form a circulation pipeline, resulting in first ultrapure water with a total organic carbon content of less than 3 ppb. The control module controls the first ultrapure water to flow into the second water tank, and then controls the first ultrapure water to pass through the circulation pump, the online conductivity meter, the first-stage ultrapure purification unit and the second-stage ultrapure purification unit in sequence before being divided into two paths. One path returns to the second water tank to form a circulation pipeline, and the other path passes through the ultrapure water flow meter and the ultrapure water outlet solenoid valve to provide second ultrapure water with a total organic carbon content of less than 1 ppb.

7. The ultra-low organic laboratory electronic grade pure water unit of claim 3, wherein, Inside the housing, a second internal circulation module is positioned above the first internal circulation module. The second disinfection and degradation unit and the third disinfection and degradation unit are arranged in one side space of the upper part of the shell, and the activated carbon adsorption unit, the third ultrapure column, the fourth ultrapure column and the fifth ultrapure column are arranged in parallel in the other side space, thereby shortening the pipeline for water flow. The first disinfection and degradation unit, the first ultrapure column, and the second ultrapure column are arranged side by side at the bottom of the shell.

8. The ultra-low organic laboratory electronic grade pure water unit of claim 1, wherein, The degradation rate per unit volume in the first-stage circulation module and the second-stage circulation module is based on the formula Q=v A is used for calculation, where the negative sign represents degradation, Q is the volumetric flow rate, and C is the volumetric flow rate. in Where η is the inlet concentration, η is the TOC degradation efficiency, and V is the inlet concentration. bed V represents the effective volume of the activated carbon bed, UV lamp, and terminal filter; v represents the fluid velocity; and A represents the cross-sectional area of ​​the pipeline.

9. The ultra-low organic matter type laboratory electronic-grade ultrapure water device according to claim 1, characterized in that, When the water level in the first water tank drops to the first liquid level, the control module controls the purification unit to purify the raw water and replenish the water in the first water tank. When the water level in the second water tank drops to the second liquid level, the control module controls the first water tank to replenish the water in the second water tank.

10. The ultra-low organic laboratory electronic grade pure water unit of claim 1, wherein, The fittings constituting the first internal circulation pipeline and the second internal circulation pipeline are all PFA fittings that have undergone acid and alkali cleaning.

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